1311193 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種標準轉射源及其 ’特別係關於一種具有複數個輻 、、' 兀件校驗系統 紅外線元件校驗系統。 几之標準輕射源及其 【先前技術】 絕對零度以上的物體都會發出埶 技術予以量測並據以正確地估算物=可以非接觸式 式溫度量測技術蓬勃發展，各 恤度。由於非接觸 儀及輻射溫度計)不斷的推陳出 … 全顧慮的便利。 疋贤世人無女 目前非接觸式紅外線熱像儀校驗 形輻射B栌、、盾、仓> 丁 ^ Α夕利用一個面 輻射黑體源之熱影像㈣，因pi象儀疋操取該面形 的—像⑽目此需要-個高溫度均勻特性 繁了所；Τ'而，由於面形黑體源與外在溫度之熱交換頻 ^ 以大夕數面形黑體源之溫度均勻性不佳。再者，每 2 =僅可提供—組輻射溫度之黑體源，無法同時校驗 夕美國專利US 5,265,958及us 5,756,992分別提出非面型 =源黑體源。美國專卿s 5,265,958係使賴數個塊狀的黑 马源並利用設計好的孔洞板形成複數個黑體源，以供熱 二像儀可同時進行複數個溫度校正測試。此外，美國專利 ’756’992係利用一個黑體源加上一個面鏡與一塗佈金 材料’使得單一熱輻射藉由面鏡反射與介電材料1311193 IX. Description of the Invention: [Technical Field] The present invention relates to a standard transfer source and its 'particularly to an infrared element verification system having a plurality of spokes, 'piece inspection systems. Several standard light source and its [previous technology] Objects above absolute zero will be sent out by 埶 technology to measure and estimate the object correctly. Non-contact temperature measurement technology can flourish and be used. Due to the non-contact and radiation thermometers, we are constantly pushing out the convenience of all concerns.疋贤世人No female current non-contact infrared thermal imager check-shaped radiation B栌, Shield, warehouse> Ding ^ Α 利用 using a surface to radiate the black body source of thermal image (four), because the pi like the instrument to take the face Shape-like (10) requires a high temperature uniformity characteristic; 而', because of the heat exchange frequency between the blackbody source and the external temperature, the temperature uniformity of the blackbody source is not good . Furthermore, every 2 = only a black source of radiation temperature can be provided, which cannot be simultaneously verified. US Patent Nos. 5,265,958 and 5,756,992 respectively propose a non-face type = source blackbody source. The US Secretary of State s 5,265,958 makes a number of blocky black horse sources and uses the designed hole plate to form a plurality of black body sources, so that the heat imager can simultaneously perform multiple temperature correction tests. In addition, U.S. Patent '756' 992 utilizes a black body source plus a mirror and a gold coated material to cause a single thermal radiation to be reflected and dielectric material by means of a mirror.
I15006.DOC 1311193 的作用而形成複數個黑體輻射源，如此熱影像儀即可進疒 複數個溫度之校驗測試。 # 【發明内容】 耵源、及其 本發明提供一種具有複數個輻射單 紅外線元件校驗系統。I15006.DOC 1311193 acts to form a plurality of blackbody radiation sources, so that the thermal imager can perform multiple temperature calibration tests. [Abstract] The source, and the present invention provide a system for verifying a plurality of radiation single infrared elements.
件上之控溫元件絕熱元件。 本發明之樣準輻射源包含一具有一空腔之金屬本體、— 設置於該金屬本體之外壁的加熱元件、—包覆該加熱元件 及该金屬本體之第一絕熱元件以及一設置於該第一絕熱元 L> %ττ» — · I ‘一 本發明之紅外線元件校驗系統包含一載台、—設置於該 載台上且包含複數個輻射單元之標準輻射源以及一可驅動 該載台旋轉以改變該複數個輻射單元之位置的驅動裝置。 該輻射單元包含一具有一空腔之金屬本體、_設置於該金 屬本體之外壁的加熱元件、一包覆該加熱元件及該金屬本 體之第一絕熱兀件以及一設置於該第一絕熱元件上之控溫 元件。 二Μ 相較於美國專利US 5,265,958採用塊形設計之黑體源，本 發明採用Μ型設計之金屬纟體輻射源具有較佳熱輕射穩定 性及較同之放射率。另，美國專利us 5,756,992使用單—輻 射源、面鏡與介電材料形成多源黑體源，導致整個熱輻射 的路徑必須經過其它的元件，造成能量衰減。相對地，本 發明知用陣列式之金屬本體輻射源，可大幅地降低熱交換 象所引起之能量衰減，因此每個金屬本體輻射源均可提 ,、穩疋彳不準熱輕射。此外，本發明之旋轉定位控制可以在 H5006.doc 1311193 一次量測過程中，快速且輕易地取得在同一區域之不同溫 度值，達成準確、穩定、快速、簡易之熱像儀校驗。 【實施方式】 圖1至圖5例示本發明之標準輻射源21及紅外線元件校驗 系統10。該紅外線元件校驗系統10包含一載台12、—設置 於該載台12上且包含複數個輻射單元20之標準輻射源21、 可驅動忒載台12旋轉以改變該複數個輻射單元2〇之位置 的驅動裝置（例如馬達）14以及一訊號處理裝置18。該訊號處 里衮置1 8可在一待校紅外線元件16完成一校驗程序後產生 一驅動訊號至該驅動裝置14，而該驅動裝置14再據以驅動 该載台12旋轉（例如每次旋轉9〇度）。該待校紅外線元件16 可為熱像儀’其係根據該輻射單元20之熱輻射進行校驗 〇 该複數個輻射單元2〇係工作於不同溫度。該輻射單元2〇 包含一具有一空腔22之金屬本體24、一設置於該金屬本體 24之外壁的加熱元件26、一包覆該加熱元件26及該金屬本 體24之第一絕熱元件28、一用以感測該腔體22之溫度的溫 度感測器30、一設置於該第一絕熱元件28上之控溫元件32 以及包覆該控溫元件3 2之第二絕熱元件3 8。該控溫元件 32包含—包覆該第一絕熱元件28之導熱物質（例如金屬）34 以及—設置於該導熱物質34上之熱電致冷晶片36。 特而言之，每個輻射單元2〇之第一絕熱元件28及第二絕 熱元件3 8可有效地隔絕每個輻射單元2〇之間的溫度干擾。 該控溫元件32可個別地維持各輻射單元20之溫度。因此， 1311193 照射於個別之輕射單元2。而不會受到干擾，即可 夕门寺—到穩定之不同溫度分佈，以達到校正之需求。此 圖1至圖3所示之實施例使用4個輕射單元2〇， 顯示不同輻鼾加疮 』Η時 9。度mi二該驅動裝置14可旋轉(例如每次旋轉 源21’使得待測物可在短時間内得到伟 丁，田、，皿度，如此待測物即利用4個溫度進行校正， 夕區塊熱影像快速校正之目的。Temperature-controlled component insulation element on the piece. The quasi-radiation source of the present invention comprises a metal body having a cavity, a heating element disposed on an outer wall of the metal body, a first heat insulating element covering the heating element and the metal body, and a first heat insulating component disposed on the first Adiabatic element L> %ττ» - I' The infrared component verification system of the present invention comprises a stage, a standard radiation source disposed on the stage and comprising a plurality of radiation units, and a driveable stage rotation A drive device for changing the position of the plurality of radiating elements. The radiation unit comprises a metal body having a cavity, a heating element disposed on an outer wall of the metal body, a first heat insulating member covering the heating element and the metal body, and a first heat insulating member disposed on the first heat insulating member Temperature control element. In contrast to U.S. Patent No. 5,265,958, which uses a black body source of a block design, the metal sputum radiation source of the present invention has a better thermal stability and a higher emissivity. In addition, U.S. Patent 5,756,992 uses a single-radiation source, mirror and dielectric material to form a multi-source blackbody source, resulting in the entire thermal radiation path having to pass through other components, resulting in energy attenuation. In contrast, the present invention utilizes an array of metal body radiation sources that greatly reduces the energy attenuation caused by the heat exchange image, so that each metal body radiation source can be lifted, and the heat is not allowed to be thermally light. In addition, the rotary positioning control of the present invention can quickly and easily obtain different temperature values in the same area during the measurement process of H5006.doc 1311193, and achieve accurate, stable, fast and simple thermal imager calibration. [Embodiment] Figs. 1 to 5 illustrate a standard radiation source 21 and an infrared element verification system 10 of the present invention. The infrared component verification system 10 includes a stage 12, a standard radiation source 21 disposed on the stage 12 and including a plurality of radiation units 20, and the driveable stage 12 is rotated to change the plurality of radiation units 2 A drive device (e.g., motor) 14 and a signal processing device 18 are located. The signal device 18 can generate a driving signal to the driving device 14 after the calibration component 16 is completed, and the driving device 14 drives the carrier 12 to rotate (for example, each time). Rotate 9 degrees). The infrared component 16 to be calibrated may be a thermal imager' which is calibrated according to the thermal radiation of the radiating element 20. The plurality of radiating elements 2 operate at different temperatures. The radiation unit 2 includes a metal body 24 having a cavity 22, a heating element 26 disposed on an outer wall of the metal body 24, a first heat insulating element 28 covering the heating element 26 and the metal body 24, and a A temperature sensor 30 for sensing the temperature of the cavity 22, a temperature control element 32 disposed on the first heat insulating element 28, and a second heat insulating element 38 covering the temperature control element 32. The temperature control element 32 includes a thermally conductive substance (e.g., metal) 34 covering the first thermal insulation element 28 and a thermoelectrically cooled wafer 36 disposed on the thermally conductive substance 34. In particular, the first insulating element 28 and the second insulating element 38 of each radiating element 2 are effective to isolate temperature interference between each radiating element 2〇. The temperature control element 32 can individually maintain the temperature of each of the radiating elements 20. Therefore, 1311193 is irradiated to the individual light-emitting unit 2. Without being disturbed, the Ximen Temple can be stabilized with different temperature distributions to meet the needs of calibration. The embodiment shown in Figures 1 through 3 uses four light-emitting units, 2 〇, to show different convulsions and sputum. Degree mi 2 the driving device 14 can be rotated (for example, each time the source 21' is rotated so that the object to be tested can obtain Weiding, Tian, and the degree of the dish in a short time, so that the object to be tested is corrected by using four temperatures, The purpose of block thermal image correction.
舉例而言，該金屬本體20係由無氧銅構成，該加埶元件 %係環繞該金屬本體紛卜壁之加熱線，該第—絕熱元㈣ 及該第二絕熱元件38係由乙烯_醋酸乙烯醋發泡棉、聚乙稀 泡棉或玻璃纖維隔熱棉構成。此外，該空腔Μ之内壁係可 經霧面處理而成為—粗糙面或塗佈黑漆，以避免熱輕射經 由腔内反射而逸散至外部。 該複數個輕射單元20可以陣列方式排列，亥輕射單元 20之外形可呈三角形、四角形、圓形或六角形，如圖4所示 之標準輻射源2Γ包含6個三角形輻射單元2〇|或圖5所示之 標準輻射源21”包含4個圓形輻射單元2〇”。申言之， 裝置14可旋轉（例如每次旋轉6〇度）圖4所示之標準轉射源 2Γ，使得待測物可在短時間内得到6個標準輻射溫度。此外 ’該驅動裝置14可旋轉（例如每次旋轉90度）圖5所示之枳準 輻射源21 ”，使得待測物可在短時間内得到4個標準輕射、π 度。 相較於美國專利US 5,265,958採用塊形設計之黑體源，本 發明採用腔型設計之金屬本體輻射源具有較佳熱輕射穩定For example, the metal body 20 is composed of oxygen-free copper, the twisting element% is a heating wire surrounding the metal body wall, and the first heat insulating element (4) and the second heat insulating element 38 are made of ethylene-acetic acid. Ethylene vinegar foamed cotton, polyethylene foam or glass fiber insulation cotton. In addition, the inner wall of the cavity can be matte-treated to be roughened or coated with black lacquer to prevent thermal light from escaping through the cavity to escape to the outside. The plurality of light-emitting units 20 may be arranged in an array manner, and the light-emitting unit 20 may have a triangular shape, a quadrangular shape, a circular shape or a hexagonal shape. The standard radiation source 2 shown in FIG. 4 includes six triangular radiation units 2〇| Or the standard radiation source 21" shown in Fig. 5 contains 4 circular radiating elements 2"". In other words, the device 14 can be rotated (e.g., 6 degrees per rotation) to the standard transfer source 2 shown in Figure 4, so that the test object can obtain 6 standard radiant temperatures in a short time. In addition, the driving device 14 can rotate (for example, 90 degrees per rotation) of the quasi-radiation source 21" shown in FIG. 5, so that the object to be tested can obtain 4 standard light shots, π degrees in a short time. U.S. Patent No. 5,265,958 uses a black body source of a block design, and the metal body radiation source of the invention has a cavity design with better heat and light stability.
115006.DOC 1311193 n之放射率。另，美國專利仍5,756,992使用單一輕 射源、面鏡與介電材料形成多源黑體源，導致整個熱輕射 的路在必i輕過其它的元件，造成能量衰減。相對地，本 备月抓用陣列式之金屬本體輻射源，可大幅地降低熱交換 現象所引起之能量衰減，因此每個金屬本體輻射源均可提 供_準熱輕射。此外，本發明之旋轉定位控制可以在 一次量測過程中，快速且輕易地取得在同—區域之不同溫 度值’達成準確、穩^、快速、簡易之熱像儀校驗。 本發明之技術内容及技術特點已揭示如上，然而熟悉本 項技術之人士仍可能基於本發明之教示及揭示而作種種不 背離本發明精神之替換及修飾。因此’本發明之保護範圍 應不限於實施例所揭示者，而應包括各種不f離本發明之 替換及修飾’並為以下之申請專利範圍所涵甚。 【圖式簡要說明】 至圖5例示本發明之標準輕射源及紅外線元件校驗系 統。 【主要元件符號說明】 10 紅外線元件校驗系統 12 載台 14 驅動裝置 16 待校紅外線元件 18 訊號處理裝置 20 輕射單元 20' 輻射單元 20" 麵射單元 21 標準輻射源 21' 標準輻射源 21" 標準輻射源 22 空腔 24 金屬本體 26 加熱元件 I15006.DOC - 1〇 - 1311193 28 第一絕熱 32 控溫元件 36 熱電致冷 元件 30 34 晶片 38 溫度感測器 導熱物質 第二絕熱元件115006. DOC 1311193 n emissivity. In addition, U.S. Patent No. 5,756,992 uses a single light source, mirror and dielectric material to form a multi-source blackbody source, resulting in the entire heat-light path being lighter than other components, resulting in energy attenuation. In contrast, the use of an array of metal body radiation sources in the preparation of the moon can greatly reduce the energy attenuation caused by the heat exchange phenomenon, so each metal body radiation source can provide _ quasi-thermal light. In addition, the rotary positioning control of the present invention can quickly and easily obtain accurate, stable, fast, and simple thermal imager calibrations at different temperature values in the same region during a single measurement process. The technical contents and technical features of the present invention have been disclosed as above, and those skilled in the art can still make various substitutions and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the present invention is not limited by the scope of the present invention, but should be construed as being limited by the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 5 illustrates a standard light source and infrared element verification system of the present invention. [Main component symbol description] 10 Infrared component verification system 12 Stage 14 Drive unit 16 Infrared component 18 Signal processing device 20 Light beam unit 20' Radiation unit 20" Surface unit 21 Standard radiation source 21' Standard radiation source 21" Standard Radiation Source 22 Cavity 24 Metal Body 26 Heating Element I15006.DOC - 1〇- 1311193 28 First Insulation 32 Temperature Control Element 36 Thermoelectric Cooling Element 30 34 Wafer 38 Temperature Sensor Thermal Conductive Substance Second Insulation Element
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