TWI312581B - Chip-on-glass package of image sensor - Google Patents
Chip-on-glass package of image sensor Download PDFInfo
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- TWI312581B TWI312581B TW095126121A TW95126121A TWI312581B TW I312581 B TWI312581 B TW I312581B TW 095126121 A TW095126121 A TW 095126121A TW 95126121 A TW95126121 A TW 95126121A TW I312581 B TWI312581 B TW I312581B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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Description
1312581 九、發明說明: 【發明所屬之技術領域】 本發明係有關於能取代球故^ τ t ^ 八%格陣列(BgA)或平面栅格 陣列(LGA)之影像感測器封裝 、 T展技術,特別係有關於一種 衫像感測|§之玻璃覆晶封裝構造 【先前技術】 在早期的影像感測器封裝槿批由s… ^ 衣構造中是利用打線技術1312581 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to an image sensor package capable of replacing a ball τ t ^ 八 格 Array (BgA) or a planar grid array (LGA), T show Technology, especially related to a kind of shirt image sensing|§ glass flip-chip package structure [prior technology] In the early image sensor package, the batch was made by s... ^
連接晶片與基板’例如本國直 函專利證號第122 1 329 號所揭露者,影像感測晶片係黏 φ Α 舶站於—基板(小尺寸印 電路板)上,打線形成之導線電性查 ^ Α 4 电性連接影像感測晶片 以忐結合一透光玻 璃於晶片上方,使晶片與導線置於— .^ 直歹、軋密空間内。另, 在基板之下方設置有格狀陣列之銲 .^ 杆球或金屬墊,以成 為BGA或LGA封裝型態。當習知-德 知像感測器封裝構 &表面接合至一外部印刷電路板, 鮮球或金屬墊是焊 接至外部印刷電路板之連接墊,同眸 J時達到電性連接與 機械結合。然而銲球或接合金屬墊 /、 〃 '^蜴膏於回銲時有 相當大的水平誤差變化’加上晶片與基板均被固定無 方 向, 使 得 影 像 像 。此 外 9 打 線 過 大, 無 法 進 -- 品 〇 丨示 者, 原 中 請 人 造 ,其 係 為 破 螭 法移動’無法調整影像感測的角度與 、万向,使得影像 感測器無法正確感測到正確位置的影像。 連接之影像感測器封裝構造整體外觀過太 步更加微小化以裝設於可攜式電子產品。 如本國專利證號第12428 1 9號所Connecting the wafer to the substrate, as disclosed in the National Patent No. 122 1 329, the image sensing chip is attached to the substrate (small-sized printed circuit board), and the wire is formed by wire bonding. ^ Α 4 Electrically connect the image sensing wafer to bond a light-transmissive glass over the wafer, so that the wafer and the wire are placed in a straight, rolled space. In addition, a lattice array of solder balls or metal pads are disposed under the substrate to form a BGA or LGA package. When the conventional-de-like sensor package structure & surface is bonded to an external printed circuit board, the fresh ball or metal pad is soldered to the connection pad of the external printed circuit board, and the electrical connection and mechanical bonding are achieved at the same time. . However, the solder ball or the bonding metal pad /, 〃 '^ 膏 cream has a considerable horizontal error change during reflow soldering' plus the wafer and the substrate are fixed in the direction of the image, so In addition, the 9 line is too large to enter - the product is displayed, the original is artificial, and the system is broken. The angle and the universal direction of the image sensing cannot be adjusted, so that the image sensor cannot be correctly sensed. The image in the correct position. The overall appearance of the connected image sensor package structure is too large to be installed in portable electronic products. For example, National Patent No. 12428 139
1312581 玻璃覆晶封裝構造,其包含之扇出型軟性電路板之外 接部相對於其接觸指之另一表面係結合有一補強板, 以供重覆插接至外部電子元件達到模組化設計。 本發明的目的及解決其技術問題是採用以下技術 方案來實現的。依據本發明,一種影像感測器之玻璃 覆晶封裝構造主要包含一玻璃基板、一凸塊化影像感 測晶片以及一扇出型軟性電路板。該玻璃基板之表面 係形成有一第一線路層。該影像感測晶片係覆晶接合 於該玻璃基板,該影像感測晶片之一主動面係具有一 感測區與複數個凸塊,該些凸塊係電性連接至該第一 線路層’該感測區係朝向該玻璃基板。該軟性電路板 係具有一内貼部、一可彎曲部以及一外接部並形成有 一第二線路層,其中該第二線路層係具有複數個位於 該外接部之接觸指,該内貼部係貼附於該玻璃基板, 以電性連接第一線路層與該第二線路層,並且該可彎 曲部之寬度與剛性係均小於該外接部之寬度與剛性, 以使該影像感測晶片之該感測區相對可動於該些接觸 指。 本發明的目的及解決其技術問題還可採用以下技 術措施進一步實現。 前述的影像感測器之玻璃覆晶封裝構造,其中該外 接部相對於該些接觸指之另一表面係結合有一補強 板。 前述的影像感測器之玻璃覆晶封裝構造,其中該補 7 1312581 強板概呈矩形,該補強板之一較長邊係大於該可彎曲 部之寬度,該補強板之一較短邊係大於該些接觸指之 長度。 前述的影像感測器之玻璃覆晶封裝構造,其中該可 彎曲部之寬度大致相同於該内貼部之寬度。 前述的影像感測器之玻璃覆晶封裝構造,其中該玻 璃基板係具有一密閉擋環,且該些凸塊係為可變形。The 1312581 glass flip-chip package structure includes a fan-out type flexible circuit board external portion with a reinforcing plate coupled to the other surface of the contact finger for re-insertion to the external electronic component to achieve a modular design. The object of the present invention and solving the technical problems thereof are achieved by the following technical solutions. According to the present invention, a glass flip chip package structure of an image sensor mainly comprises a glass substrate, a bump image sensing chip and a fan-out flexible circuit board. A surface of the glass substrate is formed with a first wiring layer. The image sensing chip is flip-chip bonded to the glass substrate. One active surface of the image sensing chip has a sensing region and a plurality of bumps electrically connected to the first circuit layer. The sensing zone is oriented toward the glass substrate. The flexible circuit board has an inner bonding portion, a bendable portion and an outer connecting portion and is formed with a second circuit layer, wherein the second circuit layer has a plurality of contact fingers at the outer connecting portion, and the inner connecting portion is Attached to the glass substrate to electrically connect the first circuit layer and the second circuit layer, and the width and rigidity of the bendable portion are smaller than the width and rigidity of the external portion, so that the image sensing chip The sensing area is relatively movable to the contact fingers. The object of the present invention and solving the technical problems thereof can be further achieved by the following technical measures. In the above-mentioned glass sensor package structure of the image sensor, the external portion is combined with a reinforcing plate with respect to the other surface of the contact fingers. The glass flip-chip package structure of the image sensor, wherein the complement 7 1312581 strong plate has a rectangular shape, and one of the reinforcing plates has a longer side than the width of the bendable portion, and one of the reinforcing plates has a shorter side Greater than the length of the contact fingers. In the above-mentioned glass sensor package structure of the image sensor, the width of the bendable portion is substantially the same as the width of the inner patch portion. In the above-mentioned glass sensor package structure of the image sensor, the glass substrate has a closed retaining ring, and the bumps are deformable.
前述的影像感測器之玻璃覆晶封裝構造,其中該密 閉擋環係由該第一線路層所構成。 前述的影像感測器之玻璃覆晶封裝構造,其中該第 一線路層係包含有複數個連接墊與複數個外接墊,該 些連接墊係位置對應於該些凸塊,該些外接墊係排列 朝向該玻璃基板之其中一側邊。 前述的影像感測器之玻璃覆晶封裝構造,其中該第 二線路層係具有複數個位於該内貼部之内接指,該些 内接指之間距係小於該些接觸指之間距,以接合至該 些外接墊。 前述的影像感測器之玻璃覆晶封裝構造,其中該可 彎曲部之寬度與剛性係亦分別小於該玻璃基板之寬度 與剛性。 前述的影像感測器之玻璃覆晶封裝構造,其中該影 像感測晶片係具有一顯露且平行於該主動面之背面, 以作為調整該感測區之參考基準。 【實施方式】 1312581The glass flip chip package structure of the image sensor described above, wherein the closed stop ring is formed by the first circuit layer. The glass flip-chip package structure of the image sensor, wherein the first circuit layer comprises a plurality of connection pads and a plurality of external pads, wherein the connection pads are located corresponding to the bumps, and the external pads are Arranged toward one side of the glass substrate. The glass flip-chip package structure of the image sensor, wherein the second circuit layer has a plurality of internal fingers located in the inner bonding portion, and the distance between the inner connecting fingers is smaller than the distance between the contact fingers, Bonded to the external pads. In the above-mentioned glass sensor package structure of the image sensor, the width and rigidity of the bendable portion are also smaller than the width and rigidity of the glass substrate, respectively. The glass flip chip package structure of the image sensor described above, wherein the image sensing chip has a rear surface that is exposed and parallel to the active surface as a reference for adjusting the sensing area. [Embodiment] 1312581
如第2至4圖所示,在本發明之一具體實施例中揭 示一種影像感測器之玻璃覆晶封裝構造2 0 0。第2圖 係為該影像感測器之玻璃覆晶封裝構造200之截面示 意圖,第3圖係為該影像感測器之玻璃覆晶封裝構造 2 0 0之頂面示意圖,第4圖係為該影像感測器之玻璃 覆晶封裝構造200之底面示意圖。該影像感測器之玻 璃覆晶封裝構造200係主要包含一玻璃基板2 1 0、一 凸塊化影像感測晶片 220以及一扇出型軟性電路板 23 0 ° 如第2及5圖所示,該玻璃基板2 10之上表面係形 成有一第一線路層2 1 1。該第一線路層2 1 1係包含有複 數個連接墊2 1 2與複數個外接墊2 1 3,該些連接墊2 1 2 係位置對應於該影像感測晶片 220之複數個凸塊 224,該些外接墊2 1 3係排列朝向該玻璃基板2 1 0之其 中一側邊。該第一線路層 2 1 1之材質係可為金(Au)或 其合金、銅(Cu)或其合金、氧化錫銦(I TO)或導電膠等 等。並可利用濺鍍、電鍍、無電鍍、壓合、印刷或喷 墨等技術形成之。 該影像感測晶片 220係覆晶接合於該玻璃基板 2 1 0,該影像感測晶片2 2 0係具有一主動面2 2 1及一相 對之背面2 2 2。該主動面2 2 1係包含一感測區2 2 3,其 内設有影像感測元件,例如該影像感測晶片2 2 0係為 一 CMOS影像感測晶片或其它感測器晶片。並於該主 動面22 1上設置有複數個凸塊224,其係位於該主動 ,1312581As shown in Figures 2 through 4, a glass flip chip package structure 200 of an image sensor is disclosed in one embodiment of the present invention. 2 is a schematic cross-sectional view of the glass flip chip package structure 200 of the image sensor, and FIG. 3 is a top view of the glass flip chip package structure of the image sensor. FIG. 4 is a schematic view of the top surface of the image sensor A schematic diagram of the bottom surface of the glass flip chip package structure 200 of the image sensor. The glass flip chip package structure 200 of the image sensor mainly comprises a glass substrate 210, a bump image sensing chip 220 and a fan-out flexible circuit board 23 0 ° as shown in FIGS. 2 and 5 A first circuit layer 2 1 1 is formed on the upper surface of the glass substrate 2 10 . The first circuit layer 2 1 1 includes a plurality of connection pads 2 1 2 and a plurality of external pads 2 1 3 , wherein the connection pads 2 1 2 are positioned corresponding to the plurality of bumps 224 of the image sensing wafer 220 . The external pads 2 1 3 are arranged to face one side of the glass substrate 2 1 0 . The material of the first wiring layer 2 1 1 may be gold (Au) or an alloy thereof, copper (Cu) or an alloy thereof, indium tin oxide (I TO), a conductive paste or the like. It can be formed by techniques such as sputtering, electroplating, electroless plating, pressing, printing or ink jetting. The image sensing wafer 220 is flip-chip bonded to the glass substrate 210. The image sensing wafer 220 has an active surface 2 2 1 and an opposite back surface 2 2 2 . The active surface 2 2 1 includes a sensing region 2 2 3 having an image sensing component therein. For example, the image sensing wafer 220 is a CMOS image sensing wafer or other sensor wafer. And a plurality of bumps 224 are disposed on the active surface 22 1 , and the system is located at the active, 1312581
面221處之複數個銲墊225上,以接合至該些連接墊 212。在覆晶接合之後,該些凸塊224係電性連接至該 第—線路層2 1 1之該些連接墊2 1 2,該感測區2 2 3係 朝向該玻璃基板210。較佳地,該玻璃基板210可另 具有一密閉擋環214,例如金屬環或PI膠環;且該些 凸塊224係為可變形,例如打線形成之結線凸塊(stud bump)。藉以縮小該影像感測晶片220之該主動面221 與該玻璃基板2 1 0之上表面之間的間隙,進而使該密 閉擋環2 1 4發揮最大擋膠功能。另,一封膠體2 5 0, 例如非導電膠(NCP)、高流動底部填充膠、非流動底部 填充膠、防水膠或壓模膠體,可形成於該玻璃基板210 之上表面並局部填充在該玻璃基板2 1 0與該影像感測 晶片220之間,以包覆該些凸塊224。 該軟性電路板23 0係具有一内貼部23 1、一可彎曲 部232以及一外接部233,該可彎曲部232係連接該 内貼部231與該外接部233,該可彎曲部232之寬度 大致相同於該内貼部231之寬度,又該外接部233之 寬度大於該可彎曲部2 3 2與該内貼部2 3 1,以使線路 為扇出設計。該軟性電路板2 3 0並形成有一第二線路 層234,其中該第二線路層234係具有複數個位於該 外接部23 3之接觸指23 6與複數個位於該内貼部2 3 1 之内接指2 3 5 (如第4圖所示)’該些内接指2 3 5之間距 係小於該些接觸指2 3 6之間距,以接合至該些外接塾 2 1 3並使增加該些接觸指23 6之間距以供對外表面接 10 ㊉ 1312581 合。該内貼部2 3 1係貼附於該玻璃基板2 1 Ο,例如使A plurality of pads 225 at face 221 are bonded to the pads 212. After the flip chip bonding, the bumps 224 are electrically connected to the connection pads 2 1 2 of the first circuit layer 2 1 1 , and the sensing regions 2 2 3 are oriented toward the glass substrate 210 . Preferably, the glass substrate 210 may further have a sealing ring 214, such as a metal ring or a PI rubber ring; and the bumps 224 are deformable, for example, wire-forming bumps. The gap between the active surface 221 of the image sensing wafer 220 and the upper surface of the glass substrate 210 is reduced to further maximize the blocking function of the closed retaining ring 2 14 . In addition, a colloid 250, such as a non-conductive adhesive (NCP), a high-flow underfill, a non-flow underfill, a waterproof adhesive or a stamper colloid, may be formed on the upper surface of the glass substrate 210 and partially filled in The glass substrate 210 is interposed between the image sensing wafer 220 to cover the bumps 224. The flexible circuit board 203 has an inner affixing portion 23 1 , a bendable portion 232 , and an outer connecting portion 233 . The bendable portion 232 is connected to the inner affixing portion 231 and the outer connecting portion 233 . The width is substantially the same as the width of the inner patch portion 231, and the width of the outer portion 233 is larger than the bendable portion 23 2 and the inner patch portion 23 1 to make the line fan-out design. The flexible circuit board 230 is formed with a second circuit layer 234, wherein the second circuit layer 234 has a plurality of contact fingers 23 6 located at the external portion 23 3 and a plurality of the inner bonding portions 2 3 1 The inner finger 2 3 5 (as shown in Fig. 4) 'the distance between the inner fingers 2 3 5 is smaller than the distance between the contact fingers 2 3 6 to be joined to the outer 塾 2 1 3 and increase The contact fingers 23 6 are spaced apart for the external surface to be connected to 10 1312581. The inner bonding portion 2 3 1 is attached to the glass substrate 2 1 , for example
用 ACF 導電膠 260(ACF 為 Anisotropic Conductive F i 1 m之簡稱)電性該些内接指2 3 5與該些外接墊2 1 3, 以電性連接第一線路層211與該第二線路層234。並 且該可彎曲部232之寬度與剛性係均小於該外接部 233之寬度與剛性,以使該影像感測晶片220之該感 測區2 2 3相對可動於該些接觸指2 3 6。在本實施例中, 該可彎曲部232之寬度與剛性係亦分別小於該玻璃基 板2 1 0之寬度與剛性。 因此’利用該外接部233電性連接至一外部可攜式 電子裝置之槽座之後,例如行動電話、微型攝影裝置、 數位相機、pda或筆記型電腦等,該玻璃基板21〇與 該影像感測晶片220仍為可移動調整(如第2圖所 示),以移動調整該感測區223之水平位置與感測角 度,再機械固定該玻璃基板21〇或該影像感測晶片 220 ° 如弟z及3圖所 -〜,I 1文 ΰ|; Ζό ό ΪΤ 該些*接觸指236之另一矣而孫壯人士 I力表面係結合有一補強板2 4 0 以增強該外接部233之 j丨王便侍該外接部2 3 3具 玎重,,接之特性。在本實施例中,該補強板“Ο 蓋矩形嘗:補強板24〇之一較長邊係大於該可彎曲 232之覓度,該補強板24〇 . 权姐邊係大於該些 觸指236之長度。 再 第2圖所示,較佳地,兮·旦彡你 1地0褒衫像感測晶片2 2 0The ACF conductive adhesive 260 (abbreviated as Anisotropic Conductive F i 1 m) electrically connects the internal contacts 2 3 5 and the external pads 2 1 3 to electrically connect the first circuit layer 211 and the second circuit Layer 234. Moreover, the width and rigidity of the bendable portion 232 are smaller than the width and rigidity of the outer portion 233, so that the sensing region 2 2 3 of the image sensing wafer 220 is relatively movable to the contact fingers 2 36. In this embodiment, the width and rigidity of the bendable portion 232 are also smaller than the width and rigidity of the glass substrate 210. Therefore, after the external portion 233 is electrically connected to the socket of an external portable electronic device, such as a mobile phone, a micro camera, a digital camera, a pda or a notebook computer, the glass substrate 21 and the image sense The wafer 220 is still movable (as shown in FIG. 2) to move and adjust the horizontal position and the sensing angle of the sensing region 223, and then mechanically fix the glass substrate 21 or the image sensing wafer 220°.弟z和3图所-~, I 1文ΰ|; Ζό ό ΪΤ These * contact fingers 236 are another 矣 and Sun Zhuang people I force surface system combined with a reinforcing plate 2 4 0 to enhance the external part 233 J丨王 will serve the external department 2 3 3 with a heavy weight, and the characteristics. In this embodiment, the reinforcing plate has a rectangular shape: the longer side of the reinforcing plate 24 is larger than the bendable 232, and the reinforcing plate 24 is larger than the fingers 236. The length of the second. As shown in Fig. 2, preferably, you have a 0-shirt image sensing chip 2 2 0
1312581 該背面222係不被該封膠體250覆蓋而為顯露狀且平 行於該主動面221,以作為調整該感測區223之參考 基準,故可有利於掌握該感測區223之感測角度與水 平面且可作為機械固定之黏著面。 以上所述,僅是本發明的較佳實施例而已,並非對 本發明作任何形式上的限制,雖然本發明已以較佳實 施例揭露如上,然而並非用以限定本發明,任何熟悉 本項技術者,在不脫離本發明之技術範圍内,所作的 任何簡單修改、等效性變化與修飾,均仍屬於本發明 的技術範圍内。 【圖式簡單說明】 第1圖:習知影像感測器之玻璃覆晶封裝構造之截面 示意圖。 第2圖:依據本發明之一具體實施例,一種影像感測 器之玻璃覆晶封裝構造之截面示意圖。 第3圖:依據本發明之一具體實施例,該影像感測器 之玻璃覆晶封裝構造之頂面不意圖。 第4圖:依據本發明之一具體實施例,該影像感測器 之玻璃覆晶封裝構造之底面示意圖。 第5圖:依據本發明之一具體實施例,該影像感測器 之玻璃覆晶封裝構造之玻璃基板之表面示意 圖。 【主要元件符號說明】 100影像感測器之玻璃覆晶封裝構造 12 13125811312581 The back surface 222 is not covered by the encapsulant 250 and is exposed and parallel to the active surface 221 as a reference for adjusting the sensing area 223, so that the sensing angle of the sensing area 223 can be grasped. It can be used as a mechanically fixed adhesive surface with a horizontal surface. The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention. Any simple modifications, equivalent changes and modifications made without departing from the technical scope of the present invention are still within the technical scope of the present invention. [Simple description of the drawing] Fig. 1 is a schematic cross-sectional view of a glass flip chip package structure of a conventional image sensor. Figure 2 is a cross-sectional view showing a glass flip chip package structure of an image sensor in accordance with an embodiment of the present invention. Figure 3: In accordance with an embodiment of the present invention, the top surface of the glass flip chip package structure of the image sensor is not intended. Fig. 4 is a bottom plan view showing a glass flip chip package structure of the image sensor according to an embodiment of the invention. Figure 5 is a schematic illustration of the surface of a glass substrate of a glass flip chip package structure of the image sensor in accordance with an embodiment of the present invention. [Main component symbol description] Glass flip-chip package structure of 100 image sensor 12 1312581
110 玻璃基板 111 線路 120 影像感測晶片 121 主動面 122 背面 123 感測區 124 凸塊 125 密封膠 130 絕緣保護層 140 導通孔 150 外接墊 200 影像感測器之玻璃: 覆晶封裝構造 210 玻璃基板 211 第一線路層 212 連接墊 213 外接墊 214 密閉擋環 220 凸塊化影像感 i測晶. 片 221 主動面 222 背面 223 感測區 224 凸塊 225 銲墊 230 扇出型軟性電路板 23 1 内貼部 232 可彎曲部 233 外接部 234 第二線路層 235 内接指 236 接觸指 240 補強板 250 封膠體 260 ACF導電膠110 Glass substrate 111 Line 120 Image sensing wafer 121 Active surface 122 Back surface 123 Sensing area 124 Bump 125 Sealant 130 Insulation protection layer 140 Via 150 External pad 200 Image sensor glass: Flip chip package structure 210 Glass substrate 211 First circuit layer 212 Connection pad 213 External pad 214 Sealing ring 220 Bumping image sensing i. Crystal 221 Active surface 222 Back 223 Sensing area 224 Bump 225 Pad 230 Fan-out flexible circuit board 23 1 Inner bonding portion 232 bendable portion 233 External portion 234 Second circuit layer 235 Inscribed finger 236 Contact finger 240 Reinforcing plate 250 Sealing body 260 ACF conductive adhesive
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TWI380413B (en) | 2008-06-19 | 2012-12-21 | Unimicron Technology Corp | Pressure sensing device package and manufacturing method thereof |
JP5695196B2 (en) * | 2011-07-13 | 2015-04-01 | 旭化成エレクトロニクス株式会社 | Current sensor substrate and current sensor |
CN103649762B (en) | 2011-07-13 | 2015-09-16 | 旭化成微电子株式会社 | Current sensor substrate and current sensor |
US8890274B2 (en) | 2012-07-11 | 2014-11-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure for CIS flip-chip bonding and methods for forming the same |
TWI578506B (en) * | 2014-11-27 | 2017-04-11 | 原相科技股份有限公司 | Optical detecting module with waterproofing function |
CN108878443B (en) | 2017-05-12 | 2020-06-09 | 京东方科技集团股份有限公司 | Display panel, manufacturing method of display panel and binding method of display panel |
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