1314731 九、發明說明： 【發明所屬之技術領域】 本1月涉及種物鏡致動褒置及適用該物鏡致動裝置之光學拾取 皁疋’尤指-種用於高密度記錄/再現裝置之物鏡致動裝置及光學拾取 (70 —- 單7G。 【先前技術】 光碟已成為現今主要的資訊存儲介質，並且隨著光碟規格由CD、 DVD至有可能成為下一代光碟規格之Biu筒㈣之不斷演進，光碟 存儲合里獨增加。在光碟尺林變之情況下，直接導致光碟記錄 層之數據記錄密度愈發致密。請參看下表所示，其為上述光碟規格所 制疋之執道間距及最小凹坑長度。 光碟規格 軌道間距 最小凹坑長度1314731 IX. Description of the invention: [Technical field to which the invention pertains] This January relates to an objective lens actuating device and an optical pickup saponin suitable for the objective lens actuating device, in particular, an objective lens for a high-density recording/reproducing device Actuating device and optical pickup (70--single 7G. [Prior Art] Optical disc has become the main information storage medium of today, and with the disc specifications from CD, DVD to Biu tube (four) which may become the next-generation optical disc specification In the case of evolution, the disc storage has increased independently. In the case of a disc change, the data recording density of the disc recording layer is directly increased. Please refer to the table below, which is the disc spacing of the above disc specifications. And minimum pit length. Disc specification track pitch minimum pit length
Blu-ray Disk 〇·32μπι 400nm 149nm --- --- r — _ 丄Hvnm 上表可知，隨著光碟間距及凹坑長度之不斷減小，光束能否 禮落於目標位置上已成為決定雜崎/再現裝置之讀/寫性能之重 因素。尤其是對於Bhl_ray光碟而言，其相鄰執道之間距僅為獅 當光束稱微偏離目標位置所處之軌道時，就會受到相鄰軌道之干擾r 得不到準確的訊息。是以，對於肌娜光碟之記錄/再現裝置，哗 聚焦精確度翻__，魏精確度更高達 〇·〇1μπι。 ""、 巾柄轉7再難置對縣落於柄位置之調節過I W粗略騎料部份。當絲現處之位其所” 1314731 應之光碟位置偏離較遠時’光碟記錄/再現裝置先進行粗略調節。此時， 整個光學拾取單元會於光碟徑向移動，以使光束接近目標位置。由於 光束是藉由物鏡會聚於光碟之記錄層上，從而再藉由物鏡致動器調節 物鏡之水平或豎直方向上之位置以實現尋轨或聚焦，該過程即為上述 之精密調節過程。 請參看第-圖’其揭示-CD或DVD記錄/再現裝置通常採用之物 鏡致動器100。該物鏡驅動裝置1〇〇具有一磁轭板11〇，磁輛板11〇 一 端°又置—懸置支撐板。物鏡142收容固定於-物鏡架14〇中，並藉 由複數對稱分佈之懸置線130安裝於懸置支撐板12〇上。由此，將物 鏡142及物鏡架140整體懸置於磁轭板11〇上方，並保證當物鏡架14〇 受到外力時可相對磁轭板110移動。一聚焦線圈144水平纏繞於物鏡架 140上對为別具有矩形繞線結構之跟蹤線圈146豎直纏繞於聚焦線 圈144的相對兩端。磁扼板110上還設有兩對内、外磁軛ιΐ2、η*， 每對内 '外磁耗112、114分別將-跟縱線圈146挟持於二者間。外磁 軛114與跟蹤線圈146相對之表面貼附一磁體118，以提供一永久磁 场。並且磁體118產生之磁通藉由内、外磁輛112、114及磁概板加 之引導施加於聚焦線圈144及跟縱線圈146上，並形成閉合磁路。從 而通過控概骂鱗圈144及職賴的電流產生所需的電磁 力，藉由電磁力於豎直方向或水平方向上移動物鏡架⑽，以此實現聚 焦或尋執。 然，上述結構之物鏡致動器之驅動精度有限，無法達到記錄/再現 1314731 下一代光碟規格如Blu_ray光碟所要求之精確度，從而不能適用於下一 代同搶度光碟記錄/再職置巾。是以，提供__種具有高_精度之物 鏡致動器’以滿足下—代高密度光碟記錄/再現I置之需求實為必要。 【發明内容】 本毛月之目的在於提供一種具有高驅動精度之物鏡致動裝置。 本發明之另—目的纽提供—㈣祕高密度辅記錄/再現裝置 之光學拾取單元。 本發明之技術方案為：提供—種物鏡致練置，其包括—物鏡架 以收谷物鏡’-第-微致動器及一第二微致動器，其中該第一微致 動為與物鏡架相連接以帶動物鏡架沿光雜向移動，該第二微致動器 亦與物鏡架树接以㈣物齡沿垂直於細方向移動。 本毛明之另-技術方案為：提供—種光學拾取單元，其包括一用 於發出特定奸光峨之雷射源，—物細於將雷觀發出之光訊號 會聚於光叙記縣上，_光錄_祕接收被光碟之靖層反射 之光訊號並轉成電職輸出，及—物鏡致練置。該物鏡致動裝置呈 有一物鏡架以收容物鏡於其中，—第_微致動器及—第二觀動器。 ”中該第-微致動&與物歡相連接以帶動物鏡架沿光碟徑向移 動，該第二微致動n亦與物鏡架相連接以帶動物鏡架沿垂直於光碟方 向移動。 μ 尋軌精度之要求 與習知技術姐，由於本伽_第—、第二微軸器產生之秦 動《滅義，從·有高驅動精度，滿足高密度光碟對聚焦 1314731 【實施方式】 請參看第二® ’ -_於高密度辅記錄/再現裝置之光學拾取單 凡2包括-光料統(未標產生紅觸上雜收自光碟上 返回之雷射光’及-物鏡致動裝置3〇用於調節絲之無；及落於光碟 上之位置。 該光學系統包括-雷射源21、一光電檢測器28、一繞射光拇22、 光分束器23、-準直透鏡24、-反射鏡25、一柱面鏡27及一物鏡 26。由於雷射源21、光電檢測器28、繞射光柵22、光分束器π、準 直器24、反射鏡25、柱面鏡27之位置無須調節，因此其可直接固定 於光學拾取裝置之基座(ϋ未示)上。物鏡26藉_触練置3〇安裝 於基座上。 雷射源21可為半導體雷射二極體，用於産生特定波長之雷射光束 (未標示）。從雷射源21發出之雷射光束通過繞射光栅22分成一主光束 及二辅助光束，其中主光束用以記錄/讀取資訊及聚焦調節，二辅助光 束用以尋軌。該雷射光束通過繞射光栅22後入射至光分束器23,光分 束器23使部份雷射光束通過柱面鏡27後入射至光電檢測器28，以監 測雷射光束之強度，根據所測得之強度控制雷射源21之輸出功率。同 時光分束器23將雷射光束之其餘部份入射至準直透鏡24，準直透鏡 24將其轉成平行光束後入射至反射鏡25。雷射光束通過反射鏡25轉 變傳輸方向後入射至物鏡26。該雷射光束被物鏡26會聚至光碟9上， 並被光碟9反射形成反射光束。反射光束依次通過物鏡26、反射鏡25、 準直透鏡24、光分束器23和柱面鏡27後入射到光電檢測器28上以産 8 1314731 生電訊號輸出。 請參看第三_四圖，物鏡致動裝置3〇包括一物鏡㈣、一懸 置安裝壁32、二懸f 33、二對懸掛線34及第—、第二微致動器40、 I其中迦繼32細以她取單蚊基_未示)中。 -懸臂33位於同-水平面上’樹於光軸峨。每_懸臂幻 一端固裝壁32上—。_ 31收容物鏡 26，並由二龍親34 ^自_。細物鏡架31 懸置於光學拾取單元2之基座上，且當受到外力時物鏡架可於光碟之 徑向或垂直於光碟表面之方向移動。 物鏡架31呈矩形中空結構’其内部具有—開口 (圖未示），物鏡26 收容於該開口中。物鏡26與物鏡架31可由相同材質製成’二者藉由 鑄造工藝-體成型。是以減少光學拾取裝置的高度及尺寸；並且，二 者具有相同之光學參數，如折射率、阿等，從而不會於該光學系 統中引入光學像差，進—步確保光學魏財良好之光學性能。 物鏡架31具有-頂面31〇，頂面上開設二第一凹槽犯。二 第一凹槽3!2為T形凹槽，平行於光碟徑向對稱分佈於該開口兩側。 第一凹槽312 -端開σ(圖未示)以與第二微致動器％相配合。物鏡架 η位於光碟徑向之側面314上開設一第二凹槽316，第二凹槽316亦 為Τ形凹槽，係沿豎直方向分佈，且具有—貫穿頂面綱之開口训 以與第一微致動器4〇相配合。 第—、第二微致動器 4〇、50 係採用 MEMS(MicroEIecir〇mechanical 1314731 .Blu-ray Disk 32·32μπι 400nm 149nm --- --- r — _ 丄Hvnm The above table shows that as the disc spacing and pit length decrease, it is a decision to decide whether the beam can be placed on the target position. The weight of read/write performance of the Saki/Reproduction device. Especially for Bhl_ray discs, the distance between adjacent lanes is only the trajectory of the lion when the beam is slightly deviated from the target position, and the interference from the adjacent track is not accurate. Therefore, for the recording/reproducing device of the muscle optical disc, 聚焦 the focus accuracy is __, and the precision of the Wei is higher than 〇·〇1μπι. "", towel handle turn 7 is difficult to set the county to fall in the handle position of the I W roughly riding part. When the silk is in the position where the 1314731 disc is far away from the position, the disc recording/reproducing device first makes a coarse adjustment. At this time, the entire optical pickup unit moves in the radial direction of the optical disc to bring the light beam close to the target position. Since the light beam is concentrated on the recording layer of the optical disk by the objective lens, and then the position of the objective lens in the horizontal or vertical direction is adjusted by the objective lens actuator to realize tracking or focusing, the process is the above-mentioned precise adjustment process. Please refer to the figure - FIG. 2 - the objective lens actuator 100 which is generally used in a CD or DVD recording/reproducing apparatus. The objective lens driving device 1 has a yoke plate 11 〇, and the magnetic plate 11 is at one end — The support plate is suspended. The objective lens 142 is received and fixed in the objective lens frame 14 and is mounted on the suspension support plate 12 by a plurality of symmetrically distributed suspension wires 130. Thereby, the objective lens 142 and the objective lens frame 140 as a whole Suspended above the yoke plate 11〇 and ensure that the objective lens holder 14 is movable relative to the yoke plate 110 when subjected to an external force. A focusing coil 144 is horizontally wound on the objective lens holder 140 for a tracking coil having a rectangular winding structure. 146 vertical Straightly wound on opposite ends of the focusing coil 144. The magnetic yoke plate 110 is further provided with two pairs of inner and outer yokes ΐ2, η*, and each pair of inner magnetic charges 112, 114 respectively - with the vertical coil 146 Between the outer yoke 114 and the surface of the tracking coil 146, a magnet 118 is attached to provide a permanent magnetic field, and the magnetic flux generated by the magnet 118 is guided by the inner and outer magnets 112, 114 and the magnetic plate. It is applied to the focusing coil 144 and the vertical coil 146, and forms a closed magnetic circuit, thereby generating the required electromagnetic force by controlling the current of the scale ring 144 and the current, by electromagnetic force in the vertical or horizontal direction. The objective lens holder (10) is moved to achieve focusing or searching. However, the objective lens actuator of the above structure has limited driving precision, and cannot achieve the accuracy required for recording/reproducing 1131731 next-generation optical disc specifications such as Blu-ray discs, and thus cannot be applied to The next generation is the same as the CD record/replacement towel. Therefore, it is necessary to provide a high-precision objective lens actuator to meet the needs of the next-generation high-density optical disk recording/reproduction I. SUMMARY OF THE INVENTION The invention provides an objective lens actuating device with high driving precision. Another object of the present invention provides an optical pickup unit of the (4) secret high-density auxiliary recording/reproducing device. The technical solution of the present invention is to provide an objective lens for training. Positioning, comprising: an objective lens holder for receiving a grain mirror'---microactuator and a second microactuator, wherein the first microactuation is connected with the objective frame to move the animal frame along the light miscellaneous The second microactuator is also connected to the object frame tree to move (4) the object age perpendicular to the thin direction. The other technical solution of the present invention is to provide an optical pickup unit, which includes a special light for emitting The laser source of 峨 — — 物 物 物 将 将 将 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 雷 ray ray ray ray ray ray ray ray ray ray ray ray ray ray To practice. The objective lens actuator has an objective lens holder for receiving an objective lens therein, a - microactuator and a second viewer. The first-microactuation & is connected to the object to move radially along the optical disk with the animal frame, and the second micro-actuation n is also connected to the objective frame to move the animal frame perpendicular to the optical disk. The requirements of tracking accuracy and the know-how of the technology, due to the gamma-first and second micro-axis generated by the Qin-Ming "extinction, from the high drive accuracy, to meet the high-density optical disc to focus 1314731 [implementation] Please Refer to the second ® ' -_ optical pickup unit for high-density auxiliary recording/reproducing device 2 including - light material system (unmarked to produce red-touch on the laser light returned from the optical disk' and - objective lens actuating device 3 The optical system includes a laser source 21, a photodetector 28, a diffracting optical element 22, an optical beam splitter 23, a collimating lens 24, a mirror 25, a cylindrical mirror 27 and an objective lens 26. Since the laser source 21, the photodetector 28, the diffraction grating 22, the optical beam splitter π, the collimator 24, the mirror 25, the cylindrical mirror 27 The position does not need to be adjusted, so it can be directly fixed to the base of the optical pickup device (not shown). Objective lens 26 The laser source 21 can be a semiconductor laser diode for generating a laser beam of a specific wavelength (not shown). The laser beam emitted from the laser source 21 passes through The diffraction grating 22 is divided into a main beam for recording/reading information and focus adjustment, and two auxiliary beams for tracking. The laser beam passes through the diffraction grating 22 and is incident on the optical beam splitting. The beam splitter 23 causes a portion of the laser beam to pass through the cylindrical mirror 27 and is incident on the photodetector 28 to monitor the intensity of the laser beam and control the output power of the laser source 21 based on the measured intensity. At the same time, the optical beam splitter 23 incidents the remaining portion of the laser beam onto the collimator lens 24. The collimator lens 24 converts it into a parallel beam and then incident on the mirror 25. The laser beam is incident by the mirror 25 after the transmission direction is changed. To the objective lens 26. The laser beam is concentrated by the objective lens 26 onto the optical disk 9 and reflected by the optical disk 9 to form a reflected light beam. The reflected light beam sequentially passes through the objective lens 26, the mirror 25, the collimator lens 24, the optical beam splitter 23, and the cylinder. The mirror 27 is incident on the photodetector 28 to produce 8 1314731 Bioelectric signal output. Please refer to the third to fourth figure, the objective lens actuator 3〇 includes an objective lens (4), a suspension mounting wall 32, two suspensions f 33, two pairs of suspension wires 34 and the first and second The actuators 40, I are in the form of a single mosquito net _ not shown. - The cantilever 33 is located on the same-horizontal plane 'trees on the optical axis 峨. Each _ cantilever end of the fixed wall 32. 31. The objective lens 26 is received by the two dragons 34. The fine object frame 31 is suspended on the base of the optical pickup unit 2, and the object frame can be radially or perpendicular to the surface of the optical disk when subjected to an external force. The objective lens holder 31 has a rectangular hollow structure 'with an opening (not shown) inside, and the objective lens 26 is received in the opening. The objective lens 26 and the objective lens holder 31 can be made of the same material. Both are formed by a casting process. The purpose is to reduce the height and size of the optical pickup device; and both have the same optical parameters, such as refractive index, A, etc., so that optical aberrations are not introduced into the optical system, and the optical film is ensured to be good. Optical performance. The objective frame 31 has a top surface 31〇, and two first grooves are formed on the top surface. The first groove 3!2 is a T-shaped groove which is symmetrically distributed on both sides of the opening in a radial direction parallel to the optical disk. The first groove 312 - is open at σ (not shown) to mate with the second microactuator %. The object frame η is located on the side 314 of the radial direction of the optical disc to define a second recess 316. The second recess 316 is also a Τ-shaped groove, which is distributed in a vertical direction and has an opening through the top surface. The first microactuator 4 〇 mates. The first and second microactuators 4〇, 50 are MEMS (MicroEIecir〇mechanical 1314731.
System，微電子機械系統)技術形成之半導體器件，從而具有高精度及 較小尺寸。請同時參看第五鼠第六圖，第—微致鮮4Q係由單晶石夕 材料製成，其包括對稱分佈之二固定部42及—可動部46，其中固定部 幻安裝固定於光學拾取裝置之基座上，可動部46與物鏡架叫請參看 第四圖)相連接。二固定部42結構相同，且相對設置，並與結合處形成 -沿軸向延伸之通孔42G，可動部46收容於通孔42G中。複數梳指似、 姬分別沿固定部42與可動料之二相對側呵未標示肺延伸，且 平饤乂錯排列，相鄰梳指422、462之間具有相等的間隙。可動部奶 之二相對末端分別延伸出固定部42，且分別具有一電極㈤未示广並 於其中-末端沿其轴向向外延伸形成一連桿彻。連桿揣具有一丁 形末端465以與物鏡架31之7形第二凹槽灿相配合，從而將連桿撕 滑動收容於物鏡架31中。 明 > 看第七圖，第二微致動器5〇亦由單晶矽材料製成，其結構與 第一微致動器4G之結構相似。第二微致動ϋ 50包括二對稱分佈之固 定部52及-可動部56，其中固定部52 @定於光學拾取裝置之基座上， 可動部56與物鏡架31之頂面31〇相連接。固定部&之中心開設一軸 向貝穿之通孔(圖未示），可動部56收容於該通孔中。複數梳指切、 562分別自固定部52與可動部56之二相對側面(未標示)垂直延伸，且 相互間平行父錯排列。相鄰梳指522、562之間具有相等的間隙。可動 56之中心位置亦開設—軸向貫穿之通孔560，以允許來自物鏡26(請 參看第二圖)之光束穿過可動部56入射至光碟9(請參看第二圖)上。— 1314731 對電極(圖未艰卿成於w %的二相_，以輸入驅動電 ^ ^動P 56之其中一末端向外延伸二倒L形連桿564，其對稱設於 通謂之兩側’以與物鏡架31之了形第—凹槽312相配合，從而將 -連桿564滑動收容於物鏡架3ι中。 當高密度__觀健記鱗料貌㈣，光料統就會 輸出1訊號。根據該電訊號可獲得一聚焦控制訊號及一跟縱尋執控 制訊號。㈣輯顯示冑娜卩物胁雜㈣上之位置時， 、\、’轉職置之做控繼(圖未示)提供—合適至第二微致 動50之電極上。梳指522、562之相對側面間就會產生靜電力，該 Λ \ S驅動可動部56於雜向上移動’從而帶動物鏡26移動實現 聚焦^卩。哥軌跟縱·係藉由第—微致動請產生之靜電力作為驅 動物鏡26於光碟之徑向移動。由於第—微致動器⑽之工作過 程’、上述第—微致動II 5G之聚朗節過程相同，此處不舰重複說明。 由於採用第-、第二微致動器4〇、5〇,聚焦、尋執精確度可達施瓜 以内。由於上述實施例第一、第二微致動胃4〇、5〇採用單晶石夕製成， 其聚焦、寻軌精確度藉可達到1〇nm以内，滿足下一代高密度高容量光 ”、栳之品求並且微致動器採用MEMS技術製成，其體積、重量遠 遠低於傳統之音圈馬達。 综上所述，本發明符合發明專利要件，爰依法提出專利申請。惟， 以上所述者僅為本發日狀紐實關，舉絲悉本紐藝之人士，在 援依本案發明精麵作之等效料錢化，皆應包含於町之申請專 η 1314731 利範圍内。 【圖式簡單說明】 第一圖係傳統物鏡致動裝置之立體圖。 第二圖係本發明光學拾取裝置之結構示意圖。 第三圖係本發明之物鏡致動裝置之結構示意圖。 第四圖係第三圖之物鏡致動裝置之分解示圖。 第五圖係本發明之第一微致動器之立體圖。System, microelectromechanical systems) technology to form semiconductor devices with high precision and small size. Please also refer to the sixth picture of the fifth mouse, which is made of single crystal stone material, which includes two symmetrically fixed portions 42 and a movable portion 46, wherein the fixed portion is magically mounted and fixed to the optical pickup. On the base of the device, the movable portion 46 is connected to the objective lens frame (see the fourth figure). The two fixing portions 42 are identical in structure and are disposed opposite to each other, and form a through hole 42G extending in the axial direction from the joint portion, and the movable portion 46 is received in the through hole 42G. The plurality of comb fingers, Ji, respectively, along the opposite side of the fixed portion 42 and the movable material, do not indicate the lung extension, and are arranged in a wrong manner, and the adjacent comb fingers 422, 462 have equal gaps. The opposite ends of the movable portion of the milk portion respectively extend from the fixing portion 42, and each has an electrode (5) which is not shown wide and has a connecting rod extending outward in the axial direction thereof. The link 揣 has a butt-shaped end 465 to cooperate with the 7-shaped second groove of the objective lens holder 31 to slidably receive the link in the objective lens holder 31. > Looking at the seventh figure, the second microactuator 5 is also made of a single crystal germanium material, and its structure is similar to that of the first microactuator 4G. The second micro-actuator 50 includes two symmetrically distributed fixing portions 52 and a movable portion 56, wherein the fixing portion 52 is fixed on the base of the optical pickup device, and the movable portion 56 is connected to the top surface 31 of the objective lens holder 31. . The center of the fixing portion & is provided with a through hole (not shown) through which the shaft is inserted, and the movable portion 56 is accommodated in the through hole. The plurality of comb fingers and cut ends 562 extend perpendicularly from the opposite sides (not shown) of the fixed portion 52 and the movable portion 56, and are arranged in parallel with each other. There is an equal gap between adjacent fingers 522, 562. The center position of the movable 56 is also opened - an axial through hole 560 to allow the light beam from the objective lens 26 (see Fig. 2) to enter the optical disk 9 through the movable portion 56 (see Fig. 2). — 1314731 Counter electrode (the two phases _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The side ' cooperates with the shape-groove 312 of the objective lens holder 31, so that the -link 564 is slidably received in the objective lens frame 3ι. When the high density __ 健健记 料 料 (4), the light system will Output 1 signal. According to the signal, a focus control signal and a vertical search control signal can be obtained. (4) When the position on the 胄 卩 胁 胁 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( Not shown) is provided - suitable for the electrode of the second microactuator 50. An electrostatic force is generated between the opposite sides of the fingers 522, 562, which drives the movable portion 56 to move in the miscellaneous direction to carry the animal mirror 26 The movement realizes the focus ^卩. The track and the longitudinal direction are driven by the electrostatic force generated by the first micro-actuation as the driving objective lens 26 in the radial direction of the optical disc. Due to the working process of the first microactuator (10), the above - The process of the micro-actuation II 5G is the same, and the ship is not repeated here. Due to the use of the first and second microactuators 4〇, 5〇, focusing and searching accuracy can reach within the melon. Because the first and second micro-actuating stomachs of the above-mentioned embodiments are made of single crystal stone, the focus and tracking are accurate. It can be used up to 1 〇nm to meet the next generation of high-density and high-capacity light, and the micro-actuator is made of MEMS technology, which is much smaller in volume and weight than the traditional voice coil motor. According to the invention, the invention complies with the patent requirements of the invention, and the patent application is filed according to law. However, the above-mentioned ones are only the ones of the present day, and the person who knows the art of the present is in the invention. Equivalent materialization should be included in the scope of the application of η 1314731. [Simplified illustration] The first picture is a perspective view of a conventional objective lens actuating device. The second figure is a schematic view of the optical pickup device of the present invention. The third figure is a schematic view of the structure of the objective lens actuating device of the present invention. The fourth figure is an exploded view of the objective lens actuating device of the third figure. The fifth figure is a perspective view of the first microactuator of the present invention.
第六圖係第五圖沿VI-VI方向之剖示圖。The sixth figure is a cross-sectional view of the fifth figure along the VI-VI direction.
第七圖係本發明之第二微致動器之立體圖。 【主要元件符號說明】 光學拾取單元 2 雷射源 21 繞射光柵 22 光分束器 23 準直透鏡 24 反射鏡 25 物鏡 26 柱面鏡 27 光電檢測器 28 物鏡致動裝置 30 物鏡架 31 懸置安裝壁 32 懸臂 33 懸掛線 34 第一微致動器 40 固定部 42、52 可動部 46、56 第二微致動器 50 頂面 310 第一凹槽 312 側面 314 第二凹槽 316 開口 318 光碟 9 12 1314731· 連桿 464、564 末端 465、565 梳指 422、462、522、562 通孔 420、520、560 ΛFigure 7 is a perspective view of a second microactuator of the present invention. [Description of main component symbols] Optical pickup unit 2 Laser source 21 Diffraction grating 22 Optical beam splitter 23 Collimating lens 24 Mirror 25 Objective lens 26 Cylindrical mirror 27 Photodetector 28 Objective lens actuator 30 Object frame 31 Suspended Mounting wall 32 Cantilever 33 Suspension line 34 First microactuator 40 Fixing portion 42, 52 Movable portion 46, 56 Second microactuator 50 Top surface 310 First groove 312 Side 314 Second groove 316 Opening 318 Disc 9 12 1314731· Connecting rods 464, 564 ends 465, 565 comb fingers 422, 462, 522, 562 through holes 420, 520, 560 Λ
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