TWI316377B - Stage mechanism - Google Patents

Stage mechanism

Info

Publication number
TWI316377B
TWI316377B TW095119114A TW95119114A TWI316377B TW I316377 B TWI316377 B TW I316377B TW 095119114 A TW095119114 A TW 095119114A TW 95119114 A TW95119114 A TW 95119114A TW I316377 B TWI316377 B TW I316377B
Authority
TW
Taiwan
Prior art keywords
stage mechanism
stage
Prior art date
Application number
TW095119114A
Other languages
Chinese (zh)
Other versions
TW200706055A (en
Inventor
Yasuo Konishi
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of TW200706055A publication Critical patent/TW200706055A/en
Application granted granted Critical
Publication of TWI316377B publication Critical patent/TWI316377B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H01J2237/20228—Mechanical X-Y scanning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20271—Temperature responsive devices

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Units (AREA)
TW095119114A 2005-06-09 2006-05-30 Stage mechanism TWI316377B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005169973 2005-06-09

Publications (2)

Publication Number Publication Date
TW200706055A TW200706055A (en) 2007-02-01
TWI316377B true TWI316377B (en) 2009-10-21

Family

ID=37498313

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095119114A TWI316377B (en) 2005-06-09 2006-05-30 Stage mechanism

Country Status (5)

Country Link
JP (1) JP4614105B2 (en)
KR (1) KR100904647B1 (en)
CN (1) CN101128908B (en)
TW (1) TWI316377B (en)
WO (1) WO2006132111A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4906412B2 (en) * 2006-06-29 2012-03-28 株式会社東京精密 Prober
KR100957190B1 (en) * 2007-08-29 2010-05-11 (주)피에조테크놀리지 Stage apparatus using a Piezoelectric linear motor
KR101352567B1 (en) * 2008-03-04 2014-01-24 삼성테크윈 주식회사 Linear Transfer Stage Apparatus
WO2010041663A1 (en) * 2008-10-08 2010-04-15 株式会社 日立ハイテクノロジーズ Stage drive device
CN102901637B (en) * 2012-09-25 2016-05-18 宁波信泰机械有限公司 Automobile water is cut test platform
CN102903593B (en) * 2012-10-11 2015-03-11 中国地质科学院地质研究所 Sample stage in sealed cavity
CN103921136B (en) * 2014-04-29 2016-04-06 浙江博雷重型机床制造有限公司 A kind of separate type tooling platform structure
US20210313138A1 (en) * 2018-09-12 2021-10-07 Hitachi High-Tech Corporation Mirror electronic inspection device
KR102298391B1 (en) * 2020-01-21 2021-09-06 (주)브이에이디인스트루먼트 Stage apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62207993A (en) * 1986-03-08 1987-09-12 オムロン株式会社 Xy stage
CN1017377B (en) * 1989-09-11 1992-07-08 中国科学院化学研究所 Double tongue scanning tunnel microscope regulating device
JPH056848A (en) * 1991-06-27 1993-01-14 Fujitsu Ltd Moving stage for alignment use and exposure alignemnt method
CN2405217Y (en) * 2000-01-25 2000-11-08 鲍立威 Adjusting device for optical lens detecting instrument
JP4766360B2 (en) * 2001-02-26 2011-09-07 株式会社安川電機 Flat type XY table

Also Published As

Publication number Publication date
KR20070098949A (en) 2007-10-05
JPWO2006132111A1 (en) 2009-01-08
KR100904647B1 (en) 2009-06-25
TW200706055A (en) 2007-02-01
CN101128908A (en) 2008-02-20
JP4614105B2 (en) 2011-01-19
WO2006132111A1 (en) 2006-12-14
CN101128908B (en) 2010-06-23

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees