TWI347298B - Mems microphone and packaging method thereof - Google Patents

Mems microphone and packaging method thereof

Info

Publication number
TWI347298B
TWI347298B TW097106823A TW97106823A TWI347298B TW I347298 B TWI347298 B TW I347298B TW 097106823 A TW097106823 A TW 097106823A TW 97106823 A TW97106823 A TW 97106823A TW I347298 B TWI347298 B TW I347298B
Authority
TW
Taiwan
Prior art keywords
packaging method
mems microphone
mems
microphone
packaging
Prior art date
Application number
TW097106823A
Other languages
Chinese (zh)
Other versions
TW200936491A (en
Inventor
Kuo Ting Lin
Te Jung Hsu
Original Assignee
Qisda Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qisda Corp filed Critical Qisda Corp
Priority to TW097106823A priority Critical patent/TWI347298B/en
Publication of TW200936491A publication Critical patent/TW200936491A/en
Application granted granted Critical
Publication of TWI347298B publication Critical patent/TWI347298B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/11—Manufacturing methods
TW097106823A 2008-02-27 2008-02-27 Mems microphone and packaging method thereof TWI347298B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097106823A TWI347298B (en) 2008-02-27 2008-02-27 Mems microphone and packaging method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097106823A TWI347298B (en) 2008-02-27 2008-02-27 Mems microphone and packaging method thereof

Publications (2)

Publication Number Publication Date
TW200936491A TW200936491A (en) 2009-09-01
TWI347298B true TWI347298B (en) 2011-08-21

Family

ID=44866852

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097106823A TWI347298B (en) 2008-02-27 2008-02-27 Mems microphone and packaging method thereof

Country Status (1)

Country Link
TW (1) TWI347298B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI549522B (en) * 2012-12-14 2016-09-11 美律實業股份有限公司 Mems microphone
US9400224B2 (en) 2014-09-12 2016-07-26 Industrial Technology Research Institute Pressure sensor and manufacturing method of the same
WO2016102924A1 (en) 2014-12-23 2016-06-30 Cirrus Logic International Semiconductor Limited Mems transducer package

Also Published As

Publication number Publication date
TW200936491A (en) 2009-09-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees