1327041 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種具異常檢測功能之三相加熱系統 ^其檢測方法’ 特別是有關於―種利用繼電裝置進行異 常檢測之三相加熱系統及其檢測方法。 【先前技術】1327041 IX. Description of the Invention: [Technical Field] The present invention relates to a three-phase heating system with an abnormality detecting function, and a detection method thereof, in particular, a three-phase heating method for detecting an abnormality using a relay device System and its detection method. [Prior Art]
^ 一般在半導體相關的製程步驟中，通常會使用一加熱 糸、.充（如—相加熱系統）來進行回火（anneai)製程.，藉以去 除水氣或雜質，並使產品本身有更好的物理特性。請參照 第1圖，係繪示習知三相加熱系統的方塊示意圖。此三相 加熱系統1〇〇包含三相電源11〇、繼電器12〇、加熱器 螓 加熱爐140 '溫度檢知器15〇以及溫度控制器16〇。三相電 源U0係用以輸入電壓源至繼電器12〇中，以供繼電器Ho 運作。繼電器120係用以控制加熱器13〇之開啟或關閉， 並藉由加熱器130對加熱爐14〇進行加熱的動作。加熱爐 14〇則是受溫度檢知器150偵測，再經由溫度檢知器15〇 將偵測到的溫度訊號傳送至溫度控制器16〇中，藉由溫度 控制器160控制繼電器12〇,使得繼電器12〇藉此控 器130之開啟或關閉，進而保持加熱爐14〇中的溫度條件。 請參照第2圖’係繪示繼電器與加熱器耦接之示意圖。 系統中的三個繼電器210係以三角形的接法相互耦接，且 兩兩繼電器210依序首尾相連接，並分別將相連的點引出 作為二相電源r、S、T的三個相線。三組加熱器220則是 5 1327041 刀別與兩兩繼電器210耦接，並藉由繼電器21〇的控制而 進行加熱動作，其中各元件在正常狀況下係呈三相=衡狀 態。然而，由於系統中並無任何偵測繼電器21〇故障異常 的裝置，因此當三個繼電器210其中之一發生損壞時，、三 相平衡狀態即會發生欠相的情形，使得加熱製程條件也: 而受到影響。此時’在操作者無法即時察覺異常的情況之 下，經過加熱製程的產品便不合乎原先預期的 接增加了製作成本。 也間 +因此，需要一種三相加熱系統，具有異常檢測的功能， 可藉以在操作時得知發生異常的情形。 【發明内容】 本發明之目的是在提供一種具異常檢測功能之三相加 熱系統及其檢測方法’藉以在進行產品製程而使用三相加 熱系統時，可檢測得知製程異常的情形以及判斷故障發生。 依照本發明一實施例，提出一種具異常檢測功能之三 相加熱系統。此系統包含複數個繼電器以及一檢測裝置。 繼電器係用以控制系統中加熱器之開啟或關閉。檢測裝置 無電性耦接於繼電器，並用以偵測繼電器是否有異常狀 態，且包含複數個電性接點以及一切換開關，其中繼電卷 f分別電性耦接於電性接點至少其中H㈣開_ 疋電性耦接於電性接點至少其中之一，且於檢測裝置偵測 到繼電器其中之-具異常狀態時受觸發而作切換，藉以輸 出一檢測訊號告知發生異常狀態。 6 1327041 本發明另—實施例，提出—種檢測三相加熱系統 “ 法。此方法包含將一檢測繼電器電性耦接於—三 相加熱系統中用以開啟或關閉加熱器之複數個繼電器.: •電=繼電器電性純於檢測繼電器；在繼電器其中之— 具異常狀態時觸發檢測繼電器以輸出—檢測訊號； :訊號觸發電源繼電器；藉由電源繼電器啟動一異常指八 器。 曰’、 藉由本發明之具異常檢測功能之三相加熱系統及其檢 測方法，可於二相加熱系統因三相電源發生欠相情形或 系：内部控制加熱器開關的繼電器發生損壞時，即時檢測 故障異常的情形，避免產品因溫度條件改變而不符合原先 標準，並且可讓操作者更方便、迅速地得知系統異常，供 操作者進行即時的修復工作。 【實施方式】 請參照第3圖，係繪示依照本發明一實施例之具異常 檢測功能之三相加熱系統的方塊示意圖。在此三相加熱系 統300中，三相電源31〇係用以輸入電壓源至繼電器32〇 中，以供繼電器320運作。繼電器32〇係用以控制加熱器 330之開啟或關閉，並藉由加熱器33〇對加熱爐34〇進行加 熱的動作。加熱爐340則是受溫度檢知器35〇偵測，再經 由溫度檢知器350將偵測到的溫度訊號傳送至溫度控制器 360中，藉由溫度控制器360控制繼電器320，使得繼電器 320藉此控制加熱器330之開啟或關閉，進而保持加熱爐 7 1327041 MO中的溫度條件。此外，三相加熱系統则中更 :::::測繼電器-是否發生故障異常二二 電路包含-檢測裝£37〇以及一輸出處理裝fi38〇， ，則裝置370係用以判別繼電器32〇是否發生故障的情二 =輸出處理裝置38〇則是顯示異常指示訊號以供操作者判 /請參照第4圖’係繪示依照本發明一實施例之三相 熱系統中檢測電路的連接構造示意圖。在本實施例中，^ 統中的三個繼電器係以三角形的接法相互_接，且 兩繼電器4H)依序首尾相連接，並分別將相連的點引出作 為二相電源R ' S、T的三個相線。三組加熱器420則是分 別與兩兩繼電器410輕接，並藉由繼電器41〇的控制而二 仃加熱動作’其中各元件在正常狀況下係'呈三相平衡狀 態。此外，更使用-檢測繼電器指以及—電源繼電器彻 分別作為檢測裝置以及輸出處理裝置來使用，纟中檢測繼 電器430可為-欠相檢測保護繼電器。檢測繼電器彻八 別電性輕接於三個繼電器41〇，並用以偵測繼電器々〖Ο是= 有異常的狀態’而電源繼電器_則是電軸接於檢測繼 電器430以及-異常指示器彻，並根據檢測繼電器請 所價測到的訊號啟動異常指示器藉以供操作者判讀， 其中異常指示器450可為一蜂鳴器或—指示燈。 ▲第5圖係繪示如第4圖所示之檢測繼電器之示意圖。 明同時參照第4圖以及第5 D ’檢測繼電器43。内包含有 數個電性接點以及-切換關SW卜其t三個繼電器· 8 係分別電性輕接於檢測繼電器430内的電性接點， 開關S W1亦電性叙接# φ換 ㈣甘6 且在檢測繼電器43(M貞 中之-個繼電器彻具異常狀態時，受到觸發而作 ::出—檢測訊號DS告知發生異常狀態，且檢測訊 & ’、迗至電源繼電器440中。電源繼電器内44〇 含兩切換開關SW2和SW3，分別電性純於檢測繼電^ 43〇’其中切換開關SW2更電,_接於異常指示器45〇,並 在受到檢測繼電器彻所輸出的檢測訊號仍觸發時作切 換’以啟動異常指示器45G供操作者判讀。而切換開關則 貝^疋同樣在受到檢測繼電器所輸出的檢測訊號防觸發 日’作切換’同時形成一自保持迴路’使得切換開關SW3在 換後所輸出的觸發訊號再傳送至切換開關SB本身，以 維持切換開關SW3切換後的狀態。 此外，系統内更可包含—故障指示器46()以及一重置 1關470故障指不器46〇係用以電性搞接於切換開關 並在切換開關SW3作切換後藉由切換開關請3啟 由於切換開關SW3在自保持迴路中維持切換後的狀 使得故障指示H偏可持續被啟動，以供操作者判讀。 重置開關470則是位於切換開關剛所形成的自保持迴路 。待操作者將故障排除後，供操作者使用以重置自保持 路使付切換開M s W3回々复至原先尚未切換的狀態。 月 > …、第6圖，係繪示依照本發明一實施例之檢測三 力二系統之方法的流程圖。t先，㉟檢測繼電器電性輕 -相加熱系統中用以開啟或關閉加熱器的繼電器，藉 1327041 由檢測繼電器來判別控制加熱器的繼電器是否有故障異常 的情形發生（步驟600)。接著，將電源繼電器電性輕接於: 測繼電器，用以接收由檢測繼電器所輸出的檢測訊號（步驟 6〇2)。然後，在其中之一繼電器具異常狀態時觸發檢測繼 電益’错由檢測繼電器輸出檢測訊號告知發生異常狀態（步 驟604)。之後’再根據檢測繼電器所輸出的檢剩訊號觸^ 電源繼電器(步驟606)。最後，在電源繼電器受到觸發後藉 由電源繼電器啟動異常指示器，以供操作者判讀(步驟 608) ° 曰此外’更可將電源繼電器設計形成—自保持迴路 付電源繼電器在受到檢測訊號觸發後維持切換後的狀態。 再者更可將-故障指示器電性糕接於電源繼電器並在 源繼電器受到觸發後藉由電源繼電器啟動故障指示器，且 由於電源繼電器在自保持迴路中維持切換後的狀態，使得 故障指示器可持續被啟動，以供操作者判讀。另外，亦可 將一重置開關電性_於電源繼電器，並使其位於電源繼 電器形成的自保持迴路中± 电原、繼 供#作者使用以重置自保持迴 路，而使仔電源繼電器回復至尚未切換的狀態。 -之由月之實施例可知’本發明之具異常檢測功 ::相加,，.、系統及其檢測方法可於三相 ;源發生欠相情形，或系統内部控制加熱器開關的繼；； 發生_，用以即時檢測故 因 溫度條件改變而不符人丹…隹 心避免產扣因 便、迅速地得並且可讓操作者更方 统* ” ，供钿作者進行即時的修復工 1327041 作。。 …'、本發明已以貫施例揭露如上，然其並非用以限定 本發明’任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍内，當可作各種之更動與潤飾，因此 =發明之保護範圍當視後附之申請專利範圍所界定者為 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 月匕更明顯易懂’所附圖式之詳細說明如下： 第1圖係繪示習知三相加熱系統的方塊示意圖。 第2圖係繪示繼電器與加熱器耦接之示意圖。 第3圖係繪示依照本發明一實施例之具異常檢測功能 之二相加熱系統的方塊示意圖。 第4圖係繪示依照本發明一實施例之三相加熱系統中 檢測電路的連接構造示意圖。 第5圖係繪示如第4圖所示之檢測繼電器之示意圖。 第6圖係繪示依照本發明一實施例之檢測三相加熱系 統之方法的流程圖。 【主要元件符號說明】 、3〇〇 .二相加熱系統 380 :輸出處理裂置 1327041 430 :檢測繼電器 440 :電源繼電器 450 :異常指示器 460 :故障指示器 470 :重置開關 600〜608 :步驟 SW1、SW2、SW3 :切換開關 11 0、3 10 ··三相電源 120、210、320、410 :繼電器 130、220、330、420 :力口熱器 140、340 :力口熱爐 150、350 :溫度檢知器 160、360 :溫度控制器 370 :檢測裝置^ Generally, in the semiconductor-related process steps, a heating 糸,. (such as a phase heating system) is usually used for the anneai process to remove moisture or impurities and make the product itself better. Physical characteristics. Referring to Figure 1, a block diagram of a conventional three-phase heating system is shown. The three-phase heating system 1A includes a three-phase power source 11A, a relay 12A, a heater 螓 a heating furnace 140' temperature detector 15A, and a temperature controller 16A. The three-phase power source U0 is used to input a voltage source to the relay 12A for the relay Ho to operate. The relay 120 is for controlling the opening or closing of the heater 13 and heating the heating furnace 14 by the heater 130. The heating furnace 14 is detected by the temperature detector 150, and then the temperature signal detected by the temperature detector 15 is transmitted to the temperature controller 16A, and the temperature controller 160 controls the relay 12〇. The relay 12 is caused to turn on or off by the controller 130, thereby maintaining the temperature condition in the furnace 14〇. Please refer to Figure 2 for a schematic diagram of the coupling of the relay to the heater. The three relays 210 in the system are coupled to each other in a triangular connection, and the two relays 210 are connected end to end in sequence, and the connected points are respectively taken out as three phase lines of the two-phase power sources r, S, and T. The three sets of heaters 220 are 5 1327041 and the two relays 210 are coupled to each other, and are heated by the control of the relay 21〇, wherein the components are in a three-phase=balance state under normal conditions. However, since there is no device for detecting the abnormality of the relay 21 in the system, when one of the three relays 210 is damaged, the phase of the three phases is in an owing phase, so that the heating process conditions are also: And affected. At this time, in the case where the operator cannot immediately detect the abnormality, the product subjected to the heating process does not meet the originally expected connection and increases the manufacturing cost. Also, therefore, a three-phase heating system is required, which has an abnormality detecting function, so that an abnormal situation can be known at the time of operation. SUMMARY OF THE INVENTION An object of the present invention is to provide a three-phase heating system with an abnormality detecting function and a detecting method thereof, so that when a three-phase heating system is used in a product manufacturing process, it is possible to detect a process abnormality and determine a fault. occur. According to an embodiment of the invention, a three-phase heating system with an abnormality detecting function is proposed. The system includes a plurality of relays and a detection device. The relay is used to control the opening or closing of the heater in the system. The detecting device is electrically coupled to the relay and is configured to detect whether the relay has an abnormal state, and includes a plurality of electrical contacts and a switch, wherein the relay coil f is electrically coupled to the electrical contact at least H (4) The opening _ is electrically coupled to at least one of the electrical contacts, and is triggered by the detecting device detecting that the relay has an abnormal state, thereby outputting a detection signal to notify an abnormal state. 6 1327041 Another embodiment of the invention proposes a method for detecting a three-phase heating system. The method comprises electrically coupling a detection relay to a plurality of relays for turning the heater on or off in a three-phase heating system. : • Electricity = relay is purely pure to the detection relay; in the relay - when there is an abnormal state, the detection relay is triggered to output - the detection signal; : the signal triggers the power relay; the power relay activates an abnormal indicator. 曰 ', The three-phase heating system with the abnormality detecting function of the present invention and the detecting method thereof can detect the abnormality of the fault immediately when the two-phase heating system is in a phase failure condition due to the three-phase power supply or when the relay of the internal control heater switch is damaged. In case of failure to meet the original standard due to changes in temperature conditions, the operator can more easily and quickly know the abnormality of the system for the operator to perform immediate repair work. [Embodiment] Please refer to Figure 3, A block diagram of a three-phase heating system with an abnormality detecting function according to an embodiment of the present invention is shown. In the three-phase heating system 300, the three-phase power source 31 is used to input a voltage source into the relay 32A for operation of the relay 320. The relay 32 is used to control the opening or closing of the heater 330, and by the heater 33〇 heating the furnace 34〇. The heating furnace 340 is detected by the temperature detector 35〇, and then the temperature signal detected by the temperature detector 350 is transmitted to the temperature controller 360. The relay 320 is controlled by the temperature controller 360 such that the relay 320 thereby controls the opening or closing of the heater 330 to maintain the temperature condition in the furnace 7 1327041 MO. In addition, the three-phase heating system is more::::: The relay - whether the fault abnormality 22 circuit includes - detection load £37〇 and an output processing device fi38〇, the device 370 is used to determine whether the relay 32 is faulty or not = the output processing device 38 is displayed The abnormality indication signal is for the operator to judge / please refer to FIG. 4' is a schematic diagram showing the connection structure of the detection circuit in the three-phase thermal system according to an embodiment of the present invention. In this embodiment, the three in the system The relays are connected to each other by a triangle connection, and the two relays 4H) are connected end to end in sequence, and the connected points are respectively taken out as three phase lines of the two-phase power source R'S, T. The three groups of heaters 420 It is respectively connected with the two relays 410, and is controlled by the relay 41〇, and the heating operation is performed in which the components are in a three-phase equilibrium state under normal conditions. In addition, the detection relay finger and the power supply are further used. The relay is used as the detecting device and the output processing device respectively, and the detecting relay 430 can be a - phase detecting protective relay. The detecting relay is lightly connected to the three relays 41〇 and used to detect the relay 々 Ο is = there is an abnormal state 'and the power relay _ is the electric axis connected to the detection relay 430 and - the abnormality indicator is complete, and the abnormality indicator is activated according to the signal detected by the detection relay for the operator to interpret, wherein The abnormality indicator 450 can be a buzzer or a light. ▲ Figure 5 is a schematic diagram showing the detection relay as shown in Figure 4. At the same time, reference is made to Fig. 4 and the fifth D' detection relay 43. There are several electrical contacts included in the switch-switching switch SW and its three relays. The 8 series are electrically connected to the electrical contacts in the detection relay 430. The switch S W1 is also electrically connected to the # φ switch (4). In the detection relay 43 (the relay in the M 彻 is in an abnormal state, the trigger is made:: the output signal DS informs that an abnormal state has occurred, and the detection signal & ', 迗 to the power relay 440 The power relay has 44 switches including SW2 and SW3, which are electrically pure to detect the relay ^ 43 〇 'where the switch SW2 is more energized, _ is connected to the abnormal indicator 45 〇, and is outputted by the detection relay When the detection signal is still triggered, the operation is switched to 'activate the abnormality indicator 45G for the operator to interpret. The switch is also switched to the detection signal output by the detection relay. 'The trigger signal outputted by the switch SW3 is transferred to the switch SB itself to maintain the state after the switch SW3 is switched. In addition, the system may further include a fault indicator 46 () and a reset. 1 off 470 fault finger device 46〇 is used to electrically connect to the switch and after the switch SW3 is switched, by switching the switch, please turn on the switch SW3 to maintain the switching state in the self-holding loop. The indication H is continuously activated for the operator to interpret. The reset switch 470 is located in the self-holding loop formed by the switch. After the operator removes the fault, the operator uses it to reset the self-holding path. The switching switch M s W3 is restored to the state that has not been switched yet. Month > ..., FIG. 6 is a flow chart showing a method for detecting the three-force two system according to an embodiment of the present invention. Detecting the relay used to turn the heater on or off in the electric light-phase heating system, by 1327041, the detection relay determines whether the relay controlling the heater has a fault abnormality (step 600). Then, the power relay is electrically Lightly connected to: The relay is used to receive the detection signal output by the detection relay (step 6〇2). Then, when one of the relays has an abnormal state, the detection relay power is triggered. The detection relay outputs a detection signal to notify the occurrence of an abnormal state (step 604). Then, according to the detection residual signal outputted by the detection relay, the power supply relay is touched (step 606). Finally, the power relay is activated after the power relay is triggered. An abnormality indicator for the operator to interpret (step 608) ° 曰 In addition, the power relay design can be formed. The self-holding circuit power supply relay maintains the state after switching after being triggered by the detection signal. The indicator electrical cake is connected to the power relay and the fault indicator is activated by the power relay after the source relay is triggered, and since the power relay maintains the switched state in the self-holding loop, the fault indicator can be continuously activated to For the operator to interpret. In addition, a reset switch can be electrically connected to the power relay and placed in the self-holding loop formed by the power relay. The electric source is used by the author to reset the self-holding loop, and the power relay is restored. To the state that has not been switched. - It can be seen from the embodiment of the month that the invention has the abnormal detection function: the addition, the system, and the detection method thereof can be used in three phases; the source occurs in an owing phase, or the system internally controls the heater switch; ; Occurs _, for immediate detection, because the temperature conditions change, it does not conform to the person... 隹 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 避免 产 产 产 132 132 132 132 132 132 132 132 132 132 132 132 132 The present invention has been disclosed in the above-described embodiments, and is not intended to limit the invention, and the invention may be used in various fields without departing from the spirit and scope of the invention. Modifications and refinements, therefore, the scope of protection of the invention is defined by the scope of the appended claims. [Simplified Description of the Drawings] The above and other objects, features, advantages and embodiments of the present invention are more obvious and easy to understand. The detailed description of the drawings is as follows: Figure 1 is a block diagram showing a conventional three-phase heating system. Figure 2 is a schematic diagram showing the coupling of a relay and a heater. Figure 3 is a schematic diagram of the present invention. The block diagram of the two-phase heating system with the abnormality detecting function of the embodiment. FIG. 4 is a schematic diagram showing the connection structure of the detecting circuit in the three-phase heating system according to an embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 6 is a flow chart showing a method of detecting a three-phase heating system according to an embodiment of the present invention. [Main component symbol description], 3〇〇. Two-phase heating system 380: Output Processing Split 1327041 430: Detection Relay 440: Power Relay 450: Abnormal Indicator 460: Fault Indicator 470: Reset Switch 600~608: Steps SW1, SW2, SW3: Switch 11 0, 3 10 ··Three Phase Power source 120, 210, 320, 410: relays 130, 220, 330, 420: force transmitters 140, 340: force hot pots 150, 350: temperature detectors 160, 360: temperature controller 370: detection device
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