TWI317304B - - Google Patents

Description

[Technical Field] The present invention relates to an ultrasonic wave generating device capable of stably generating ultrasonic waves at a target driving frequency and an ultrasonic cosmetic device using the ultrasonic generating device. [Prior Art] In recent years, due to its properties, ultrasonic waves have been used to promote the penetration of chemicals, beauty, atomization, emulsification, dispersion, agitation, cleaning, bonding, processing, etc. and to develop ultrasonic waves. Ultrasonic generating device. Fig. 1 and Fig. 11 are diagrams showing an ultrasonic wave generating apparatus according to the background art. Structured map. Fig. 10 is an ultrasonic generating device for joining a vibrator to a horn, and Fig. 11 is an ultrasonic generating device for fixing a vibrator to a slap by using a bolt, Fig. 10 and Fig. 11, (Α) indicates the overall structure, ( β) is an enlarged view of eight parts.

In Fig. 10 and Fig. 11, the structure of the ultrasonic wave generating device 50 Α, 500 Β of the 旦, technology, and the 包括 技术 Β Β 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 生成 ; The electric oscillations obtained by the driving units 511A and 511B are converted into ultrasonic ultrasonic transducers 512A and 512B of ultrasonic vibrations, and the β, at one of the joint surfaces 513-1Α, 513 -1Β 超 supersonic vibrator 512Α, Hz+, 512Β, the mechanical vibration selenium oscillation of the ultrasonic waves from the ultrasonic vibrators 512A, 512B is transmitted to another radial surface 513-2A, 513-2B The horns of the components are 513 Α and 513 Β. Ultrasonic vibrator 512Α, 512Β知&

The joint type of the squad 513A, 513B 2014-8318-PF 5 1317304 can be roughly two types of a + ^ a j respectively. Brother 1 type of joint, as shown in Figure 10 (B)

The ultrasonic vibrator 512A is bonded to the horn 513A and the interface surface 512 1A by the adhesive 514A. The second type of joint, as shown in (B), the ultrasonic vibrator consisting of two overlapping vibrators 5ΐ2_ΐβ

The L over-tightening bolt 51 is fastened to the screw fastening type of the joint surface 51 3-1B of the La 0 851 3B. In the bolt fastening type, the conductive thin plates 51 2 - 2B are clamped between the bolt 5 (10) and the ultrasonic vibration 12B, between the vibrator 512_1B, and between the ultrasonic vibrator and the slider 511 3B. The bonding type is mainly used for high frequency type of several hundred or more coffee; the bolt fastening type is mainly used for low frequency type below 100 kHz. Figure 1 2 and Figure 13 are diagrams showing the characteristics of the ultrasonic oscillation block. Figure 4 is a diagram showing the oscillation mode of the ultrasonic vibration block i. Figure 12 is the vibrator dry (four)

Ultrasonic wave generating device on the horn; Fig. 13 is an ultrasonic generating device for fixing the vibrator to the burr using a bolt. s 12(1), Fig. 13(1), and Fig. 4(B) are graphs showing the relationship between the ultrasonic vibration block and the position of the amplitude bit phase of the ultrasonic vibration; ® 12(B), Fig. 13(B), and Fig. 14(1) are A graph showing the impedance frequency characteristics of the ultrasonic oscillating block, whose horizontal axis is the frequency factory vertical axis is the impedance z showing the common logarithm. Further, the ultrasonic wave is a longitudinal wave, but = (Α), Fig. 13 (A), and Fig. 14 (B) are shown as detection for convenience. In addition, due to (wavelength (sonic v) / (frequency f), ::?, the wavelength of the ultrasonic wave "changes due to the difference in the speed of sound of the propagation medium

The dimensions of the ultrasonic oscillating blocks 5〇1 A , λ° 513A, 513B and the joint 501B composed of the ultrasonic vibrators 512A and 512B are as shown in Fig. 2(A).

2014-8318-PF 6 v1317304 and FIG. 13(A) are designed to have thicknesses u and u between the joint faces 513_1A and 513-1B of the horns 513 Α and 513β to the radiation faces 513_2A and 513_2B (FIG. 10(B), Figure Π (a)) and the ultrasonic wave oscillating block 5 〇 1 person, 501B overall length L2, L4 (Figure 1 〇 (A), Figure U (A)), so that the antinode of the standing wave is located in the ultrasonic oscillation block 501A 501B, both ends 501_u, • 501-2A ( 513-2A), 5 (U-1B, 5 (U-2B ( 513-2B). Moreover, 'extended to the super n51, 51 3B state super As shown in Figs. 12(B) and 13(B), the acoustic transducers 51 2A and 51 2B have inherent impedance frequency characteristics CA and CB which change with respect to the frequency f and the impedance z. The impedance frequency characteristics CA, CB is a type in which the impedance Z becomes smaller as the frequency f increases, and becomes very small ZrA, zrB at the frequencies frA and frB, after which the 'impedance becomes large, and under the frequencies faA and faB, becomes the maximum ZaA, ZaB, and then The specification is reduced as shown in Fig. 14 (A), and is repeated every time the oscillation mode is reached. The point at which the impedance Z becomes extremely small ZrA, ZrB is the resonance point 'The point at which the impedance Z becomes the maximum ZaA, ZaB is Anti-resonance point At the resonance repair point 'Because the impedance Z becomes extremely small ZrA, ZrB, the current flowing into the ultrasonic vibrators 512 A, 512 B increases; on the contrary, at the anti-resonance point, since the impedance Z becomes extremely large ZaA, ZaB, therefore, the inflow The current of the ultrasonic vibrator 5i2A, 512B is reduced. As shown in Fig. 14 (B), the ultrasonic wave in the bonded ultrasonic oscillating block 5〇ia is designed such that the antinode of the standing wave is located at both end faces 5 〇 1 — 1 a, 5 01 — 2 A (513 — 2A), so it becomes a standing wave of an integral multiple of a half wavelength λ/2. The oscillation mode indicates the difference of standing waves generated in the ultrasonic oscillation block 5 〇1Α. When the standing wave generated in the super-theta wave ring block 5 01A is half the half wavelength

2014-8318-PF 7 1317304 The vibration mode is the basic mode, and the oscillation mode of the supersonic A 0 skin shivering block 501A is 3 times the + wavelength. Yes, the recording mode when the standing wave generated in the ultrasonic vibration block is 5 times the half wavelength is 5 binary mode. In addition, Figure 14 is introduced by the point-contact type ultrasonic (four) block 5〇u: shy mode. For the bolt-on type ultrasonic diaphragm block MU, the oscillation is the same. The joint member of the 曰 super-wave vibrating block 5〇1A is the abutting agent 曰' Ultrasonic «The joint member of the block 5〇1B is a screw test 5ΐ4β. Further, the end surface 5Q1_u of the ultrasonic oscillation block 5G1A is a surface opposite to the surface joined to the remaining horn 513A on the ultrasonic vibrator 512A (the surface not joined to the slap ")"), and the other end surface 5 (Π-2Α is The radiating surface 513_2a of the core (10). One end surface 5Qhb of the ultrasonic vibrating reed 5G1B is a surface opposite to the surface of the ultrasonic vibrator 512B on the bolt 514B (not connected to the ultrasonic vibrator 512B), and the other end surface 5 (2) The ultrasonic vibration ev generated by the drive unit 11A 511B is applied to the ultrasonic transducers 51 2a and 512B, and the ultrasonic vibration ev generated by the drive unit 11A 511B is applied to the supersonic wave generating devices 500A and 500B having the above-described structure. The acoustic vibrator 51 is converted into a mechanical oscillation of the ultrasonic wave by 512β, and then transmitted from the joint faces 51 3-1A, 513-1B to the horns 513A, 513B; and then, from the radiating surface 513_2a of the squad 513 Α, 513β,

513 2B emits a mechanical oscillation of the ultrasonic wave. The above-mentioned agent permeation promotion and the ultra-sonic processing of the object, the radiation surface 513-2A, 513 2B 'radiation surface 513-2A of the horns 513A, 513B are directly or through the ultrasonic propagation medium such as water or stagnation. The ultrasonic wave emitted by 513-2B is transmitted to 2014-8318-PF 8

V 1317304 Object ο ' for ultrasonic processing. Then, as shown in Fig. 12 (Β) and Fig. 13 (8), the ultrasonic oscillating blocks 501A, 501 Β are in the range of the vibration range from the resonance point to the anti-reading vibration point, a certain frequency f in the leg, such as the driving frequency fdA, fdB The ultrasonic generating devices 500A and 500B are controlled to make the bowls erect, and the cymbals are erected. The method of controlling the ultrasonic generating device white_ has a self-excited mode and a mode of vibration. The self-excited vibration mode means that the frequency of the ultrasonic vibrators 5m and 5i2B is shifted. p 511A and 511B are modes in which the _EV generated by the target drive frequencies fdA, f = Γ5, and 1Β are adjusted to vibrate the ultrasonic wave 12B. In the case of the excitation mode, the electric oscillation EV is set such that the ultrasonic oscillators 5m and 5ΐ2β are caused to oscillate by the oscillations of the ultrasonic transducers 5m and 5ΐ2β. The oscillating side bulletin f sputum spurs 7 has been described in, for example, JP-A-2002-2491 53 (Patent Document U and JP-A-1999-114 Document 2). The impedance Z of the oscillating mode is used to detect the frequency of the ultrasonic vibrator. The sound frequency of the ultrasonic vibrator is “the mode of the (4) mode t is adjusted in the electric shock EV containing the moving part. Therefore, this will drive the meeting. There is a case where the ultrasonic vibrator is different from the target driving vibration, which may be erroneous.) The other frequency f (wrong, therefore, the self-oscillation mode may be #; 疋 self-oscillation, at a constant level. Moreover, the wheel _ therefore, the self-priming soup 4 is controlled to a constant level, ... suitable for outputting the lower impedance Z megahertz band

Ultrasonic generator for 2014-8318-PF 9 1317304. On the other hand, he is excited by the temperature change caused by the surrounding environment changing the ultrasonic oscillator itself, etc.

The output characteristics of the vibrator will change. Therefore, in the excitation mode, X causes the ultrasonic oscillator to perform (4) and ^ target output at the target drive frequency fd. In addition, due to changes in the surrounding environment and temperature changes caused by the ultrasonic transducer itself, and aging caused by external stress, etc., the gas rate fr and the anti-spectral frequency ia are frequently shifted, so the self-vibration In the Lu mode, there will be a supersonic oscillator with a frequency f different from the target driving frequency, and the output will change when he is excited. The problem is more serious. In particular, in the case of megahertz or higher, the ultrasonic generation step φ, μμ L , m is in the middle of the display, and since the higher mode such as the 3x mode and the mode is used, the above problem becomes more serious. . SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide an ultrasonic generating device capable of stably generating ultrasonic waves at a driving frequency. Further, an ultrasonic cosmetic device using the ultrasonic generating device is provided. The ultrasonic generating device according to the present invention includes: a driving unit that generates the electric vibration i, and converts the electric vibration generated by the driving unit into a supersonic-Z- of the ultrasonic vibration. jlrn T- I LA Λ , 立 θ /Pi Zhenzi, one surface of the above-mentioned ultrasonic vibrator, will be on

The mechanical vibration of the ultrasonic wave converted by the ultrasonic oscillator is transmitted to another transmitting member of the surface of the surface; the impedance of the ultrasonic transducer is determined to be 2014-8318-PF ' 1317304; the ultrasonic wave is transmitted based on The impedance frequency characteristic of the ultrasonic vibrator when the object of the mechanical oscillation is in contact with the load of the transmission member, and the impedance frequency characteristic of the ultrasonic vibrator when the object to be transmitted by the mechanical oscillation of the ultrasonic wave does not contact the transmission member The impedance at the intersection and the impedance measured by the measuring unit are calculated as a control unit that controls the target drive frequency of the ultrasonic transducer to control the drive unit so that the ultrasonic transducer oscillates at the calculated target drive frequency. Further, the super-wave cosmetic apparatus of the present invention uses the above-described ultrasonic generating apparatus. The ultrasonic generating device and the ultrasonic cosmetic device on the X can stably generate ultrasonic waves at the target 'drive frequency. ^, Ultrasonic generating device = effectively performing ultrasonic processing on the object. In addition, the ultrasonic cosmetic device It is effective enough to give a cosmetic effect to the object.

In the following, the description of the structure table using the same symbols in the drawings will be described based on the drawings. The relevant embodiments are described. Further, the structures are the same, and the drawings of the case of the present invention are not described here. Figure! (1) Table::: Condition. ® 1 is the introduction of the basic axis of the present invention to show the usual (four) (four) frequency = sex, which is the frequency resistance == no: the negative ultrasonic mechanical oscillation of the 〇 contact transmission member of the ultrasonic oscillator when the carrier member is unloaded The object (4) represents the impedance frequency characteristic to which no load is applied. Figure 1 Ultrasonic wave in the state of the transmission component

2014-8318-PF 11 1317304 2 equivalent circuit; Figure 1 (〇 shows the equivalent circuit of the ultrasonic oscillator in the state of the transmission member such as the joint _ during load. As shown in Fig. 1 (A), when there is no load The impedance frequency characteristic c is strong: it is intended to be in a certain vibration mode, as described in the background art, with the frequency: two, the impedance Z becomes smaller, and at the frequency 圩, becomes the minimum Zr and becomes larger after the frequency fa At the time, it becomes the maximum Zal 'then' and then becomes smaller again. Moreover, the impedance frequency characteristic (10) of the load is roughly the same as the load-resistance: the anti-frequency characteristic (10), but the impedance frequency characteristic CL in the load The most resistance to zr2 is the minimum impedance in the muscle when there is no load. The minimum impedance in the muscle is #2 and the maximum impedance in the impedance frequency characteristic CL is the load impedance CL2. The maximum impedance in the CNL is reduced. Figure 1(B) *(C) respectively, under no load, the ultrasonic vibration connection σ connected to the transmission member is connected in parallel to the series connected line ^, the capacitor H path, the electric grid C2 electric device Cl and the resistor W μ circuit; 'bonded to the transmission element under load°° The circuit of the ultrasonic oscillator under the Lei Zheng 3 of the sub-equipment refers to the circuit of the capacitor C2 coil L, capacitor...resistor...the resistor R2 corresponding to the object contact and the resistance. It is also connected in series to the resistor, and the second:: the frequency characteristic is the most load-free, the minimum frequency fi· to the maximum frequency, and the impedance frequency characteristics and In the range of the negative two oscillations, 'intersection without load. The impedance frequency characteristic at load is at - point P

2014-8318-PF 12 1317304 The impedance frequency characteristic at no load and the impedance frequency characteristic at the time of load intersect at a point P, which is also described in the patent document i of the background art, but the inventors here find that even the application to the transmission The action of the load on the component changes, and only the resistance of the resistor R2 changes. Therefore, the impedance frequency characteristic at no load and the impedance frequency characteristic at the time of load often intersect at a point p' and the intersection point P The frequency and impedance Zm are unchanged. Further, the ultrasonic generating device according to an embodiment of the present invention and the ultrasonic cosmetic device using the same include: determining the intersection frequency p of the impedance frequency characteristic at the time of the load and the impedance frequency characteristic at the time of the load as a reference A control unit for the target drive frequency η that drives the ultrasonic oscillator. The above-described ultrasonic generating device and the ?-sound wave cosmetic device using the same can generate a supersonic sound at a target driving frequency (Configuration of the embodiment) Fig. 2 is a block diagram showing the configuration of the ultrasonic generating device according to the embodiment. In Fig. 2, the ultrasonic generating device includes a driving unit u, an ultrasonic transducer 12 K 13 , a measuring unit 14, a control unit 15, and a spare unit. The movable portion 11 is a component that generates an electric shock train that drives the ultrasonic vibrator 12. The drive unit H includes, for example, a vibrating circuit 113 that generates an alternating current of a specific frequency such as a sine wave, and an amplifying circuit U2 that amplifies the alternating current signal at a specific amplification factor. The oscillation circuit 113 can utilize a well-known vibrating circuit such as a Colpitz vibrating circuit and a Hartley-type oscillating circuit. However, from the viewpoint of being able to easily change the oscillation frequency, in the present embodiment, for example, a frequency synthesizer using a PLL (phase lQcked 1〇〇p) circuit. frequency

2014-8318-PF 13 1317304 rate synthesizer, for example, including reference wave, voltage controlled oscillator and... phase comparator, low pass filter, command, voltage controlled oscillator output, beibei The specific frequency, Beibei times private F to eight..." In-phase comparator. Phase comparison ^ #, .... Comparison of the phase of the output of the shy, ... low-pass filter benefits. Low-pass filter based on bit

Two:, the generation of the correction value should be output, and the output to the electric control of the vibrator. The receiver 1 voltage control vibration ^ according to the correction value voltage changes the vibration (four) rate, so that the frequency after the frequency division and the reference oscillator's seedling "profit frequency - the frequency synthesizer, through the knife frequency or multiplication of the frequency divider The frequency is obtained by the magnification. The ultrasonic vibrator 12 is a component that converts the electrical oscillation transmitted from the drive #ιι into the ultrasonic vibration by the cymbal 14. For example, the structure of the piezoelectric material is sandwiched by the electrode. The piezoelectric vibrator. tA 13 is a member in which a supersonic vibration + 12 is superimposed on the surface, and the mechanical oscillation of the ultrasonic wave generated by the ultrasonic vibrator 12 is transmitted to the radiating surface of the other surface, and the transmission member 0 is chopped. The vibrator 1 2, the taste plate 8 and the joint member (not shown) conforming to the joint type constitute the ultrasonic vibration 2, which is the same as the components shown in Figs. 10 and 11 introduced in the background art. As shown in Fig. 1, the horn 51 3A is a short, high-bottomed cylindrical shape, such as aluminum and light alloys, etc. = metal members. For example, the ultrasonic vibrator 5m of the crystal vibrator is viscous by the charm agent 514A. On the inner bottom surface of the horn 513A, and solidify . Fastening bolt type, as shown in Shu Shu, Shu 3β horn 5 towards the radiation surface - the side, a conical shape tapering trapezoidal shape, such as a metal member like aluminum and light alloy.

2014-8318-PF 14 1317304 A screw groove for connecting the bolt 514B is formed on the side facing the radiation surface at a position close to the middle of the large-diameter joint surface. The ultrasonic vibrator 512B formed by the overlap of the plurality of vibrators 512-1B in which the through holes are present near the center position (through the cn in FIG. 1) passes through the through holes, and the force λ is pulled from the inserted bolts 514. Under the action, it is connected to the speaker 51 3Β, and the entry is delayed. Further, between the bolt 514 Β and the ultrasonic vibrator 512 、, each of the vibrators 5 彳? 〗 Pregnancy between bl2~1B, between the ultrasonic vibrator 51 2B and the horn 51 3B, respectively, the ice plate is clamped with a conductive sheet 512-2B. Dry type, suitable for use in the occurrence of

It is suitable for use in such as beauty, cleaning particles and atomization. On the other hand, the bolt-on type is suitable for use in ultrasonic generating devices of low-frequency ultrasonic waves such as kilohertz and Gucheng Tudingxiangnu 4, which are low frequency, so it is suitable for low frequency. For applications such as breaking, joining, dispersing, liquid spray, etc. The dam portion 14 is a member that measures the impedance z of the ultrasonic vibrator 12. The measurement _ includes, for example, a current detecting circuit (4) having a detecting resistor for detecting the supersonic vibrator 12 _ f flow, and controlling the frequency control from the driving portion ii # electric oscillating frequency by controlling the oscillating frequency of the oscillating circuit i _ 3 The frequency control unit j 4 3 receives the electric oscillation frequency notification of the drive unit and the impedance calculation unit that calculates the impedance z at the frequency notified by the J-frequency control unit 143 based on the detected current value notified by the current detection circuit 141. 14 2. The control unit 15 is an object that is based on the mechanical vibration of the ultrasonic wave (not shown) and the ultrasonic oscillator Μ in the load state, the frequency characteristic of the 和, and the mechanical oscillation of the ultrasonic wave to be transmitted. Object not

2〇14-8318^PF 15 1317304 The impedance z of the unloaded intersection P of the contact horn 13 and the impedance frequency of the two-wave vibration "2", mw ^ 邛14 measured impedance Z, as described later ^ ^ - + α, Λ. , / The target drive frequency fd of the pico-brain 12, the target drive frequency element 12 scale i π with 3 hay nose, control the drive unit 11 to make the ultrasonic electricity": the control unit 15, for example The frequency calculation unit 15 and the control unit " 52 and the drive frequency control unit 153 are included. In the load state, the supersonic, the ancient g 4s jk / , the impedance frequency characteristic of the sub 12 and the ultrasonic vibrator k Zm ' in the load state are in the present embodiment, The impedance frequency of the ultrasonic vibrator 12 is 1 >2> a The impedance frequency characteristics of the ultrasonic vibrator 12 in the state of no-load and no-load are depleted, and the result is calculated by using the measurement result. The intersection point p of the impedance frequency characteristic, T is different from the upper generation F詈1 Φ. 仃 In advance, the ultrasonic vibrator 12 for ultrasonic measurement is preferably assembled into the ultrasonic generating device. Ultrasonic soup is a sputum, but it can also be produced in the same specifications as the real product. In addition, the calculation of the impedance Zm for ensuring the intersection point is statistically calculated using a plurality of ultrasonic waves of the same specification. As described above, since the resistance Zm of the f 乂' 』p is generated, it is possible to stabilize the supersonic wave with the target driving frequency suitable for the ultrasonic generation f1. Rate: The second-rate calculation unit 151 is based on the impedance frequency of the ultrasonic vibrator 12 when there is a load = the impedance of the impedance of the ultrasonic vibrator 12 at the time of the temple and the no-load, and the target drive of the measurement unit 14: two: point p-wave oscillator 12 The frequency fd, the width D r 'supersonic it ^ m ^ -3⁄4 t* + , and the target drive frequency of the difference Μ are subjected to the frequency control unit 153.

2014-8318-PF 16 '1317304 The voltage control unit 1 52 is a component that controls the drive unit "...a circuit 112 to increase the power in the battery. The drive frequency control unit 1 53 is: a wave generating device! In the normal use state, the vibration of the vibration I circuit 113 is controlled by the target drive frequency (4) calculated at the frequency frequency. 12 The component that drives the 振11❸ electric oscillation frequency 帛 to vibrate the ultrasonic vibrator i Z is described. At this time, the impedance calculation unit 142, the frequency control unit 143, the frequency operation unit, the voltage control unit i52, and the drive frequency control unit (5) include, for example, a microprocessor and its peripheral circuits (hereinafter referred to as "_," The storage unit is configured to store the target drive frequency = calculation program and the ultrasonic generation device 4! for controlling the respective components of the super-hybrid wave generating device 1 in order to calculate the target drive frequency. Various programs such as a control program for controlling the super-use and generating a part of the singularity, and a number of z, which are measured by the measuring unit 14, a frequency f when the impedance z is measured, and a program for operating the various types of the program a component of various materials such as data generated during operation, and the storage unit 1 6 includes, for example, a so-called working memory that becomes the MPU described above.

Volatile memory components such as RAM (Random Access Memory), EEpR〇M (Electrically Erasable Programmable Read Only)

Mem〇ry) and other non-volatile memory elements such as readable and writable non-volatile memory elements and ROM (Read Only Memory). The operation of this embodiment will be described below. Fig. 3 is a flowchart showing the operation of the target drive frequency calculation processing of the ultrasonic generating device according to the embodiment. Figure 4 is a diagram showing the target drive frequency. The horizontal axis of Fig. 4 is the frequency f, and the vertical axis is the impedance z of the common logarithm.

2014-8318-PF 17 1317304 Table: Impedance frequency characteristics at no load; a little chain line indicates the impedance frequency characteristics of the load. The power switch that supplies power to the ultrasonic generating device i (the spear causes the ultrasonic generating device to start the ultrasonic generating action # μ # ^ and the start switch (Fig. 2) of the operation of the ultrasonic device is mounted on the ultrasonic generating device 1±. For example, when the electric power is turned on to the ultrasonic generating device 1, the operation target driving frequency is calculated and the operation target driving frequency is executed. (4) Target driving frequency. In FIG. 3, the voltage control unit 152 of the control unit 15 adjusts the amplification factor of the amplifying circuit (1). The voltage level of the AC signal to be outputted by the drive unit 11 is set to a value for the target drive frequency calculation process, and the voltage setting is notified to the frequency control unit 143 (su). The target drive frequency is transmitted; 'But the voltage value used can ensure that the power required for the operation of the target drive frequency is small, and the impedance of the target I® dynamic frequency fd can be obtained with the required accuracy. For example, in this In the embodiment, the impedance can be easily calculated from the current measured by the impedance calculation unit 142 in the processing S13 to be described later. Therefore, the voltage at the maximum peak value of the AC signal can be obtained. In the case of lv, the voltage value at the minimum peak value is lvp_p of -1¥. When the voltage control unit 152 notifies that the voltage setting is completed, the frequency _143 of the measuring unit 14 adjusts the frequency of the oscillation circuit 113, that is, the frequency division in the present embodiment. In the magnification of the device, the frequency f of the AC signal output from the drive unit n is set in the specific frequency f in the frequency range in which the impedance Z is to be measured, and the impedance calculation is performed on the setting end information of the narrow set frequency f and the frequency f (S12).

2014-8318-PF 18 1317304 After the above-described setting is completed, the current detecting circuit 141 of the measuring unit 14 of the AC No. 4 corresponding to the set voltage and frequency f is output from the driving unit u to the ultrasonic vibrator 12. The current detecting circuit 141 of the measuring unit 14 measures the current flowing from the driving unit U to the ultrasonic transducer 12 by the effective value, and notifies the impedance calculating unit 142 of the measured current (S13). The impedance calculation unit 142 of the measurement unit 14 receives the current detection circuit 141.

When the measured current is measured, the impedance z is calculated from the measured current using the relationship of (impedance) two (voltage) / (current), and the calculated impedance z frequency (four) 胄 143 is notified of the frequency f received, and stored. Part 16 (S14). Next, the impedance calculation unit 142 determines whether or not the impedance Z (SI5j) has been measured based on all the frequencies f' to be measured. According to the determination result in the processing S15, the impedance is measured for all the frequencies f in the specific frequency range. (Yes), the impedance calculation unit 142 sets the frequency of the impedance z and the frequency f, 'f stored in the storage unit to each of the storage units 16 (or the storage position of the impedance Z and the frequency and the end of the measurement of the impedance Z). The calculation unit 151 (S16). 逋, parent: aspect 'does not according to the judgment result in the processing S15, all the frequencies in the specific frequency range" ▲ should be based on the specific frequency range, Q 'resistance & 7. In the middle, the next frequency f of the impedance Z is measured, and the operating impedance z is measured. The frequency f is received from the measurement of the impedance 2 after the measurement is completed. The frequency f is processed S12. The D frequency control unit 143 Processing returns to

2014-8318-PF 19 1317304 The ±p-resistance calculation unit 142 notifies the measurement of the impedance z in the corresponding frequency that the gentleman beam frequency control unit 143 is the same operation process si2 as described above; the current detection path 141 is the same operation process S13 as described above; the impedance calculations 42 The processing is performed in the same manner as the processing S14 and the processing S15. As described above, when the frequency '| is detected at all the frequencies f in the specific frequency range, and the ζ bundle is resisted, the processing is repeated until the frequency control unit 143 sets the ac signal of the AC signal outputted by the drive 11 every time. The rate at which the frequency of the impedance 2 should be measured «more (four) Μ frequency f, the frequency of the (four) z should be determined

The impedance z is measured for all frequencies in the range. That is, in the frequency range in which the impedance Z should be measured, the impedance Z is the same as the scanning frequency f. The frequency range in which the impedance Z should be measured is preferably such that when it is under load

The impedance bottle of the ultrasonic vibrator 12 checks the frequency characteristic of the 4i αA anti-frequency characteristic and the ultrasonic vibration of the ultrasonic vibrator 12 ^ impedance frequency = no load. The frequency of the center of the solid frequency should be measured. For example, it is ±1〇% of the frequency fra at the intersection p (ie, 〇, 〇^ ie, 〇. 9xfm~1. lxim) and ±15% of the frequency & at the intersection p (ie, 0.85) Xfm~ii5x(4), etc. As above, by using the fixed frequency range of the frequency of the intersection point p, there is no erroneous selection of other oscillation modes, and it is possible to select the ultrasonic transducer to be driven 1 9 m , * , , , The target drive frequency fd ° in the characteristic oscillation mode • The change of the specific frequency f when the frequency η of the alternating current signal that the drive unit 11 rotates is set every time in the process S12, due to the impedance Zm_ given to the intersection point P The frequency f of the impedance 2 is, therefore, changed according to the appropriate interval of the target drive frequency fd. For example,

2014-8318-PF 20 1317304 When the standard drive frequency fd is a megahertz band such as 3MHz or 5MHz, the interval of (10)z # is changed. In addition, when the gamma f, B x 曰% drive frequency 疋l〇〇kHZ and 500 kHz and other kilohertz bands, the change is made between 1 Hz and 5 Hz. Then, when the impedance calculation unit 142 notifies that the measurement of the impedance 2 is completed, the frequency calculation unit 151 of the control unit 5 selects the impedance frequency characteristic of the ultrasonic vibrator 12 and the non-negative stored in the storage unit 16 in advance, and the acoustic vibrator 12 The impedance & in the intersection point p of the impedance frequency characteristic is identical, or the impedance z measured by the measuring unit 14 is obtained, and the frequency f corresponding to the selected impedance is obtained (S17;). - Then the 'frequency shifting unit i 51 calculates the target driving frequency fd' using the formula to calculate the target driving frequency Η to notify the driving frequency control (4) 153 according to the obtained frequency 丨, and at the same time, the target driving frequency ends the notification voltage control Part 152 (S18). The specific formula is the relationship between the intersection frequency ρ(four) rate and the target drive frequency fd of the impedance frequency characteristic of the super-wave oscillator 12 when the ultrasonic frequency oscillator is located at a load and the ultrasonic oscillator is at a load. The function 'as fd=axi... is given as a linear function. As described above, the target drive frequency fd is expressed as a linear function related to the frequency of the intersection p. Therefore, the calculation of the target drive operation becomes simple. The target drive frequency can be calculated in a short time... The target drive frequency fd is as shown in FIG. As shown, if it is within the coffee circle RR between the frequency fr of the resonance point and the frequency fa of the anti-resonance point, it may be any frequency f. It is precisely because of the test #至丨] that the change in impedance frequency characteristics caused by external factors such as changes in the surrounding environment and aging - the fact is preferably the distance inverse spectrum

2014-8318-PF 21 1317304 = or the frequencies fdi, fd2 which are farther from the resonance point. In other words, the ambient environment & $ considerations, etc. will cause the impedance frequency characteristics to change, and when the drive frequency fd is set, the difference of the target z is the largest. For example, "between the impedance of load 2 and the frequency f m of the impedance of the parent point P to the anti-resonant point frequency f a, the target drive frequency is set.

Zdi and the difference between the impedance when there is no load and the impedance Zdl when there is load (丨Zdl_Zd is large, between the intersection point P frequency fm and the anti-resonance point fr, when setting the target drive), it is better The difference between the negative Z's impedance Zd2 and the loaded impedance Zd2 is the largest. In addition, the absolute value of ^ X. External factors cause changes in impedance frequency characteristics, including ratio 2 ==, anti-spectral point The offset and the vibration of the impedance frequency characteristic, the deformation of the profile near the near and anti-resonance point, etc. As described above, by setting the target drive frequency fd, it is judged that there is no load and there is load. In the case, the impedance 2 of the forward-moving ultrasonic vibrator 12 can be measured by the target driving frequency fd. It is easy to discriminate whether there is a negative or no load. It is determined and 'the power consumption from no load is small, From the viewpoint of suppressing heat generation, the target driving frequency fd is preferably a range between the frequency ratio of the intersection point p and the frequency of the inverse spectral point fa in the oscillation range RR; from this viewpoint 1, it is preferable that the distance inverse spectrum The frequency of the above Margin is as follows. (4) ^ Set according to statistics or experience. When the frequency calculation unit 151 notifies that the target drive frequency calculation processing is completed, the voltage control unit 152 sets the amplification circuit U2 to the oscillation circuit in the normal operation of the ultrasonic generation device}. The AC signal sent from 113 into 2014-8318-PF 22 1317304: Amplification 'The target drive frequency calculation processing ends the notification frequency control unit. After receiving the notification, the frequency control unit 43 ends the frequency control of the oscillation circuit jj 3 ( S19). Through the above operation, the normal operation of the beam oscillating wave generating device 1 at the target driving frequency calculation is set to a possible state 0, and then the start switch is turned on, and the driving frequency control unit works by adjusting the frequency of the oscillating circuit (1) to the frequency. The frequency f of the target drive signal output by the calculation unit i5i and the output of the parent stream signal is caused to drive the ultrasonic vibrator 12. The above-described action 'ultrasonic generation set ι can generate ultrasonic waves at the target drive frequency. Therefore, the ultrasonic wave The generating device i can perform ultrasonic processing on the object object in a political manner. Further, the structure of the above embodiment is that the current is passed. The measuring circuit 141 detects the current flowing to the ultrasonic transducer U when the driving unit U applies a fixed amplitude to the ultrasonic transducer 12 at each frequency (the 1Vp_P to the surface groove). The impedance calculating unit 142 determines the current based on the detected current. Measuring the impedance In order to measure the impedance z more accurately, the voltage applied to the ultrasonic vibration = 12 can also be changed. x In addition, the structure of the above embodiment is 'electrical detection by electric detection of each frequency f under the driving portion u in the ultrasonic vibration When the voltage is applied to the ultrasonic oscillator and the current, the impedance calculation unit 142 determines the current based on the detected current and is not limited to In the above case, public resistance can also be used. 1 ' knowing Ρ and γ: aiming method. For example, the impedance can also be measured by measuring the voltage at a fixed value of several dl into the ultrasonic transducer 2014-8318-PF 23 1317304. Further, in the above-described embodiment, the measuring unit 14 measures the impedance Z of all the frequencies ί in the frequency range in which the impedance is to be measured, and selects the impedance frequency of the ultrasonic vibrator 12 which is stored in advance in the storage unit 16 at a load. The impedance Z m of the intersection point ρ of the impedance frequency characteristic of the ultrasonic vibrator 12 at the time of no load is the closest or the impedance ζ measured by the measuring unit i 4 , and the impedance ζ corresponding to the selected impedance 4 according to 4 The frequency f is used to calculate the target drive 2 frequency fd. However, the following configuration may be adopted. When the measurement unit 14 measures the resistance 2, the measured impedance 2 and the frequency f at the time of the measurement are notified to the 2nd part to store in advance in the notified impedance 2 and the storage unit 16. At the time of the load 2, the impedance frequency characteristic of the ultrasonic vibrator 12 and the impedance at the intersection p of the impedance characteristic of the no-load characteristic 12 are selected, and the impedance of the notification is selected, and the control unit 15 corresponds to the " The frequency f is calculated by the target drive frequency fde, and f is not all frequency in the frequency range in which the impedance 2 should be measured. Therefore, the target drive frequency meter can be shorted. In the above embodiment, the ultrasonic oscillator is located under load. The ferromagnetic core impedance frequency characteristic of the cross-talk and no-load at 12: Pre-: ZZ, the two impedance frequency characteristics are measured in advance, based on the impedance at the pre-calculated intersection point P: Impedance z, the calculation should drive the subsonic structure of the ultrasonic oscillator, calculate, the vibration point... Frequency fr and anti-spectral frequency ♦ da and intersection

2014-8318-PF 24 A 7304 The function f of the relationship between the frequencies fm of P is calculated as Si r > T xg ^ tr) + ^ xh (calculated 曰 '' (four) rate fm' according to the calculated frequency f of the intersection point The target drive frequency fd. + ^ ^ The frequency fm counts 2 sheep d such as 'in the ultrasonic oscillation block 2 and a, 12, due to the intersection point Ρ frequency f, 17 曰 wave frequency f Γ and, the car again The eve also exists at the resonance point. In the middle of the frequency fa of the ocean back-shooting point, the f rate fm is h. Therefore, the frequency of the intersection point P. fm= (fr+fa) is calculated. Based on the resonance point and the anti-resonance point rate, the flow chart of the frequency of the frequency _ D 异 k 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 When the frequency fm of the point is clicked and the driving frequency fd is witnessed, the parts of the generating device 1 are operated by the supersonics, and the frequency fm of the r is calculated as the target point of the target. In the frequency calculation, the processing S21 to the processing S26, in addition to, the frequency M M of the M 6 is divided by the scorpion impedance Z and the scanning of the scorpion circumference is different, and the use of FIG. 3 The principle of milk (10) is the same, and the description is omitted here. "The above-mentioned processing (1) is used to measure the impedance Z to measure the frequency range. In the process S16, the purpose is to hold each other, and the person, ',, ' is given to the parent point P. The impedance of the frequency fm & ', therefore, is a fixed frequency range centered on the intersection point ρ , , ^ 扪 羊 f f f f f f f f f f f 。 。 。 。 。 该 该 该 该 该 该 该 该 该 该 该 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋And the anti-resonance point' therefore needs to be a wide frequency range including the frequency fr of the self-vibration point and the frequency fa of the batch resonance point. In the process S27, the impedance calculation unit 142 notifies the end of the measurement of the impedance 2 'control The frequency of the portion 1 5 is used to extract the spectral point and the anti-spectral point from each of the obstruction frequency f stored in the storage unit 16, and the calculation is performed.

2014-8318-PF 25 '1317304 : (4) The frequency fr of the vibration point and the extracted spectral point fa, according to the relationship between the harmonic frequency 'black frequency fr and the inverse spectral point frequency fa and the frequency of the intersection point ^, function ' Fm= (fr+fa)/H Calculate the frequency of the intersection point p. The resonance point is the minimum of the resistance (4) (10), and the anti-resonance point is the impedance frequency characteristic = the mouth is very simple and highly accurate to extract the resonance point and the anti-resonance point. . The frequency calculation unit 151 calculates the target drive frequency fd using the specific formula based on the calculated frequency 帛fm, notifies the drive frequency control unit 153' of the calculated target drive frequency fd, and notifies the target drive frequency calculation process. Voltage control unit 丨52 (S28). When the frequency calculation unit 151 notifies that the target drive frequency calculation processing is completed, the power control unit 152 sets the amplification circuit 112 to amplify the AC signal from the oscillation power 35113 in accordance with the amplification factor in the normal operation of the ultrasonic generation device '. The drive frequency calculation processing end notification frequency control unit 143', after receiving the notification, the frequency control unit 143 ends the frequency control of the oscillation circuit ι3 (S29). Through the above actions, the target drive frequency is calculated and processed. The normal operation of the beam #曰 wave generating device j is set to a possible state. As described above, the influence of the manufacturing deviation of the ultrasonic vibrator 12 and the ultrasonic generating device i on the target driving frequency ^ is reduced by calculating the frequency fni of the intersection point p based on the resonance point and the anti-resonance point, and then calculating the target driving frequency fd. Alternatively, in the above embodiment, the impedance frequency characteristic of the ultrasonic vibrator 12 at the time of load and the impedance frequency characteristic of the ultrasonic vibrator 丨2 when there is no load

The impedance Zm at the intersection P of 2014-8318-PF 26 1317304 is calculated by (4) by actually measuring the two impedance frequency characteristics in advance. The following structure can also be used to calculate the spectral vibration point and the anti-resonance point, and calculate the frequency of the intersection point p according to a function of the relationship between the frequency fr of the resonance point and the frequency fa of the anti-resonance point and the frequency fm of the intersection point P, according to the calculated The frequency fm of the intersection point P is used to calculate the impedance & Fig. 6 is a flow chart showing the calculation of the impedance of the intersection based on the spectral point and the anti-resonance point.

When the impedance & of the intersection p is calculated based on the resonance point and the anti-resonance point, each unit of the ultrasonic generation device f1 performs the following operation. In Fig. 6, the processing S31 to S37 in the processing of calculating the impedance & of the intersection point p based on the resonance point and the inverse spectral point are the same as the above-described processing s S2I to s described in Fig. 5, and the description is omitted here. In the processing S 3 8 , the frequency is set to β ί ^w > von 连 邛 邛 151 from the s::: 14 stored in the storage unit 16 out of the impedance Ζ and frequency f and each group, select The frequency fm measured by the measuring unit 14 is obtained by the frequency fm measured by the measuring unit 14 and the impedance z corresponding to the selected frequency h is obtained, and the resistance of the intersection point p is stored in the storage unit 16 and simultaneously The processing end information notification voltage control unit 152. The hole notification frequency difference 4 151 is notified that the processing ends, the voltage control unit = the large circuit m' releases the AC signal from the (four) circuit 113 at the normal amplification factor of the ultrasonic generation (1). Then, the frequency control unit 143 is notified of the termination of the present Luna, and the frequency control of the Zhenbao circuit m is terminated by the notification rate = unit 143 (S39). The above-mentioned passage is calculated based on the vibration point and the anti-spectral point. Intersection point p

The frequency fm of 2014-8318-PF 27 1317304, and then calculate the ultrasonic ultrasonic generating device of the intersection point p: 夂 to reduce the influence of the ultrasonic oscillator. In the operation shown in Figs. 5 and 6, the impedance Z is measured in the range of the frequency of the target drive frequency fd. The purpose is to find the resonance point and the anti-spectral point, =吏疋The fixed frequency range centered on the frequency ^ of the solid T-point of the center of the vibration point can be used. In addition, the frequency interval can be increased by the surface of the four-vibration point f r ~ ^ f . . , ra , the frequency range of the 及 and the fixed frequency range centered on the anti-resonance frequency fa. The small frequency interval 'and' the above implementation, the impedance frequency characteristic of the ultrasonic vibrator 12 at the time of the load and the impedance & the impedance of the ultrasonic characteristic of the ultrasonic oscillator at the time of no load, by pre-aligning the two impedance frequencies The characteristic is actually measured: by pre-calculation, based on the calculated impedance of the intersection point p... The measured impedance Z is calculated to drive the target pulsation frequency fd of the ultrasonic vibrator 12. It is also possible to calculate the impedance frequency in advance by using the following structure: a correspondence relationship between the inclination a of the raw and the frequency fm of the intersection P, and measuring the plurality of impedances Z when the ultrasonic transducer 12 is driven by the electric oscillation of the plurality of frequencies f by measurement 'The inclination a of the impedance frequency is calculated from the plurality of frequencies f and the plurality of impedances z, and the target drive frequency fd is calculated based on the calculated inclination a of the impedance frequency characteristic. Including the helmet 哉, j±VAAF1 ..., the impedance frequency characteristics of the same-load condition of the load, because the frequency of the resonance point 圩 and the frequency of the anti-resonance point "1" during which the impedance z * difference is approximately the same, due to &;, the frequency 仏 of the intersection point p is calculated from the inclination 3 of the impedance frequency characteristic between the resonance point and the inverse 4 vibration point.

2014-8318-PF 28 !317304 Fig. 7 is a flow chart showing the tilting frequency based on the impedance frequency characteristic, and then the D-time counting target driving frequency of the first n^ element.

The frequency actually measures the slope a of the impedance frequency characteristic and the intersection point P16. " Correspondence relationship, after storing the correspondence relationship to store Qiu i, based on the inclination a of the impedance frequency characteristic, calculate the intersection point p rate fm, and then calculate the frequency difference of the target P' drive frequency fd 'ultrasonic generation assembly The action is as follows. Fig. 7 is the intersection point of the expansion 1 ..., the inclination of the impedance frequency characteristic, the rate f m , and then the calculation of the target drive frequency fd 0 g # in the handling of the nose (4) to the processing s.

However, the scanning frequency range is not π k ' /, and the 疋 impedance Z is different from the dry circumference, and is the same as the above-mentioned processing S11 lb of the processing of S16, which is described in FIG. . In order to measure the impedance Z, the frequency range of the scan is fixed to the virtual process in the above-mentioned process S11, and the purpose is to explore the z" given to the intersection point P, which is the impedance of the frequency fm/:: frequency fm of the intersection point P. The material fm is the center of the fixed frequency range. In this process S41 to the imaginary ς/β + inverse (10) point... Since the purpose is to explore the inclination a of the impedance frequency characteristic of the resonance point to the anti-shock point, :=(10) The range of the frequency fa, at least the package == frequency = rate range. By increasing the measurement point, the accuracy of the slope a to calculate the frequency characteristic is improved. In the process S47, the impedance is transported, and the impedance is 逆. The measurement impedance Z is measured, and the #z/151 measured by the measurement unit 频率 of the frequency calculation unit of the control unit 15 stores the inclination a of each of the _ impedance frequency characteristics of the ... μ and the frequency ' in the storage unit 16 . Impedance frequency characteristics in the correspondence between the impedance frequency characteristics of the frequency a and the intersection point P stored in the storage unit 丨6

2014-8318-PF 29 * 1317304 * Select the slope a corresponding to or the closest impedance frequency characteristic of the slope of the calculated impedance frequency characteristic, and obtain the frequency corresponding to the inclination a of the selected impedance frequency characteristic. Fm. Next, the frequency calculation unit 1 51 calculates the target drive frequency fd using the characteristic formula based on the acquired frequency fin, and notifies the calculated target drive frequency Μ to the drive frequency control unit 1 53, and simultaneously calculates the target drive frequency. The control ends the voltage control unit 1 52 (S48). When the frequency calculation unit 1 51 notifies that the target drive frequency calculation processing is completed, the voltage control unit 152 sets the amplification circuit 112 to amplify the AC signal from the oscillation circuit 113 at the amplification factor in the normal operation of the ultrasonic generation device i, and the target is obtained. The drive frequency calculation processing end notification frequency control unit 143 receives the notification, and the frequency control unit 143 ends the frequency control of the oscillation circuit 113 (S49). By the above operation, the normal operation of the target drive frequency calculation processing and the mouth-beam super-chopping device 1 is set to a possible state. • With the above structure, at a few points and at the minimum, it is measured at 2 points. Therefore, it is enough to run the target drive frequency calculation process more quickly. Further, in the above embodiment, the target drive frequency calculation processing operates when the power of the super chopping apparatus 1 is turned on, but is not limited thereto. Such as,

Alternatively, the activation switch may be turned on, and the ultrasonic generating device i may generate a supersonic wave. Alternatively, the target drive frequency calculation processing may be executed in the standby state in which the start switch is turned on after the power switch is turned "on". Alternatively, in the supersonic 2014-8318-PF 30 1317304, the wave generating device 1 is equipped with a secondary battery for supplying power, and when the charging function is provided, the target driving frequency calculation processing can also be performed during the charging process. The target drive frequency calculation processing in the above-described operation state, standby state, and charge state may be one time, or may be performed for a specific time (for example, a 5-minute interval after startup, a 1-minute interval after startup, a minute interval after startup, etc.) Run it repeatedly. Moreover, after the target drive frequency operation processing is finished, it is also possible to go to the normal operation. It is also possible to adopt the following configuration, in order to calculate the target drive frequency fd, measure the required impedance z, and then go to the normal operation 'The operation of calculating the target drive frequency fd using the measured impedance Z operation during the normal operation. In addition, in the above embodiment, after the arithmetic processing, when storing the Qiu 1R by the Liu Miao eye-moving frequency ultrasonic vibrator 12 = storing the target driving frequency ... moving Han Shu in U ¥ no load state impedance Z, The measurement of the resistance of the measurement by the ultrasonic impedance Z and the impedance stored in the storage unit 16 is determined by measuring the impedance of the Η 14 during the driving process of the Η 振 vibrator 12 under no load or with or under load. Drive frequency: Calculate 仃 Compare 'According to the comparison result line target drive frequency operation processing. According to the result of the judgment, Fig. 8 is a flowchart showing the nasal processing operation based on the gentleman anti-offset determination. Fig. 8 is a flow chart showing the operation target driving frequency; Fig. 8 (1) is a flow chart showing the storage operation of the impedance in the graph θ. ', dynamic frequency operation processing

(A), the camp skin is self-existing, the control department 7 field, I frequency calculation processing in the calculation of the spurs °卩1 5 to the nearest target; I:® β W different target drive frequency fd / target "area hands Μ by the drive unit U

2014-8318-PF 31 1317304 Dynamic t9 wave vibrator 12 (S51). Next, the measurement unit 14 measures the impedance Z of the ultrasonic transducer 12 that is being driven, and stores it in the storage unit 16 for the vertical operation target drive frequency calculation processing. In Fig. 8(B), the control P 15 is under load or no load. In this case, the target drive frequency fd calculated by the most recent-order eye frequency calculation process is driven by the drive unit = sound wave 112 (S61). Next, the measuring unit 14 measures the impedance z' of the ultrasonic transducer 12 that is driving the first two: and notifies the storage unit of the measurement result. Next, the control unit 15 stores the storage in the storage unit 16.

And the resistance of the measurement; ^ 7, L town! 5 Anti-Z is compared, and the comparison result is judged to be within a specific range (S63).疋 κ This judgment result and the difference are within a specific range (Yes), the control unit, and the 'mouth group processing, and the target drive frequency calculation processing is not executed. That is, = two M: The purpose of the drive frequency calculation processing is to drive the ultrasonic generation. In addition, when the result of the judgment is that the difference is not at the specific rib, the control unit 15 operates as a target drive frequency calculation process (s with the target drive frequency s Μ ). That is, the ultrasonic generating device 驱动 is driven. The boat movement frequency fd is operated in the case of the load shown in Fig. 8 (A) and (4). If there is a load or a negative condition, it can be understood by the figure in Figure 4, or the situation of the load is reversed. The current flowing to the supersonic 12 when there is a load can make a judgment, so 'measuring the flow to the ultrasonic vibrator

2014-8318-PF 32 •1317304 Surrounding environment change, resonance point The ultrasonic wave generator 1 does not need to operate as described above. When the anti-resonance point is not substantially fixed and stable, the target drive frequency calculation processing is executed. Further, the ultrasonic generating device 1 can be applied to an ultrasonic beauty device. ® 9 is a partial cross-sectional view showing an example of an ultrasonic generating device for an ultrasonic cosmetic device.

In Fig. 9, the ultrasonic cosmetic device 20 includes a casing (storage container) for preparing the above-described driving portion! i, the measuring unit i 4, the control unit 5, and the circuit block 22 of the storage unit 16, and the bonding type ultrasonic oscillation "23" including the ultrasonic transducer 12 and the horn 13. The casing 21 is made of, for example, synthetic resin, and includes a handle 2H that is held by the hand, and a vibration portion 2 that is attached to one end of the handle 2H. Inside the casing 21, in particular, the circuit block 22 is mounted inside the handle 2H, and an ultrasonic vibration block 23 is mounted on one surface (front surface) of the vibration plate portion 2' 2 to ensure that the radiation surface of the remaining team 13 is directly or through Sound wave

The transport member 31 comes into contact with an object such as the skin. Since the ultrasonic generating device is incorporated in the ultrasonic cosmetic device 2, the ultrasonic wave can be stably generated at the target driving frequency fd. Therefore, the ultrasonic cosmetic device 20 can effectively impart a cosmetic effect to the object. In particular, by using drugs to effectively act on the skin, beautiful skin is achieved. This impedance is in the relationship of (impedance (electric dust) / (current) as described above, and therefore, the current at the time of the known voltage and the voltage at the known current are equivalent to the impedance, in this sense, It is included in the impedance. That is, the 'substitute impedance' can be used in the case where the electric raft is known. In addition, 2014-8318-PF 33 '1317304 replaces the impedance 'in the case where the current is known as described above, this specification describes the summary The present invention is characterized in that the ultrasonic generating device according to one embodiment of the present invention is characterized in that it comprises: a driving portion for generating an electric vibration; and the electric power generated by the driving portion a supersonic vibrator in which a vibration is converted into a mechanical vibration of a supersonic wave; a transmission member that transmits the supersonic wave that converts the supersonic vibrator on one surface to a surface of another surface; The ultrasonic transducer impedance measuring unit; the ultrasonic vibration when the object in the mechanical vibration transmitting the ultrasonic wave contacts the load of the transmission member The impedance frequency characteristic of the sub-substance and the impedance of the impedance frequency characteristic of the ultrasonic vibrator when the object to be transmitted by the mechanical transmission of the ultrasonic wave is not in contact with the transmission member, and the impedance measured by the measuring unit are calculated. The target driving frequency of the ultrasonic transducer is driven to control the driving direction so that the ultrasonic transducer is driven by the calculated target driving frequency. x The ultrasonic generating device of the above configuration can be stably transmitted at the target driving frequency. Therefore, the ultrasonic generating device can effectively perform ultrasonic processing on the object. The ultrasonic generating device is characterized in that the measuring unit base: the driving unit applies a fixed amplitude to the ultrasonic vibrator. The voltage is applied to the current value of the ultrasonic transducer to measure the impedance.

The impedance is easily measured by the relationship of (impedance) == (electrode) / (current) by the ultrasonic generating device of the above configuration. 2014-8318-PF 34 1317304 The above-mentioned ultrasonic generating device is characterized in that the impedance of the intersection is measured in advance, and the impedance frequency of the ultrasonic vibrator when the transmission member is loaded with the mechanical oscillation of the ultrasonic wave is measured in advance. The characteristic and the object to be transmitted by the mechanical oscillation of the ultrasonic wave are not in contact with the impedance of the ultrasonic vibrator when the upper member is not loaded, and the value calculated in advance based on the second measurement result. In the ultrasonic generating device of the above configuration, since the impedance of the intersection point is calculated in advance, the ultrasonic wave can be stably generated by the dog at the target driving frequency f d ' suitable for the ultrasonic generating device. Further, in the above-described ultrasonic generating device, the control unit further has a feature that the measuring unit measures the vibration frequency and the anti-resonance frequency in the impedance frequency characteristic of the ultrasonic transducer based on the measured (four) vibration frequency and the inverse spectral oscillation. The frequency calculates the impedance of the above intersection. In the ultrasonic generating device having the above configuration, since the impedance of the intersection is calculated based on the actually measured wobble frequency and the antiresonant frequency, the influence of the manufacturing variation of the ultrasonic vibrator and the ultrasonic generating device on the target driving rate is reduced. Further, in the above-described ultrasonic generating apparatus, the target driving frequency is expressed by a linear function relating to the frequency of the intersection, and the control unit is characterized in that the target driving frequency is calculated using the linear function. In the ultrasonic generating device of the above structure, the target driving frequency fd is expressed as a linear function related to the frequency fm of the intersection point P, and therefore, the target drive is calculated.

The arithmetic processing of the dynamic frequency fd becomes simple, and the driving frequency f d can be calculated in a short time. * 2014-8318-PF 35 1317304 ^External 'in the above-mentioned ultrasonic generating device', the above target driving frequency, 4疋, the frequency is the distance from the resonance point or the anti-resonance point considering the external variation due to the variation of the impedance frequency characteristic . The ultrasonic generating device of the structure, as described above, needs to pass the » 疋 γ % driving frequency fd to determine whether there is no load or a load failure %•, which can be measured by the target driving frequency fd. The resistance of the supersonic oscillator is easy to discriminate against the condition of the load. 疋',,, 3' in the above-mentioned ultrasonic generating device, the characteristics of the above-mentioned control unit The plurality of impedances at the time of driving the supersonic=the case are measured by electrical oscillations at a plurality of frequencies, and the target is calculated based on the inclination of the calculated impedance frequency characteristic based on the inclination of the plurality of frequencies and the tenth impedance frequency. Driving frequency. In the ultrasonic generating device of the above structure, the target driving frequency is calculated based on the tilt of the impedance frequency characteristic # , . . . , and only a few points are measured, and the brother is 2 points. Since the impedance z is sufficient, the target drive frequency calculation processing can be further operated. Further, the above-described ultrasonic generation device is characterized in that it is further provided with the drive at the target drive frequency. In the above,, , , , +. ^ A $ a wave oscillator when the above-mentioned no-load resistance or the impedance at the time of load on the load is stored without load or when the load is present, the ε ^ ^ 乂 escape measurement unit is measured. The impedance of the above-mentioned supersonic vibrator in the driving state is compared with the impedance stored in the super-wave section of the Jiangchao, and the impedance of the root is extracted and the target driving frequency is calculated as described above, and based on the comparison result, it is judged whether or not the result of the judgment is calculated. Calculate the above target drive

2014-8318-PF 36 1317304 Frequency The ultrasonic generating device of the above configuration does not have a _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Further, the ultrasonic cosmetic device according to another embodiment of the present invention is one of the above-described ultrasonic generating devices. The material wave beauty device of the above structure can generate ultrasonic waves with a target drive. Because, 匕, the ultrasonic beauty device can effectively give a beauty effect to: In order to introduce the invention of the present application, the foregoing description has been appropriately and fully described with reference to the accompanying drawings. As a peer, it should be recognized that changes and/or improvements can be made to the embodiments. Therefore, by the peers, the second is also 2; or; as long as the program does not exceed the scope of the patent application, the modification plan or improvement plan is included in the scope of the rights of the corresponding patent target book. BRIEF DESCRIPTION OF THE DRAWINGS: (A) to (c) are schematic views for explaining the basic contents of the present invention. Fig. 2 is a flow chart showing the operation of the target drive driving process of the ultrasonic generating device according to the embodiment of the ultrasonic generating device according to the embodiment. 4 is a schematic diagram illustrating a target driving frequency. Figure 5 shows the frequency of calculating the intersection point based on the vibration points and the anti-spectral vibration points.

2014-8318-PF 37 1317304 Rate, a flow chart for calculating the target drive frequency. Point impedance Figure 6 is a flow diagram for calculating the intersection based on the resonance point and the anti-resonance point. Fig. 7 is a flow chart showing the calculation of the intersection rate based on the impedance frequency characteristic and the calculation of the target drive frequency. Lanes 8(A) and (B) are flowcharts showing the calculation process based on the impedance bias 榡 drive frequency. Fig. 9 is a partial cross-sectional view showing the ultrasonic generating device for supersonic. The point shift is judged whether or not the wave cosmetic device is operated. Fig. 1 〇 (A), (β) are schematic diagrams showing the structure of the ultrasonic wave device related to the background art. Figures 11(A) and (() are schematic diagrams showing the structure of a supersonic device related to the background art. Schematic diagrams 1 2 (A) and (B) are diagrams showing the characteristics of the ultrasonic oscillation block. 13 (A) and (B) are diagrams 14(A) and (B) showing the characteristics of the ultrasonic oscillation block. It is a description of the main component symbols indicating the vibration mode of the ultrasonic vibration block. 1. 500A, 500B to ultrasonic generation devices; 2. 23 to ultrasonic oscillation blocks; 11, 511A, 511B to drive units; 2014-8318-PF 38 - 1317304 12, 512A, 512B ~ ultrasonic vibrator; 1 3, 51 3 A, 51 3 B ~ '^ thorn 0 eight; 14 ~ measurement unit; 1 5 ~ control unit; 1 6 ~ storage unit; Ultrasonic beauty device; . 21 ~ casing (housing container); 2 2 ~ circuit block; Φ 112 ~ amplification circuit; 113 ~ oscillation circuit; 141 ~ current detection circuit; ' 142 ~ impedance calculation unit; - 143 ~ frequency control 151 to frequency calculation unit; 152 to voltage control unit; 153 to drive frequency control unit; ® 513-1A, 513-1B to joint surface; 513-2A, 513-2B to radiation surface; 514A to adhesive; 514 B ~ bolts. 39

2014-8318-PF

Claims (1)

, 1317304 X. Patent application scope: 1-type ultrasonic generating device, characterized in that: the driving portion generates an electric oscillation; and the acoustic vibrator converts the electric vibration generated by the driving portion into a super-chopping mechanical oscillation The vertical member of the wheel member is joined to the ultrasonic vibrator on one surface, and the supersonic wave-converted mechanical device "transferred to the other surface"; wI _ 敎 portion, 敎 the above-mentioned ultrasonic vibrator Impedance; contact? : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : When the load is not applied, the impedance of the impedance frequency characteristic of the ultrasonic transducer and the impedance measured by the measuring unit calculate the target driving frequency of the ultrasonic transducer. The above-mentioned Zhao Li, the ancient 斤 斤 贝 控制 control The drive unit oscillates the target drive frequency in which the S/vibrator is different. 2. The measurement unit according to the third aspect of the invention, wherein the driving unit flows into the ultrasonic vibrator (four) in a voltage at the time of the ultrasonic wave, and the object to be oscillated contacts the load-bearing mechanical vibration of the transmission member. We generate and transmit the mechanically vibrated object of the above-mentioned ultrasonic wave 2014-8318-PF 40 •1317304 Rate material W: The impedance frequency characteristic of the above-mentioned ultrasonic vibrator when there is no load on the transmission wheel member, based on the measurement result The calculated value. In the ultrasonic generating device according to the first aspect of the invention, wherein the frequency (four) crotch portion is further configured by the measuring unit, the vibration frequency and the inverse spectral frequency of the impedance of the ultrasonic vibrator are measured, and based on the measured spectrum 1 The rate and the anti-resonant frequency are used to calculate the impedance of the above intersection. φ μ, the ultrasonic generating device according to the first aspect of the patent range, the A function return target driving frequency is expressed as a linear rate related to the frequency of the intersection point, and the control unit calculates the target driving frequency using the linear function. The ultrasonic generating device according to the first aspect of the patent, which is resistant to external factors. The amplitude of the vibration point or resonance point is the frequency that takes into account the influence of the change in the characteristics of the '', '' In the ultrasonic generating device according to the first aspect of the invention, the measuring unit measures the electric power at a plurality of frequencies, and the rate and the plurality of frequencies. Calculate the slope of the impedance frequency and the slope of the multiple frequency-response frequency characteristics. The calculated resistance s indicates the driving frequency. The ultrasonic wave generated in the first aspect of the patent range is generated, and the second drive is used to store the drive wave at the target drive frequency: the impedance at the time of the load or the impedance at the time of the load: The measuring unit measures the impedance in the driving state of the ultrasonic wave or the negative skin vibrator at the time of the H load, and the impedance and the memory name μ, +. + measured in 2014-8318-PF 41 1317304 are opened. The impedance in the storage unit is judged based on the result of the comparison, and the target (4) (4) is calculated by calculating the target result. + Roots 2:! The ultrasonic wave-splitting device is characterized in that the ultrasonic wave generating device according to any one of the items 1 to 8 is applied.匈 Hungary 2014-8318-PF 42