TWI319695B - Apparatus of generating glow plasma on a wide surface under atmospheric pressure - Google Patents

Apparatus of generating glow plasma on a wide surface under atmospheric pressure

Info

Publication number
TWI319695B
TWI319695B TW094112369A TW94112369A TWI319695B TW I319695 B TWI319695 B TW I319695B TW 094112369 A TW094112369 A TW 094112369A TW 94112369 A TW94112369 A TW 94112369A TW I319695 B TWI319695 B TW I319695B
Authority
TW
Taiwan
Prior art keywords
atmospheric pressure
under atmospheric
surface under
wide surface
glow plasma
Prior art date
Application number
TW094112369A
Other languages
Chinese (zh)
Other versions
TW200541412A (en
Inventor
Kyung Soo Kim
Jung Hee Cho
Jong Pil Kim
Bang Kwon Kang
Jeong Woo Kim
Kyung Bok Jin
Woo Young Lee
Original Assignee
Changjo Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020040078212A external-priority patent/KR100693818B1/en
Application filed by Changjo Engineering Co Ltd filed Critical Changjo Engineering Co Ltd
Publication of TW200541412A publication Critical patent/TW200541412A/en
Application granted granted Critical
Publication of TWI319695B publication Critical patent/TWI319695B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
TW094112369A 2004-04-20 2005-04-19 Apparatus of generating glow plasma on a wide surface under atmospheric pressure TWI319695B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20040027200 2004-04-20
KR1020040067324A KR100516329B1 (en) 2004-04-20 2004-08-26 Cold atmospheric pressure plasma generator for a wide surface plasma treatment
KR1020040078212A KR100693818B1 (en) 2004-01-30 2004-10-01 Cold atmospheric pressure plasma generator for a wide surface plasma treatment

Publications (2)

Publication Number Publication Date
TW200541412A TW200541412A (en) 2005-12-16
TWI319695B true TWI319695B (en) 2010-01-11

Family

ID=37304959

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094112369A TWI319695B (en) 2004-04-20 2005-04-19 Apparatus of generating glow plasma on a wide surface under atmospheric pressure

Country Status (2)

Country Link
KR (1) KR100516329B1 (en)
TW (1) TWI319695B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392403B (en) * 2007-03-30 2013-04-01 Yueh Yun Kuo Plasma jet electrode device and system thereof

Also Published As

Publication number Publication date
TW200541412A (en) 2005-12-16
KR100516329B1 (en) 2005-09-23

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees