TWI347298B - Mems microphone and packaging method thereof - Google Patents
Mems microphone and packaging method thereofInfo
- Publication number
- TWI347298B TWI347298B TW097106823A TW97106823A TWI347298B TW I347298 B TWI347298 B TW I347298B TW 097106823 A TW097106823 A TW 097106823A TW 97106823 A TW97106823 A TW 97106823A TW I347298 B TWI347298 B TW I347298B
- Authority
- TW
- Taiwan
- Prior art keywords
- packaging method
- mems microphone
- mems
- microphone
- packaging
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097106823A TWI347298B (en) | 2008-02-27 | 2008-02-27 | Mems microphone and packaging method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097106823A TWI347298B (en) | 2008-02-27 | 2008-02-27 | Mems microphone and packaging method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200936491A TW200936491A (en) | 2009-09-01 |
TWI347298B true TWI347298B (en) | 2011-08-21 |
Family
ID=44866852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097106823A TWI347298B (en) | 2008-02-27 | 2008-02-27 | Mems microphone and packaging method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI347298B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI549522B (en) * | 2012-12-14 | 2016-09-11 | 美律實業股份有限公司 | Mems microphone |
US9400224B2 (en) | 2014-09-12 | 2016-07-26 | Industrial Technology Research Institute | Pressure sensor and manufacturing method of the same |
WO2016102924A1 (en) | 2014-12-23 | 2016-06-30 | Cirrus Logic International Semiconductor Limited | Mems transducer package |
-
2008
- 2008-02-27 TW TW097106823A patent/TWI347298B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW200936491A (en) | 2009-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |