1343073 九、發明說明 【發明所屬之技術領域】 本發明是關於放電燈保持機構，尤其是關於相對於燈 架的安裝作業困難的大型放電燈的放電燈保持機構。 【先前技術】 近年來，在半導體或液晶的曝光、其他的細微加工的 領域利用使用短電弧放電燈的曝光技術作爲照相平板印刷 的光源。 照相平板印刷的光源可運用照相平板印刷有效放射具 有感度的波長3 65 nm(i線）的光的放電燈，又液晶或者印 刷基板的曝光中，可運用放射波長3 5 0nm〜450nm的光的 放電燈。放電燈封入有作爲發光物質的水銀，同時封入有 氬、氣等稀有氣體的啓動用氣體。 光源裝置除了具有應曝光的面積變大之外，處理時間 (總處理能力）縮短的傾向，光源的放電燈同樣會因爲輸入 的增加而具有使曝光量增加的傾向。 但是，燈輸入的增大使得燈形成物理性的大型化，對 於反射鏡的組裝作業更爲複雜化。尤其示燈一旦大型化時 ，尺寸上或者重量上會增大對於作業員的負擔。 第14圖是表示使用上述放電燈的光源裝置。 光源裝置是在燈罩100之中，具備放電燈10、反射鏡 及燈架5所構成。反射鏡20爲凹面形狀，將上側開口 21 朝著上部設置，反射鏡20的下側開口部22的下方設有燈 1343073 架5，在此安裝燈架固定台30。反射鏡20之 頭4的放電燈10被安裝可豎立在垂直方向。 1 〇是從反射鏡20的下側開口部22首先插穿9 後插入放電燈1 〇，在反射鏡20的內部空間以 保持，另一方的手在反射鏡20的外側，相對: 電燈1 0的燈頭4螺絲栓鎖固定燈架5。 以上構造的場合，從反射鏡20的下側開口 導線15時，會有傷及反射鏡20之虞。並且， 鎖必須以單手持續地保持著放電燈1 0，以另一 射鏡20的外側進行，因此非常地繁雜。 〔專利文獻1〕 日本實公平7-13171號4 【發明內容】 〔發明所欲解決的課題〕 本發明是以提供即使大型化的放電燈，也 定放電燈的放電燈用保持機構爲目的。 〔解決課題用的手段〕 爲了解決上述課題’本發明所涉及放電燈 是由至少在一方端部安裝有燈頭的放電燈，及 豎立在垂直方向的同時保持著可以拆裝的燈架^ 上述放電燈的燈頭’具備：沿著放電燈的 裝而爲放電燈的端部所包覆的燈頭側基體部， 該燈頭側基體部相對於管軸呈正交方向的寬度 中安裝有燈 安裝放電燈 I線1 5，隨 單手持續地 於安裝在放 部22通過 上述螺絲栓 方的手在反 >報 可以容易固 用保持機構 將該放電燈 听構成， 管軸延伸安 及形成小於 而從該燈頭 -6- 1343073 側基體部前端面突出的同時，朝著上述燈架沿著管軸延伸 的柱形燈頭側臨時固定機構；及形成在該燈頭側基體部的 前端側外圍面的燈頭側最終固定機構。 上述燈架，具備：具有與上述燈頭側臨時固定機構卡 合用之沿著管軸延伸的凹部所構成的燈架側臨時固定機構 的燈架側基體部，及與上述燈頭側最終固定機構卡合用之 設於該燈架側基體部的外圍面，以該燈架側基體部爲中心 在周圍方向轉動的筒狀燈架側最終固定機構， 上述燈頭與上述燈架藉著上述燈頭側臨時固定機構與 上述燈架側臨時固定機構的卡合得以臨時固定的同時，可 藉著上述燈頭側最終固定機構與上述燈架側最終固定機構 的卡合進行最終固定的放電燈保持機構，其特徵爲：上述 燈頭側臨時固定機構在離開管軸方向的2處，形成有基端 側嵌合部與前端側嵌合部，同時在該基端側嵌合部與該前 端側嵌合部之間形成有燈頭側插入部， 上述燈架側臨時固定機構在離開燈架中心軸方向的2 處，形成有與上述基端側嵌合部與上述前端側嵌合部分別 嵌合用的基端側嵌合用凹部與前端側嵌合用凹部的同時， 在該基端側嵌合用凹部與該前端側嵌合用凹部之間形成有 插入上述燈頭側插入部用的燈架側被插入部， 上述燈頭與上述燈架滿足以下關係1表示的關係。 (關係1) 以正交於上述燈架側被插入部的燈架中心軸方向的寬 1343073 度，與正交於上述燈頭側插入部的管軸方向的寬度的差爲 D， 以正交於上述基端側嵌合用凹部的燈架中心軸方向的 寬度，與正交於上述基端側嵌合部的管軸方向的寬度的差 爲E， 以正交於上述前端側嵌合用凹部的燈架中心軸方向的 寬度，與正交於上述前端側嵌合部的管軸方向的寬度的差 爲F時， D比E及F都大。 另外，本發明的放電燈用保持機構除了上述的關係1 ，並滿足以下關係2表示的關係爲特徵。 (關係2) 以正交於上述基端側嵌合用凹部的燈架中心軸方向的 寬度，與正交於上述前端側嵌合部的管軸方向的寬度的差 爲A， 以正交於上述基端側嵌合用凹部的燈架中心軸方向的 寬度，與正交於上述燈頭側插入部的管軸方向的寬度的差 爲B， 以正交於上述燈架側被插入部的燈架中心軸方向的寬 度，與正交於上述前端側嵌合部的管軸方向的寬度的差爲 C時， A、B及C皆比E及F都大。 上述燈頭側最終固定機構，其特徵爲：在上述燈頭側 -8- 1343073 基體部前端側的外圍部形成有燈頭側螺紋部，上述燈架側 最終固定機構在其內周圍面形成有燈架側螺紋部。 另外，本發明的放電燈用保持機構，其特徵爲：上述 燈頭及上述燈架爲導電性構件所構成，在上述燈頭側基體 部的前端面與上述燈架基體部的基端面抵接的狀態下，將 上述頭燈與上述燈架最終固定，形成供電機構。 此外，本發明的放電燈用保持機構，其特徵爲：在上 述燈架形成有從上述燈架側基體部的基端面朝著上述燈頭 側基體部突出的突起部，上述燈頭在上述燈頭側基體部的 前端面形成有卡合在上述突起部用的凹部。 再者，本發明的放電燈用保持機構，其特徵爲：額定 電流爲5 0 A以上。 〔發明效果〕 本發明所涉及放電燈用保持機構使得燈頭側臨時固定 機構與燈架側臨時固定機構動作，即使以單手也可以保持 放電燈（臨時固定），因此不致有如以往以單手持續地保持 著燈，並以另一手固定燈的困難^ 並且’燈頭側臨時固定機構在離開管軸方向的2處形 成有燈頭側嵌合部’燈架側臨時固定機構在分開對應各燈 頭側嵌合部的管軸方向的2處形成有燈架側嵌合部，因此 相對於燈架臨時固定放電燈的作業中，可最終辨識臨時固 定的結束，可提升臨時固定的作業效率。 又’燈頭與燈架由於滿足上述關係1的構成，因此在 -9- 1343073 燈架側臨時固定機構的內部中，燈頭側臨時固定機構可在 相對於管軸正交的方向自由移動，因此進行臨時固定的作 業時燈頭側臨時固定機構的中心軸即使從燈架中心軸形成 偏心的狀態時，仍可以不致損傷放電燈地將燈頭側臨時固 定機構最終卡合在燈架側臨時固定機構上。 另外，本發明所涉及放電燈用保持機構除了上述的關 係1之外，並滿足上述關係2的構成，因此在燈架側臨時 固定機構的內部中，燈頭側臨時固定機構可更爲容易地在 相對於管軸正交的方向自由移動，因此在進行臨時固定的 作業時’可以更爲最終地防止放電燈的損傷。 並且’在燈頭側最終固定機構前端面的外圍面形成燈 頭側螺紋部，在燈架側最終固定機構的內周圍面形成燈架 側螺紋部，因此栓鎖各個螺紋部，可最終進行放電燈的燈 頭與燈架的最終固定。 再者’燈頭及燈架爲導電性構件所構成，在燈頭側基 體部的前端面與燈架側基體部的基端面抵接的狀態下最終 固定燈頭與燈架’藉此形成燈頭與燈架間的供電機構，因 此不需要使用以往的導線，因此在對於反射鏡安裝放電燈 時不會有傷及反射鏡之虞。 並在燈架上’形成有從燈架側基體部的基端部朝著燈 頭側基體部突出的突起部，燈頭在燈頭側基體部的前端面 形成有卡合在上述突起部的凹部，因此轉動燈架側最終固 定機構進行燈架側最終固定機構相對於燈頭側最終固定機 構固定的最終固定作業時，燈頭不會在周圍方向轉動可提 -10- 1343073 升最終固定的作業效率。 【實施方式】 第1圖是表示在安裝於曝光裝置的保持台30的燈架5 安裝放電燈1 0，兩者被固定狀態的放電燈保持機構。放電 燈1〇(以下，有僅單純稱爲「燈」）通過反射鏡20的下側 開口部2 2 ’安裝在燈架5上。在此，以安裝燈頭4的燈 1 〇與燈架5作爲放電燈保持機構，燈1 〇、反射鏡2 〇及燈 架5稱爲光源裝置。燈架5例如是以螺旋方式固定在曝光 裝置的保持台30上。並在燈架5的下部設有銷31，抵接 在保持台30的側面。並且，反射鏡2〇藉著省略圖示的機 構固定在曝光裝置等。 第2圖是表示固定在燈架5之前的狀態之放電燈1〇 的圖不。放電燈10例如在管軸方向的中央具有石英玻璃 構成的發光管部11’其兩端一體形成有延伸的桿狀密封部 12。發光管部11是形成球型、或者管軸方向（圖示的上下 方向）細長延伸的紡錘型，其內部形成氣密空間，封入發 光物質的水銀或啓動用氣體的氙或氬。又，發光管部n 的內部相對配置著陽極13與陰極14，形成其前端彼此的 間隔作爲放電間隙。放電間隙也是電極間距離，例如形成 5mm左右。下方側的密封部丨2前端安裝有圓筒狀燈頭4 。並且，圖中上方側的密封部前端同樣安裝有圓筒狀燈頭 4，但並非本發明所必須。 該燈1 〇是形成使任一電極位於上方，另一方電極位 -11 - D43073 於下方的垂直配置，該實施例中，配置使陰極丨4爲下方 ’陽極13爲上方。 回到第1圖，反射鏡2 0例如在玻璃基材的反射面上 塗敷多層膜，整體以凹面形狀可良好反射來自燈1 〇的放 射光。反射鏡20多使用橢圓形聚光鏡，此時，必須使放 電燈10的電弧與反射鏡20的第1焦點一致。該電弧一般 是形成在放電間隙間，因此在反射鏡20的第一焦點設置 燈以定位放電間隙。反射鏡2 0的方向雖是表示朝向上方 ，但是也可以朝向下方（燈架側）。 燈1 〇與反射鏡20近年來呈大型化。如上述，本發明 的放電燈保持機構在燈與反射鏡大型化的場合尤其有用。 針對燈1 〇 —旦表示數値例時，燈電力爲額定値 3KW〜40KW、燈電流爲額定値50A〜200A、發光管11的最 大外徑（垂直電極延伸方向的方向直徑）爲50mm〜200mm ° 又，燈的重量爲〇.5kg〜10kg。對於反射鏡20 —旦表示數 値例時，上側開口 2 1爲 φ 3 0 0 m m〜1 0 0 0 m m，燈延伸方向 的深度爲200mrn〜800mm。 第3圖是表示自與第1圖不同方向觀察第1圖所示光 源裝置的狀態，反射鏡2 0 —部份缺口表現反射鏡2 0的內 部構造。 反射鏡2 0具有大直徑的上側開口 2 1與小直徑的下側 開口 22。下側開口部22至少必須具有燈1 〇的密封部或者 燈頭4可通過的大小。下側開2 2如過大時，燈1 〇的放射 光會從下側開口部2 2洩漏而降低了光的利用效率。 -12- 1343073 第4圖爲說明安裝在本發明放電燈密封部的燈頭構成 周的放大圖u 燈頭4 ’具備：整體形成圓筒狀沿著放電燈1 〇的管軸 延伸安裝在密封部1 2的燈頭側基體部4 1，及連續形成在 燈頭側基體部4 1，沿著管軸延伸的柱形燈頭側臨時固定機 構42。燈頭側基體部4 1，具備：安裝在燈1 0的密封部1 2 的燈頭側軀體部4 1 1，及連續於該燈頭側軀體部4 1 1的前 端側，比燈頭側軀體部4 1丨形成相對於管軸呈正交方向的 寬度（以下，有僅單純稱寬度）較大之突緣狀的燈頭側突緣 部4 1 2。燈頭側基體部4 1與燈頭側臨時固定機構4 2物理 上是以一構件所構成，例如以黃銅等的導電性構件所構成 〇 燈頭側突緣部4 1 2具備前端側平坦的燈頭側供電面 4 1 3的同時，在其外圍面形成有燈頭側螺紋部4 1 4。第4 圖表示的例中，形成在該突緣部4 1 2的燈頭螺紋部4 1 4爲 燈頭側最終固定機構。燈頭側供電面4 1 3是朝著相對於放 電燈10的管軸呈正交的方向擴開，形成與燈架5的燈架 側供電面呈面接觸’藉此形成燈1 〇與燈座4的供電機構 〇 燈頭側臨時固定機構4 2是形成寬度小於燈頭側基體 部4 1的柱形，被設置在形成於燈頭側基體部4 1的燈頭側 供電面4 1 3的大槪中心位置，朝向燈架側沿著管軸呈凸狀 延伸。燈頭側臨時固定機構4 2 ’具備：嵌合在燈架5的基 端側嵌合用凹部5 3 1用之連續於燈頭側供電面4 ] 3所形成 -13- m3073 的圓柱形基端側嵌合部4 2 1 ;插穿於燈架3的燈架側被插 入部5 3 2用之連續在基端側嵌合部4 2 1，形成寬度小於基 端側嵌合部42 1的圓柱形的燈頭側插入部422 :及嵌合於 燈架3的前端側凹部5 3 3用之連續於燈頭側插入部4 2 2， 形成寬度小於燈頭側插入部4 2 2的圓柱形的前端側嵌合部 4 2 3。亦即，燈頭側臨時固定機構4 2夾著燈頭側插入部 422在離開管軸方向的2處形成有燈頭側嵌合部。 燈頭側供電面4 1 3上的2處’形成有卡合設置在搭架 3的燈架側供電面3 1 5的各突起部5 1 7用的各凹部4 1 5。 在設置於燈頭側供電面4 1 3的凹部4 1 5卡合突起部5 1 7， 藉此，如後述燈1 〇與燈架5進行最終固定的作業時，可 以防止安裝於燈1 0的燈頭4之周圍方向的轉動。 並且’在燈頭側供電面4 1 3上的2處卡合燈架5的突 起部520，形成可以防止具備與燈架5關係上不適合之燈 頭4的放電燈1 0固定於燈架5用的凹部4 1 6。 第5圖爲說明本發明所涉及燈架的構成用的圖。第5 圖是從斜方向表示將燈架從其中心軸方向切斷的剖面圖。 燈架5，具備：與燈頭側基體部4 1卡合用的燈架側基 體部5 1，及安裝在燈架基體部51的基端側，以燈架側基 體部5 I爲中心轉動的轉動部5 2。燈架側基體部5 I，具備 :導電連接在曝光裝置的保持台3 0的圓柱形燈架側軀體 部5 1 1，及連續於燈架側軀體部5 1 1的基端側，具有寬度 大於燈架側軀體部5 1 1的基端部5 1 8而形成突緣形的燈架 側突緣部5 1 2。 -14 - 1343073 燈架側軀體部5 1 1在較燈架側突緣部5 1 2稍微下方的 &置上，形成有防址轉動部52落下到下方用的轉動邰檔 件5 1 3。轉動部檔件5 1 3形成寬度梢微大於燈架側軀體部 51丨的基端部518。在該轉動部檔件513的稍微上方位置 ’形成有表示轉動部5 2與燈頭4完全最終固定時的轉動 部5 2位置的標記5 1 4。標記5 1 4是在燈架側軀體部5 1 1周 圍方向設置環型的缺口，在燈架側軀體部511外圍面塗敷 呈環形的染料等，只要可以目視加以辨識即可。燈架側軀 體部511的前端部515被安裝在曝光裝置的保持台3〇形 成與保持台3 0導電連接。燈架側突緣部5 1 2的基端側形 成有平坦的燈架側供電面5 1 6。 燈架側軀體部5 1 1及燈架側突緣部5 1 2例如爲銅、黃 銅等或者該等基材上塗敷鎳、銀、金等低氧化性、抗藥性 等物的導電形材料所構成。使得具有導電性的燈架側基體 部5 1的燈架側供電面5 1 6，與具有導電性的燈頭側基體部 5 1的燈頭側供電面4 1 3面接觸，可以導電連接燈頭4與燈 架5。因此’不須如以往使用導線’只要將燈頭側供電面 4 1 3與燈架側供電面5 1 6面接觸，即可經由燈架5對放電 燈1 〇進行供電。 在燈架側突緣部5 1 2從燈架側供電面5丨6上的2處朝 著燈頭側基體部4 1呈凸狀延伸形成有插入設置在燈頭側 供電面413的各凹部415用的2個突起部517。將各突起 部5 1 7分別卡合在燈頭基體部4 1的各凹部*丨5，藉以使轉 劻部3 2轉動進行燈頭4與燈架5的最終固定作業時，利 -15- Π43073 用各突起部5 1 7限制燈頭4在周圍方向的轉 終固定的作業效率。 另外，在燈架側突緣部5 1 2從燈架側供 2處朝著燈頭側基體部41呈凸狀延伸形成有 頭側供電面4丨3的各凹部4 1 6用的2個突起 由於爲剖面僅1處形成有突起部520)。對於 別卡合各突起部520，可藉此固定彼此位於 頭4與燈架5，不致有將具備與燈架5的關 頭4的放電燈1 0相對於燈架5形成固定之虞 燈架側突緣部5 1 2是在大槪中心的位置 5的中心軸朝向燈架側軀體部5 1 1的前端部 凹部所構成的燈架側臨時固定機構5 3。燈架 構5 3，具備：嵌合在燈頭4的基端側嵌合部 側嵌合用凹部53 1 ;插入燈頭側插入部422 架側基體部5 1的中心軸方向的寬度大於基 部5 3 1的燈架側被插入部5 3 2 ;及嵌合在燈 嵌合部423用之正交於燈架側基體部5 1的 寬度小於燈架側被插入部5 3 2，並且與基端 5 3 1 —致的前端側嵌合用凹部5 3 3。亦即， 定機構53在夾著燈架側被插入部5 3 2而離 部5 1的中心軸方向的2處，形成有嵌合燈 機構42用的燈架側嵌合用凹部。 在此，針對燈頭側臨時固定機構42與 定機構5 3的規格說明如下。基端側嵌合部 動，以提升最 電面5 1 6上的 插入設置在燈 部520(第5圖 各凹部4 1 6分 適合關係的燈 係不適合之燈 ；〇 具備沿著燈架 5 1 5側延伸之 側臨時固疋機 421用的基端 用之正交在燈 端側嵌合用凹 頭4的前端側 中心軸方向的 側嵌合用凹部 燈架側臨時固 開燈架側基體 頭側臨時固定 燈架側臨時固 421爲了形成 -16- 1343073 相對於基端側嵌合用凹部5 3 1嵌合的關係，將正交於燈架 側基體部5 1的中心軸方向的寬度（以下，有僅稱爲寬度）形 成較基端側嵌合用凹部53 1小〇~1%(通常爲〇.〇5〜0.3%)» 燈頭側插入部422爲了不形成相對於基端側嵌合用凹部 5 3 1的嵌合關係，寬度形成較燈架側被插入部5 3 2小 0.5〜100%(通常爲5〜20%)。前端側嵌合部423爲了形成相 對於前端側嵌合用凹部5 3 3的嵌合關係，將寬度形成小於 前端側嵌合用凹部533的0〜1%(通常爲〇.〇5〜0.3%)。具有 以上的規格，藉以在臨時固定燈頭4與燈架5時，可以使 燈頭4在直徑方向移動不偏心的同時，在管軸方向可以將 燈頭4固定在適當的位置，因此可進行放電燈10管軸方 向的定位。 此外，根據上述放電燈保持機構的例，燈頭側臨時固 定機構4與燈架側臨時固定機構5 3可構成滿足以下的關 係。 以基端側嵌合用凹部5 3 1的寬度D 1與前端側嵌合部 423的寬度d3的差爲A， 以基端側嵌合用凹部5 3 1的寬度D 1與燈頭側插入部 422的寬度d2的差爲B， 以燈架側被插入部5 3 2的寬度D 2與前端側嵌合部 423的寬度d3的差爲C， 以燈架側被插入部53 2的寬度D2與燈頭側插入部 422的寬度d2的差爲D， 以基端側嵌合用凹部531的寬度D1與基端側欣合部 -17- Π43073 421的寬度dl的差爲E’ 以前端側嵌合用凹部5 3 3的寬度D3與前端側嵌合部 423的寬度d3的差爲F時’ A、B、C及D的其中之一皆大於E及F的其中之一 〇 具備以上的構成，藉此如後述’將安裝在放電燈10 的燈頭4插入燈架5進行臨時固定作業時’即使在燈頭4 的中心軸相對於燈架5的中心軸呈傾斜的狀態插入燈頭時 ，只要傾斜不是極端大時放電燈1 0的密封部1 2即不會有 破損之虞。 轉動部5 2是將轉動本體部5 2 1安裝在燈架側突緣部 5 1 2的外圍面上，轉動本體部5 2 1的基端側一部份爲超過 燈架側供電面5 1 6朝著管軸方向延伸，以燈架側基體部5 1 爲中心以手動使其在周圍方向轉動。在轉動本體部521的 前端側連續形成具有外徑小於轉動本體部5 2 1的轉動縮徑 部5 2 2，轉動縮徑部5 2 2被安裝在燈架側軀體部5 1 1的基 端部518的外圍面。轉動部32藉著在周圍方向的轉動， 在轉動縮徑部5 22的基端面5 2 3抵接燈架側突緣部5 12的 前端面5 1 9的位置與轉動縮徑部5 2 2的前端面5 2 4抵接在 轉動部檔件5 1 3的位置之間，形成可以上下方向移動。 轉動本體部521的內周圍面形成有栓鎖於形成在燈頭 4的燈頭側螺紋部414用的燈架側螺紋部525。轉動部521 的外圍面上例如施以滾花加工使其容易進行手動的轉動作 業。燈架側最終固定機構爲具備燈架側螺紋部5 25的轉動 -18- 1343073 步52所構成。 第6圖爲說明相對於燈架5固定安裝在放電燈1〇用 順序用的圖。將燈頭4固定再燈架5時的順序是形成 (a)〜（c)的順序’將燈頭4從燈架5卸下時的順序則是形成 (c)〜（a)的順序。（a)是表示燈頭4插入燈架5瞬間前的狀態 ° (b)是表示燈頭4插入燈架5完成臨時固定的狀態。（c) 是表示燈頭4與燈架5的最終固定完成的狀態。 如第6 (b)圖表示’燈頭4的燈頭側供電面4 1 3抵接到 燈架5的燈架側供電面5 1 6爲止使放電燈1 〇移動到燈架5 側’藉此將前端側嵌合部423嵌合在前端側嵌合用凹部 533 ’燈頭側插入部422插入到燈架側被插入部5 3 2，使基 端側嵌合部4 2 1形成嵌合到基端側嵌合用凹部5 3丨的狀態 ’同時將從燈架側供電面5 1 6呈凸狀延伸的各突起部5 1 7 形成插入到燈頭側供電面4 1 3所形成各凹部4 1 5的狀態， 完成相對於燈架5臨時固定燈頭4的作業。燈頭側臨時固 定機構42是相對於燈架側臨時固定機構5 3，以前端側嵌 合部423的外端面424不抵接前端側嵌合用凹部5 3 3底面 5 3 5的狀態加以卡合。完成臨時固定之後，放電燈1 〇經由 燈頭4以燈架5所保持，因此不須以作業員的手支撐著放 電燈1 0。 如上述，將燈頭側供電面4 1 3抵接在燈架側供電面 5 1 6上，藉以決定放電燈1 〇的管軸方向的位置，同時將前 端側嵌合部423嵌合在前端側嵌合用凹部5 3 3，並將基端 側嵌合部42 1嵌合在基端側嵌合用凹部53 1，藉此限制放 -19- 1343073 電燈1 0的管軸相對於燈架5中心軸的傾斜，並且可以縣 制燈頭4在相對於管軸呈正交方向的移動。 如上述’離開燈頭側臨時固定機構42管軸方向的2 處所形成的基端側嵌合部4 2 1與前端側嵌合部4 2 3，分別 嵌合在離開燈架側臨時固定機構5 3的燈架中心軸方向的2 處所形成的基端側嵌合用凹部5 3 1與前端側嵌合用凹部 5 3 3。藉此，燈頭側臨時固定機構4 2在燈架側臨時固定機 構5 3的深度側位置與入口側位置的2處，限制放電燈相 對於管軸呈正交方向的移動’縮小放電燈1 〇相對於燈架5 的活動範圍’因此作業員可辨識此一狀態而辨識臨時固定 作業的結束。 此外’燈頭側臨時固定機構4 2與燈架側臨時固定機 構5 3是如上述構成滿足任意的a、Β、C、D皆大於任意 的E、F的關係，因此如使用第7圖〜第1〇圖所說明，即 使燈頭4的中心軸相對於燈架5的中心軸呈傾斜的狀態插 入燈頭時’只要傾斜不是極端大的場合即不會有使得放電 燈1 0的密封部1 2破損之虞。 第7圖是表示燈頭4的燈頭側臨時固定機構42卡合 在燈架5的燈架側臨時固定機構53之前的狀態。第8圖 是表示燈頭側臨時固定機構2 4其中心軸相對於燈架5的 中心軸傾斜而卡合在燈架5的燈架側臨時固定機構5 3的 狀態。第9圖是表示燈頭側臨時固定機構42的前端側嵌 合部423的一部份嵌合在燈架側臨時固定機構53的前端 側嵌合用凹部5 3 3的同時，基端側嵌合部42 1的一部份嵌 -20- 1343073 合在基端側嵌合用凹部5 3 1的狀態。第1 〇圖是表示燈頭 側臨時固定機構42的前端側嵌合部423完全嵌入到燈架 側臨時固定機構5 3的前端側嵌合用凹部5 3 3的同時，基 端側嵌合部42 1完全嵌入到基端側嵌合用凹部5 3 1的狀態 〇 亦即，如第8圖表示，燈頭側臨時固定機構42的中 心軸相對於燈架5的中心軸呈傾斜的狀態下，相對於燈架 側臨時固定機構5 3即使插入燈頭側臨時固定機構42時， 燈架5的基端側嵌合用凹部5 3 1與燈架側被插入部5 3 2中 ，具有燈頭4的前端側嵌合部423與燈頭側插入部422可 相對於管軸呈正交的方向自由移動的空間，因此只要燈頭 側臨時固定機構42的傾斜不是極端大即不致對於放電燈 1 〇的密封部施加應力，不會有放電燈1 0的密封部1 2產生 破損等問題之虞。 並且’如第9圖表示，前端側嵌合部423的一部份嵌 合在前端側嵌合用凹部533的同時，基端側嵌合部421的 —部份嵌合在基端側嵌合用凹部531，可以決定正交於各 個中心軸之寬方向的放電燈1 0的位置，在其狀態下將燈 頭側供電面抵接在燈架側供電面5 1 6，來決定管軸方向的 放電燈1 〇的位置，完成臨時固定作業。 相對於此’如第1 1圖表示，根據燈頭側臨時固定機 構42’與燈架側臨時固定機構53,跨燈頭側臨時固定機構 4 2 ’的全長嵌合在燈架側臨時固定機構5 3的場合，燈頭側 臨時固定機構4 2，在燈架側臨時固定機構5 3，中不具有相對 •21 - 1343073 於管軸呈正交方向自由移動的空間，因此在進 的作業時，即使僅是些微地燈頭側臨時固定機 心軸相對於燈架5的中心軸傾斜的場合，會造 燈1 〇的密封部1 2施加應力而導致密封部1 2 性高。 回到第6 (c)圖，針對燈頭4與燈架5進行 作業說明如下。臨時固定結束後，必須進行藉 紋部4 1 4與燈架側螺紋部5 2 5的栓緊，將安裝: 的燈頭4固定在燈架5的作業。因僅臨時固定 架5時，對於曝光裝置施加振動時，會有造成 而破損之虞極爲危險。同圖表示的例中，燈 4 1 4爲外螺紋，燈架側螺紋部5 2 5爲內螺紋， 相反。 如第6(c)圖表示，轉動部52在周圍方向 成在轉動本體部5 2 1的內周圍面的燈架側螺紋 在燈頭側螺紋部4 1 4的同時，使轉動部42上 徑部5 22的基端面5 23抵接到燈架側突緣部5 5 1 9爲止’藉此完成相對於燈架5之燈頭4的 業。 最終固定的作業中，由於在臨時固定的階 供電面516呈凸狀延伸的各突起部517被卡合 頭側供電面4 1 3的各凹部4 1 5，因此燈架側螺 燈頭側螺紋部4 1 4栓鎖而使得轉動部5 2轉動 燈頭4及放電燈1 〇在周圍方向轉動之虞。 行臨時固定 構42的中 成對於放電 破損的危險 最終固定的 著燈頭側螺 在放電燈1 〇 燈頭4與燈 放電燈傾倒 頭側螺紋部 但是也可以 轉動，將形 部5 2 5栓鎖 升至轉動縮 12的前端面 最終固定作 段從燈架側 於形成在燈 紋部5 2 5與 時，不會有 -22- 1343073 最終固定後，由於燈頭側供電面4 1 3與燈架側供電面 5 1 6的抵接’燈頭側供電面4 I 3將燈架側供電面5丨6朝著 下方側推壓，使轉動縮徑部522的基端面523抵接在燈架 側突緣部5 12的前端面519，形成基端面5 32將前端面 5 1 9朝著上方側推壓’因此燈頭側供電面4 1 3及燈架側供 電面5 1 6不致分開，可以燈頭4載放在燈架側基體部5 ! 上的狀態下牢固地加以固定。因此，最終固定後，形成燈 頭4與燈架5導通的狀態，同時不會有放電燈10傾倒的 憂慮。 最終固定的作業結束時，隱藏在轉動本體部5 2 1及轉 動縮徑部5 22與燈架側軀體部5 1 1之間不能辨識的標記 5 1 4出現在燈架側軀體部5 1 1的外圍面上，作業員藉著標 記5 1 4的辨識可認知最終固定的作業結束。 卸下壽命末期的放電燈1〇時，根據第6(c)~(a)的順序 進行。亦即，將轉動部5 2朝著與最終固定時相反方向轉 動，從燈架側螺紋部525解除燈頭側螺紋部414的同時， 使轉動部5 2朝著下方側移動至轉動縮徑部5 2 2的前端面 524抵接到轉動部檔件513爲止，形成第6(b)圖表式的臨 時固定狀態。並且，將相對於燈架5在燈頭4位於臨時固 定狀態下的放電燈1 〇朝上方側拔除時，可以將壽命末期 的放電燈1 0從燈架5卸下。 根據以上本發明的放電燈保持機構，基本上是燈頭側 臨時固定機構42插入到燈架側臨時固定機構5 3將燈頭4 與燈架5臨時固定的狀態，作業員可以將手從放電燈放開 -23- T343073 。因此，重量大的放電燈ι〇固定在燈架5的場合，由於 不需要以單手持續支撐著放電燈並以另外一手進行固定放 電燈的繁雜作業，可提高安裝放電燈的作業效率。 又，藉著燈頭側供電面4 1 3與燈架側供電面5 1 6的接 觸，可以導通燈頭4與燈架5，因此可經燈架5對於放電 燈1 〇供電。因此，即使使用例如50〜250A(安培）大電流的 流動所需的大型放電燈的場合，只要最終固定燈頭4與燈 架5即可以使燈頭側供電面4 1 3牢固地面接觸在燈架側供 電面5 1 6上，可最終對於放電燈供給大電流。並且，由於 不會如以往的放電燈1 0需要供電用的導線，將放電燈1 〇 固定在燈架5時，不致傷及反射鏡2 0的反射面，不會有 損及反射面的光反射特性之虞。 此外’根據本發明的放電燈保持機構，對於燈架5進 行燈頭4臨時固定的作業時，在放電燈1 〇的管軸相對於 燈架5的中心軸傾斜的狀態下即使插入到燈架5時，也不 會有造成放電燈10的密封部12破損之虞，並且可容易辨 識作業員完成臨時固定的作業。 以下’使用第12圖、第13圖說明本發明的其他實施 形態。第1 2圖、第丨3圖表示的實施形態中，除了燈頭側 臨時固定機構及燈架側臨時固定機構的構成其他的構成與 上述第4圖、第5圖表式的實施形態共通，並且，對於臨 時固定 '最終固定的作業順序也是和第6圖表示的實施形 態共通。 m 1 2圖是說明本發明其他實施形態用的圖。第 -24- 1343073 1 2(a)〜（c)圖表示的形態是分別與第4圖表示的燈頭側臨時 固定機構的構成同樣地，同時滿足上述A、B、C及D其 中之一皆大於E、F其中之一的關係，及前端側嵌合部的 寬度d3小於基端側嵌合部的寬度d I的關係。 第〗2 ( a )圖表示的形態是燈頭側臨時固定機構4 2 a，具 備：從燈頭供電面4 1 3 a的中央突出的圓柱形跡端側嵌合 部421a，及形成寬度小於基端側嵌合部421a的圓柱形而 連續於基端側嵌合部42 1 a所形成燈頭側插入部422a 1燈 頭側插入部422a的前端側具備前端側嵌合部42 3a 9亦即 ，燈頭側臨時固定機構42a是形成燈頭側插入部422a的 寬度與前端側嵌合部423a —致。 燈架側臨時固定機構5 3 a形成有嵌合在基端側嵌合部 42 1 a用的形成在燈架側供電面5 1 6a中央的基端側嵌合用 凹部5 3 1 a ;插入至燈頭側插入部4 2 2 a用的具有與基端側 嵌合用凹部53 1a同一寬度的燈架側被插入部5 3 2a;及嵌 合著前端側嵌合部423a用的寬度小於燈架側被插入部 5 3 2a的前端側嵌合用凹部5 3 3 a。燈頭側臨時固定機構42a 是相對於燈頭側臨時固定機構5 3 a卡合使前端側嵌合部 423a的外端面425a不抵接在前端側嵌合用凹部5 3 3 a的底 面 5 3 5 a。 第12(b)圖表示的形態是燈頭側臨時固定機構42b，具 備：連續在從燈頭側供電面4 1 3 b的中央突出的基端部 420 b，直徑方向呈突緣狀擴開的基端側嵌合部42 1 b ;形成 寬度小於基端側嵌合部42 1 b的圓柱形而連續於基端側嵌 -25- 1343073 合部42 1 b所形成的燈頭側插入部422b ;在燈頭側 422b的前端側具有與燈頭側插入部422b相同寬度 的前端側嵌合部423b ;及形成寬度小於前端側 423 b的圓柱形而連續於前端側嵌合部423b所形成 部 424b 。 燈架側臨時固定機構5 3 b，具備：嵌合基端側 42 1 b用的形成在燈架側供電面5 1 6b中央的基端側 凹部53 lb :插入燈頭側插入部422b用的具有與基 合用凹部53 lb相同寬度的燈架側被插入部5 32b : 前端側嵌合部423 b用的寬度小於燈架側被插入部 前端側嵌合用凹部5 3 3 b。燈頭側臨時固定機構42b 於燈架側臨時固定機構53b卡合使前端部424b的 425b不抵接在前端側嵌合用凹部533b的底面535b 如第1 2(c)圖表示的形態，燈頭側臨時固定機相 具備：連續於從燈頭側供電面41 3c的中央側突出 部420c朝著直徑方向呈突緣狀擴開的基端側嵌合 ;形成寬度小於基端側嵌合部42 1 c的圓柱形而連 端側嵌合部42 1 c所形成的燈頭側插入部422c ; 燈頭側插入部422c朝著直徑方向呈突緣狀擴開的 嵌合部4 2 3 c。 燈架側臨時固定機構5 3 c，具備：嵌合基端側 42 1 c用的基端側嵌合用凹部5 η c ;插入燈頭側 422c用的具有與基端側嵌合用凹部531c相同寬虔 側被插入部5 3 2c ;及嵌合著前端側嵌合部423c用 插入部 所形成 嵌合埠 的前端 嵌合部 嵌合用 端側嵌 及嵌合 5 3 2b 的 是相對 外端面 〇 奪 42c， 的基端 部 42 1 c 續於基 連續於 前端側 嵌合部 插入部 的燈架 的寬度 -26- 1343073 小於燈架側被插入部532c的前端側嵌合用凹部5 3 3 c。 第丨3圖是說明本發明其他實施形態用的圖。第1 3 (a) 圖表示的形態爲滿足上述B、C、D的其中之一皆大於E、 F的其中之一的關係，第13(b)圖表示的形態爲滿足上述B 、C、D的其中之一皆大於E、F的其中之一的關係。並且 ，第13(a)、（b)圖表示的形態具有燈頭側臨時固定機構42 的基端側嵌合部421的寬度dl與前端側嵌合部423的寬 度d3 —致的特徵。 第13(a)圖表示的形態，燈頭側臨時固定機構42d，具 備：連續於從燈頭側供電面4 1 3 d的中央側突出的基端部 420d朝著直徑方向呈突緣狀擴開的基端側嵌合部421d; 形成寬度小於基端側嵌合部42 1 d的圓柱形而連續於基端 側嵌合部42 1 d所形成的燈頭側插入部422d :及連續於燈 頭側插入部422d，具有與基端側嵌合部42 Id相同寬度而 朝著直徑方向呈突緣狀擴開的前端側嵌合部42 3 d。 燈架側臨時固定機構53d爲形成在燈架側供電面5 1 6d 中央的凹部所構形，以嵌合基端側嵌合部42 1 d用的基端 側嵌合用凹部531d ;插入到燈頭側插入部422d用的寬度 大於基端側嵌合用凹部53 1 d的燈架側被插入部5 3 2d ;及 嵌合著前端側嵌合部423 d用的前端側嵌合用凹部5 3 3 d的 順序連續形成。 第13(b)圖表示的形態是燈頭側臨時固定機構42£爲 從燈頭側供電面4 1 3 e的中央呈凸狀延伸的跨放電燈的管 軸方向全長具有相同寬度的柱狀物所構成，根據基端側嵌 -27- 1343073 合部42 1 e、燈頭側插入部422e及前端側嵌合部423e的順 序連續形成。 燈架側臨時固定機構53e，具備：嵌合基端側嵌合部 4 2 1 e用的形成在燈架側供電面5 1 6 e中央的基端側嵌合用 凹部5 3 1 e ;插入燈頭側插入部4 2 2 e用的寬度大於基端側 嵌合用凹部5 3 1 e的燈頭側被插入部5 3 2 e ;及嵌合前端側 嵌合部423 e用的寬度小於燈架側被插入部5 3 2e的前端側 嵌合用凹部533e。基端側嵌合用凹部531e是形成寬度大 於前端側嵌合部423 e及燈頭側插入部422e。 根據如上述第1 2圖、第1 3圖表示的實施形態，燈頭 側臨時固定機構42a〜42e、燈架側臨時固定機構53a〜53e 分別被嵌合在與管軸方向（燈架的中心軸方向）分開的2處 ，同時爲滿足上述B、C、D的其中之一皆大於E、F的關 係’可期待與第4、5圖表示的實施形態相同的效果。 【圖式簡單說明】 第1圖是表示具有本發明所涉及放電燈保持機構的光 源裝置。 第2圖是表示本發明所涉及的放電燈。 第3圖是表示具有本發明所涉及放電燈保持機構的光 源裝置。 第4圖是表示本發明所涉及的燈頭。 第5圖是表示本發明所涉及的燈架。 第6圖是表示固定本發明所涉及的燈頭與燈架的順序 -28- 1343073 第7圖是表示本發明所涉及放電燈保持機構的作用說 明。 第8圖是表示本發明所涉及放電燈保持機構的作用說 明。 第9圖是表示本發明所涉及放電燈保持機構的作用說 明。 第1 〇圖是表示本發明所涉及放電燈保持機構的作用 說明。 第1 1圖是表示比較例所涉及的放電燈保持機構。 第1 2圖是表示本發明所涉及放電燈保持機構的其他 實施例。 第1 3圖是表示本發明所涉及放電燈保持機構的其他 實施例。 第1 4圖是表示具有以往所涉及放電燈保持機構的光 源裝置。 【主要元件符號說明】 1 〇 :放電燈 Π :發光管部 1 2 :密封部 1 3 :陽極 1 4 :陰極 2 0 :反射鏡 -29- 1343073 4 :燈頭 4 1 :燈頭側基體部 4 1 1 :燈頭側軀體部 4 1 2 :燈頭側突緣部 4 1 3 :燈頭側供電面 4 1 4 :燈頭側螺紋部 41 5 :凹部 42 :燈頭側臨時固定機構 421 :基端側嵌合部 422 :燈頭側插入部 423 :前端側嵌合部 5 :燈架 5 1 :燈架側基體部 5 1 1 :燈架側軀體部 5 1 2 :燈架側突緣部. 5 1 3 :轉動檔件 5 1 4 :標記 5 1 6 :燈架側供電面 517 :突起部 5 2 :轉動部 5 2 1 :轉動本體部 5 2 2 :轉動縮徑部 5 2 5 :燈架側螺紋部 5 3 :燈架側臨時固定機構 -30 1343073 5 3 1 :基端側嵌合用凹部 5 3 2 :燈架側被插入部 533 前端側嵌合用凹部[Technical Field] The present invention relates to a discharge lamp holding mechanism, and more particularly to a discharge lamp holding mechanism for a large-sized discharge lamp which is difficult to mount with respect to a lamp holder. [Prior Art] In recent years, an exposure technique using a short arc discharge lamp has been utilized as a light source for photolithography in the field of semiconductor or liquid crystal exposure and other fine processing. The photolithographic light source can use a photographic plate to discharge a discharge lamp that efficiently emits light having a sensitivity of 3 65 nm (i-line), and in the exposure of a liquid crystal or a printed substrate, light having a wavelength of 350 nm to 450 nm can be used. Discharge lamp. The discharge lamp is sealed with mercury as a luminescent material, and a starting gas containing a rare gas such as argon or gas is sealed. In addition to the area where the light source device is to be exposed, the processing time (total processing capacity) tends to be shortened, and the discharge lamp of the light source tends to increase the exposure amount due to an increase in input. However, an increase in the input of the lamp causes the lamp to be physically enlarged, and the assembly work for the mirror is more complicated. In particular, when the indicator lamp is enlarged, the burden on the operator is increased in size or weight. Fig. 14 is a view showing a light source device using the above discharge lamp. The light source device is composed of a discharge lamp 10, a mirror, and a lamp holder 5 in the globe 100. The mirror 20 has a concave shape, and the upper opening 21 is provided toward the upper portion. The lower portion of the lower opening 22 of the mirror 20 is provided with a lamp 1343073 frame 5, and the lamp holder fixing table 30 is mounted thereon. The discharge lamp 10 of the head 4 of the mirror 20 is mounted to be erected in a vertical direction. 1 〇 is inserted first from the lower opening portion 22 of the mirror 20 and then inserted into the discharge lamp 1 〇, held in the internal space of the mirror 20, and the other hand is outside the mirror 20, opposite: the lamp 10 The lamp cap 4 is bolted to the fixed lamp holder 5. In the case of the above structure, when the lead wire 15 is opened from the lower side of the mirror 20, the mirror 20 is damaged. Also, the lock must be continuously held by the discharge lamp 10 with one hand, and the outside of the other mirror 20, which is very complicated. [Patent Document 1] Japanese Patent Publication No. 7-1317 No. 4 [Problem to be Solved by the Invention] The present invention has an object of providing a discharge lamp holding mechanism for a discharge lamp even if it is a large-sized discharge lamp. [Means for Solving the Problem] In order to solve the above problem, the discharge lamp according to the present invention is a discharge lamp in which a lamp cap is attached to at least one end portion, and a lamp holder that is detachably mounted in a vertical direction while being detachably mounted. The base of the lamp includes a base body portion that is covered by an end portion of the discharge lamp along the discharge lamp, and a lamp-mounted discharge lamp is attached to the base portion of the base-side portion in a width direction orthogonal to the tube axis. I line 1 5, with one hand continuously attached to the placing portion 22 through the above-mentioned screw plug, the hand can be easily fixed by the holding mechanism to constitute the discharge lamp, and the tube shaft extends and forms less than a base-side temporary fixing mechanism that extends toward the tube axis along the tube axis while the front end surface of the base body portion protrudes from the lamp holder -6 - 1343073; and a base side of the peripheral surface of the front end side of the base portion of the base portion The final fixing mechanism. The lamp holder includes a lamp holder side base portion having a lamp holder side temporary fixing mechanism formed by a recess extending along the tube axis for engaging with the base side temporary fixing mechanism, and engaging with the base side final fixing mechanism a cylindrical lamp holder side final fixing mechanism that is disposed on a peripheral surface of the base portion of the lamp holder side and that rotates in a peripheral direction around the base body portion of the lamp holder side, and the lamp holder and the lamp holder are temporarily fixed by the base side The engagement with the lamp holder side temporary fixing mechanism can be temporarily fixed, and the discharge lamp holding mechanism can be finally fixed by the engagement of the lamp end side final fixing mechanism with the lamp holder side final fixing mechanism, and is characterized in that: The base-side temporary fixing mechanism is formed with a proximal end side fitting portion and a distal end side fitting portion at two positions apart from the tube axis direction, and a base end side fitting portion and the distal end side fitting portion are formed between the proximal end side fitting portion and the distal end side fitting portion. a base-side insertion portion, the lamp holder-side temporary fixing mechanism is formed at a position apart from the base end side fitting portion and the front end side fitting portion at two positions away from the center axis direction of the lamp holder The base end side fitting recessed portion and the distal end side fitting recessed portion are inserted between the base end side fitting recessed portion and the distal end side fitting recessed portion, and the lamp holder side inserted into the base-side insertion portion is inserted. The lamp cap and the lamp holder satisfy the relationship shown by the following relationship 1. (Relation 1) The difference between the width of the tube axis direction orthogonal to the base-side insertion portion and the width of the tube-axis insertion portion that is orthogonal to the lamp holder-side insertion portion is D1, which is orthogonal to The gap between the width of the base end side fitting recessed portion in the central axis direction of the lamp holder and the width orthogonal to the width of the base end side fitting portion in the tube axis direction is E, and the lamp is orthogonal to the front end side fitting recessed portion. When the difference between the width in the central axis direction of the rack and the width in the tube axis direction orthogonal to the front end side fitting portion is F, D is larger than E and F. Further, the discharge lamp holding mechanism of the present invention is characterized by satisfying the relationship shown in the following relationship 2 in addition to the above relationship 1. (Relation 2) The difference between the width in the central axis direction of the lamp holder orthogonal to the base end side fitting recessed portion and the width in the tube axis direction orthogonal to the distal end side fitting portion is A, which is orthogonal to the above The difference between the width of the base end side fitting recessed portion in the central axis direction of the lamp holder and the width orthogonal to the tube axis side insertion portion in the tube axis direction is B, and is orthogonal to the base of the lamp holder side inserted portion. When the difference between the width in the axial direction and the width orthogonal to the tube axis direction of the distal end side fitting portion is C, A, B, and C are both larger than E and F. The base-side final fixing mechanism is characterized in that a base-side screw portion is formed on a peripheral portion of the base end side of the base portion -8 - 1343073, and the lamp holder-side final fixing mechanism has a lamp holder side formed on an inner peripheral surface thereof. Threaded part. Further, the holding lamp for a discharge lamp according to the present invention is characterized in that the base and the lamp holder are electrically conductive members, and the front end surface of the base portion of the base portion is in contact with the base end surface of the base portion of the lamp holder. Next, the headlight is finally fixed to the lamp holder to form a power supply mechanism. Further, in the discharge lamp holding mechanism of the present invention, the lamp holder is formed with a projection protruding from a base end surface of the base body portion of the lamp holder toward the base body portion of the base, wherein the base is on the base side. A front end surface of the base portion is formed with a recessed portion for engaging the protruding portion. Further, the discharge lamp holding mechanism of the present invention is characterized in that the rated current is 50 A or more. [Effect of the Invention] The discharge lamp holding mechanism of the present invention operates the lamp-side temporary fixing mechanism and the lamp holder-side temporary fixing mechanism, and can maintain the discharge lamp (temporary fixing) with one hand, so that it does not continue with one hand as in the past. It is difficult to fix the lamp with the other hand, and the lamp holder side temporary fixing mechanism is formed at two positions away from the tube axis direction. The lamp holder side temporary fixing mechanism is separately attached to the respective lamp holder side. Since the lamp holder side fitting portion is formed at two places in the tube axis direction of the joint portion, the end of the temporary fixing can be finally recognized in the operation of temporarily fixing the discharge lamp with respect to the lamp holder, and the work efficiency of the temporary fixing can be improved. Further, since the base and the lamp holder satisfy the above-described relationship 1, the lamp-side temporary fixing mechanism can be freely moved in the direction orthogonal to the tube axis in the interior of the lamp holder side temporary fixing mechanism of -9-1343073, so that the lamp holder and the lamp holder can be freely moved in the direction orthogonal to the tube axis. In the temporarily fixed work, even if the center axis of the temporary fixing mechanism of the cap side is eccentric from the central axis of the lamp holder, the temporary fixing mechanism for the cap side can be finally engaged with the temporary fixing mechanism of the lamp holder side without damaging the discharge lamp. Further, the discharge lamp holding mechanism according to the present invention satisfies the configuration of the above relationship 2 in addition to the above-described relationship 1. Therefore, in the inside of the lamp holder side temporary fixing mechanism, the cap side temporary fixing mechanism can be more easily Since it is free to move in the direction orthogonal to the tube axis, it is possible to prevent the damage of the discharge lamp more eventually when performing the temporary fixing work. And 'the base side threaded portion of the front end surface of the final fixing mechanism on the base side is formed, and the lamp-side threaded portion is formed on the inner peripheral surface of the final fixing mechanism on the lamp holder side, so that the respective threaded portions are latched, and the discharge lamp can be finally discharged. The final fixation of the lamp cap and the lamp holder. In addition, the base and the lamp holder are formed of a conductive member, and the base and the base frame are finally fixed in a state in which the front end surface of the base portion of the base portion is in contact with the base end surface of the base portion of the base portion, thereby forming a base and a lamp holder. Since the power supply mechanism is not required to use the conventional lead wire, there is no damage to the mirror when the discharge lamp is mounted on the mirror. a projection portion that protrudes from the base end portion of the base portion of the lamp holder side toward the base portion of the base portion is formed on the base frame, and the base portion of the base portion of the base portion of the base portion is formed with a recessed portion that engages with the projection portion. When the final fixing mechanism of the lamp holder side is rotated to perform the final fixing operation of the final fixing mechanism of the lamp holder side with respect to the final fixing mechanism of the lamp holder side, the lamp cap does not rotate in the peripheral direction to provide a final fixed working efficiency of -10-1433 liter. [Embodiment] Fig. 1 is a view showing a discharge lamp holding mechanism in which a discharge lamp 10 is attached to a lamp holder 5 attached to a holding table 30 of an exposure apparatus, and both of them are fixed. The discharge lamp 1 〇 (hereinafter simply referred to as "light") is attached to the lamp holder 5 through the lower opening 2 2 ' of the mirror 20. Here, the lamp 1 〇 and the lamp holder 5 for mounting the lamp cap 4 serve as a discharge lamp holding mechanism, and the lamp 1 〇, the mirror 2 〇 and the lamp holder 5 are referred to as a light source device. The lamp holder 5 is fixed to the holding table 30 of the exposure device, for example, in a spiral manner. A pin 31 is provided at a lower portion of the lamp holder 5 to abut against the side surface of the holding table 30. Further, the mirror 2 is fixed to an exposure device or the like by a mechanism (not shown). Fig. 2 is a view showing the discharge lamp 1A in a state before being fixed to the lamp holder 5. The discharge lamp 10 has, for example, an arc tube portion 11' having a quartz glass in the center of the tube axis direction, and an extended rod-shaped sealing portion 12 is integrally formed at both ends thereof. The arc tube portion 11 is a spindle type that is formed in a spherical shape or a tube-axis direction (upward and downward direction in the drawing), and has an airtight space inside, and encloses mercury or a argon gas of a starting material. Further, the anode 13 and the cathode 14 are disposed opposite to each other inside the arc tube portion n, and a gap between the tips is formed as a discharge gap. The discharge gap is also the distance between the electrodes, for example, about 5 mm. A cylindrical base 4 is attached to the front end of the seal portion 下方2 on the lower side. Further, the cylindrical base 4 is also attached to the front end of the seal portion on the upper side in the drawing, but it is not essential to the present invention. The lamp 1 形成 is formed in a vertical arrangement in which either electrode is located above and the other electrode position -11 - D43073 is below. In this embodiment, the cathode 丨 4 is disposed below the anode 13 is above. Returning to Fig. 1, the mirror 20 is coated with, for example, a multilayer film on the reflecting surface of the glass substrate, and the entire surface of the reflecting light can reflect the emitted light from the lamp 1 in a concave shape. In the mirror 20, an elliptical condenser is often used. In this case, the arc of the discharge lamp 10 must be aligned with the first focus of the mirror 20. The arc is generally formed between the discharge gaps, so a lamp is placed at the first focus of the mirror 20 to position the discharge gap. Although the direction of the mirror 20 is shown as being upward, it may be directed downward (on the side of the lamp holder). The lamp 1 〇 and the mirror 20 have been enlarged in recent years. As described above, the discharge lamp holding mechanism of the present invention is particularly useful in the case where the lamp and the mirror are enlarged. For the lamp 1 〇, when the number is 値, the lamp power is rated 値3KW~40KW, the lamp current is rated 値50A~200A, and the maximum outer diameter of the arc tube 11 (direction diameter in the direction of the vertical electrode extension) is 50mm~200mm. ° Again, the weight of the lamp is 〇. 5kg~10kg. When the mirror 20 is a plurality of examples, the upper opening 2 1 is φ 3 0 0 m m to 1 0 0 0 m m, and the depth in the lamp extending direction is 200 mrn to 800 mm. Fig. 3 is a view showing a state in which the light source device shown in Fig. 1 is viewed from a direction different from that of Fig. 1, and the mirror 20 is partially recessed to represent the internal structure of the mirror 20. The mirror 20 has a large-diameter upper side opening 21 and a small-diameter lower side opening 22. The lower opening portion 22 must have at least a seal portion of the lamp 1 或者 or a size through which the lamp cap 4 can pass. When the lower side opening 2 2 is too large, the light of the lamp 1 泄漏 leaks from the lower side opening portion 2 2 to reduce the light use efficiency. -12- 1343073 Fig. 4 is an enlarged view showing the circumference of the base of the lamp discharge portion of the discharge lamp sealing portion of the present invention. The base 4' is provided with a cylindrical shape extending along the tube axis of the discharge lamp 1 安装 and mounted on the sealing portion 1 The base-side base portion 4 1 of 2 and the cylindrical base-side temporary fixing mechanism 42 extending continuously along the tube axis are formed continuously on the base-side base portion 4 1 . The base-side body portion 4 1 includes a base body portion 4 1 1 attached to the sealing portion 1 2 of the lamp 10, and a front end side of the body portion 4 1 1 that is continuous with the base body portion 4 1 . The crucible is formed with a base-like flange portion 4 1 2 having a flange shape having a width in the orthogonal direction with respect to the tube axis (hereinafter, simply referred to as a width). The base-side base portion 4 1 and the base-side temporary fixing mechanism 42 are physically constituted by one member, and are formed of, for example, a conductive member such as brass. The base-side flange portion 4 1 2 has a flat end side with a front end side. At the same time as the power supply surface 4 1 3, the base side screw portion 4 14 is formed on the outer peripheral surface thereof. In the example shown in Fig. 4, the base thread portion 4 1 4 formed in the flange portion 4 1 2 is a base-side final fixing mechanism. The lamp-side power supply surface 4 1 3 is expanded in a direction orthogonal to the tube axis of the discharge lamp 10 to form a surface contact with the lamp-side power supply surface of the lamp holder 5, thereby forming the lamp 1 and the lamp holder. The power supply mechanism of the power supply unit 4 is formed in a columnar shape having a width smaller than that of the base portion 4 1 of the base portion, and is disposed at a center of the base of the base side power supply surface 41 1 3 formed on the base portion 4 1 of the base portion. , extending toward the lamp holder side along the tube axis. The base-side temporary fixing mechanism 4 2 ′ is provided with a cylindrical base end side surface which is fitted to the base end side fitting concave portion 5 3 1 of the lamp holder 5 and which is continuous with the lamp-side power supply surface 4 3 to form a 13-m3073 The joint portion 4 2 1 is inserted into the lamp holder side of the lamp holder 3, and the insertion portion 5 3 2 is continuously formed in the base end side fitting portion 4 1 1 to form a cylindrical shape having a smaller width than the base end side fitting portion 42 1 . The base-side insertion portion 422 is fitted to the front end side recessed portion 53 3 of the lamp holder 3 so as to be continuous with the base-side insertion portion 42 2 to form a cylindrical front end side having a width smaller than the base-side insertion portion 42 2 Joint 4 2 3 . In other words, the base-side temporary fixing mechanism 42 has a base-side fitting portion formed at two positions apart from the tube axis direction with the cap-side insertion portion 422 interposed therebetween. Two recesses 4 1 5 for the respective projections 5 1 7 provided on the holder-side power supply surface 3 1 5 of the chassis 3 are formed at two places on the base-side power supply surface 4 1 3 . When the recessed portion 4 1 5 provided on the base-side power supply surface 141 is engaged with the projection portion 5 1 7 , when the lamp 1 后 and the lamp holder 5 are finally fixed, the lamp 10 can be prevented from being attached to the lamp 10 . The rotation of the lamp head 4 in the direction around it. Further, the projections 520 of the lamp holder 5 are engaged at the two positions on the lamp-side power supply surface 141, and the discharge lamp 10 for preventing the lamp holder 4 which is not suitable for the lamp holder 5 from being fixed to the lamp holder 5 is formed. The recess 4 16 is. Fig. 5 is a view for explaining the configuration of a lamp holder according to the present invention. Fig. 5 is a cross-sectional view showing the lamp holder cut from the direction of the central axis thereof in an oblique direction. The lamp holder 5 includes a base-side base portion 51 for engaging with the base-side base portion 4 1 and a base end side attached to the base portion 51 of the base frame, and is rotated about the base-side base portion 5 I. Department 5 2. The lamp holder side base portion 5 I includes a cylindrical lamp holder side body portion 51 1 that is electrically connected to the holding table 30 of the exposure device, and a base end side that is continuous with the lamp holder side body portion 51 1 and has a width. The base end portion 5 1 8 of the lamp holder side body portion 51 is formed to form a flange-shaped lamp holder side flange portion 5 1 2 . -14 - 1343073 The lamp holder side body portion 51 1 is placed slightly below the lamp holder side flange portion 5 1 2, and the rotation preventing member 52 for dropping the lower portion of the rotation preventing portion 52 is formed. . The rotation portion member 51 is formed with a base end portion 518 having a width tip slightly larger than the lamp holder side body portion 51A. At a position slightly above the turning portion member 513, a mark 516 indicating the position of the rotating portion 52 when the rotating portion 52 and the base 4 are completely finally fixed is formed. In the mark 5 1 4, a ring-shaped notch is provided in the circumferential direction of the lamp body side body portion 51, and a ring-shaped dye or the like is applied to the outer surface of the lamp holder side body portion 511 as long as it can be visually recognized. The front end portion 515 of the lamp body side body portion 511 is attached to the holding table 3 of the exposure device to be electrically connected to the holding table 30. The base end side of the lamp holder side flange portion 51 is formed with a flat lamp holder side power supply surface 516. The lamp holder side body portion 51 1 and the lamp holder side flange portion 5 1 2 are, for example, copper, brass, or the like, or the substrate is coated with a conductive material such as nickel, silver or gold which is low in oxidizing property and chemical resistance. Composition. The lamp holder side power supply surface 516 of the conductive lamp holder side base portion 51 is brought into surface contact with the base side power supply surface 4 1 3 having the conductive base side base portion 51, and the lamp holder 4 can be electrically connected. Light stand 5. Therefore, the discharge lamp 1 can be supplied with power via the lamp holder 5 as long as the lamp-side power supply surface 4 1 3 is brought into surface contact with the lamp-side power supply surface 5 1 6 . In the recessed portion 415 which is inserted into the base-side power supply surface 413 from the two positions on the base-side base portion 4 1 from the two positions on the base-side power supply surface 5丨6, the lamp holder-side flange portion 51 is formed in a convex shape. Two protrusions 517. When the projections 5 17 are respectively engaged with the respective recesses * 5 of the base portion 4 1 of the base, thereby rotating the switch portion 3 2 to perform the final fixing operation of the base 4 and the lamp holder 5, the use of the -15-Π43073 Each of the projections 5 1 7 limits the work efficiency of the final fixation of the base 4 in the peripheral direction. Further, in the lamp holder side flange portion 5 1 2, two projections for the recessed portions 4 1 6 of the head side power supply surface 4丨3 are formed to protrude from the base side of the lamp holder side toward the base side base portion 41. Since the protrusion 520 is formed only in one section of the cross section. Therefore, the protrusions 520 can be locked to each other so as to be fixed to the head 4 and the lamp holder 5, so that the lamp holder 10 having the discharge lamp 10 with the head 4 of the lamp holder 5 fixed to the lamp holder 5 is not fixed. The flange portion 5 1 2 is a lamp holder side temporary fixing mechanism 53 which is formed by a central portion of the position 5 of the center of the squat toward the front end portion of the holder side body portion 51 1 . The lamp frame 53 includes a fitting end portion fitting recess 53 1 fitted to the base end side of the base 4, and a cap side inserting portion 422. The rack-side base portion 51 has a larger width in the central axis direction than the base portion 53 1 . The lamp holder side insertion portion 5 3 2 ; and the width of the base portion 51 that is fitted to the lamp fitting portion 423 to be orthogonal to the lamp holder side base portion 51 is smaller than the lamp holder side insertion portion 5 3 2, and the base end 5 3 1 A front end side fitting recessed portion 53 3 . In other words, the fixing mechanism 53 is formed with a recess for fitting the lamp holder side for fitting the lamp mechanism 42 at two places in the direction of the central axis of the portion 51 from the insertion portion 5 3 2 of the lamp holder side. Here, the specifications of the cap side temporary fixing mechanism 42 and the fixed mechanism 5 3 will be described below. The base end side fitting portion is moved to increase the insertion of the most electric surface 5 16 into the lamp portion 520 (the light system of the lamp system 520 in the corresponding relationship of the recesses in the fifth figure is not suitable; the lamp is provided along the lamp holder 5) The base end of the side temporary fixing machine 421 which is extended on the side of the side of the first side is fixed to the side of the front end side of the front end side of the recessed end 4 of the lamp end side. The side temporary fixing lamp holder side temporary fixing member 421 is formed so as to be orthogonal to the central axis direction of the base side side body portion 51 in order to form the relationship of the fitting of the base end side fitting recess portion 53 1 (hereinafter, There is only a width which is formed to be smaller than the base end side fitting recess 53 1 1~1% (usually 〇. 〇5~0. 3%)» The cap side insertion portion 422 is formed to be smaller than the lamp holder side insertion portion 5 3 2 so as not to form a fitting relationship with respect to the proximal end side fitting recess portion 53 1 . 5 to 100% (usually 5 to 20%). The front end side fitting portion 423 has a width smaller than that of the distal end side fitting concave portion 533 in order to form a fitting relationship with respect to the distal end side fitting concave portion 53 3 (usually 〇. 〇5~0. 3%). With the above specifications, when the lamp cap 4 and the lamp holder 5 are temporarily fixed, the lamp cap 4 can be moved in the diameter direction without being eccentric, and the lamp cap 4 can be fixed in an appropriate position in the tube axis direction, so that the discharge lamp 10 can be performed. Positioning in the direction of the tube axis. Further, according to the above-described example of the discharge lamp holding mechanism, the base side temporary fixing mechanism 4 and the lamp holder side temporary fixing mechanism 53 can be configured to satisfy the following relationship. The difference between the width D 1 of the proximal end side fitting concave portion 531 and the width d3 of the distal end side fitting portion 423 is A, and the width D 1 of the proximal end side fitting concave portion 531 and the base side insertion portion 422 The difference of the width d2 is B, and the difference between the width D 2 of the socket-side insertion portion 5 3 2 and the width d3 of the distal end side fitting portion 423 is C, and the width D2 of the insertion portion 53 2 of the lamp holder side is coupled to the base. The difference in the width d2 of the side insertion portion 422 is D, and the difference between the width D1 of the proximal end side fitting recessed portion 531 and the width d1 of the proximal end side engaging portion -17-Π43073 421 is E'. When the difference between the width D3 of the 3 3 and the width d3 of the front end side fitting portion 423 is F, one of A, B, C, and D is larger than one of E and F, and the above configuration is provided. When the cap 4 attached to the discharge lamp 10 is inserted into the lamp holder 5 for temporary fixing work, it is inserted into the cap when the center axis of the cap 4 is inclined with respect to the central axis of the cap 5, as long as the tilt is not extremely large. The sealing portion 12 of the discharge lamp 10 is not damaged. The rotating portion 52 is mounted on the outer peripheral surface of the base portion flange portion 51 of the lamp holder, and a portion of the base end side of the rotating body portion 521 is beyond the lamp holder side power supply surface 5 1 6 extends in the tube axis direction, and is manually rotated in the peripheral direction centering on the lamp holder side base portion 5 1 . A rotating reduced diameter portion 52 2 having an outer diameter smaller than that of the rotating body portion 5 2 1 is continuously formed on the front end side of the rotating body portion 521, and the rotating reduced diameter portion 52 2 is attached to the base end of the lamp holder side body portion 51 1 The peripheral surface of the portion 518. By the rotation of the rotating portion 32, the base end surface 5 2 3 of the rotating reduced diameter portion 5 22 abuts against the front end surface 5 1 9 of the lamp holder side flange portion 5 12 and the rotating reduced diameter portion 5 2 2 The front end face 5 2 4 abuts between the positions of the turning portion gears 51, and is formed to be movable in the up and down direction. The inner peripheral surface of the rotating main body portion 521 is formed with a lamp holder side screw portion 525 for locking to the base side screw portion 414 formed in the base 4. For example, knurling is performed on the outer peripheral surface of the rotating portion 521 to facilitate manual turning operation. The lamp holder side final fixing mechanism is constituted by the rotation -18 - 1343073 step 52 of the lamp holder side thread portion 5 25 . Fig. 6 is a view for explaining the order in which the discharge lamp 1 is fixedly mounted with respect to the lamp holder 5. The order in which the base 4 is fixed to the lamp holder 5 is the order in which (a) to (c) are formed. The order in which the base 4 is detached from the lamp holder 5 is the order in which (c) to (a) are formed. (a) is a state before the cap 4 is inserted into the lamp holder 5. (b) is a state in which the cap 4 is inserted into the lamp holder 5 to be temporarily fixed. (c) is a state in which the final fixing of the lamp cap 4 and the lamp holder 5 is completed. As shown in Fig. 6(b), the head side power supply surface 4 1 3 of the base 4 abuts the lamp holder side power supply surface 5 1 6 of the lamp holder 5 to move the discharge lamp 1 到 to the side of the lamp holder 5, thereby The distal end side fitting portion 423 is fitted to the distal end side fitting recessed portion 533 'the cap side insertion portion 422 is inserted into the lamp holder side inserted portion 523, and the proximal end side fitting portion 4 2 1 is fitted to the proximal end side. In the state of the fitting recessed portion 5 3 ', each of the projections 5 1 7 extending in a convex shape from the holder-side power supply surface 5 16 is formed in a state of being inserted into each recessed portion 4 1 5 formed by the base-side power supply surface 4 1 3 . , the work of temporarily fixing the lamp cap 4 with respect to the lamp holder 5 is completed. The base side temporary fixing mechanism 42 is engaged with the outer side end surface 424 of the distal end side engaging portion 423 so as not to abut against the bottom surface 5 3 5 of the distal end side fitting recessed portion 5 3 3 with respect to the lamp holder side temporary fixing mechanism 53. After the temporary fixing is completed, the discharge lamp 1 is held by the lamp holder 5 via the lamp holder 4, so that it is not necessary to support the discharge lamp 10 with the operator's hand. As described above, the base-side power supply surface 141 is abutted on the lamp-side power supply surface 516 to determine the position of the discharge lamp 1 in the tube axis direction, and the front-end side fitting portion 423 is fitted to the front end side. The fitting recessed portion 53 3 and the proximal end side fitting portion 42 1 are fitted to the proximal end side fitting recessed portion 53 1 , thereby restricting the tube axis of the -19 - 1343073 lamp 10 with respect to the central axis of the lamp holder 5 The inclination of the lamp cap 4 can be moved in an orthogonal direction with respect to the tube axis. The proximal end side fitting portion 4 2 1 and the distal end side fitting portion 4 2 3 which are formed at two locations apart from the tube axis side temporary fixing mechanism 42 in the tube axis direction are respectively fitted to the lamp holder side temporary fixing mechanism 5 3 . The base end side fitting recessed portion 531 and the front end side fitting recessed portion 533 formed at two places in the central axis direction of the lamp holder. Thereby, the base side temporary fixing mechanism 42 restricts the movement of the discharge lamp in the orthogonal direction with respect to the tube axis at two positions on the depth side position and the inlet side position of the lamp holder side temporary fixing mechanism 53. Relative to the range of motion of the lamp holder 5, the operator can recognize this state and recognize the end of the temporary fixing operation. Further, the 'head-side temporary fixing mechanism 42 and the lamp-side temporary fixing mechanism 53 are configured to satisfy any of the above, a, Β, C, and D are greater than any of E and F, and therefore, the use of FIG. 7 to FIG. 1 shows that even when the center axis of the base 4 is inserted into the base with respect to the central axis of the lamp holder 5, the sealing portion 1 2 of the discharge lamp 10 is not damaged as long as the inclination is not extremely large. After that. Fig. 7 is a view showing a state in which the base side temporary fixing mechanism 42 of the base 4 is engaged with the lamp holder side temporary fixing mechanism 53 of the lamp holder 5. Fig. 8 is a view showing a state in which the center-side temporary fixing mechanism 24 has its central axis inclined with respect to the central axis of the lamp holder 5 and is engaged with the holder-side temporary fixing mechanism 53 of the lamp holder 5. In the ninth aspect, the distal end side fitting portion 423 of the cap side temporary fixing mechanism 42 is fitted to the distal end side fitting recess portion 53 3 of the lamp holder side temporary fixing mechanism 53, and the proximal end side fitting portion A part of the 42 1 is embedded in the state of -20 - 1343073 in the proximal end side fitting recessed portion 53 1 . In the first drawing, the distal end side fitting portion 423 of the cap side temporary fixing mechanism 42 is completely fitted into the distal end side fitting recess portion 53 3 of the lamp holder side temporary fixing mechanism 53, and the proximal end side fitting portion 42 1 In a state in which it is completely fitted into the proximal end side fitting recessed portion 53 1 , that is, as shown in FIG. 8 , the central axis of the base side temporary fixing mechanism 42 is inclined with respect to the central axis of the lamp holder 5 with respect to the lamp. When the cap side temporary fixing mechanism 53 is inserted into the cap side temporary fixing mechanism 42, the base end side fitting recessed portion 513 and the lamp holder side inserted portion 523 are assembled in the distal end side of the cap 4 The portion 423 and the cap side insertion portion 422 are freely movable in a direction orthogonal to the tube axis. Therefore, as long as the inclination of the cap side temporary fixing mechanism 42 is not extremely large, no stress is applied to the sealing portion of the discharge lamp 1 ,, There is a problem that the sealing portion 12 of the discharge lamp 10 is damaged or the like. In addition, as shown in Fig. 9, a part of the distal end side fitting portion 423 is fitted to the distal end side fitting recessed portion 533, and the proximal end side fitting portion 421 is fitted to the proximal end side fitting recessed portion. 531, it is possible to determine the position of the discharge lamp 10 in the width direction orthogonal to each of the central axes, and in this state, the lamp-side power supply surface is abutted on the lamp-side power supply surface 5 1 6 to determine the discharge lamp in the tube axis direction. 1 〇 position, complete temporary fixed work. With respect to this, as shown in Fig. 1, the lamp holder side temporary fixing mechanism 42' and the lamp holder side temporary fixing mechanism 53 are fitted to the lamp holder side temporary fixing mechanism 5 3 over the entire length of the cap side temporary fixing mechanism 4 2 ' In the case of the lamp holder side temporary fixing mechanism 4 2, the lamp holder side temporary fixing mechanism 5 3 does not have a space in which the tube axis is freely moved in the direction orthogonal to the tube axis. Therefore, even during the operation, even if only When the micro-head side temporary fixing mandrel is inclined with respect to the central axis of the lamp holder 5, the sealing portion 12 of the lamp 1 is stressed, and the sealing portion 12 is high. Returning to Figure 6(c), the operation of the lamp cap 4 and the lamp holder 5 will be described below. After the temporary fixing is completed, the tucking portion 4 14 and the lamp holder side screw portion 5 25 must be fastened to fix the cap 4 to be mounted on the lamp holder 5. When the temporary fixing frame 5 is used only, when vibration is applied to the exposure device, it is extremely dangerous to cause damage. In the example shown in the figure, the lamp 4 14 is an external thread, and the lamp side screw portion 5 25 is an internal thread, and the opposite is true. As shown in Fig. 6(c), the rotating portion 52 is threaded on the base side of the inner peripheral surface of the rotating main body portion 521 in the peripheral direction, while the base portion of the rotating portion 42 is threaded. The base end face 5 23 of the 5 22 abuts against the lamp frame side flange portion 5 5 1 ', thereby completing the work with respect to the base 4 of the lamp holder 5. In the final fixed work, the projections 517 which are convexly extended on the temporarily fixed step feeding surface 516 are engaged with the recesses 4 1 5 of the head side power supply surface 4 1 3, so that the lamp holder side screw head side thread portion 4 1 4 latches the rotation portion 5 2 to rotate the base 4 and the discharge lamp 1 〇 in the circumferential direction. The medium-sized temporary fixing structure 42 is in danger of being damaged by the discharge, and the lamp-side side screw is finally fixed on the discharge lamp 1 and the lamp-discharge lamp 4 and the lamp discharge lamp are tilted to the head-side thread portion, but can also be rotated to lock the shape portion 5 2 5 When the front end surface of the rotation 12 is finally fixed from the side of the lamp holder to the lamp portion 5 2 5, there is no -22-13343073 final fixing, since the lamp side power supply surface 4 1 3 and the lamp holder side The abutment of the power supply surface 516, the 'head-side power supply surface 4 I 3 , presses the lamp-side power supply surface 5 丨 6 toward the lower side, and the base end surface 523 of the rotation-reduced diameter portion 522 abuts against the lamp holder-side flange The front end surface 519 of the portion 5 12 forms a base end surface 5 32 and pushes the front end surface 5 1 9 toward the upper side. Therefore, the base side power supply surface 4 1 3 and the lamp holder side power supply surface 5 1 6 are not separated, and the base 4 can be mounted. It is firmly fixed in the state of being placed on the base portion 5 of the lamp holder side. Therefore, after the final fixing, the state in which the lamp cap 4 and the lamp holder 5 are electrically connected is formed, and there is no fear that the discharge lamp 10 is dumped. At the end of the final fixed work, the mark 5 1 4 hidden between the rotating main body portion 521 and the rotating reduced diameter portion 52 and the lamp body side body portion 51 is present on the lamp stand side body portion 5 1 1 On the outer peripheral surface, the operator can recognize the end of the final fixed work by the identification of the mark 51. When the discharge lamp at the end of life is removed, it is carried out in the order of 6(c) to (a). In other words, the rotating portion 52 is rotated in the opposite direction to the final fixing, and the cap side screw portion 414 is released from the lamp holder side screw portion 525, and the rotating portion 52 is moved toward the lower side to the rotating reduced diameter portion 5. The front end surface 524 of the 2 2 abuts against the rotation part gear 513, and forms a temporarily fixed state of the sixth (b) graph type. Further, when the discharge lamp 1 is placed on the upper side of the lamp holder 4 in the temporarily fixed state with respect to the lamp holder 5, the discharge lamp 10 at the end of the life can be detached from the lamp holder 5. According to the discharge lamp holding mechanism of the present invention described above, basically, the lamp head side temporary fixing mechanism 42 is inserted into the lamp holder side temporary fixing mechanism 53 to temporarily fix the lamp cap 4 and the lamp holder 5, and the worker can put the hand from the discharge lamp. Open -23- T343073. Therefore, in the case where the heavy discharge lamp 〇 is fixed to the lamp holder 5, since it is not necessary to continuously support the discharge lamp with one hand and the complicated operation of fixing the discharge lamp with the other hand, the work efficiency of installing the discharge lamp can be improved. Further, by the contact of the lamp-side power supply surface 4 1 3 with the lamp-side power supply surface 5 16 , the lamp cap 4 and the lamp holder 5 can be turned on, so that the discharge lamp 1 can be supplied with power via the lamp holder 5. Therefore, even if a large discharge lamp required for a large current flow of, for example, 50 to 250 A (amperes) is used, as long as the lamp holder 4 and the lamp holder 5 are finally fixed, the lamp-side power supply surface 4 1 3 can be firmly grounded on the lamp holder side. On the power supply surface 5 16 , a large current can be finally supplied to the discharge lamp. Further, since the conventional electric discharge lamp 10 does not require a power supply wire, when the discharge lamp 1 〇 is fixed to the lamp holder 5, the reflection surface of the mirror 20 is not damaged, and the light of the reflection surface is not damaged. The flaw in reflection characteristics. Further, in the discharge lamp holding mechanism according to the present invention, when the lamp holder 5 is temporarily fixed to the lamp holder 5, even if the tube axis of the discharge lamp 1 is inclined with respect to the central axis of the lamp holder 5, even if it is inserted into the lamp holder 5, At this time, there is no possibility that the sealing portion 12 of the discharge lamp 10 is broken, and the operator can easily recognize the work of temporarily fixing the worker. Hereinafter, other embodiments of the present invention will be described using Figs. 12 and 13 . In the embodiment shown in FIG. 1 and FIG. 3, the configuration of the temporary fixing mechanism on the base side and the temporary fixing mechanism on the holder side is common to the embodiments of the fourth and fifth graphs, and The order of the final fixation 'final fixation is also common to the embodiment shown in Fig. 6. The m 1 2 diagram is a view for explaining another embodiment of the present invention. In the same manner as the configuration of the base-side temporary fixing mechanism shown in Fig. 4, the above-described forms of the above-mentioned A, B, C, and D are satisfied. The relationship larger than one of E and F and the width d3 of the distal end side fitting portion are smaller than the relationship of the width d I of the proximal end side fitting portion. The second embodiment shown in Fig. 2 is a lamp-side temporary fixing mechanism 42a having a cylindrical track-side fitting portion 421a protruding from the center of the lamp feeding surface 4 1 3 a and having a width smaller than the base end side. The front end side of the cap side insertion portion 422a of the cap side insertion portion 422a is formed in the cylindrical shape of the fitting portion 421a, and the distal end side fitting portion 42a is provided on the distal end side of the cap side insertion portion 422a. The fixing mechanism 42a is formed such that the width of the cap side insertion portion 422a is the same as that of the distal end side fitting portion 423a. The lamp holder side temporary fixing mechanism 5 3 a is formed with a base end side fitting recessed portion 5 3 1 a formed in the center of the base end side fitting portion 42 1 a and formed in the center of the lamp holder side power supply surface 5 1 6a; The base side insertion portion 5 2 2a having the same width as the base end side fitting recess portion 53 1a for the base side insertion portion 4 2 2 a; and the width for fitting the distal end side fitting portion 423a to be smaller than the lamp holder side The front end side fitting recessed portion 5 3 3 a of the inserted portion 5 3 2a. The base-side temporary fixing mechanism 42a is engaged with the base-side temporary fixing mechanism 53a, so that the outer end surface 425a of the distal end side fitting portion 423a does not abut against the bottom surface 5 3 5 a of the distal end side fitting concave portion 5 3 3 a. The form shown in Fig. 12(b) is a base-side temporary fixing mechanism 42b, and includes a base end portion 420b that continuously protrudes from the center of the base-side power supply surface 4 1 3 b, and has a flange-like expanded diameter in the radial direction. The end side fitting portion 42 1 b; the base side insertion portion 422b formed by forming the cylindrical shape having a smaller width than the base end side fitting portion 42 1 b and continuing to the base end side inlaid -25 - 1343073 joint portion 42 1 b ; The distal end side of the cap side 422b has a distal end side fitting portion 423b having the same width as the cap side insertion portion 422b, and a cylindrical portion formed to have a width smaller than the distal end side 423b and continuous with the portion 424b formed by the distal end side fitting portion 423b. The lamp holder side temporary fixing mechanism 533b includes a base end side concave portion 53 lb formed at the center of the lamp holder side power supply surface 5 1 6b for fitting the base end side 42 1 b : for inserting the base side insertion portion 422 b The lamp holder side insertion portion 5 32b having the same width as the base coupling recess 53 lb is smaller than the socket side insertion portion distal end side fitting recess portion 5 3 3 b. The base-side temporary fixing mechanism 42b is engaged with the lamp-side temporary fixing mechanism 53b so that the 425b of the distal end portion 424b does not abut against the bottom surface 535b of the distal-end side fitting concave portion 533b as shown in Fig. 1(c), and the base side is temporary. The fixed machine phase is provided so as to be continuous with the base end side which is flared from the center side protruding portion 420c of the base side power supply surface 41 3c toward the diameter direction; and the width is smaller than the base end side fitting portion 42 1 c. The base-side insertion portion 422c formed by the cylindrical end-side fitting portion 42 1 c and the base-side insertion portion 422c are formed in a flange shape in the radial direction. The lamp holder side temporary fixing mechanism 5 3 c includes a base end side fitting recessed portion 5 η c for the fitting base end side 42 1 c , and the same as the base end side fitting recessed portion 531 c for inserting the base end side 422 c. The side insertion portion 5 3 2c and the distal end side fitting portion 423c are fitted with the insertion portion, and the distal end fitting portion fitting end side is fitted and fitted with the 5 3 2b. The base end portion 42 1 c of the base end portion is further smaller than the width -26 - 1343073 of the base frame which is continuous with the front end side fitting portion insertion portion, and is smaller than the front end side fitting recess portion 5 3 3 c of the lamp holder side inserted portion 532c. Figure 3 is a view for explaining another embodiment of the present invention. The figure shown in Fig. 1 (a) is a relationship in which one of the above B, C, and D is greater than one of E and F, and the figure shown in Fig. 13(b) satisfies the above B, C, and One of D is greater than one of E and F. In the form shown in Fig. 13 (a) and (b), the width d1 of the proximal end side fitting portion 421 of the cap side temporary fixing mechanism 42 and the width d3 of the distal end side fitting portion 423 are characteristic. In the form shown in Fig. 13(a), the base-side temporary fixing mechanism 42d includes a base end portion 420d that protrudes from the center side of the base-side power supply surface 4 1 3 d, and is flared toward the radial direction. The base end side fitting portion 421d; the base portion side insertion portion 422d formed by the base end side fitting portion 42 1 d having a cylindrical shape which is smaller than the base end side fitting portion 42 1 d; and is inserted continuously from the base side The portion 422d has a distal end side fitting portion 42 3 d which has the same width as the proximal end side fitting portion 42 Id and which is flared in the radial direction. The lamp holder side temporary fixing mechanism 53d is configured by a concave portion formed at the center of the lamp holder side power supply surface 5 1 6d, and is fitted with a base end side fitting recess portion 531d for fitting the base end side fitting portion 42 1d; The side insertion portion 422d has a larger width than the base-side-side fitting recessed portion 53 1d, and the front-end side fitting recessed portion 5 3 3d for fitting the distal end-side fitting portion 423d. The order is formed continuously. In the form shown in Fig. 13(b), the base-side temporary fixing mechanism 42 is a columnar body having the same width extending across the entire length of the discharge lamp from the center of the lamp-side power supply surface 4 1 3 e. The configuration is continuously formed in the order of the base end side fitting -27-1343073 joint portion 42 1 e, the base side insertion portion 422e, and the distal end side fitting portion 423e. The lamp holder side temporary fixing mechanism 53e includes a base end side fitting recessed portion 5 3 1 e formed at the center of the lamp holder side power supply surface 5 1 6 e for fitting the base end side fitting portion 4 2 1 e; The width of the side insertion portion 4 2 2 e is larger than the base side insertion portion 5 3 2 e of the proximal end side fitting recess portion 5 3 1 e; and the width of the fitting distal end side fitting portion 423 e is smaller than that of the lamp holder side. The front end side fitting recessed portion 533e of the insertion portion 5 3 2e. The proximal end side fitting recessed portion 531e has a larger width than the distal end side fitting portion 423e and the base side insertion portion 422e. According to the embodiment shown in the above-mentioned FIGS. 1 and 2, the base-side temporary fixing mechanisms 42a to 42e and the lamp-side temporary fixing mechanisms 53a to 53e are fitted in the tube axis direction (the center axis of the lamp holder). The two directions are separated from each other, and at the same time, in order to satisfy the relationship that one of B, C, and D is larger than E and F, the same effect as the embodiment shown in Figs. 4 and 5 can be expected. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a light source device having a discharge lamp holding mechanism according to the present invention. Fig. 2 is a view showing a discharge lamp according to the present invention. Fig. 3 is a view showing a light source device having a discharge lamp holding mechanism according to the present invention. Fig. 4 is a view showing a base according to the present invention. Fig. 5 is a view showing a lamp holder according to the present invention. Fig. 6 is a view showing the order of fixing the base and the lamp holder according to the present invention. -28-1343073 Fig. 7 is a view showing the operation of the discharge lamp holding mechanism according to the present invention. Fig. 8 is a view showing the operation of the discharge lamp holding mechanism according to the present invention. Fig. 9 is a view showing the operation of the discharge lamp holding mechanism according to the present invention. Fig. 1 is a view showing the action of the discharge lamp holding mechanism according to the present invention. Fig. 1 is a view showing a discharge lamp holding mechanism according to a comparative example. Fig. 1 is a view showing another embodiment of the discharge lamp holding mechanism according to the present invention. Fig. 1 is a view showing another embodiment of the discharge lamp holding mechanism according to the present invention. Fig. 14 is a view showing a light source device having a conventional discharge lamp holding mechanism. [Description of main component symbols] 1 〇: discharge lamp Π : luminous tube part 1 2 : sealing part 1 3 : anode 1 4 : cathode 2 0 : mirror -29- 1343073 4 : lamp head 4 1 : base side body part 4 1 1 : base body portion 4 1 2 : base side flange portion 4 1 3 : base side power supply surface 4 1 4 : base side screw portion 41 5 : recessed portion 42 : base side temporary fixing mechanism 421 : base end side fitting portion 422: the cap side insertion portion 423: the distal end side fitting portion 5: the lamp holder 5 1 : the lamp holder side base portion 5 1 1 : the lamp holder side body portion 5 1 2 : the lamp holder side flange portion. 5 1 3 : Rotating gear 5 1 4 : Marking 5 1 6 : Lamp holder side power supply surface 517 : Projection portion 5 2 : Rotation portion 5 2 1 : Rotating body portion 5 2 2 : Rotating reduction portion 5 2 5 : Lamp Frame side threaded portion 5 3 : Lamp holder side temporary fixing mechanism -30 1343073 5 3 1 : Base end side fitting recessed portion 5 3 2 : Lamp holder side inserted portion 533 Front end side fitting recessed portion