丄以3076丄 to 3076
九、發明說明： 【發明所屬之技術領域】 本發明是關於一種具磁性預壓力的無軸向限制式超音 波馬達，尤指-種設有磁性^件或磁力產生裝置，而可以 增加可變軸向可動件對於壓電元件的預壓力 並能調控磁 作用的範圍’其藉由磁性作用而形成一種無軸向限制式 超音波馬達結構。 【先前技術】 按，超音波馬達設計，可利用壓電元件輸入電壓會產 生變形的特性，使其能產生超音波頻率（約為20kHz以上 的頻率）的機械振動，再透過摩擦驅動的機構設計，使環 狀排列的壓電元件能對於預壓其上的轉子產生推移旋轉， 或使直線排列的壓電元件能對於預壓其上的物體推移而產 生直線運動，其對於壓電元件輸入電壓，能使壓電元件變 I伸縮的大小雖僅為數微米（β m )，但因每秒伸縮能達 到數十萬次，使每秒可移動物體達數厘米（cm )，故能符 合現今產業界’相關科技產品需求，例如照相機、手錶、 汽車、醫療設備、航太工業、精密定位設備、機器人、微 型機械等領域。 有別於上述平面旋轉或直線運動的馬達結構，則是可 在空間中進行萬向旋轉的球形馬達設計，而在已知的科技 育料來源中顯示’該種球形馬達的中心是一顆中空的球 體’球體中排列了八十個永久磁鐵，該球體裝設在—個由 1323076 釦Λ2日1¾稍貝| 十六個圓形電磁鐵所構成的錐形基座上，只要驅動二個以 M 吸住球體中某幾個永久磁鐵，而將這 個球體旋轉及固定在某個特定位置。IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a non-axially-restricted ultrasonic motor with magnetic pre-pressure, and more particularly to a magnetic device or a magnetic force generating device, which can be increased in variable The axially movable member is pre-stressed to the piezoelectric element and is capable of regulating the range of magnetic action. It forms a non-axially constrained ultrasonic motor structure by magnetic action. [Prior Art] According to the design of the ultrasonic motor, the input voltage of the piezoelectric element can be deformed, so that it can generate mechanical vibration of the ultrasonic frequency (frequency of about 20 kHz or higher), and then the structure of the mechanism driven by the friction. The annularly arranged piezoelectric element can be rotated for preloading the rotor thereon, or the linearly arranged piezoelectric element can be linearly moved for preloading the object thereon, and the input voltage to the piezoelectric element The size of the piezoelectric element can be reduced to a few micrometers (β m ), but it can reach hundreds of thousands of times per second, and the movable object can reach several centimeters (cm) per second, so it can meet the current industry. The world's demand for related technology products, such as cameras, watches, automobiles, medical equipment, aerospace industry, precision positioning equipment, robots, micro-machinery and other fields. A motor structure that is different from the above-mentioned plane rotation or linear motion is a spherical motor design that can perform universal rotation in space. In the known technology breeding source, it is shown that the center of the spherical motor is a hollow. Eighty permanent magnets are arranged in the sphere's sphere. The sphere is mounted on a conical base consisting of 1323076 buckles on the 2nd 13⁄4 billet | sixteen round electromagnets. M Sucks a few permanent magnets in the sphere and rotates and fixes the sphere to a specific position.
另有一種有別於上述磁力吸斥原理推動球體旋轉的球 形馬達結構，則是利用壓電元件所產生的超音波原理驅動 球體旋轉’其見於日本東京農工大學所研究發明的球形超 音波馬達，該球型超音波馬達是由四個金屬圓盤挾持著4 釐米的球形轉子，制二組圓盤與球形轉子相接部位所設 置的梳齒型壓電元件通入高頻電壓’使梳齒型壓電元件產 生波浪一般的振動，而能推轉球形轉子進行空間中的旋 動作。 上述球形超音波馬達雖具有安靜、保持扭矩大而能快 速精確定位，以及在低轉速時有較大的輸出轉矩之特性， 惟其作為摩擦推轉的預壓力，並無法進行調控，且其穩定 性不足，而在旋轉操作上，即難以提昇整體性能。 【發明内容】 本發明设S十目的，在於提供一種「具磁性預壓力的無 軸向限制式超音波馬達」，其具有一固定件，及一設置於 固定件中的可變軸向可動件，於固定件或可變軸向可動件 的相對表面上佈設壓電元件及磁性元件，藉由磁性元件的 磁性作用，能使可變軸向可動件吸附在固定件表面，而能 增加可變轴向可動件與壓電元件間的預壓力，其並可再搭 配線圈的繞設，使電磁力所產生的預壓力能調整範圍，= 5 1323076 I平月日贷. 讓二變軸向可動件與固定件間所需之正向壓力’於任何時V J·旁月b調整出没汁需求的範圍’故能癌保可變軸向可動件 、疋件間的摩擦力具有良好的穩定性，其藉由磁性作 :，可增加壓電元件的預壓力，使其旋轉操作能合乎精確 需求，以及效能可充分發揮’並且，利用磁力所提供的正 向壓力對於空間中的可變軸向可動件或固定件表面的控制 作用’而能打破-轴只控一維的思想，使其更具空間旋轉 之機動性’形成-種無拍向限制的超音波馬達結構。 【實施方式】 配合參看第-、二、三圖所示，本發明「具磁性預壓 力的無軸向限制式超音波馬達」具有一固定件（丄〇)， 及一設置於固定件（10)中的可變轴向可動件（2〇)，Another spherical motor structure that is different from the above-mentioned magnetic repulsion principle to promote the rotation of the sphere is to use the ultrasonic principle generated by the piezoelectric element to drive the rotation of the sphere, which is a spherical ultrasonic motor invented by the Tokyo University of Agriculture and Technology in Japan. The spherical ultrasonic motor is a spherical rotor with a 4 cm holding by four metal discs, and a comb-shaped piezoelectric element provided at a portion where the two sets of discs and the spherical rotor are connected is connected to a high-frequency voltage to make the comb teeth The piezoelectric element generates a wave-like vibration and can push the spherical rotor to perform a swirling motion in the space. The spherical ultrasonic motor described above has the characteristics of being quiet, maintaining a large torque and being able to be quickly and accurately positioned, and having a large output torque at a low rotational speed, but as a pre-pressure of the frictional push, it cannot be regulated and stabilized. Insufficient sex, and in the rotation operation, it is difficult to improve the overall performance. SUMMARY OF THE INVENTION The present invention is directed to providing a "magnetic preload-free axially-limited ultrasonic motor" having a fixing member and a variable axial movable member disposed in the fixing member. The piezoelectric element and the magnetic element are disposed on the opposite surfaces of the fixing member or the variable axial movable member, and the magnetic force of the magnetic member enables the variable axial movable member to be adsorbed on the surface of the fixing member, thereby increasing the variable Pre-pressure between the axial movable member and the piezoelectric element, which can be further matched with the winding of the coil, so that the pre-pressure generated by the electromagnetic force can be adjusted, = 5 1323076 I flat monthly loan. Let the two change axially moveable The required forward pressure between the piece and the fixture is at any time VJ·side month b adjusts the range of the demand for no juice. Therefore, the friction between the variable axial movable member and the member can be stabilized. It is magnetically: it can increase the pre-stress of the piezoelectric element, so that its rotation operation can meet the precise requirements, and the performance can be fully utilized' and the positive pressure provided by the magnetic force can be moved to the variable axial direction in the space. Piece or fixed The control effect of the surface of the piece can be broken - the axis only controls the one-dimensional idea, making it more maneuverable in space rotation. Forming - an ultrasonic motor structure without a limit on the direction of the shot. [Embodiment] With reference to the first, second, and third figures, the "non-axially-restricted ultrasonic motor with magnetic pre-pressure" of the present invention has a fixing member (丄〇), and a fixing member (10). Variable axial movable member (2〇),
固定件（10)及可變軸向可動件（20)皆由導磁材料 所製成，@可變軸向可動件（20)可如圖上所示之球形 狀，也可僅部份區域呈球形狀之型態，於固定件（i 〇 ) 中形成一容置空間（16)，可變轴向可動件（2〇)設 置於容置空間（16)中’且於固定件（1〇)及可變軸 向可動件（20)的相對端面上佈設壓電元件（3〇)及 磁性元件（40)，磁性元件（40)可吸引可變轴向可 動件（20)，而能增加可變轴向可動件（2〇)對於壓 電元件（30)的預壓力。 所述之磁性元件（4 〇 )的高度低於壓電元件（3 〇 )， 而與可變轴向可動件（20)表面形成—間隙。 6 1323076The fixing member (10) and the variable axial movable member (20) are made of a magnetic conductive material, and the @variable axial movable member (20) may have a spherical shape as shown in the figure, or only a partial region. In the shape of a ball, an accommodating space (16) is formed in the fixing member (i 〇), and the variable axial movable member (2 〇) is disposed in the accommodating space (16) 'and the fixing member (1) And a piezoelectric element (3〇) and a magnetic element (40) are disposed on opposite end faces of the variable axial movable member (20), and the magnetic element (40) can attract the variable axial movable member (20), and can The pre-pressure of the variable axial movable member (2〇) for the piezoelectric element (30) is increased. The magnetic element (4 〇 ) has a lower height than the piezoelectric element (3 〇 ) and forms a gap with the surface of the variable axial movable member (20). 6 1323076
上述固定件（10)形成支架狀，容置空間（16) 即成型於其中，該固定件（1 0 )具有一組相對的支架（1 1)，於二支架（11)中設置一轴桿（13)，軸桿 3)末端設置另一組相對交錯的支架（14)，二組支架 (1 1 } (14)末端設置架板（12) (15)，二組 相對的架板（12) (15)形成圓弧狀，使可變軸向可 動件（20)可設置於二組架板（12) (15)之間， 又，架板（12) (15)表面設置巴肋（121)而區 隔成中間為固定座（122)(152)及兩側為定仅座 (123) (153)，於固定座（122) (152) 令設置壓電元件（30)，壓電元件（3〇)表面與可變 軸向可動件（20)接觸’ a電元件（3〇)可通入高頻 電壓使其產生超音波振動而能推動可變轴向可動件j 2 〇)在固定件（10)的容置空間（16)中旋轉。 上述磁性元件（4 〇 )設置於架板（1 2 ) (15) 表面的定位座（1 2 3 ) ( 1 5 3 )中，而由於固定件（1 〇 )及可變軸向可動件（2 ◦)是以導磁材料所製成，故 可變軸向可動2 〇 )能受磁性元件（4 〇 )之磁性作 用，而形成更大的正向壓力抵壓於壓電元件（3〇)，亦 即’除了可變軸向可動件（2〇)本身重量對於壓電元件 (30)所構成的預壓力以外，更因磁性元件的 磁性作用，而能増加可變軸向可動件（2 〇 )抵壓於壓電 元件（3 0 )表面之預壓力’因此，本發明設計，可利用 壓電元件（3 0)所產生的超音波振動，以及壓電元件㈠ 7 1323076 γ〇·> 0)與可變轴向可動件（20)間，以磁性元件（ 磁性作用所形成的穩定預愿 0)能受>1電元件（30)稃…變軸向可動件（2 卞^ J υ)穩疋推轉，故能充分 音波馬達應有效能。 -充刀的發揮超 本發明設計亦可呈臥式型式，使二組架板（ =分別位於可變Μ可動件上下端及左右兩側， :可以利用磁性元#(4〇)磁性作用所產生的預塵力， 向了動件（20)能在（1〇)@定件的容置空 6)旋轉作動，來抵抗可變軸向可動件向 下重力’另本發明可變軸向可動#(2〇)之設計 均由導磁材料-體製成，也可於非導磁材料之周緣再包覆 一導磁材料製成之外殼，更可僅於旋轉作動區間之表面為 導磁材料即可’藉此藉由不同型態之可變軸向可動件（2 〇)，均可與磁性元件（4〇)產生磁性作用。 又本發明為達成可調控預壓力目的，可在支架（1 1) (14)上繞設線圈（5〇)，或在轴桿（13)上 繞設線圈，如第四圖所示，使通入電源時 能經由支架（…及架板（15)進入可變轴向= (2 0 )，及經由鄰側架板（工2 )、支架（工工）而形 成磁力的封閉迴路，藉此設計，而可以線圈（5 〇 )繞 設的匝數及通入的電流量大小去調整電磁力，使可變軸向 可動件（20)被磁吸抵靠於壓電元件（3〇)的預壓力 能被控制在所需之正向壓力的範圍中，而讓超音波馬達的 驅動更為穩定’以確保其應有效能可充分發揮。 1323076 :;合：看第五圖及第六圖所示，其係本發明 具有一固定件（7〇)，及1置於固定 件（’υ)中的可變轴向 件（9 0)，固定件（7 〇) 形成^有容置空間（73)的碗狀結構，以件（7〇) 及可變軸向可動件（90)皆為導磁材料所製成，於固定 件（*7〇)中形成一容置空門/ (-7 〇 \ η Α , 直卫間（73)，可變軸向可動件 、9 〇 )設置於容置空間（7 3 )中，於固定件（7 〇 ) 與可變轴向可動件（9 〇)的相對表面上佈設壓電元件（8 〇)及磁性元件（81)，磁性元件（81)能吸引可變 轴向可動件（9 〇 )。 此一型式的超音波馬達，為達成可調控預壓力目的， 可在固定#(70)底端設置一軸桿（71)，並於轴桿 (71)上繞設線圈（72)，使通入電源所產生的電磁 力能在固定件（70)的容置空$ (73：)中產生―吸引 可變軸向可動件（90)的電磁極性，而讓可變軸向可動 件（9 0)能更為穩定的吸附在固定件（7〇)的容置空 間（73)中增加其預壓力，藉此設計，而可以線圈 2 )繞設的匝數及通入電流量大小去調整磁力，使可變軸 向可動件（9 0 )藉由磁性作用抵靠於壓電元件) 的預壓力能被控制在所需之正向壓力的範圍中，而讓超音 波馬達能充分發揮其應有效能，並且，利用磁力所提供的 正向壓力對於空間中的可變軸向可動件或固定件表面的控 制作用，而能打破一軸只控一維的思想，使可變軸向可動 件（90)能在容置空間（7 3)中依磁力的調整，而能 9 1323076 am 機動性且無軸向限制的加以轉動。 配合參看第七圖所示，竟间 ” u樣具有一固定件（7 〇 )， 以及一設置於固定件（γ 〇 )中 υ )中的可變軸向可 固定件（7 0 )形成碗狀結構， 件（9 WL1疋件（7〇)及可變軸 向可動件（90)皆為導磁材料所制α ； ^ η、^ ㈣材枓所製成，並於固定件（7 〇)中形成一容置空間（73、 3)，可變轴向可動 （go) 設置於容置空間（7 3 )中 動件（9。) 固疋件（70)與可變轴The fixing member (10) is formed in a bracket shape, and the accommodating space (16) is formed therein. The fixing member (10) has a pair of opposite brackets (1 1), and a shaft is disposed in the two brackets (11) (13), the other end of the shaft 3) is provided with another set of relatively staggered brackets (14), and the two sets of brackets (1 1 } (14) are provided with bracket plates (12) (15), and two sets of opposite brackets (12) (15) forming an arc shape such that the variable axial movable member (20) can be disposed between the two sets of the frame plates (12) (15), and the surface of the frame plate (12) (15) is provided with the ribs ( 121) is divided into a fixed seat (122) (152) in the middle and a seat (123) (153) on both sides, and a piezoelectric element (30) is arranged on the fixed seat (122) (152). The surface of the component (3〇) is in contact with the variable axial movable member (20). The electrical component (3〇) can pass a high-frequency voltage to generate ultrasonic vibration and can push the variable axial movable member j 2 〇) Rotating in the accommodating space (16) of the fixing member (10). The above magnetic element (4 〇) is disposed in the positioning seat (1 2 3 ) (1 5 3 ) on the surface of the shelf plate (1 2 ) (15), and due to the fixing member (1 〇) and the variable axial movable member ( 2 ◦) is made of a magnetically permeable material, so the variable axial movable 2 〇 can be magnetically affected by the magnetic element (4 〇), and a larger forward pressure is formed to resist the piezoelectric element (3〇) ), that is, in addition to the pre-pressure formed by the weight of the variable axial movable member (2〇) on the piezoelectric element (30), the variable axial movable member can be added due to the magnetic action of the magnetic element ( 2 〇) against the pre-pressure of the surface of the piezoelectric element (30). Therefore, the present invention is designed to utilize the ultrasonic vibration generated by the piezoelectric element (30), and the piezoelectric element (1) 7 1323076 γ〇· > 0) Between the variable axial movable member (20) and the magnetic element (stabilized expectation 0 formed by magnetic action) can be affected by the >1 electrical component (30) 变...the axial movable member (2 卞^ J υ) Steady turn, so the full sound motor should be effective. - The function of the filling knife is super-invented. The design of the invention can also be in the horizontal type, so that the two sets of frame plates (= are respectively located at the upper and lower ends of the variable Μ movable member and the left and right sides: : Magnetic element #(4〇) magnetic action can be utilized The generated pre-dusting force is rotated to the movable member (20) in the (1〇)@piece's accommodation space 6) to resist the variable axial movable member downward gravity'. The design of the movable #(2〇) is made of a magnetically permeable material, or it can be coated with a magnetically permeable material on the periphery of the non-magnetically permeable material, and can be guided only on the surface of the rotating operation section. The magnetic material can be used to magnetically interact with the magnetic element (4〇) by means of different types of variable axial movable members (2 〇). Further, in order to achieve the purpose of adjustable pre-stress, the coil (5〇) may be wound around the bracket (1 1) (14), or the coil may be wound on the shaft (13), as shown in the fourth figure. When the power is turned on, it can enter the variable axis = (2 0 ) via the bracket (... and the shelf (15), and the closed circuit that forms the magnetic force via the adjacent side frame (work 2) and the bracket (worker). In this design, the electromagnetic force can be adjusted by the number of turns of the coil (5 〇) and the amount of current flowing, so that the variable axial movable member (20) is magnetically attracted to the piezoelectric element (3〇). The pre-pressure can be controlled in the range of the required forward pressure, and the drive of the ultrasonic motor is more stable 'to ensure that it can be fully utilized. 1323076 :; He: see the fifth and sixth As shown in the figure, the present invention has a fixing member (7〇), and a variable axial member (90) placed in the fixing member ('υ), and the fixing member (7 〇) is formed. The bowl-shaped structure of the space (73) is made of a magnetically conductive material (7〇) and a variable axial movable member (90), and an accommodation empty door is formed in the fixing member (*7〇). -7 \ η Α , between the straight guard (73), the variable axial movable member, 9 〇) is placed in the accommodating space (7 3 ), in the fixing member (7 〇) and the variable axial movable member (9 〇) The opposite surface is provided with a piezoelectric element (8 〇) and a magnetic element (81), and the magnetic element (81) can attract a variable axial movable member (9 〇). This type of ultrasonic motor achieves a controllable pre-control For pressure purposes, a shaft (71) can be placed at the bottom of the fixed #(70), and a coil (72) can be wound around the shaft (71) so that the electromagnetic force generated by the power supply can be applied to the fixing member (70). The tolerance of the space $(73:) produces the electromagnetic polarity of the attracting variable axial movable member (90), and allows the variable axial movable member (90) to be more stably adsorbed on the fixing member (7〇). The pre-stress is increased in the accommodating space (73), and the design can be used to adjust the magnetic force by the number of turns of the coil 2) and the amount of current flowing, so that the variable axial movable member (90) can be used. The pre-pressure of the magnetic action against the piezoelectric element can be controlled in the range of the required forward pressure, so that the ultrasonic motor can fully exert its effective energy, and By using the positive pressure provided by the magnetic force to control the variable axial movable member or the surface of the fixed member in the space, the idea of only one-dimensional control of one axis can be broken, so that the variable axial movable member (90) can The accommodating space (7 3) is adjusted according to the magnetic force, and can be rotated by 9 1323076 am maneuverability without axial limitation. Referring to the seventh figure, the actual "u sample has a fixing member (7 〇), and a variable axially fixable member (70) disposed in the fixing member (γ 〇) forms a bowl. The structure, the piece (9 WL1 element (7〇) and the variable axial movable piece (90) are made of α; ^ η, ^ (4) material made of magnetically permeable material, and fixed parts (7 〇 a accommodating space (73, 3) is formed, and the variable axial movable (go) is disposed in the accommodating space (7 3 ), the movable member (9.) the fixed member (70) and the variable shaft
°可動件（90) @相對表面上佈設壓電元件及 磁性元件（81)，其盥第丄圄 .,Q Λ , '、第，、圖所不之差別’是將壓電元 件C 8 0 )及磁性元件（只1、<里+ η、± 1干（si)没置在可變軸向可動件（θ U )表面。 另外’壓^件（8〇)及磁性元件（8ι)的佈設， 亦可將壓電元件（8 ◦)設置於可變軸向可動# ( 9 〇 ) 表面'磁性元件（81)設置於固定…0)的容置空 2 (73)表面，或者，是將壓電元件（8〇)設置於固 〇)的谷置空間（73)表面、磁性元件（81) ，置於可變軸向可動件（9…面上，而同樣可透過固 疋件（70)底端所設置的軸桿（71)，以及軸桿（7 1)上所繞設的線圈（72) &數及通人電流量大小去調 整磁力：冑可變軸向可動件（9〇)藉由磁性作用而抵靠 於壓電7G# ( 8 〇 )的預壓力能被控制在所需之正向壓力 的範圍Φ，Q , 且讓球形超音波馬達能充分發揮其應有效能， 藉此設計，亦如前述一般，可打破一轴控一維的思想，使 可變軸向可動# (9〇)能在容置空間（73)中依磁力° Movable member (90) @The piezoelectric element and the magnetic element (81) are arranged on the opposite surface, and the difference between the second, the second, the ', the first, the figure is the piezoelectric element C 8 0 ) and magnetic components (only 1, < 里 + η, ± 1 dry (si) are not placed on the surface of the variable axial movable member (θ U ). In addition, 'pressure parts (8 〇) and magnetic elements (8 ι) For the layout, the piezoelectric element (8 ◦) can also be placed on the variable axial movable # (9 〇) surface. The magnetic element (81) is placed on the surface of the fixed space 2 (73) of the fixed...0), or The piezoelectric element (8〇) is disposed on the surface of the valley space (73) of the solid foundation, and the magnetic element (81) is placed on the variable axial movable member (9..., and the same through the solid member) (70) The shaft (71) provided at the bottom end, and the coil (72) and the number of currents on the shaft (7 1) and the amount of current applied to adjust the magnetic force: 胄 variable axial movable member (9〇) The pre-pressure against the piezoelectric 7G# (8 〇) by magnetic action can be controlled to the range of required forward pressures Φ, Q, and the spherical ultrasonic motor can fully exert its response. Effective energy, designed by this The same applies in general, it can be thought to break a one-dimensional control shaft movable axially of the variable # (9〇) to neutralize (73) by a magnetic force in the accommodating space
UZJU/O 調整’而能機動性且無軸向限制的加以轉動 磁性預覆力的無軸向限制式超音波馬達結構， Μ 辟替换見 形成一種具 【 黡 丨式 苟單說明】 第 一 圖 :本發明第 — 第 — 圖 本發明第 一 第 二 圖 本發明第 一 第 四 圖 係本發明 第 第 五 圖 本發明第 三 第 圖 本發明第 三 第 七 圖： 本發明第 四 [ 主 要元件符號說 明 ( 1 〇 ) 固定件 ( 1 2 ) 架板 ( 1 2 2 )固定座 ( 1 3 ) 軸桿 ( 1 5 ) 架板 ( 1 5 2 )固定座 ( 1 6 ) 容置空間 ( 3 〇 ) 壓電元件 ( 5 〇 ) 線圈 ( 7 1 ) 軸桿 ( 7 3 ) 容置空間 ( 8 1 ) 磁性元件 (11)支架 (1 2 1 )凸肋 (1 2 3 )定位座 (14)支架 (1 5 1 )凸肋 (1 5 3 )定位座 (2 〇)可變軸向可動件 (4 〇 )磁性元件 (7 〇 )固定件 (7 2 )線圈 (8 0 )壓電元件 (90)可變轴向可動件 11UZJU/O adjusts the structure of the non-axially-restricted ultrasonic motor that can be maneuverable and has no axial limitation, and the magnetic pre-covering force is replaced by a 黡丨 苟 说明 】 第一 第一The first and second drawings of the present invention are the first and fourth figures of the present invention, the fifth aspect of the present invention, the third aspect of the present invention, and the third and seventh drawings of the present invention: the fourth component of the present invention DESCRIPTION OF SYMBOLS ( 1 〇) Fixing parts ( 1 2 ) Shelf ( 1 2 2 ) Fixing seat ( 1 3 ) Shaft ( 1 5 ) Shelf ( 1 5 2 ) Fixing seat ( 1 6 ) Housing space ( 3 〇 Piezoelectric element ( 5 〇) Coil ( 7 1 ) Shaft ( 7 3 ) Housing space ( 8 1 ) Magnetic element (11) Bracket (1 2 1 ) Rib (1 2 3 ) Positioning seat (14) Bracket (1 5 1 ) rib (1 5 3 ) locating seat (2 〇) variable axial movable member (4 〇) magnetic element (7 〇) fixing member (7 2 ) coil (8 0 ) piezoelectric element (90 Variable axial movable member 11