1324956 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種機械加工設備之誤差檢測裝置。 【先前技術】 請參閱第一圖，車床、銑床及磨床等機械加工設備1 一般 包括機台11、工作台13及切削裝置15等部件。該機台11用 於支撐該工作台13及切削裝置15。該工作台13可沿X或Y 方向移動地裝設於該機台11上，其用於固定待加工件20。該 切削裝置15包括一刀座151及至少一切削刀153,該刀座151 固設於該機台11上，該切削刀153可旋轉地裝設於該刀座151 上，該切削刀153用旋轉方式切削該工作台13上之待加工件 20 ° 加工時，待加工件20安裝於該機械加工設備1之工作台 13上，並啟動該機械加工設備1，此時該工作台13帶動待加 工件20沿X或Y方向移動，旋轉切削刀153於該待加工件20 上加工出所需之形狀或圖案。該待加工件20之加工精度取決 於多種因素，其中因該工作台13沿X方向之移動距離最大， 故工作台13之移動精度對待加工件20之加工精度影響最大。 隨著科技之發展，所有機械加工設備1均向高精度、高效 # 率方向發展。在進行超高速及高精度加工時，會常常不能及時 有效地偵測工作台13之移動誤差。如於移動初始階段不能及 時偵測該工作台13之移動誤差，就會影響該待加工件20之後 續加工精度。因不能及時有效地偵測工作台13之移動誤差， 故不能及時有效地糾正該工作台13之移動誤差。 【發明内容】 鑑於以上缺點，實有必要提供一種可及時偵測機械加工設 備之移動誤差，可提高加工精度之誤差檢測裝置。 一種機械加工設備之誤差檢測裝置，其包括一機械加工設 備、一光源、一第一反射鏡、一第二反射鏡及一光束感測裝置； 該機械加工設備包括一機台及裝設於該機台上之一工作台；該 1324956 光源裝設於該機台上；該第一反射鏡裝設於工作台上，與該光 源相對，接收來自該光源之光束；該第二反射鏡裝設於該機台 -上，與第一反射鏡相對設置；該光束感測裝置裝設於該機台 上，接收經二反射鏡之反射光束》 相較習知技術，所述機械加工設備之誤差檢測裝置因用光 束測定該工作台之移動誤差，故不會存在電子電路中之滯後現 象’可快速偵測該工作台之移動誤差，快速偵測誤差即可及時 糾正該誤差》又因該誤差檢測裝置設有相對之二反射鏡，故當 固定於工作台上之一反射鏡發生偏轉時，經二反射鏡反射該偏 φ 轉可放大至多倍並傳入該光束檢測器内，因此該光束檢測器可 偵測該工作台之微小偏轉，因此可以提高待加工件之加工精 度。 【實施方式】 請參閱第二圖，本發明之較佳實施例公開一種機械加工設 備之誤差檢測裝置3,其適用於車床、銑床、磨床等機械加工 設備’為方便理解此實施例用銑床進行說明。 機械加工設備之誤差檢測裝置3包括一銑床31、一光源 32、第一反射鏡33、第二反射鏡34及一光束檢測裝置35。 該銑床31包括機台311、工作台313及切削裝置315等 • 部件。該機台311用於支撐該工作台313及切削裝置315。該 工作台313可沿X或Y方向移動地裝設於該機台311上，其 用於固定待加工件30 ’為方便理解假設該工作台313只沿X 方向移動。該切削裝置315包括一刀座3151及至少一切削刀 3153，該刀座3151固設於該機台311上，該切削刀3153可旋 轉地裝設於該刀座3151上。加工時該工作台313於電機或手 動作用下沿X方向移動，旋轉之切削刀3153於該工作台313 上之待加工件30上切削出所需之輪廓。 該光源32設固定於該機台311上，與該工作台313之間 有一定距離’其向工作台313方向發射一準直光束。 第一反射鏡33係一平面反射鏡，其固設於該工作台313 上與該光源32相對之位置。當該工作台313沿X方向移動時， 1324956 帶動第一反射鏡33 —同沿χ方向移動。因第一反射鏡33與 該光源32相對，故該第一反射鏡33可接收該光源32發射之 線光束並反射。 第二反射鏡34亦係一平面反射鏡，其固定在機台311上， •與該第一反射鏡33平行相對件且間隔設置。當然亦可根據需 要將該第二反射鏡33固定於該其他地方。因該第二反射鏡34 與該第一反射鏡33平行相對，故其可接受該第一反射鏡33之 反射光束並再次反射。 該光束檢測器35係一可檢測線光束之微小偏轉之儀器， 其固疋於該機台311上，與第一反射鏡33相對之位置。該光 φ 束檢測器35接收經第一反射鏡33及第二反射鏡34多次反射 後之線光束’並通過外接顯示器顯示該線光束之偏轉情況。 請參閱第二圖’不啟動該銑床31時，該工作台313與X 方向平行，即第一反射鏡33與X方向平行，光源32發出之 線光束經第一反射鏡33及第二反射鏡34反射後，進入該光束 檢測器35内之指定位置，該光束檢測器35檢測不到光束之異 常情況。加工待加工件30時，該工作台313帶動該待加工件 30 —同沿X方向移動，如該工作台313沿平行於χ之方向移 動，該誤差檢測裝置3之光束線路亦不會改變，故該光束檢測 器35依然檢測不到光束之異常情況。 請參閱第四圖，如該工作台313沿X方向移動時發生偏 轉’該誤差檢測裝置3之光束線路就會改變。假設該工作台 313相對χ方向偏轉0角’固定於該工作台313上之第一反射 鏡33亦會相對χ方向（或相對第二反射鏡34)偏轉0角。根據 幾何原理可得知，此時該光源32之線光束於該第一反射鏡33 上之入射角α ι=αα+0，其中α。係該工作台313與X方向平 行’即第一反射鏡33與X方向平行時之光束入射角（參見第三 圖）。同理可得出’第一反射鏡33之反射光束於第二反射鏡34 上反射時，第一反射鏡33之反射光束於第二反射鏡34上之入 射角α 2= α 1+ 0，即入射角α 2= α。+2 0。 由此可推出，第一反射鏡33相對第二反射鏡34偏轉θ角 時’光束於該光束檢測器35上之最終入射角〇； f α。+ θ xN， 其中N為光束於二反射鏡33及34上之總反射次數。因該工 作台313相對X方向發生偏轉Θ角時，最終於該光束檢測器 • 35 ^偏轉Νχ6>角，故偏轉0角被放大至Ν倍，因此該光束檢 ，器35及時有效之偵測到該工作台313之微小偏轉。因此可 藉由誤差修正裝置糾正該工作台313之移動誤差，以此提高待 加工件30之加工精度。 因該誤差檢測裝置3用光束之反射測定該工作台313之移 動誤差，故不會存在電子電路中之滯後現象，可快速偵測該工 作台313之移動誤差，快速偵測誤差即可及時糾正該該工作台 313之移動誤差。又因該誤差檢測裝置3設有相對之二反射鏡 # 33及34,故當固定於工作台313上之一反射鏡33發生偏轉 時^經二反射鏡33及34反射該偏轉情況可放大至多倍並傳入 該光束檢測器35内，因此該光束檢測器35可偵測該工作台 313之微小偏轉’因此可以提高待加工件之加工精度。 當然，當該工作台313沿Υ方向移動時，亦可採用類似 方法對該工作台313進行監測。此時，只須調整二反射鏡33、 34及該光源32位置即可。亦可採用另一組光源及反射鏡監測 該工作台313沿Υ方向之移動。 綜上所述，本發明確已符合發明專利之要件，爰依法提出 專利申請。惟，以上所述者僅為本發明之較佳實施方式，本發 φ 明之範圍並不以上述實施方式為限’舉凡熟習本案技藝之人士 援依本發明之精神所作之等效修飾或變化，皆應涵蓋於以下申 請專利範圍内。 【圖式簡單說明】 第一圖係習知技術機械加工設備之誤差檢測裝置之立體圖； 第二圖係本發明較佳實施例機械加工設備之誤差檢測裝置之 立體圖； 第二圖係本發明較佳實施例機械加工設備之誤差檢測裝置處 於理想狀態之光路示意圖； 第四圖係本發明較佳實施例機械加工設備之誤差檢測裝置處 1324956 於誤差狀態之光路示意圖。 【主要元件符號說明】 誤差檢測裝置 3 待加工件 30 銑床 31 機台 311 工作台 313 切削裝置 315 刀座 3151 切削刀 3153 光源 32 第一反射鏡 33 第二反射鏡 34 光束檢測裝置 351324956 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to an error detecting device for a machining apparatus. [Prior Art] Referring to the first drawing, the machining equipment 1 such as a lathe, a milling machine, and a grinding machine generally includes components such as a machine table 11, a table 13, and a cutting device 15. The machine table 11 is for supporting the table 13 and the cutting device 15. The table 13 is movably mounted on the machine table 11 in the X or Y direction for fixing the workpiece 20 to be processed. The cutting device 15 includes a tool holder 151 and at least one cutting blade 153. The tool holder 151 is fixed on the machine table 11. The cutting blade 153 is rotatably mounted on the tool holder 151. The cutting blade 153 is rotated. In the manner of cutting the workpiece to be processed on the table 13 by 20°, the workpiece 20 to be machined is mounted on the table 13 of the machining device 1 and the machining device 1 is activated. At this time, the table 13 drives the workpiece to be processed. The member 20 is moved in the X or Y direction, and the rotary cutter 153 is machined into the desired shape or pattern on the workpiece 20. The machining accuracy of the workpiece 20 depends on various factors. Since the movement distance of the table 13 in the X direction is the largest, the movement accuracy of the table 13 has the greatest influence on the machining accuracy of the workpiece 20. With the development of technology, all machining equipment 1 is developing in the direction of high precision and high efficiency. When performing ultra-high speed and high-precision machining, it is often impossible to detect the movement error of the table 13 in a timely and effective manner. If the movement error of the table 13 is detected in the initial stage of the movement, the machining accuracy of the workpiece 20 will be affected. Since the movement error of the table 13 cannot be detected in time and effectively, the movement error of the table 13 cannot be corrected in time and effectively. SUMMARY OF THE INVENTION In view of the above disadvantages, it is necessary to provide an error detecting device that can detect the movement error of a machining device in time and improve the machining accuracy. An error detecting device for a machining device, comprising: a machining device, a light source, a first mirror, a second mirror and a beam sensing device; the machining device comprises a machine and is mounted thereon a working table on the machine; the 1324956 light source is mounted on the machine; the first mirror is mounted on the worktable, opposite to the light source, receiving a light beam from the light source; the second mirror is mounted On the machine-top, opposite to the first mirror; the beam sensing device is mounted on the machine and receives the reflected beam through the two mirrors. Compared with the prior art, the error of the machining equipment The detecting device uses the light beam to measure the movement error of the working table, so there is no hysteresis in the electronic circuit. The motion error of the working table can be quickly detected, and the error can be corrected in time by quickly detecting the error. The detecting device is provided with two opposite mirrors, so that when one of the mirrors fixed on the table deflects, the deflected by the two mirrors can be amplified by a multiple and transmitted into the beam detector. So that the detector can detect a minute beam deflection of the stage, to be thus possible to improve the machining accuracy of the workpiece. [Embodiment] Please refer to the second figure. The preferred embodiment of the present invention discloses an error detecting device 3 for a machining device, which is suitable for machining equipment such as a lathe, a milling machine, a grinding machine, etc. 'For the purpose of understanding this embodiment, a milling machine is used for facilitating understanding of this embodiment. Description. The error detecting device 3 of the machining apparatus includes a milling machine 31, a light source 32, a first mirror 33, a second mirror 34, and a beam detecting device 35. The milling machine 31 includes components such as a machine table 311, a table 313, and a cutting device 315. The machine table 311 is used to support the table 313 and the cutting device 315. The table 313 is movably mounted on the table 311 in the X or Y direction for fixing the workpiece 30' to facilitate the understanding that the table 313 is only moved in the X direction. The cutting device 315 includes a tool holder 3151 and at least one cutting blade 3153. The tool holder 3151 is fixed to the machine table 311. The cutting blade 3153 is rotatably mounted on the tool holder 3151. During processing, the table 313 is moved in the X direction by the motor or the hand, and the rotating cutter 3153 cuts the desired contour on the workpiece 30 on the table 313. The light source 32 is fixed to the machine 311 and has a certain distance from the table 313. It emits a collimated beam in the direction of the table 313. The first mirror 33 is a plane mirror that is fixed to the table 313 at a position opposite to the light source 32. When the table 313 moves in the X direction, the 1324956 drives the first mirror 33 to move in the same direction. Since the first mirror 33 is opposed to the light source 32, the first mirror 33 can receive the line beam emitted by the light source 32 and reflect it. The second mirror 34 is also a planar mirror that is fixed to the machine 311, and is disposed parallel to the first mirror 33 and spaced apart. Of course, the second mirror 33 can also be fixed to the other places as needed. Since the second mirror 34 is parallel to the first mirror 33, it can receive the reflected beam of the first mirror 33 and reflect it again. The beam detector 35 is an instrument that detects a slight deflection of the line beam and is fixed to the machine 311 at a position opposite the first mirror 33. The optical φ beam detector 35 receives the line beam 'reflected by the first mirror 33 and the second mirror 34 a plurality of times and displays the deflection of the line beam through an external display. Referring to the second figure, when the milling machine 31 is not activated, the table 313 is parallel to the X direction, that is, the first mirror 33 is parallel to the X direction, and the line beam emitted by the light source 32 passes through the first mirror 33 and the second mirror. After reflection 34, it enters a specified position within the beam detector 35, and the beam detector 35 does not detect an abnormality of the beam. When the workpiece 30 is to be processed, the table 313 moves the workpiece 30 to move in the X direction. If the table 313 moves in a direction parallel to the crucible, the beam path of the error detecting device 3 does not change. Therefore, the beam detector 35 still does not detect the abnormality of the beam. Referring to the fourth figure, if the table 313 is moved in the X direction, the deflection occurs. The beam path of the error detecting device 3 changes. Assuming that the table 313 is deflected at a 0 angle with respect to the x-direction, the first mirror 33 fixed to the table 313 is also deflected by 0 degrees with respect to the x-direction (or relative to the second mirror 34). According to the geometric principle, the incident angle of the line beam of the light source 32 on the first mirror 33 is α ι = αα + 0, where α. The stage 313 is parallel to the X direction, i.e., the incident angle of the light beam when the first mirror 33 is parallel to the X direction (see the third drawing). Similarly, when the reflected beam of the first mirror 33 is reflected on the second mirror 34, the incident angle of the reflected beam of the first mirror 33 on the second mirror 34 is α 2 = α 1 + 0, That is, the incident angle α 2 = α. +2 0. It is thus possible to derive the final incident angle 〇 of the light beam on the beam detector 35 when the first mirror 33 is deflected by the angle θ with respect to the second mirror 34; f α . + θ xN, where N is the total number of reflections of the beam on the two mirrors 33 and 34. When the table 313 is deflected with respect to the X direction, the beam detector is finally deflected by 光束6>, so the deflection 0 is enlarged to Ν times, so the beam detector 35 is detected in time and effectively. A slight deflection to the table 313. Therefore, the movement error of the table 313 can be corrected by the error correcting means, thereby improving the machining accuracy of the workpiece 30. Since the error detecting device 3 measures the movement error of the table 313 by the reflection of the light beam, there is no hysteresis in the electronic circuit, and the movement error of the table 313 can be quickly detected, and the error can be quickly corrected by detecting the error quickly. The movement error of the table 313. Moreover, since the error detecting device 3 is provided with the opposite mirrors #33 and 34, when the mirror 33 fixed to the table 313 is deflected, the deflection can be amplified by the two mirrors 33 and 34. The beam detector 35 is doubled and transmitted into the beam detector 35, so that the beam detector 35 can detect the slight deflection of the table 313', thereby improving the processing accuracy of the workpiece to be processed. Of course, when the table 313 is moved in the x-direction, the table 313 can be monitored in a similar manner. At this time, it is only necessary to adjust the positions of the two mirrors 33, 34 and the light source 32. Another set of light sources and mirrors can also be used to monitor the movement of the table 313 in the x-direction. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiments, and those skilled in the art will be able to make equivalent modifications or variations in accordance with the spirit of the present invention. All should be covered by the following patent application. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a perspective view of an error detecting device of a conventional mechanical machining device; the second drawing is a perspective view of an error detecting device of a mechanical processing device according to a preferred embodiment of the present invention; The optical path diagram of the error detecting device of the mechanical processing equipment in the preferred embodiment is in an ideal state; the fourth figure is a schematic diagram of the optical path of the error detecting device at 1324956 in the error state of the preferred embodiment of the present invention. [Main component symbol description] Error detection device 3 To-be-machined part 30 Milling machine 31 Machine table 311 Table 313 Cutting device 315 Tool holder 3151 Cutter 3153 Light source 32 First mirror 33 Second mirror 34 Beam detection device 35
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