TWI315476B - Method for substrate sorting and dispatching - Google Patents

Method for substrate sorting and dispatching

Info

Publication number
TWI315476B
TWI315476B TW095125953A TW95125953A TWI315476B TW I315476 B TWI315476 B TW I315476B TW 095125953 A TW095125953 A TW 095125953A TW 95125953 A TW95125953 A TW 95125953A TW I315476 B TWI315476 B TW I315476B
Authority
TW
Taiwan
Prior art keywords
dispatching
substrate sorting
sorting
substrate
Prior art date
Application number
TW095125953A
Other languages
Chinese (zh)
Other versions
TW200804905A (en
Inventor
Muhcherng Wu
Te Shan Chen
Original Assignee
Univ Nat Chiao Tung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Chiao Tung filed Critical Univ Nat Chiao Tung
Priority to TW095125953A priority Critical patent/TWI315476B/en
Priority to KR1020060101297A priority patent/KR100816624B1/en
Publication of TW200804905A publication Critical patent/TW200804905A/en
Application granted granted Critical
Publication of TWI315476B publication Critical patent/TWI315476B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Thin Film Transistor (AREA)
  • Tests Of Electronic Circuits (AREA)
TW095125953A 2006-07-14 2006-07-14 Method for substrate sorting and dispatching TWI315476B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW095125953A TWI315476B (en) 2006-07-14 2006-07-14 Method for substrate sorting and dispatching
KR1020060101297A KR100816624B1 (en) 2006-07-14 2006-10-18 Method for substrate sorting and dispatching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095125953A TWI315476B (en) 2006-07-14 2006-07-14 Method for substrate sorting and dispatching

Publications (2)

Publication Number Publication Date
TW200804905A TW200804905A (en) 2008-01-16
TWI315476B true TWI315476B (en) 2009-10-01

Family

ID=39220640

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095125953A TWI315476B (en) 2006-07-14 2006-07-14 Method for substrate sorting and dispatching

Country Status (2)

Country Link
KR (1) KR100816624B1 (en)
TW (1) TWI315476B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106449495B (en) * 2016-10-17 2019-04-30 武汉华星光电技术有限公司 Substrate graduation deposit method
CN110906980B (en) * 2019-11-14 2021-10-08 深圳市华星光电半导体显示技术有限公司 Detection system and detection method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008000003A (en) * 2004-10-01 2008-01-10 Oncorex Inc Pim-1 ACTIVITY/PROTEIN INHIBITING PHARMACEUTICAL
JP4834472B2 (en) * 2006-06-20 2011-12-14 株式会社東芝 Information processing apparatus, moving image reproduction method, and program
JP2008002005A (en) * 2006-06-21 2008-01-10 Shimada Shoji Kk Garment pad

Also Published As

Publication number Publication date
KR100816624B1 (en) 2008-03-24
TW200804905A (en) 2008-01-16
KR20080007065A (en) 2008-01-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees