TWI348552B - - Google Patents

Info

Publication number
TWI348552B
TWI348552B TW096142516A TW96142516A TWI348552B TW I348552 B TWI348552 B TW I348552B TW 096142516 A TW096142516 A TW 096142516A TW 96142516 A TW96142516 A TW 96142516A TW I348552 B TWI348552 B TW I348552B
Authority
TW
Taiwan
Application number
TW096142516A
Other versions
TW200921109A (en
Original Assignee
Univ Nat Chiao Tung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Chiao Tung filed Critical Univ Nat Chiao Tung
Priority to TW096142516A priority Critical patent/TW200921109A/zh
Priority to US12/128,804 priority patent/US7946050B2/en
Publication of TW200921109A publication Critical patent/TW200921109A/zh
Application granted granted Critical
Publication of TWI348552B publication Critical patent/TWI348552B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G01R1/07321—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support the probes being of different lengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
TW096142516A 2007-11-09 2007-11-09 Assembly structure of 3D probe array TW200921109A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW096142516A TW200921109A (en) 2007-11-09 2007-11-09 Assembly structure of 3D probe array
US12/128,804 US7946050B2 (en) 2007-11-09 2008-05-29 Three-dimensional microprobe array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096142516A TW200921109A (en) 2007-11-09 2007-11-09 Assembly structure of 3D probe array

Publications (2)

Publication Number Publication Date
TW200921109A TW200921109A (en) 2009-05-16
TWI348552B true TWI348552B (zh) 2011-09-11

Family

ID=40622461

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096142516A TW200921109A (en) 2007-11-09 2007-11-09 Assembly structure of 3D probe array

Country Status (2)

Country Link
US (1) US7946050B2 (zh)
TW (1) TW200921109A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8261428B2 (en) * 2009-11-25 2012-09-11 National Tsing Hua University Method for assembling a 3-dimensional microelectrode structure
JP6221234B2 (ja) * 2012-04-03 2017-11-01 大日本印刷株式会社 複数の突出した針を備える針体治具およびその製造方法
US11185271B2 (en) * 2013-09-13 2021-11-30 University Of Utah Research Foundation Methods of making micro-molded electrodes and arrays
US10327655B2 (en) 2016-04-11 2019-06-25 Paradromics, Inc. Neural-interface probe and methods of packaging the same
WO2018183967A1 (en) 2017-03-30 2018-10-04 Paradromics, Inc. Patterned microwire bundles and methods of producing the same
US11959874B2 (en) 2018-11-29 2024-04-16 International Business Machines Corporation Nanostructure featuring nano-topography with optimized electrical and biochemical properties
US20200170523A1 (en) * 2018-11-29 2020-06-04 International Business Machines Corporation Three-dimensional silicon-based comb probe with optimized biocompatible dimensions for neural sensing & stimulation
CN113655102A (zh) * 2021-08-25 2021-11-16 深圳市溢鑫科技研发有限公司 一种电化学测量微电极结构及其制作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578279A (en) * 1981-05-26 1986-03-25 International Business Machines Corporation Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets
US5091694A (en) * 1989-01-31 1992-02-25 Tokyo Electron Limited Quartz probe apparatus
US5475318A (en) * 1993-10-29 1995-12-12 Robert B. Marcus Microprobe
US5724315A (en) * 1996-05-29 1998-03-03 The United States Of America As Represented By The Secretary Of The Navy Omnidirectional ultrasonic microprobe hydrophone
US6245444B1 (en) * 1997-10-02 2001-06-12 New Jersey Institute Of Technology Micromachined element and method of fabrication thereof
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
US6359757B1 (en) * 1999-06-02 2002-03-19 Maxtor Corporation Electrostatic actuator
TWI224676B (en) 2001-05-09 2004-12-01 Chipmos Technologies Inc Method of manufacturing 3-dimensional probe needles
US7640651B2 (en) * 2003-12-31 2010-01-05 Microfabrica Inc. Fabrication process for co-fabricating multilayer probe array and a space transformer
US7531077B2 (en) * 2003-02-04 2009-05-12 Microfabrica Inc. Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
US7567089B2 (en) * 2003-02-04 2009-07-28 Microfabrica Inc. Two-part microprobes for contacting electronic components and methods for making such probes
TW200534519A (en) * 2003-12-31 2005-10-16 Microfabrica Inc Probe arrays and method for making
WO2006031280A2 (en) * 2004-09-13 2006-03-23 Microfabrica Inc. Probe arrays and method for making
US20060212978A1 (en) * 2005-03-15 2006-09-21 Sarah Brandenberger Apparatus and method for reading bit values using microprobe on a cantilever
TW200744534A (en) * 2006-06-09 2007-12-16 Univ Nat Chiao Tung Microprobe array structure and manufacturing method thereof
KR100775415B1 (ko) * 2006-06-19 2007-11-12 주식회사 코넴 전기적 검사 장치 제조 방법
EP1985579B1 (en) * 2007-04-27 2018-01-10 IMEC vzw Connecting scheme for the orthogonal assembly of microstructures

Also Published As

Publication number Publication date
TW200921109A (en) 2009-05-16
US20090120216A1 (en) 2009-05-14
US7946050B2 (en) 2011-05-24

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees