TWI310021B - Bubble-type micro-pump and two-way fluid driving device, particles sorting device, fluids mixing device, ring-shaped fluids mixing device and compound-type fluids mixing device using the same - Google Patents
Bubble-type micro-pump and two-way fluid driving device, particles sorting device, fluids mixing device, ring-shaped fluids mixing device and compound-type fluids mixing device using the same Download PDFInfo
- Publication number
- TWI310021B TWI310021B TW96104350A TW96104350A TWI310021B TW I310021 B TWI310021 B TW I310021B TW 96104350 A TW96104350 A TW 96104350A TW 96104350 A TW96104350 A TW 96104350A TW I310021 B TWI310021 B TW I310021B
- Authority
- TW
- Taiwan
- Prior art keywords
- bubble
- driving portion
- flow path
- micro
- channel
- Prior art date
Links
Landscapes
- Automatic Analysis And Handling Materials Therefor (AREA)
Description
-1310021-1310021
三達1 號：TW3329PA " 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種氣泡式微幫浦，且特別是有關於 一種低耗能之氣泡式微幫浦與應用其之雙向流體驅動裝 置、微粒分類装置、流體混合裝置、環形流體混合裝置與 複合型流體混合裝置。 【先前技術】 _ 目前微機電領域中，微幫浦可以區分為兩大類：第一 類幫浦是屬於機械推動之方式，包括氣泡式幫浦（bubble pump )、薄膜式幫浦（membrane pump )、擴散式幫浦 (diffuser pump)等，這些幫浦驅動驅動流體的原理不外 乎是利用其本身之機械元件來達到推動流體之目的。前述 之幫浦共有之特色是都具有葉片之構造，且其本身之元件 必須能夠作動。由於微流系統中，若是架構複雜之機械元 鲁 件，這些相關之機械元件必須能夠達到尺寸非常微細之要 求，於技術上具有非常多的限制。 另一類幫浦則是利用感應電場來驅動液體，包括電滲 式幫浦 （electro-〇smotic pump )、電泳式幫浦 (electrophoretic pump )與電濕式幫浦（dectr〇_wetting pump)等。此類幫浦之特色是以固定之電極構造，於施加 電壓後產生電％來推動流體。但是，此類型之幫浦需要以 複雜之電信號控制，並於微流系統中裝設感測器等裝置以 偵測流體之特性，其亦具有非常多與製程技術相關之限 6 .1310021达三号1: TW3329PA " IX. Description of the invention: [Technical field of the invention] The present invention relates to a bubble type micro-pump, and in particular to a low-energy bubble-type micro-pump and a two-way application thereof Fluid drive device, particle sorting device, fluid mixing device, annular fluid mixing device and composite fluid mixing device. [Prior Art] _ In the current micro-electromechanical field, micro-pull can be divided into two categories: the first type of pump is a mechanical push, including bubble pump, membrane pump , diffuser pump (diffuser pump), etc., these pumps drive the fluid principle is nothing more than the use of its own mechanical components to achieve the purpose of pushing the fluid. The aforementioned pumps have the common feature of having a blade configuration and their own components must be able to operate. Due to the complexity of the mechanical components in the microfluidic system, these related mechanical components must be able to achieve very small size requirements, and there are many technical limitations. Another type of pump uses an induced electric field to drive liquids, including electro-〇smotic pumps, electrophoretic pumps, and dectr〇_wetting pumps. This type of pump features a fixed electrode construction that generates electricity after applying a voltage to drive the fluid. However, this type of pump needs to be controlled by complex electrical signals, and a device such as a sensor is installed in the microfluidic system to detect the characteristics of the fluid, which also has a lot of limitations related to the process technology. 6.1310021
三達編號：TW3329PA * 制。 【發明内容】 本發明係有關於一種氣泡式微幫浦與應用其之雙向 流體驅動裝置、微粒分類裝置、流體混合裝置、環形流體 混合裝置與複合型流體混合裝置。係利用於具有表面粗糙 度設計之部件搭配氣泡之生滅步驟，使液體回填之速度因 表面粗糙度之差異而有所不同，進而推動液體流動。 • 本發明提出一種氣泡式微幫浦，此裝置包括一第一部 件、一第二部件與一氣泡產生單元。第一部件具有一流 道，流道上具有至少一第一區域與一第二區域。第二部件 設置於第一部件上，且第二部件之表面對應於第一區域為 具有一第一粗糙因子之粗糙表面，而對應於第二區域為具 有一第二粗糙因子之粗糙表面，其中，第一粗糙因子大於 第二粗糙因子。氣泡產生單元設置於第一部件上，其可於 第一部件與第二部件之間填滿一液體時，於第一區域與第 — 二區域產生氣泡。當氣泡產生單元產生之氣泡開始散失 時，由於第一粗糙因子與第二粗糙因子之差異，使第一區 域之液體回填速度大於第二區域之液體回填速度，藉此以 帶動液體流動。 本發明並提出一種雙向流體驅動裝置，此裝置包括一 第一主流道、一第二主流道、一第一驅動部、一第二驅動 部與一控制單元。第一主流道與第二主流道交錯設置並構 成一共同流道區。第一驅動部包括至少一個前述之氣泡式Sanda number: TW3329PA * system. SUMMARY OF THE INVENTION The present invention relates to a bubble type micro-pull and a bidirectional fluid driving device, a particle sorting device, a fluid mixing device, an annular fluid mixing device, and a composite fluid mixing device. It is used in the step of creating a surface roughness with the bubble generation step, so that the speed of liquid backfilling varies with the surface roughness, which promotes liquid flow. • The present invention provides a bubble micro-pump comprising a first component, a second component and a bubble generating unit. The first component has a first-class track, and the flow path has at least a first area and a second area. The second component is disposed on the first component, and the surface of the second component corresponds to the first region being a rough surface having a first roughness factor, and corresponding to the second region being a rough surface having a second roughness factor, wherein The first roughness factor is greater than the second roughness factor. The bubble generating unit is disposed on the first member to generate bubbles in the first region and the second region when a liquid is filled between the first member and the second member. When the bubble generated by the bubble generating unit starts to be dissipated, the liquid backfilling velocity of the first region is made larger than the liquid backfilling velocity of the second region due to the difference between the first roughness factor and the second roughness factor, thereby driving the liquid to flow. The invention also provides a bidirectional fluid drive device comprising a first main flow channel, a second main flow channel, a first drive portion, a second drive portion and a control unit. The first main channel and the second main channel are alternately arranged and constitute a common flow path area. The first driving portion includes at least one of the aforementioned bubble type
：TW3329PA 微幫浦，其係設置於第一主流道上，並鄰近共同流道區。 第二驅動部亦包括至少一個前述之氣泡式微幫浦，係設置 於第二主流道上，並鄰近於共同流道區。控制單元分別與 第一驅動部及第二驅動部之氣泡式微幫浦電性連接。當控 制單元驅動第一驅動部作動時，第一驅動部係推動第一主 流道上之液體流動。而當控制單元驅動第二驅動部作動 時，第二驅動部係推動第二主流道上之液體流動。 本發明再提出一種微粒分類裝置，此裝置包括一主流 道、一驅動部、一分流部、一檢測單元與一控制單元。驅 動部設置於主流道之前段。分流部包括一第一支流道，係 連接於主流道之後段，且於第一支流道上設置有一前述之 氣泡式微幫浦。檢測單元設置於主流道上，並位於驅動部 與分流部之間。控制單元係電性連接驅動部及分流部之氣 泡式微幫浦與檢測單元。當驅動部作動以推動主流道中之 一帶有粒子之液體移動，並使粒子流經檢測單元以完成粒 子之辨識後，檢測單元係傳送訊號至控制單元以驅動分流 部之氣泡式微幫浦作動，藉此使粒子隨液體流入第一支流 道中。 本發明更提出一種流體混合裝置，此裝置包括一混合 腔、一第一驅動部、一第二驅動部與一控制單元。混合腔 具有一入口流道與一出口流道。第一驅動部.包括至少一前 述之氣泡式微幫浦，係設置於入口流道上。第二驅動部包 括至少一前述之氣泡式微幫浦，係設置於出口流道上。控 制單元電性連接第一驅動部與第二驅動部之氣泡式微幫 8: TW3329PA micro-pull, which is set on the first mainstream road and adjacent to the common runner area. The second driving portion also includes at least one of the aforementioned bubble type micro-pulls disposed on the second main flow path and adjacent to the common flow path area. The control unit is electrically connected to the bubble micro-pull of the first driving part and the second driving part, respectively. When the control unit drives the first drive unit to actuate, the first drive unit pushes the liquid flow on the first main flow path. When the control unit drives the second driving portion to act, the second driving portion pushes the liquid flow on the second main flow path. The invention further provides a particle sorting device, which comprises a main channel, a driving portion, a shunting portion, a detecting unit and a control unit. The drive unit is placed in front of the main road. The flow dividing portion includes a first branch flow passage connected to the rear portion of the main flow passage, and the foregoing bubble type micro pump is disposed on the first branch flow passage. The detecting unit is disposed on the main flow path and located between the driving portion and the flow dividing portion. The control unit is electrically connected to the driving micro-pump and the detecting unit of the driving part and the diverting part. When the driving part is actuated to push the liquid with particles in one of the main flow channels, and the particles flow through the detecting unit to complete the identification of the particles, the detecting unit transmits a signal to the control unit to drive the bubble micro-pull of the shunting part, borrowing This causes the particles to flow into the first branch channel with the liquid. The invention further provides a fluid mixing device comprising a mixing chamber, a first driving portion, a second driving portion and a control unit. The mixing chamber has an inlet flow path and an outlet flow path. The first driving portion includes at least one of the above-described bubble micro-pulls disposed on the inlet flow path. The second drive unit includes at least one of the aforementioned bubble micro-pulls disposed on the outlet flow path. The control unit is electrically connected to the bubble micro-drive of the first driving part and the second driving part.
•1310· 號：TW3329PA 浦。當控制單元驅動第一驅動部，以導引至少二種液體進 入混合腔後，控制單元可以交替驅動第二驅動部與第一驅 動部作動，以反覆導引前述二種流體由入口流道與出口流 道進出混合腔，藉此以混合二種液體。 本發明又提出一種環形流體混合裝置，此裝置包括一 環形主流道、二個第一支流道、二個第二支流道、一第一 驅動部、一第二驅動部與一控制單元。第一支流道與第二 支流道皆連接於環形主流道，而第二支流道係位於二個第 一支流道之間。第一驅動部包括二個前述之氣泡式微幫 浦，係設置於環形主流道上，並個別鄰近一個第一支流 道。第二驅動部包括二個前述之氣泡式微幫浦，係設置於 環形主流道上，並個別鄰近一個第二支流道。控制單元電 性連接第一驅動部與第二驅動部之氣泡式微幫浦。當不同 之液體由第一支流道與第二支流道引入環形主流道後，控 制單元係可交替驅動第一驅動部與第二驅動部，使不同之 液體於環形主流道中混合。 本發明另提出一種複合型流體混合裝置，此裝置包括 一第一流道組件、一第二流道組件與一控制單元。第一流 道組件包括一環形主流道、至少一出口流道與一入口流 道、一第一驅動部與一第二驅動部。出口流道與入口流道 係連接環形主流道。第一驅動部設置於環形主流道與入口 流道之交接處，而第二驅動部則設置於環形主流道與出口 流道之交接處。第一驅動部與第二驅動部各包括至少一個 前述之氣泡式微幫浦。第二流道組件設置於第一流道組件 9 13• 1310·: TW3329PA Pu. After the control unit drives the first driving portion to guide at least two kinds of liquids into the mixing chamber, the control unit may alternately drive the second driving portion and the first driving portion to actuate to repeatedly guide the two fluids from the inlet flow path and The outlet flow path enters and exits the mixing chamber, thereby mixing the two liquids. The present invention further provides an annular fluid mixing device comprising an annular main flow path, two first branch flow paths, two second branch flow paths, a first drive portion, a second drive portion and a control unit. The first flow path and the second flow path are connected to the annular main flow path, and the second flow path is located between the two first flow paths. The first driving portion includes two of the aforementioned bubble type micro-pulls, which are disposed on the annular main flow path and are adjacent to a single first flow path. The second driving portion comprises two of the aforementioned bubble type micro-pulls, which are disposed on the annular main flow path and are adjacent to a second branch flow path. The control unit is electrically connected to the bubble micro-pull of the first driving portion and the second driving portion. After the different liquids are introduced into the annular main flow path by the first branch flow path and the second branch flow path, the control unit alternately drives the first drive portion and the second drive portion to mix different liquids in the annular main flow path. The invention further provides a composite fluid mixing device comprising a first flow channel assembly, a second flow channel assembly and a control unit. The first flow channel assembly includes an annular main flow channel, at least one outlet flow channel and an inlet flow channel, a first driving portion and a second driving portion. The outlet flow path and the inlet flow path are connected to the annular main flow path. The first driving portion is disposed at the intersection of the annular main flow path and the inlet flow path, and the second driving portion is disposed at the intersection of the annular main flow path and the outlet flow path. The first driving portion and the second driving portion each include at least one of the aforementioned bubble micro-pulls. The second runner assembly is disposed on the first runner assembly 9 13
：TW3329PA 之上方，並包括一直流道與—第三驅動部，其中直流道與 壞形主流运連通。第三驅動部包括至少二個前述之氣泡式 微幫浦，係分別位於直流道與環形主流道連通處之二對 侧。控制單元分別電性連接第一驅動*、第二驅動部與第 三驅動部之氣泡式微幫浦。當控制單祕動第—驅動部以 導引-液體由人口流道進人環形主流道，並驅動第三驅動 =導引另-液體由直流道之二側進人環形线道後，控制 單元係可交替驅動第-驅動部與第二驅動部，以前述之二 種液體於環形线道巾混合，並在第二動部之作動下， 使混合後之液體由出口流道離開環形主流道。 為讓本發明之上述内容能更明顯易懂，下文特舉較佳 實施例，並配合所附圖式’作詳細說明如下： 【實施方式】 實施例一Above: TW3329PA, and includes a straight flow path and a third driving part, wherein the DC channel is connected to the bad mainstream. The third driving portion includes at least two of the aforementioned bubble type micro-pulls, which are respectively located on two opposite sides of the communication between the direct current path and the annular main flow path. The control unit is electrically connected to the bubble micro-pull of the first driving*, the second driving part and the third driving part, respectively. When the control unit is secreted, the drive unit is guided by the liquid-flow path into the ring main channel, and the third drive is driven to guide the other liquid to enter the ring line from the two sides of the DC channel. The first driving portion and the second driving portion may be alternately driven to mix the two kinds of liquids in the annular line, and under the action of the second moving portion, the mixed liquid is separated from the annular main flow path by the outlet flow path. In order to make the above description of the present invention more comprehensible, the preferred embodiments are described below, and are described in detail below with reference to the accompanying drawings: [Embodiment] Embodiment 1
5月參照弟1圖，其♦合开*乃价肢士 αα杏 々妈暫法立照本發明實施例一的氣泡 楚加从 第圖所不’氣泡式微幫浦1包括 一第一部件110、一第-邻杜 楚卩件與—氣泡產生單元130, 第一部件120設置於第一部件 而〆^女 nn glf^ 丨仟UU之上，而氣泡產生單元 130貝]5又置於弟一部件】】〇 上並可於第一部件110盘第 體時’於第一部件1㈣ 之間產生虱體。请再參照第2Α〜2Β圖 1 1¾ ^ All/ irxt 乐△圖、·日不乃弟 圖軋泡式微幫浦的第一部件 !固灰a ,、 丨汁^不思圖’第2B圖繪示乃第 圖氣泡式微幫浦的第二部件第 M干乏弟不意圖。如第2A圖In May, referring to the brother 1 picture, the ♦ 合 * 乃 乃 乃 α α α α α 々 暂 暂 暂 暂 暂 暂 暂 暂 暂 暂 暂 暂 暂 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚 楚a first-neighbor-supplement-and-bubble generating unit 130, the first component 120 is disposed on the first component and is above the female nn glf^ 丨仟UU, and the bubble generating unit 130 is placed on the brother A component] can be used to create a carcass between the first component 1 (four) when the first component 110 is in the first body. Please refer to the second part of the second Α~2ΒFig. 1 13⁄4 ^ All/ irxt music △ map, the Japanese part of the 轧 乃 图 轧 轧 ! ! ! ! ! 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固 固The second part of the bubble-type micro-pump is the intention of the younger brother. As shown in Figure 2A
131 : tW3329PA 所^第一部件110具有—流道115,此流道115上具有 ί二:7:域1與7第二區域π。較佳地，氣體產生單 兀30如同日τ設置於第一部件u〇 =第™之流道心質== ==彻等材料，其可經㈣光顯影 110 Γ泡產生單元130包括—電極組，係設置於第一部件 =上，亚具有—第—電極⑶與—第二電極133。^牛 弟一電極131對應於第—區域I設置，而第二電極 :於第：區域η設置。第一電極㈣第二電 之正負極相連接，使二者之極性 參與反應 如是金、轉鈍態金屬，較不易 -部=^圖所示’第二部件12G之表㈣應於前述第 表：，而第-具有第，因子、之粗糙 而弟一口叫120之表面於對應第二區域為一 ㈣：d之粗糙表面，第一粗糙因子心係大；第二 Ξ Γ；^ 產生單元13G所產生之氣泡開始散失 :由於第一粗糙因子0ι與第二粗糖因子“之差異 J 一區域1之液體回填速度大於第二區域II之液體回填速 度，因而帶動液體流動。 、、 121 係對應於第—區域I與第二區域II之二側。告 P件no與第二部件12〇組裝後，液體係由流體入口131: tW3329PA The first component 110 has a flow path 115 having ί2:7: Domain 1 and 7 second region π. Preferably, the gas generating unit 30 is arranged as the day τ is set to the first part u〇=the TM channel quality ==== the same material, which can be subjected to the (4) light development 110, the bubble generation unit 130 includes the electrode The group is disposed on the first component=up, and has a first-electrode (3) and a second electrode 133. ^ The first electrode 131 corresponds to the first region I setting, and the second electrode is disposed at the first region η. The first electrode (four) of the second electric positive and negative poles are connected, so that the polarity of the two is involved in the reaction, such as gold, turning passive metal, less difficult - part = ^ figure shown in the second part 12G (four) should be in the aforementioned table :, and the first - has the first, the factor, the rough and the younger one called 120 the surface corresponding to the second region is a (four): d rough surface, the first roughness factor is large; the second Ξ Γ; ^ generating unit 13G The generated bubble begins to be lost: due to the difference between the first roughness factor 0 and the second coarse sugar factor, the liquid backfilling velocity of the region 1 is greater than the liquid backfilling velocity of the second region II, thereby driving the liquid to flow. The first side of the first area I and the second area II. After the P piece no is assembled with the second part 12〇, the liquid system is made up of the fluid inlet
：TW3329PA • i2i進入第一部件110與第二部件120之間，並流經第一 鄯件110之流道150，再由流體出口 123離開。第二部件 12〇之材質較佳為疏水材料，其例如是光阻或高分子材 科，如光阻膠（SU8)或聚二甲基矽氧烷（pDMs)。第二 部件120之表面上具有一凹槽125,柱狀元件係設置於凹 槽125内。柱狀元件組成之微柱狀結構可以微機電製程中 常見之厚膜材料（如前述之SU8和pDMs)，同樣經由曝 光顯影等步驟而製作完成。 _ §第一部件11 〇與第二部件12〇密合後，於第二部件 12〇之凹槽處（125)會構成一側向之排氣孔。由於第二部 件120係疏水材料，較佳地，若是在第一部件no於流道 115二侧之表面上也塗佈一疏水材料（例如是鐵弗龍），則 <避免流道115上之液體由排氣孔洩漏。當第一部件n〇 與第二部件120之間充滿液體時，氣泡產生單元13〇會藉 由電解液體以製造出氣泡’由於前述之疏水設計，此時係 僅有氣泡會由排氣孔排出’而液體仍會保持在流道115内。 • 關於第二部件Π0表面之第一粗糙因子與第二粗 糙因子02之定義，係基於發表在電氣與電子工程師學會 期刊（IEEE，pp 694-697，30 Jan〜3 Feb 2005, Ashutosh: TW3329PA • i2i enters between the first component 110 and the second component 120 and flows through the flow channel 150 of the first component 110 and exits by the fluid outlet 123. The material of the second member 12 is preferably a hydrophobic material such as a photoresist or a polymer material such as a photoresist (SU8) or polydimethylsiloxane (pDMs). The second member 120 has a recess 125 in its surface, and the cylindrical member is disposed in the recess 125. The micro-columnar structure composed of the columnar elements can be made by a thick film material (such as the aforementioned SU8 and pDMs) which is commonly used in the microelectromechanical process, and is also formed by steps such as exposure development. _ § After the first part 11 〇 is in close contact with the second part 12 ,, the venting opening is formed at the groove (125) of the second part 12 。. Since the second member 120 is a hydrophobic material, preferably, if a hydrophobic material (for example, Teflon) is coated on the surface of the first member no on both sides of the flow path 115, < avoiding the flow path 115 The liquid leaks from the vent hole. When the first member n 〇 and the second member 120 are filled with liquid, the bubble generating unit 13 藉 generates a bubble by the electrolyte body. Due to the aforementioned hydrophobic design, only the bubble is discharged from the vent hole. 'The liquid will remain in the flow path 115. • The definition of the first roughness factor and the second roughness factor 02 on the surface of the second component Π0 is based on the Journal of the Institute of Electrical and Electronics Engineers (IEEE, pp 694-697, 30 Jan~3 Feb 2005, Ashutosh
Shastry，. etc)之論文「用以操控微流系統中的液滴之工程 表面粗糙度」（engineering surface roughness to manipulate droplets in micro-fluidic systems)所提出之論點。此論文 中説明表面之粗糙度調整可改變液滴與此表面之親疏程 度，以控制微流系統中之液滴流動。作者是在一平面上製 12Shastry,. etc., paper "Engineering surface roughness to manipulate droplets in micro-fluidic systems". This paper states that surface roughness adjustments can alter the degree of separation of droplets from this surface to control droplet flow in a microfluidic system. The author is on a flat surface. 12
-I3im ：TW3329PA 造出許多微型矽柱體以改變此平面之表面粗糙度，並提出 一粗糙因子0之定義：粗糙因子0係矽柱體之表面積（與 液滴接觸之面積）與平面總面積之比。作者更提出另一粗 糙:因子7"，其更進一步地考量到石夕柱體之面積與高度。當 平面之表面粗糙度改變後，液滴與平面之接觸角與毛細作 用力將隨之改變，致使液滴於平面上之可動性改變。 於前述論證之支持下，本實施例一之氣泡式微幫浦1 之第二部件120之結構設計之一即如第2B圖所示。第二 部件120之表面上具有第一群柱狀元件G1與第二群柱狀 元件G2,分別對應於第一部件110之第一區域I與第二區 域II設置。第一群柱狀元件G1包括多個截面積相同之第 一柱體127，第二群柱狀元件G2則包括多個截面積相同 之第二柱體129。其中，前述之第一粗糙因子01係由第一 群柱狀元件G1於第一區域I中所佔面積之比例所決定， 而第二粗糙因子0 2則是由第二群柱狀元件G2於第二區域 II中所佔面積之比例所決定。由於二個粗糙因子之差異， 根據前述Ashutosh Shastry所提出之論述，二個區域之液 面接觸角不同而影響液滴之毛細作用力。進而當液體中之 氣泡散失時，液體回填之速度有所差異。 於實際運用時，粗糙因子4較佳是逐次遞減或逐次遞 增，使粗糙因子0呈現一粗糙梯度之設計。也就是說，本 實施例之第一粗糙因子4 第二粗糙因子可以是逐次 遞減或逐次遞增。較佳的作法是，於第二部件120上所設 置之柱狀元件依照其對應於第一部件110之流道115上的 13-I3im: TW3329PA creates many miniature cylinders to change the surface roughness of this plane, and proposes a definition of roughness factor 0: roughness factor 0 is the surface area of the cylinder (the area in contact with the droplet) and the total area of the plane Ratio. The author also proposed another rough: factor 7", which further considers the area and height of the Shixi column. When the surface roughness of the plane changes, the contact angle and capillary force of the droplet with the plane will change, causing the movability of the droplet on the plane to change. With the support of the foregoing argument, one of the structural designs of the second component 120 of the bubble micro-pump 1 of the first embodiment is as shown in FIG. 2B. The second member 120 has a first group of columnar elements G1 and a second group of columnar elements G2 on the surface, corresponding to the first area I and the second area II of the first part 110, respectively. The first group of columnar elements G1 includes a plurality of first columns 127 having the same cross-sectional area, and the second group of column elements G2 includes a plurality of second columns 129 having the same cross-sectional area. Wherein, the first roughness factor 01 is determined by the ratio of the area occupied by the first group of columnar elements G1 in the first region I, and the second roughness factor 0 2 is determined by the second group of columnar elements G2. The proportion of the area occupied in the second area II is determined. Due to the difference between the two roughness factors, according to the aforementioned discussion by Ashutosh Shastry, the liquid contact angles of the two regions are different to affect the capillary force of the droplets. Further, when the bubbles in the liquid are lost, the speed of liquid backfilling differs. In practical use, the roughness factor 4 is preferably successively decreasing or successively increasing, so that the roughness factor 0 exhibits a rough gradient design. That is to say, the first roughness factor 4 and the second roughness factor of the embodiment may be successively decreasing or successively increasing. Preferably, the cylindrical member disposed on the second member 120 is in accordance with the corresponding flow path 115 of the first member 110.
13鳴 :TW3329PA ·=區域係具有不同之截面積，使第二部件m之表面係 二有表_糙度梯度之粗糙表面。請參照第3Α〜3β圖，其 、’、s示乃第1圖氣泡式微幫浦- 第3A圖所示，第二部件幫二第柱示意圖。如 面積大小依序設置於_ 125二=件129’#'按照其截 ㈣、Uit 125内’使第二部件120’之表面 =於流；115上之不同區域係具有不同粗糙因子之粗糙 © °如第3B圖所示’第二部件12〇,之表面 _粗糙因子㈤〜x)，其形成一表面粗糙度梯度Ul> 2>”U本實施例中’每個柱狀元件129,之高度皆為 h °根據Ashutosh Shastry所提出之論文，粗糖因子心係’、： Φ i=bi2/(ai+bi)2 其中，由Cassie_Baxter理論所推測出之粗糙因子 與接觸角Θ之關係圖請參照第4A圖。如第4A圖所示，冬 粗糙因子0越大時，液面之接觸角Θ越小。而液面之接^ 角Θ係影響其毛細仙力（毛細仙力與接㈣約成反 比）’進而影響在氣泡散失時，液體回填之速度。以大氣 壓力下液體於物體表面之毛細作用力關係推知，當接觸角 Θ越小（粗較因子0越大），毛細作用力越大，液體之回 真速度越决。明參照第4B目，其緣示乃粗輪因子與液體 動之關係圖。如第4B圖所示，由毛細作用力影響之液 體塵力P與粗糖因子必成正比。且於不同流道深度（10、 25、50μη〇下，當流道深度越淺，液體壓力p變化越大（即 毛細作用越明顯）。液體之推力直接可由二個不同粗链因 子對應之液體壓力相減所獲得。例如，以流道深度為 1413 Ming: TW3329PA ·=The area has different cross-sectional areas, so that the surface of the second part m has a rough surface with a surface gradient. Please refer to the 3rd ~ 3β map, where ', s is the bubble micro-pull of the first figure - Figure 3A, the second part is the second column diagram. If the size of the area is sequentially set to _ 125 two = piece 129 '#' according to its cut (four), Uit 125 'the surface of the second part 120' = flow; different areas on 115 have roughness of different roughness factors © ° as shown in Fig. 3B, 'the second member 12', the surface_roughness factor (5) to x), which forms a surface roughness gradient Ul<2>"U" in the present embodiment, 'each columnar element 129, The height is h ° According to the paper proposed by Ashutosh Shastry, the crude sugar factor heart system ',: Φ i=bi2/(ai+bi)2 Among them, the relationship between the roughness factor and the contact angle 推测 estimated by Cassie_Baxter theory Refer to Figure 4A. As shown in Figure 4A, the larger the winter roughness factor 0 is, the smaller the contact angle of the liquid surface is, and the contact angle of the liquid surface affects the capillary force (the capillary force and the connection (4) It is inversely proportional to 'and thus affects the speed of liquid backfilling when the bubble is lost. It is inferred from the capillary force relationship of the liquid on the surface of the object under atmospheric pressure, the smaller the contact angle ( (the coarser than the factor 0), the capillary force The bigger the liquid, the faster the speed of the liquid is. The reference to the 4B is clear. The relationship between factor and liquid motion. As shown in Figure 4B, the liquid dust force P affected by the capillary force is proportional to the crude sugar factor, and at different channel depths (10, 25, 50μη〇, when the flow channel The shallower the depth, the greater the change in liquid pressure p (ie, the more pronounced capillary action). The thrust of the liquid can be directly obtained by subtracting the liquid pressure corresponding to two different thick chain factors. For example, the flow depth is 14
：TW3329PA •i3iom 二達編航 作說明，於粗糙因子0為0.2與0.8之間的推力係其對應 之2kPa與5kPa之差值3kPa。如此一來，可藉由控制流道 深度與粗糙因子4之梯度設計，以設定氣泡式微幫浦所要 驅動之推力大小。 基於上述，關於氣泡式微幫浦1之實際操作，請參照 第5A〜5D圖，第5A圖繪示乃第1圖的氣泡式微幫浦之剖 視圖，第5B〜5D圖繪示乃第4B圖的氣泡式微幫浦於作動 時之連續示意圖。在此說明的是，第二部件120’之構造係 採用如第3A圖之設計。如第5A〜5B圖所示，氣泡產生單 元130之第一電極131與第二電極133連接到一驅動電源 (未繪示）之正負極，於驅動電源開啟後，第一電極131 與第二電極133將開始電解液體以產生氣泡。當一氣泡B 產生並關閉驅動電源後，如第5C圖所示，由於氣泡B兩 邊之液面係停留在具有不同粗糖因子之表面上，因而造成 液體與第二部件120’表面之接觸角6^與611產生差異。第 一部件110與液面接觸之表面性質相同，其產生之接觸角 (9b相同。由於第二部件120’表面之疏水性質及粗糙因子 0 1 > 0 X之特性，使接觸角Θ R > (9 L > 90度。此特性對液 體產生之毛細作用力關係為Pl > Pr，因而造成氣泡B兩邊 液體流回之速度差異，如第5D圖所示。在氣泡B排出而 液體回填之連續過程中，在流道115上會產生一向右之流 體淨流量，最終產生類似幫浦推動液體向右流動之效果。 根據前述之操作原理，針對所設計之氣泡式微幫浦1 的試驗結果說明如下。 15: TW3329PA • i3iom Erda Navigating, the thrust between the roughness factor 0 and 0.2 is 0.8 kPa and the difference between 3 kPa and 5 kPa is 3 kPa. In this way, the gradient of the flow path depth and the roughness factor 4 can be controlled to set the thrust force to be driven by the bubble micro-pull. Based on the above, regarding the actual operation of the bubble type micro-pump 1, please refer to the 5A to 5D drawings, and FIG. 5A is a cross-sectional view of the bubble type micro-pump shown in FIG. 1 , and FIGS. 5B to 5D are the picture 4B A continuous schematic diagram of a bubble-type micro-pump when it is actuated. It is explained herein that the second member 120' is constructed in a configuration as in Fig. 3A. As shown in FIG. 5A to FIG. 5B, the first electrode 131 and the second electrode 133 of the bubble generating unit 130 are connected to the positive and negative poles of a driving power source (not shown). After the driving power source is turned on, the first electrode 131 and the second electrode are Electrode 133 will begin the electrolyte body to create bubbles. When a bubble B is generated and the driving power is turned off, as shown in Fig. 5C, since the liquid level on both sides of the bubble B stays on the surface having different coarse sugar factors, the contact angle of the liquid with the surface of the second member 120' is caused 6 ^ There is a difference from 611. The first component 110 has the same surface properties as the liquid surface contact, and the resulting contact angle (9b is the same. Due to the hydrophobic nature of the surface of the second component 120' and the roughness factor 0 1 > 0 X, the contact angle Θ R > (9 L > 90 degrees. The capillary force relationship of this characteristic to the liquid is Pl > Pr, thus causing the difference in the speed of the liquid flow back on both sides of the bubble B, as shown in Fig. 5D. During the continuous process of backfilling, a net flow of fluid to the right is generated on the flow path 115, which ultimately produces the effect of pushing the liquid to the right like the pump. According to the above operating principle, the test for the designed bubble micro-pump 1 The results are explained below. 15
-I3im ：TW3329PA 表1 微幫浦 粗糖梯度設計0 i ( i= 1〜8 ) 流道深度h No.l 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 1 20 μιη No.2 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 1 50 μιη 本實施例於試驗時之氣泡式微幫浦1之規格如表1所 示，並請再參照第5A〜5D圖。於試驗時，係先注入一去 離子水溶液，再施加電壓於第一電極131與第二電極133 上以產生電解氣泡B。當氣泡B達到一定大小後，便會經 由排氣孔排除。於氣泡B排除過程中，左邊之液體會受到 較大之毛細作用力，使得流回之速度較右邊快而產生一個 向右之淨流量。於操作時，係以一特定之頻率去切換與第 一電極131及第二電極133連接之驅動電壓，藉由反覆之 電解氣泡B之生滅過程，產生流體循環而達到連續淨流量 之效果。試驗結果請參照第6圖，其係以不同之驅動電壓 與操作頻率作試驗，進行觀察並紀錄相對應之流速效果。 如第6圖之試驗結果所示，液體之流速係與操作頻率及驅 動電壓之大小以一近似於正比之關係存在。由此量測結果 可知，氣泡式微幫浦1亦可藉由施加電壓之頻率與強度控 制，做精確的流速以及流量控制。 另外，關於第二部件120 ( 120’）表面之設計，雖然 本實施例一係以柱狀元件為例作說明，但本發明並不以此 為限定。舉例來說，本實施例之柱狀元件亦可由可調變薄 膜組成。請參照第7A〜7B圖，其繪示乃第2B圖的柱狀元 件由薄膜組成之示意圖。第二部件120上係設置多個可調 16 .1310021-I3im : TW3329PA Table 1 Micro-pump raw sugar gradient design 0 i ( i = 1~8 ) Flow path depth h No.l 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 1 20 μιη No.2 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 1 50 μηη The specifications of the bubble type micro-pump 1 in the present embodiment are shown in Table 1, and please refer to Figures 5A to 5D again. In the test, a deionized water solution is first injected, and a voltage is applied to the first electrode 131 and the second electrode 133 to generate an electrolytic bubble B. When the bubble B reaches a certain size, it is removed by the vent hole. During the elimination of bubble B, the liquid on the left will be subjected to a larger capillary force, making the flow faster than the right and producing a net flow to the right. In operation, the driving voltage connected to the first electrode 131 and the second electrode 133 is switched at a specific frequency, and by the process of reversing the combustion of the electrolytic bubble B, fluid circulation occurs to achieve a continuous net flow. Refer to Figure 6 for the test results. Experiment with different driving voltages and operating frequencies to observe and record the corresponding flow rate effects. As shown in the test results of Fig. 6, the flow rate of the liquid exists in a nearly proportional relationship with the operating frequency and the driving voltage. From the measurement results, the bubble micro-pump 1 can also be controlled by the frequency and intensity of the applied voltage to achieve precise flow rate and flow control. Further, regarding the design of the surface of the second member 120 (120'), although the first embodiment is described by taking a columnar member as an example, the present invention is not limited thereto. For example, the columnar member of this embodiment may also be composed of a tunable thin film. Referring to Figures 7A to 7B, there is shown a schematic view of the columnar member of Figure 2B composed of a film. The second component 120 is provided with a plurality of adjustable 16 .1310021
三達編號：TW3329PA • 變之薄膜170，這些薄膜170於原始狀態下係如第7A圖 所示。當薄膜170被驅動後，如第7B圖所示，薄膜170 會產生形變而改變其弧度，進而調整第二部件120與液體 接觸之面積。至於薄膜170之驅動，其可藉由流體（如氣 體）推動薄膜Π0或施加電壓於薄膜170上，以改變薄膜 170之變形量。關於可變形薄膜，可更進一步參考美國專 利US6929030之「微製程橡膠膜閥及幫浦系統」 (microfabricated elastomeric valve and pump system)内 ，容。 實施例一雖然僅以改變柱狀元件與液體之接觸面積 去達成調整第二部件120之表面粗糙度之目的，然於實際 上運用時，亦可如前述之論文所論證之，藉由改變柱狀元 件之高度來控制粗糙因子之大小。由於僅藉由改變柱狀元 件之尺寸、間隙排列就可以形成表面粗糙梯度，以達到驅 動流體之目的，本實施例一之氣泡式微幫浦具有製成簡單 與操作便利之優點。 > 另，實施例一之氣泡產生單元130雖然是以電解液體 之方式產生氣泡，但本發明並不以此為限定。任何可於液 體中產生氣泡之方式，例如加熱產生氣泡等方式，皆屬於 本發明之範轉。 再者，本實施例一之氣泡產生單元130雖然是以一個 電極組為例做說明，然而在實際應用上，也可以在第一部 件110之流道115上選擇不同位置以安置二個以上之電極 組。此方式提供使用者一設定氣泡產生位置之功能，使用 17Sanda number: TW3329PA • The film 170 is changed, and these films 170 are in the original state as shown in Fig. 7A. When the film 170 is driven, as shown in Fig. 7B, the film 170 is deformed to change its curvature, thereby adjusting the area of contact of the second member 120 with the liquid. As for the driving of the film 170, it is possible to change the amount of deformation of the film 170 by pushing a film Π0 or applying a voltage to the film 170 by a fluid such as a gas. For a deformable film, reference is made to the "microfabricated elastomeric valve and pump system" of U.S. Patent No. 6,929,030. In the first embodiment, although the contact area between the columnar member and the liquid is changed to achieve the purpose of adjusting the surface roughness of the second member 120, in practice, it can also be modified as shown in the aforementioned paper by changing the column. The height of the element is used to control the size of the roughness factor. Since the surface roughness gradient can be formed only by changing the size and gap arrangement of the columnar elements to achieve the purpose of driving the fluid, the bubble type micro-pump of the first embodiment has the advantages of simple manufacture and convenient operation. > Further, although the bubble generating unit 130 of the first embodiment generates bubbles as an electrolyte, the present invention is not limited thereto. Any manner in which bubbles can be generated in the liquid, such as heating to generate bubbles, is a paradigm of the present invention. Furthermore, although the bubble generating unit 130 of the first embodiment is described by taking an electrode group as an example, in practical applications, different positions may be selected on the flow path 115 of the first component 110 to accommodate two or more. Electrode group. This method provides the user with the function of setting the bubble generation position.
13哪 ：TW3329PA 者可選定相應之電極組進行電解氣泡之動作。如此一來， 除了可藉由操作驅動電源之頻率大小以決定氣泡數目之 不同，更可搭配氣泡產生之位置以達到驅動流速切換之效 果。 本實施例一所提出之氣泡式微幫浦可廣泛地運用於 各種微流體系統（生醫晶片、微燃料電池等）内，以驅動 各種液體流動。且氣泡式微幫浦具有低耗能、低驅動電 壓、低操作溫度以及氣泡形成之壓力大等之優點，使之非 常適合成為驅動流體之裝置。以下將舉數個實施例以說明 實施例一之氣泡式微幫浦之應用，但並非用以限定本發明 之應用範圍。 實施例二 實施例二係提出一種雙向流體驅動裝置，其運用不同 流道之設計以控制液體流動之方向，達到雙向驅動流體之 目的。 請參照第8圖，其繪示乃依照本發明實施例二的雙向 流體驅動裝置之示意圖。如第8圖所示，雙向流體驅動裝 置200包括一第一主流道210、一第二主流道220、一第 一驅動部230、一第二驅動部240與一控制單元250。第 一主流道210與第二主流道220交錯設置並構成一共同流 道區III。第一驅動部230設置於第一主流道210上，並鄰 近共同流道區III。第二驅動部240設置於第二主流道220 上，並鄰近於共同流道區III。其中，第一驅動部230與第 18 •131002113: TW3329PA can select the corresponding electrode group for the action of electrolyzing bubbles. In this way, in addition to the frequency of the driving power source to determine the difference in the number of bubbles, the position of the bubble generation can be matched to achieve the effect of driving the flow rate switching. The bubble micro-pump proposed in the first embodiment can be widely used in various microfluidic systems (biomedical wafers, micro fuel cells, etc.) to drive various liquid flows. Moreover, the bubble type micro-pull has the advantages of low energy consumption, low driving voltage, low operating temperature, and high pressure of bubble formation, making it very suitable as a device for driving a fluid. Several embodiments will be described below to illustrate the application of the bubble micro-pull of the first embodiment, but are not intended to limit the scope of application of the present invention. Embodiment 2 Embodiment 2 proposes a bidirectional fluid driving device which uses different flow channel designs to control the direction of liquid flow to achieve bidirectional driving of fluids. Referring to Figure 8, there is shown a schematic diagram of a two-way fluid drive apparatus in accordance with a second embodiment of the present invention. As shown in FIG. 8, the bidirectional fluid driving device 200 includes a first main flow channel 210, a second main flow channel 220, a first driving portion 230, a second driving portion 240, and a control unit 250. The first main flow path 210 and the second main flow path 220 are alternately arranged and constitute a common flow path area III. The first driving portion 230 is disposed on the first main flow channel 210 and adjacent to the common flow channel region III. The second driving portion 240 is disposed on the second main flow channel 220 and adjacent to the common flow channel region III. Wherein, the first driving part 230 and the 18th; 1310021
三達編號：TW3329PA _ 二驅動部240係以如實施例一之氣泡式微幫浦作驅動。第 一驅動部230與第二驅動部240皆包括至少一個氣泡式微 幫浦。然，本實施例二係以第一驅動部230與第二驅動部 240皆包括二個氣泡式微幫浦為較佳實施例作說明。較佳 地，每個氣泡式微幫浦都設置於共同流道區III之鄰側， 而同一驅動部之氣泡式微幫浦係對稱地設置於共同流道 區III之二對侧。控制單元250分別與第一驅動部230及 第二驅動部240之氣泡式微幫浦231、233、241、243電 , 性連接。當控制單元250驅動第一驅動部230之氣泡式微 幫浦231、233作動時，第一驅動部230係推動第一主流 道上210之液體流動。而當控制單元250驅動第二驅動部 240之氣泡式微幫浦241、243作動時，第二驅動部240係 推動第二主流道220上之液體流動。 液體流向與流道之設計有關。第一主流道210例如是 垂直於第二主流道220設置，使液體可以沿著二個相互垂 直之方向流動。於實際運用上，雙向流體驅動裝置200可 > 由二個部件上下組合而成，其中上部件具有粗糙表面之設 計，而下部件則具有第一主流道210、第二主流道220與 電極組之設置，以下附圖說明之。 請參照第9A〜9B圖，其分別繪示第8圖雙向流體驅 動裝置之下部件之第一、第二示意圖。由氣泡式微幫浦 231、233、241、243組成之第一驅動部230與第二驅動部 240共計有四個電極組，係設置於第一主流道210與第二 主流道220上。如第9A圖所示，第一驅動部230與第二 19 .1310021Sanda number: TW3329PA _ The second driving unit 240 is driven by a bubble micro-push as in the first embodiment. Both the first driving portion 230 and the second driving portion 240 include at least one bubble micro-pump. However, in the second embodiment, the first driving unit 230 and the second driving unit 240 both include two bubble micro-pulls as a preferred embodiment. Preferably, each of the bubble micro-pulls is disposed on the adjacent side of the common flow path region III, and the bubble micro-pull system of the same driving portion is symmetrically disposed on the opposite side of the common flow path region III. The control unit 250 is electrically connected to the bubble micro-pulls 231, 233, 241, and 243 of the first driving unit 230 and the second driving unit 240, respectively. When the control unit 250 drives the bubble micro-pulls 231, 233 of the first driving portion 230 to operate, the first driving portion 230 pushes the liquid flow on the first main channel 210. When the control unit 250 drives the bubble micro-pumps 241, 243 of the second driving portion 240 to operate, the second driving portion 240 pushes the liquid flow on the second main flow path 220. The flow direction of the liquid is related to the design of the flow channel. The first main flow path 210 is disposed, for example, perpendicular to the second main flow path 220 so that liquid can flow in two mutually perpendicular directions. In practical use, the two-way fluid driving device 200 can be combined by two components, wherein the upper member has a rough surface design, and the lower member has a first main channel 210, a second main channel 220 and an electrode group. The arrangement is illustrated in the following figures. Referring to Figures 9A-9B, the first and second schematic views of the components of the bidirectional fluid drive device of Figure 8 are respectively shown. The first driving unit 230 and the second driving unit 240, which are composed of the bubble type micro-pulls 231, 233, 241, and 243, have a total of four electrode groups, which are disposed on the first main flow path 210 and the second main flow path 220. As shown in FIG. 9A, the first driving portion 230 and the second 19 .1310021
三達編號：TW3329PA M 驅動部240之電極組231A、233A、241A、243A設置於共 同流道區III之四邊。當要驅動第一主流道210之液體流 動時，只要啟動第一主流道210上之電極組231A、233A (共四個電極），而要驅動第二主流道220之液體流動時， 即是啟動第二主流道210上之電極組241A、243A。實際 上，較為簡化之電極組設計係如第9B圖所示。每個主流 道210、220上看似設置有三個電極，然其中一電極係位 於共同流道區III中同時供第一主流道210與第二主流道 ί 220使用。相較於第9A圖之設計，當要驅動液體流動時， 僅需開啟三個電極（231Β、233Β、260或是241Β、243Β、 260)即可。 再參照第10Α〜10Β圖，其分別繪示第8圖雙向流體 驅動裝置之上部件之第一、第二示意圖。為搭配第一主流 道210與第二主流道220之垂直設計，如第10Α圖所示， 上部件之表面上的柱狀元件270由上到下、由左到右兩個 方向都是漸進式之粗糙梯度設計，亦即，具有不同截面大 > 小之柱狀元件270係對稱45度角設置。如此一來，就可 以製造於兩個方向以上之粗糙度梯度，使左方、上方之液 體回流速度大於右方、下方之回流速度。另外，如第10Β 圖所示，運用將多個可調變之薄膜280排列成陣列之形 式，當要改變粗糙梯度時，僅需驅動特定區域内之薄膜， 其驅動已於實施例一中搭配第7Α〜7Β圖說明。如此一來， 不僅可以改變多方向之粗糙梯度，也可以調控不同位置之 粗糙梯度。 20 .1310021The three-numbered TW3329PA M electrode group 231A, 233A, 241A, and 243A are disposed on four sides of the common flow path area III. When the liquid flow of the first main flow path 210 is to be driven, as long as the electrode groups 231A, 233A (four electrodes in total) on the first main flow path 210 are activated, and the liquid flow of the second main flow path 220 is to be driven, it is activated. Electrode groups 241A, 243A on the second main channel 210. In fact, the more simplified electrode set design is shown in Figure 9B. Each of the main channels 210, 220 appears to be provided with three electrodes, and one of the electrodes is located in the common flow path area III for use by the first main flow path 210 and the second main flow path 225. Compared to the design of Figure 9A, when driving the liquid flow, only three electrodes (231Β, 233Β, 260 or 241Β, 243Β, 260) need to be turned on. Referring again to Figures 10 through 10, there are shown first and second schematic views of the components of the bidirectional fluid drive of Figure 8 respectively. In order to match the vertical design of the first main channel 210 and the second main channel 220, as shown in FIG. 10, the columnar elements 270 on the surface of the upper member are progressive from top to bottom and from left to right. The rough gradient design, i.e., having a large cross-section with a small cross-section, is a symmetrical 45-degree angular setting. In this way, the roughness gradient in both directions can be made, so that the liquid reflux velocity on the left and upper sides is greater than the reflux velocity on the right and below. In addition, as shown in FIG. 10, a plurality of tunable films 280 are arranged in an array, and when the roughness is to be changed, only the film in a specific region needs to be driven, and the driving thereof is matched in the first embodiment. The description of the 7th to 7th drawings. In this way, not only can the coarse gradient in multiple directions be changed, but also the rough gradient at different positions can be adjusted. 20 .1310021
三達編號：TW3329PA ， f施例三 請參照第11圖，其繪示乃依照本發明實施例三的微 粒分類裝置之第一示意圖。如第11圖所示，微粒分類裝 置300包括一主流道310、一驅動部320、一分流部330、 一檢測單元340與一控制單元350。驅動部320設置於主 流道310之前段。分流部330包括一第一支流道331與一 第二支流道335，係連接於主流道310之後段。於第一支 流道331上設置有一如實施例一之氣泡式微幫浦335，而 ►於第二支流道335上設置有一氣泡式微幫浦337。檢測單 元340設置於主流道310上，並位於驅動部320與分流部 330之間。控制單元350係電性連接驅動部320及分流部 330之氣泡式微幫浦333、337與檢測單元340。當驅動部 320作動以推動主流道310中之一帶有粒子P1之液體移 動，並使粒子P1流經檢測單元340以完成粒子P1之辨識 後，檢測單元340便傳送訊號至控制單元350以驅動分流 部330之氣泡式微幫浦333或337作動，藉此使粒子P1 | 隨液體流入第一支流道331或第二支流道335中。 粒子P1由液體帶入主流道310後，端視主流道310 長度之設定，於主流道310上之驅動部320可包含至少一 個氣泡式微幫浦，以提供足以驅動液體流動之推力。當粒 子P1持續沿著主流道310移動（向右移動）並進入檢測 單元340感測之範圍内，檢測單元340會針對粒子P1之 特定性質（例如電性、體積等）做檢測。檢測單元340例 如是一光感測器或一電感測器，其與控制單元350電性連 21 1310021Sanda number: TW3329PA, f. Example 3 Referring to Figure 11, there is shown a first schematic view of a microparticle sorting apparatus in accordance with a third embodiment of the present invention. As shown in Fig. 11, the particle sorting device 300 includes a main flow path 310, a driving portion 320, a shunt portion 330, a detecting unit 340, and a control unit 350. The drive unit 320 is disposed in front of the main flow path 310. The flow dividing portion 330 includes a first branch flow path 331 and a second branch flow path 335 which are connected to the subsequent stage of the main flow path 310. A bubble micro-pump 335 as in the first embodiment is disposed on the first branch flow path 331, and a bubble micro-pump 337 is disposed on the second branch flow path 335. The detecting unit 340 is disposed on the main flow path 310 and located between the driving unit 320 and the flow dividing unit 330. The control unit 350 electrically connects the drive unit 320 and the bubble micro-piles 333 and 337 of the shunt unit 330 and the detecting unit 340. When the driving part 320 is actuated to push the liquid movement of the one of the main flow channels 310 with the particles P1, and the particles P1 flow through the detecting unit 340 to complete the identification of the particles P1, the detecting unit 340 transmits a signal to the control unit 350 to drive the shunt. The bubble micro-flux 333 or 337 of the portion 330 operates to thereby cause the particles P1 | to flow into the first branch flow path 331 or the second branch flow path 335 with the liquid. After the particles P1 are carried into the main flow path 310 by the liquid, the length of the main flow path 310 is set, and the driving portion 320 on the main flow path 310 may include at least one bubble micro-pump to provide a thrust sufficient to drive the liquid flow. When the particles P1 continue to move along the main channel 310 (moving to the right) and enter the range sensed by the detecting unit 340, the detecting unit 340 detects the specific properties (e.g., electrical, volume, etc.) of the particles P1. The detecting unit 340 is, for example, a photo sensor or an inductive detector, which is electrically connected to the control unit 350. 21 1310021
三達編號：TW3329PA _ 接。當檢測單元340完成粒子P1之辨識後，便隨即傳送 訊號給控制單元350，以判斷是否啟動分類機制。分類機 制啟動時，於分流部330之氣泡式微幫浦333或337開始 作動以循環地產生電解氣泡，使第一支流道331或第二支 流道335上之液體開始流動。假設本實施例之粒子P1經 檢測後係進入第二支流道335中。由於主流道310上與第 一支流道331上均可產生流體驅動力，當第一支流道331 上之氣泡式微幫浦335驅動流體朝箭頭方向流動，對粒子 > P1會產生一向右下移動之淨推力，使粒子P1進入第二支 流道335中以完成分類的動作。 至於粒子進入分類機制之驅動設計，請參照第12 圖，其繪示乃依照本發明實施例三的微粒分類裝置之第二 示意圖。如第12圖所示，微粒分類裝置300之驅動部320 包括二個氣泡式微幫浦321、323，係較佳地對稱設置於主 流道310之上下二對側。當驅動部320之二個氣泡式微幫 > 浦321、323開始驅動液體流動時，對於粒子P2會產生斜 向之驅動力。較佳地，驅動力F1、F2之大小相近，使得 此二個斜向驅動力F1、F2會形成一類似於水力聚焦之總 合力Ft，使粒子P2依序前進。於檢測單元340完成粒子 P2之辨識後，便啟動如第11圖所示之氣泡式微幫浦333 或氣泡式微幫浦337，以導引粒子P2進入第一支流道331 或第二支流道335中，進而完成粒子之分類與收集。 22 .1310021Sanda number: TW3329PA _ connected. When the detecting unit 340 completes the identification of the particle P1, it transmits a signal to the control unit 350 to determine whether to start the sorting mechanism. When the sorting mechanism is started, the bubble type micro-flux 333 or 337 of the branching portion 330 starts to operate to cyclically generate electrolytic bubbles, so that the liquid on the first branch flow path 331 or the second branch flow path 335 starts to flow. It is assumed that the particles P1 of this embodiment are detected and enter the second branch flow path 335. Since the fluid driving force can be generated on the main flow channel 310 and the first branch flow path 331, when the bubble micro-pump 335 on the first branch flow path 331 drives the fluid to flow in the direction of the arrow, the particles > P1 will be moved to the lower right. The net thrust causes the particles P1 to enter the second branch channel 335 to complete the sorting action. As for the driving design of the particle entering classification mechanism, please refer to Fig. 12, which is a second schematic view of the particle sorting apparatus according to the third embodiment of the present invention. As shown in Fig. 12, the driving portion 320 of the particle sorting device 300 includes two bubble micro-pulls 321, 323 which are preferably symmetrically disposed on the lower two sides of the main flow path 310. When the two bubble type micro-drives > 321 and 323 of the driving unit 320 start to drive the liquid flow, an oblique driving force is generated for the particles P2. Preferably, the driving forces F1, F2 are of similar magnitude such that the two oblique driving forces F1, F2 form a total force Ft similar to the hydraulic focus, causing the particles P2 to advance sequentially. After the detection unit 340 completes the identification of the particle P2, the bubble micro-pump 333 or the bubble micro-pump 337 as shown in FIG. 11 is activated to guide the particle P2 into the first branch channel 331 or the second branch channel 335. To complete the classification and collection of particles. 22 .1310021
三達編號：TW3329PA ' 實施例四 實施例四提出一種流體混合裝置，係運用如實施例一 之氣泡式微幫浦驅動液體作往復式之運動以達到液體混 合之效果。 請參照第13圖，其繪示乃依照本發明實施例四的流 體混合裝置之示意圖。如第13圖所示，流體混合裝置400 包括一混合腔410、一第一驅動部420、一第二驅動部430 與一控制單元440。混合腔410上設置有一入口流道450 > 與一出口流道460。第一驅動部420係設置於入口流道450 上，第二驅動部430則設置於出口流道460上。其中，第 一驅動部420與第二驅動部430各包括至少一個實施例一 之氣泡式微幫浦。控制單元440電性連接第一驅動部420 與第二驅動部430之氣泡式微幫浦。當控制單元440驅動 第一驅動部420，以導引至少二種未混合之液體A、B由 入口流道450進入混合腔410後，控制單元440可以交替 驅動第二驅動部430與第一驅動部420作動，以反覆導引 > 前述二種流體由入口流道450與出口流道460進出混合腔 410，藉此以混合二種液體。 第一驅動部420例如導引二層未混合之液體A、B以 層流運動之形式由入口流道450進入混合腔410中。接 著，當控制單元440驅動第一驅動部420之氣泡式微幫浦 先向右推動流體，再驅動第二驅動部430之氣泡式微幫浦 向左推動流體，於重複數個循環後，即可使液體A、B在 混合腔410中達到良好之混合效果。當液體A、B混合後， 23 -1310021Sanda No.: TW3329PA 'Embodiment 4 Embodiment 4 proposes a fluid mixing device which uses a bubble micro-push driving liquid as in the first embodiment to perform a reciprocating motion to achieve the effect of liquid mixing. Referring to Figure 13, there is shown a schematic view of a fluid mixing device in accordance with a fourth embodiment of the present invention. As shown in FIG. 13, the fluid mixing device 400 includes a mixing chamber 410, a first driving portion 420, a second driving portion 430, and a control unit 440. The mixing chamber 410 is provided with an inlet flow path 450 > and an outlet flow path 460. The first driving unit 420 is disposed on the inlet flow path 450, and the second driving unit 430 is disposed on the outlet flow path 460. The first driving unit 420 and the second driving unit 430 each include at least one bubble micro-pull of the first embodiment. The control unit 440 is electrically connected to the bubble micro-pull of the first driving unit 420 and the second driving unit 430. When the control unit 440 drives the first driving portion 420 to guide the at least two unmixed liquids A, B into the mixing chamber 410 from the inlet flow path 450, the control unit 440 may alternately drive the second driving portion 430 and the first driving portion. The portion 420 is actuated to repeatedly guide > The foregoing two fluids enter and exit the mixing chamber 410 from the inlet flow passage 450 and the outlet flow passage 460, thereby mixing the two liquids. The first drive portion 420, for example, directs the two layers of unmixed liquids A, B into the mixing chamber 410 from the inlet flow passage 450 in the form of laminar flow motion. Then, when the control unit 440 drives the bubble micro-pull of the first driving part 420 to push the fluid to the right, and then drives the bubble micro-pump of the second driving part 430 to push the fluid to the left, after repeating several cycles, The liquids A, B achieve a good mixing effect in the mixing chamber 410. When the liquids A and B are mixed, 23 -1310021
三達編號：TW3329PA * 即可關掉第一驅動部420而僅開啟第二驅動部430，將混 合後之液體由出口流道460送入後續處理單元。 較佳地，混合腔410之材質係一透明材料，以運用此 流體混合裝置400做為藥劑或生化檢測之反應觀察。另 外，由於電解氣泡產生時，僅會耗去微小量之液體，所以 不至於造成濃度之劇烈改變。 實施例五 .請參照第14圖，其繪示乃依照本發明實施例五的環 形流體混合裝置之示意圖。如第14圖所示，環形流體混 合裝置500包括一環形主流道510、二個第一支流道521、 523、二個第二支流道531、533、一第一驅動部550、一 第二驅動部560與一控制單元（未繪示）。第一支流道521、 523與第二支流道531、533皆連接於環形主流道510，其 中第二支流道531、533與第一支流道521、523係相隔設 置。第一驅動部550與第二驅動部560係使用於實施例一 > 中揭露之氣泡式微幫浦的設計。第一驅動部550之二個氣 泡式微幫浦551、553設置於環形主流道510上，並個別 鄰近第一支流道521、523。第二驅動部560之二個氣泡式 微幫浦561、563亦設置於環形主流道510上，並個別鄰 近第二支流道531、533。控制單元（未繪示）電性連接第 一驅動部550與第二驅動部560之氣泡式微幫浦551、 553、561、563。當不同之液體由第一支流道521、523與 第二支流道531、533引入環形主流道510後，控制單元 24 1310021Sanda number: TW3329PA* The first driving unit 420 can be turned off and only the second driving unit 430 can be turned on, and the mixed liquid can be sent from the outlet flow path 460 to the subsequent processing unit. Preferably, the material of the mixing chamber 410 is a transparent material for use in the reaction of the fluid mixing device 400 for pharmaceutical or biochemical detection. In addition, since only a small amount of liquid is consumed when the electrolytic bubble is generated, it does not cause a drastic change in concentration. Embodiment V. Referring to Figure 14, there is shown a schematic view of a toroidal fluid mixing device in accordance with a fifth embodiment of the present invention. As shown in FIG. 14, the annular fluid mixing device 500 includes an annular main flow channel 510, two first branch flow paths 521, 523, two second branch flow paths 531, 533, a first driving portion 550, and a second driving. The portion 560 is coupled to a control unit (not shown). The first flow passages 521, 523 and the second branch flow passages 531, 533 are all connected to the annular main flow passage 510, wherein the second branch flow passages 531, 533 are spaced apart from the first branch flow passages 521, 523. The first driving unit 550 and the second driving unit 560 are used in the design of the bubble type micro-pull disclosed in the first embodiment. The two bubble micro-pulls 551, 553 of the first driving portion 550 are disposed on the annular main flow path 510 and are adjacent to the first branch flow paths 521, 523 individually. The two bubble micro-pumps 561, 563 of the second driving portion 560 are also disposed on the annular main flow path 510 and are adjacent to the second branch flow paths 531, 533. The control unit (not shown) electrically connects the first micro-pumps 551, 553, 561, and 563 of the first driving unit 550 and the second driving unit 560. When different liquids are introduced into the annular main flow path 510 by the first branch flow paths 521, 523 and the second branch flow paths 531, 533, the control unit 24 1310021
ΞΜ^號：TW3329PA 係可交替驅動第一驅動部550與第二驅動部560，使不同 之液體於環形主流道510中混合。其中，電解氣泡之氣體 例如是由一共同之排氣孔570排出裝置外。 較佳地，第一驅動部550之氣泡式微幫浦551、553 與第二驅動部560之氣泡式微幫浦561、563係產生相反 方向之驅動力。舉例來說，假設第一驅動部550可驅動液 體逆時針流動，而第二驅動部560可驅動液體順時針流 動。當控制單元交替驅動氣泡式微幫浦551、553、561、 > 563使液體往復流動後，不同種類之液體於環形主流道510 上會得到充分之混合。 實施例六 請參照第15Α〜15Β圖，第15Α圖繪示乃依照本發明 實施例六的複合型流體混合裝置之上視圖，第15Β圖繪示 乃第15Α圖複合型流體混合裝置之侧視圖。如第15Α圖所 示，複合型流體混合裝置600包括一第一流道組件601、 > 一第二流道組件602與一控制單元（未繪示）。第一流道 組件601包括一環形主流道610、二個出口流道621、623 與二個入口流道631、633、一第一驅動部650與一第二驅 動部660。出口流道621、623與入口流道631、633係連 接環形主流道610。第一驅動部650設置於環形主流道610 與入口流道631、633之交接處，而第二驅動部660則設 置於環形主流道610與出口流道621、623之交接處。第 一驅動部650與第二驅動部660各包括二個如實施例一所 25ΞΜ^: TW3329PA alternately drives the first driving unit 550 and the second driving unit 560 to mix different liquids in the annular main flow path 510. Here, the gas for electrolyzing the bubble is discharged from the device, for example, by a common vent hole 570. Preferably, the bubble micro-pulls 551 and 553 of the first driving unit 550 and the bubble micro-pumps 561 and 563 of the second driving unit 560 generate driving forces in opposite directions. For example, assume that the first drive portion 550 can drive the liquid to flow counterclockwise, while the second drive portion 560 can drive the liquid to flow clockwise. When the control unit alternately drives the bubble micro-pulls 551, 553, 561, > 563 to reciprocate the liquid, different kinds of liquids are sufficiently mixed on the annular main flow path 510. 6 is a top view of a composite fluid mixing device according to a sixth embodiment of the present invention, and FIG. 15 is a side view of a composite fluid mixing device of the 15th drawing. . As shown in Fig. 15, the composite fluid mixing device 600 includes a first flow path assembly 601, > a second flow path assembly 602 and a control unit (not shown). The first flow path assembly 601 includes an annular main flow path 610, two outlet flow paths 621, 623 and two inlet flow paths 631, 633, a first driving portion 650 and a second driving portion 660. The outlet flow passages 621, 623 are connected to the inlet flow passages 631, 633 to the annular main flow passage 610. The first driving portion 650 is disposed at the intersection of the annular main flow path 610 and the inlet flow paths 631, 633, and the second driving portion 660 is disposed at the intersection of the annular main flow path 610 and the outlet flow paths 621, 623. The first driving part 650 and the second driving part 660 each include two as in the first embodiment.
TW3329PA 揭露之氣泡式微幫浦（圖中標示651、653、661、663 )， 係設置於各個出口流道621、623及入口流道631、633與 環型主流道610之交接處。較佳地，這些出口流道621、 623及入口流道631、633係相隔90度設置。 至於第二流道組件602，其設置於第一流道組件601 之上方（見第15B圖）。第二流道組件602包括一直流道 670與一第三驅動部680，其中直流道670與環形主流道 610連通。第三驅動部680則包括至少二個氣泡式微幫浦 681、683。氣泡式微幫浦681、683分別位於直流道670 與環形主流道610連通處之二對側。控制單元分別電性連 接第一驅動部650、第二驅動部660與第三驅動部680之 氣泡式微幫浦。當控制單元驅動第一驅動部650以導引一 液體由入口流道631、633進入環形主流道610，並驅動第 三驅動部680導引另一液體由直流道670之二側進入環形 主流道610後，控制單元係可交替驅動第一驅動部650與 弟一驅動部66〇，使前述之二種液體於環形主流道610中 往復流動以達到混合之目的。當混合完成後，即在第二驅 動部660之作動下，使混合後之液體由出口流道621、623 離開環形主流道61 〇。 雖然本實施例六之第一流道組件601係以二個出口 流道621、623及二個入口流道631、633為例做說明，然 實際上一個出π?流道與一個入口流道即已足夠，並於各出 口流道與入口流道處搭配一個氣泡式微幫浦即可實施。 26 1310021The bubble type micro-pull (labeled 651, 653, 661, 663) disclosed in TW3329PA is disposed at the intersection of each of the outlet flow paths 621, 623 and the inlet flow paths 631, 633 and the ring-shaped main flow path 610. Preferably, the outlet channels 621, 623 and the inlet channels 631, 633 are disposed 90 degrees apart. As for the second flow path assembly 602, it is disposed above the first flow path assembly 601 (see FIG. 15B). The second runner assembly 602 includes a straight runner 670 and a third driver portion 680, wherein the DC runner 670 is in communication with the annular raceway 610. The third driving portion 680 includes at least two bubble micro-pigs 681, 683. The bubble micro-pigs 681 and 683 are respectively located on two opposite sides of the communication between the DC channel 670 and the annular main channel 610. The control unit is electrically connected to the bubble micro-pull of the first driving unit 650, the second driving unit 660 and the third driving unit 680, respectively. When the control unit drives the first driving portion 650 to guide a liquid into the annular main flow channel 610 from the inlet flow paths 631, 633, and drives the third driving portion 680 to guide another liquid from the two sides of the direct current channel 670 into the annular main channel After 610, the control unit can alternately drive the first driving portion 650 and the first driving portion 66〇 to reciprocate the two kinds of liquids in the annular main flow channel 610 for mixing purposes. When the mixing is completed, i.e., under the action of the second driving portion 660, the mixed liquid is separated from the annular main flow path 61 by the outlet flow paths 621, 623. Although the first flow path assembly 601 of the sixth embodiment is exemplified by two outlet flow paths 621 and 623 and two inlet flow paths 631 and 633, in fact, one π? flow path and one inlet flow path are It is sufficient and can be implemented with a bubble micro-pull at each outlet flow channel and inlet flow channel. 26 1310021
三達編號：TW3329PA 本發明上述實施例所揭露之氣泡式微幫浦與應用其 之雙向流體驅動裝置、微粒分類裝置、流體混合裝置、環 形流體混合裝置與複合型流體混合裝置，係利用電解氣泡 搭配表面粗糙度之設計，使氣泡散失時液體回填速度之差 異，於液體中造成一推動力。於循環之氣泡生滅過程中， 產生流體之淨流量而具有類似於幫浦之效果。氣泡式微幫 浦之構造簡易，僅利用一般微機電製程即可製造出具有表 面粗糙梯度之部件，成本非常低。本發明之氣泡式微幫浦 可廣泛地運用在生醫領域、微燃料電池等之微流系統中。 綜上所述，雖然本發明已以較佳實施例揭露如上，然 其並非用以限定本發明。本發明所屬技術領域中具有通常 知識者，在不脫離本發明之精神和範圍内，當可作各種之 更動與潤飾。因此，本發明之保護範圍當視後附之申請專 利範圍所界定者為準。Sanda number: TW3329PA The bubble type micro-pull disclosed in the above embodiments of the present invention and the bidirectional fluid driving device, the particle sorting device, the fluid mixing device, the annular fluid mixing device and the composite fluid mixing device using the same are used with the electrolytic bubble The design of the surface roughness causes the difference in liquid backfilling speed when the air bubbles are lost, causing a driving force in the liquid. During the bubble generation and death of the cycle, a net flow of fluid is produced with a similar effect to the pump. The bubble type micro-pull is simple in construction, and only a general MEMS process can be used to manufacture parts with a surface roughness gradient, which is very low in cost. The bubble type micro pump of the present invention can be widely used in a microfluidic system such as a biomedical field or a micro fuel cell. In the above, the present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
27 131002127 1310021
三達編號：TW3329PA 【圖式簡單說明】 之示意第圖^时示乃依照本發明實施例—的氣泡式微幫浦 意圖 第2A圖繪示乃第1圖氣泡式微幫浦的第一部件之 不 第2B圖緣示乃第！圖氣泡式微幫浦的第 一示意圖。 1什您弟 第二Γ意Γ。輯示乃帛1圖氣泡式微幫浦的第二部件之 ^ Cassie-Baxter ^ ^ s 子0與接觸角Θ之關係圖。 第4B圖繪示乃粗糙因子與液體壓力之關係圖。 第5A圖1 會示乃第1圖的氣泡式微幫浦之剖視圖。 之連:二:。圖繪示乃第侧的氣泡式微幫浦於作動時 第6圖繪示乃第5八圖的氣泡式微幫浦試驗結果之 率、電壓與流速之關係圖。 意圖 Μ〜7B圖繪示乃第2B圖的柱狀元件由薄膜組成之 不 第8圖繪示乃依照本發明實施例二的 裝置之示意圖。 動 第9A〜9B圖分別繪示第8圖雙向流體驅動裝置 部件之第一、第二示意圖。 第10 A 10B圖为別緣示n 8圖雙向流體驅動裳置之 28Sanda number: TW3329PA [Simplified description of the drawing] The schematic diagram of the bubble type micro-pump in accordance with the embodiment of the present invention is shown in Fig. 2A, which is the first part of the bubble type micro-pump of the first figure. The 2B picture shows the first! The first schematic diagram of the bubble type micro pump. 1 What is your second opinion? A comparison of the Cassie-Baxter ^ ^ s sub-zero and the contact angle 第二 of the second part of the bubble micro-pull. Figure 4B is a graph showing the relationship between the roughness factor and the liquid pressure. Fig. 5A Fig. 1 shows a cross-sectional view of the bubble type micro pump of Fig. 1. Connected: Two: The figure shows the bubble micro-pull on the first side when it is actuated. Figure 6 shows the relationship between the rate, voltage and flow rate of the bubble micro-pump test in Figure 5th. It is intended that the columnar elements of Fig. 2B are composed of thin films. Fig. 8 is a schematic view of the apparatus according to the second embodiment of the present invention. The first and second schematic views of the components of the bidirectional fluid drive device of Fig. 8 are shown in Figs. 9A to 9B, respectively. Figure 10A 10B shows the bi-directional fluid drive of the n 8 diagram.
I310· ：TW3329PA 上部件之第一、第二示意圖。 第11圖繪示乃依照本發明實施例三的微粒分類裝置 之第一示意圖。 第12圖繪示乃依照本發明實施例三的微粒分類裝置 之第二示意圖。 第13圖繪示乃依照本發明實施例四的流體混合裝置 之示意圖。 第14圖繪示乃依照本發明實施例五的環形流體混合 裝置之示意圖。 第15A圖繪示乃依照本發明實施例六的複合型流體 混合裝置之上視圖。 第15B圖繪示乃第15A圖複合型流體混合裝置之侧 視圖。 【主要元件符號說明】 卜 23卜 233、241、243、321、323、333、337、551、 553、561、563、651、653、661、663、681 ' 683 :氣泡 式微幫浦 110 :第一部件 115 :流道 120、120’ ：第二部件 121 :流體入口 123 :流體出口 125、125’ ：凹槽 29I310· : The first and second schematic diagrams of the upper part of the TW3329PA. Figure 11 is a first schematic view showing a particle sorting apparatus according to a third embodiment of the present invention. Figure 12 is a second schematic view of a particle sorting apparatus in accordance with a third embodiment of the present invention. Figure 13 is a schematic view of a fluid mixing device in accordance with a fourth embodiment of the present invention. Fig. 14 is a schematic view showing an annular fluid mixing device according to a fifth embodiment of the present invention. Figure 15A is a top plan view of a composite fluid mixing device in accordance with a sixth embodiment of the present invention. Figure 15B is a side elevational view of the composite fluid mixing device of Figure 15A. [Description of main component symbols] 卜23, 233, 241, 243, 321, 323, 333, 337, 551, 553, 561, 563, 651, 653, 661, 663, 681 '683: bubble micro-pull 110: One part 115: flow path 120, 120': second part 121: fluid inlet 123: fluid outlet 125, 125': groove 29
i3im：™329PA ' 127 :第一柱體 129 :第二柱體 129’、270 :柱狀元件 130 :氣泡產生單元 131 :第一電極 133 :第二電極 170、280 :薄膜 200 :雙向流體驅動裝置 • 210 :第一主流道 220 :第二主流道 230、420、550、650 :第一驅動部 231A、233A、241A、243A ··電極組 231B、233B、241B、243B、260 :電極 240、430、560、660 :第二驅動部 250、350、440 :控制單元 300 :微粒分類裝置 ® 310 :主流道 320 :驅動部 330 :分流部 331、521、523 :第一支流道 335、531、533 :第二支流道 340 :檢測單元 400 :流體混合裝置 410 :混合腔 30I3im: TM329PA '127: first cylinder 129: second cylinder 129', 270: columnar element 130: bubble generation unit 131: first electrode 133: second electrode 170, 280: film 200: bidirectional fluid drive Device 210: First main channel 220: second main channel 230, 420, 550, 650: first driving portion 231A, 233A, 241A, 243A · electrode group 231B, 233B, 241B, 243B, 260: electrode 240, 430, 560, 660: second driving unit 250, 350, 440: control unit 300: particle sorting device® 310: main channel 320: driving unit 330: shunting parts 331, 521, 523: first branching channels 335, 531, 533: second branch flow path 340: detection unit 400: fluid mixing device 410: mixing chamber 30
i3i〇mi ：TW3329PA • 450、631、633 :入 口流道 460、621、623 :出 口流道 500 :環形流體混合裝置 510、610 :環形主流道 570 :排氣孔 600 :複合型流體混合裝置 601 :第一流道組件 602 :第二流道組件 • 670 :直流道 680 :第三驅動部 I :第一區域 II :第二區域 III :共同流道區 G1 :第一群柱狀元件 G2 :第二群柱狀元件 B :氣泡 ® PI、P2 :粒子 FI、F2、Ft :驅動力 31I3i〇mi : TW3329PA • 450, 631, 633: inlet flow passages 460, 621, 623: outlet flow passage 500: annular fluid mixing device 510, 610: annular main flow passage 570: exhaust hole 600: composite fluid mixing device 601 : first flow path assembly 602 : second flow path assembly • 670 : DC channel 680 : third drive portion I : first region II : second region III : common flow channel region G1 : first group of columnar elements G2 : Two groups of columnar elements B: Bubbles® PI, P2: Particles FI, F2, Ft: Driving force 31
Claims (1)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96104350A TWI310021B (en) | 2007-02-06 | 2007-02-06 | Bubble-type micro-pump and two-way fluid driving device, particles sorting device, fluids mixing device, ring-shaped fluids mixing device and compound-type fluids mixing device using the same |
| US12/014,813 US20080186801A1 (en) | 2007-02-06 | 2008-01-16 | Bubble micro-pump and two-way fluid-driving device, particle-sorting device, fluid-mixing device, ring-shaped fluid-mixing device and compound-type fluid-mixing device using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96104350A TWI310021B (en) | 2007-02-06 | 2007-02-06 | Bubble-type micro-pump and two-way fluid driving device, particles sorting device, fluids mixing device, ring-shaped fluids mixing device and compound-type fluids mixing device using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200833597A TW200833597A (en) | 2008-08-16 |
| TWI310021B true TWI310021B (en) | 2009-05-21 |
Family
ID=44819204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96104350A TWI310021B (en) | 2007-02-06 | 2007-02-06 | Bubble-type micro-pump and two-way fluid driving device, particles sorting device, fluids mixing device, ring-shaped fluids mixing device and compound-type fluids mixing device using the same |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI310021B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588464B (en) * | 2016-08-08 | 2017-06-21 | 綠點高新科技股份有限公司 | Microfluidic device and manufacturing method thereof |
-
2007
- 2007-02-06 TW TW96104350A patent/TWI310021B/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588464B (en) * | 2016-08-08 | 2017-06-21 | 綠點高新科技股份有限公司 | Microfluidic device and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200833597A (en) | 2008-08-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Bayareh | An updated review on particle separation in passive microfluidic devices | |
| Zhang et al. | PMMA/PDMS valves and pumps for disposable microfluidics | |
| Fan et al. | Droplet-on-a-wristband: Chip-to-chip digital microfluidic interfaces between replaceable and flexible electrowetting modules | |
| US20080186801A1 (en) | Bubble micro-pump and two-way fluid-driving device, particle-sorting device, fluid-mixing device, ring-shaped fluid-mixing device and compound-type fluid-mixing device using the same | |
| Zhao et al. | Micro air bubble manipulation by electrowetting on dielectric (EWOD): transporting, splitting, merging and eliminating of bubbles | |
| US9011663B2 (en) | Electrowetting-based valving and pumping systems | |
| Sundararajan et al. | Three-dimensional hydrodynamic focusing in polydimethylsiloxane (PDMS) microchannels | |
| US8037903B2 (en) | Micromachined electrowetting microfluidic valve | |
| JP2005519751A (en) | Microfluidic channel network device | |
| US20100018584A1 (en) | Microfluidic system and method for manufacturing the same | |
| US9073054B2 (en) | Fluid-controlling device for microchip and use thereof | |
| WO2014151658A1 (en) | High-speed on demand microfluidic droplet generation and manipulation | |
| Wu et al. | Modular microfluidics for life sciences | |
| Li et al. | Microvalve using electrokinetic motion of electrically induced Janus droplet | |
| TWI310021B (en) | Bubble-type micro-pump and two-way fluid driving device, particles sorting device, fluids mixing device, ring-shaped fluids mixing device and compound-type fluids mixing device using the same | |
| US20130220528A1 (en) | Method of Fabricating Bubble-Type Micro-Pump | |
| Jahanshahi et al. | Fabrication of a biocompatible flexible electroosmosis micropump | |
| WO2007074906A1 (en) | Microfluid device and method of separating substances | |
| CN113164953A (en) | Microstructured differentiating device | |
| WO2008139401A2 (en) | A device for and a method of handling a fluidic sample | |
| Mottet et al. | A technique to design complex 3D lab on a chip involving multilayered fluidics, embedded thick electrodes and hard packaging—application to dielectrophoresis and electroporation of cells | |
| CN101259949A (en) | Air bubble type micro-pump and device applying the same | |
| CN101348232B (en) | Bubble type micropump and indirect type bubble generating apparatus thereof | |
| Loutherback | Microfluidic Devices for High Throughput Cell Sorting and Chemical Treatment | |
| Kedzierski et al. | New generation of digital microfluidic devices |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |