TWI337921B - - Google Patents

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TWI337921B
TWI337921B TW97127800A TW97127800A TWI337921B TW I337921 B TWI337921 B TW I337921B TW 97127800 A TW97127800 A TW 97127800A TW 97127800 A TW97127800 A TW 97127800A TW I337921 B TWI337921 B TW I337921B
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Taiwan
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tool
gyroscope
item
measurement function
angle measurement
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TW97127800A
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Chinese (zh)
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TW201004748A (en
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Description

1337921 九、發明說明: 【發明所屬之技術領域】 種穩定度 古本創作係有關於數位工具,尤其有關於— 咼、組裝易且具有角度量測功能之工具。 【先前技術】 U 具為在—般手工具内整合人偵測機制,以藉由 感知讀來偵測得知手工具的使用狀況,如扳 :1337921 IX. Description of the invention: [Technical field to which the invention belongs] The degree of stability The ancient creation department has a number of tools, especially tools for 咼, assembly and angle measurement. [Prior Art] The U-integrated person integrates the human detection mechanism in the general hand tool to detect the usage status of the hand tool by the perceptual reading, such as:

-可在扳手U —應變規,據而藉由 所產生的電荷㈣,即可運算得知扳手所承受==受 此外如美國專利號碼US5589644,其揭露一種可 轉動角度之工具,其藉由—㈣陀螺儀感測元件债測工具 轉動的訊號,並經由訊號處理轉換為旋轉角度之數位ς 號,據而讓使用者可依據旋制度的多寡來評估螺鎖元件 與工件的鎖緊程度。 此種藉由壓電陀螺儀感測元件憤測角速度訊號,並經 籲由訊號處理而得知轉動角度的習知技術,在高溫下易造成 靈敏度降低’且對直流訊號與低頻訊號響應不佳,自我檢 測電路複雜’體積龐大’所以於實務量測上容易產生較大 的誤差,且生產成本高,效益差。 如上所述,由量測取得的扭力與旋轉角度,可藉由顯 示榮幕輸出顯示以供❹者得知,據而讓❹者可控制施 力的大小,避免螺鎖元件、工件或數位工具受力過大而崩 壞。 【發明内容】 5 1337921 爰此,本創作之主要目的在於提供一種具有非壓電式 石夕晶陀螺儀感測裝置之工具,藉此工具可量測操作者施予 工具之旋轉角度,並改善壓電陀螺儀之上述缺點。 本創作之具有角度量測功能之工具,包含一數位工具 與一非麼電式石夕晶陀螺儀感測裝置,其中該非壓電式石夕晶 陀螺儀感測裝置更包含一能夠感測旋轉物理量之矽晶片 陀螺儀與-訊號處理系統,該非遷電式石夕晶陀螺儀感測裝 φ置以電氣的方式連結於該數位工具上。該石夕晶片陀螺儀依 物理原理更可區分成電容式、電磁式、靜電式、音叉式 (Comb F inger)等可量測角速度或角加速度之矽晶片結 構。而其製程技術並由微製程技術所製作而成,該微製程 技術泛指其製程尺寸為千分之—公尺至百萬分之一公尺 的尺寸或更小之尺寸。該石夕晶片陀螺儀可以輸出數位工且 旋轉所產生之角速度或角加速度訊號,因此經由訊號處理 後,可以積分轉換為數位工具之轉動角度。並且藉由微製 φ程技術可將石夕晶片陀螺儀與部份或全部之訊號處理系統 整合在-起為-單-的晶片。因此,結合較優之物理原理 及微製程技術可有效的簡化電路、提高線性度、穩定性、 解析度、精確度、可靠度與提高輸出訊號並具有良好的溫 度穩定性,且可縮小體積與降低生產成本等。 【實施方式】 為使貴委員對本創作之特徵、目的及功效,有更加 深入之瞭解與認同’兹列舉較佳實施例並配合圖式說明如 后: 6 1337921 明多閱圖1」所不,本創作為一種具有角度量測功 能之數位工具’其包含—工具工作頭iG、—卫具扭力桿 20、-數位控制顯示系統3〇。同時請參閱「圖2」所示, 並包含-非磨電式石夕晶陀螺儀感測裝置4〇。其中該工具工 作頭1〇與該工具扭力桿20連接,該數位控制顯示系統30 设於该工具扭力桿20上,而該非壓電式石夕晶陀螺儀感測 裝置40設於該數位控制顯示系統3〇内,並合併製作於^ #電路板31上。其中請參閱「圖3」,該非麼電式石夕晶陀螺 統42。並W石夕阳片陀螺儀4!與一訊號處理系 以下之非壓電式矽晶陀螺儀感測裝置40,以一電容式 矽晶陀螺儀感測裝置50為例說明之。 工 請參閱「圖4」所示,—電容式石夕晶陀螺儀感測裝置 ^包3 —電容式矽晶片陀螺儀51與一訊號處理系統μ。 清參閱「圖5」所示,該電容式矽晶片陀螺儀51包含二由 半導體製程技術製作而成之石夕晶片511,且間隔 離53。 立當工具扭力桿20旋轉時,電容式矽晶片陀螺儀51内 部會產生—相對變化,該相對變化將產生輸出電壓之變 化:該輸出電壓再藉由訊號處理系統52的處理而輸出相 對該工具扭力桿20之旋轉角速度之相對電壓值。透過訊 號处理系統52輸出之相對電壓’經由數位控制顯示系統 3〇將該相對電壓轉換成工具扭力桿20之旋轉角度,並顯 7 示於顯示元件32上。· 石曰為因應不同種類或不同造型之工具之需求,該電容式 3晶陀螺儀感測裝置5G,除可直接合併製作於Ic電路板 上’請參閱「圖6」所示,亦可與IC電路板Μ分別製 乍於不同之電路板33上。 螺僅Γ日日日片陀螺儀41,除了可為上述之電容切晶片陀 椹 亦可為靜電式矽晶片陀螺儀、電磁式矽晶片陀螺 ,與音又(Comb Finger)切晶片陀螺儀。即當卫具扭力' 才干20旋轉時,上述之各類型矽晶片陀螺儀均可輸出一相 對於工具扭力桿20之旋轉角速度之相對電壓,並經由數 位控制顯示系統3 〇將該相對電壓轉換成工具扭力桿2 〇之 方疋轉角度,並顯示於顯示元件%上。 而且,矽晶月陀螺儀41與訊號處理系統42可因製程 之需要製作成單一之單晶片。 同時,應用非壓電式矽晶陀螺儀感測裝置,而具有角 度昼測功旎之數位工具,不限於彎曲類的工具,如:板手、 套筒扳手;亦可以應用在扭轉類的工具,如:螺絲起子、 棘輪螺絲起子。 如上所述,本創作可藉非壓電式矽晶陀螺儀感測裝置 取得工具的轉動角度,因其具高線性度、高輸出訊號、良 好的溫度穩定性,自我檢測的電路較簡單且體積小,因而 其具回可罪度並可降低製造成本,可以滿足使用者的需 求0 综上所述僅為本純的較佳實施例而已,並 實施範圍,即凡依本創料請專·圍之内容 =的纽變化與修飾’皆應為本創作之 【圖式簡單說明】 可 圖1,係本創作之外觀結構圖。 圖2,係本創作之局部分解圖。 圖3,係本創作之系統圖。 圖4,係本創作實施例之系統圖。 圖5,係本創作實施例之矽晶片陀螺儀結構示意圖。 圖6,係本創作實施例之局部分解圖。 【主要元件符號說明】 10 20 30 31 32 33 40 41 42 工具工作頭 工具扭力桿 數位控制顯示系統 1C電路板 顯示元件 電路板 非壓電式矽晶陀螺儀感測裝置 石夕晶片陀螺儀 訊號處理系統 50 .電谷式矽晶陀螺儀感測裝置 51 :電容式矽晶片陀螺儀 511 ·碎晶片 52 :訊號處理系統 1337921 53 :相對距離- can be used in the wrench U - strain gauge, according to the generated charge (four), can be calculated to know that the wrench is subject to == by the US patent number US5589644, which exposes a tool that can be rotated, by means of - (4) The signal of the gyroscope sensing component's debt measuring tool is converted into a digital apostrophe of the rotation angle by the signal processing, so that the user can evaluate the locking degree of the screw locking component and the workpiece according to the number of the spinning system. Such a technique in which the piezoelectric gyroscope sensing component inverts the angular velocity signal and knows the rotation angle by calling the signal processing is likely to cause a decrease in sensitivity at a high temperature, and the response to the direct current signal and the low frequency signal is poor. The self-detection circuit is complicated in 'bulk size', so it is easy to produce large errors in practical measurement, and the production cost is high and the benefit is poor. As described above, the torque and rotation angle obtained by the measurement can be displayed by the display of the glory output for the latter to know, so that the leader can control the magnitude of the force to avoid the screw lock component, the workpiece or the digital tool. Excessive force and collapse. SUMMARY OF THE INVENTION 5 1337921 Accordingly, the main purpose of the present invention is to provide a tool having a non-piezoelectric lithography gyroscope sensing device, whereby the tool can measure the rotation angle of the operator and improve the tool. The above disadvantages of piezoelectric gyroscopes. The tool of the present invention has an angle measuring function, and comprises a digital tool and a non-electrical type lithography gyroscope sensing device, wherein the non-piezoelectric lithography gyroscope sensing device further comprises a sensing rotation The physical quantity of the wafer gyroscope and the signal processing system, the non-migrating type Shi Xijing gyroscope sensing device is electrically connected to the digital tool. According to the physical principle, the Shixi wafer gyroscope can be further divided into a capacitive, electromagnetic, electrostatic, tuning fork (Comb F inger) and the like to measure the angular velocity or angular acceleration of the wafer structure. The process technology is also made by micro-process technology, which refers to the size of the process, which is from a thousandth to a millionth of a meter or less. The Shi Xi wafer gyroscope can output the angular velocity or angular acceleration signal generated by the digital work and rotate, so that after the signal processing, the rotation angle of the digital tool can be integrated. And by using the micro-fabrication technology, the Shixi wafer gyroscope can be integrated with some or all of the signal processing system in a single-to-single wafer. Therefore, combined with better physical principles and micro-process technology, it can effectively simplify the circuit, improve linearity, stability, resolution, accuracy, reliability and output signal with good temperature stability, and can reduce the volume and Reduce production costs, etc. [Embodiment] In order to enable your members to have a deeper understanding and recognition of the characteristics, purpose and efficacy of this creation, 'the preferred embodiment is illustrated with the following description: 6 1337921 Ming Duo Reading Figure 1" The present invention is a digital tool with an angle measuring function, which includes a tool working head iG, a guard torque rod 20, and a digital control display system. Please also refer to "Figure 2", and include - non-grinding type Shi Xijing gyroscope sensing device 4 〇. The tool working head 1 is connected to the tool torsion bar 20, and the digital control display system 30 is disposed on the tool torsion bar 20, and the non-piezoelectric gyroscope gyroscope sensing device 40 is disposed on the digital control display. The system 3 is built in and integrated on the circuit board 31. Please refer to "Figure 3", the non-electric type Shi Xijing gyro 42. And the W-stone sunset gyroscope 4! and a signal processing system The following non-piezoelectric crystal gyro sensing device 40 is described by taking a capacitive crystal gyro sensing device 50 as an example. Please refer to the figure shown in Figure 4, Capacitor Shi Xijing Gyro Sensing Device ^Pack 3 - Capacitor Chip Gyroscope 51 and a Signal Processing System μ. As shown in Fig. 5, the capacitive germanium wafer gyroscope 51 comprises two lithographic wafers 511 made by semiconductor process technology and spaced apart from each other. When the tool torsion bar 20 rotates, a capacitive wafer gyro 51 internally generates a relative change that will produce a change in output voltage: the output voltage is then output by the signal processing system 52 relative to the tool. The relative voltage value of the rotational angular velocity of the torsion bar 20. The relative voltage 'outputted by the signal processing system 52' is converted to the angle of rotation of the tool torsion bar 20 via the digital control display system 3, and is displayed on the display element 32. · As a tool for different types or different shapes, the capacitive 3 crystal gyroscope sensing device 5G can be directly combined and fabricated on the Ic circuit board. Please refer to Figure 6 for The IC boards are fabricated on different circuit boards 33, respectively. The gyro only has a day-and-day gyro 41, which can be an electrostatic sputum wafer gyro, an electromagnetic sputum wafer gyro, and a Comb Finger dicing wafer gyro. That is, when the guard torque 'rotation 20' is rotated, each of the above types of wafer gyros can output a relative voltage with respect to the rotational angular velocity of the tool torsion bar 20, and convert the relative voltage into a digital control display system 3 The angle of the tool torsion bar 2 is displayed on the display component %. Moreover, the twin crystal gyro 41 and the signal processing system 42 can be fabricated into a single single wafer as required by the process. At the same time, the application of non-piezoelectric crystal gyro sensing device, and the digital tool with angle 昼 旎 ,, is not limited to bending tools, such as: wrenches, socket wrenches; can also be applied to torsion tools Such as: screwdriver, ratchet screwdriver. As described above, the creation angle of the tool can be obtained by the non-piezoelectric crystal gyro sensing device. Because of its high linearity, high output signal, and good temperature stability, the self-detecting circuit is simple and compact. Small, so it is guilty and can reduce the manufacturing cost, and can meet the needs of users. In summary, it is only a purely preferred embodiment, and the scope of implementation, that is, according to the creation of materials, please The content of the surrounding = the change and modification of the new one should be the simple description of the creation of the creation. Figure 1 is the appearance structure of the creation. Figure 2 is a partial exploded view of the creation. Figure 3 is a system diagram of the creation. Figure 4 is a system diagram of the present creative embodiment. FIG. 5 is a schematic structural view of a silicon wafer gyroscope according to the present embodiment. Figure 6 is a partial exploded view of the present embodiment. [Main component symbol description] 10 20 30 31 32 33 40 41 42 Tool working head tool Torque bar digital control display system 1C circuit board display component circuit board non-piezoelectric crystal gyro sensing device Shi Xi wafer gyro signal processing System 50. Electric Valley Crystal Gyro Sensing Device 51: Capacitive Silicon Wafer Gyroscope 511 · Broken Chip 52: Signal Processing System 1337921 53 : Relative Distance

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Claims (1)

十 申請專利範圍 1 一種具有角度量測功能之工具,其包含: —數位工具; 蟫心非壓電式石夕晶陀螺儀感測裝置,該非壓電式石夕晶降 、s /則裝置以電氣的方式連結於該數位工具上。 且⑹申明專利範圍第!項之具有角度量測功能之工 蟫儀I中該非麼電式石夕晶陀螺儀感測裝置包含一石夕晶片陀 螺儀與一訊號處理系統。 呈,3、如申請專利範_2項之具有角度量測功能之工 儀非壓電式石夕晶陀螺儀感測裝置之該石夕晶片陀螺 儀與訊遽處理系統可合併製作成單一之單晶片。 具,1項之具有角度量測功能之工 電路可合併製ί於㈣置與該數位工具之 具,I中:申Γ專利把圍第1項之具有角度量測功能之工 雷路;八〜导壓電式石夕晶陀螺儀感測裝置與該數位工具之 電可为別製作於不同之電路板上。 且,1二申:曰專利祀圍第2項之具有角度量測功能之工 中卿晶片陀螺儀為電容式之梦晶片陀螺儀。 具,其中利㈣第2項之具有角度量測功能之工 只、δ日曰/¾螺儀為靜電式之石夕晶片陀螺儀。 具,其日專/^圍第2項之具有角度量測功能之工 Ba陀螺儀為電磁式之% aaa >{陀螺儀。 、申請專絲圍第2項之具有岐量測功能·之工 1337921 具,其中該矽晶片陀螺儀為音叉式之矽晶片陀 …如中請專利範圍第2項之具有角度量測功能之工 具,其中該矽晶片陀螺儀製程技術為1〇_3到1〇_9公尺之半 導體製程技術。 11、如中請專利範圍第i項之具有角度量測功能之工 具,其中該非壓電式石夕晶陀螺儀感測裝置,可量測角速度 或角加速度。Ten patent application scope 1 A tool having an angle measuring function, comprising: - a digital tool; a non-piezoelectric type stone gyro gyro sensing device, the non-piezoelectric lithograph, s / device Electrically connected to the digital tool. And (6) declare the scope of patents! The item has an angle measurement function. The device of the non-electric type Shi Xijing gyroscope includes a stone chip gyroscope and a signal processing system. 3. In the case of the non-piezoelectric gyroscopic gyroscope sensing device with the angle measurement function of the patent model _2, the Shixi wafer gyroscope and the signal processing system can be combined to form a single Single chip. With one item, the working circuit with angle measuring function can be combined with the (4) set and the digital tool. In the I: the patent of the application, the angle measuring function of the first item is the work road; ~ The conductive piezoelectric lithography gyroscope sensing device and the digital tool can be fabricated on different circuit boards. Moreover, the application of the angle measurement function of the second item of the patent is as follows: The Zhongqing wafer gyroscope is a capacitive dream wafer gyroscope. With the objective of the angle measurement function of the second item (4), the δ 曰 / 3⁄4 snail is an electrostatic type ceremonial wafer gyroscope. With its own Japanese/^ surrounding the second item with the angle measurement function, the Ba gyroscope is electromagnetic type aaa >{gyroscope. Apply for the second line of the second line of the 专 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 133 The silicon wafer gyroscope process technology is a semiconductor process technology of 1 〇 3 to 1 〇 9 meters. 11. A tool having an angular measurement function according to item i of the patent scope, wherein the non-piezoelectric gyroscopic gyroscope sensing device can measure angular velocity or angular acceleration. 如申π專利範圍第1項之具有角度量測功能之工 其中錢位工具可將非壓電式石夕晶陀螺儀感測裝置所 =之角速度或角加速度透過積分的方式換算成旋轉角 度0 呈1甘\如申請專利範圍第1項之具有角度量測功能之工 八,其中該數位工具為彎曲類工具。 工 14、如申請專利範圍第13項之具有角度量測功能之 /、,其中該數位工具為扳手。 且15甘如中請專利範圍第14項之具有角度量測功能之 八,,、中該數位工具為不具動力之扳手。 工 呈申請專利範圍第14項之具有角度量測功能之 八”該數位工具為具動力之扳手。 工 具,L7中專利範圍第1項之具有角度量測功能之 /、中該數位工具為扭轉類工具。 工具18其利範圍第17項之具有角度量測功能之 /、τ忒數位工具為螺絲起子。 19、如申請專利範圖第18項之具有角度量測功能之 /、,其中該數位工具為不具動力之螺絲起子。 2〇、如申請專利範圍第1 8 之工且,1中特# ^ 18項之具有角度量測功能 "中魏位工具為具動力之螺絲起子。For example, the work of the angle measuring function of the first item of the patent scope of the π patent, wherein the money position tool can convert the angular velocity or angular acceleration of the non-piezoelectric gyro gyroscope sensing device into a rotation angle by means of integration. It is a work tool with an angle measurement function according to item 1 of the patent application scope, wherein the digital tool is a bending tool. 14. The angle measuring function of item 13 of the patent application scope is /, wherein the digital tool is a wrench. And the 15th has the angle measurement function of the 14th patent range, and the digital tool is a non-powered wrench. The eight-point tool with the angle measurement function of the patent application scope is the power wrench. The tool, the L7 patent scope item 1 has the angle measurement function, and the digital tool is reversed. The tool of the tool 18 has the angle measurement function of the item 17 and the τ忒 digit tool is a screwdriver. 19. The angle measurement function of the application model patent item 18/, wherein The digital tool is a non-powered screwdriver. 2〇, as for the application of the patent scope of the work of the 18th, and the 1st special # ^ 18 of the angle measurement function " 中魏位工具 is a powered screwdriver. 1313
TW97127800A 2008-07-22 2008-07-22 Tool having the function of measuring angle TW201004748A (en)

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TWI337921B true TWI337921B (en) 2011-03-01

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JP2012173055A (en) * 2011-02-18 2012-09-10 Seiko Epson Corp Physical quantity sensor and electronic apparatus
JP5975601B2 (en) * 2011-02-25 2016-08-23 セイコーエプソン株式会社 Detection circuit, physical quantity detection device, angular velocity detection device, integrated circuit device, and electronic apparatus

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