TWI345534B - - Google Patents

Description

1345534 IX. Description of the Invention: [Technical Field] The present invention relates to a temperature regulating plate (a thermal transfer molding machine that transfers a concave-convex pattern to a substrate by 12) and a thermal transfer mold having the temperature regulating plate. mechanical. [Prior Art] As a manufacturing method of a light guide plate or the like having a fine uneven pattern on its surface, there has been a thermal transfer molding machine which heats a stamper having a concave-convex pattern formed on its surface by a thermoplastic resin sheet. The base material is pressurized, and the uneven pattern of the stamper is transferred to the substrate (for example, JP-A Publication (Panel 1). The thermal transfer molding machine is provided with a fluid passage for heating in the upper mold and the lower mold, and the upper mold and the lower mold are heated by circulating the fluid through the fluid passages, thereby heating and mounting the upper mold and the lower mold. Die of the mold. SUMMARY OF THE INVENTION However, in such a thermal transfer molding machine, when a fluid is circulated through a fluid passage to heat the upper mold and the lower mold, the upper mold and the lower mold may be deformed by heat and warp, causing warpage of the mold. . In this case, the uneven pattern of the stamp cannot be transferred to the substrate well, and a light guide plate having good quality cannot be obtained. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a temperature regulating plate capable of preventing warpage and transferring a concave-convex pattern well, and a heat transfer molding machine including the temperature regulating plate. The temperature regulating plate of the present invention is provided on a thermal transfer molding machine for transferring a concave-convex pattern formed on a surface of a stamper to a surface of a substrate, and the stamper can be mounted and the temperature of the stamper can be adjusted. The present invention is characterized in that a flow path for regulating the flow of the temperature of the temperature regulating plate is formed inside, and a flow path is formed at substantially the center of the thickness direction of the temperature regulating plate at 5 1345534. According to the present invention, since the flow path is formed in the thickness direction of the temperature regulating plate: the center is formed, when the fluid is caused to flow through the flow path to heat or cool the temperature regulating plate, the heat can be distributed in the thickness of the temperature regulating plate. The β & + twist direction is roughly symmetrical. According to this, even when the temperature regulating plate expands or contracts due to heat, it can prevent the warpage of the temperature regulating plate. This can also prevent the warpage of the stamper, s ^ , and the bump pattern is surely transferred to the substrate. In the temperature regulating plate of the present invention, the 'flow path is preferably ^ m field formed to have a substantially circular cross section. According to the present invention, since the flow path is formed to have a substantially zero cross-sectional shape, the operation of forming the flow path in the plate body can be easily performed. Moreover, when the temperature regulating plate is used in a thermal transfer molding machine, since the temperature regulating plate (four) is required to have a certain degree on the substrate, it is required to have a certain cross-sectional shape. _, therefore, no stress concentration occurs in the inner circumference of the flow path, and the strength of the temperature regulation plate can be improved. In the temperature regulating plate of the present invention, the opening of the one end surface of at least the path of the temperature regulating plate is opened, and the sealing is performed in a mechanically tight state, for example, a bolt of a patch, according to the present invention. At least one end face is formed, inside, and again, due to the opening of the flow path

Preferably, the flow path is formed by an end face extending toward the other end face; the flow port portion is mechanically sealed. The seal refers to an action of pressing in a plunger or a locking operation in a state in which the member for sealing is not dissolved, which corresponds to this. Since the flow path passes through the width direction of the temperature regulating plate, the flow path can be formed to be mechanically sealed from the outside to the mouth portion of the plate body. Therefore, it is not necessary to separately form the welding path in the plate body when sealing is performed at 6 1345534. . Also, the heat is distorted. The operation "can be carried out simply by not performing welding or the like, so that the plate body is produced in the temperature regulating plate of the present invention, and the first step is preferably a plurality of wires, and the flow path is provided with a plurality of strips. The distance between the flow paths is smaller than the thickness of the temperature regulating plate. According to the present invention, the temperature adjustment of the β Μ嗍 / plate and the pressure can be efficiently performed by passing through the fluid in the plurality of flow paths. Moreover, since the distance between the flow paths is smaller than the continuation, the thickness of the plate is adjusted, so that the temperature can be transmitted to the surface in a state where the temperature is uniform inside the temperature control plate. Accordingly, there is no possibility that the distribution of the surface temperature does not start, and mr_ 邛 is uneven, and the transfer failure due to the uneven temperature distribution of the stamper is prevented. Preferably, in the fox panel of the present month, a connecting portion is formed at an end portion of the temperature regulating plate, and the connecting portion is connected to a communicating socket for connecting the flow path and the external flow path; The department is mechanically connected to the connected socket. Here, the term "mechanical connection" refers to a connection that is made in a state in which the connection portion, the communication tube holder, and the member for connecting the members are not dissolved. For example, the communication tube holder is fixed to the connection portion by a bolt, that is, This is equivalent to this. According to the present invention, since the connection portion and the communication tube holder are mechanically connected, it is not necessary to perform another operation such as splicing at the time of connection, so that the communication tube holder can be easily attached to the connection portion. operation. Moreover, the plate body is not thermally distorted by welding or the like. The temperature regulating plate of the present invention is disposed on a thermal transfer molding machine for transferring the concave-convex pattern formed on the surface of the stamp to the surface of the substrate, and can be mounted with a stamper and can adjust the temperature of the stamper 5534 = a flow path through which a fluid flow for adjusting the temperature of the temperature regulating plate is formed, and a connecting portion is formed at an end of the temperature regulating plate. The connecting portion is connected to communicate the flow path and the external flow path. The connecting socket; the pressing mold can be installed in an area other than the connecting portion. According to the present invention, since the stamper can be attached to a region other than the joint portion, the cross-sectional shape of the temperature regulating plate is substantially equal to that of the stamper. Accordingly, warpage of the stamper can be prevented, and the embossed pattern can be surely transferred to the φ soil material, and the temperature of the stamper can be made uniform, whereby the transfer of the concave-convex pattern can be made good. In the temperature regulating plate of the present invention, the connecting portion is preferably mechanically connected to the connecting pipe holder. According to the present invention, it is not necessary to perform another work such as splicing when the connection portion and the communication header are connected. Therefore, the operation of attaching the common official seat to the connection portion can be easily performed. χ, the plate body is not thermally distorted by the welding or the like. • In the temperature regulating plate of the present invention, the connecting portion is preferably provided to protrude from the temperature regulating plate. According to the present invention, since the connecting portion is to be joined The protruding portion is formed to have a mounting margin when the communication seat is attached to the temperature regulating plate, so that the plate of the temperature regulating plate of the stamp mounting portion can be made thinner. Thereby, the thermal transfer molding machine can be made smaller. Further, the temperature rise and fall speed of the stamper mounting portion can be made relatively fast. The temperature regulating plate of the present invention is provided on a thermal transfer molding machine for transferring the concave-convex pattern formed on the surface of the stamp to the surface of the substrate, and the stamper 8 1345534 can be mounted and the temperature of the stamper can be adjusted. The first positioning hole and the second positioning hole for defining a mounting position of the temperature regulating plate to the thermal transfer molding machine, wherein the second positioning hole is a long hole shape, and the long axis thereof and the first The center of the positioning hole is substantially parallel to the line connecting the center of the second positioning hole. According to the present invention, since the position of the temperature regulating plate to the thermal transfer molding machine can be specified by the formation of the first positioning hole and the second positioning hole, the mounting work for the thermal transfer molding machine can be facilitated. Further, since the second positioning hole has a long hole shape, even if the temperature regulating plate expands or contracts due to heat, the amount of expansion or the amount of contraction can be allowed. According to this, it is possible to prevent the deformation of the temperature regulating plate and prevent the warpage of the stamper from occurring. Therefore, the uneven pattern g of the stamp can be favorably transferred to the substrate. Moreover, since the deformation of the temperature regulating plate can be prevented, the stress concentration of the temperature regulating plate is not generated, and the durability of the temperature regulating plate can be improved, and further, since the second positioning hole is connected by the 'system line The position of the second positioning hole in the first position and the center is configured to 'expand the temperature plate to expand or contract along the line. According to this, it is possible to prevent the temperature regulating plate from being rotated around the first positioning hole, thereby preventing the change in the angle of the decoration of the concave-convex pattern of the stamper. According to the above, the concave-convex pattern of the stamp can be transferred to the substrate with a correct orientation. In the temperature regulating plate of the present invention, the first positioning hole and the second positioning hole are preferably arranged along the longitudinal direction of the temperature regulating plate. According to the present invention, since the temperature regulating plate is formed to have a substantially rectangular shape in plan view, when the fluid is caused to flow through the flow path, the temperature regulating plate is greatly expanded or contracted along the long side due to the heat. Here, the first positioning hole and the second positioning hole are arranged substantially parallel to the longitudinal direction of the temperature regulating plate, so that the amount of expansion or contraction can be surely obtained. 8 9 The thermal transfer molding machine of the present invention has the above-mentioned temperature regulating plate of the present invention, characterized in that: the temperature regulating plate is disposed opposite to each other; the first positioning hole of the temperature regulating plate is configured to be The first positioning hole of a temperature regulating plate is opposite. g According to the invention, since one of the pair of temperature regulating plates is disposed oppositely, the first positioning hole g of one temperature regulating plate is placed opposite to the first positioning hole 2 of the other temperature regulating plate, so a pair of temperature adjustment When the plates are expanded or contracted in the same direction during thermal expansion or contraction, the relative positional deviation of the temperature regulating plates can be prevented. Thereby, the stamper can be transferred to the substrate only by the uneven pattern. The thermal transfer molding machine of the present invention is characterized by comprising any of the above-described temperature regulating plates of the present invention. According to the present invention, since the thermal transfer molding machine is provided with the above-described temperature adjustment, the same effect as that of the temperature adjustment plate described above can be obtained, and the stamper can be prevented from transferring the uneven pattern to the substrate. [Embodiment] [First Embodiment] Hereinafter, a first embodiment of the present invention will be described based on the drawings. Fig. 1 is a general view showing a thermal transfer molding machine i according to a third embodiment of the present invention. In the present embodiment, the thermal transfer molding machine is manufactured by thermally transferring a concave-convex pattern to the substrate 5 (see FIG. 3) to manufacture a light guide plate for a backlight of a liquid crystal display. Here, the light guide plate The size can be, for example, a light guide plate having a thickness of about 0.5 mm to 8 mm and a thickness of 17 inches. Further, as the substrate 5, for example, a plate-like member made of a thermoplastic resin such as acrylic or polycarbonate can be used. As shown in Fig. 1, the 'thermal transfer molding machine 1 has four pillars u, 10 1345534 erected on the bottom bed 10 (only two of which are shown in Fig. 1); the top plate 12' is disposed on the column 11 The sliding member 13 is disposed under the top plate 12 so as to be movable up and down; the frame 14 is disposed opposite to the sliding member 13 and disposed on the bottom bed 10; the heat insulating material 15 is respectively mounted on the sliding member 1 3 below and above the shelf 14; the temperature regulating plate 丨6 is separately installed through the insulating material 1 $; the stamper 1 7 ' is mounted on the temperature regulating plate 16; and the vacuuming device for molding 18 is attached to the thermal transfer When the mold is pressed, the periphery of the stamper 17 is brought into a vacuum state. A slider driving device 13G (refer to FIG. 1A) for moving the slider 13 up and down is mounted in the interior of the top plate 12, and when the slider member 1 μ is moved up and down by the slider driving device 1 μ, the opposite direction can be made. The stampers 17 are close to or away from each other, so as to press the embossing of the embossing material disposed between the stampers 17 and the slabs. A plurality of guides (four in this embodiment) are arranged between the slider 13 and the carrier 14 in the up and down direction, and the guide member 13A is guided to guide the slider n to move up and down. Further, the slider driving device 130 is provided with a fuel cylinder capable of discharging the slider 13 . The feeding motor in the position-and-position position or Fig. 2 shows the enlarged view of the embodiment. χ^ ...p Partial enlargement of the press machine 1 The X ® 3 series shows the heat transfer molding machine as shown in Fig. 2 and Fig. 3, _ above. Such a hot material 15 is provided to prevent the teaching from [...], having a predetermined thickness, by which the temperature regulating plate 16 is moved to the slider 丨 the temperature regulating plate 16, respectively, and the g & or the carrier 14 is moved. Knife is J close to women's clothing in the 埶 埶 调 调 调 及 及 及 及 及 技 技 技 技 技 技 » » » » 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 17 Two light guide plates are manufactured. That is, the primary mold 1345534 is performed. Fig. 4 is a view showing the lower side of the temperature regulating plate 16 of the present embodiment. Fig. 5 is a side view showing the circular cross section of the humidity control plate 16. Thus, Fig. 4 and Fig. As shown in Fig. 5, the temperature regulating plate 16 is made of iron, and includes a plate body portion 16A formed in a plate shape, and a connecting portion 162 formed on both sides of the plate body portion 61. The plate body portion 161 has a thickness It is approximately 1〇111111 and is formed in a substantially rectangular shape in plan view, and one surface thereof is closely attached to the heat insulating material 15. Inside the plate body portion 161, a plurality of flow paths 163 through which the fluid flows are formed. The flow path 163 is along the plate portion ι6 The longitudinal direction is formed to be parallel to each other at a distance of about 7 mm, and is formed from one end surface of the plate portion ι6 to the other end surface. The opening portions of the end portions of the flow paths 163 are all by the plunger 163A (refer to W 2 The valve 163' is formed into a diameter, and the cross section of about 5 mm is substantially circular, and its circular center is disposed at The plate body 161 is substantially at the center in the thickness direction. Since the cross-sectional shape of the flow path 163 is formed into a substantially circular shape, it is also possible to easily manufacture the flow path 163 in the planar direction of the plate-like plate portion ΐ6. Since the flow path 163 is formed in line symmetry in the thickness direction of the plate portion 161 and centered on the center of the flow path 163, the temperature regulating plate can be made when the fluid flow path 163 is heated or cooled by the temperature regulating plate 16. The expansion and contraction of the 16 is symmetrical in the thickness direction. According to this, it is possible to prevent the warp of the temperature regulating plate 16 well, and it is possible to surely prevent the transfer failure of the concave-convex pattern of the stamper η. Here, the flow path 163 is preferably inside. The area of the circumference is set to be large, so that the heat of the fluid flowing inside can be well transmitted to the temperature control & 16, to quickly perform the heating of the temperature regulating plate 16 and the stamper 17 attached to the temperature regulating plate 16 and/or Or cooling. Specifically, a method of making the cross-sectional diameter of the flow path 163 larger or making the distance between the flow paths 163 smaller may be considered. 12 丄J幷JJJ The warm plate 16, which is pressurized between the sliders 14 of the slider 13, Therefore, it is necessary to ensure the strength of a certain 〃 ', 163 „. As described above, the shape and size of the flow path 163 are appropriately set. 4 (4) After considering the above conditions, it is made to be 'between the flow paths 163'. When the distance between them is too large, the distance between the flow path 163 and the surface of the temperature regulating plate 1 is such that the distance between the red seals and the flow paths 163 is shorter, so that the fluid flowing through the flow path 163 is 埶, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The temperature distribution of the stamper 17 on the surface of the plate 16 is also not burnt, and 呷J is small, causing the transfer to be good. Accordingly, the distance between the flow paths 163 is preferably made smaller than the thickness of the plate portion 161, so that the distance between the flow paths 163 is shorter than the distance between the surfaces of the flow path 163 and the temperature regulating plate 16. On both sides in the short-side direction of the plate body portion 161 in the plan view (the state of FIG. 4), it is useful to attach the temperature regulating plate 16 to the mounting hole 164 of the heat insulating material 15. The mounting holes 164 are formed at three sides in the longitudinal direction of the plate (four) 161 in the plate body portion 161 formed on the both sides in the short-side direction of the region where the flow path 163 is formed, and are formed at six places in total. The temperature regulating plate 16 is attached to the heat insulating material 丨5 by passing the thread 164A through the mounting holes 164 (see Fig. 3). Further, the mounting holes 164 are formed in a pair of temperature regulating plates 6 in a different arrangement. That is, in a state where a pair of temperature regulating plates 16 are disposed opposite to each other, the wires 164 are attached to each other, and their center positions are not uniform, and are formed adjacent to each other along the longitudinal direction of the plate body portion ΐ6ι. With this arrangement, it is possible to prevent the head of the thread 164A of the through-temperature-regulating plate 16 from which the 13-hole 164 is attached and the head of the bolt 164A penetrating against each other when the pair of temperature-regulating plates 16 approach each other. Further, 'the hole of the mounting hole 16 4; -f* p L size' is formed to be slightly larger than the diameter of the bolt 164A, so that the plate body 胄161 is formed even if the flow path 163 of the plate body portion (6) flows due to steam or water. When telescopic, the amount of expansion and contraction can also be tolerated. According to this, stress concentration, deformation, and the like due to expansion and contraction of the plate body portion 161 can be prevented. : adjacent to the women's hole 1 64, adjacent to the long side of the temperature control & i 6

The position is formed with a bolt doping hole having a larger diameter than the mounting hole 164. The threaded dodging hole 165' is formed to be through the mounting hole 164 of the temperature regulating plate 16 facing the temperature regulating plate. The head does not interfere with the temperature regulating plate 16. For example, when the thickness dimension of the substrate 5 or the thickness dimension of the stamper is molded by JN·β so that the temperature regulating plates i 6 are close to each other, the bolt 164A of the temperature regulating plate 丄6 may interfere with the temperature adjustment &; i6. In this embodiment, i, and the bolt dosh hole 1 65 are formed, so that such a defect can be eliminated.

It ON / * = this, because the thickness of the substrate 5 is small, it can also be heat

The temperature regulating plate 16 mounting hole 164 is transferred and molded: L ′ so that the versatility of the thermal transfer molding machine # i can be improved. Further, since the thickness of the stamper can be made small, the heat capacity of the stamper 17 can be reduced, and the stamper 7 can be heated and cooled in a short time. Here, the bolt doping hole 65 is formed to have a larger diameter than the mounting hole 64, and has a larger size than the head of the bolt 164A. By this shape, the temperature regulating plate 16 is even in a certain size range. Internal expansion and contraction can also allow it to expand and contract. A positioning hole 166 is formed in the plate body portion 161' to position the temperature regulating plate 6 at the positioning hole 166 of the heat insulating material 15, and is disposed on the short side of the plate portion ΐ6ι 8 14 1345534

At two positions on one end side of the direction, the positioning holes 166 are arranged along the longitudinal direction of the plate portion 16i. The positioning holes 166 pass through the positioning pins 14A (see Fig. 3) which are protruded from the heat insulating material 15, the slider 13, and the holder 14. The positioning hole (first positioning hole) 166A in the positioning hole 166 is formed in a substantially circular shape, and its aperture is set to be substantially the same as the diameter of the positioning pin 14A. Moreover, the other positioning hole (second positioning hole) 166B of the positioning hole 166 is formed into a substantially elliptical long hole shape, and the long axis thereof is along a line connecting the center of one positioning hole 166A and the center of the other positioning hole 166B. It is arranged, that is, arranged along the longitudinal direction of the plate body portion 161. Further, the dimension of the positioning hole 166B in the minor axis direction is set to be substantially the same as the diameter of the positioning pin 14A. Accordingly, the temperature regulating plate 16 determines the position in the short side direction by the positioning hole 166A and the positioning hole 166B, and determines the position in the longitudinal direction by (4) 166A $ . X, when the position of the positioning pin 14A is shifted due to the expansion or contraction of the plate 161 or the addition of an I error, the positional deviation can be absorbed by the long hole shape of the positioning hole 166B. According to this, when the temperature regulating plate 16 expands and contracts due to heat, that is, the t-position is stretched in the longitudinal direction of the temperature regulating plate 16, the rotation of the temperature regulating plate 16 can be prevented. Therefore, the swirling of the dust mold attached to the temperature regulating plate 16 can be prevented, and the relative positional deviation of the concave-convex pattern on the substrate 5 can be prevented. Further, the long-axis direction of the other positioning hole 166B is not limited to being disposed along the center of the connection-positioning hole 166A and the other-positioning hole arrangement ' as long as it is substantially parallel to the line. The line of the center of the 166B may have a slight angle 166, although it is disposed at a temperature regulating plate 16, formed on a long side of the pair of temperature regulating plates 6 opposite to each other, but in a temperature regulating plate 16 and another 15 1345534 The positioning hole 166A is formed with a positioning hole ι 66 at a position opposite to the positioning hole 166A, and a positioning hole 166 is formed at a position of a temperature regulating plate 16 opposed to the positioning hole i 66 of the other temperature regulating plate 16. With this configuration, the pair of temperature regulating plates 16 can be restricted in position by positioning holes 166 对 opposite to each other, and the moving direction is restricted by the positioning holes 166 对 opposite to each other, whereby a pair of temperature regulating plates 16 are provided. Since the positioning holes 166 分别 are respectively mounted so as to be expandable and contractible to some extent, when the pair of temperature regulating plates 伸缩 6 are expanded and contracted, the offset of the relative positions of the pair of stampers 能 can be prevented. Here, another positioning hole When the long axis direction of 166 夹 is a predetermined angle with a line connecting the center of one positioning hole 166 与 and the center of the other positioning hole 166β, the predetermined angle is preferably set to be substantially equal to the temperature regulating plate 16 In this case, in the case where the pair of temperature regulating plates 16 are opposed to each other, the longitudinal direction of the positioning holes 166 is substantially uniform. As a result, due to the expansion and contraction of the pair of temperature regulating plates 16, the positional displacement of the pair of stampers 17 can be prevented. Further, in the present embodiment, the positioning hole (6) is formed in the temperature regulating plate 16, and the positioning pin "A" is formed in the heat insulating material 15, the slider 13, or the frame 14, but the present invention is not limited thereto. The temperature plate 16 is provided with a positioning pin: ◎, or a frame Μ forms a positioning hole. In other words, as long as: the temperature, the heat insulating material 15, the sliding member 13, or the carrier 14 form a position pin, formed on either side. The connecting portion, 162, and the respective portions in the longitudinal direction of the plate portion are formed along the short side so as to be formed so as to protrude from the plate body portion 161 in the thickness direction. Therefore, the entire temperature regulating plate is formed as The shape of the side cross section is substantially [: the dedicated connecting portion 162, along the 柘驴 1 ή 1 々 | 〜 〜 〜 板 板 板 板 161 板 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 The passages 1 63 are in communication with each other. The opening portion of the recessed portion 167 is sealed by attaching the plunger 168 (see Fig. 2) to one of the two recessed portions 167. Further, it is provided substantially at the center in the short side direction of the other recessed portion 丨67. The wall portion 169 of the partition recess 167 is separated from the recess portion 167 by the wall portion 169. That is, the flow path 1 One half of 63 is connected to one of the recesses 167A separated by the wall portion 169, and the other half is connected to the other recess 167B.

The connecting portion 162 provided on the side of the wall portion 169 is mechanically connected to the manifold 19 by a sealing member (the connecting socket is used. See Figs. 2 and 3). The manifold 19 is provided with a recess 191 corresponding to the shape of the recess 167 of the coupling portion 162, and a plurality of branches (six of the present embodiment) communicating with the recess 191. One half (three) of these pipes communicates with one of the recesses 167A separated by the wall portion, and the other half (three branches) communicates with the other recess 167B. The pipe 192 is protruded to the outside by a through-compression vacuum, and its end portion is connectable to a fluid supply device 3 (see Fig. 1G) for supplying a fluid to the flow path 163. Further, in the present embodiment, steam or water is used as the fluid flowing through the flow path 163. Installed in opposite directions to each other. In other words, the connecting portion 162 of the temperature regulating plate attached to the slider 13 is disposed so as to be attached upward to the connecting portion of the temperature regulating plate i of the rack 14! 62 is configured to face down. With this configuration, the opposing joint portions do not interfere with each other when the pair of the temperature plates 16 approach each other. °

Further, the longitudinal direction of the temperature regulating plate 16 is arranged in a direction substantially perpendicular to the direction in which the workpiece of the thermal transfer molding machine U is conveyed (the direction 17 orthogonal to the plane of the paper of FIG. i, whereby for example, mold exchange, etc. When the transfer molding machine 1 is moved in the left-right direction, the pipe 192 does not interfere with the column 11, so that the frame 14 can be moved without removing the temperature regulating plate 16. Next, the temperature regulating plate 16 It is manufactured by the following steps. Here, Fig. 6 to Fig. 9 are schematic diagrams for short description. First, as shown in Fig. 6, at the center of the thickness direction of the plate body 16 (for manufacturing) A plurality of through holes penetrating from the one end surface to the other end surface and parallel to each other in the longitudinal direction of the plate body 16Α are formed by a cylindrical drill or the like at a position on the mounting side of the stamper 17 to form a flow path. 163. Next, as shown in Fig. 7, the central portion of the longitudinal direction of the plate member 16 is roughly cut out to form a plate portion 丨6丨. The plate portion is cut into a heat insulating material 15 The mounting surface, the protruding portion at both ends is the connecting portion M2. The cutting amount of the fixed plate member 16A is such that the flow path 163 is located substantially at the center in the thickness direction of the plate body portion 161. Further, in the connecting portion 162, the short side direction of the temperature regulating plate 16, that is, the connecting portion 162 In the longitudinal direction, the mounting faces of the plunger 168 and the manifold 19 are drilled to form the recess 167. Next, as shown in Fig. 8, the plunger 163A is pressed into the opening portions at both ends of each flow path 163 to be mechanically sealed. The flow path 163. Thereafter, as shown in Fig. 9, a hole ' is formed in both sides of the concave portion 167 of the joint portion 162 to form a plunger 170 and a manifold 1 9 attached to the top portion 170 of the joint portion i 62. The mold 17 is formed in a substantially rectangular plate shape and is made of nickel, and the thickness of 18 1345534 is set to about 〇3 mm. The stamper I? is mounted on the temperature regulating plate 16 and the frame 14 below the slider 13 respectively. In addition, the plate 丨6 is formed with a fine concavo-convex pattern on the surfaces (surfaces) facing each other of the stamper 17. In the embodiment, the stamper 17' is used as a backlight for the liquid crystal display. The light guide plate and the concave-convex pattern are a 稜鏡 pattern, but the uneven pattern is not limited thereto, and may be transferred according to Any pattern, such as a dot pattern, etc., is used. The stamper 17 is attached to the temperature regulating plate 16 by a tape and a suitable method. In addition, the size of the stamper 17 is _^, inch inch The plate body portion 161 of the temperature regulating plate 16 and the stamper 17 are disposed at a portion of the temperature regulating plate 10 which is sighed inside the portion of the connecting portion J 62 (in FIG. 3, the shackle _, . . . According to this configuration, since the stamper 17 is disposed in the plate body portion 161 having a uniform thickness in the temperature regulating plate, the stamper w can be made uniform. Therefore, the transfer performance of the concave-convex pattern can be improved. Here, the 5-week temperature plate 16 and the title 17^ die 17' are preferably thermally expanded in order to prevent relative positional deviation from each other due to expansion or the like. Materials with similar coefficients form 'and the same material is illusory and better. In the present embodiment, the temperature regulating plate 16 is made of iron, and 懕楛, α, and 。 are composed of a combination of heat expansion rates close to each other. The pressurizing vacuum device 18 is provided with a pair of wall portions 丨81 which are separated from the lower side of the slider 13 and above the frame 14, and a 环-shaped ring _8 which is provided on the wall portion 1 and is used to make the wall The area surrounded by the portion 181 becomes a vacuum unillustrated hole suction device. The wall portion 18 is disposed in a substantially rectangular ring shape so as to surround the stamper 17, the temperature regulating plate, and the outer circumference of the heat insulating material 15 . The Ο-shaped ring 182 is attached to the end surface of the opposite wall portion 181. 19 1345534 Fig. 1 shows a block diagram of a thermal transfer molding system 1 热 using a thermal transfer molding machine 1 for thermal transfer molding. As shown in Fig. 6, the thermal transfer molding system 100 is provided with a thermal transfer molding machine 1, and a fluid supply device 3 for supplying a fluid to the flow path 163 of the temperature regulating plate 16. The thermal transfer molding machine 1 includes a pressure regulator (pressure adjusting mechanism) 21 for adjusting the vapor pressure of the flow path flowing through the temperature regulating plate 16 in addition to the above-described respective constituent members, and a flow rate adjuster (flow rate adjusting mechanism) 22, the flow rate of the water flowing through the flow path 163 is adjusted; the on-off valve 23 is disposed on both sides of the flow path 163 of the temperature regulating plate 16; and the temperature sensor 24' as the temperature detecting means detects the temperature regulating plate 16 The temperature and the controller 25' as the control mechanism control the operation of the pressure regulator 21, the flow regulator 22, the on-off valve 23, and the slider 13 based on the signal from the temperature sensor 24. The pressure regulators 2 1 are independently provided to a pair of temperature regulating plates 丨6. According to this configuration, the pressure of the vapor flowing through the flow path 163 of the pair of temperature regulating plates 16 can be independently controlled, and the heating temperature of the temperature regulating plate 16 can be independently controlled and adjusted. Further, the pressure regulator 21 is provided on the inlet side (pressure regulator 21A) and the outlet side (pressure regulator 2iB) of the flow path 163 of each temperature regulating plate 16, respectively. According to this configuration, since the pressure regulator 21 (21A, 21B) performs the pressure of the vapor flowing through the flow & 163 on both sides of the flow path 163, the pressure adjustment can be performed with high precision. They are independently disposed on a pair of temperature regulating plates 16 respectively. With this configuration, it is possible to independently control (10) 流通 of the water flowing through the pair of tempering flows 16 to independently control the cooling temperature 20 1345534 of the temperature regulating plate 16 and adjust the flow regulator 22 to be The inlet side of the flow path 163 of the temperature regulating plate 16. Here, the flow path 4 from the pressure regulator 21A provided at the inlet of the flow path 163 and the flow path 42 from the flow regulator 22 are connected to the same flow path 43, which is connected to the temperature regulating plate. In the pipe 19 of the 16th, the flow path 43 is connected to the pipe 192 of the temperature regulating plate 16, and communicates with the three pipes 192 which are separated by the recess 167A by the wall portion 169. Further, the three pipes 192 connected to the other concave portion 167B are connected to a flow path 44 for discharging the fluid in the flow path 163, and the flow path 44 is branched into a flow path 45 for discharging the steam and for discharging. Water flow path 46. Further, a pressure regulator 21B is attached to the flow path 45. With this configuration, the vapor and water from the fluid supply device 3 can flow through the same flow path 163 connected to the common piping 92 of the temperature regulating plate 丨6. According to this, since it is not necessary to separately provide a flow path dedicated to heating and cooling in the temperature regulating plate 16, the contact area of the steam or the cooling water in the temperature regulating plate 16 can be made large, and the temperature regulating plate can be raised. 16 heating efficiency or cooling efficiency. The on-off valve 23 is provided on the inlet side and the outlet side of the flow path 163, respectively. Specifically, the on-off valve 23 is provided in the middle of the flow paths 41, 42, 45, 46. The on-off valve 23' switches the flow path 以 with a signal from the on-off valve 25, and the μ 46 ° 5 temperature sensor 24 is provided on the temperature adjustment plate 16. As shown in FIG. 4 above, a mounting hole 241 is formed in the short side of the temperature regulating plate i 6 on the long side of the palette plate 16 for mounting the temperature sensor 24 in the thickness direction. 21 1345534 Central. The mounting hole 241 is attached to the complement, the B, and the 4th, and the long sides of the same side of the m/m plate 16 are formed at two distances apart from each other by a predetermined distance, and the male R 丨丨 丨丨 、 , * &&& It is not disposed near the connecting portion 162. The temperature sensor 24 detects the degree of the pβ8-.ra, J, and the p-knife, and rotates the temperature detection signal to the controller 25. The controller 25 sends the adjustment signal to the pressure regulator 21 or the flow regulator 22 according to the temperature detection signal of the temperature sensor 24 to control the pressure or the flow rate, so that the temperature value of the temperature regulating plate 16 is maintained at the predetermined value. Temperature _ degrees (established heating temperature or a predetermined cooling temperature, control & based on the temperature sensing g 24 temperature detection signal; or a signal built into the control @ timer, etc., to control the switching timing of the switching valve 23, The switching of the steam and the water flowing through the flow path 163, "the timing of controlling the heating and cooling", is provided in the slider driving device 130 for detecting the dusting force acting on the slider i3. The pressure sensing g 26 and the slider position for detecting the lifting position of the slider 13 sense the stomach 27' from the pressure sensor 26 and the slip from the slider position sensor 27. The position detection signal is output to the controller 25. The controller 25 monitors the pressure detection signal from the force sensor 26 and the position from the slider according to the temperature detection signal of the temperature sensor 24. Sensor position detection The timing signal, and the driving signal Z for moving the lifting and lowering of the slider 13 to the slider driving device 130, controls the timing of the molding process. The fluid supply device 30' is provided with a vapor as a heating fluid supplied to the temperature regulating plate 16 The steam supply device 31 and the cooling water supply device 32 that supplies the water as the cooling fluid to the temperature regulating plate 16. The steam supply device 3 is provided with a steam steel furnace 33 and steam, and a warm water back 22 1345534. The furnace 33 is connected to the pressure goods., _ ^ knife adjustment state 21 'through this pressure 34 far / Η steam is supplied to the temperature regulation plate 16. steam, warm water recovery unit = flow path 45, for recycling The temperature plate "exhaust steam or temperature = in addition, the steam, warm water recovery device 34 - part of the warm water, = back to steam (10) 33, and again heated to become steam and supplied to the temperature control plate 16 ,, due to the system Vapor is used as the heating medium of the temperature regulating plate 16, and the condensation temperature of the gas is determined by the saturated vapor pressure, so that the "pressure of the flow 4 163 of the plate 16 can be adjusted" to achieve a stable temperature with less temperature dispersion. Management. Also, due to the use of steam As the heating medium, the heat transfer rate to the temperature regulating plate 16 can be made good, so that the heating time of the temperature regulating plate 缩短 can be shortened, and the door of the heat transfer molding process can be shortened. 'The cooling water circulation device ^5 and the factory cooling water supply device 36 are disposed in the cooling water circulation device 35, and are connected to the piping 192 on the inlet side of the temperature regulating plate 16. Through the flow regulator installed on the way 22, the cooling water is supplied to the temperature regulating plate 16. Further, the cooling water circulation device 35 is connected to the water discharged from the flow path 46' through the flow path village and the steam or a part of the warm water discharged from the steam and the warm water recovery unit 34. However, the water circulation device 35 recovers. A heat exchanger 351 is installed in the cooling water circulation device 35, and is discharged from the temperature regulating plate 16 and the steam and warm water recovery unit 34 by heat exchange with the cooling water supplied from the factory cooling water supply device %. Steam or water is cooled to a predetermined temperature 're-supply to the temperature regulating plate 16 〇 Here, since steam is used as the heating medium, and water is used as the cooling medium 23 13345534, even if the common flow path 163 is circulated to each other Will reduce the heating performance or cooling performance, so it can be stably heated for a long period of time and

cool down. Further, by causing the flow paths 163 to flow alternately, the heating medium and the cooling medium are not mixed even if they are mixed (4), and the operability of the heating medium (vapor) and the cooling medium (water) can be improved. Further, since even if the steam is mixed with water, no problem occurs. Therefore, steam or warm water discharged from the steam, warm water collector 34 (a part of the steam supply device 31) is supplied to the cooling water circulation device 35 (cooling water) The portion of the supply unit 32) cools the vapor so that the vapor rapidly becomes water and reduces the volume, whereby the pressure of the vapor and warm water recovery unit 34 can be kept low, and the temperature control plate 16 is maintained from the steam boiler 33. The vapor flow is smooth. In the thermal transfer molding machine 1, the concave-convex pattern of the stamper 17 is thermally transferred to the substrate 5 by the following thermal transfer molding method. Fig. 11 is a flow chart showing the heat transfer printing method of the thermal transfer molding machine of the embodiment. The 'first' thermal transfer molding machine in this figure u has a heating step of heating the temperature regulating plate 16 to a predetermined temperature by steam; and a transfer step of transferring the concave and convex pattern on the surface of the stamper 17 to the substrate. In the cooling step, the temperature regulating plate 16 is cooled to a predetermined temperature by water to solidify the concave-convex pattern on the surface of the substrate 5. Further, between the heating step and the transfer step, a vacuum step of bringing the periphery of the stamper 17 into a vacuum is provided. First, in the heating step, in step S1, the controller 25 supplies steam from the steam steel furnace to the temperature regulating plate 16 by opening the on-off valve 23 connected to the flow paths 41, 45. The vapor is separated from the three pipes of the six pipes 192 by the wall portion 169 in the temperature regulating plate 16 - the concave portion 167 flows to the joint portion i62 of the flow g (4), that is, passes through the concave portion 167' on the opposite side and along The opposite direction flows through the other half of the flow path 163. Then, the other concave portion 167 partitioned by the wall portion 169 reaches the manifold 19, and is discharged from the remaining control B 192 to the flow path 44 on the outlet side. Accordingly, the vapor flows along the direction in which the temperature plate 16 is substantially U-shaped in plan view. - When the vapor circulates in the flow path 163, the steam is condensed into warm water in the flow path. The heat transfer plate 16 force is generated by the latent heat (condensation heat) generated at this time and the steaming heat. Heat to a given temperature. Here, the predetermined temperature is set after the material of the Kauri base material 5 or the size of the concavo-convex pattern of the pressurization 17 or the like: in the present embodiment, the predetermined temperature is set to about 13 (rc. Further, the vapor pressure in the road 163 is set. It is appropriate to set 纟〇u~〇2 to read the ugly range.

Adding the person-in-person, step S2' simultaneously with the heating step, positioning the substrate 5 on the stamper 17 on the receiving block 14, and placing the substrate between the opposing stampers ο. Step S3 'Control The device 25 transmits a drive signal for lowering the slider 13 to the 'monthly drive unit 130. The slider driving device 130 lowers the slider 13 to a predetermined position, and the wall portions 181 of the vacuum mold 18 for the stamper are brought into contact with each other, and the space surrounded by the wall portion 1 81 is sealed by the O-ring 182. In this state, the stamper 17 held by the slider 13 does not contact the substrate 5. In step S4', the evacuation of the space is started by the second suction in the space inside the wall portion 181 by the air suction device. In step S5, it is judged whether or not the wall portion 1 has reached the predetermined pressure (established vacuum pressure), and the vacuum is continuously applied until the predetermined pressure is reached. The vacuum step of the above step S3 to step S5 prevents the air 25 1345534 from entering between the stamper 17 and the substrate 5. According to this, it is possible to surely prevent the transfer failure of the uneven pattern of the stamper ι7. Next, in step S6, the temperature sensor 24 detects the temperature of the temperature regulating plate 16 from the temperature detecting signal of the 'Rin sensor 24' to the controller 25. The controller 25 monitors the temperature detecting signal in step s7 to determine whether the temperature of the temperature regulating plate 16/JBL has reached a predetermined temperature. At this time, although the temperature sensor 24 is provided with two for each temperature regulating plate, it is also possible for the controller 25 to determine whether the average temperature detecting signals from the two temperature sensors 24 have reached the average. At a given temperature, it is also possible to determine whether one or both of the temperature detecting signals from the two temperature sensors 24 have reached a predetermined temperature. Here, the temperature sensor 24 is provided on each of the pair of temperature regulating plates 16 respectively, and the pressure regulator 21 is independently disposed on one of the two sides of the substrate 5 for the temperature regulating plate 16. Thereby, the pressure control of the vapor can be performed independently for each of the pair of temperature regulating plates 16. According to this, the adjustment of the temperature of the temperature regulating plate 16 can be performed with higher precision, and the heating temperatures of the pair of temperature regulating plates 6 can be easily controlled to be equal. Thereby, it is possible to prevent the substrate 5 from being gently bent or the like due to the temperature difference between the pair of temperature regulating plates 16. Further, since the pressure regulators 21 are respectively provided at the inlet side and the outlet of the temperature regulating plate 16, the vapor pressure can be adjusted at the two places. In this case, when the temperature regulating plate 16 is heated by the vapor flowing in the flow path 163, the vapor temperature changes and the pressure fluctuates. Therefore, it is useful in preventing the temperature fluctuation of the temperature regulating plate 16 from being lowered due to the pressure fluctuation. Further, when the vapor is condensed in the flow path 16: in the case of warm water, since the pressure in the flow path 163 is easily changed, the temperature adjustment plate w 26 丄 3 is also provided by the pressure regulator 21 on the outlet side of the "IL path 163. The temperature of the leaves is particularly manageable because it is easy to manage. When the temperature of the temperature regulating plate 16 reaches a predetermined temperature, the controller 25, that is, in the step S8, 'outputs the slider driving device for lowering the slider η to the slider driving device (10), so that the slider 13 is further lowered. The stamper 17 is brought into contact with both sides of the substrate 5. Step S9' controller 25, that is, the control of the holding position of the slider 13, the position control for controlling the position of the detecting slider η, and the switching to the pressure control for detecting the pressure applied to the slider 13 t. The pressure of the slider i 3 against the base # 5 is detected, and the stamper presses both sides of the substrate 5 at a predetermined pressure. Since the action of the slider 13 is controlled by the dust control, for example, when the substrate 5 or the stamper 17 produces manufacturing dimensional errors, there is no error or excessive between the house mold and the substrate 5. The pressure pressurization pressurizes the stamper 基材 against the substrate 5 at an appropriate pressure to reliably prevent the transfer failure of the uneven pattern on the substrate 5. In step S10, the controller 25 monitors whether or not a predetermined time has elapsed (the transfer step) while maintaining the pressure of the slider 丨3 against the substrate 5. In the present embodiment, the predetermined time is set, for example, to 1 second. By this transfer step, the stamper 17 heated by the temperature regulating plate 16 is pressed against the substrate 5, and only the surface of the substrate 5 is melted, and the uneven pattern formed on the surface of the stamper 17 is transferred to the substrate. 5 surface. Further, in the present embodiment, during the transfer step, the heating step 'control ϋ 25 is continuously performed, and the /JEL degree detection signal from the temperature sensor 24 is monitored to control the pressure regulator 2! The vapor pressure is adjusted to maintain the temperature of the temperature regulating plate 16 at a predetermined temperature. Specific 27 1345534. When the temperature detected by the dish sensor 24 is lower than the predetermined temperature, that is, the adjustment signal for increasing the gas migration force when the temperature is higher than the predetermined household, the output is adjusted to reduce the vapor pressure. . Further, since the 'transfer step' is started after the temperature adjustment plate 16 is heated to the temperature of the enthalpy in the heating step, it is sufficient when the substrate 5 is applied for a predetermined time by the pressure #17. The amount of melting of the substrate 5 is ensured, whereby the occurrence of poor transfer of the uneven pattern of the stamper 17 can be reliably prevented. Further, since the concave-convex pattern of the ink mold 17 is transferred by merely transferring the vicinity of the surface of the substrate 5 by the transfer step, for example, it can be formed in a shorter period of time than the case where the concave-convex pattern is formed by conventional injection molding. Forming. That is, in the case where the concave-convex pattern is formed by injection molding, for example, when the product size is large or the product thickness is large, it takes time to cool and the cycle time cannot be shortened. On the other hand, in the present embodiment, since the concave-convex pattern of the stamper 17 is transferred by merely smelting the vicinity of the surface of the substrate 5 by the transfer step, even if the basis of the transfer target is #5 When the size is large or the thickness is increased, the transfer of the uneven pattern can be performed in a short time, and the substrate can be elastically increased in size. In the step S10, when the substrate 5 is moved, the W branch is passed through the W section, and the controller 25 is turned on, and the controller 25 closes the steam switching valve 23 connected to the flow path. The heating step is ended. Next, the step s password is opened to the water switching valve 23 of the flow paths 41, 46, and the fluid flowing through the flow path 163 of the temperature regulating plate is switched from the vapor to the water by the "cooling water supplied from the device 35". Cooling step. Since the steam and the water are switched and flowed through the common flow path 28 1M5534 163', it is possible to make the contact area of the temperature control plate larger by the flow path. According to this, the heating efficiency and the cooling efficiency can be improved, and the temperature regulating plate 16 and the stamper 17 can be heated or cooled in a short time. After the cooling of the stamper 17 is started in step SU, the step (1) is to cancel the vacuum state of the space in the wall portion 181 by the vacuuming device 18 for molding, and the vacuum step is ended. Here, since the stamper 17 is in close contact with the substrate 5, the uneven pattern is transferred to the substrate 5, so that it is no longer necessary to maintain the vacuum state.

In step S14, the temperature of the temperature regulating plate 16 is detected by the temperature sensor 24. The temperature sensing H 24 outputs a temperature detecting signal to the controller & controller 25 ' according to the temperature detecting signal, the control signal is output to the flow regulating write 22, and the flow is controlled by adjusting the flow of water flowing through ... 63 The temperature of the warm plate 16. Next, the 'step S15' controller 25 monitors the brewing detection signal from the temperature sensor 24 to determine whether the temperature detecting signal has reached a predetermined severity. In addition, the predetermined temperature for cooling the temperature regulating plate 16 is appropriately set after considering the material of the substrate $, the stamper 17 < the size of the concave-convex pattern, and the like, and is set to about 70 ° C in the present embodiment. Here, even in the cooling step, since the flow rate adjusters 22 are separately provided to the pair of temperature control plates 16, the controller 25 can independently control the temperature of the temperature adjustment 16 independently. According to this, the value of the temperature adjustment plate 16 can be adjusted with high precision. That is, by controlling the temperature of the pair of temperature regulating plates 16 to be the same ', it is possible to surely prevent the substrate 5 from being produced during cooling, and in the present embodiment, the stamper 7 is also set in the cooling step. The pressure 8 29 1345534 is pressed against the substrate 5, whereby the pressurizing step is carried out by the transfer step and the cooling step, and the cooling step can be carried out in the pressurizing step. Step Si5', when the temperature of the temperature regulating plate 16 has reached a predetermined temperature, the process proceeds to step S16. The controller 25 sends the slider driving device i3G to drive the slider i3 to drive the signal & 5. The slider drive control device H raises the slider 13 to the disengaged position based on the drive signal. Next, in step Sn, air is blown between the substrate 5 and the stamper 17 by an air blowing device (not shown), whereby the substrate 5 can be easily peeled off from the stamper 17. In step S18', the controller 25 transmits a drive signal for raising the slider 13 to the slider (4) device 13A. The slider driving device raises the slider 13 to a predetermined carry-out position for carrying out the substrate 5 to the outside of the thermal transfer molding machine 1 based on the drive signal '. When the slider 13 is raised to the predetermined position in step 18, step si9, that is, the substrate 5 having the concave-convex pattern transferred onto the surface (the product is placed outside the thermal transfer molding machine 1). Thereafter, the step S20' controller 25 closes the on-off valve 23 connected to the flow paths 42, 46, and ends the cooling step. / When the sub-cycle is continued, the switch is opened in step S2Q, and the switch connected to the flow paths 41, 45 is opened. In the space 23, the steam is circulated in the flow path 163, and the heating step is restarted (return to the step μ). [Second embodiment] 1 Hereinafter, a temperature regulating plate according to a second embodiment of the present invention will be described with reference to Figs. 12 and 13 . 16. Here, the other configurations of the thermal transfer molding machine i and the thermal transfer molding system 30 are the same as in the first embodiment. The description of the same reference numerals is omitted. Therefore, the temperature adjustment plate is provided in the first embodiment. 16 is provided with a connecting portion ι 62 that protrudes from the plate body portion 161 at the long side end. In contrast, in the temperature regulating plate 16 of the present embodiment, as shown in FIGS. 12 and 9 , the connecting portion 162 is not the plate body portion 161 . The shape of the protrusion, "$ is the part of the plane shape of the body 161, this point is The embodiment of the present invention is greatly different. As shown in Fig. 13, the thickness of the plate portion IQ of the temperature regulating plate 16 is thicker than that of the first embodiment. At this time, the heat of the temperature regulating plate 16 is larger: "Compared with the case of the first embodiment, although the temperature regulating plate 16 or the stamper 2: heat or cooling takes a lot of time", on the other hand, by separating the plate body surface from the flow path 163, The surface temperature of the plate body 161 can be made uniform, so that the stamper 17<temperature distribution can be prevented to cause transfer failure. Further, since the strength of the temperature regulating plate 16 is increased, the temperature control plate 16 can be more effectively prevented. The tempering plate 16 of the present embodiment is manufactured by the following steps. In addition, in the same manner as the description of the manufacturing steps of the first embodiment, FIG. 14 to FIG. As shown in Fig. 14, at the center of the thickness direction of the plate member 16A, the same through-holes are formed in parallel with each other to form a flow path 163. The number of people is not as long as 15, and is short along the plate body 16A. The both ends of the longitudinal direction of the plate member 16A are cut in the lateral direction to form a concave portion 167. As shown in Fig. 16, After the plunger W3A is pressed into the opening portions of the respective flow paths 163 31 1345534 = to mechanically seal the flow & 163, as shown in Fig. 17, the top portion 170 is not formed on both sides of the recess 167 of the joint portion 162. In the method of manufacturing the temperature regulating plate 16 of the present embodiment, the position of the through hole in the thickness direction of the plate is opened, and the step of cutting out the central portion of the plate body 16Α in order to form =4 (6) is performed. In this case, 'the positioning of the flow path 163 is easier:' and the number of manufacturing steps of the temperature regulating plate 16 is reduced, so that the manufacturing time of the temperature regulating plate 16 can be shortened.

Further, although it is not necessary to cut out the central portion □ of the plate body 161 in order to form the plate body portion 161, the surface of the plate body portion 161 must be slightly cut or ground when the stamper 7 is attached. Thereby, since the stamper can be attached to the plate portion 161', the heat uniformity state in which the surface of the temperature regulating plate 16 is uniform can be transmitted to the stamper 17. Further, the present invention is not limited to the above-described embodiments, and modifications, improvements, etc. within a scope that can achieve the object of the present invention are also included in the present invention. The pressure adjusting mechanism is provided on both the outlet side and the inlet side of the flow path of the temperature regulating plate. However, the pressure regulating mechanism is not limited thereto. For example, as shown in Fig. 18, it may be provided only on the inlet side of the flow path of the temperature regulating plate 16. Alternatively, the pressure adjusting mechanism may be provided only on the outlet side of the temperature regulating plate 16. At this time, although the positive end of the pressure setting is somewhat sacrificed, since the number of the pressure adjusting mechanisms is small, the thermal transfer molding machine can be simply constructed. The flow rate adjusting means is provided only on the inlet side of the flow path of the temperature regulating plate. However, the present invention is not limited to this. For example, it may be provided only on the outlet side of the flow path or on both the inlet side and the outlet side of the flow path. Further, the flow rate adjusting mechanism is disposed on the upstream side of the opening valve, but is not limited thereto, and may be placed in the downstream of the switching valve 23 as shown in Fig. The downstream side, that is, one of the on-off valve 23 and the temperature regulating plate 16, serves as a cooling medium that flows through the flow path in the cooling step, and does not—=: two', for example, fluorine-based inertness such as perfluoropolyfluorene (pFpE) can be used. The liquid is a cold material. Moreover, as a method of adjusting the cooling temperature of the temperature regulating plate, it is not limited to adjusting the fluid flow rate by the flow rate adjusting mechanism, for example, by adjusting the internal body, the body pressure, or the temperature to adjust the adjustment. The method of fixing the temperature of the temperature plate. The method for fixing the temperature regulating plate can be selected by a suitable method for making the pressing mold comprehensive and tight, and for adjusting the pressing plate to the temperature regulating plate by air suction. For example, it may be a structure as shown in Fig. 19. As shown in Fig. 19, the plate body portion 161 of the temperature regulating plate 16 is on the outer side (both sides in the short side direction) of the region where the flow path (6) is formed, along the temperature regulating plate. A groove 52 is formed in the longitudinal direction of the beam 16. Further, a through hole 51 communicating with the groove 52 is formed in the longitudinal direction of the temperature regulating plate 16 in the longitudinal direction of the temperature regulating plate 16. Alternatively, the shape of the temperature regulating plate may be covered. The stamper's stamper 'permeates the groove 52 to suck the stamper from the through hole 51. Further, since the central portion of the stamper is surely adsorbed due to the enlargement of the crucible, the temperature can be set between the thermostat & 16 and the stamper. Dust mold holder. In the mold holder, a plurality of edges are formed on the surface opposite to the temperature control plate 16. In the groove in the side direction, both ends of each groove are communicated with the groove 52 of the temperature regulating plate 16. Then, a through hole communicating with the groove may be formed, and the through hole may be adsorbed through the through hole; The through hole is formed in the full mold holder, so that the mold can be fully absorbed, and the adhesion to the temperature regulating plate 16 is good. 1345534 In addition, when the mold holder is used in the above manner, the temperature adjustment plate i6 can also be used. The positioning hole 53 is formed to position the mold holder to the temperature regulating plate 16. Although the stamper is disposed under the slider and above the frame, the thermal transfer press system transfers the concave and convex pattern on the surface of the stamp to the base. The device has two sides, but is not limited thereto. For example, the stamper may be disposed under the slider or above the carrier. The thermal transfer molding machine may also be a device for transferring only the concave and convex pattern to one side of the substrate. In the case of &, the temperature-regulating core on the side where the concave-convex pattern is not transferred may be: mounting pressure, or the same temperature distribution on both sides of the substrate, or a stamper having no concave-convex pattern may be mounted as a dummy mold The temperature regulating plate. The concave portion 167 of the temperature regulating plate 16 is along the short side of the temperature regulating plate 16 The connection portion 162 is formed to connect the plurality of flow passages 163 to each other. For example, as shown in Fig. 2A, individual holes may be formed in each of the flow paths 163. Further, in this case, although the difference can be made without change The sealing property of the fluid is ensured in the shape of the concave shape of the tube 19, but the shape of the side connected to the concave portion b can be adjusted according to the temperature of the concave portion 167. The flow path of the temperature regulating plate is opened. Although the part is sealed by the plunger, it is only required to prevent the fluid from leaking out from the flow path. It is also sealed with the sealing material. For example, it is also possible to use the screw check t' to carry out the flow path of the temperature regulating plate. At the time of processing, the through hole penetrating to the other end surface does not penetrate the other hole. I may also be a hole extending from one end surface of the plate body portion to the concave portion provided on the other side. The sealing operation of the chip into the other opening portion, such as the press-in of the chip plunger, makes the manufacture of the temperature regulating plate easier. Although the flow path of the temperature regulating plate is a reporter's, the 乂 becomes a substantially circular cross section, but it is not limited to this. It can also be formed into a substantially elliptical shape, such as "a 憜 solid shape, rectangular shape" or a substantially prismatic shape. . When the cross-sectional shape of the thermostat plate π claw path is made into a substantially rectangular or prismatic shape, Yuan Hao is attached to the corner portion; {忐 is formed into a rounded corner, and by the shape of the corner portion, the moon I is moderated during processing. Smoke, -e; > Stress on the temperature control plate. Further, in this case, it is preferable that the corners of the corners have a radius 〇 m or more. Further, although the temperature regulation plate is formed in a substantially rectangular shape in plan view, and the flow path is formed in the longitudinal direction of the temperature adjustment plate, the present invention is not limited thereto. For example, the flow path may be VL w / mouth adjustment / the direction of the plate edge form. At this time, since the length of the flow path becomes short, the formation of the flow path is performed early here. Further, although the connection portion is originally formed on both sides in the longitudinal direction with the flow path, when the flow path is formed in the short side direction, the connection portion is also formed in the temperature adjustment.

Both sides of the short side of the board. At this time, since A has a small amount of expansion and contraction due to the direction of the rim, it is possible to prevent the offset of the stamper and the like. When the stamper or the substrate has a sufficient thickness, the temperature regulating plate does not have to be formed to avoid the bolt doping hole of the bolt head attached to the opposite temperature regulating plate. The temperature regulating plate is configured such that the fluid flows through the flow path in a substantially U shape, but the present invention is not limited thereto. For example, the piping may be connected to both ends of the flow path so that the fluid flows in the same direction in all the flow paths. The flow path of the temperature control plate is not limited to a plurality of strips formed in a straight line. For example, it is also possible to adopt a shape of Ren Ren after considering the heat transfer efficiency such as a curved shape or a spiral shape. The present invention is not limited to the description of the preferred embodiments of the present invention, and the present invention is not limited to the above description. The present invention is mainly described and described with respect to the specific embodiment of 35 1345534. However, those skilled in the art can apply various modifications to the above-described embodiments without departing from the spirit and scope of the invention. Various modifications can be made in terms of shape, material, number, and other details. As described above, the descriptions of the shapes, materials, and the like described above are merely exemplified for easier understanding of the present invention, and are not intended to limit the present invention. Therefore, some or all of the limitations of the shapes, materials, and the like are limited. The description of the names of the components other than those included in the present invention is also included. The present invention can be utilized, for example, in a heat transfer molding machine that can be used for manufacturing a backlight light guide plate for a liquid crystal panel, and can be used, for example, in a heat transfer molding machine for manufacturing a fuel cell single 7G separator or an outer plate. . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a general view of a thermal transfer molding machine according to a first embodiment of the present invention. Fig. 2 is a partial enlarged view of the heat transfer molding machine of the first embodiment. _ Fig. 3 is a top view of the thermal transfer molding machine of the above-described flute] a $1 form. Fig. 4 is a view showing the lower side of the temperature regulating plate of the first embodiment. Fig. 5 is a side cross-sectional view showing the temperature regulating plate of the first embodiment before (1). Fig. 6 is a schematic view showing the steps of manufacturing the temperature regulating plate of the first embodiment without using the above. Fig. 7 is a schematic view showing a manufacturing step of a temperature regulating plate according to the first embodiment of the present invention. Fig. 8 is a schematic view showing the step of manufacturing the step of the temperature regulating plate of the first embodiment of the first embodiment. Figure 9 is a schematic diagram of the use of impurities. The manufacturing steps of the temperature regulating plate of the first embodiment are shown in Fig. 1. Fig. 1 〇 辟,,,, block diagram. The structure 11 of the thermal transfer molding system of the first embodiment is a sea-right, 丄. The flow of the thermal transfer molding method of the first embodiment is not described.

13 ^'4 is a bottom view of the temperature regulating plate according to the second embodiment of the present invention. A side cross-sectional view of the temperature regulating plate of the second embodiment is not shown in Fig. 14 . The manufacturing step of the temperature regulating plate according to the embodiment of the manufacturing step 2 of the second embodiment is shown in Fig. U. Fig. U is a schematic view showing the steps of manufacturing the temperature regulating plate. Figure 16 is a schematic view of the use of the steps. To display the foregoing number to display the foregoing

Figure 7 is a schematic diagram of the procedure. The manufacturing step circle 18 of the temperature regulating plate according to the second embodiment is shown in Fig. 19. Fig. 19 is a view showing a modification of the heat transfer molding system of the present invention, showing the above modification of the temperature regulating plate of the present invention. . = 〇 shows the following diagram of another modification of the temperature regulating plate of the present invention. Description of main components: 1 Thermal transfer molding machine 5 Substrate 37 8 1345534

10 Bottom bed 11 Column 12 Top plate 13 Slide 13A Guide 14 Shelf 14A Locating pin 15 Insulation material 16 Vacuum suction member 17 Compression mold 18 Molding vacuum device 19 Tube 21, 21 A, 21B Pressure adjustment mechanism 22 Flow adjustment Mechanism 23 Switching valve 24 Temperature sensor 25 Controller 26 Sensor 27 Slider position sensor 30 Fluid supply unit 31 Steam supply unit 32 Cooling water supply unit 33 Steam steel furnace 34 Vapor, warm water recovery unit 38 8 1345534

35 Cooling water circulation device 36 Factory cooling water supply 41, 42, 43, 44, 45, 46, 163 Flow path 51 through hole 52 groove 53 positioning hole 100 thermal transfer molding system 130 slider driving device 161 plate portion 162 connecting portion 163A, 168 Plunger 164, 241 Mounting hole 164A Bolt 165 Bolt dosh hole 166, 1 66 A, 166B Positioning hole 167, 167A, 167B, 191 Recessed 169, 181 Wall 170 Top 182 0 ring 192 Pipe 351 Heat exchanger 39

Claims (1)

1345534 X. Application Patent Range: 1. A temperature regulating plate is provided on a thermal transfer molding machine for transferring a concave-convex pattern formed on a surface of a stamp to a surface of a substrate, and the stamper can be mounted and adjusted a temperature of the stamper, comprising: a plate-shaped plate body portion to which the stamper is mounted; and a flow path for adjusting a temperature of the plate body portion to be circulated inside the plate body portion; The flow path is formed substantially in the thickness direction of the plate body portion, and the connection portion for connecting the communication pipe and the external flow path is connected to the end portion of the plate body portion. The plate body portion is provided to have a thickness; the stamper is attached to a surface of the plate body opposite to the joint portion. 2. The temperature regulating plate of claim i, wherein the flow path has a substantially circular cross-sectional shape. 3. For example, in the first paragraph of the patent application scope, the flow path is formed by the at least one of the temperature regulating plates and the other end face extending toward the other end face; One end opens the ci A seal. The opening portion of the crucible is mechanically dense. 4. As claimed in the second item of the patent scope rrf, , ^ the adjustment &amp; plate, wherein the flow path, the t becomes the at least one of the temperature regulating plates The other end face extends; the opening portion of the opening of the flow path is mechanically sealed. 5. The plurality of articles of the third item of the patent application; &lt; 调 板, wherein the flow path is provided with 40 1345534 The distance between the help points f _ - ] between the flow paths is smaller than the thickness of the temperature regulating plate 6 such as Φ. (&gt;. A plurality of articles in the fourth paragraph of the patent scope of the invention; a tray, wherein the flow path is provided with a p彳 between the flow paths, 7 such as the thickness dimension of the thermostat plate of the Emperor. Shen Shuo's patent scope is in the fifth item. • The connection is made with μ ώ ^ 'Sister's wrench, where the joint is tied and the tube socket is mechanically connected. 8. As claimed in item 6 of the patent ii Ffl ^ r- tune, the summer board, in which the joint part is mechanically connected to the general seat of the ship. 9·If the application scope of the patent 丨 心 心 调 调 苴 苴 苴 苴 苴 苴 该 该 该 该 该 该 该 该 该The board: the area 4 of the area other than the joint portion 10. The ninth item of the patent application scope is a 盥呤, έm β cardboard, wherein the joint portion is mechanically connected to the joint pipe socket. · For example, in the scope of the patent application, the first m ^ ^ <调调板' has a second positioning hole for the thermal transfer molding machine for specifying the plate body 4; * a positioning hole for the mounting position and the second The positioning hole is in the shape of a long hole, where the long axis and the center of the first positioning hole are in the second positioning hole The lines of the knots are substantially parallel. 12 · As claimed in the patent application 丨丨% ^ &lt; 调调板, wherein the temperature regulating plate 'is formed in a plan view substantially rectangular; the first positioning hole and the second positioning? You, iL Fighting Emperor ^ ^ 疋, is arranged along the long side of the temperature regulating plate. 13. - A kind of thermal transfer molding machine with a temperature regulating plate of the 11th or 12th patent of the patent application. The first positioning hole of the temperature regulating plate is disposed opposite to the other one of the temperature regulating plates. The first positioning hole of the temperature regulating plate is configured to be opposite to the other one of the temperature regulating plates. A positioning hole is opposed to each other. 14. A heat transfer molding machine, comprising: the temperature regulating plate according to any one of claims 1 to 12. XI.