AU0801090 27680twf.doc/i 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種處理裝置，且特別是有關於一種 毛刷輪處理裝置。 【先前技術】 由於平面顯示技術的突飛猛進’其應用逐漸從電腦用 螢幕延伸至家用電視。就薄膜電晶體液晶顯示器 (TFT-LCD)製程而言’清洗步驟經常連接於錄3膜、微影 及兹刻等步驟之前、中、後等時機，用以維持顯示器基板 在生產過程中之表面潔淨度。 基板表面之清洗方式包括化學性及物理性的清洗方 式。舉例而言，轉動巾之毛難表面的纖毛來刷洗 (scrub)基板表面以達到清洗目的者屬於物理性的清洗方 式。毛刷刷洗（brush cleaning)通常應用於剛拆封後之素 玻璃基板的清洗，並廣泛地應用於目前的濕式清洗設備。 由於顯示ϋ基板之尺寸的獨增加，大尺寸素玻璃基板之 清洗步驟大多已採用鋪概，所以毛卿洗裝置之零组 件具有很大的市場商機。 在實際應用上，以滾輪式毛刷來清洗基板表面可以有 助於清除基板表面之賤(partide)，湘此㈣之毛刷輪 面，使得進行製程前之基板表面的潔 產品的良率。然而，清洗裝置在長時 能力將運料啊長岐退，甚至異齡雜 1325344 AU0801090 2768〇twf.doc/n I而成為在各製程中的污_，造成產品的品質里常， 因而不利於顯示器之產品良率的提升。 Ί (aging)；4^ 穩定性。當毛刷新品 機台將無法進行正常的生產作業，因而不利於 顯不态之產能的提升。 +〜於 【發明内容】 之丄 =處-理種== :體、固定式轴承以及多二:括 ，多個可調式轴承位於槽體内，其中可赋轴= 轴， =轴線方向延伸依序設置’且可調式轴承相對於固 Ί 旋=第:=的第—端承靠於固定式轴承上3 ，承包括柱體、多個第-從動輪以及第二從動輪Π式 具有貫孔，且旋轉軸的第二端穿讯於勺,由勤輪、、且。检體 動輪設置於柱體上之貫孔週邊，；與;::承從 動輪組具有調整器以及第二從動輪，其以動:二從 ，體上之貫孔週邊，且部分外露於貫孔内設置 &與第二從動輪連結，另—端馳設於 6 :之二 二從動輪組可在柱體上移動，依據旋轉心徑猎 6 1325344 AU0801090 27680twf.doc/n 進入於貫孔_距離，以配合第—從動輪對第 :二=固定毛刷輪於固定式軸承與可調式轴承的= ^本發明之-實施例中，上述之毛刷輪處理裝 擬她紐，其與毛難接抵。此時，模 於毛刷輪旁，擬』 入量調替：i4aa0卜’毛刷輪處理裝置更包括壓 整车歷5 ’連接於蚊式軸柄及可調私承，用以調 在於模擬基板之表面的距離。 式軸承之間具林上奴柯調式軸承與固定 具有===的承的柱體 質上為1釐米。踢則轉避里，位移調整量實 連才曰ίίί明之—實施例中，上述之調整器包括一連桿， 線往毛刷輪=線，設於柱體上，第二從動輪沿著樞轉轴 從動輪=時使:=夹持於第-從動輪以及第二 動輪於限位凹槽⑽限位部，使得第二從 田運#而限位在限位凹槽内。 括驅動例巾，上述之毛顯處理裝置更包 驅使旋轉轴沿著—旋轉轉端連接’驅動馬達用以 在本發明之—實施例中，上述之毛刷輪處理裝置更包 7 1325344 AU0801090 27680twf.doc/n 括-喷嘴’設置於毛刷齡，喷嘴適於提供—處理液至毛 刷輪上。麟’㈣_鋼輪㈣置，㈣處理液直接 刷輪h或者，上述之毛刷輪處理裝置更包括流 士合置工間，其設置於切輪旁，處理液自流體容置空間 中溢流(overflow)至毛刷輪上，而處理液包括水或藥液。AU0801090 27680twf.doc/i IX. Description of the Invention: [Technical Field] The present invention relates to a processing apparatus, and more particularly to a brush wheel processing apparatus. [Prior Art] Due to the rapid advancement of flat panel display technology, its application has gradually extended from computer screens to home TVs. In the case of a thin film transistor liquid crystal display (TFT-LCD) process, the cleaning step is often connected to the before, during, and after the steps of recording 3 film, lithography, and etching to maintain the surface of the display substrate during production. Cleanliness. The cleaning method of the substrate surface includes chemical and physical cleaning methods. For example, it is a physical cleaning method to rotate the surface of the bristles of the towel to scrub the surface of the substrate for cleaning purposes. Brush cleaning is commonly used for the cleaning of glass substrates that have just been unsealed and is widely used in current wet cleaning equipment. Due to the unique increase in the size of the substrate, the cleaning steps of the large-size glass substrate have been mostly used, so the zero component of the Maoqing washing device has great market opportunities. In practical applications, cleaning the surface of the substrate with a roller brush can help remove the partide of the surface of the substrate, and the brush surface of the (4) brush makes the yield of the surface of the substrate before the process. However, the cleaning device will be able to transport the material for a long time, and even the age of 1325344 AU0801090 2768〇twf.doc/n I will become a pollution in each process, resulting in the quality of the product, which is not conducive to the display. Product yield improvement. Ί (aging); 4^ stability. When the hair refresher machine will not be able to carry out normal production operations, it is not conducive to the increase in capacity. +~于[发明发明] 丄=处-Physical == : Body, fixed bearing and more than two: including, a plurality of adjustable bearings are located in the tank, where the shaft can be assigned = shaft, = axial extension Sequentially set 'and the adjustable bearing relative to the solid = = the first end of the := bears against the fixed bearing 3, the bearing includes the cylinder, the plurality of first-driven wheels and the second driven rim The hole, and the second end of the rotating shaft passes through the spoon, by the wheel, and. The test moving wheel is disposed on the periphery of the through hole on the cylinder; and the ::: the driven moving wheel set has the adjuster and the second driven wheel, and the moving: two from the body, the periphery of the through hole, and the part is exposed The hole setting & is connected with the second driven wheel, and the other end is set at 6: the second driven wheel set can move on the cylinder, according to the rotating core path hunting 6 1325344 AU0801090 27680twf.doc/n enters the through hole _ distance to match the first-driven wheel pair: two = fixed brush wheel in the fixed bearing and the adjustable bearing = ^ In the embodiment of the invention, the above-mentioned brush wheel handles the installation of her, which is Mao is difficult to reach. At this time, the mold is next to the brush wheel, and the amount of the adjustment is: i4aa0 Bu's brush wheel processing device includes a compacted car calendar 5' connected to the mosquito shaft handle and adjustable private bearing, used to adjust the simulation The distance from the surface of the substrate. The coupling between the bearings and the slaves on the forest is fixed and the cylinder with the === is 1 cm in mass. In the embodiment, the adjuster includes a connecting rod, the line to the brush wheel=line, is disposed on the cylinder, and the second driven wheel is along the pivot. The rotating shaft driven wheel=time makes:= clamped to the first driven wheel and the second moving wheel in the limiting groove (10) limiting portion, so that the second slave Tianyun# is limited in the limiting groove. Including the driving towel, the above-mentioned hair processing device further drives the rotating shaft to be connected to the driving motor along the rotating end. In the embodiment of the present invention, the above-mentioned brush wheel processing device further includes 7 1325344 AU0801090 27680twf The .doc/n-nozzle' is set at the brushing age and the nozzle is adapted to provide a treatment fluid to the brush wheel. Lin '(4)_Steel wheel (4), (4) Treatment liquid direct brush wheel h or above, the brush wheel treatment device further includes a runner assembly, which is placed beside the cutting wheel, and the treatment liquid overflows from the fluid accommodation space The flow is over the brush wheel, and the treatment liquid includes water or a liquid medicine.
基於上述’本發明之毛刷輪處理裝置可因應不同長度 用不同的可調式軸承’並且藉由第二從動輪組 可將不同軸徑之毛刷輪加關定，進而達騎不同尺寸之 進行老化處理、再生處理或侧作業的目的，本發 洗裝置可以提升毛刷輪對基板之清洗效能，提 汁產σ口良率’並提升生產機台的產能。 為讓本發明之上述和其他目的、特徵和優點能更明顯 =_；下域舉多個實施例，並配合所_式，作詳細說 明如下。 【實施方式】Based on the above-mentioned 'the brush wheel processing device of the present invention, different adjustable bearings can be used according to different lengths', and the brush wheel of different shaft diameters can be set and fixed by the second driven wheel set, thereby riding different sizes. For the purpose of aging treatment, regeneration treatment or side operation, the hair washing device can improve the cleaning performance of the brush wheel to the substrate, improve the yield of the σ port, and increase the production capacity of the production machine. The above and other objects, features and advantages of the present invention will become more apparent. [Embodiment]
圖，發明之—實施例料概處理裝置的外觀 ^裝適於對毛刷輪 給种，毛刷輪處理裝置所處理的毛刷 、目以一支為例’此毛刷輪處理裝置2GG也可以視 品未而增加單批次可處理的毛刷輪21 以此為限。請參考圖1Α及圖1Β ::料月並不 犯，且在本實施例中，毛^處理毛^輪210，旋轉軸 91 η αλ -bfe 4* ± . 處理裝置200是以毛刷輪 210的旋轉軸212為轴心，進行毛刷U0的相關作^ 8 AU〇8〇l〇9〇27680twf.doc/i ==如是老化處理作業或再生處理等，將於後 样體^續=圖1A與圖1B，毛刷輪處理裝置200包括 式軸承23G以及多個可調式軸承·。固定 多個可調式轴承240位於槽體220内，其中 二固可調式軸承24G相對於固定式麻 =212的軸線方向s延伸依序設置。如圖1B置二 ==一端2UA承靠於固定式軸承230上，而旋 :二的二:^ 右;ιίρ;二各可調式軸承240與固定式軸承230之間具 其、D2、D3,以因應使⑽不同世代(Generate) 〇的設置。舉例而言，對於五代(Gene她5) „板尺寸而言’其所使用之毛刷輪2ig長度例如實 ^為1100羞米或1300麓米，因此，如圖1B +的可調 式軸承24GA與叹式轴承23()之間 di，以提供五代機台中使用的毛刷輪21g進行處理作i 此外，圖汨中的可調式軸承24犯與固定式軸承23〇之間 計為六代(Generate 6)之玻璃基板所使用 之毛刷輪’長度’而可調式軸承2彻與固定式軸承23〇 之間的間距D3可以設計為七點五代(G_te 7取玻璃 基板所使狀毛概21〇長度。因此，本㈣ 理裝置雇可以將使用於不同世代之玻璃基板的毛^ 2H)整合於同1置來進行相關的處理作業，而不需針對 1325344 AU0801090 27680twf.doc/n 不同世代的毛刷輪21〇個別購入處理設備，因而節省製造 成本。此外\在實際應用層面上，本發明之毛刷輪處理裝 置200可以採離線方式作相關處理作業，不會影響生產機 台的生產時效，有助於產能的提昇。 • ® 2A與圖迅分別為本發明之一種毛刷輪處理裝置中 之可調式軸承的正視圖與側視圖。請同時參照圖2八與圖 2B，各可調式軸承24〇包括柱體242、多個第一從動輪Μ* • 以及第二從動輪組250。柱體242具有貫孔246,而旋轉軸 犯的第二端212B穿設於貫孔246内。第二從動輪組25〇 具有調整器252以及第二從動輪254，而多個第一從動輪 '244，第二從動輪254設置於柱體242上之貫孔246週邊， - 並’、第二^ °在本實施例中’由於旋轉轴210 巾穿射貫孔246的部分之轴徑等於與旋轉轴21()中被該些 從動輪爽持的部分之軸徑，因此第一從動輪244與第二從 動輪254之部分分別外露於貫孔246内。在其他實施例中， t穿射貫孔246之部份旋轉軸212的軸徑與承靠該些從動 輪之部份旋轉軸212的轴徑不同時，第一從動輪2料與第 二從動輪254也可以分別不外露於貫孔246内，本發明並 不以此為限。 ，繼續參照圖2A與圖2β，在第二從動輪組25〇中， 調正器252之％與第二從動輪254連結，另一端則樞設 於柱體242上，精此，第二從動輪組25〇可在柱體上 移動，第二從動輪組25〇依據旋轉轴212之轴徑，來決定 進入於貝孔246内的距離，以配合第一從動輪244對第二 1325344 AU08〇l〇9〇2768〇twf.doc/n 的固定程序時，可以吸收毛刷輪210的製造誤差，而順利 拆裝。 圖4A為本發明之毛刷輪處理裝置的一種應用示意 圖。請參照圖4A’毛刷輪處理裝置3〇〇更包括一位於槽體 220内的模擬基板270，而模擬基板270與毛刷輪接 抵。在本實施例中，模擬基板270例如是以直立的方式配 置於毛刷輪210旁，其中模擬基板270之材質可視線上機 台的待處理物而選用相同材質，其例如是玻璃基板或晶 圓，本發明以玻璃基板為實施範圍，但不以此為限。並且， 毛刷輪處理裝置300更可於毛刷輪21〇旁設置喷嘴28〇， 此噴嘴280適於提供一處理液至毛刷輪21〇上。舉例而言， 噴嘴280可以面朝毛刷輪21〇而設置，用以將處理液直接 噴灑於毛刷輪210上，如圖4A中的喷嘴280A。當然，喷 嘴280所提供的處理液亦可先儲存於一位於毛刷輪旁 的流體容置空間290中，而處理液再自流體容置空間29〇 中溢流(overflow)至毛刷輪21〇上，端視槽體22〇内空間、 毛刷輪210之纖毛特性以及使用製程特性而定。 在實際的應用層面上’毛刷輪處理裝置3〇〇可以針對 ，刷，210進行上線使用前的預老化處理，以維持毛刷輪 ，進行製程時的清洗效能穩定度，此時上述之噴嘴28〇所 ，供之處理液可以使用類似水或去離子水等清洗液。在另 :種應用中上’毛刷輪處理裝置雇亦可以針 ，，刷輪21〇進行再生處理，以延長毛刷輪21〇 ‘ ’叫低耗材費用，此時處理液可以使用藥液，例 如虱氧化鉀或其他適當藥液。 13 1325344 AU0801090 27680twf.doc/n 圄化馬奉發明之一種毛刷輪 整器的示意圖。請參照圖4B，、置中之壓入量調 板之壓合力道，毛刷輪處題置傷接觸模擬基 整器410,用以調整毛刷輪2 =擬=量調 之表面的距離，因而調整毛刷輪^ 莫f基板270 施加在模擬基板270之表的士旦 纖毛又力形變後所 敫哭41η -T盔，典城3表面的力1。舉例而言’壓入量哺 王0可為月塊412及螺桿414的線性移動機心人調 此滑塊412可移動地連結於螺桿414上 2構、、且合’ 於旋轉軸212 ’藉由滑塊412與螺桿414 ::㊁直 雜212的細相對於該模擬基^ 模擬輪相對於 J狀態不忍圖凊參照圖4C，革 =10E與模擬基板27()之間的接觸程度高因此壓合 k ’而毛刷輪210F與模擬基板謂之間的並無 此毛刷輪210F上的纖毛主要是藉由毛刷輪2_的 而相對於處理液轉動，以進行毛刷輪21〇的處理作業。 值得說明的是，請參照圖4B與圖1B，為了提升毛刷 輪210的處理效能，毛刷輪處理裝置2〇〇更可包括—驅動 馬達292,其耦接至毛刷輪21〇的第一端212八，用以驅使 毛刷輪210沿著旋轉軸212線來旋轉，因而提高毛刷輪21〇 =纖毛在在單位時間内受到模擬基板27〇單位面積的摩擦 次數。上述之驅動馬達292例如是經由一傳動機構（未^ 示）來耦接至毛刷輪210之第一端212A，而毛刷輪 14 1325344 AU0801090 27680twf.doc/n 254 :第二從動輪 256 :限位部 270 :模擬基板 280 :喷嘴 290 :流體容置空間 292 :驅動馬達 410 :壓入量調整器 412 :滑塊 414 :螺桿 d :位移調整量 D卜D2、D3 :間距 Pc、Pd :位置 S:軸線方向 W:毛刷輪之軸心相對於模擬基板之表面的距離The invention is the appearance of the apparatus for processing the apparatus. The apparatus is suitable for the brush wheel, and the brush brushed by the brush wheel processing device is taken as an example. The brush wheel processing device 2GG is also It is possible to increase the number of brush strokes 21 that can be handled in a single batch depending on the product. Please refer to FIG. 1A and FIG. 1Β: the material month is not guilty, and in the present embodiment, the hair processing wheel 210, the rotating shaft 91 η αλ -bfe 4* ± . The processing device 200 is the brush wheel 210 The rotating shaft 212 is the axis, and the relevant processing of the brush U0 is performed. 8 AU 〇 8 〇 〇 〇 〇 680 680 680 680 680 680 680 680 680 680 680 如 如 如 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = 1B, the brush wheel processing apparatus 200 includes a type of bearing 23G and a plurality of adjustable bearings. A plurality of adjustable bearings 240 are fixed in the trough body 220, wherein the two solid adjustable bearings 24G are arranged in sequence with respect to the axial direction s of the fixed hemp = 212. As shown in FIG. 1B, the second end = 2UA bears against the fixed bearing 230, and the second: 2: ^ right; ιίρ; between the two adjustable bearings 240 and the fixed bearing 230, D2, D3, In order to make (10) different generations (Generate) 〇 settings. For example, for the fifth generation (Gene she 5) „the size of the board', the length of the brush wheel 2ig used is, for example, 1100 shi or 1300 mm, so the adjustable bearing 24GA of Figure 1B + The sin-type bearing 23() is used to provide the brush wheel 21g used in the fifth-generation machine for processing. In addition, the adjustable bearing 24 in the figure is six generations between the fixed bearing and the fixed bearing 23〇 (Generate 6) The brush wheel 'length' used in the glass substrate and the distance D3 between the adjustable bearing 2 and the fixed bearing 23〇 can be designed to be 7:5 (G_te 7 takes the glass substrate to make the shape of the hair 21 〇Length. Therefore, this (4) device can be used to integrate the glass substrates used in different generations into the same processing for the relevant processing operations, without the need for 1325344 AU0801090 27680twf.doc/n different generations The brush wheel 21 〇 purchases the processing equipment individually, thereby saving manufacturing costs. In addition, on the practical application level, the brush wheel processing device 200 of the present invention can be used for offline processing, without affecting the production time of the production machine. To help with the production capacity • ® 2A and Tu Xun are respectively a front view and a side view of an adjustable bearing in a brush wheel processing apparatus of the present invention. Referring also to Figures 2-8 and 2B, each adjustable bearing 24 includes a cylinder 242 a plurality of first driven rims* and a second driven wheel set 250. The cylindrical body 242 has a through hole 246, and the second end 212B of the rotating shaft passes through the through hole 246. The second driven wheel set 25〇 The adjusting device 252 and the second driven wheel 254 are provided, and the plurality of first driven wheels '244 and the second driven wheel 254 are disposed on the periphery of the through hole 246 of the cylinder 242, and the second portion is in the embodiment. The shaft diameter of the portion of the rotating shaft 210 that passes through the through hole 246 is equal to the shaft diameter of the portion of the rotating shaft 21 that is held by the driven wheels, so the first driven wheel 244 and the second driven wheel 254 The portions are respectively exposed in the through holes 246. In other embodiments, when the shaft diameter of the portion of the rotating shaft 212 that penetrates the through hole 246 is different from the shaft diameter of the portion of the rotating shaft 212 that bears the driven wheels, The first driven wheel 2 and the second driven wheel 254 may not be exposed in the through hole 246 respectively, and the invention is not limited thereto. Referring to FIG. 2A and FIG. 2β, in the second driven wheel set 25〇, the % of the centralizer 252 is coupled to the second driven wheel 254, and the other end is pivotally mounted on the cylinder 242. The driven wheel set 25〇 can be moved on the cylinder, and the second driven wheel set 25〇 determines the distance into the hole 246 according to the shaft diameter of the rotating shaft 212 to match the first driven wheel 244 to the second 1325344 AU08. When the fixed program of 〇l〇9〇2768〇twf.doc/n can absorb the manufacturing error of the brush wheel 210, it can be smoothly disassembled. Fig. 4A is a schematic view showing an application of the brush wheel processing apparatus of the present invention. Referring to FIG. 4A, the brush wheel processing device 3 further includes a dummy substrate 270 located in the cavity 220, and the dummy substrate 270 is in contact with the brush wheel. In this embodiment, the dummy substrate 270 is disposed, for example, in an upright manner, adjacent to the brush wheel 210. The material of the analog substrate 270 is selected from the same material as the object to be processed on the line, such as a glass substrate or a wafer. The present invention is based on a glass substrate, but is not limited thereto. Moreover, the brush wheel processing device 300 can further provide a nozzle 28A adjacent to the brush wheel 21, which is adapted to provide a treatment liquid to the brush wheel 21A. For example, the nozzle 280 can be disposed facing the brush wheel 21 to spray the treatment liquid directly onto the brush wheel 210, such as the nozzle 280A in Fig. 4A. Of course, the treatment liquid provided by the nozzle 280 can also be stored in a fluid accommodating space 290 located beside the brush wheel, and the treatment liquid overflows from the fluid accommodating space 29〇 to the brush wheel 21 The upper end of the tank body 22, the bristles of the brush wheel 210, and the process characteristics are used. At the practical application level, the 'brush wheel treatment device 3〇〇 can be used for the pre-aging treatment before the on-line use of the brush and 210 to maintain the brush wheel and perform the cleaning performance stability during the process. In the 28th office, a cleaning solution such as water or deionized water can be used for the treatment liquid. In another application, the 'brush wheel treatment device can also be used for the needle, and the brush wheel 21〇 is used for regeneration treatment to extend the brush wheel 21〇' to call the low consumables cost. At this time, the treatment liquid can use the liquid medicine. For example, potassium bismuth oxide or other suitable liquid. 13 1325344 AU0801090 27680twf.doc/n A schematic diagram of a brush wheel inventor. Referring to FIG. 4B, the pressing force of the centering pressing amount adjusting plate, the brush wheel is in contact with the simulated base unit 410, and is used to adjust the distance of the surface of the brush wheel 2=wound=quantizing. Therefore, the brush roller is adjusted to apply the force on the surface of the dummy substrate 270 to the surface of the dummy substrate 270. For example, the pressing amount 0 can be a linear movement of the month block 412 and the screw 414. The slider 412 is movably coupled to the screw 414, and is coupled to the rotating shaft 212. The contact between the slider 412 and the screw 414 :: the two straight 212 is relatively high with respect to the analog base. With respect to the J state, referring to FIG. 4C, the degree of contact between the leather 10E and the dummy substrate 27 is high. Pressing k ' and the bristles on the brush wheel 210F between the brush wheel 210F and the dummy substrate are mainly rotated by the brush wheel 2_ with respect to the processing liquid to perform the brush wheel 21〇 Processing job. It should be noted that, referring to FIG. 4B and FIG. 1B , in order to improve the processing performance of the brush wheel 210 , the brush wheel processing device 2 may further include a driving motor 292 coupled to the brush wheel 21 〇 One end 212 8 is used to drive the brush wheel 210 to rotate along the line of the rotating shaft 212, thereby increasing the number of times the brush wheel 21 〇 = bristles are subjected to the friction per unit area of the simulated substrate 27 per unit time. The drive motor 292 described above is coupled to the first end 212A of the brush wheel 210 via a transmission mechanism (not shown), and the brush wheel 14 1325344 AU0801090 27680twf.doc/n 254: the second driven wheel 256: Limiting portion 270: analog substrate 280: nozzle 290: fluid accommodating space 292: driving motor 410: press-in amount adjuster 412: slider 414: screw d: displacement adjustment amount D D2, D3: pitch Pc, Pd: Position S: axis direction W: distance of the axis of the brush wheel from the surface of the dummy substrate
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