1336007 99-8-3 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種顯示面板及其測試系統，且特別 疋有關於一種液晶顯示面板（Liquid crystal display panel) 及其測試系統。 【先前技術】 隨者多媒體技術的高度發展’目前影像資訊的傳遞大 ® 多已由類比轉為數位傳輸’而為了配合現代生活模式，視 訊或影像裝置之體積也日漸趨於輕薄。傳統的陰極射線管 (Cathode Ray Tube，CRT)顯示器雖然具有優異的顯示品 質與低成本等優點’但是由於其内部電子腔的結構，使得 顯示器無法符合薄型化、輕量化以及低消耗功率的需求， 且使用者觀看時亦存在輻射線傷眼等問題。近年來，由於 光電技術與半導體製造技術之成熟，也帶動平面顯示器 (Flat Panel Display )之蓬勃發展’其中液晶顯示器（Uquid _ Crystal Display，LCD )基於其低電壓操作、無輻射線散射、 重量輕以及體積小等優點，更逐漸取代傳統的陰極射線管 顯示器，而成為顯示器產品之主流。 液晶顯示器主要包括一液晶顯示面板及一背光模組 (backlight module)，其中液晶顯示面板係由一彩色減光 基板（Color Filter，C/F )、一薄膜電晶體陣列基板（thin mm transistor array)以及配置於此兩基板間的一液晶声所構 成’而背光模組係用以提供此液晶顯示面板所需之面光 5 1336007 99-8-31336007 99-8-3 IX. Description of the Invention: [Technical Field] The present invention relates to a display panel and a test system thereof, and particularly to a liquid crystal display panel and a test system thereof . [Prior Art] The high development of multimedia technology is that the current transmission of image information has changed from analogy to digital transmission. In order to cope with the modern lifestyle, the size of video or video devices has become increasingly thin. Conventional cathode ray tube (CRT) displays have excellent display quality and low cost, but due to the structure of their internal electronic cavity, the display cannot meet the requirements of thinness, light weight and low power consumption. When the user watches, there are also problems such as radiation damage to the eyes. In recent years, due to the maturity of optoelectronic technology and semiconductor manufacturing technology, the flat panel display has been booming. Among them, the liquid crystal display (Uquid _ Crystal Display (LCD) is based on its low voltage operation, no radiation scattering, and light weight. And the advantages of small size, and gradually replace the traditional cathode ray tube display, and become the mainstream of display products. The liquid crystal display mainly comprises a liquid crystal display panel and a backlight module, wherein the liquid crystal display panel comprises a color filter substrate (C/F) and a thin film transistor array (thin mm transistor array). And a liquid crystal sound disposed between the two substrates constitutes 'the backlight module is used to provide the surface light required for the liquid crystal display panel 5 1336007 99-8-3
源，以使液晶顯示器達到顯示的效果。此外，薄膜電晶體 陣列基板可分為顯示區（display region )與周邊線路區 (peripheral circuit region )，其中顯示區内係配置有多個 晝素結構，包括多個以陣列排列的薄膜電晶體以及與薄膜 電晶體對應配置的晝素電極（pixel electr〇de)，而周邊線 路區内係配置有多條閘極配線（gate line )、源極配線 (source line)、多個測試墊（testpad)以及測試電晶體， 其中測試墊係耦接至閘極配線或源極配線。 在薄膜電晶體陣列基板的製程中，通常會對基板上的 晝素結構進行電性檢測，以判斷晝素結構可否正常運作， 並對不良的元件（如薄膜電晶體、畫素電極等）或線路進 行修補。習知之檢測的方式可分為接觸式與非接觸式兩 種，其中接觸式的檢測方式係以探針（pr〇be)直接接觸閘 極配線與源極配線的測試墊，並由一測試機台（tester)輪 入測試訊號，以依序對每一薄膜電晶體進行電性檢測。1 此外，液晶顯示面板通常會因為外在因素，例如人 搬運或環境變化等’而在面㈣產生靜1?、積的現象。如 此-來，當電荷累積至—定數量之後，便可朗為靜電 電，而導致進行檢測時測試電晶體遭受破壞。 【發明内容】 处本發明提供一種液晶顯示面板，其可提供靜電保 力月b以避免液晶顯示面板進行測試時，發生靜曾 、 象而造成測試電晶體損壞。 Μ放電現 6 1336007 99-8-3 本發明提供一種液晶顯示的測試系統，用以測試上述 之液晶顯示面板。Source to make the LCD display achieve the effect. In addition, the thin film transistor array substrate can be divided into a display region and a peripheral circuit region, wherein the display region is configured with a plurality of halogen structures, including a plurality of thin film transistors arranged in an array, and A pixel electrode arranged corresponding to the thin film transistor, and a plurality of gate lines, source lines, and test pads are disposed in the peripheral circuit region. And a test transistor, wherein the test pad is coupled to the gate wiring or the source wiring. In the process of the thin film transistor array substrate, the germanium structure on the substrate is usually electrically detected to determine whether the structure of the halogen can operate normally, and for defective components (such as thin film transistors, pixel electrodes, etc.) or The line is repaired. The detection method of the prior art can be divided into two types: contact type and non-contact type, wherein the contact type detection method directly contacts the test pad of the gate wiring and the source wiring with a probe (pr〇be), and is controlled by a test machine. The tester turns in the test signal to perform electrical detection on each of the thin film transistors in sequence. 1 In addition, the liquid crystal display panel usually generates a static phenomenon in the surface (4) due to external factors such as human handling or environmental changes. As a result, when the charge is accumulated to a certain amount, it can be electrostatically charged, and the test transistor is damaged when the detection is performed. SUMMARY OF THE INVENTION The present invention provides a liquid crystal display panel which can provide an electrostatic retention month b to prevent damage to the test transistor caused by static electricity and the like when the liquid crystal display panel is tested. ΜDischarge 6 1336007 99-8-3 The present invention provides a liquid crystal display test system for testing the above liquid crystal display panel.
^發明提供-種液晶顯示面板，其包括—顯示區、多 個測試墊、多個測試電晶體以及多個靜電保護裝置。顯示 I八有夕個晝素。多個測試整配置於顯示區外，用以接收 多個測試訊號。多個測試電晶體配置於顯示區外且耦接多 個測試墊，用以傳磚多個測試訊號至多個晝素。每一靜電 保護裝置放置於每_試墊之間，且具有多個二極體迴路 以搭配-尖端放電來宣$—靜電之能量，並用以確保所述 母兩測試墊之間沒有形成通路的可能。 本發明提供一種液晶顯示面板的測試系統，其包括上 述之液晶顯示©板…治具以及一測試機台^治具用以放 置上述之液晶顯示面板，且具有多個與測試墊電性連接在 一，的測試針。測試機台耦接多個測試針，用以提供測試 訊號。The invention provides a liquid crystal display panel comprising a display area, a plurality of test pads, a plurality of test transistors, and a plurality of electrostatic protection devices. It shows that I have a bite. Multiple tests are configured outside the display area to receive multiple test signals. A plurality of test transistors are disposed outside the display area and coupled to the plurality of test pads for transferring a plurality of test signals to the plurality of pixels. Each electrostatic protection device is placed between each test pad and has a plurality of diode circuits to match the energy of the electrostatic discharge with the tip discharge to ensure that no path is formed between the two test pads. may. The invention provides a test system for a liquid crystal display panel, comprising the above-mentioned liquid crystal display panel... a fixture and a test machine fixture for placing the above liquid crystal display panel, and having a plurality of test pads electrically connected thereto One, the test pin. The test machine is coupled to a plurality of test pins for providing test signals.
在本發明之一實施例中，上述之第i個靜電保護裝置 包括一第一二極體、一第二二極體、一第三二極體、二阻 抗元件、一第四二極體、一第五二極體以及一第六二極體。 第一二極體之陽極端耦接第i個測試墊。第二二極體之陽 ，端輕接第—二極體之陰極端。第三二極體之陰極端叙接 第，二極體之陰極端。阻抗元件之第一端耦接第三二極體 之陽極端。第四二極體之陽極端耦接第（i+1)個測試墊。 第五二極體之陽極端耦接第四二極體之陰極端。第六二極 體之陰極端_第五二極體之陰極端，而其陽極端^阻 抗7L件之第二端，其中i為正整數。 7 UJ6007 99-8-3 i本r之施例!，上述之第i個靜電保護裝置 更包括一第七二極體、一第八 極體、一第九二極體、In an embodiment of the present invention, the ith electrostatic protection device includes a first diode, a second diode, a third diode, a second impedance component, and a fourth diode. A fifth diode and a sixth diode. The anode end of the first diode is coupled to the i-th test pad. The anode of the second diode is lightly connected to the cathode end of the first diode. The cathode end of the third diode is connected to the cathode end of the diode. The first end of the impedance element is coupled to the anode end of the third diode. The anode end of the fourth diode is coupled to the (i+1)th test pad. The anode end of the fifth diode is coupled to the cathode end of the fourth diode. The cathode end of the sixth diode is the cathode end of the fifth diode, and the anode terminal thereof is resistant to the second end of the 7L member, where i is a positive integer. 7 UJ6007 99-8-3 i this example of r! The first i-th electrostatic protection device mentioned above further includes a seventh diode, an eighth pole body, a ninth diode body,
第極體、—第十一二極體以及—第十二二極體。第七輕接第i個測試墊。第八二極體之陽極端二極體之陰極端’而其陽極端減阻抗元件之=== 十一極體之陽極端耦接第（i+1)個 — 第十二鋪之陰極端。第忙ίϊ第十—二極體之陰極端，而其陽極端_阻抗元件 之第一端。The first pole, the eleventh dipole and the twelveth dipole. The seventh light is connected to the ith test pad. The anode end of the anode terminal of the eighth diode is 'the anode terminal minus the impedance element=== the anode end of the eleven pole is coupled to the (i+1)th - the cathode end of the twelfth shop . The first is the cathode end of the tenth-diode, and the anode end is the first end of the impedance element.
在本發明之-實施例中，上述之阻抗元件包含非晶石夕。 ^本發明提供一種面板及其測試系統’且面板具有多個 靜電保護裝置’每—靜電賴裝置放置於每兩測試塾之 間，用以消耗靜電之能量，可在面板進行測試時提供靜電 保護的效果’以避免測試電晶體在測試過程中損壞。 “為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂’下文特舉本發明幾個實施例，並配合所附圖式， 詳細說明如下。 【實施方式】 圖1為本發明之一實施例之測試系統示意圖。請參照 圖1，測試系統100包括一液晶顯示面板110、_治具12〇 以^一測試機台130，其中液晶顯示面板11()更包括一顯 不區112、多個測試墊114、多個測試電晶體116以及多個 靜電保護裝置118。 99-8-3In an embodiment of the invention, the impedance element comprises amorphous stone. The present invention provides a panel and a test system thereof, and the panel has a plurality of electrostatic protection devices. Each electrostatic discharge device is placed between every two test cartridges to consume static energy and provide static protection when the panel is tested. The effect 'to avoid damage to the test transistor during the test. The above and other objects, features and advantages of the present invention will become more apparent <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; A schematic diagram of a test system of an embodiment. Referring to FIG. 1, the test system 100 includes a liquid crystal display panel 110, a fixture 12, and a test machine 130, wherein the liquid crystal display panel 11 further includes a display area. 112. A plurality of test pads 114, a plurality of test transistors 116, and a plurality of electrostatic protection devices 118. 99-8-3
右夕：：5 ’治具120用以放置液晶顯示面板"〇,且1 墊m電性連接的剩試針122板二3 面板110進行電性檢測時，測試機:液B曰顯不 122 ’並提供一測試電壓於測丄 母7測試T 每—測試電晶體116，接著再透關啟（tUm〇n) 號s給每-測試墊114。：=]4針122倾測試訊 示，其係以陣列方式排列=彳畫㈣ 119 m 母剛減墊114配置於顯示 i於顯-=以接收測試訊號s。每一測試電晶體116配 ΐ題=測試整114,用以傳遞測試訊號s 護裝置118放置於每兩 測試塾η::桃-靜電之能量，並且阻隔每兩 圖2為本發明之一實施例之面板中 護 =。請參照圖2’靜電保護裝置U8放置‘每： 置於第·= ’圖2緣不第i個靜電保護裝置U8i，其放 _與第（i+1)個測試塾114i，之間。 1靜電保護裝置例如是由多個二極體Di〜m2以及阻 抗疋件R所組成。 由圖2可知’ 一極體D2之陽極端輕接二極體D1之陰 ^端’且二極體D3之陰極端搞接二極體D2之陰極端，形 成-由二極體D1〜D3構成之二極體迴路施。類似地， -極體D8之陽極端輕接二極體D7之陰極端。二極體D9 之陰極端ή接二極體D8之陰極端，形成—由二極體 D7 D9構成之一極體迴路21〇c。此兩迴路m 21〇c以 9 1336007 99-8-3 並聯方式連接且其兩端分別耦接至第i個測試墊114丨與阻 抗元件R之一端。也就疋說，二極體D1與二極體D7之 陽極端耦接第i個測試墊114i，而阻抗元件R之一端耦接 二極體D3與二極體D9之陽極端。 • 同理可知，依據上述連接方式，在阻抗元件R之另一 端，二極體D4〜D6、D10〜D12以類似的連接方 成，並聯迴路210b、210d，其中二極體D4與二極體di〇 之陽極端耦接第（i+O個測試墊114i，，而二極體£)6與二 馨 極體D12之陽極端滅阻抗元件R之另一端。 、 •請繼續參照圖2，二極體D卜D2、D7與D8對於從 第1個測試墊ll4i進入且具有正向偏壓之靜電荷而言屬於 正向二極體，而二極體D3與D9對於從第i個測試墊U4i ，入且具有正向偏壓之靜電荷而言則屬於反向二極體。換 δ之’從第〗個測試墊114i進入且具有正向偏壓之靜電荷 =通，二極體D卜D2、D7肖D8。當面板進行電性檢測 若此時因靜電放電而產生瞬間之電流，靜電保護裝置 鲁 可將此一具破壞性之電流經由測試墊Π4導引至任一 . 「極體迴路。舉例而言’因靜電放電㈣之電流經由第i 目測試114ι被導引至二極體迴路21〇a，對電流而言，二 極體Dl、D2屬於正向二極體可順利導通，但二極體D3 貝於反向二極體’因此電流之能量可在此處被消耗，甚 =錢二姆D3帛潰（bfeakd_)，藉此紐測試電晶 虫^16以及其他元件，以達到靜電保護的目標。此外，兩 之正向二極體D1、D2可防止電流反向回流至第i個 10 υυυ/ 99-8-3 測試餐ll4i。 阻隔=試=:二1:阻性’可 而崩潰，衫會與二_鱗因大電流 徑。亦即b Gd械—電流路 間的靜几 可確保放置於每兩測試墊114之 間的靜電保護裝置118,即使在 雙14之 之間也沒有形成通路的疑/在—極體朋4，測試塾114右夕::5 'The fixture 120 is used to place the liquid crystal display panel"〇, and 1 pad m electrically connected to the remaining test pin 122 plate 2 3 panel 110 for electrical detection, the test machine: liquid B 曰122' and provide a test voltage for the test 7 7 test T each test transistor 116, and then pass the turn-on (tUm〇n) number s to each test pad 114. :=] 4-pin 122 tilt test, which is arranged in an array mode = 彳 painting (4) 119 m The mother-only reduction pad 114 is placed on the display i-display-= to receive the test signal s. Each test transistor 116 is equipped with the test item = test 114, for transmitting the test signal s guard device 118 placed on each of the two test 塾:: peach-electrostatic energy, and blocking each of the two Figure 2 is an implementation of the present invention Example panel protection =. Referring to Fig. 2', the electrostatic protection device U8 is placed 'each: placed on the second side of the second electrostatic protection device U8i, which is placed between the _ and the (i+1)th test 塾 114i. The electrostatic protection device is composed of, for example, a plurality of diodes Di to m2 and an impedance member R. It can be seen from Fig. 2 that the anode end of the one body D2 is lightly connected to the cathode end of the diode D1 and the cathode end of the diode D3 is connected to the cathode end of the diode D2 to form - by the diode D1~D3 The diode circuit is constructed. Similarly, the anode end of the -pole D8 is lightly connected to the cathode end of the diode D7. The cathode end of the diode D9 is connected to the cathode end of the diode D8 to form a pole body circuit 21〇c formed by the diode D7 D9. The two circuits m 21〇c are connected in parallel with 9 1336007 99-8-3 and their two ends are respectively coupled to one end of the i-th test pad 114 丨 and the resistive element R. In other words, the anode end of the diode D1 and the diode D7 are coupled to the i-th test pad 114i, and one end of the impedance element R is coupled to the anode end of the diode D3 and the diode D9. • Similarly, according to the above connection method, at the other end of the impedance element R, the diodes D4 to D6, D10 to D12 are formed in a similar connection, and the parallel circuits 210b and 210d, wherein the diode D4 and the diode The anode end of the di〇 is coupled to the other end of the (i+O test pad 114i, and the diode £) 6 and the anode end of the dipole body D12. 2. Please continue to refer to FIG. 2, the diode D D2, D7 and D8 belong to the forward diode for the electrostatic charge entering from the first test pad 1114 and having a forward bias, and the diode D3 And D9 belongs to the reverse diode for the electrostatic charge that is forward biased from the i-th test pad U4i. The change δ' enters from the first test pad 114i and has a forward biased static charge = pass, diode D Bu D2, D7 Xiao D8. When the panel is electrically detected, if an instantaneous current is generated due to electrostatic discharge, the electrostatic protection device can guide this destructive current to any one via the test pad 4. "Polar body circuit. For example" The current due to the electrostatic discharge (4) is led to the diode circuit 21〇a via the i-th test 1141. For the current, the diodes D1 and D2 belong to the positive diode and can be smoothly turned on, but the diode D3 Bell in the reverse diode 'so the energy of the current can be consumed here, even = money dim D3 collapse (bfeakd_), thereby testing the electric crystal insect ^16 and other components to achieve the goal of electrostatic protection In addition, the two forward diodes D1 and D2 prevent current from flowing back to the ith 10 υυυ / 99-8-3 test meal ll4i. Block = test =: 2: resistive 'can crash, The shirt and the _ scale are due to the large current path. That is, the static between the b Gd and the current path ensures that the electrostatic protection device 118 placed between each of the two test pads 114 does not form even between the double 14 Suspected / in the path - polar body 4, test 塾 114
推if 以二極體迴路2咖為例’針對第1個測試墊Μ =rf0a，工作原理，而類似於二極體迴路鳥 相间夕1+1)個測試墊1141，而言，二極體迴路21Gb可提供 中被^力效，使靜電放電產生之電流能量可在迴路210b 極h耗。此外，分別與二極體迴路鳥、鳩並聯之二 接^路嫌、2觀可在二極體迴路210a、210b損毀時， 〜、他雜靜電能量之路徑。需魏_是，上述實施 务僅是本發明諸多實施例當中的一個，而本發明並不以上 述二極體的數目、並聯迴路的數目以及阻抗元件R之形式 =例如:每個群組可以包括三個以上順反向串接的二 圖3為圖2之靜電保護裝置之電路佈局示意圖。請參 ，圖3，實務上，靜電保護裝置118之電路佈局（lay〇ut) 疋以夕個金氧半％效電晶體（metal-oxide-semiconductor field effect transistor ’ MOSFET)來實現圖 2 中之二極體。 如圖3所示，多個以二極體連接（di〇de_c〇nnected)方式 之金氡半場效電晶體T1〜T12分別對應圖2中之二極體 11 丄 υ〇υυ7 99-8-3 ^TD12 阻抗元件R則非_層AS形成高電阻的 设lL°值得注意的是，在一些實施例中，可在非晶石夕層AS 上設=多個電極分支，利用尖端放電（pointdischarge)原 理，提供靜電能量宣茂的路經。另外，節點A、B分別餐 接至個測試塾⑽以及第（i+Ι)個測試塾U4i，。 綜上所述’本發明所提出之面板及其測試系統，其场 板具有多個靜電保護裝置，每一靜電保護裝置放置於每兩 ㈨試墊之間。静電保護裝置提供多個二極體迴路，使靜電 • 之，量可在迴路中被消耗。此外，阻抗元件R可確保放置 於每兩測試墊之間的靜電保護裝置，即使面板在進行測試 時，測試墊之間也不因靜電放電而有形成通路的疑慮。因 此藉由靜電保護裝置消耗靜電之能量，可在面板進行測 試時提供靜電保護的效果，以避免測試電晶體因靜電放電 而遭受損壞。 除此之外’只要是運用上述任一本發明所提出之面板 於其中的液晶顯示器，就屬本發明所欲保護的範疇。再者， φ 雖然本發明已以多個實施例揭露如上，然其並非用以限定 本發明，任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍内，當可作些許之更動與潤飾，因此 本發明之保s蒦範圍當視後附之申請專利範圍所界定者為 準。 【圖式簡單說明】 圖1為本發明之一實施例之測試系統示意圖。 12 1336007 99-8-3 圖2為本發明之一實施例之面板中靜電保護裝置之等 效電路圖。 圖3為圖2之靜電保護裝置之電路佈局示意圖。 【主要元件符號說明】 100 :測試系統 110 ·液晶顯不面板 112 :顯示區 114、114G :測試墊 114i:第i個測試墊 114i’ ：第（i+Ι)個測試墊 116 :測試電晶體 118 :靜電保護裝置 118i :第i個靜電保護裝置 120 :治具 122 :測試針 130:測試機台 210a〜210d :二極體迴路 AS :多晶石夕層 D1〜D12 :二極體 T1〜T12 :金氧半場效電晶體 A、B :節點 R:阻抗元件 S:測試訊號 13Push if the example of the diode circuit 2 is 'for the first test pad = rf0a, working principle, and similar to the diode circuit between the birds and the evening 1+1) test pad 1141, for example, the diode The circuit 21Gb can provide a medium effect, so that the current energy generated by the electrostatic discharge can be consumed at the loop 210b. In addition, the two parallel circuit birds and 鸠 are connected in parallel with each other, and the two views can be destroyed when the diode circuits 210a and 210b are damaged. It should be noted that the above-mentioned implementation is only one of many embodiments of the present invention, and the present invention does not take the number of the above-mentioned diodes, the number of parallel circuits, and the form of the impedance element R = for example: each group can FIG. 3, which includes three or more forward and reverse series connections, is a circuit layout diagram of the electrostatic protection device of FIG. Please refer to FIG. 3. In practice, the circuit layout of the electrostatic protection device 118 is implemented in a metal-oxide-semiconductor field effect transistor (MOSFET). Diode. As shown in FIG. 3, a plurality of metal-half-field transistors T1 to T12 in a diode-connected manner correspond to the diodes 11 丄υ〇υυ7 99-8-3 in FIG. 2, respectively. ^TD12 Impedance Element R is a non-layer AS forming a high resistance. It is worth noting that, in some embodiments, a plurality of electrode branches may be provided on the amorphous layer AS, using tip discharge. Principle, providing the path of electrostatic energy Xuan Mao. In addition, nodes A and B respectively feed to test 塾 (10) and (i+ Ι) test 塾 U4i. In summary, the panel and the test system thereof according to the present invention have a plurality of electrostatic protection devices on the field plate, and each electrostatic protection device is placed between every two (nine) test pads. The ESD protection device provides multiple diode loops that allow static electricity to be dissipated in the loop. In addition, the impedance element R ensures an electrostatic protection device placed between every two test pads, even if the panel is tested, there is no doubt that the test pads form a path due to electrostatic discharge. Therefore, the electrostatic protection device consumes the energy of static electricity, which can provide electrostatic protection when the panel is tested to avoid damage to the test transistor due to electrostatic discharge. In addition, as long as the liquid crystal display using the panel proposed by any of the above inventions is within the scope of the present invention. In addition, the present invention has been disclosed in the above embodiments in various embodiments, and is not intended to limit the scope of the invention, and may be made by those skilled in the art without departing from the spirit and scope of the invention. The scope of the present invention is defined by the scope of the appended patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of a test system according to an embodiment of the present invention. 12 1336007 99-8-3 Figure 2 is an equivalent circuit diagram of an electrostatic protection device in a panel according to an embodiment of the present invention. 3 is a schematic circuit diagram of the electrostatic protection device of FIG. 2. [Main component symbol description] 100: Test system 110 · Liquid crystal display panel 112: Display area 114, 114G: Test pad 114i: i-th test pad 114i': (i + Ι) test pad 116: test transistor 118: electrostatic protection device 118i: i-th electrostatic protection device 120: jig 122: test pin 130: test machine table 210a to 210d: diode circuit AS: polycrystalline layer D1 to D12: diode T1~ T12: gold oxide half field effect transistor A, B: node R: impedance element S: test signal 13