1338133 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種氣氛檢測治具，更特別有關於一 種氣氛檢測治具之基板、環形支撐牆及外蓋的構成外形係 相同於被模擬之封裝構造的外形。 【先前技術】 對具有微穴之封裝構造（Micro Cavity Package)，諸如微 機電系統（Micro-electro-mechanical System ; MEMS)封裝構 造而言，該封裝構造之内部通常須保持高真空度或以氤氣 充填’以避免水氣、氧氣或其他氣氛入侵而降低使用壽命。 因此，於該封裝構造封裝後，須以一氣氛檢測系統檢測該 封裝構造之内部的氣氛（亦即接近真空之環境或充填氮氣 之環境）是否符合特定真空度之真空環境或特定純度之氮 氣環境。 參考第1圖，其顯示一種習知氣氛檢測系統ι〇。該氣 氣檢測系統10包含一氣室（chaniber)12 ' —真空果μ及一 氣體分析儀16。該氣室12藉由管路22與閥以連通於該 真空栗14及該氣體分析儀16。—具有微穴之封裝構造％ 係配置於該氣室12。根據習知氣氛檢測方法，首先將真空 泵14啟動，使該氣室12内形成真空。然後，利用特殊： 具（諸如機械手臂，圖未示）將該封裝構造3〇打開。最後， 該氣體分析儀係』以檢測由該封裝構造3()之内 至該氣…氣氛是否符合一特定預定值之氣氛環境： 然而，習知氣氛檢測系統之氣室及真空泉具有魔大的趙 01250-TW/ASE1939. 5 1338133 積，將佔據龐大的製程空間.再者，由該封裝構造之内部 擴散至該氣室的氣氛通常不易被檢測出。 sa ’便有需要提供—種氣氛檢測治具，能夠解決前述 的缺點。 【發明内容】 本發明之一目的在於提供一種氣氛檢測治具之基板、環 形支撐牆及外蓋的構成外形係相同於被模擬之封裝構造的 _ 外形，因此整體氣氛檢測治具所需之體積較小。 本發明之另一目的在於提供一種氣氛檢測治具可直接 經由管路檢測封閉空間内部之氣氛，而不須考慮擴散作用 的影響。 為達上述目的，本發明提供一種氣氛檢測治具，包含一 基板、一環形支撐牆、一外蓋、一管路及一破壞器。該環 形支撐牆係配置於該基板上。該外蓋係配置於該環形支撐 牆上，其中該外蓋、該環形支撐牆及該基板形成了—封閉 •空間，該封閉空間定義了一内部及一外界，該内部包含一 氣孔。該管路包含一管壁，該管路係由該封閉空間之内部 延伸至該封閉空間之外界，並將該封閉空間之内部與該^ 閉空間之外界隔離。該破壞器係用以破壞該管壁藉此使 該封閉空間之外界經由該管路連通於該封閉空間内部之氣 氛。 ’ 本發明之氣氛檢測治具之基板、環形支撐牆及外蓋的構 成外形係相同於被模擬之封裝構造的外形，因此整個氡氛 檢測治具所需之體積較小。再者，相較於習知氣氛檢 01250-TW/ASE1939 6 1338133 用=該環形支揮^12固定於該基板川上 116穿過該接合材料叫如第3圖所示）。 ^路 該外蓋U4及該環形支撐牆112# a# 封材料所製，豆係·5Γ炎人H 保為雄 ]4〇 ”了為金屬、陶瓷或玻璃，而該接合材料 14〇係可為錫膏、陷垄p+ 饮。材料 _ 陶是熔塊或玻璃熔塊（glass frit)。& ό’當該外蓋Η*及琴援报 及該環形支撐牆112係為金屬時， 接合材料140係為錫f。去# % ""1338133 IX. Description of the Invention: [Technical Field] The present invention relates to an atmosphere detecting jig, and more particularly to a substrate, an annular supporting wall and an outer cover of an atmosphere detecting jig having the same shape as being simulated The shape of the package structure. [Prior Art] For a Micro Cavity Package having a microcavity, such as a Micro-electro-mechanical System (MEMS) package structure, the inside of the package structure usually has to maintain a high degree of vacuum or Gas filling 'to avoid the intrusion of moisture, oxygen or other atmospheres to reduce the service life. Therefore, after the package structure is packaged, an atmosphere detection system is required to detect whether the atmosphere inside the package structure (that is, the environment close to a vacuum or the environment filled with nitrogen) conforms to a vacuum environment of a specific vacuum degree or a nitrogen atmosphere of a specific purity. . Referring to Figure 1, there is shown a conventional atmosphere detection system ι〇. The gas detection system 10 includes a chaniber 12'-vacuum fruit and a gas analyzer 16. The plenum 12 is in communication with the vacuum pump 14 and the gas analyzer 16 via a line 22 and a valve. - The package structure % having micro-cavities is disposed in the gas chamber 12. According to the conventional atmosphere detecting method, the vacuum pump 14 is first activated to form a vacuum in the gas chamber 12. Then, the package structure is opened by a special: tool (such as a robot arm, not shown). Finally, the gas analyzer is configured to detect an atmosphere environment from within the package structure 3 () to whether the atmosphere of the gas meets a predetermined predetermined value: however, the gas chamber and the vacuum spring of the conventional atmosphere detection system have a large The Zhao 01250-TW/ASE1939. 5 1338133 product will occupy a large process space. Furthermore, the atmosphere diffused inside the package structure to the gas chamber is usually not easily detected. Sa ’ is required to provide an atmosphere detection fixture that can solve the aforementioned shortcomings. SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate having an atmosphere detecting jig, an annular supporting wall, and an outer cover having the same outer shape as that of the package structure to be simulated, and thus the volume required for the overall atmosphere detecting jig Smaller. Another object of the present invention is to provide an atmosphere detecting jig that can directly detect the atmosphere inside the enclosed space via a pipeline without considering the influence of diffusion. To achieve the above object, the present invention provides an atmosphere detecting jig comprising a substrate, an annular supporting wall, an outer cover, a pipe, and a breaker. The annular support wall is disposed on the substrate. The cover is disposed on the annular support wall, wherein the outer cover, the annular support wall and the substrate form a closed space defining an interior and an outside, the interior including a vent. The conduit includes a wall extending from the interior of the enclosed space to an outer boundary of the enclosed space and isolating the interior of the enclosed space from the outer boundary of the enclosed space. The breaker is adapted to break the wall of the tube such that the outer boundary of the enclosed space communicates with the atmosphere inside the enclosed space via the conduit. The substrate, the annular support wall and the outer cover of the atmosphere detecting jig of the present invention have the same outer shape as that of the package structure to be simulated, so that the volume required for the entire atmosphere detecting jig is small. Further, compared with the conventional atmosphere test 01250-TW/ASE1939 6 1338133, the ring member is fixed to the substrate, and the material is passed through the bonding material as shown in Fig. 3. ^The outer cover U4 and the annular support wall 112# a# are made of sealing materials, and the bean system is a metal, ceramic or glass, and the bonding material 14 can be Solder paste, trapped ridge p+ drink. Material _ Tao is a frit or glass frit. & ό 'When the cover Η* and Qin Bao report and the annular support wall 112 are made of metal, the joint material The 140 series is tin f. Go # % ""
Mm 巧场t田該外盘114及該環形支撑牆112 係為陶-光時，則該接合材料14〇係為陶究熔塊。當 I"及該環形支撐冑112係為玻璃時則該接合材料 係為玻璃熔塊。 ^管路116係與該封閉空間12〇之内部122隔離，且該 破壞器118係配置於該封閉空間12〇之内部122(如第2圖 所示），用以破壞該管路116之管壁，藉此使位於該封閉空 間120外界124之氣體分析儀16〇經由閥115及該管路ιΐ6 連通於該封閉空間丨20内部122之氣氛。詳細而言，該破 壞器118係固定於該基板110上，可藉由一壓力15〇施於 該外蓋上（如第4圖所示），而使該破壞器118切破或頂破 δ玄管路116之管壁’藉此使該管路116連通於該封閉空間 120内部122之氣氛。由於該管路116之兩端152、154係 連通於該氣體分析儀160’因此該氣體分析儀16〇可用以 分析該封閉空間120内部122之氣氛，其中該封閉空間120 内部122之氣氛係可為接近真空之環境或充填惰性氣體之 環境（諸如氮氣）》或者，只需將該管路116之一端152連 通於位於該封閉空間120外界124之氣體分析儀16〇 ,則 可使該氣體分析儀160分析該封閉空間120内部122之氣 8 01250-TW/ASE1939 1338133 氣（如第5圖所示）。 在另一替代實施例+，該管路116係與該封閉空間12〇 之外界124隔離，且該破壞器118,係配置於該封閉空間12〇 外界124之另一封閉空間170 (如第6圖所示），用以破壞 該管路116之管壁，藉此使位於該封閉空間12〇外界124 之氣體分析儀1 60經由閥11 5及該管路1 i 6連通於該封閉 二間120内部122之氣氛。詳細而言，該破壞器丨丨8，係用 以切破或頂破該管路116之管壁，藉此使該管路116連通 於該氣體分析儀160。由於該管路116之一端152係連通 於該氣體分析儀160，因此該氣體分析儀16〇可用以分析 該封閉空間120内部122之氣氛，其中該封閉空間12〇内 1 2 2之氣氛係可為接近真空之環境或充填惰性氣體之環 境（諸如氮氣）。 本發明之氣氛檢測治具之基板、環形支撐牆及外蓋之構 成係用以模擬一具有微穴之封裝構造（Micr〇 CavityWhen the outer disk 114 and the annular support wall 112 are ceramic-light, the bonding material 14 is a ceramic frit. When the I" and the annular support 胄112 are made of glass, the bonding material is a glass frit. The line 116 is isolated from the interior 122 of the enclosed space 12, and the breaker 118 is disposed in the interior 122 of the enclosed space 12 (as shown in FIG. 2) for destroying the tube of the line 116. The wall, thereby causing the gas analyzer 16 located outside the enclosed space 120 to communicate with the atmosphere of the interior 122 of the enclosed space 20 via the valve 115 and the line ι6. In detail, the destroyer 118 is fixed on the substrate 110 and can be applied to the outer cover by a pressure 15 (as shown in FIG. 4), so that the destroyer 118 is cut or broken. The wall of the duct 116 is thereby configured to communicate the line 116 to the atmosphere of the interior 122 of the enclosed space 120. Since the two ends 152, 154 of the line 116 are in communication with the gas analyzer 160', the gas analyzer 16 can be used to analyze the atmosphere of the interior 122 of the enclosed space 120, wherein the atmosphere of the interior 122 of the enclosed space 120 can be In order to be close to a vacuum environment or an atmosphere filled with an inert gas (such as nitrogen), or simply connect one end 152 of the line 116 to a gas analyzer 16〇 located outside the enclosed space 120, the gas analysis can be performed. The meter 160 analyzes the gas 8 01250-TW/ASE1939 1338133 gas inside the enclosed space 120 (as shown in FIG. 5). In another alternative embodiment, the line 116 is isolated from the outer space 124 of the enclosed space 12, and the destroyer 118 is disposed in another enclosed space 170 of the enclosed space 12 and the outside 124 (eg, the sixth The figure is used to break the wall of the pipe 116, thereby connecting the gas analyzer 1 60 located in the closed space 12 to the outside 124 to the closed two rooms via the valve 11 5 and the pipe 1 i 6 120 atmosphere of 122 interior. In detail, the breaker 8 is used to cut or rupture the wall of the line 116, thereby connecting the line 116 to the gas analyzer 160. Since one end 152 of the line 116 is in communication with the gas analyzer 160, the gas analyzer 16 can be used to analyze the atmosphere of the interior 122 of the enclosed space 120, wherein the atmosphere of the closed space 12 is 1 2 2 To be close to a vacuum environment or an environment filled with an inert gas such as nitrogen. The substrate of the atmosphere detecting fixture of the present invention, the annular supporting wall and the outer cover are used to simulate a package structure with micro-cavities (Micr〇 Cavity)
Package) ’ 諸如微機電系統（Micro-electro -mechanical System，MEMS)封裝構造，其中該封裝構造之内部通常須 保持高真空度或以惰性氣體充填。因此，本發明之氣氛檢 測治具可模擬檢測該封裝構造之内部的氣氛（亦即接近真 空之環境或充填惰性氣體之環境）是否符合特定真空度之 真空環境或特定純度之惰性氣體環境（諸如純度99%以上 之氮氣）。 本發明之氣氛檢測治具之基板、環形支撐牆及外蓋的構 成外形係相同於被模擬之封裝構造的外形，因此整個氣氛 01250-TW/ASEI939 9 1338133 檢測治具所需之體積較小。，再者，相較於習知氣氛檢測系 統，本發明之氣氛檢測.治具不需包含氣室及真空泵，因此 其製程空間較小。再者，本發明之氣氛檢測治具的破壞器 係容易被設計切破或頂破該管路，以獲取該封閉空間内部 之氣氛。另外’本發明之氣氛檢測治具可直接經由管路檢 測4封閉空間内部之氣氛，而不須考慮擴散作用的影響。 另外，參考第7圖’其顯示利用本實施例之治具的氣氛 檢測方法。在步驟200中，提供本發明之治具1〇〇，其包 含一封閉空間及一管路，其中封閉空間定義了一内部及一 外界，該内部包含一氣氛，且該管路包含一管壁，該管路 係由該封閉空間之内部延伸至該封閉空間之外界，並將該 封閉空間之内部與該封閉空間之外界隔離。該治具另包含 一外蓋、一環形支撐牆及一基板，以形成該封閉空間。在 步驟202中，破壞該管壁（諸如切破管路），藉此使該封閉 空間之外界經由該管路連通於該封閉空間内部之氣氛。在 步驟204中，提供一氣體分析儀，分析該封閉空間之氣氛， •其中該封閉空間内部之氣氛係可為接近真空之環境或充填 惰性氣體之環境（諸如氮氣）。 、 雖然本發明已以前述實施例揭示，然其並非用以限定本 發明，任何本發明所屬技術領域中具有通常知識者，在不 脫離本發明之精神和範圍内，當可作各種之更動與修改。 因此本發明之保護範圍當視後附之申請專利範圍所 為準。 足有 【圖式簡單說明】 01250-TW/ASE1939 10 1338133 第1圖為先前技術之氣氛檢測系統之立體示意圖。 第2圖為本發明之—實施例之氣氛檢測治具之剖面示 意圖。 第3圖為本發明之一替代實施例之氣氛檢測治具之剖 面示意圖。 第4圖為本發明之該實施例之氣氛檢測治具之剖面示 意圖，其顯示將一壓力施於外蓋上。 • 第5圖為本發明之該實施例之氣氛檢測治具之剖面示 意圖，其顯示管路之一端連通於位於氣體分析儀。 第ό圓為本發明之另一替代實施例之氣氛檢測治具之 剖面示意圖。 第7圖為本發明之氣氛檢測方法之流程圖。 【主要元件符號說明】 10 氣氛檢測系統 12 氣室 14 真空泵 16 氣體分析儀 22 管路 24 閥 30 封裝構造 100 氣氛檢測治具 110 基板 112 環形支撐牆 114 外蓋 115 閥 116 管路 118 破壞器 118’ 破壞器 120 封閉空間 122 内部 01250-TW/ASE1939 11 1338133 124 外界 140 接合材料 150 壓力 152 端 154 端 160 氣體分析儀 170 封閉空間 200 步驟 202 步驟 204 步驟 .01250-TW/ASE1939 12Package) is a micro-electro-mechanical system (MEMS) package construction in which the interior of the package structure is typically maintained at a high vacuum or filled with an inert gas. Therefore, the atmosphere detecting jig of the present invention can simulate whether the atmosphere inside the package structure (that is, the environment close to a vacuum or an environment filled with an inert gas) conforms to a vacuum environment of a specific vacuum degree or an inert gas environment of a specific purity (such as Nitrogen with a purity of 99% or more). The substrate, the annular support wall and the outer cover of the atmosphere detecting jig of the present invention have the same outer shape as that of the package structure to be simulated, so that the entire atmosphere 01250-TW/ASEI939 9 1338133 requires a smaller volume for detecting the jig. Furthermore, compared with the conventional atmosphere detecting system, the atmosphere detecting tool of the present invention does not need to include a gas chamber and a vacuum pump, so that the processing space is small. Further, the destroyer of the atmosphere detecting jig of the present invention is easily designed to cut or break the pipe to obtain an atmosphere inside the closed space. Further, the atmosphere detecting jig of the present invention can directly detect the atmosphere inside the closed space via the pipeline without considering the influence of the diffusion action. Further, referring to Fig. 7', an atmosphere detecting method using the jig of the present embodiment is shown. In step 200, the fixture of the present invention is provided, comprising a closed space and a pipeline, wherein the enclosure defines an interior and an outside, the interior contains an atmosphere, and the pipeline includes a wall The pipe extends from the interior of the enclosed space to the outer boundary of the enclosed space and isolates the interior of the enclosed space from the outer boundary of the enclosed space. The fixture further includes an outer cover, an annular support wall and a substrate to form the enclosed space. In step 202, the tube wall (such as a cut-out line) is broken, thereby allowing the outer space of the enclosed space to communicate with the atmosphere inside the enclosed space via the line. In step 204, a gas analyzer is provided to analyze the atmosphere of the enclosed space. The atmosphere inside the enclosed space may be an environment close to a vacuum or an environment filled with an inert gas such as nitrogen. The present invention has been disclosed in the foregoing embodiments, and is not intended to limit the scope of the present invention, and it is intended that various modifications may be made without departing from the spirit and scope of the invention. modify. Therefore, the scope of protection of the present invention is subject to the scope of the appended claims. There is a simple description of the drawing 01250-TW/ASE1939 10 1338133 Fig. 1 is a perspective view of a prior art atmosphere detecting system. Fig. 2 is a cross-sectional view showing an atmosphere detecting jig of the embodiment of the present invention. Fig. 3 is a schematic cross-sectional view showing an atmosphere detecting jig according to an alternative embodiment of the present invention. Fig. 4 is a cross-sectional view showing the atmosphere detecting jig of the embodiment of the present invention, showing a pressure applied to the outer cover. Fig. 5 is a cross-sectional view showing the atmosphere detecting jig of the embodiment of the present invention, showing that one end of the pipe is connected to the gas analyzer. The third circle is a schematic cross-sectional view of an atmosphere detecting jig according to another alternative embodiment of the present invention. Figure 7 is a flow chart of the atmosphere detecting method of the present invention. [Main component symbol description] 10 Atmosphere detection system 12 Air chamber 14 Vacuum pump 16 Gas analyzer 22 Line 24 Valve 30 Package structure 100 Atmosphere detection fixture 110 Substrate 112 Ring support wall 114 Cover 115 Valve 116 Line 118 Destructor 118 'Destructor 120 Enclosed space 122 Internal 01250-TW/ASE1939 11 1338133 124 Exterior 140 Bonding material 150 Pressure 152 End 154 End 160 Gas analyzer 170 Enclosed space 200 Step 202 Step 204 Step. 01250-TW/ASE1939 12