TWI346370B - - Google Patents

Info

Publication number
TWI346370B
TWI346370B TW096127180A TW96127180A TWI346370B TW I346370 B TWI346370 B TW I346370B TW 096127180 A TW096127180 A TW 096127180A TW 96127180 A TW96127180 A TW 96127180A TW I346370 B TWI346370 B TW I346370B
Authority
TW
Taiwan
Application number
TW096127180A
Other languages
Chinese (zh)
Other versions
TW200905797A (en
Original Assignee
Univ Nat Cheng Kung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Cheng Kung filed Critical Univ Nat Cheng Kung
Priority to TW96127180A priority Critical patent/TW200905797A/zh
Publication of TW200905797A publication Critical patent/TW200905797A/zh
Application granted granted Critical
Publication of TWI346370B publication Critical patent/TWI346370B/zh

Links

TW96127180A 2007-07-26 2007-07-26 Fabricating method of IC back-end copper interconnection with copper barrier TW200905797A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96127180A TW200905797A (en) 2007-07-26 2007-07-26 Fabricating method of IC back-end copper interconnection with copper barrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96127180A TW200905797A (en) 2007-07-26 2007-07-26 Fabricating method of IC back-end copper interconnection with copper barrier

Publications (2)

Publication Number Publication Date
TW200905797A TW200905797A (en) 2009-02-01
TWI346370B true TWI346370B (enExample) 2011-08-01

Family

ID=44722862

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96127180A TW200905797A (en) 2007-07-26 2007-07-26 Fabricating method of IC back-end copper interconnection with copper barrier

Country Status (1)

Country Link
TW (1) TW200905797A (enExample)

Also Published As

Publication number Publication date
TW200905797A (en) 2009-02-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees