1329610 九、發明說明： 【發明所屬之技術領域】 本發明係有關於-種製程設備剝膜機構，詳而言之係關於—種用於將 基板上之膜體快速確實剝離，以利後續作業之設計。 【先前技術】 由各式製程設備所組成之生產線，其係可穩定且有效率的依序完成產 品之各步驟生產流程，而其中部分產品其在生產過程中，f以—膜體暫時 貼覆於表面以達保護之效，如常見之電路基板或液晶顯示器之偏光板等， 白會利用膜體來保護不*微塵沾附以及防止到傷表面，而此—暫時用之媒 體則會在後段之加工中予以剝除，以繼續進行其它製程作業。 欲將膜體I條’職合麵機來完賴辭驟，閱巾華民國專 利申請案號9 4 2 1 4 0 1 4號，『剝膜裝置』，該習用前案其主要係利用 具有膠帶機組之貼雜’配合舰馬達帶動，而由補歡基板或偏光板 等工件上，黏附該膜體，再垂直位移以將該膜體拉離工件，以進行剝膜之 步驟； 然而’此種剝膜方式將膜體拉離工件之力量，係需以膠帶點性正向對 抗膜趙與i件間之附著力’但膜體伽轉護工件之用故膜體與工件間 之附著力亦具有-定程度而無法輕'易_，故可得知上述習用前案在剝媒 上成功率較受限制，必然無法快速且有效的完成剝膜的動作。 有鑑於上糊财式摘膜力道上有解足，遂有#者研發出壓花式 細機構，錢於麵麟上設m頭，該魏鄕會破壞膜體與工 5 1329610 -.件表面，如此當屋花頭礙過時，雖可有效剝離膜體，但對於卫件表面而言， • 齡留τ-觸花痕，破壞該工狀表喊紐，料有足夠之剝膜力 道，但卻會犧牲了工件之完整性，如此亦非良善之剝膜方式。 另’習用於剝缸件單面膜體時’由於工件提供之雜力*足常使 膠帶無法緊絲似件，進而造成剝膜力道不足，降低製程良率此亦習 j案之另缺失，再者，習用於剝除特殊工件，如薄板型工件時，由於 施型工件過於薄且輕，王件常會被—併拉離，而造成工件彎曲裂開等損 毁清事’如此不但造成物料的浪費，亦降低製程良率： 由上所述可知’習用之剝膜機構並無一有效且蜂實之設計，或有破壞 工件之虞’因此就整體而言，其可說是相當的料有實雜，仍有加以改 良之必要。 【發明内容】 本發明之主要目的係在於提供一種製程設備剝膜機構，其可改善習用 之亲j膜機幻膜力道不足’無法有效確實剝膜或需破壞工件表面以提高剝 膜力道等缺失。 為達成前述之發明目的，本發明之繼麟係包括__動力部與一剝膜 部’該動力雜包括第一驅動件與第二驅動件，該第一驅動件與第二驅動 係與剝膜部連接’且該第—驅動件可提供該剝膜部第一轴向之驅動力，而 該第二驅動制可提供_部帛三減之驅動力； 該剝膜部係具有-剝膜頭與一供剝膜頭組設之剝膜座該剝膜頭係樞 -又於剝膜座上’並可做適度之旋動，且該繼頭係可透過綱座受第一驅 6 1329610 動件之帶動，以及直接受第二驅鱗之帶動，而制第—軸與第二轴向 之驅動力’藉由第-軸向與第二軸向之驅動力搭配，據以驅使剝膜頭達到 滾壓剝膜之效。 本發明於細時，贿力部之第二购件射提側麟第二轴向之 驅動力，並g&合第-驅鱗持續提供之正向壓力，令該綱頭產生非正向 之側向滾壓纏力道，此—繼力道侧著麟與工制之獅面方向， 故較易將趣與场⑽，其財產生歓之极觸力道，而提供較佳 之剝膜效果；續以該動力部之第一驅動件係提供剝膜部第一抽向之驅動 力’令該誠部驅遠J!件’確實齡該麟與工件—隅錄，以利後續去 除膜體之作業； 本發明於綱時，該綱部射藉空讀提供足夠之承靠力使 第驅動件所提供之正向壓力完全施加於剝膜頭上之膠帶與工件上之膜 體’令其間產生-緊密之黏著力，而順利達成黏賴體之動作； 再者，本發明若使用於特殊工件，如薄板型工件時’該薄板型工件係 可藉由真空吸盤提供足夠吸力’以抗拒膠帶之黏著力，令薄板型工件不隨 膜體被-併拉離’從而避免卫件彎曲㈣等損毀情事，而順利完成剝除膜 體之動作； 藉由滾壓繼之枝’有效的運用麵力道’而可增加細之成功率， 且亦不會損壞功，無S犧牲工件表面之完錄，因此本發明實是一種相 當具有實祕及進步性之發明，值得產#界來推廣，並公諸於社會大眾。 【實施方式】 7 1329610 本發明係有關於-種製程設備剝膜機構，請參閱第—圖至第三圖所 示’這種製程設備麵機構其主要係包括—設置於製糊設備⑽（工〇) ,上之剝膜機構（2 0); 該設備機台（10)係具有-供待剝膜之工件（丄丄）組設之工作區 (1 2 )’該剝膜機構（2 〇 )則係設置於該工作區（1 2 )之其中—角隅 該剝膜機構（2 0 )之_動作方向並與該設職台（i Q )卫作區（工 2)之側邊呈傾斜之形態’令該剝膜機可概略沿工件（^之對角線單 面剝膜；如第三圖所示，亦可設置複數之剝膜機構（2 〇)於設備機台（1 0)上，以同時於上、下兩方面進行剝膜，增進剝膜之效率； 該剝膜機構（2 0 )則係包括有-動力部（2 1 )、_剝膜部（2 2 )、 一膠輪部（2 3 )以及一真空吸盤（2 4 )，其中： 該動力部（2 1 )係包括有-第-驅動件（2 i丄）與—第二驅動件 (2 1 2 ) ’該第一驅動件（211)與第二驅動件（2:2)係可為一汽 缸’且該第-驅動件（211)與第二驅動件（2 χ 2)前端各設有一連 桿（2 1 3、2 1 4 ) ’並以連桿（2 1 3、2 1 4 )與剥膜部（2 2 )連 接，據以帶動該剝膜部（2 2 );該第一驅動件（2 1 1)之連桿（2丄3 ) 其伸縮作動之方向係為第一軸向，而該第二驅動件（212)之連桿（2 14)其伸縮作動之方向則為第二軸向，該第一驅動件（2丄i)與第二 驅動件（212)係可藉連桿（213、214)而提供剥膜部（2 2) 第一軸向以及第二轴向之驅動力，並可藉由第一軸向、第二轴向之驅動力 搭配疊加，而產生滾壓剝膜之效；該第一轴向與第二軸向係保持在7 〇度 至110度之夾角為最佳。 8 13296101329610 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a stripping mechanism for a process equipment, and more specifically relates to a method for quickly and reliably stripping a film body on a substrate for subsequent operations. The design. [Prior Art] A production line consisting of various types of process equipment, which can complete the production process of each step of the product in a stable and efficient manner, and some of the products are temporarily covered in the film during the production process. For the protection of the surface, such as the common circuit board or the polarizing plate of the liquid crystal display, white will use the film body to protect the dust from adhering and prevent the surface from being damaged, and the media used temporarily will be in the latter stage. It is stripped during processing to continue other process operations. If you want to use the film body I's a full-faced machine to complete the slogan, read the patent application number of the Republic of China, No. 9 4 2 1 4 0 1 4, "Striping device", the pre-use case is mainly used The tape unit is miscellaneous 'cooperating with the ship motor, and the film body is adhered to the workpiece such as the substrate or the polarizing plate, and then vertically displaced to pull the film body away from the workpiece to perform the film stripping step; The film-stripping method pulls the force of the film body away from the workpiece, and it is necessary to positively resist the adhesion between the film and the i-piece with the tape point forward'. However, the adhesion between the film body and the workpiece is used for the film body. It also has a certain degree and cannot be lightly easy. Therefore, it can be known that the success rate of the above-mentioned conventional use case is more limited in the stripping process, and it is inevitable that the stripping action can be completed quickly and effectively. In view of the fact that there is a solution on the top of the film, the 遂 有 has developed a embossing type mechanism, and the money is set on the face of the lining, the Wei 鄕 will destroy the membrane body and work 5 1329610 -. When the flower head is in the way, although the film body can be effectively peeled off, for the surface of the guard, the age of the τ-touch flower marks, destroying the work form, and the material has enough peeling power, but it will Sacrifice the integrity of the workpiece, and this is not a good way to strip. Another 'when used to peel the single-sided film body of the cylinder', due to the miscellaneous force provided by the workpiece*, the tape can not be tightly wounded, which leads to insufficient peeling force and lowering the process yield. For the purpose of stripping special workpieces, such as thin-plate type workpieces, because the workpieces are too thin and light, the king pieces are often pulled away, causing the workpiece to bend and crack, etc., so that not only the waste of materials is caused. It also reduces the process yield: As can be seen from the above, 'the conventional stripping mechanism does not have an effective and realistic design, or there is a flaw in the destruction of the workpiece'. Therefore, on the whole, it can be said to be quite realistic. Miscellaneous, there is still a need to improve. SUMMARY OF THE INVENTION The main object of the present invention is to provide a film stripping mechanism for a process device, which can improve the illusion of the phantom force of the pro-j film machine that is not used effectively, and can not effectively strip the film or damage the surface of the workpiece to improve the defect of the filming force. . In order to achieve the foregoing object of the present invention, the lining of the present invention includes a __power portion and a stripping portion. The power miscellaneous includes a first driving member and a second driving member, and the first driving member and the second driving system are stripped The film portion is connected and the first driving member can provide a driving force of the first axial direction of the stripping portion, and the second driving system can provide a driving force for the third portion of the stripping portion; the stripping portion has a stripping film The stripping head is provided with a stripping head set by the stripping head, and the stripping head is pivoted on the stripping seat and can be moderately rotated, and the succeeding head system can be driven by the first lead 6 1329610 Driven by the moving member, and directly driven by the second driving scale, and the driving force of the first shaft and the second axial direction is matched by the driving force of the first axial direction and the second axial direction, thereby driving the stripping film The head achieves the effect of rolling and stripping. When the invention is in a fine time, the second purchase of the bribe force unit emits the driving force of the second axial direction of the side lining, and the positive pressure continuously provided by the g-amp; the first-drive scale causes the head to generate a non-positive direction. Lateral rolling and entanglement, this is the direction of the lion and the lion's face of the work system, so it is easier to bring interest and field (10), and its wealth is extremely strong, providing better film peeling effect; The first driving member of the power portion provides the driving force of the first pumping direction of the stripping portion, so that the Chengsuke drive away the J! piece is indeed the age and the workpiece-recording, so as to facilitate the subsequent removal of the film body; In the present invention, the frame is provided with sufficient bearing force to apply the positive pressure provided by the driving member to the film on the stripping head and the film body on the workpiece to make a tight Adhesive force, and smoothly achieve the action of sticking the body; Furthermore, if the invention is used for a special workpiece, such as a thin-plate type workpiece, the thin-plate type workpiece can provide sufficient suction by the vacuum chuck to resist the adhesive force of the tape. So that the thin plate type workpiece is not pulled away from the film body and thus avoids the bending of the guard (4) Damage the situation, and successfully complete the action of stripping the membrane; by rolling the branch 'effective use of the surface force' can increase the success rate of the fine, and will not damage the work, without the sacrifice of the surface of the workpiece without S Therefore, the present invention is an invention which is quite practical and progressive, and is worthy of promotion and is publicized to the public. [Embodiment] 7 1329610 The present invention relates to a stripping mechanism for a process equipment, as shown in the first to third figures, the main mechanism of the process equipment includes: - disposed in the paste making device (10) 〇), the stripping mechanism (20); the equipment machine (10) has a working area (1 2 ) for the workpiece (丄丄) to be stripped (the stripping mechanism (2 〇 ) is disposed in the working area (1 2 ) - the direction of the flaking mechanism of the stripping mechanism (20) and the side of the setting station (i Q) serving area (work 2) The inclined shape allows the stripping machine to be roughly stripped along the workpiece (the diagonal of the workpiece); as shown in the third figure, a plurality of stripping mechanisms (2 〇) can also be provided on the equipment machine (1 0 In the above, the film is peeled off at both the upper and lower sides to improve the efficiency of stripping; the stripping mechanism (20) includes a kinetic part (2 1 ), a _ stripping part (2 2 ), a rubber wheel portion (23) and a vacuum suction cup (2 4), wherein: the power portion (2 1 ) comprises a -first driving member (2 i 丄) and a second driving member (2 1 2 ) 'The first drive member (21 1) and the second driving member (2:2) may be a cylinder ' and each of the first driving member (211) and the second driving member (2 χ 2) has a connecting rod at the front end (2 1 3, 2 1 4) 'and the connecting rod (2 1 3, 2 1 4 ) is connected with the stripping portion (2 2 ), according to which the stripping portion (2 2 ) is driven; the first driving member (2 1 1) is connected The rod (2丄3) has a telescopic action direction of a first axial direction, and the connecting rod (2 14) of the second driving member (212) has a second axial direction of the telescopic actuation, the first drive The member (2丄i) and the second driving member (212) can provide the driving force of the first axial direction and the second axial direction by the connecting portion (213, 214) by means of the connecting rods (213, 214), and can be The driving forces of the first axial direction and the second axial direction are superimposed to produce a rolling film peeling effect; the first axial direction and the second axial direction are optimally maintained at an angle of 7 to 110 degrees. 1329610
該剝膜部（2 2)係包括有一剝膜座（2 21)與一剝膜頭（2 2 2 )， 該剝膜座（2 21)係直接與第一驅動件（211)連接，並可受第一驅 動件（211)第一轴向驅動力之驅使，而令剝膜部（2 2)以及剝膜頭 (2 2 2)產生沿著第一轴向向上或向下之位移；該剝膜頭（2 2 2)則 係樞設於剝膜座（2 21)上，剝膜頭（2 2 2 )係具有一弧形之滾壓面 (2 2 3 )，該剝膜頭（2 2 2 )並與第二驅動件（2 1 2 )連接，而可受 第二驅動件（212)第二軸向驅動力之驅使，令該剝膜頭（2 2 2)做 適度之旋動，而利用滚壓面（2 2 3)進行滾壓剝膜之動作； 該膠輪部（2 3 )係包括有二輪體（2 3 1 )，該輪體（2 3 1)係可 供谬帶（2 3 2)組設，該膠帶（2 3 2)係套設於其中一輪體（2 3丄） 上，再繞過剝卿（2 2 )麵頭（2 2 2 )而後纏繞至另一輪體（2 3 1)上，該輪體（2 3 1)並可帶動該膠帶（2 3 2)，而鱗剝膜頭（2 2 2 )上繼用之膠帶（2 3 2 )爾在具有黏著力之狀態； 該真空吸盤（2 4)係設置於相對應剝膜部（2 2)之位置，該真空 吸盤（2 4 )並可升_吸關定住卫作台上之工件（i i (⑴鋪膜時不隨剝膜頭（2 2 2)上之膠帶（2 3 2 )黏著力拉離。 繼續配合參閱第四圖至第八圖所示，聽本發明之剝膜部（2 2 )剝 膜頭（2 2 2)滾壓剝膜連續動作示意圖； 如弟四圖所示 il0) ^^' ^ (-t , , ^ 盤（2 4)係可吸附定位該工 (r工件（11)_該處，此時_(22)之剝膜頭 接:)係位於工件(⑴欲進行剝膜處之上方.尚未與工件(⑴ 9 1329610 如第五圖所示，動力部（21)之第一驅動件（211)透過連桿（2 13)伸長提供剝膜部（2 2)第一軸向之驅動力，而令該剝膜部（2 2) 驅近工件（1 1)，並施予正向壓力令剝膜頭（2 2 2 )以及該剝膜頭（2 2 2)上之膠帶（2 3 2)黏附住工件（i i)上之膜體（丄i丄）； 如第六圖所示，動力部（21)在剝膜時，該第二驅動件（2 j 2) 係先縮短連桿（2 1 4 )，令剝膜頭（2 2 2 )產生一順時鐘方向旋動之力 道，而令剝膜頭（2 2 2)可配合滾壓面（2 2 3)對工件（11)上之 • 膜體產生非正向之側向滾壓剝膜力道，此一剝離力道係順著膜體（丄丄工） 與工件（11)間之接觸面方向，配合第一驅動件（2 i i)所施於剝膜 頭（2 2 2)之第一軸向之壓力，故較易將膜體（2 2丄）與工件（丄工） 刀離其可產生較大之有效剝膜力道，而提供較佳之剝膜效果；第七圖係 第六圖之局部放大圖，由第七圖可清楚看出，第二驅動件（212)於帶 動剝膜頭（2 2 2)做滾壓剝膜時，該膜體（i i i)即已隨剝膜頭（2 2 2)之滾壓面（2 2 3 )而稍微與工件（11)分離； 鲁如第人圖所示，動力部（21)之第-驅動件（2 i i)再次透過連 桿（213)縮短提供剝膜部（2 2)第一轴向之驅動力，令該剝膜部（2 2 )驅遠工件（1 1 ) ’並順勢將已分離之膜體（i i）帶離工件（丄丄）， 確實的令該膜體與工件（11) 一隅分離，以利後續去除膜體之作業（其 中後續去除膜體之作業係可為真空導廢膜等方式，其係屬習知技藝且非本 發明所欲申清保護之標的，辣此不再贅述）。 由上所述者僅為用以轉本發明之較佳實施例，並非企圖據以對本發 明做任何形式上之限制’是以’凡有在相同之發明精神下所做有關本發明 之任何修飾或變更者’皆仍應包括在本發明意圖保護之範嘴内，故皆應屬 本發明所保護之範_。 综上所述，本發明製程設備剝膜機構在結構設計、使用實用性及成本 j益上’確實是完全符合產業上發展所需，且所揭露之結構發明亦是具有 前所未有的織構造，所料具有「新麵」應無疑慮又本發明可較之 習知結構更具功效之增進，因此亦具有「進步性」，其完全符合我國專利法 有關發明專利之申請要件的規定，乃依法提起專利申請，並敬請鈞局早 曰審查’並給予肯定。 【圖式簡單說明】 第一圖係本發明製程設備剝膜機構外觀立體示意圖。 第二圖係本發明製程設備剝膜機構剝膜部與動力部之另一角度示意圖。 第三圖係本發明製程設備剝膜機構整體簡單示意圖。 第四至八圖係本發明製程設備剝膜機構滾壓剝膜連續作動圖。 【主要元件符號說明】 10-設備機台 11-工件 ill——膜體 1 2--工作區 2 0-剝膜機構 2 1-動力部 211-第一驅動件 212——第二驅動件 213——連桿 2 14-連桿 2 2-剝膜部 22 1——剝膜座 2 2 2-剝膜頭 2 2 3——滾壓面 2 3-膠輪部 23 1-輪體 2 32——膠帶 2 4-真空吸盤The stripping portion (2 2) includes a stripping seat (2 21) and a stripping head (2 2 2 ), and the stripping seat (21) is directly connected to the first driving member (211), and The first axial driving force of the first driving member (211) is driven, and the stripping portion (2 2) and the stripping head (2 2 2) are displaced upward or downward along the first axial direction; The stripping head (2 2 2) is pivotally disposed on the stripping seat (22), and the stripping head (2 2 2 ) has an arc-shaped rolling surface (2 2 3 ), and the stripping head (2 2 2 ) and connected to the second driving member (2 1 2 ), and can be driven by the second axial driving force of the second driving member (212), so that the stripping head (2 2 2) is moderately Rotating, and using a rolling surface (2 2 3) for rolling and stripping; the rubber wheel portion (23) includes a two-wheel body (2 3 1 ), and the wheel body (2 3 1) is The belt (2 3 2) is set up, and the tape (2 3 2) is sleeved on one of the wheel bodies (2 3 2), and then wound around the (2 2 ) face (2 2 2 ) and then wound On the other wheel body (2 3 1), the wheel body (2 3 1) can drive the tape (2 3 2), and the stripping head (2 2 2 ) is used for the glue. (2 3 2 ) is in a state of adhesion; the vacuum chuck (24) is disposed at a position corresponding to the stripping portion (22), and the vacuum chuck (2 4) can be raised and slid The workpiece on the stage (ii ((1) is not peeled off with the adhesive tape (2 3 2) on the stripping head (2 2 2). Continue to cooperate with the fourth to eighth figures, listen to this The stripping head of the invention (2 2 ) stripping head (2 2 2) rolling stripping film continuous action schematic diagram; as shown in the fourth figure il0) ^^' ^ (-t , , ^ disk (2 4) system Adsorption positioning of the work (r workpiece (11) _ this, _ (22) stripping head:) is located in the workpiece ((1) above the stripping point. Not yet with the workpiece ((1) 9 1329610 as the fifth As shown in the figure, the first driving member (211) of the power portion (21) is extended by the connecting rod (2 13) to provide a driving force for the first axial direction of the stripping portion (22), and the stripping portion (2 2) Driving the workpiece (1 1) and applying a positive pressure to the stripping head (2 2 2 ) and the tape (2 3 2) on the stripping head (2 2 2) to adhere to the workpiece (ii) Membrane body (丄i丄); as shown in the sixth figure, when the power unit (21) is stripping, the second drive The piece (2 j 2) first shortens the connecting rod (2 1 4 ), so that the stripping head (2 2 2 ) generates a clockwise direction of rotation, and the stripping head (2 2 2) can be combined with rolling The surface (2 2 3) produces a non-positive lateral rolling stripping force on the film body (11), and the stripping force is along the film body (completed) and the workpiece (11) The direction of the contact surface is matched with the pressure of the first axial direction of the first driving member (2 ii) applied to the stripping head (2 2 2), so that the membrane body (2 2 丄) and the workpiece (completed) knives are easier to be used. It can produce a larger effective stripping force and provide a better stripping effect. The seventh figure is a partial enlarged view of the sixth figure. As can be clearly seen from the seventh figure, the second driving member (212) is driven. When the stripping head (2 2 2) is rolled and stripped, the film body (iii) has been slightly separated from the workpiece (11) by the rolling surface (2 2 3 ) of the stripping head (2 2 2); As shown in the figure of Lu Ru, the first driving member (2 ii) of the power unit (21) is again passed through the connecting rod (213) to shorten the driving force for providing the first axial direction of the stripping portion (22), so that the stripping film Department (2 2) drive away the workpiece (1 1 ) 'and the trend will be divided The film body (ii) is separated from the workpiece (丄丄), and the film body is surely separated from the workpiece (11) to facilitate the subsequent removal of the film body (where the subsequent removal of the film body can be vacuum waste Membrane and the like, which are known in the art and which are not claimed by the present invention, are not described in detail. The above description is only for the preferred embodiment of the present invention, and is not intended to limit the invention in any way. It is intended to have any modification of the invention in the spirit of the same invention. And the changer's should still be included in the scope of the invention to be protected, and therefore should be protected by the present invention. In summary, the stripping mechanism of the process equipment of the present invention is completely in line with the development of the industry in terms of structural design, practicality and cost, and the disclosed structural invention has an unprecedented weaving structure. It is reasonable to think that the invention has a "new face" and that the invention can be more effective than the conventional structure. Therefore, it is also "progressive", which fully complies with the requirements of the application requirements of the invention patents of the Chinese Patent Law. Patent applications, and please ask the bureau to review early and give affirmation. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic perspective view of the stripping mechanism of the process equipment of the present invention. The second figure is another perspective view of the stripping part and the power part of the stripping mechanism of the process equipment of the present invention. The third figure is an overall simple schematic diagram of the stripping mechanism of the process equipment of the present invention. The fourth to eighth figures are continuous operation diagrams of the stripping and filming process of the stripping mechanism of the process equipment of the present invention. [Description of main component symbols] 10-device machine 11 - workpiece ill - film body 1 2--working area 2 0 - stripping mechanism 2 1-power part 211 - first driving member 212 - second driving member 213 - Connecting rod 2 14 - Connecting rod 2 2- Stripping part 22 1 - Stripping seat 2 2 2- Stripping head 2 2 3 - Rolling surface 2 3- Rubber wheel part 23 1-wheel body 2 32 ——Adhesive tape 2 4-vacuum suction cup