TWI346767B - Self referencing heterodyne reflectometer and heterodyne reflectometer for measuring thickness of a target layer deposed on a substrate
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Self referencing heterodyne reflectometer and heterodyne reflectometer for measuring thickness of a target layer deposed on a substrate
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Priority claimed from US11/528,732external-prioritypatent/US7589843B2/en
Application filed by Verity Instr IncfiledCriticalVerity Instr Inc
Publication of TW200837326ApublicationCriticalpatent/TW200837326A/zh
Application grantedgrantedCritical
Publication of TWI346767BpublicationCriticalpatent/TWI346767B/zh
TW096136037A2006-09-272007-09-27Self referencing heterodyne reflectometer and heterodyne reflectometer for measuring thickness of a target layer deposed on a substrate
TWI346767B
(en)