1343166 (1) 九、發明說明 【發明所屬之技術領域】 本發明係有關對半導體相關製造裝置、封裝機械、加 工機械等產業用機器實用的線形馬達。 【先前技術】 本發明係有關使用於例如電器零件封裝裝置、半導體 相關裝置或工作母機等各種產業機械，適於此直接驅動機 構的驅動用的線形馬達，且有關以由永久磁鐵構成的場磁 作爲活動元件，具有電樞線圈的電樞作爲定子所構成的活 動磁鐵型線形馬達，或以電樞線圈作爲活動元件，永久磁 鐵作爲定子所構成的活動線圈型線形馬達。 習知使用於電器零件封裝裝置、半導體相關裝置或工 作母機等各種產業機械，適於此直接驅動機構的驅動用的 線形馬達如第5圖所示構成。第5圖係表示活動磁鐵型線 形馬達的習知技術的圖式，（a )係俯視圖，（b )係沿（ a )的B _ B線的正剖面圖，（a )相當於自（b )的箭頭A 透視的圖式。 於第5圖中，21係固定底座，2 2係磁鐵軌跡，2 3係 場磁永久磁鐵，24係場磁軛，25係導軌，26係導塊，27 係感測頭，28係線形刻度部，29係止動件，30係電樞， 3 1係電樞線圈，3 2係接線基板。 線形馬達於場磁永久磁鐵23的背面設置場磁軛24， 場磁軛24兼用於活動元件及磁氣回路。又，電樞30具有 -4 - (2) 1343166 具備複數個固裝於接線基板3 2上的無槽電樞線圈3】的構 造，與活動元件間隔有磁氣空隙，配置於可爲固體磁性構 件的固定座2 1上，構成定子。且，面對場磁永久磁鐵2 3 將用來檢測磁極的複數個未圖示的霍爾元件埋入接線基 板3 2。該霍爾元件（未圖示）檢測於電源通電初期時間點 ’哪一個霍爾元件面對的場磁磁鐵的位置，匹配所檢出場 磁磁鐵23的位置，輸出使驅動電流流至電樞線圈3 1的檢 9 測訊號（例如，參考專利文獻])。 於該電樞3 0兩側，平行導軌2 5固定於固定座21上 ’於導軌25上，沿該軌上滑動的導塊26固定於場磁軛24 兩端的下部。進而，於活動元件的側面配設構成線形編碼 器的磁氣式線形刻度部28。面對該線形刻度部28，配設 檢測該線形刻度部28的感測頭27於固定座21上。因此 ，於二導軌2 5的端部間設置用來防止活動元件的逾越的 止動件2 9。 φ 該線形馬達形成場磁永久磁鐵2 3的磁束與固定座2】 鏈交的磁氣回路構造》若對電樞線圈3 1勵磁，即藉由場 磁及電樞形成的移動磁場，於電樞長與活動元件長的差的 ' 動程內直線移動活動元件（例如，參考專利文獻1及2 ) 專利文獻1 :日本專利特開平9 — 2 6 6 6 5 9號公報（說 明書第5頁、第3圖） 專利文獻2 :日本專利特開2 0 0 2 — 1 〇 6 1 7號公報（說 明書第7頁〜第9頁、第1圖 '第3圖） -5- (3) (3)1343166 【發明內容〕 (發明欲解決之問題） 第6圖係習知3相交流馬達之一例子，僅表示活動元 件及定子。（a )係俯視圖，（b )係自與線形馬達的進行 方向成直角的方向（X方向）觀看的正視圖。於圖中，此 線形馬達的複數個（圖中爲6個）永久磁鐵1沿與X方向 平行的Y方向並設，複數個（圖中爲3個）線圈2與其間 隔有磁氣間隙，沿與X方向平行的Y方向並設。 於此，永久磁鐵1及線圈2的任一方可爲活動元件， 另一方爲定子。活動元件可沿Y方向（圖中爲上下方向） 移動距離A。 由於推進力不朝X方向作用，故永久磁鐵1的X方 向長度大致與線圈2的X方向長度相等或小一些。 第7圖係習知直流馬達之一例子.，僅表示活動元件及 定子。（a )係俯視圖，（b )係自與線形馬達的進行方向 成直角的方向（X方向）觀看的正視圖。於圖中，此線形 馬達的2個永久磁鐵1沿與X方向平行的γ方向並設，1 個線圈2與其間隔有磁氣間隙，平行於X方向配置。於此 ’永久磁鐵1及線圈2的任一方亦可爲活動元件，另—方 爲定子。活動元件可沿Y方向（圖中爲上下方向）移動距 離A。於推力發生方向的動程短等情況下，此種單純的直 流線形馬達很有利。 且由於在此’推進力亦不朝X方向作用，故永久磁鐵 -6 - (4) (4)1343166 】的X方向長度大致與線圈2的X方向長度相等或小一些 〇 如以上1習知線形馬達可爲3相交流線形馬達，亦可 爲直流線形馬達，只有推力發生方向（Y方向）的動程充 分的永久磁鐵及線圈長度，在沿與推力方向正交的非推力 方向（X方向）移動，永久磁鐵]與線圈2的相對位置變 化情況下’有助於推力的其相向面積減少，造成推力降低 〇 因此，於組合線形馬達，作成具有二方向以上活動範 圍的段式構成情況下，下位線形馬達須夾帶上位線形馬達 全體活動，對夾帶上位線形馬達全體活動的下位線形馬達 構成高負荷。 本發明係爲解決此種問題而開發完成者，其目的在於 提供即使線形馬達相對於線形馬達本來的推力發生方向， 朝與其正交的非推力方向位移，仍維持期望推進力的線形 馬達。 (用以解決問之手段） 爲解決上述問題，本發明如次構成。 .申請專利範圍第1項所載發明爲一種線形馬達，是由 構成場磁的永久磁鐵及隔有磁氣空隙地對向於前述永久磁 鐵配置的線圈所構成，前述永久磁鐵及前述線圈的任一方 爲活動元件，另一方爲定子的線形馬達，其特徵在於：沿 與在前述活動元件所生推力發生方向正交的方向的前述永 -7 - (5) (5)1343166 久磁鐵的長度，是成爲即使前述活動元件沿前述正交方向 位移，前述線圏的前述正交方向端部仍不會自前述永久磁 鐵的前述正交方向端部露出的長度。 申請專利範圍第2項所載發明爲一種線形馬達，是由 構成場磁的永久磁鐵及隔有磁氣空隙地對向於前述永久磁 鐵配置的線圈所構成，前述永久磁鐵及前述線圈的任一方 爲活動元件，另一方爲定子的線形馬達，其特徵在於：沿 與在前述活動元件所生推力發生方向正交的方向的前述線 圈的長度，是成爲即使前述活動元件沿前述正交方向位移 ，前述永久磁鐵的前述正交方向端部仍不會自前述線圏的 前述正交方向端部露出的長度。 申請專利範圍第3項所載直流單相線形馬達之發明的 特徵在於：由如申請專利範圍第1或2項之複數個前述永 久磁鐵及一個前述線圈構成。 申請專利範圍第3項所載交流3相線形馬達之發明的 特徵在於：由如申請專利範圍第1或2項之複數個前述永 久磁鐵及複數.個前述線圈構成。 (發明效果） 根據申請專利範圍第I及2項之發明，下位線形馬達 無須作動上位線形馬達全體，即使僅作動上位線形馬達的 活動元件’有助於推力發生的永久磁鐵與線圈的相對面積 仍不會變化，不會導致推力降低。 因此’可大幅減輕下位線形馬達的負荷質量，可對裝 -8 - (6) 迦化或裝置高性能化有很大貢獻。 梅據申請專利範圍第3及4項之發明，獲得有助於推 力 g 生的永久磁鐵與線圏的相對面積不會變化，因此，又1343166 (1) Description of the Invention [Technical Field] The present invention relates to a linear motor that is practical for industrial equipment such as a semiconductor-related manufacturing apparatus, a packaging machine, and a processing machine. [Prior Art] The present invention relates to a linear motor suitable for driving various industrial machines such as an electric component packaging device, a semiconductor related device, or a work machine, and is suitable for driving the direct drive mechanism, and relates to a field magnet composed of a permanent magnet. As the movable element, an armature having an armature coil serves as a movable magnet type linear motor composed of a stator, or an active coil type linear motor in which an armature coil is used as a movable element and a permanent magnet is used as a stator. It is conventionally used for various industrial machines such as an electric component packaging device, a semiconductor related device, or a work machine, and a linear motor suitable for driving the direct drive mechanism is constructed as shown in Fig. 5. Fig. 5 is a view showing a conventional technique of a movable magnet type linear motor, (a) is a plan view, (b) is a front sectional view taken along line B_B of (a), and (a) is equivalent to (b) ) The perspective of the arrow A perspective. In Figure 5, 21 series fixed base, 2 2 series magnet track, 2 3 field magnetic permanent magnet, 24 series field yoke, 25 series guide rail, 26 series guide block, 27 series sensor head, 28 series linear scale Department, 29 series stopper, 30 series armature, 3 1 series armature coil, 3 2 series wiring board. The linear motor is provided with a field yoke 24 on the back surface of the field permanent magnet 23, and the field yoke 24 is also used for the movable element and the magnetic circuit. Further, the armature 30 has a structure in which -4 - (2) 1343166 includes a plurality of slotless armature coils 3 fixed on the wiring board 3 2, and is spaced apart from the movable element by a magnetic air gap, and is disposed in a solid magnetic field. The stator 2 of the member constitutes a stator. Further, a plurality of Hall elements (not shown) for detecting the magnetic poles are embedded in the wiring board 3 2 facing the field magnetic permanent magnets 2 3 . The Hall element (not shown) detects the position of the field magnet that faces the Hall element at the time point when the power source is energized, matches the position of the detected field magnet 23, and outputs the drive current to the armature coil. 3 1 test signal (for example, refer to patent documents)). On both sides of the armature 30, the parallel rails 25 are fixed to the fixing base 21 on the guide rails 25, and the guide blocks 26 sliding along the rails are fixed to the lower portions of the both ends of the field yoke 24. Further, a magnetic air type linear scale portion 28 constituting a linear encoder is disposed on the side surface of the movable element. Facing the linear scale portion 28, a sensing head 27 for detecting the linear scale portion 28 is disposed on the fixed base 21. Therefore, a stopper 29 for preventing the passage of the movable member is provided between the ends of the two guide rails 25. φ The linear motor forms the magnetic field of the field magnetic permanent magnet 23 and the fixed seat 2] The magnetic circuit structure of the chain is excited. If the armature coil 31 is excited, that is, the moving magnetic field formed by the field magnet and the armature, In the case of a difference in the length of the armature and the length of the movable element, the moving element is moved linearly in the stroke (for example, refer to Patent Documents 1 and 2) Patent Document 1: Japanese Patent Laid-Open No. 9-2 6 6 6 5 9 (Instruction No. 5 Page, FIG. 3) Patent Document 2: Japanese Patent Laid-Open No. 2 0 0 2 - 1 〇 6 1 7 (Article 7 to page 9 and Figure 1 '3) -5- (3) (3) 1343166 [Disclosure of the Invention] (Problem to be Solved by the Invention) Fig. 6 is an example of a conventional three-phase AC motor, and only shows a movable element and a stator. (a) is a plan view, and (b) is a front view viewed from a direction (X direction) at right angles to the progress direction of the linear motor. In the figure, a plurality of (six in the figure) permanent magnets 1 of the linear motor are juxtaposed in the Y direction parallel to the X direction, and a plurality of (three in the figure) coils 2 are spaced apart from each other by a magnetic air gap. The Y direction parallel to the X direction is juxtaposed. Here, either of the permanent magnet 1 and the coil 2 may be a movable element, and the other side may be a stator. The movable element can move the distance A in the Y direction (up and down direction in the figure). Since the propulsive force does not act in the X direction, the length of the permanent magnet 1 in the X direction is substantially equal to or smaller than the length of the coil 2 in the X direction. Figure 7 is an example of a conventional DC motor. It only shows the moving element and the stator. (a) is a plan view, and (b) is a front view viewed from a direction (X direction) at right angles to the progress direction of the linear motor. In the figure, the two permanent magnets 1 of the linear motor are arranged in the γ direction parallel to the X direction, and one coil 2 is spaced apart from each other by a magnetic air gap, and is arranged parallel to the X direction. Here, either of the permanent magnet 1 and the coil 2 may be a movable element, and the other is a stator. The movable element can move the distance A in the Y direction (up and down direction in the figure). Such a simple DC motor is advantageous in the case where the stroke in the direction in which the thrust occurs is short. Since the 'propulsion force does not act in the X direction here, the length of the permanent magnet -6 - (4) (4) 1343166 is substantially equal to or smaller than the length of the coil 2 in the X direction, such as the above. The linear motor can be a 3-phase AC linear motor or a DC linear motor. Only the permanent magnet and the coil length with a sufficient stroke in the thrust direction (Y direction) are in the non-thrust direction orthogonal to the thrust direction (X direction). ) When the relative position of the moving magnet and the permanent magnet is changed, the relative area of the thrust is reduced, and the thrust is reduced. Therefore, in the case of the combined linear motor, the segmental structure having the moving range of two or more directions is formed. The lower linear motor must carry the entire movement of the upper linear motor, and constitute a high load for the lower linear motor that carries the entire linear motor of the upper position. The present invention has been made in order to solve such a problem, and an object of the invention is to provide a linear motor that maintains a desired thrust force even if the linear motor is displaced in a non-thrust direction orthogonal thereto with respect to the origin of the linear motor. (Means for Solving the Problem) In order to solve the above problems, the present invention is constituted as follows. The invention of the first aspect of the invention is a linear motor comprising a permanent magnet constituting a field magnet and a coil disposed opposite to the permanent magnet with a magnetic air gap therebetween, wherein the permanent magnet and the coil are A linear motor in which one of the movable elements and the other is a stator is characterized in that the length of the permanent magnet is in the direction orthogonal to the direction in which the thrust of the movable element is generated, When the movable element is displaced in the orthogonal direction, the end portion of the turn in the orthogonal direction is not exposed from the end portion of the permanent magnet in the orthogonal direction. The invention according to claim 2 is a linear motor comprising a permanent magnet constituting a field magnet and a coil disposed opposite to the permanent magnet with a magnetic air gap therebetween, and either one of the permanent magnet and the coil a linear motor which is a movable element and whose other is a stator, wherein the length of the coil in a direction orthogonal to a direction in which the thrust of the movable element is generated is such that even if the movable element is displaced in the orthogonal direction, The end portion of the permanent magnet in the orthogonal direction is not exposed to the length of the end portion of the aforementioned turns in the orthogonal direction. The invention of the direct current single-phase linear motor according to the third aspect of the invention is characterized in that it consists of a plurality of the permanent magnets and one of the aforementioned coils as set forth in claim 1 or 2. The invention of the AC three-phase linear motor according to the third aspect of the patent application is characterized in that it consists of a plurality of the permanent magnets and a plurality of the aforementioned coils as set forth in claim 1 or 2. (Effect of the Invention) According to the invention of the first and second aspects of the patent application, the lower linear motor does not need to actuate the entire linear motor, even if only the movable element of the upper linear motor is actuated, the relative area of the permanent magnet and the coil contributing to the thrust is still Will not change, will not lead to reduced thrust. Therefore, the load quality of the lower linear motor can be greatly reduced, which can greatly contribute to the high performance of the -8 - (6). According to the inventions of the third and fourth patent applications, the relative area of the permanent magnets and the turns that contribute to the thrust is not changed, so
> I W β _致推力降低的單相直流線形馬達或3相交流線形馬 【鹙施方式】 (. Μ U實施發明之最佳形態） 以下，參考圖式，對本發明之實施形態加以說明。 (貢施例1 ) 笫1圖係本發明實施例1的3相交流線形馬達之一例 子 ’其僅表示活動元件及定子。（a )係俯視圖，（b )係 __線形馬達的進行方向成直角的方向（X方向）觀看的 $視圖。於圖中，此線形馬達的複數個（於圖中爲6個） 永久磁鐵1沿與X方向平行的Y方向並設，複數個（於 圖中爲3個）線圈2與其間隔有磁氣間隙，沿與X方向平 行的Y方向並設。 於此’永久磁鐵1及線圈2的任一方可爲活動元件’ 另一方爲定子。藉由線圈通電’本線形馬達發生朝圖之Y 方向的推力。又，本線形馬達自身的推力方向動程爲移動 距土A。 根據本發明實施例1，永久磁鐵1的X方向的長度成 爲即使活動元件沿X方向位移，線圈2的X方向端部仍 -9 - (7) (7)1343166 不會自永久磁鐵】的X方向端部露出的長度（《X方向永 久磁鐵長度》X方向線圈長度）。 由於藉由如此構成，即使線圈例如朝圖之X方向移動 土B，其相向面積仍不變，且由於有助於推力發生的永久磁 鐵1及線圈2的相對面積不變，故不會導致推力降低。因 此，在以永久磁鐵1爲定子，以線圈2爲活動元件情況下 ，未圖不的下位線形馬達可僅活動線圈2，可減輕永久磁 鐵1份的負荷質量。通常，永久磁鐵]爲提高與線圈2鏈 交的磁束密度，接合於鐵構件，若含此，即大幅減低負荷 。於此情況下，以線圈2作爲活動元件有利。 (實施例2 ) 第2圖係本發明實施例2的3相交流線形馬達之一例 子，其僅表示活動元件及定子。（a )係俯視圖，（b )係 自與線形馬達的進行方向成直角的方向（X方向）觀看的 正視圖。於圖中，此線形馬達的複數個（於圖中爲6個） 永久磁鐵1沿與X方向平行的Y方向並設，複數個（於 圖中爲3個）線圈2與其間隔有磁氣間隙，沿與X方向平 行的Y方向並設。 於此，永久磁鐵1及線圈2的任一方可爲活動元件， 另一方爲定子。藉由線圈通電，本線形馬達發生朝圖之 Y 方向的推力。又，本線形馬達自身的推力方向動程爲移動 距土 A。 根據本發明實施例2，線圏2的X方向的長度成爲即 -10 · (8) (8)1343166 使活動元件沿X方向位移’永久磁鐵1的χ方向端部仍 不會自線圈2的X方向端部露出的長度（《X方向線圈長 度》X方向永久磁鐵長度）。 由於藉由如此構成，即使永久磁鐵1例如朝圖之χ方 向移動±B，其相向面積仍不變’且由於有助於推力發生的 永久磁鐵1及線圈2的相對面積不變，故不會導致推力降 低。因此’在以線圈2爲定子，以永久磁鐵〗爲活動元件 情況下’未圖示的下位線形馬達可僅活動永久磁鐵1，可 減輕線圈2份的負荷質量。於此情況下，以永久磁鐵1作 爲活動元件有利。 (實施例3 ) 第3圖係本發明實施例3的單相直流線形馬達之一例 子’其僅表示活動元件及定子。（a )係俯視圖，（b )係 自與線形馬達的進行方向成直角的方向（X方向）觀看的 正視圖。於圖中，此線形馬達的2個永久磁鐵1沿與χ方 向平行的Y方向並設，1個線圈2與其間隔有磁氣間隙， 平行於X方向配置。 於此，永久磁鐵1及線圈2的任一方可爲活動元件， 另一方爲定子。藉由線圈通電，本線形馬達發生朝圖之Y 方向的推力。又，本線形馬達自身的推力方向動程爲移動 距土A。 根據本發明實施例3，永久磁鐵1的χ方向的長度成 爲即使活動元件沿X方向位移，線圈2的X方向端部仍 -11 - (9) (9)1343166 不會自永久磁鐵1的X方向端部露出的長度（《χ方向永 久磁鐵長度》X方向線圏長度）。 由於fit由如此構成’即使線圈2例如朝圖之χ方向移 動士B’其相向面積仍不變，且由於有助於推力發生的永久 磁鐵1及線圈2的相對面積不變，故不會導致推力降低。 因此’在以永久磁鐵1爲定于，以線圈2爲活動元件情況 下’未圖不的下位線形馬達可僅活動線圈2，可減輕永久 磁鐵1份的負荷質量。通常，永久磁鐵1爲提高與線圈2 鏈交的磁束密度，接合於鐵構件，若含此，即大幅減低負 荷。於此情況下，以線圈2作爲活動元件有利。於推力發 生方向的動程短等情況下，此種單純的單相直流線形馬達 有利。 (實施例4 ) 第4圖係本發明實施例4的單相直流線形馬達之一例 子，其僅表示活動元件及定子。（a )係俯視圖，（b )係 自與線形馬達的進行方向成直角的方向（X方向）觀看的 正視圖。於圖中，此線形馬達的2個永久磁鐵1沿與X方 向平行的Y方向並設，1個線圈2與其間隔有磁氣間隙， 平行於X方向配置。 於此，永久磁鐵1及線圈2的任一方可爲活動元件， 另一方爲定子。藉由線圈通電，本線形馬達發生朝圖之 Y 方向的推力。又，本線形馬達自身的推力方向動程爲移動 距土A。 -12- (10) (10)1343166 根據本發明實施例4，線圈2的X方向的長度成爲即 使活動元件沿X方向位移，永久磁鐵i的χ方向端部仍 不會自線圈2的X方向端部露出的長度（《χ方向線圈長 度》X方向永久磁鐵長度）。 由於錯由如此構成’即使永久磁鐵]例如朝圖之χ方 向移動±Β’其相向面積仍不變，且由於有助於推力發生的 永久磁鐵1及線圈2的相對面積不變，故不會導致推力降 低。因此’在以線圈2爲定子，以永久磁鐵】爲活動元件 情況下’未圖示的下位線形馬達可僅活動永久磁鐵1，可 減輕線圈2份的負荷質量。於此情況下，以線圈2作爲活 動元件有利。 (產業上可利用性） 根據本發明，具有以下效果。 可使線形馬達的活動元件或定子單獨，並使另一下位 線形馬達活動，可大幅減輕下位線形馬達的負荷質量’結 果，下位線形馬達可謀得高性能化、小型化。 因此，可對裝置的高性能化、小型化有利。 【圖式簡單說明】 第1圖係本發明實施例1的3相交流線形馬達的槪略 構成圖。 第2圖係本發明實施例2的3相交流線形馬達的槪略 構成圖。 -13- (11) 1343166 第3圖係本發明實施例3的單相直流線形馬達的槪略 構成圖。 第4圖係本發明實施例4的單相直流線形馬達的槪略 構成圖。 第5圖係習知移動磁鐵型線形馬達的槪略構成圖。 第6圖係習知3相交流線形馬達的槪略構成圖。 第7圖係習知直流線形馬達的槪略構成圖。> I W β _ Single-phase DC linear motor or three-phase AC linear horse with reduced thrust [Configuration] (. 最佳 U Best Mode for Carrying Out the Invention) Hereinafter, embodiments of the present invention will be described with reference to the drawings. (Gruning Example 1) Fig. 1 is an example of a three-phase AC linear motor according to Embodiment 1 of the present invention, which shows only a movable element and a stator. (a) is a plan view, and (b) is a view of the __ linear motor in a direction in which the direction of the motor is oriented at a right angle (X direction). In the figure, a plurality of the linear motors (six in the figure) are provided in the Y direction parallel to the X direction, and a plurality of (three in the figure) coils 2 are spaced apart from each other by a magnetic gap. , and is arranged in the Y direction parallel to the X direction. Here, either one of the permanent magnet 1 and the coil 2 may be a movable element' and the other side may be a stator. When the coil is energized, the linear motor generates a thrust in the Y direction of the figure. Further, the stroke direction of the linear motor itself is the moving distance from the soil A. According to the first embodiment of the present invention, the length of the permanent magnet 1 in the X direction becomes such that even if the movable member is displaced in the X direction, the end portion of the coil 2 in the X direction is still -9 - (7) (7) 1343166 does not self from the permanent magnet] The length at which the direction end portion is exposed ("X-direction permanent magnet length" X-direction coil length). With such a configuration, even if the coil moves the soil B in the X direction of the drawing, for example, the opposing area does not change, and since the relative areas of the permanent magnet 1 and the coil 2 contributing to the thrust are not changed, the thrust is not caused. reduce. Therefore, when the permanent magnet 1 is used as the stator and the coil 2 is the movable element, the lower linear motor which is not shown can move only the coil 2, and the load quality of one permanent magnet can be reduced. In general, the permanent magnets are joined to the iron member in order to increase the magnetic flux density which is interlinked with the coil 2, and if this is included, the load is greatly reduced. In this case, it is advantageous to use the coil 2 as a movable element. (Embodiment 2) Fig. 2 is a view showing an example of a three-phase AC line motor according to Embodiment 2 of the present invention, which only shows a movable element and a stator. (a) is a plan view, and (b) is a front view viewed from a direction (X direction) at right angles to the progress direction of the linear motor. In the figure, a plurality of the linear motors (six in the figure) are provided in the Y direction parallel to the X direction, and a plurality of (three in the figure) coils 2 are spaced apart from each other by a magnetic gap. , and is arranged in the Y direction parallel to the X direction. Here, either of the permanent magnet 1 and the coil 2 may be a movable element, and the other side may be a stator. When the coil is energized, the linear motor generates a thrust in the Y direction of the figure. Moreover, the stroke direction of the linear motor itself is the moving distance from the soil A. According to Embodiment 2 of the present invention, the length of the turns 2 in the X direction becomes -10 · (8) (8) 1343166 The movable member is displaced in the X direction. The end portion of the permanent magnet 1 in the meandering direction is still not from the coil 2. The length at which the end in the X direction is exposed ("X-direction coil length" X-direction permanent magnet length). With such a configuration, even if the permanent magnet 1 is moved by, for example, ±B in the direction of the figure, the opposing area remains unchanged, and since the relative areas of the permanent magnet 1 and the coil 2 contributing to the thrust are not changed, Causes the thrust to decrease. Therefore, when the coil 2 is the stator and the permanent magnet is the movable element, the lower linear motor (not shown) can move only the permanent magnet 1, and the load quality of the coil can be reduced. In this case, it is advantageous to use the permanent magnet 1 as a movable element. (Embodiment 3) Fig. 3 is a view showing an example of a single-phase DC linear motor of Embodiment 3 of the present invention, which shows only a movable element and a stator. (a) is a plan view, and (b) is a front view viewed from a direction (X direction) at right angles to the progress direction of the linear motor. In the figure, the two permanent magnets 1 of the linear motor are arranged in the Y direction parallel to the crucible direction, and one coil 2 is spaced apart from each other by a magnetic air gap so as to be arranged parallel to the X direction. Here, either of the permanent magnet 1 and the coil 2 may be a movable element, and the other side may be a stator. When the coil is energized, the linear motor generates a thrust in the Y direction of the figure. Further, the stroke direction of the linear motor itself is the moving distance from the soil A. According to Embodiment 3 of the present invention, the length of the permanent magnet 1 in the x direction becomes such that even if the movable element is displaced in the X direction, the end portion of the coil 2 in the X direction is still -11 - (9) (9) 1343166 does not X from the permanent magnet 1 The length at which the direction end portion is exposed ("the length of the permanent magnet in the χ direction" is the length of the X direction line 圏). Since the fit is configured in this way, even if the coil 2 is moved, for example, in the direction of the figure, the opposing area remains unchanged, and since the relative areas of the permanent magnet 1 and the coil 2 contributing to the thrust are not changed, it does not cause The thrust is reduced. Therefore, when the permanent magnet 1 is used as the movable element and the coil 2 is the movable element, the lower linear motor which is not shown can move only the coil 2, and the load quality of one part of the permanent magnet can be reduced. Usually, the permanent magnet 1 is made to increase the magnetic flux density which is in the chain with the coil 2, and is bonded to the iron member. If it is included, the load is greatly reduced. In this case, it is advantageous to use the coil 2 as a movable element. Such a simple single-phase DC linear motor is advantageous in the case where the stroke in the direction of the thrust is short. (Embodiment 4) Fig. 4 is a view showing an example of a single-phase DC linear motor according to Embodiment 4 of the present invention, which only shows a movable element and a stator. (a) is a plan view, and (b) is a front view viewed from a direction (X direction) at right angles to the progress direction of the linear motor. In the figure, the two permanent magnets 1 of the linear motor are arranged in the Y direction parallel to the X direction, and one coil 2 is spaced apart from the X direction by a magnetic air gap. Here, either of the permanent magnet 1 and the coil 2 may be a movable element, and the other side may be a stator. When the coil is energized, the linear motor generates a thrust in the Y direction of the figure. Further, the stroke direction of the linear motor itself is the moving distance from the soil A. -12- (10) (10) 1343166 According to Embodiment 4 of the present invention, the length of the coil 2 in the X direction becomes such that the end portion of the permanent magnet i in the x direction is not from the X direction of the coil 2 even if the movable member is displaced in the X direction. The length at which the end is exposed ("χ direction coil length" X direction permanent magnet length). Since the error is such that the 'permanent magnet' moves, for example, in the direction of the figure, the relative area remains unchanged, and since the relative areas of the permanent magnet 1 and the coil 2 contributing to the thrust are not changed, Causes the thrust to decrease. Therefore, when the coil 2 is used as the stator and the permanent magnet is used as the movable element, the lower linear motor (not shown) can move only the permanent magnet 1, and the load quality of the coil can be reduced. In this case, it is advantageous to use the coil 2 as a movable element. (Industrial Applicability) According to the present invention, the following effects are obtained. The movable element or the stator of the linear motor can be made separate, and the other lower linear motor can be moved, and the load quality of the lower linear motor can be greatly reduced. The lower linear motor can be improved in performance and miniaturization. Therefore, it is advantageous in terms of high performance and miniaturization of the device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the configuration of a three-phase AC linear motor according to a first embodiment of the present invention. Fig. 2 is a schematic view showing the configuration of a three-phase AC linear motor according to a second embodiment of the present invention. -13- (11) 1343166 Fig. 3 is a schematic diagram showing the configuration of a single-phase DC linear motor according to a third embodiment of the present invention. Fig. 4 is a schematic view showing the configuration of a single-phase DC linear motor according to a fourth embodiment of the present invention. Fig. 5 is a schematic structural view of a conventional moving magnet type linear motor. Fig. 6 is a schematic diagram showing the structure of a conventional 3-phase AC linear motor. Figure 7 is a schematic diagram of a conventional DC linear motor.
【主要元件符號說明】 1 :永久磁鐵 2 :線圈 21 :固定底座 2 2 :磁軌 2 3 :場磁永久磁鐵 24 :場磁軛 # 25 :導軌 2 6 :導塊 2 7 :感測頭 • 28 :線形刻度部 - 2 9 :止動件 30 :電樞 3 1 :電樞線圈 3 2 :接線基板[Main component symbol description] 1 : Permanent magnet 2 : Coil 21 : Fixed base 2 2 : Magnetic track 2 3 : Field magnetic permanent magnet 24 : Field yoke # 25 : Guide rail 2 6 : Guide block 2 7 : Sensor head • 28: linear scale portion - 2 9 : stopper 30: armature 3 1 : armature coil 3 2 : wiring substrate