TWI348198B - Wafer carrier - Google Patents

Wafer carrier

Info

Publication number
TWI348198B
TWI348198B TW096130382A TW96130382A TWI348198B TW I348198 B TWI348198 B TW I348198B TW 096130382 A TW096130382 A TW 096130382A TW 96130382 A TW96130382 A TW 96130382A TW I348198 B TWI348198 B TW I348198B
Authority
TW
Taiwan
Prior art keywords
wafer carrier
wafer
carrier
Prior art date
Application number
TW096130382A
Other languages
Chinese (zh)
Other versions
TW200910493A (en
Inventor
Archer Chen
Eric Lo
Original Assignee
Gintech Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gintech Energy Corp filed Critical Gintech Energy Corp
Priority to TW096130382A priority Critical patent/TWI348198B/en
Publication of TW200910493A publication Critical patent/TW200910493A/en
Application granted granted Critical
Publication of TWI348198B publication Critical patent/TWI348198B/en

Links

TW096130382A 2007-08-16 2007-08-16 Wafer carrier TWI348198B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096130382A TWI348198B (en) 2007-08-16 2007-08-16 Wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096130382A TWI348198B (en) 2007-08-16 2007-08-16 Wafer carrier

Publications (2)

Publication Number Publication Date
TW200910493A TW200910493A (en) 2009-03-01
TWI348198B true TWI348198B (en) 2011-09-01

Family

ID=44724383

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096130382A TWI348198B (en) 2007-08-16 2007-08-16 Wafer carrier

Country Status (1)

Country Link
TW (1) TWI348198B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI567817B (en) * 2015-04-30 2017-01-21 中勤實業股份有限公司 Cassette for carrying solar cells and producing the solar cells using thereof

Also Published As

Publication number Publication date
TW200910493A (en) 2009-03-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees