CN220136591U - Air tightness detection test fixture - Google Patents
Air tightness detection test fixture Download PDFInfo
- Publication number
- CN220136591U CN220136591U CN202321407740.8U CN202321407740U CN220136591U CN 220136591 U CN220136591 U CN 220136591U CN 202321407740 U CN202321407740 U CN 202321407740U CN 220136591 U CN220136591 U CN 220136591U
- Authority
- CN
- China
- Prior art keywords
- base
- inner cavity
- upright post
- metal shell
- tightness detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 32
- 238000012360 testing method Methods 0.000 title claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 52
- 229910052751 metal Inorganic materials 0.000 claims abstract description 52
- 238000003825 pressing Methods 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 claims abstract description 16
- 238000000605 extraction Methods 0.000 claims description 7
- 239000001307 helium Substances 0.000 abstract description 9
- 229910052734 helium Inorganic materials 0.000 abstract description 9
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 9
- 239000004519 grease Substances 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 5
- 238000004377 microelectronic Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 239000005355 lead glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
The utility model discloses an air tightness detection test fixture, which belongs to the technical field of air tightness detection of metal shells and comprises a base, a left upright post, a right upright post, a bracket transverse plate, a pressing stud and an inner cavity metal shell, wherein the left upright post and the right upright post are arranged on the base, the bracket transverse plate is fixed on the left upright post and the right upright post by adopting nuts, the pressing stud is arranged on the bracket transverse plate, the inner cavity metal shell is positioned below the pressing stud, a sealing ring is arranged between the inner cavity metal shell and the base, an air suction hole is arranged in the center of the base, an air suction cavity is arranged below the base, a connector is arranged at the lower end of the base and can be used for carrying out air tightness detection on an unsealed inner cavity metal shell, the sealing performance of an opening of the inner cavity metal shell is improved by arranging the pressing stud, the leak detection precision of the unsealed inner cavity metal shell is improved, meanwhile, vacuum grease, vacuum liquid and the like are avoided, and the damage risk to a helium mass spectrometer is reduced.
Description
Technical Field
The utility model relates to the technical field related to air tightness detection of metal shells, in particular to an air tightness detection test fixture.
Background
The high-reliability microelectronic device and the semiconductor device are packaged in an airtight manner by adopting a kovar alloy, a tungsten-copper alloy and a ceramic-metal integrated shell. In particular, in the process of manufacturing a metal shell with an inner cavity, the matching sealing of a kovar lead (outer lead) and a metal shell is involved. The technology adopts high-silicon boron hard glass to be melted and resolidified in high-temperature inert or micro-oxidation atmosphere, so that the outer lead and the metal shell are sealed together. In order to meet the air tightness control requirement of high-reliability microelectronic devices and semiconductor devices on lead glass sealing of inner cavity metal shells, air tightness detection needs to be carried out on the uncapped inner cavity metal shells according to the related requirement of a method 1014.2 sealing test condition A4 in GJB548B-2005 microelectronic device test method and program.
The airtight detection of the unsealed inner cavity metal shell is carried out by tracing gas helium (He), and the used instrument is a helium mass spectrometer leak detector. When leakage detection is performed, the metal shell is sealed at a vacuum joint of the helium mass spectrometer leakage detector by adopting a fixture, and then the packaging inner cavity is vacuumized to be smaller than or equal to 0.01kPa. The leak detection clamp in the prior art is a stainless steel tray, has an overall dimension of 150-200 mm (reference), a thickness of 10-15 mm (reference), and a central air pressure channel dimension of phi 5-10 mm (reference), and is matched with a sealing ring, vacuum grease, vacuum liquid and the like. The method has the advantages of low air tightness leakage detection precision, poor consistency effect, repeated leakage detection confirmation of the same shell in the production process, no guarantee of the quality of products, poor consistency, and serious pollution and damage to the helium mass spectrum leakage detector due to long-time use of vacuum grease and vacuum liquid.
Disclosure of Invention
The utility model provides an air tightness detection test fixture, and aims to solve the technical defects.
The specific technical scheme provided by the utility model is as follows:
the utility model provides an air tightness detection test fixture which comprises a base, a left upright post, a right upright post, a support transverse plate, a pressing stud and an inner cavity metal shell, wherein the left upright post and the right upright post are arranged on the base, the support transverse plate is fixed on the left upright post and the right upright post through nuts, the pressing stud is arranged on the support transverse plate, the inner cavity metal shell is positioned below the pressing stud, a sealing ring is arranged between the inner cavity metal shell and the base, an air suction hole is arranged in the center of the base, an air suction cavity is arranged below the base, and a connector is arranged at the lower end of the base.
Optionally, the left upright post and the right upright post are fixed on the base by adopting threaded connection, and the air exhaust hole and the air exhaust cavity are mutually communicated.
Optionally, the air extraction cavity is communicated with the inner cavity of the inner cavity metal shell through the air extraction hole, and the pressing stud is in threaded connection with the bracket transverse plate.
Optionally, the left stand with be provided with the boss on the right stand, the support diaphragm adopts the nut cooperation the boss is fixed left stand with on the right stand, the front end butt of pressing the double-screw bolt is in on the cavity metal casing.
Optionally, the center of the inner cavity metal shell and the center of the air suction hole are mutually overlapped.
The utility model has the following beneficial technical effects:
the embodiment of the utility model provides an air tightness detection test fixture which comprises a base, a left upright post and a right upright post which are arranged on the base, a bracket transverse plate which is fixed on the left upright post and the right upright post by adopting nuts, a pressing stud which is arranged on the bracket transverse plate, and an inner cavity metal shell which is positioned below the pressing stud, wherein a sealing ring is arranged between the inner cavity metal shell and the base, an air suction hole is arranged at the center position of the base, an air suction cavity is arranged below the base, a connector is arranged at the lower end of the base and can be used for air tightness detection of an inner cavity metal shell which is not covered, the pressing stud is arranged to uniformly press the inner cavity metal shell, the tightness of an opening of the inner cavity metal shell is increased in the process of leak detection, the leak detection precision of the inner cavity metal shell which is not covered is improved, vacuum grease, vacuum liquid and the like are avoided, and the risk of damage to a helium mass spectrometer is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of an isometric structure of a tightness testing jig according to an embodiment of the present utility model;
fig. 2 is a schematic cross-sectional view of an airtight test fixture according to an embodiment of the present utility model.
Detailed Description
In order to make the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be described in further detail below with reference to the accompanying drawings, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
An air tightness detection test fixture according to an embodiment of the present utility model will be described in detail with reference to fig. 1 to 2.
Referring to fig. 1-2, the air tightness detection test fixture provided by the embodiment of the utility model comprises a base 1, a left upright post 2 and a right upright post 3 which are arranged on the base 1, a bracket transverse plate 11 which is fixed on the left upright post 2 and the right upright post 3 by adopting nuts 4, a pressing stud 5 which is arranged on the bracket transverse plate 11, and an inner cavity metal shell 6 which is positioned below the pressing stud 5, wherein a sealing ring 7 is arranged between the inner cavity metal shell 6 and the base 1, an air suction hole 8 is arranged in the center of the base 1, an air suction cavity 9 is arranged below the base 1, and a connector 10 is arranged at the lower end of the base 1.
Referring to fig. 1 and 2, bosses are arranged on the left upright 2 and the right upright 3, a bracket transverse plate 11 is fixed on the left upright 2 and the right upright 3 by adopting a nut 4 to be matched with the bosses, the front end of a pressing stud 5 is abutted on an inner cavity metal shell 6, a threaded hole is arranged on the bracket transverse plate 11, the pressing stud 5 is arranged in the threaded hole, and the bracket transverse plate 11 is fixedly hung on the left upright 2 and the right upright 3, so that the pressing stud 5 can move upwards or downwards relative to the bracket transverse plate 11 by rotating the pressing stud 5, and the acting force applied on the inner cavity metal shell 6 by the front end of the pressing stud 5 is changed.
Referring to fig. 1 and 2, the left upright 2 and the right upright 3 are fixed on the base 1 by threaded connection, and the air suction hole 8 and the air suction cavity 9 are mutually communicated. The air pumping cavity 9 is communicated with the inner cavity of the inner cavity metal shell 6 through the air pumping hole 8, the center of the inner cavity metal shell 6 is overlapped with the center of the air pumping hole 8, and the air tightness detection can be realized by replacing the inner cavity metal shell 6 with different inner cavity metal shells which are not sealed to be detected.
Referring to fig. 2, a sealing ring 7 with a small hole with diameter phi 5mm in the middle is placed above the air suction hole 8 of the base 1, the sealing ring 7 can be a sealing gasket, and then the cavity surface of the metal shell of the inner cavity to be tested is placed towards the vent hole of the sealing gasket; adjusting the center alignment of the inner cavity metal shell and the air extraction hole 8, and then screwing the compression stud 5 to ensure that the appearance surface of the inner cavity metal shell is fully contacted with the surface of the sealing gasket, thereby forming a sealed inner cavity; and vacuumizing the inner cavity until the pressure is less than or equal to 0.01kPa, and then enabling the outer part of the inner cavity metal shell to be subjected to the action of helium with the pressure of 236kPa, so that the leak rate of the lead glass seal of the inner cavity metal shell to be tested can be read from the helium mass spectrometer leak detector.
The embodiment of the utility model provides an air tightness detection test fixture which comprises a base, a left upright post and a right upright post which are arranged on the base, a bracket transverse plate which is fixed on the left upright post and the right upright post by adopting nuts, a pressing stud which is arranged on the bracket transverse plate, and an inner cavity metal shell which is positioned below the pressing stud, wherein a sealing ring is arranged between the inner cavity metal shell and the base, an air suction hole is arranged at the center position of the base, an air suction cavity is arranged below the base, a connector is arranged at the lower end of the base and can be used for air tightness detection of an inner cavity metal shell which is not covered, the pressing stud is arranged to uniformly press the inner cavity metal shell, the tightness of an opening of the inner cavity metal shell is increased in the process of leak detection, the leak detection precision of the inner cavity metal shell which is not covered is improved, vacuum grease, vacuum liquid and the like are avoided, and the risk of damage to a helium mass spectrometer is reduced.
It will be apparent to those skilled in the art that various modifications and variations can be made to the embodiments of the present utility model without departing from the spirit or scope of the embodiments of the utility model. Thus, if such modifications and variations of the embodiments of the present utility model fall within the scope of the claims and the equivalents thereof, the present utility model is also intended to include such modifications and variations.
Claims (5)
1. The utility model provides a gas tightness detection test fixture, its characterized in that, gas tightness detection test fixture includes the base, installs left stand and right stand on the base, adopt the nut to fix left stand with support diaphragm on the right stand, install the pressure double-screw bolt on the support diaphragm, be located the interior cavity metal casing of pressure double-screw bolt below, interior cavity metal casing with be provided with the sealing washer between the base, the central point of base is provided with the gas vent, the below of base is provided with the gas chamber, the lower extreme of base is provided with the connector.
2. The air tightness detection test fixture of claim 1 wherein said left upright and said right upright are secured to said base by threaded connection, said air extraction aperture and said air extraction cavity being in communication with each other.
3. The air tightness detection test fixture according to claim 1 or 2, wherein the air extraction cavity is communicated with the inner cavity of the inner cavity metal shell through the air extraction hole, and the pressing stud is in threaded connection between the bracket transverse plates.
4. The air tightness detection test fixture according to claim 3, wherein bosses are arranged on the left upright post and the right upright post, the bracket transverse plate is fixed on the left upright post and the right upright post by adopting nuts to match with the bosses, and the front ends of the pressing studs are abutted against the inner cavity metal shell.
5. A gas tightness test fixture according to claim 3 wherein the center of said inner cavity metal housing and the center of said bleed hole coincide with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321407740.8U CN220136591U (en) | 2023-06-05 | 2023-06-05 | Air tightness detection test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321407740.8U CN220136591U (en) | 2023-06-05 | 2023-06-05 | Air tightness detection test fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220136591U true CN220136591U (en) | 2023-12-05 |
Family
ID=88957910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321407740.8U Active CN220136591U (en) | 2023-06-05 | 2023-06-05 | Air tightness detection test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220136591U (en) |
-
2023
- 2023-06-05 CN CN202321407740.8U patent/CN220136591U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202308896U (en) | Vacuum uniform pressure leakage detection device of insulated inflatable switching cabinet | |
| CN206930412U (en) | Integrated package casing sealing property detection fixture | |
| CN109738129A (en) | The method for detecting conduit tube component air-tightness | |
| CN208596014U (en) | It is a kind of to push vacuum leakage detection apparatus manually | |
| CN104165734A (en) | End cover for testing sealing performance of ball valve | |
| CN220136591U (en) | Air tightness detection test fixture | |
| CN208847428U (en) | A kind of Mobile phone screen sealing test jig | |
| CN109297649A (en) | The device of the quick helium mass spectrum leak detection of circular joint in a kind of diaphragm | |
| CN219455396U (en) | Lithium battery shell helium leakage rate detection jig | |
| CN109282949B (en) | Special-shaped wire holder air tightness inspection device | |
| CN210293577U (en) | Connector gas tightness inspection frock | |
| CN209342277U (en) | A kind of piece of formula differential pressure force snesor | |
| CN110702329A (en) | Air seal test tool for miniature radio frequency insulator | |
| CN206493088U (en) | A kind of piston press-loading device | |
| CN210863059U (en) | Shell airtightness detection tool | |
| CN213902768U (en) | Helium leak detection tool | |
| CN214669461U (en) | Probe station with vacuum degree adjusting system | |
| CN212513480U (en) | Air tightness detection tool for cylinder gasket | |
| CN219495586U (en) | Air tightness detection device and test system | |
| CN207585844U (en) | A kind of device that thin-walled pressure vessel mouth can be sealed | |
| CN214952017U (en) | Leakage detection device of gas detector sealing flange | |
| CN213022180U (en) | Accurate atmospheric pressure detection tool of water gauge copper casing | |
| CN217211311U (en) | Stator pressurize instrument | |
| CN212903773U (en) | Motor controller gas tightness detection device | |
| CN218330465U (en) | Semi-automatic air tightness detection clamp for feed-through connector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |