TWI344533B - - Google Patents

Description

1344533 - No. 096122340 __> , · - Years are replacing page j. February 16th 曰 替 ^ 、 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明Device. [Prior Art] It is known that various heat treatment apparatuses which heat and heat-treat the object to be processed have been known. Examples of such a heat treatment apparatus are disclosed in Japanese Laid-Open Patent Publication No. 2000-18832. The heat treatment apparatus of the publication No. 2000-18832 includes a heat treatment tank having a rectangular parallelepiped heat treatment space therein. In the t* treatment apparatus, the object to be processed is stored in the heat treatment space of the inner crucible of the heat treatment tank, and In the heat treatment apparatus of the heat treatment space, the heat treatment apparatus disclosed in JP-A No. 2000-1 8832 is required to transport and set the heat treatment tank when the processing object is enlarged. The completed heat treatment tank imposes a heavy work load. Therefore, it is conceivable to divide the six-sided side wall body constituting the heat treatment tank into individual flat-shaped wall panels, and to transport and combine these panels to reduce the handling. The burden of work caused by the heat treatment tank. However, in this case, the heat treatment of the adjacent wall plates in the heat treatment tank The position of the corner portion is joined at a considerable position, so that when the heat treatment is performed, the inner wall side of each of the wall plates has a large thermal expansion, and the respective wall plates are bent in such a manner that the end portions of the respective wall plates face the outer side of the heat treatment tank. Deformation. Then, the bending deformation of each wall plate is cited in 2014-8943-PF1 1344533 No. 096122340

The problem of the separation of the joints between the panels is corrected on February 16, 100. Finally, the problem of leakage of hot air to the outside of the heat treatment space occurs due to the separation of the joints between the panels. SUMMARY OF THE INVENTION An object of the present invention is to provide a heat treatment apparatus which can reduce the work load caused by transporting and providing a heat treatment tank and prevent hot air from leaking from the heat treatment space inside the heat treatment tank. According to one of the configurations of the present invention, the heat treatment apparatus forms a heat treatment tank having an outer wall and an inner wall forming a rectangular parallelepiped heat treatment space inside the outer wall by combining a plurality of hollow side wall structural members, wherein each of the side wall structural members has A portion corresponding to the corner portion of the heat treatment space is joined to the other side wall structure member at a position deviated from the corner portion of the heat treatment space. [Embodiment] The following is a detailed description of the field, a field, and a field. The best mode for carrying out the invention is described. First, referring to Figs. 1 to 4, the structure of the heat treatment apparatus 1 of one of the actual states of the present invention is shown by B. The heat treatment device 1 of the present embodiment can be used for heating and heat-treating a treatment object such as glass for liquid crystal, and can be 3 m wide, 4 m long, and 5 m in structure. Still cuboid. η冰 ^ is outside, heat treatment device

As shown in Fig. 1, the air blowing unit 2, the add-on Q ’’, the summer d, and the heat treatment tank 4 are included. 2014-8943-PF1 6 1J44533 No. 096122340 pcr^T6—

曰修 (more) is replacing the replacement page of the I6曰 correction in the year of February 10, the wind-up portion 2 is a portion for sending air to the heating device 3, and the wind 2 includes the wind-to-winding frame 21 and the air blowing device ( Not shown) and the blower cover 2 2 . The air reaching portion frame 21 is located at the lowermost portion of the air blowing portion 2, and is a portion that serves as a base for holding the air blowing portion 2. This blower unit stage 21 is connected to the side surface of the gantry structure element 41a to be described later. The blower device (not shown) is composed of a blower fan or the like and is disposed on the blower 21. Thereby, the air reaching device (not shown) performs the wind reaching the heating device 3. The air supply cover 22 is composed of two parts divided into upper and lower portions. The air supply sill 22 is disposed in the air supply unit. 1 卞 21, and cover the outside of the wind blower (not shown). In the k-plate 22 and the heat treatment tank 4, the outer wall surface of the wall portion 51d of the upper side and the outer wall surface of the wall portion 52d of the fourth panel 52 on the heating portion are closely adhered to the lower portion of the liver portion. . The above-mentioned heating device 3 is an adjacent eight-h 勹 勹 攸 wind up to the wind up to the wind to heat the air 4 ^ knife. In the heating device 3, it is sent to the 敎 process... through the air transition device (not..., the heating device 3' in the heat treatment space in the treatment tank 4 can be hot...' by ^ίππογ ^ ^ ώ η The internal rolling is heated to about 20 (Tc ~ , C / dish degree. The heating device 3 is provided on the connection structure element 4U, ... the gantry 51 of the gantry 41 and the heating part upper panel 52 are covered. The heat treatment tank 4 of the P panel has a rectangular parallelepiped + 1 soil on the inside and a hollow heat treatment space on the outer wall, and the object to be processed is accommodated in the heat treatment tank 4 and inside. The heat treatment space, and, by 2014-8943-ppi 7 1344533 No. 096122340 (more), the correction of the replacement page by the heat treatment device 3 from the above heat treatment device 3 The object is subjected to heat treatment, and the heat treatment tank 4 is provided on the gantry 41, and has six side wall panels 42 (side wall structure elements), a floor panel 43, a closing panel 44, and a sill panel 45. The gantry 41 is located on the lower side of the heat treatment tank 4. , as a base supporting the heat treatment tank 4 The gantry 41 is composed of three gantry structural elements 41a to 41c. These gantry structural elements 41a to 41c are connected to each other, thereby forming a gantry 41. The six side wall panels 42 include side wall panels having an L-shaped cross section ( a first element) and a horizontal portion extending in a straight line and a side wall panel (second element) respectively formed from a vertical portion vertically disposed at both end portions of the horizontal portion. Further, the six side wall panels 42 and the floor panel 43 are The closing panel 44 and the sill panel 45 are combined on the gantry 41 to form a heat treatment tank 4. The six side wall panels 42 are specifically a heating portion lower panel 51, a heating portion upper panel 52, and a side wall lower panel. 53. The side wall portion upper panel 54, the first ceiling 55, and the second ceiling 56. Among these panels, the 'heating portion lower panel 51, the heating portion upper panel 52, the side wall portion lower panel 53, and the side wall portion upper panel 54 are included in The panel in the concept of the first element of the present invention, the first ceiling 55 and the second ceiling 56 are respectively panels included in the concept of the second component of the present invention. The heating portion lower panel 51 is formed in an L-shaped plate along the longitudinal direction of the heat treatment apparatus 1 and has a vertical cross section. The heating portion lower panel 51 is provided on the gantry structure member 41a. Further, the heating portion lower panel 51 is as shown in Fig. 3. As shown, it has a bottom portion 5U and wall portions 51b to 5ld. The bottom portion 51a is placed on the rack 8 2014'8943-PF1 1344533, No. 090 丨 22340 I f____, and the date of February 16th, 100 correction replacement page

On the stage structure member 41 a i I, the bottom portion 51 a forms an elongated rectangular plate extending in the width direction of the heat treatment apparatus. The wall portions 51b to 51d extend from the portions corresponding to the bottom edges to the upper portions, respectively. The above-mentioned three walls 51b to 51cl are a forged shackle, a sill, a wall portion 51b, and a wall portion 51c sandwiching the wall portion 51d from both sides. ,. The top panel 52 has a shape in which the lower portion 5 of the heating portion is reversed. Sl - In addition, the heating portion upper panel 52 has a ceiling portion 52a extending in the direction of the heat treatment device 1 and having a rectangular flat plate shape, and a wall 52b extending from the edge of the three sides of the naturalized plate portion 52a to the lower side 52d. The three wall portions 52b to 52d are integrally formed, and the wall portion 52b and the wall P 52c « sandwich the wall portion 52d on both sides. The lower end portion of the outer wall portion 52b is joined to the upper end portion of the wall portion 51b of the heating portion lower panel 51, and the wall portion 52. The lower end portion is joined to the upper end of the wall portion 5u of the heating portion lower panel 51, and the lower end portion of the <^°P52d is joined to the upper end portion of the wall portion of the heating portion lower panel 51. In this manner, the wall portions are joined to each other, and the heating portion lower panel 51 and the heating portion upper panel 52 are integrally formed in a state where the heating portion upper panel 设置 is provided on the heating portion lower panel 51. Further, the wall portion 5ld of the lower portion 5 of the heating portion and the soil of the upper panel of the heating portion. P 52d constitutes an end wall of one end of the heat treatment groove 4 in the longitudinal direction. The side wall portion lower panel 53 is formed in an L-shaped plate along the longitudinal direction of the heat treatment device 且 and in a vertical cross section. The side wall of the side wall is disposed on the gantry structure. In addition, the lower side panel (10) of the side wall has a bottom portion. 9 2014-8943-PF1 1344533 No. 096122340 ϊοί'2. It) ~-~~ Years of the month (more) is being replaced on page 16 Soil σρ 53b~53d. The bottom portion 53a is placed on the gantry structure member 4c, and this bottom portion 53a forms a rectangular flat plate extending in the width direction of the heat treatment device}. The wall portions 53b to 53d extend from the portions corresponding to the end edges of the three sides of the bottom portion 53a to the upper side, respectively. The above-mentioned three wall portions are hungry and the wall portion 53b and the wall 53c sandwich the wall portion (10) from both sides. The side wall portion upper panel 54 has a shape in which the side wall portion lower panel 53 is reversed up and down. Further, the 'side wall portion upper panel' has a ceiling portion extending in the direction of the heat treatment device and having a rectangular flat plate shape, and extending from the edge of the three sides of the ceiling portion 54a to the lower portions 54b to 54d. The wall portions 54b to 54d have a structure of a body, and the wall portions... and the sides of the 璧5 4 c 失 are lost to the lower portion of the side wall portion. "The lower end portion of the portion 54b is connected to the wall portion 5 of the lower panel 53 The upper end portion of the wall portion 54c is joined to the upper jaw portion of the wall portion 53c of the cymbal panel 53. Further, the upper end portion of the lower cake portion (10) of the wall portion 54d. For example, the wall of the lower side panel 53 of the side wall portion. Hey. In this way, the wall portions are connected to the lower surface of the wall portion; t 错 , , , , , , , , 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 在于 上部 上部 上部 上部 上部 上部 上部 54 54 54 54 54 54 The wall portion 54d of the wall portion 53d and 54 of the panel 53 is formed on the side of the @@_μ15. The wall of the panel is formed. The other end of the longitudinal direction of the heat treatment groove 4 is the first JC. The slab 55 and the ceiling portion two plate 56 of the second 夭r π Darley groove 4 are disposed between the heating portion upper panel 52 wide 55 and the second ceiling p panel 52 and the side wall upper panel 54. 2014-8943-PF1 10 1344533 No. 096丨22340 shape>Γ——^ l〇% February 1 I repair (more) replacement page 100 years February Μ曰 correction replacement page - ceiling 55 has a heat treatment device 1 The ceiling portion 55a (horizontal portion) having a rectangular flat shape extending in a straight line in the width direction and the wall portions Hb and 55c (vertical portions) perpendicularly provided from the both end edges of the weathering plate portion 55a in the longitudinal direction are vertically disposed. Further, the second ceiling 56 is configured in the same manner as the first ceiling 55. This second day The plate 56 has a ceiling portion 56a (horizontal 4) and wall portions 56b, 56c (vertical portions) each having the same structure as the ceiling portion 55a, the wall portion 55b, and the wall portion 55c of the first weathering plate portion 55. A side end portion of one of the ceiling portion 55a, the wall portions 55b, and 55c of the ceiling 55 and a side end portion of the ceiling portion 56a, the wall portions 55b, and 55c of the second ceiling 56 are joined to each other. The side end portions of the other of the ceiling portion 55a and the wall portions 55b and 55c of the first ceiling 55 are respectively joined to the side portions of the ceiling portion 52&, the wall portions 52b and 52c of the heating portion upper panel 52, and the second portion The side end portions of the other of the panel 56a, the wall portions 56b, and 56c of the ceiling 56 are joined to the side ends of the ceilings #54a' (4) and * of the side wall upper panel 54, respectively. The floor panel 43 is a portion constituting the bottom surface of the heat treatment tank 4, and is placed on the gantry structure members 41b and 41c of the gantry 41. Further, the floor panel 43 is disposed between the heating portion lower panel 51 and the side wall portion lower panel 53. This floor panel 43 is divided into two parts, namely a first floor panel and a second floor panel 43b. The first floor panel 仏 and the second floor panel 43b are formed in a flat shape and joined to each other on the gantry 41. Further, the end portion of the first floor panel 43a and the second floor panel coffee are joined to the side end portion of the bottom portion 51a of the heating portion lower panel 51, and the second floor surface 2014-8943-PF1 11 1344533 February 2014 16th correction replacement page No. _22340 No. 4 - The side end of the replacement floor plate 43b facing the first floor panel 43a is joined to the side end of the bottom portion 5 3 a of the side wall lower panel 53 unit. As described above, the heating portion lower panel 51, the heating portion upper panel 52, the side wall portion lower panel 53, the side wall portion upper panel 54, the first ceiling 55, the second ceiling 56, the first floor panel 43a, and the second floor panel 43b are mutually The joining 'by this' is formed on both sides in the width direction of the heat treatment tank 4 to respectively form the heating portion lower panel 51, the heating portion upper panel 5, the side wall portion lower panel 153, the side wall portion upper panel 504, and the first ceiling 5 5 The opening portion 0 surrounded by the second ceiling 56, the first floor panel 43a, and the second floor panel 43b is additionally embedded in the opening portion formed on one of the side surfaces in the width direction of the heat treatment tank 4 as shown in FIG. The lid panel 44 is closed and the door panel 45 is fitted in the opening portion formed on the other side surface in the width direction of the heat treatment tank 4 as shown in Fig. 2 . The peripheral edge of the closing panel 44 is joined to the wall portion 51b of the heating portion lower panel 51, the wall portion 52b of the heating portion upper panel 52, the wall portion 53b of the side wall portion lower panel 53, and the wall portion of the side wall portion upper panel 54. 54b, a wall portion 55b of the first ceiling 55, a wall portion b of the second ceiling 56, a floor panel 43a, and a second floor panel 43b. In addition, the closing panel 44 divides the J into upper and lower panels, that is, the lower closing panel shirt and the upper (5 15 panel 44b. The upper end portion of the lower closing panel and the lower end portion of the upper closing panel 44b are joined to each other. In this embodiment In the state, the closing panel 44 is divided into a lower closing panel "a and an upper closing surface & drawing, whereby the closing panel 44 is formed by a continuous panel of sheets, and can be made 2014-8943-PF1 12 1344533 ____________ ^ No. _22340 No. 1 of February (I) is replacing 100 years February 1 6 曰 Correction replacement page

ί------I The amount of thermal expansion of the closing panel 44 in the up and down direction during heat treatment is reduced. Further, 'on the lower closing panel 44a and the upper closing panel 44b, 'a plurality of openings 44c are provided which extend in the longitudinal direction of the heat treatment tank 4 and are arranged at predetermined intervals in the vertical direction. Through the opening 44c, the object to be processed can be inserted into the heat treatment space in the heat treatment bath 4. Further, on the outer wall surfaces of the lower closing panel 4 4 a and the upper closing panel 4 4 b, closing portions (not shown) are attached to the respective opening portions 4 4 c. Each of the openings 44c corresponding to each of the closed portions is openable and closable. The above threshold panel 45 is composed of a pair of first sill panels 45a and second sill panels 45b on the left and right sides. One end portion of the first rocker panel 45a is attached to the wall portion 51c of the heating portion lower panel 51 and the wall portion 52c of the heating portion upper panel 52 by a hinge (not shown). The side end portion of the second rocker panel 45b is attached to the wall portion 53c of the side wall lower panel 53 and the wall portion 54c of the side wall upper panel 504 by a hinge (not shown). Further, the other side end portion of the first door φ 扉 panel 45a and the other side end portion of the second sill panel 45b are mutually coupled. With this configuration, the other side end 4 of the first rocker panel 45a and the other side end of the first rocker panel 45b can open the first threshold panel in a double-door manner in a direction away from each other toward the outside. 45a and second threshold panel 45b. Further, by opening the first sill panel 45a and the second sill panel 45b, the worker can enter the heat treatment space in the heat treatment tank 4 to perform maintenance work such as cleaning or replacing the air filter of the heating device 3. The first sill panel 45a is divided into upper and lower portions. The lower door sill panel structure member 45c and the upper sill panel member are the same as the rectangular flat plate. 2014-8943-PF1 13 T344533 No. 096122340

'1 6 -~ ^ E repair (more) replacement page February 16, 100 correction replacement page

Composed of. Further, the lower portion 扉 panel structure member 45c is connected to the lower portion of the upper panel 构造 panel structure member 45 (j, whereby the first threshold panel 45a is formed. Further, the second threshold panel 45b is also returned to the first threshold. The panel 45a is cut into the upper and lower portions in the same manner. The second sill panel 45b is composed of a lower door panel structure member 45e and an upper door panel structure member 45f which are also rectangular plates. The upper end of the lower panel 构造 panel structure member 45e The lower end portion of the upper door panel structure member 45f is joined to the second door panel 45b. The first threshold panel 45a and the second threshold panel 45b are divided into upper and lower portions, respectively. Therefore, compared with the case where the first sill panel 45a and the second sill panel 45b are respectively composed of one continuous panel, the amount of thermal expansion of the first sill panel 45a and the second sill panel 45b during the heat treatment in the up and down direction can be changed. Further, in the joint portions of the side wall panels 42, the floor panel 43, and the respective structures, a sealant is embedded to prevent hot air from being in the heat treatment tank 4. The heat treatment space is leaked out. Further, the two elements that are joined to each other are screwed to the plate-like joint elements (not shown) on the outer wall surface thereof, thereby joining the two elements. The side wall panels 42 are as described above. According to the configuration, there is a portion corresponding to each corner portion of the heat treatment space in the heat treatment tank 4 corresponding to each of the side wall panels. Further, each of the side wall panels 42 is offset from the corner portion of the heat treatment space and other side walls. As shown in Fig. 4, each of the side wall panels 42 has an outer wall material 42a, inner wall materials 42b to 42d, end side wall materials 42e and 42f, and heat insulating material 14 2014-8943-PF1 1344533 _^___ 096122340, ifT. 9 1 ϋ _ 丄 月 日 ( ( 替换 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 。 00 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。. The formed thin plate is formed, and the heat insulating material 42g is formed of glass wool or the like. • The outer side wall material 42a is a material constituting the outer wall of the side wall panel 42. Further, the side wall material 42a is formed by bending a metal thin plate. 2 The material 4 2 a is formed into an L shape or a slightly C shape. Further, the so-called c-shaped sub-shape refers to a shape in which the central ends of the straight line are respectively vertically disposed. Further, by splicing the inner side wall material 4 2 c One end portion of the one end portion and the inner side wall lu material 42b forms a joint portion 42h, and the joint portion 42i is formed by welding the one end portion of the inner side wall material 42d and the other end portion of the inner side wall material 42b. Thus, the inner side The wall materials 42b to 42d are mutually abutted 'by this', and the inner side wall materials 42b to 42d constitute an L shape or a slightly c shape corresponding to the shape of the outer side wall material 42a. Further, these inner wall materials 4 2 b 4 2 d are disposed at a predetermined interval apart from the inner side of the outer side wall material 42 a to constitute the inner wall of the side wall panel 42. φ In addition, the joint portion 42h and the joint portion 42i serve as a portion corresponding to the corner portion of the heat treatment space on the inner wall of the side wall panel 42. Further, the end portion of the adjacent inner wall material 42c and the end portion of the inner wall material 42b are joined to each other by sandwiching the corner portion corresponding to the joint portion 42h. In other words, the end portion of the inner wall material 42b on the side of the inner wall material 42c is bent to the side of the outer wall material 42a, and the inner wall of the portion of the test piece > the outer side surface of the outer wall 42c (outer side surface) and the end of the inner wall material . The faces corresponding to the side of the inner wall material 42b of the crucible are surface-contacted with each other. Further, the end portion of the adjacent inner wall member 42d and the end portion of the inner wall portion 42b which are adjacent to the corner portion corresponding to the joint portion 42 i are joined to each other. In other words, 2014-8943-PF1 15 1344533 No. 096122340----~ Year-on-day repair (more) replacement page 100-year-old 16 曰 Correction of the end of the inner wall material 42d of the replacement page inner wall material 42b is bent to The side of the outer wall material 亚 '' and the side of the inner wall material 42d of the curved portion (outer side surface) and the side of the inner wall material 42d of the inner wall material 42d are surface-engaged. The end side wall material 42e is welded to the inner end of the outer wall material 42a and the other end of the inner wall material 42c, connecting the inner end of the outer wall material weir and the other end of the inner wall material 42c... the end side wall material 42f The other end of the outer wall material and the other end of the inner wall material 42d are spliced. P $ is connected to the other end of the outer wall material 42a and the other end of the inner wall material 42d. Further, the side wall panel 42 is formed in a hollow manner including the outer wall (four), the inner wall materials 42b to 42d, the end side wall material ❿ and the like side wall members. The above-mentioned heat insulating material 42g encloses the space inside the (4) a". Further, when the heat treatment space inside the heat treatment tank 4 is subjected to the heat treatment day, the ribs of the side wall panel 4 2 are thermally expanded. at this time,

The side wall panel 42 is formed in a hollow square - π + , s L manner, resulting in the inner wall material 42b corresponding to the corner portion of the heat treatment space and the joint portion 42h and the inner wall material 4 2 b of the inner wall material member 1 η 枓 枓 42c And the inner wall material 4 2 d of the shackles. The joint portion 42 of the 1] presses the heat-generating material 4 2 g from both sides on the one hand, and one side is _ a from the upper side, and the 丨 is facing the outer earth material 4 2 a Lateral movement, this type of bending deformation is allowed in the case of the soil material 枓42b~42d in the Inner Mongolian. As described above, in the heat treatment apparatus of the present type, the six side wall panels 42, the floor surface squeegee panel 43, the closing panel 44, and the sill panel 45 are combined to form the heat treatment tank 4, ^4 When handling and setting the heat treatment tank 2014-8943-PF1 16 1344533 No. 096122340 1 6 曰修 (more) replacement page When the replacement page 4 is corrected on February 16, 100, 'each side wall panel 4 can be transported individually. 2. Floor panel 4 3. Close the panel 44' sill panel 45' and 'can be combined. Therefore, the work load for transporting and setting the heat treatment tank 4 is reduced. Further, in the heat treatment apparatus 1 of the present embodiment, each of the side wall panels 42 constituting the heat treatment tank 4 has a portion corresponding to the corner portion of the heat treatment space in the heat treatment tank 4, and 'is offset from the corner portion of the heat treatment space. The position is joined to the other side wall panels 42 to obtain a combination. Therefore, when the heat treatment is performed, the inner wall material φ 42b to 42d of the side wall panel 42 corresponding to the inner wall of the heat treatment bath 4 is thermally expanded, as shown in Fig. 5, the end portion of the flat side wall panel ι〇1 and other flat plates. The end wall of the side wall panel 102 and the position corresponding to the corner of the heat treatment space are different in engagement, and the end side wall material 42e of the mutually joined side wall panel 42 (42〇 and the end side wall of the other side wall panel 42) The bending of the material 42e (42f) is difficult to produce on each side wall panel 42. In other words, the end of the flat side wall panel 1 〇 1 shown in Fig. 5 and the end of the other flat side wall panel 1 〇 2 are In the heat treatment tank formed by the joint of the corner portions of the heat treatment space, when the heat treatment is performed, if the inner wall 10a of the side wall panel 101 and the inner wall 1〇2a of the side wall panel 1〇2 are thermally expanded, the side wall panel 1〇1 The bending is changed to the state shown by a in Fig. 5, and on the other hand, the side wall panel 1 〇 2 is bent to form a state shown by B in Fig. 5. Finally, the end portion and the side wall of the side wall panel 1 〇丨Panel 1 0 The ends of 2 are separated from the joints of these ends, and the hot gas leaks from the heat treatment space. In contrast, in this embodiment, as shown in Fig. 4, the side walls 17 2014-8943-PF1 -1344533 _- 096122340 No. </ br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br><br> The end side wall material 4 2 e (4 2 f ) is joined at a position offset from the corner of the heat treatment space, so that 'even if each side wall panel 42 produces a slight bending deformation, the end side wall material 42e of the predetermined side wall panel 42 ( This bending deformation of 42f) and the end side wall material 4 2 e (4 2 f ) of the other side wall panels 42 is also difficult to produce on each side wall panel 42. Thereby, in the present embodiment, the detachment of the joint between the side wall panels 42 due to the bending deformation as described above can be prevented. Therefore, the detachment of the joint between the side wall panels 42 can be prevented from causing the hot gas from the heat treatment. The heat treatment space inside the tank 4 leaks out. Therefore, in the heat treatment apparatus of the present embodiment, the work load of the heat treatment tank 4 can be reduced and the heat can be prevented from leaking from the heat treatment space inside the heat treatment tank 4. Further, in the heat treatment apparatus 1 of the present embodiment, each of the side wall panels 42 is hollow and 'haves a joint portion 42h and an inner wall of the inner wall material 42b and the inner wall material 42c corresponding to the corner portion of the heat treatment space in the heat treatment tank 4. The joint portion 42i of the material 42b and the inner wall material 42d. Therefore, when heat treatment is performed, 'if the inner wall materials 42b to 42d of the side wall panel 42 corresponding to the inner wall of the heat treatment bath 4 are thermally expanded, one end of the inner wall material 42b of each side wall panel 42 presses the end portion of the inner wall material 42c and the inner wall material The other end of 42b is pressed against the end of the inner wall material 42d to cause movement, which is allowed by the space in the hollow side wall panel 42. Further, the end portion of the inner wall material 42c joined to one end of the inner wall material 42b is moved to the side of the outer wall material 42a and the end portion of the inner wall material 42d joined at the other end of the inner wall material 42b is moved to the side of the outer wall material 42a. Because the side wall 18 2014-8943-ppi 1344533 ......... * No. 340 (10) February 16 曰 correction to replace the space inside the page board 42 is allowed. Then, the end portions of the inner wall materials 42b to 42d face the side of the outer wall material 42a, and the bending deformation of the inner wall materials 42b to 42d* is allowed. Thereby, the deformation of the entire side wall panel 42 can be made difficult. Finally, the detachment of the joint between the side wall panels 42 can be further prevented, so that the hot gas can be further prevented from leaking out of the heat treatment space inside the heat treatment bath 4. Further, in the heat treatment apparatus 1 of the present embodiment, the portion corresponding to the corner portion of the heat treatment space is sandwiched, and the end Φ portion of one of the adjacent inner wall materials 42b is bent to the side of the outer wall material, and one of them The outer side surface of the end portion of the inner wall material which is curved is joined to the surface corresponding to the end portion of the other inner wall material 42c (42d). In other words, in this configuration, the bent position of the end portion of one of the inner wall materials 42b and the other The position of the end edges of the inner wall material 42c (42d) is in a state of being deviated from each other, and the joining of the adjacent inner wall materials 42b and 42c (42d) causes the above-mentioned bending in which the maximum displacement occurs due to heat in the inner wall material 42b. The position and the above-mentioned edge which is produced by heat in the other inner wall material 42c (42d) due to heat are not overlapped. In this case, since the deformation behavior differs from the case where the end edges of the two inner wall materials 42b and 42c (42d) adjacent to the corner portion are connected to each other, the portion corresponding to the corner portion is changed to y. Thereafter, the phenomenon of stress concentration occurring at a portion corresponding to the above-described corner portion can be alleviated. Further, according to the above configuration, the inner wall material 4 corresponding to the corner portion and the end portion of the cymbal 42 (1) can be joined to each other, so that the pair corresponding to the corner portion can be improved. Therefore, according to the above-mentioned 冓, phase &amp; only the adjacent inner wall material looks like (4) d) end 2014-8943-PF1 19 1344533 No. 096122340

On February 16th, 2010, the replacement of the edge of the page edge was corrected. On the one hand, the stress concentration caused by the portion corresponding to the corner of the heat treatment space of the inner soil can be alleviated. On the one hand, it can be said that it is equivalent to the corner. The durability of the parts. Further, in the heat treatment setting 1 of the present embodiment, the heat insulating material 42g is provided inside the side wall panel 42, so that the heat treatment space in the heat treatment tank 4 can be lifted from the heat insulating material 42g by the heat insulating material 42g. Companion, σ _ _ 7 7 save the sex. This can improve the efficiency of heat treatment. Moreover, the various features mentioned in the embodiments disclosed herein are intended to be illustrative only and not limiting the scope of the invention. The scope of the present invention is not to be construed as being limited to the scope of the present invention. For example, in the above-described embodiment, the heat treatment apparatus i for heating and applying heat treatment to the glass plate for liquid crystal has been exemplified, but the present invention is not limited thereto. The present invention is also applicable to various types other than the glass plate for liquid crystal. The heat treatment device for treating the object to be subjected to heat treatment. (Outline of this embodiment), and the outlines of the ''T and s' modes of the present embodiment are as follows. That is, the heat treatment apparatus of the present embodiment forms a heat treatment tank having an outer wall and an inner wall forming a rectangular heat treatment space inside the outer wall by combining a plurality of medium-wall structure members. Each side wall structure member has an outer wall material, a plurality of inner wall materials, and end side wall materials connecting the ends of the outer wall material and the ends of the corresponding inner wall materials; the inner wall material and the end σΙΜ wall material system are formed of a thin metal plate; the hollow corner portion is heat-treated, The joint between the two adjacent inner wall materials is replaced by 2014-8943-PF1 20 1344533 No. 096122340 27lT^--1〇〇^ 2 β 16th day).曰Correct the replacement page. to make. The plurality of sidewall construction elements further include: a first sidewall construction member having adjacent two inner wall materials and a joint portion, the cross section perpendicular to the joint portion being L-shaped, and the second sidewall construction member located at the first sidewall construction member The proximity of the inner wall material of the two inner wall materials of the piece. In a position offset from the joint to the side of the second side wall construction member, the end side wall material of the first side wall structural member and the end side wall material of the second side wall construction member opposite the end side wall material are face-engaged. In this heat treatment apparatus, the heat treatment grooves are formed by combining a plurality of side wall structure members, so that when the heat treatment grooves are conveyed and disposed, the side wall structure members can be individually transported and combined. Therefore, the work load of the heat treatment tank can be reduced and disposed. / In this heat treatment apparatus, each of the side wall forming members constituting the heat treatment tank has a portion corresponding to the ridge treatment, the corner portion between the tamping stations, and the position of the pseudo-transfer heat treatment space from the (1) human angular position and other side walls The structural elements are joined to each other. Therefore, when the heat treatment is performed, if the inner wall of the heat treatment groove is formed, the end portion of the side wall structural member is at a position corresponding to the corner between the two sides of the heat treatment groove. The structure of the element and the bite groove are different, and the end portions of the side walls of the mutually joined side walls and the end portions of the other side sills, and the end portions of the ^ are in a state of being separated from each other, and it is difficult to be bent and deformed on each of the side wall structural elements. The pick-up &amp; * production can prevent such a bend, and the detachment of the joint between the two heat treatment tanks (4) can be prevented from causing hot air to escape from the process space. Therefore, the burden of handling and setting of the heat treatment tank in the heat treatment apparatus, 2014-8943-PF1 21 1344533 No. 096122340, February 16, 100 corrections, replacement page, year, month, repair, (replacement), replacement page---- ----- Aspects prevent hot air from the heat treatment tank inside the h door. The heat treatment space of P leaks out. Moreover, in this heat treatment, the side wall structural elements are hollow, and have a portion opposite to the corner of the heat treatment space &amp;], so when the heat treatment is performed, the right heat is good. The thermal expansion of the inner wall of the vertical wall is caused by the movement of the inner wall of each of the side wall structural elements, and the portion corresponding to the corner of the inner king, moving toward the outer wall, thereby causing the side wall to broadcast 1 _ soil structure k The bending deformation of the inner wall of the 7L piece is allowed. Thereby, the bending deformation of the 7G piece of the entire side shovel and the J-soil structure is difficult to produce. Finally, the Kubo, 丨#k 1 side soil structure can be more reliably prevented. The detachment of the joint between the 7L members is performed, so that the heat treatment space inside the heat treatment tank of the heat treatment device is leaked. 又 Further, in the above heat treatment apparatus, the joint portion 2 is formed. Among the inner wall materials, the end portion of the inner wall material is bent to the outer wall (four), and the outer side of the curved end portion of the inner wall material is joined to the side corresponding to the end portion of the other inner wall material. Such a structure In a state in which the bent position of the end portion of one of the inner wall materials and the position of the end edge of the other inner wall material are mutually offset, the ends of the adjacent inner wall materials are joined, and an inner wall material is caused by heat : the above-mentioned bending position which produces the maximum displacement and the above-mentioned edge which is the largest displacement due to heat in the other inner wall material are not overlapped and joined. In this case, since it is adjacent to only the above-mentioned corner portion 2 When the edge of the inner wall material is joined, the deformation behavior is different from the corner portion, and finally, the stress concentration at the portion corresponding to the corner portion can be alleviated. Further, according to the above configuration, The end portion of the inner wall material adjacent to the portion corresponding to the corner portion can be joined to the surface, so that the angle can be increased from the above angle 2D14 to 8943 to PF1 22 1344533. No. 096122340

It is the durability of the part of the part. Therefore, according to the above configuration, the stress concentration caused by the portion corresponding to the corner portion of the heat treatment space of the inner wall can be alleviated on the one hand, compared with the case where only the end edges of the adjacent inner wall materials are joined. Improve the durability of the portion corresponding to the corner. Further, as a specific configuration example of the heat treatment apparatus, the configuration of the second side wall structural member may include a first member having an L-shaped cross section, a horizontal portion extending from a straight line, and a vertical portion vertically disposed from both end portions of the horizontal portion, respectively. At least one of the second elements of the composition.

Further, in the above heat treatment apparatus, a heat insulating material is provided inside the side wall structure member. According to this configuration, the heat insulation of the heat treatment is improved by the heat insulating material, so that the heat treatment efficiency of the ancients can be recovered. Further, in the above heat treatment apparatus, if ^ ^ ® ^ ^ may have a k-wind which sends air back to the hot groove and a heating which heats the air.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the overall structure of the present device. /, the heat of the shell type Figure 2 is a perspective view 'from the other device. See the heat shown in Figure 1. Figure 3 is a perspective view of the heat treatment shown in Figure 1. Decomposition of the heat treatment tank of the apparatus Fig. 4 is a cross-sectional view showing the wall of the tank. Figure 5 of the heat treatment shown in Fig. 3 shows the wall of the heat treatment tank, which serves as a description of the implementation of this application 2014-8943-ρρτ 23 1344533, revised on February 16, 100, replace page 096122340 | 77'; VT 6 - January 1 a comparison example of the effect of replacing the page type. [Main component symbol description] 1 heat treatment device; 2 air supply unit; 3 heating device; 4 heat treatment tank; 21 air supply unit stand; Air supply cover; 41 gantry; 42 side wall panel; 42a outer wall material; 42b~42d inner wall material; 42g heat insulation material; 42e, 42f end side wall and 42h, 42i joint; .43 ground panel; 43a first ground panel , 43b second floor panel; 44 closing panel; 44a lower closing panel; 44b upper closing panel, 44c opening; 45 sill panel; 45a first sill panel; 45b second sill panel; 51 heating lower panel; 51 b ~ 51 d wall; 52 heating upper panel; 52a ceiling; 52b~52d wall; 53 side wall lower panel; 53a bottom; 5 3b- 53d wall; 54 side wall upper panel 54a ceiling; 54b~54d wall; 55 first ceiling; 5 5a naturalized plate section; 55b, 55c wall section; 56 second ceiling; 56a naturalized plate section; 56b, 56c wall section; 101 flat side wall panel 101a inner wall; 2014-8943-PF1 24 1344533 No. 096122340 102 45c 45d 45e 45f 41a, ΙΛΟ 9 1 〇&quot;&gt; ^曰修(more) replacement page flat side wall panel;——ΰ) 2a lower section扉Panel construction component; upper sector 扉 panel construction component; lower section 扉 panel construction component; upper department 扉 panel construction component; 41b, 41c gantry construction component February 16th, 100th correction replacement page inner wall; 2014-8943-PF1 25

Claims (1)

Ί344533 No. 096122340 jlOQ. 2. I ^ ^-j 月月日修 (more) is replacing page W0 February 16 曰Correct replacement page ten, patent application scope:]·heat treatment device, by combining multiple _ The hollow side wall structural member is formed with a heat treatment groove having an outer wall and an inner wall forming a rectangular parallelepiped heat treatment space inside the outer wall, wherein the wall material and the plurality of inner wall materials corresponding to the inner wall material have the outer wall structural elements And an end wall material connecting the end portion and the end portion of the outer wall material; the inner wall material made of metal and the end side wall material thin plate; the corner portion of the heat treatment space, by the mouth nr a joint between the inner materials of the mesh; the plurality of side wall structural component members, the two (four) materials of the first and second side wall structures, and the joint portion The section of the section is L-shaped. The perpendicular to the sidewall structure element, the +/ side component is located in the two inner wall materials of the first cow - Adjacent to the material; ', the inner wall of the person is offset from the joint portion to the second side, the first side cover, the raw side, the side of the element side of the side wall material opposite to the _ ▲ material and The wall material is joined by the surface. The above-mentioned end portion of the soil piece, the heat treatment device of the first item of the patent range, h... to: among the above two inner wall materials of the joint portion: / shape 5, the outer wall side, i t $曲出的端部1 1344533 No. 096122340 ΐδα~2^ΓΒ---) Year of the month repair (3⁄4 positive replacement page I 100 February 16 correction replacement page ' ''------- The outer side surface is joined to the surface corresponding to the end of the other inner wall material. The heat treatment device according to claim 1 or 2, wherein the second side wall structural element comprises at least one of the following elements a first component having an L-shaped cross section; and a second component comprising a horizontal portion extending from a straight line and a vertical portion respectively disposed perpendicularly from opposite ends of the horizontal portion. The heat treatment device, wherein the inside of the side wall structural element is provided with a heat insulating material. 5' The heat treatment device of the patent item ii of the Shenqing patent, comprising: a clothes blowing portion for conveying air to the heat treatment tank; and heating The device heats the air. 2014-8943-PF1 21 1344533 No. 090122340 February 100] Correction of the replacement page on the 6th, 3 4 repair (more) replacement page VII, designated representative ~ (1) The representative representative of the case is: (1) b) The symbol of the symbol of the representative figure is briefly described: 1~heat treatment device; 3~heating device; 21~air supply frame; 41~frame; 44~closed panel; 44b~upper closed panel; 51~heating lower panel; ~ heating section upper panel; 52b ~ wall section; 53b' 53d ~ wall section, 54a ~ ceiling section; 55 ~ first ceiling; 55b ~ wall section; 56a ~ wall section; 55a ~ ceiling section; 56 ~ second ceiling ; 5 6 b ~ wall portion; 41a' 41b, 41C ~ gantry structure components. 2~air supply part; 4~heat treatment tank; 22~ air supply cover; 42~ side wall panel; 44a, lower closed panel 44c-^opening; 51b, ^wall; 52a, ceiling; 53~ side wall Lower panel 54 ~ Side wall upper panel 54b, 54d ~ wall; Eight, this case chemical vehicle, please fine _ Ke Xiaoshi chemical formula: benefits. &quot;*, 2 014 - 8943-PF3.