1341752 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種塗佈裝置，施加正壓於貯藏於 . 谷器内之液狀或糊狀之塗佈材料，使其從裝置於容器 ，的塗佈針適量吐出於被塗佈器材上。更詳細言之，係 '一種在等待吐出期間，藉冷卻或凍結塗佈針内的塗佈 材料以防止其乾燥，但不致於降低塗佈處理動作效 的塗佈裝置》 【先前技術】 工列每裡塗佈裝置，具備有在塗佈塗佈材料的 沾：區，：，注入有含於塗佈材料的溶媒與同種溶劑 器二機，器’而在等待吐出期間收容塗佈針於待機容 的乾焊（：：ί體内待機’以防止塗佈針内塗佈材料 知（如日本特開2003·71363號公報）。 •材料= 性塗佈裝置，如須暫時中斷塗佈 外，而收容於丄:次退出塗佈針於塗佈區域 被塗備器内等待’效率奇低。尤其遇到 退出及Ί si大尺寸的基板時，退出距離變長而遲延 k回時間’因此降低塗佈處理動作效率。 【發明内容】1341752 IX. Description of the Invention: [Technical Field] The present invention relates to a coating apparatus for applying a positive pressure to a liquid or paste coating material stored in a barn, to be placed in a container, The coating needle is spit out of the coated equipment. More specifically, it is a coating device that cools or freezes the coating material in the coating needle to prevent it from drying during the waiting for discharge, but does not reduce the coating treatment efficiency. [Prior Art] Each coating device is provided with a coating material in a coating area, and is filled with a solvent containing a coating material and a solvent machine of the same type, and the coating needle is placed in standby while waiting for discharge. The dry soldering of the capacitor (:: ί in the body standby) to prevent the coating material in the coating needle (for example, JP-A-2003-71363). • Material = Sex coating device, if the coating is temporarily interrupted, And it is contained in the crucible: the exiting coating needle is waiting in the coating area to be in the coating device, and the efficiency is extremely low. Especially in the case of the substrate with large size and large size, the exit distance becomes long and the k-time is delayed, thus reducing Coating processing efficiency. [Summary of the Invention]
為因應上揭問題’本發明的目的在提供 可以防止塗佈材料的乾燥，但不致㈣低S 6 1341752 處理動作的效率者β 為了達成上揭目的，本發明的塗佈裝置，係施加 正壓於貯藏於容器内的液狀或糊狀的塗佈材料，將該 塗佈材料從裝設於該容器的塗佈針吐出於被塗佈器 =塗佈裝置具有以接觸方式設置於該塗佈刪 =用以切及加熱塗佈針内該塗佈材料的冷卻加熱 機構’及控制該冷卻加熱機構 驅動該冷卻加熱機構，在該塗佈材料:控=籍 二冷 =結該塗佈針内的塗佈材料，而在::時 σ…或解凍忒塗佈針内的塗佈材料。 等待==冷:二機::::或:狀，材料 佈材料用容器之塗佈針内的塗= ::r控:r加熱機構，塗佈材== 塗佈針“該塗佈材料才之塗=料’從 ^爾卻_塗佈針吐 傳統技術般每次退出塗::::吐出動作時’也不像 待機容器内的溶劑塗r、區域外，而收容於 塗佈處理動作。 ，疋以可有效率的進行 又，該冷卻加熱機構 於該塗佈針外側面的教傳卜備有以接觸方式設置 導态材，及以一側面接觸於 7 丄341752 該熱傳導器材的珀耳玷元件。藉此，利用珀耳玷元件 的一側面經熱傳導器材吸收塗佈針内塗佈材料的 熱使其冷卻或凍結。由是可以得到小型且具高度冷 卻效率的冷卻加熱機構。 时又，該熱傳導器材設有溫度傳❹，以檢出熱傳 導益材的溫度，將其輸出回饋於該控制機構，並控制 該冷卻加熱機構的驅動，以保持該塗佈材料溫度於咬 溫度範圍。藉此利用溫度傳感器經熱傳導器材檢 佈材料之溫度，而回饋其輸出於控制機構，利用 控制機構控制冷卻加熱機構之驅動以保持塗饰材料 =度於設定之溫度範圍。由是維持 於適於吐出之粘度。 寸义枯度 貫熱傳導時設有嵌合於該塗佈針外周面之 :通孔。猎此嵌合塗佈針於設在熱傳導面之 孔，即可經熱傳導器材 頁通 塗佈針的吸熱或加熱動作耳站素子有效率的進行 此外’該容器可藉移 方向相對移動。用再隹戳芏怖态材之二軸 佈器材的三W向=機構就可將容㈣對於被塗 容器’迅速把裝置於容器可以：制移動機構移動 佈位置。 、、塗佈針定位於所希望的塗 【實施方式】 、、、所附圖示詳細說明本發明的實施形 8 1圓為說明本發明之塗佈裝置實施 心圖。此塗佑往罢丨 槪 狀或糊狀塗二料：墨於貯㈣器内之液 咳塗佑^ 裝設㈣Μ ”佈針吐出 “塗佈材料於被塗佈器 移動機構的三軸㈣應心师裝置1具備有做為 黑卜丄山一軸移動機構2 ;做為容器的墨水槽3 . 6墨水吐出控制機構4，·冷卻加熱機構5;及控制機構 该三軸移動機構2,可保持後述之墨水槽3， 移動墨水槽3於χ、γ、ζ之二站 之—軸方向，例如備有3 ，素銘叙$ /〇在χ、γ、方向延伸的執道利用該馬 ^糟3又，此二軸移動機構2,亦可利用 :态、之’。X ’不移動墨水槽3而移動被塗佈器材 貝1 ’或同時移動墨水槽3及被塗佈器材側雙方都可 以0 ^墨水槽3係保持於該三軸移動機構2。此墨水槽 3係用以貯存塗佈材料，例如圖形缺陷用之修正用墨 水7,並備有塗佈針8,從塗佈針8適量吐出修正用 墨水7於被塗佈器材，例如濾色器19(參照第4圖）。 在此所使用之塗佈針8，係如第2圖所示，其本體部 8a形成外徑約〇.5mm，將先端部8m交細成外徑約 卿，内徑約5卿之玻璃製或不銹鋼製者。 該墨水槽3經配管9連接於墨水吐出控制機構 1341752 4。此墨水吐出控制機構4係用來施加正壓於貯存在 該墨水槽3内之修正用墨水7,具備有空氣槽1〇;定 時计U，電磁閥12A ;及流量控制閥12B。於此，空 氣槽1 〇乃用以暫時貯存例如從空氣幫浦所供應之空 氣’而經流量控制Μ 12B連接於電磁間12A。又定時 計11，係用以將開關投入預設時間，以通電於電磁 閥12A，電磁閥12A係依通電之ON或OFF而職司 閥之啟閉動作^此墨水吐出控制機構4在定時計 所設定之時間内開啟電磁閥12A，把暫時貯存於空 氣槽1〇之空氣，在流量控制閥12B之控制下，經配 管9供應於該墨水槽3,利用導入於墨水槽3内之空 氣正壓’做從墨水槽3之塗佈針8適量吐出修 水7之動作。 & 在》亥墨水槽3之塗佈針8外側面，以接觸方式設 HU:機構5。此冷卻加熱機構5係用以將塗佈 >正用墨水7冷卻或;東結及加熱或解陳者，In order to achieve the object of the present invention, it is intended to prevent the drying of the coating material, but not to (4) the efficiency of the low S 6 1341752 processing operation. In order to achieve the above object, the coating apparatus of the present invention applies a positive pressure. a liquid or paste coating material stored in a container, the coating material is discharged from a coating needle mounted in the container to an applicator = a coating device is provided in contact with the coating Delete = cooling heating mechanism for cutting and heating the coating material in the coating needle and controlling the cooling heating mechanism to drive the cooling heating mechanism, in the coating material: control = two cold = knot the coating needle The coating material, while:: σ... or thawing the coating material in the enamel coating needle. Waiting == cold: two machine:::: or: shape, material coating material coating in the coating needle of the container = ::r control: r heating mechanism, coating material == coating needle "the coating material Only the coating = material 'from the ^ 尔 _ coating needle spit traditional technology like each time to withdraw the coating :::: spit out the action 'not like the solvent in the standby container coated r, outside the area, and contained in the coating process In order to carry out the heat conduction device, the cooling heating mechanism is provided on the outer side of the coating needle with a contact material in a contact manner and a side surface contacting the heat conduction device at 7 丄 341752. By using one side of the Perel element, the heat of the coating material in the coating needle is absorbed by the heat conduction device to be cooled or frozen, whereby a small cooling heating mechanism with high cooling efficiency can be obtained. At the same time, the heat conduction device is provided with temperature transfer to detect the temperature of the heat conduction material, and the output thereof is fed back to the control mechanism, and the driving of the cooling heating mechanism is controlled to maintain the temperature of the coating material in the bite temperature range. Using the temperature sensor to check the heat conduction equipment The temperature of the material is fed back to the control mechanism, and the control mechanism is used to control the driving of the cooling heating mechanism to keep the finishing material=degree within the set temperature range. It is maintained at a viscosity suitable for discharge. At the time, a through hole is formed in the outer peripheral surface of the coating needle. The fitting needle is placed in the hole of the heat conducting surface, and the needle can be coated by the heat conduction device to absorb the heat or heat the ear. Efficiently proceeding, in addition, the container can be moved relative to the direction of movement. By using the three-Way mechanism of the two-axis cloth equipment of the 态 态 态 态 态 = = = 四 四 四 四 四 四 四 四 四 四 四 四 四The movement mechanism is moved to the position of the cloth. The coating needle is positioned on the desired coating. [Embodiment] The accompanying drawings illustrate the embodiment of the present invention. Fig. This is a blessing or paste-like coating: the liquid in the storage (four) device cough coated ^ ^ installation (four) Μ ” cloth needle spit out “coating material in the three axes of the moving mechanism of the applicator (4) should be equipped with the mind device 1 The black ink mountain one-axis moving mechanism 2; the ink tank 3.8 as a container; the ink discharge control mechanism 4, the cooling heating mechanism 5; and the control mechanism. The three-axis moving mechanism 2 can hold the ink tank 3, which will be described later, and move the ink. The water tank 3 is in the direction of the axis of the two stations of χ, γ, ζ, for example, there is a 3, and the numerology of $, γ, and the direction of the extension of the sink 3 uses the horse, and the two-axis moving mechanism 2, can also use: state, '. X ' does not move the ink tank 3 and move the coated equipment shell 1 ' or both the ink tank 3 and the side of the coated equipment can be 0 ^ ink tank 3 system is maintained The three-axis moving mechanism 2. The ink tank 3 is for storing a coating material, for example, a correction ink 7 for pattern defects, and is provided with a coating needle 8, and the correction ink 7 is discharged from the coating needle 8 in an appropriate amount. A coating device such as a color filter 19 (refer to Fig. 4). The coating needle 8 used here is as shown in Fig. 2, and the main body portion 8a is formed to have an outer diameter of about 55 mm, and the tip end portion 8m is formed into an outer diameter of about qing, and an inner diameter of about 5 qing. Or stainless steel. The ink tank 3 is connected to the ink discharge control mechanism 1341752 4 via a pipe 9. The ink discharge control means 4 is for applying a positive pressure to the correction ink 7 stored in the ink tank 3, and includes an air tank 1; a timer U, a solenoid valve 12A, and a flow rate control valve 12B. Here, the air tank 1 is for temporarily storing, for example, the air supplied from the air pump, and is connected to the electromagnetic chamber 12A via the flow control unit 12B. The timer 11 is used to put the switch into the preset time to energize the solenoid valve 12A. The solenoid valve 12A is turned on or off according to the ON or OFF of the energization, and the ink discharge control mechanism 4 is in the timing meter. The solenoid valve 12A is opened for a set period of time, and the air temporarily stored in the air tank 1 is supplied to the ink tank 3 via the pipe 9 under the control of the flow rate control valve 12B, and the air introduced into the ink tank 3 is used. Pressing 'does a proper amount of discharge of the water repair 7 from the coating needle 8 of the ink tank 3. & In the outer side of the coating needle 8 of the ink tank 3, the HU: mechanism 5 is provided in a contact manner. The cooling and heating mechanism 5 is used to cool the coating > ink 7; or the east knot and heat or de-crack,
具有如第3圖所示之以iiL 6H -4- L 固之以接觸方式設置於塗佈針8外側 面之熱傳導器材13;及其 Μ , Α ^ 其側 a接觸於該熱傳 <有貫通孔15 :站7°件14。於此，熱傳導器材13 H通孔15與塗佈針8之外周面喪合…耳站 二“之4側面14a’例如對第3圖所示箭頭方向 8内之修正用墨水7之埶二專^材13吸收塗佈針 八7之熱而將該修正用墨水冷卻或凍 ==，此場合下與該側面14a相反側之側面_ 面作用，放出側面14a所吸收之熱。該熱傳 :材13,為了要有效率的進行利用料站元件μ ，正用墨水7的吸熱動作’係以熱傳導性良好的金 ^材料^如銅所形成，並在外侧面裝有溫度傳感器 此'皿f傳感器16 ’係用以檢出熱傳導器材13的 二而Λ 了：持修正用墨水7之溫度於適於吐出之 皿度I已圍，例如室溫至約60。0以内起見，將所 双之輸出回饋於後述之控制機構6 ，熱機構5的驅動’例如一種熱電偶。此二 1 =度範圍，可參考所使用墨水枯度或溶劑種類適當 控制機構6係連接於該冷卻加熱機構5 二I4力及：度傳感器16。此時控制機構6係用以控 =部加熱機構5之驅動，同時維持修正用墨幻之a heat conducting device 13 having a contact surface of the outer surface of the coating needle 8 as shown in Fig. 3; and its side a is in contact with the heat transfer < Through hole 15: station 7° member 14. Here, the heat conduction device 13 H through hole 15 and the outer peripheral surface of the coating needle 8 are comminuted... The four side faces 14a of the ear station 2 are, for example, the correction ink 7 in the arrow direction 8 shown in FIG. The material 13 absorbs the heat of the coating needle VIII and cools or freezes the correction ink ==, in which case the side surface _ surface opposite to the side surface 14a acts to release the heat absorbed by the side surface 14a. In order to efficiently use the material element μ, the heat absorbing action of the ink 7 is formed by a gold material such as copper having good thermal conductivity, and a temperature sensor is mounted on the outer side. The 16' is used to detect the heat conduction device 13 and the temperature is maintained. The temperature of the correction ink 7 is limited to a degree I suitable for discharge, for example, from room temperature to about 60. 0, the double The output is fed back to the control mechanism 6 described later, and the driving of the thermal mechanism 5 is, for example, a thermocouple. The range of the 1 = 1 degree can refer to the used ink dryness or the type of solvent. The appropriate control mechanism 6 is connected to the cooling heating mechanism 5 I4 force and: degree sensor 16. At this time, the control mechanism 6 is used to control the heating The driving mechanism 5 while maintaining the magic ink correction
Cl:2之溫度範圍，而具有珀耳玷元件控制回路 以制回路18。料站㈣控制回路17係用 7等H 耳站元件14之電流，在修正用墨水 專待吐出期間，使冷卻加熱機構5進 =:或;東結塗佈針8内之修正用墨…在。 ’仃加熱或解凍動作俾使修正用墨水7可以 “。，溫度控制回路18可依據該溫度傳感器 輸出’作用於料站元件控制回路17，以控制供應 1341752 於珀耳玷元件14之電流，俾維持埶 度在例如自室温至約6代以内/、、專導益材13之溫 Π說：具有如此構成之塗佈裝置1的動作。 所示用墨水7吐出於如第*圖或第5圖Cl: 2 has a temperature range and has a Perel element control loop to make loop 18. The material station (4) control circuit 17 uses the current of the 7th H-ear station element 14 to make the cooling heating mechanism 5 into the cooling heating mechanism 5 during the correction ink-specific discharge; or the correction ink in the east knot coating needle 8... . The 'heating or thawing action 俾 causes the correction ink 7 to be ". The temperature control circuit 18 can act on the station element control circuit 17 in accordance with the temperature sensor output to control the supply of the current of the 1341752 to the Peltier element 14," The maintenance temperature is, for example, from room temperature to about 6 generations/, and the temperature of the special-purpose material 13 is said to have the action of the coating device 1 thus constituted. The ink 7 shown is discharged as shown in Fig. 5 or 5. Figure
St IT陷部20前之待機期間，控 庠如路17啟動而對…元件14供 二產生自！頭所示方向之電流。此時轴耳站元件 ⑷（放Lt關所示之側面14a(吸熱面）至側面 8内t 流，經熱傳導11材13吸收塗佈針 >正用墨水7的熱量而使其康結。此❹ 讣因，收來自側面14a之熱而成高溫發熱狀態。 人，由於未圖示之開關的操作 =色器Η缺陷部2。之修正動作時，：耳 回路Π切斷了供應於料站元件Η之電流。藉 白耳站元# 14㈣_之熱急速傳導於側面14a， 經熱傳導器材13供應於塗佈針8，加熱或解滚塗佈 =8内之冷部或;東結之修正用墨水7。此時裝設於熱 料器材13外側面之溫度傳感H 16檢出熱傳導器材 13之溫度，並將欲使溫度成為例如室溫至6〇艺以内 之㈣·度控制k號從溫度控制回路i 8輸入於珀耳玷元 件控制回路17。抬耳站元件回路17接受此溫度控制 信號後就控制對珀耳玷元件14的供應電流。遇此場 口供應電μ的控制係因應熱傳導器材丨3之溫度狀 12 1341752 態^制與冷卻或柬結修正用墨水7同方向（第3圖 之前頭方向）的電流值，或供應與上揭逆方向之電 流。關於此修正用墨水7的加熱或解凍等溫度押制， 因塗佈針8之熱容量太小’故須迅速進行。對站 耳玷元件14的供應電流方向如與第3圖之箭頭方向 相反，則同圖所示拍耳站元件14之側面^成放^ 面之作用，而側面14b成吸熱面之作用。遇此場合、、， 側面14a所發之熱，經熱傳導器材13供應於塗佈3 8而對修正用墨水7加溫。 其次，如修正用墨水7經加熱或解凍而成可吐出 狀態，則根據預先測定之遽色g 19之缺陷部2〇的位 置，標數據啟動三抽移動機構2，搬運墨水槽3至遽 色器19之缺陷部20。於是藉未圖示之觀察用CCCT 攝影機擴大攝取缺陷部2G，並將缺陷部2g調整定位 於觀察用CCD攝影機之觀察區域中心。又，此 整可利用大家知悉之技術進行之。 。 其次’觀察用CCD攝影機之物鏡，如第4圖所 Γ對缺陷部2G以設定時間照射修整用之例如533⑽ 或355nm之雷射#砼τ 、’I L·丨’以加工擴大修正缺陷部2 〇 參照第5圓⑷）。此動作之目的在除去遽色器19 之畫素19a面上附著之異物等突起物，或避免注入缺 陷部20之修正用墨水7溢出於缺陷部之外，斜酌每 回吐出動作塗佈針所吐出修正用墨水7吐出量，而故 13 1341752 意放大缺陷部2 0者。 缺陷部20經修整加工後，如第4(b)圖所示，將 塗佈針8之先端部8b定位於缺陷部2(^在此狀熊下 按下未圖示之墨水吐出開始開關，如第丨圖所干: 水吐出控制機構4之定時計"即動作，啟開電磁間 ，預先設定之時f曰卜於是空氣槽1〇之壓縮空氣在 流里控制閥12B之調整控制下經配管9供應於墨水槽 3。墨水槽3内之修正用墨水7承受空氣之正壓而從曰 塗佈針8吐出於缺陷部2〇 (參照第5(b)圖 修正用墨水7突出完了後’如第4(c)圖所示。例 如355nm (紫外線）之雷射光線經物鏡以設定時 間照射於缺陷部20而使修正用墨水7硬化（參照第 5⑷圖）。於是如第4⑷圖所示完成了缺陷部2〇的修 正（參照第5⑷圖）。又，用以硬化修正用墨水7的 光線’不用料線而用IR光線亦可。亦即可端視修 正用墨水7的性質而選擇硬化用的光線種類。 —其次，如欲暫時中斷修正用墨水的吐出動作，即 可按下未圖示之停止開關，此時控制機構6進行珀耳 玷元件控制回路17的凍結控制，而供應如第3圖所 示箭頭方向之電流於珀耳玷元件14。於是塗佈針8 内的〇正用墨水7被珀耳玷元件14吸熱而冷卻或凍 、结- 〆 如此’依照本發明之塗佈裝置1，塗佈針8内之 1341752 修正用墨水7在等待吐出期 戋凌社，；“ 間被珀耳玷元件14冷卻During the standby period before the St IT trap 20, the control unit 17 is activated and the component 14 is generated from the second component! The current in the direction indicated by the head. At this time, the axle station member (4) (the side surface 14a (the heat absorbing surface) shown by the Lt off is placed in the side surface 8 to flow t, and the heat transfer 11 material 13 absorbs the coating needle> In this case, the heat from the side surface 14a is heated to a high temperature heat state. The operation of the switch (not shown) = the color Η defect portion 2. When the correction operation is performed, the ear circuit Π cuts off the supply of the material. The current of the component is 。. The heat of the white ear station element #14(四)_ is transmitted to the side 14a, and is supplied to the coating needle 8 via the heat conduction device 13, and the heating or unrolling coating is performed in the cold part of 8 or; The correction ink 7. The temperature sensing H 16 of the fashion provided on the outer side of the hot material device 13 detects the temperature of the heat conduction device 13 and controls the temperature to be, for example, room temperature to 6 degrees. The temperature control circuit i 8 is input to the Peltier element control circuit 17. The ear lift station component circuit 17 receives the temperature control signal and controls the supply current to the Peltier element 14. The control system that supplies the electric μ at the field port According to the temperature of the heat conduction equipment 丨3 12 1341752 state control and cooling or knot correction The current value of the ink 7 in the same direction (the head direction before the third figure), or the current supplied in the reverse direction. The temperature of the correction ink 7 is heated or thawed, and the heat capacity of the coating needle 8 is too small. 'Therefore, it must be carried out quickly. The direction of the supply current to the station deaf element 14 is opposite to the direction of the arrow in Fig. 3, and the side surface of the ear station component 14 shown in the figure acts as a surface, and the side 14b is formed. In this case, the heat generated by the side surface 14a is supplied to the coating 38 via the heat conduction device 13 to warm the correction ink 7. Next, the correction ink 7 is heated or thawed. In the dischargeable state, the three-pick moving mechanism 2 is activated based on the position of the defective portion 2〇 of the previously measured ochre g 19, and the ink tank 3 is transported to the defect portion 20 of the smear device 19. Thus, it is not shown. Observing the CCG camera to enlarge the ingested defective portion 2G, and positioning the defective portion 2g at the center of the observation area of the observation CCD camera. Further, this can be performed by using a technique known to all. Next, 'observing the objective lens of the CCD camera, As shown in Figure 4 2G defective portion to set the irradiation time of the laser trimming # τ concrete example of 355nm or 533⑽, 'I L · Shu' to defect correction processing section 2 billion enlarged reference circle 5 ⑷). The purpose of this operation is to remove the protrusions such as foreign matter adhering to the surface of the pixel 19a of the color filter 19, or to prevent the correction ink 7 injected into the defect portion 20 from overflowing beyond the defect portion, and to apply the needle for each discharge operation. Since the amount of discharge of the correction ink 7 is discharged, 13 1341752 is intended to enlarge the defective portion 20 . After the defective portion 20 is trimmed, as shown in Fig. 4(b), the leading end portion 8b of the coating needle 8 is positioned at the defective portion 2 (^ under the bear, an ink discharge start switch (not shown) is pressed. As shown in the figure: The timing meter of the water discharge control mechanism 4, that is, the action, opens the electromagnetic room, and when preset, the compressed air in the air tank 1 is under the adjustment control of the flow control valve 12B. The correction ink 7 is supplied to the ink tank 3 via the pipe 9. The correction ink 7 in the ink tank 3 is subjected to the positive pressure of the air and is discharged from the 曰 application needle 8 to the defective portion 2 (refer to the correction ink 7 in Fig. 5(b). Then, as shown in Fig. 4(c), for example, a laser light of 355 nm (ultraviolet light) is irradiated onto the defective portion 20 by the objective lens for a predetermined period of time to cure the correction ink 7 (see Fig. 5(4)). Thus, as shown in Fig. 4(4) The correction of the defective portion 2 is completed (see Fig. 5(4)). Further, the light for hardening the correction ink 7 may be IR light without using a material line, and the correction ink 7 may be viewed. The type of light used for hardening is selected for the nature. - Secondly, if the discharge of the correction ink is temporarily interrupted The stop switch (not shown) can be pressed, and at this time, the control unit 6 performs the freeze control of the Peltier element control circuit 17, and supplies the current in the direction of the arrow as shown in Fig. 3 to the Peltier element 14. Thus, coating is performed. The crucible in the needle 8 is absorbed by the Peltier element 14 by the ink 7 to be cooled or frozen, and thus - in accordance with the coating apparatus 1 of the present invention, the 1341752 correction ink 7 in the coating needle 8 is waiting for the discharge period.戋凌社,; "between the Peltier element 14
:¾床、，，口 ’吐出時被加熱或 P 等待吐出其間修正用墨水7的 ^ ·態’可防止 使墨水乾燥，導致I χ 、 針8内蒸發 爾繁"ν致墨水不能吐出。如欲暫時中斷修正 二&吐出動作，不像傳統技術，必須每次退出 煩，可^於塗佈區域外，而收容於待機容器内等待之 煩，可5兒極為有效率。 又由於利用轴耳站元件14構成冷卻加熱機 5，可製成小型且高冷卻效率的冷卻加熱機構5。 又由於加熱溫度傳感器16於冷卻加熱機構，得 以保持吐出時修正用墨水7之溫度於設定之溫度範 而可維持修正用墨水7之粘度於適合於吐出之粘 此外’塗佈材料並不僅限於上述之修正用墨水 7，即如配線圖案缺陷修正用銀糊，或形成設定圖案 鲁之際所使用之抗蝕劑亦可，又該塗佈裝置1，也並/不 限於藉二轴移動機構2來移動容器，用手移動亦可。 15 1341752 【圖式簡單說明】 人第1圓為表不本發明之塗佈裝置實施形態的概 心圖； 第2圖為表示該塗佈裝置所使用塗佈針形狀一 例之斷面圖； 第3圖為表示該塗佈裝置冷卻加熱機構構成例 之斜視圖； 第4圖為說明液晶顯示元件之濾色器缺陷修正 方法之側面圖； 第5圖為說明液晶顯示元件之濾色器缺陷修正 方法之平面圖。 【主要元件符號說明】 1 :塗佈裝置 3 :墨水槽 5 :冷卻加熱機構 7 :修正用墨水 9 :配管 11 :定時計 12B :流量控制閥 14 :珀耳玷元件 1 7 :拍耳玷元件控制回路 19 :濾色器 2 ·二轴移動機構 4 :墨水吐出控制機構 6 :控制機構 8 .塗佈針 1 〇 :空氣槽 12A :電磁閥 13 :熱傳導器材 16 :溫度傳感器 18 :溫度控制回路 20 :缺陷部 16: 3⁄4 bed,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, If you want to temporarily interrupt the correction, the second & discharge operation, unlike the traditional technology, must be removed every time, can be outside the coating area, and waiting in the standby container to wait for annoying, can be extremely efficient. Further, since the cooling heater 5 is constituted by the lug station element 14, a cooling heating mechanism 5 having a small size and high cooling efficiency can be obtained. Further, since the heating temperature sensor 16 is in the cooling and heating mechanism, the temperature of the correction ink 7 at the time of discharge can be maintained at the set temperature range, and the viscosity of the correction ink 7 can be maintained at the viscosity suitable for discharge. The coating material is not limited to the above. The correction ink 7, that is, the silver paste for wiring pattern defect correction, or the resist used when forming the pattern is formed, and the coating device 1 is also/not limited to the two-axis moving mechanism 2 To move the container, you can move it by hand. 15 1341752 [Brief Description of the Drawings] The first circle is a schematic view showing an embodiment of the coating device of the present invention; and the second drawing is a cross-sectional view showing an example of the shape of the coating needle used in the coating device; 3 is a perspective view showing an example of a configuration of a cooling and heating mechanism of the coating device; FIG. 4 is a side view showing a method of correcting a color filter defect of the liquid crystal display element; and FIG. 5 is a view showing correction of a color filter defect of the liquid crystal display element; Plan of the method. [Explanation of main component symbols] 1 : Coating device 3 : Ink tank 5 : Cooling heating mechanism 7 : Correction ink 9 : Piping 11 : Timing 12B : Flow control valve 14 : Peltier element 1 7 : Shooting ear element Control circuit 19: color filter 2 • two-axis moving mechanism 4: ink discharge control mechanism 6: control mechanism 8. coating needle 1 〇: air tank 12A: solenoid valve 13: heat conduction device 16: temperature sensor 18: temperature control circuit 20: defect part 16