1305753 九、發明說明 【發明所屬之技術領域】 本發明是有關於一種微奈米壓印製程之壓印模仁之製 作’且特別是有關於一種滾輪式壓印製程之滾筒模仁的製作 (Roller Mold Fabrication by Roller-Based Nanoimprinting) ° 【先前技術】 奈米壓印技術（Nanoimprinting Technology)發明至今約 十年的歷史，但其重要性與發展潛力卻廣受重視，並且被視 為未來最有可能超越並取代現有之奈米製程技術的方法之 一。目前已開發的奈米壓印製程可大略地區分成熱阻式 Embossing)、紫外光固化（uv、自組裝式 (Self-assembly)與雷射輔助式（Laser八⑻价幻奈米壓;二 術。已商業化之奈㈣印技術的奈米壓印機台可以壓印之晶 圓尺寸約為6_8忖，’然而所需之壓印時間卻相當長，因此商 品的單位時間產出量相對較小，量產能力不佳。有鐘 目前更發展出滾輪式奈米壓印技術，以期獲得高量產能力。 決方==奈錢印技術可作為單位時間高產量之解 、: *此，世界各大奈米壓印研究團隊盔不對f 印塵印技術做最深入的研發，以其早曰使得滾輪式：= 技術可以達成各式商品的量產應用。然而，滾輪印 的關鍵突破技術在於滾筒模仁的製作上。 =〇 尺寸的圖案。就目前已Γ/疋義出次微米甚至奈米級 J 口杀跣目別已發表的國際或者國 的製作發展現況可以汽| Μ 7丨在滾筒模仁 間早的區分為下列幾種。 5 1305753 常雕：：種係利用機械加工刀具在滾筒之圓柱曲面上做精 2㈣，以國内目前最新的加卫技術，其最小線寬可達 平面鉾+麗2鎳金屬薄膜包覆於滾筒表面法，其係先提供- 特徵圖# ^ 膜’再利用钱刻法在錄金屬薄膜表面上定義出 筒：曲Γ卜將完成圖案定義後之鎳金屬薄膜貼附於滾 1 *元成滾筒的製作。然而，因為第二種方式係 以貼附的方式將全屬巷腐增冰二L ’、 滾筒曲面… 附在滾筒曲面上，因此在 此種方>Μ曰有金屬薄膜之表面接縫不連續的現象。此外， 使r金眉Γ —困難點在於金屬薄膜貼附的技術是否可以 人Ί專膜表面的彎曲度與滾筒曲面的彎曲度二者相符 口 因素對於此種滾筒模仁的製作都是很大的挑戰。 ^法係以自組裝墨水來製作滾筒模仁，利用自組 =的：式，將預轉印在滾筒上的特徵圖案先行— 十面模仁表面上。接著， 製程所需的墨水。再將Ϋμ平而面上塗佈自組裝壓印 上滾動，藉以使平二上之，特徵圖案 餘刻阻擋層。接下來：進行韻:/附在滾同表面以作為抗 阻Μμ 來〜丁韻刻、電鑛等製程，而將抗姓刻 層之圖案轉移至滾筒表面上，而在滾筒表面上成長出 所定義的特徵圖案’如此即完成滾筒的製作。秋而，= ==做滾筒的缺點在於滚筒在平面模仁 髮 ==表:上產生類似水在紙面上所產生之毛： 铲算劁k、所疋義之圖案尺寸的不完整。再者，透過 程㈣㈣且緩慢，因此衫縣作為㈣模仁的量 1305753 【發明内容】 種困難^ 種習知滾筒模仁之製作技術所面臨的種 =:缺點，本發明之實施例提出了 一種新型氣作滾筒模 仁的方法。本發明之目的就是在提供一種新型製作壓印滾筒 法，可將設計的特徵圖案(patt叫順利地定義在滾 同的曲面上。1305753 IX. Description of the Invention [Technical Field of the Invention] The present invention relates to the production of an imprinting mold for a micro-nanoimprinting process, and in particular to the manufacture of a roller mold core for a roller-type imprinting process (Roller) Mold Fabrication by Roller-Based Nanoimprinting) ° [Prior Art] Nanoimprinting Technology has been invented for about ten years, but its importance and development potential have been widely recognized and considered to be the most likely in the future. One of the ways to go beyond and replace existing nanotechnology. The nanoimprinting process that has been developed can be roughly divided into thermal resistance Embossing), ultraviolet curing (uv, self-assembly and laser assisted (Laser eight (8) price pseudo nano pressure; second surgery The nano-imprinting machine that has been commercialized by Nai (4) printing technology can imprint a wafer size of about 6_8 忖, 'but the required imprinting time is quite long, so the output per unit time of the commodity is relatively high. Small, mass production capacity is not good. There is now a roller type nano imprint technology developed in order to obtain high volume production capacity. The formula == Naiqin printing technology can be used as a solution for high output per unit time: *This, The world's major nano-imprint research team helmets do not do the most in-depth research and development of f-printing technology, so that it can make the roller type: = technology can achieve mass production applications of various commodities. However, the key breakthrough technology of roller printing In the production of the roller mold. = 〇 size of the pattern. At present, the 微米 / 出 出 sub-micron or even nano-class J killing the eyes of the published international or national production development status can be steam | Μ 7丨In the drum mold, the early distinction is as follows 5 1305753 Regular carving: The seed system uses mechanical processing tools to make fine 2 (4) on the cylindrical surface of the drum. With the latest domestic lifting technology, the minimum line width can be covered by the plane 鉾+丽 2 nickel metal film. The drum surface method is provided first - the characteristic map # ^ film 're-use the money engraving method to define the cylinder on the surface of the recorded metal film: the curved metal film is attached to the roll 1* yuan The production of the drum. However, because the second method attaches all the alleys to the ice, the roller surface is attached to the curved surface of the drum, so there is a metal film on this side. The surface seam is not continuous. In addition, the r-gold eyebrows - the difficulty lies in whether the metal film attaching technology can match the curvature of the surface of the film and the curvature of the curved surface of the drum. The production of mold kernels is a big challenge. ^The system uses self-assembled ink to make the roller mold core, and uses the self-assembly formula to advance the characteristic pattern pre-transferred on the roller - the surface of the ten-sided mold core Then, the ink required for the process Water. Then Ϋμ flat and coated on the surface of the self-assembled embossing and rolling, so that the pattern is left on the second layer, the characteristic pattern is left behind the barrier layer. Next: the rhyme: / attached to the same surface as the resistance Μμ ~ Ding rhyme engraving, electric ore and other processes, and the anti-surname pattern is transferred to the surface of the drum, and the defined characteristic pattern is grown on the surface of the drum. This completes the production of the drum. Autumn, === The disadvantage of the roller is that the roller produces a hair similar to water produced on the paper surface in the plane mold == table: the shovel 劁k, the incompleteness of the size of the pattern. In addition, through the process (four) (four) and slow, therefore The number of the molds as the (4) molds of the shirt county is 1305753. [Disclosure] The type of the conventional drum roller mold manufacturing technology is faced with a disadvantage: the embodiment of the present invention proposes a novel method for pneumatic cylinder mold. SUMMARY OF THE INVENTION It is an object of the present invention to provide a novel method of making an impression cylinder which can be used to smoothly define a characteristic pattern (patt) on a curved surface.
、本發明之另一目的是在提供一種滾筒模仁之製造方 法’可使用準分子雷射來作為加熱光源，由於準分子雷射具 有加熱快速的特性，因此可大幅提升滾筒模仁的製作速度’、。 、本發明之又一目的是在提供一種滾筒模仁之製造方 法’適用於滾輪式奈米壓印，可快速製作滾筒模仁，因此可 實現滾輪式奈米壓印所帶來的快速且大面積壓印的優點。 本發明之再一目的是在提供一種滾筒模仁之製造方 法’可製作出-體成型的滾筒模仁，且可簡化傳統滾筒模仁 製造技術所需要的多道製程，因此不僅可提高製程可靠度與 良率’更可提高滾筒模仁的精密度。 本發明之再一目的是在提供一種滾筒模仁之製造方 法，可製作出抗磨耗性佳之滾筒模仁，可有效降低壓印製程 對滚筒模仁之表面的損傷，因此可大幅延長滾筒模仁之使用 壽命，因此可大大降低奈米壓印製程的成本。 根據本發明之上述目的，提出一種滾筒模仁之製造方法 至少包括：提供-主體結構，其中主體結構呈圓柱狀；形成 一壓印材料層完全覆蓋在主體結構之 水平架設於一壓印載台上；設置一平 一弧面上；將主體結構 面模仁於主體結構上， 7 1305753 其中，面模仁具有相對之第一表面以及第二表面，且平面模 第表面》又有圖案結構，平面模仁之第一表面壓合在 壓印材料層之一區的一部分上;提供一壓印滚筒壓設在平面 杈仁之第一表面上’以使平面模仁夾設在壓印滾筒與主體結 構之間：對料材料層進行—加熱㈣，以將平面模仁之圖 案結構轉印至壓印材料層之經壓合之區的a合部分上;以及 刀離主體結構之壓印材料層與平面模仁。 依照本發明-較佳實施例，上述之加熱步驟所使用之加 熱源為雷射。 八依照本發明另—較佳實施例，上述之加熱步驟係使用準 :子：射’且壓印滾筒與平板模仁之材料包含準分子雷射波 ί =線可穿透之材料，較佳可例如為石英。滾筒模仁之主 =構的材料為準分子雷射波段之光線可加㈣融之金屬 材質，較佳可例如鎳或銅。 ❹I英f印滾筒的使用，可對待壓印之滾筒模仁的壓印材 .^ , i战之綠型局部應力集中的現象，再配 S由射光的投射與石英壓印予 央壓p滾请的曲面可使得準分子雷射 ΐ;=:之主體結構的弧面上聚焦，可順利完成直接在滾 用壓印滾筒旬袞… Ϊ材科層上的壓印。另外，利 、哀竹模I, 之主體結構的轉動特性，可連續壓印 …、-之表面上的料材料層，直到完成圖形的定義。 【實施方式] 本發明揭露一種滾筒模介製 將特徵圖案定義在滾』:2 可快速且精確地 又祆仁的表面上，藉由轉動滾筒模仁， 1305753 而可連續進行大面積之試片的壓印，因此可使滾輪式争米麼 印技：的構想實現。為了使本發明之敘述更加詳盡與完備， 可參照下列描述並配合第i圖與第2圖之圖式。心 凊參照第1圖，其緣示依照本發明—較佳實施 ^筒模仁製作技術之I置示意圖。進行本示範實施例之製程 :料；供圓柱狀之主體結構1〇〇,其中主體結構_之 料叮」使用之加熱源來加以選擇’主體結構100之材 :可例如為半導體材料、壓電材料、 =導電材料。例如，在本發明之-較佳實施：： 入:八:射來作為加熱源’因此本發明之主體結構咖可包 :刀子雷射波段之光線可加熱而使之熔 二鎳金屬圓柱或-金屬圓柱。在一實施例中，二 構100時，可务蔣役體、、’口 屬η 八…性良好的鎳或銅金屬圓棒，並對金 屬固棒之圓周側面進行鏡面拋二對金 1。〇之弧二進：用例如㈣與姑刻技術對主體結構 ^弧面106進仃圖案定義。 ::示範實施例中’進行主體結構ι〇〇 、 案疋義步驟時，先將此主體結構1〇 =圖 102之上。名太+騎盘 八十朱叹在塵印載台 ®么 ’、乾只施例中，壓印載台102可為自動题f 。’且此自動壓印載台較佳係包含有三軸自由卢的移P ::亦即X軸方向、y軸方向與2軸方 二移動能 係包含六個自由度之移動能力，包含直線運動Π ’更佳 z軸方向與旋轉之^、 二運動之X軸、y軸、 台102可為伺服$σ ，如第1圖所示。壓印載 式㈣Ζί 動載台、無刷式馬達驅動載〜磁 式移動載台、超導式移 ，載°、磁淨 札&式移動載台 '磁浮式轉 1305753 動載台'超導式轉動载台或氣壓式轉動載台。 接下來，先利用例如熱蒸鍍法（Thermal Evaporation)、 化予氣相 ^儿積法（Chemical Vapor Deposition ; CVD)、低塵 化學氣相沉積法（L〇w Pressure-Chemical Vapor Deposition ; LPCVD)、旋塗法（Rotary Spindle)、印刷法 (Printing)、或化學沉積法（chemicai Deposition)，形成待壓 印之壓印材料層！丨8覆蓋在主體結構丨〇〇之整個弧面^ % 上其中，壓印材料層118之材料可例如為半導體材料、壓 電材料、玻璃材料、陶瓷材料、金屬或導電材料。在一實施 例中，壓印材料層11 8可例如金屬薄膜層或光阻等高分子材 料層。在一較佳實施例中，壓印材料層118與主體結構1〇〇 之材料均為鎳金屬。此時，壓印材料層118包覆在主體結構 1〇〇之弧面106外’並且由壓印載台ι〇2所承載。 在此同時，提供平面模仁1〇4，其中此平面模仁1〇4具 有相對之表面122與表面124。平面模仁1〇4之表面122咬 有欲轉印之圖案結構108,其中此圖案結構1〇8可為具有2 米尺寸或奈米尺寸之特徵圖案的凹凸狀結構。再將平面模仁 1〇4放置在主體結構⑽上，並對平面模仁1()4施加預壓力 而使平面模仁刚之表面122上之圖案結構1(^主體1 1〇〇之弧面1〇6上的壓印材料層118緊密貼合。在—實^ 中，平面模仁U)4之材料可選用透光性佳的材料，^如石 央。此外’平面模卩1〇4之材料的炼點必須高於主體社構 刚上之Μ印材料層m㈣點，以利順利的將平面模仁⑽ 上凸設之圖案結構108的圖案轉印至壓印材料層 圖案結構108凸設於平面模仁1〇4表 ： 衣面122後，可依製程 10 1305753 ^求，選擇性地塗佈脫模劑於平面模仁1()4之表面i22上， 八中脫㈣的作用是為了騎完成脫模時，使平面模仁⑽ ’、疋印材料層i i 8間保持不沾黏，以確保圖案轉印的完整 性。因此’脫模劑-般為可協助平面模仁1G4錢印材料層 η 8順利脫離的不沾#材料，例如氯石夕甲烧⑽卜⑽以叫。 、接下來，提供星印滾筒116，其中壓印滾筒ιΐ6較佳可 j光性佳之圓柱體，且㈣滾筒116之材料的選擇係依據 斤使用之加熱源而在—較佳實施例中，係選用準分子雷 射來作為加熱源，因而此時壓印滾筒116可選擇高透光性: 石英材料。然後，將壓印滾筒116以水平的方式架設於平面 模仁104之上’並使壓印滾冑116與平面模卩1〇4之表面 124緊密貼合’此時，平面模仁1〇4夹設在壓印滚冑⑴斑 主體結構uk)上之壓印材料層118之間。藉由調整壓印滾筒 116與壓印材料層118之間的距離，使得壓印滾筒"6、平 面模仁104與壓印材料層118三者之間相互擠壓，藉以提供 壓印所需的外加壓力。 接著’提供加熱源11 〇於壓印滾筒丨i 6 . , _ ^ . —^乃。在本不 範實施例中，將平面模仁104之圖案結構108的圖案轉印至 主體結構100上之壓印材料I 118所採用之微/奈米壓印技 術可為雷射輔助熱壓印技術、電阻式熱壓印技術、或紫外光 壓印技術。因加熱源110可例如為光能式加熱源’、、電阻 式加熱源、渦電流式加熱源、《電磁4加熱源。雖然上述之 實施例中加熱源110係設在壓印滾筒116之上方，並透過壓 印滾筒116以及平面模仁104對壓印材料層118進行加= 然而在其他實施例中加熱源110亦可不經由壓印滾筒γ、16 11 1305753 射等。 成滾若已完成㈣材料層118所需之M印程序，即完 壓印# a 一 114之製作’而可將壓印完成之滾筒模仁114從 (7载〇 102上移除。或者 办 則可依實際製程^成所需之壓印程序， 與轉動諸1 印載台102㈣動移動功能 同、〜，繼，對主體結構100上之壓印材料層118之不 二。刀進仃圖案壓印。在一較佳實施 器（未繪示）夾批也丨厭c 1 J ^徑制 " P載台1 02之移動以及啟動加熱源11 〇 σ印材料層118之步驟，以使兩者能同步運作。 “在—實施例中，進行滾筒模仁114之製程時，先利用平 面模仁104與加熱源U〇在壓印材料層118之第一區的第一 部分上進行壓印。接著，操控壓印載台1G2|其轉動一單位 之Θ角度的距離’此時’由於壓印滾筒μ、平面模仁1〇4 與壓印材料層118之間因先前外加之預壓力所形成的摩擦 力而帶動主體結構1GQ的旋轉，並帶動平面模卩104往y 方向移動’進而移動到下一個定位點，而使平面模仁1〇4 與壓印材料層118之第—區的第—部分朝0方向的第一區 第二部分接觸。在此同時，再次啟動加熱源110,例如擊發 準分子雷射，以加熱壓印材料層118之與平面模仁ι〇4接觸 的表面，而使平面模仁！〇4之圖案結構i〇8順利地轉印至壓 印材料層118表面之第一區的第二部分上。重複轉動壓印載 台102使主體結構100朝θ方向轉動一單位的距離以及啟動 加熱源110之步驟’終至完成主體結構1〇〇上之壓印材料層 118之第一區的0方向壓印。 然後，可再操控平面模仁104使其朝壓印材料層ιΐ8 13 1305753 第一區的X方向歩進一單位的距離，而使平面模仁1〇4移動 到壓印材料層118之第二區，並啟動加熱源11〇，以將平面 模仁104之圖案結構1〇8順利地轉印至壓印材料層H8之與 平面模仁104接觸之表面的第二區的第一部分上。接下來， 重複轉動主體結構100使其朝Θ方向轉動一單位的距離以 及啟動加熱源110之步驟，終至完成主體結構1〇〇上之壓印 材料層11 8之第二區的0方向壓印。 接著，可依實際製程需求，重複移動平面模仁1〇4使其 朝X方向步進一單位的距離，而使平面模仁1〇4移動到主體 結構100上之壓印材料層118之第二區的下一區，並依昭盥 上述相同之程序進行壓印材料層118之下一區的直寫壓 印如此依序重複以上步驟終至完成主體結構⑽之整個弧 面106上的圖案廢印，然後移開主體結構100,使主體結構 ⑽與平面模仁UM完全脫離，即完成壓印，而可達到連續 的滾輪式壓印之滾筒模仁114的製作。製作完成之滾筒模仁 114由主體結構100舆貼覆在主體結構1〇〇之弧面ι〇6上之 經壓印後之壓印材料層118所構成。 1曰本發明較佳實施例可知，本發明實施例之一優點 滚筒模仁的製作係使用表面凸設有特徵圖案結構 大面穑、I"’並可搭配自動化壓印載台，因此可達到快速、 自動化製作滾筒模仁上之奈米結構或圖 相虽有利於滾筒模仁的量產。 由上述本發明較佳實施例可知， 點就是因為滾蚣々颅， 个知月貫施例之另一優 Μ αΙ μ jl " 17之滾筒模仁的製作可使用準分子雷 源’_準分子雷射之加熱快速特性，可大 14 1305753 幅提升壓印速度。 由上述本發明較佳實施例可知，本發明實施例之又一優 點就是因為其係滾輪式直接壓印技術製作滾筒模仁，可使滾 , 筒模仁在直接壓印的過程形成一體成型模仁，減少滾筒製作 . 程序，完成的滾筒模仁表面平順無任何不連續接面，可大幅 提升滾筒模仁上圖案的精確。 w 由上述本發明較佳實施例可知，本發明實施例之再一優 點就疋因為其可以耐磨耗材質，例如鎳金屬，來作為製作滾 _ 筒模仁的材質，因此可提高滾筒模仁的耐用性。 由上述本發明較佳實施例可知，本發明實施例之再一優 點就是因為滾輪式直接壓印製作滾筒模仁製程可搭配運用 自動化壓印載台，因此可提高滾筒模仁的製作精度與便利 性。 雖然本發明已以一較佳實施例揭露如上，然其並非用以 -限定本發明，任何在此技術領域中具有通常知識者，在不脫 離本發明之精神和範圍内’當可作各種之更動與潤飾，因此 _本發明之保言蒦範圍當視後附 < 申請專利範圍戶斤界定者為準。 【圖式簡單說明】 ， 第1圖係繪示依照本發明一較佳實施例的一種滾筒桓 仁製作之裝置示意圖。 、 第2圖係繪示依照本發明一較佳實施例的一種滾 仁製作之光學系統架設示意圖。 ° 主要元件符號說明】 15 1305753 100 ： 104 ： 108 ： 112 ： 116 ： 120 : 124 ： 128 主體結構 102 ： 壓印载台 平面模仁 106 ： 弧面 圖案結構 110 ： 加熱源 光學鏡組 114 ： 滾筒模仁 壓印滾筒 118 ： 壓印材料層 反射透鏡 122 ： 表面 表面 126 ： 光束 聚焦透鏡Another object of the present invention is to provide a method for manufacturing a roller mold core, which can use a pseudo-molecular laser as a heating source. Since the excimer laser has a fast heating characteristic, the manufacturing speed of the roller mold can be greatly improved. ,. Another object of the present invention is to provide a method for manufacturing a roller mold core, which is suitable for roller type nano imprinting, and can quickly manufacture a roller mold core, thereby realizing a rapid and large area brought by the roller type nano imprinting. The advantages of imprinting. A further object of the present invention is to provide a method for manufacturing a roller mold core, which can produce a body-formed roller mold core, and can simplify the multi-pass process required for the conventional roller mold core manufacturing technology, thereby not only improving process reliability. And the yield 'can improve the precision of the roller mold. A further object of the present invention is to provide a method for manufacturing a roller mold core, which can produce a roller mold core with good abrasion resistance, which can effectively reduce the damage of the surface of the roller mold by the imprint process, thereby greatly extending the service life of the roller mold core. Therefore, the cost of the nanoimprint process can be greatly reduced. According to the above object of the present invention, a method for manufacturing a roller mold comprises at least: providing a main body structure, wherein the main body structure is cylindrical; forming an imprint material layer completely covering the horizontal structure of the main body structure and erecting on an imprinting stage Providing a flat and a curved surface; the main structural surface is molded on the main structure, 7 1305753 wherein the surface mold has opposite first and second surfaces, and the planar surface has a pattern structure, a planar mold The first surface of the kernel is pressed onto a portion of one of the regions of the imprinting material; an impression cylinder is provided on the first surface of the planar crucible to sandwich the planar mold between the impression cylinder and the main structure : conducting a layer of material to be heated (four) to transfer the pattern structure of the planar mold core to the a-bonded portion of the embossed region of the embossed material layer; and the embossed material layer and the planar mold core of the knives away from the main structure . According to a preferred embodiment of the invention, the heating source used in the heating step described above is a laser. According to another preferred embodiment of the present invention, the heating step described above uses a quasi-sub: shot: and the material of the impression cylinder and the flat mold core comprises an excimer laser wave ί = line permeable material, preferably For example, quartz. The main material of the roller mold is that the material of the excimer laser band may be added with (4) a molten metal material, preferably nickel or copper. The use of ❹Iying f-printing cylinder can be used as an imprinting material for the stamping die of the embossing cylinder. ^, the green-type local stress concentration phenomenon of the i-war, and the S projection by the projection of the light and the quartz imprinting to the central pressure p The curved surface can make the excimer laser ΐ; =: the focal plane of the main structure is focused, and can be successfully completed directly on the embossing roller for rolling... embossing on the coffin layer. In addition, the rotation characteristics of the main structure of the sorrow and the sorrel I can continuously imprint the material layer on the surface of the slab until the definition of the pattern is completed. [Embodiment] The present invention discloses a roller die-mediated method for defining a feature pattern on a surface of a roll that can be quickly and accurately applied to a barley. By rotating the roller die, 1305753, a large-area test piece can be continuously performed. The embossing, therefore, can make the concept of roller-type competition. In order to make the description of the present invention more detailed and complete, reference is made to the following description and the drawings of the first and second figures.心 凊 凊 第 凊 凊 凊 凊 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The process of the exemplary embodiment is carried out: a material is provided for the cylindrical main body structure, wherein the main body structure is used to select the material of the main structure 100: for example, a semiconductor material, a piezoelectric element Material, = conductive material. For example, in the present invention - preferred embodiment:: In: Eight: shot as a heating source 'Therefore, the main structure of the present invention can be packaged: the light of the laser beam of the knife can be heated to melt the two nickel metal cylinder or - Metal cylinder. In one embodiment, when the structure is 100, it is possible to use a nickel or copper metal round rod having good properties, and a mirror-side throwing two pairs of gold on the circumferential side of the metal solid rod. 〇 弧 二 : : : : : : : : : : : : : : : : : : : : : : : : : In the exemplary embodiment, when the main structure ι〇〇 and the case are performed, the main structure 1 〇 = above the graph 102. The name is too + riding the disk 80 sighs in the dust printing platform ® ???, in the only example, the embossing stage 102 can be an automatic question f. 'And this automatic imprinting stage preferably includes a three-axis free Lu shift P :: that is, the X-axis direction, the y-axis direction and the 2-axis square two mobile energy system contain six degrees of freedom of movement, including linear motion Π 'Better z-axis direction and rotation ^, two movements of the X-axis, y-axis, and stage 102 can be servo $σ, as shown in Figure 1. Embossing type (4) Ζ 动 moving stage, brushless motor drive carrier ~ magnetic moving stage, superconducting shift, load °, magnetic net za & mobile carrier 'magnetic floating type 1305753 moving stage 'superconducting Rotary stage or pneumatic rotary stage. Next, first, for example, Thermal Evaporation, Chemical Vapor Deposition (CVD), and Low Vapor Deposition (LPCVD) , Rotary Spindle, Printing, or chemical deposition (chemicai Deposition) to form the layer of imprint material to be imprinted! The crucible 8 is overlaid on the entire surface of the main structure, wherein the material of the imprint material layer 118 can be, for example, a semiconductor material, a piezoelectric material, a glass material, a ceramic material, a metal or a conductive material. In one embodiment, the imprint material layer 186 may be, for example, a metal film layer or a polymer material layer such as a photoresist. In a preferred embodiment, the embossed material layer 118 and the body structure 1 〇〇 are both nickel metal. At this time, the embossing material layer 118 is wrapped around the outer surface of the main structure 1 ’ and is carried by the embossing stage ι 2 . At the same time, a planar mold core 1 〇 4 is provided, wherein the planar mold core 1 〇 4 has opposing surfaces 122 and 124. The surface 122 of the planar mold core 1 is bitten with the pattern structure 108 to be transferred, wherein the pattern structure 1〇8 can be a concave-convex structure having a characteristic pattern of 2 meters or nanometer size. Then, the planar mold core 1〇4 is placed on the main structure (10), and a pre-pressure is applied to the planar mold core 1 () 4 to make the pattern structure 1 on the surface 122 of the planar mold core (the main body 1 1〇〇 arc) The layer of imprinting material 118 on the surface 1〇6 is closely adhered. In the case of the solid mold, the material of the flat mold core U)4 can be selected from materials having good light transmittance, such as stone center. In addition, the material of the 'planar die 1〇4 must be higher than the m(4) point of the printed material layer on the body structure, in order to smoothly transfer the pattern of the pattern structure 108 protruding on the planar die (10) to The embossed material layer pattern structure 108 is protruded from the planar mold core 1〇4 table: after the clothing surface 122, the release agent can be selectively applied to the surface i22 of the planar mold core 1 () 4 according to the process 10 1305753. Above, the function of Bazhong (4) is to keep the flat mold core (10) ', the printing material layer ii 8 from sticking when the mold is released, to ensure the integrity of the pattern transfer. Therefore, the release agent is generally a non-stick material that can assist the planar mold core 1G4 money-printing material layer η 8 to be smoothly detached, for example, chlorite 甲甲(10)b (10). Next, a star print cylinder 116 is provided, wherein the impression cylinder ι 6 is preferably a cylinder of good lightness, and the material of the (four) cylinder 116 is selected according to the heating source used by the jin. In the preferred embodiment, Excimer laser is selected as the heating source, so that the impression cylinder 116 can select high light transmittance: quartz material. Then, the impression cylinder 116 is erected on the planar mold core 104 in a horizontal manner 'and the embossing roller 116 is closely adhered to the surface 124 of the planar mold 〇4'. At this time, the planar mold core 1〇4 Between the layers of imprint material 118 on the embossing roll (1) spot body structure uk). By adjusting the distance between the impression cylinder 116 and the imprinting material layer 118, the impression cylinder "6, the planar mold core 104 and the imprinting material layer 118 are pressed against each other, thereby providing the necessary imprinting. The added pressure. Then, the heating source 11 is provided to the impression cylinder 丨i 6 . , _ ^ . In the present embodiment, the micro/nano imprint technique used to transfer the pattern of the pattern structure 108 of the planar mold core 104 to the imprint material I 118 on the main structure 100 may be laser assisted hot stamping. Technology, resistive hot stamping technology, or UV imprinting technology. The heating source 110 can be, for example, a light energy type heating source', a resistive heating source, an eddy current type heating source, and an "electromagnetic 4 heating source. Although the heating source 110 is disposed above the impression cylinder 116 in the above embodiment, the imprint material layer 118 is applied through the impression cylinder 116 and the planar mold core 104. However, in other embodiments, the heating source 110 may not It is shot through the impression cylinder γ, 16 11 1305753, and the like. If it is completed (4) the M-printing process required for the material layer 118, that is, the printing of the stamping #a-114, the embossed roller die 114 can be removed from the 7-loader 102. Then, according to the actual process, the required imprinting program is the same as the moving movement function of the rotating substrate 1 (4), and then, the imprinting material layer 118 on the main structure 100 is the same. Embossing. In a preferred embodiment (not shown), the batch is also disgusting with the movement of the C 1 J ^ diameter system " P stage 102 and the step of starting the heating source 11 〇 印 printing material layer 118, so that The two can operate synchronously. "In the embodiment, when the process of the roller mold 114 is performed, the flat mold core 104 and the heat source U are first embossed on the first portion of the first region of the imprint material layer 118. Then, the imprinting stage 1G2| is rotated by a unit of the angle of the distance 'this time' due to the pre-pressure applied between the impression cylinder μ, the plane mold 1〇4 and the imprint material layer 118 due to the previous addition. The formed frictional force drives the rotation of the main structure 1GQ and drives the planar die 104 to move in the y direction. Going to the next positioning point, the planar mold core 1〇4 is brought into contact with the first portion of the first region of the first region of the imprinting material layer 118 in the 0 direction. At the same time, the heating source 110 is activated again. For example, the excimer laser is fired to heat the surface of the imprint material layer 118 in contact with the planar mold 〇4, and the planar pattern 〇4 pattern structure i〇8 is smoothly transferred to the imprint material layer 118. On the second portion of the first region of the surface, the printing substrate 102 is repeatedly rotated to rotate the main structure 100 by a unit distance in the θ direction and the step of starting the heating source 110 is completed until the embossing on the main body structure 1 is completed. The first region of the material layer 118 is embossed in the 0 direction. Then, the planar mold core 104 can be manipulated to make a distance of one unit toward the X direction of the first region of the imprinting material layer ι 8 13 1305753, thereby making the planar mold 1 The crucible 4 moves to the second region of the imprinting material layer 118, and activates the heating source 11A to smoothly transfer the pattern structure 1〇8 of the planar mold core 104 to the imprinting material layer H8 in contact with the planar mold core 104. On the first part of the second zone of the surface. Next, repeat the rotation of the main The structure 100 rotates a unit of distance in the x-direction and the step of activating the heat source 110 to complete the zero-direction imprint of the second region of the imprinting material layer 188 on the main structure 1 接着. For actual process requirements, the planar mold core 1 4 is repeatedly moved so as to step by one unit in the X direction, and the planar mold core 1〇4 is moved to the second region of the imprint material layer 118 on the main structure 100. a zone, and the direct embossing of a region below the embossed material layer 118 is performed in accordance with the same procedure as described above, so that the above steps are repeated in sequence to complete the pattern smear on the entire curved surface 106 of the main structure (10), and then The main structure 100 is removed to completely separate the main structure (10) from the planar mold UM, that is, the embossing is completed, and the continuous roller embossing roller mold core 114 can be produced. The finished roller mold core 114 is composed of an embossed imprint material layer 118 which is attached to the curved surface ι 6 of the main structure 1 by a main structure 100. According to a preferred embodiment of the present invention, one of the advantages of the embodiments of the present invention is that the roller mold core is formed by using a surface pattern with a feature pattern structure, a large surface, and an automatic imprinting stage. The rapid and automated production of the nanostructure or pattern on the roller mold is beneficial to the mass production of the roller mold. It can be seen from the above preferred embodiment of the present invention that the point is that the roll of the skull, another method of knowing the monthly application of the ΜαΙ μ jl " 17 roller mold kernel can use the excimer source The fast heating characteristics of the molecular laser can increase the imprint speed by 14 1305753. According to the preferred embodiment of the present invention, another advantage of the embodiment of the present invention is that the roller mold can be used to form the integral mold by direct rolling process. Ren, reduce the drum making. The program, the finished roller mold surface is smooth without any discontinuous joints, which can greatly improve the accuracy of the pattern on the roller mold. According to the preferred embodiment of the present invention described above, another advantage of the embodiment of the present invention is that it can be used as a material for the roll-roller mold because of its wear-resistant material, such as nickel metal. Durability. According to the preferred embodiment of the present invention, another advantage of the embodiment of the present invention is that the roller type direct imprinting roller mold process can be combined with the automatic imprinting stage, thereby improving the precision and convenience of the roller mold. Sex. Although the present invention has been described above in terms of a preferred embodiment, it is not intended to limit the invention, and any one of ordinary skill in the art can be used in various embodiments without departing from the spirit and scope of the invention. The movement and retouching, therefore, the scope of the warranty of the present invention shall be subject to the definition of the patent application scope. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a device for fabricating a roller crucible according to a preferred embodiment of the present invention. 2 is a schematic view showing the erection of an optical system for manufacturing a roller according to a preferred embodiment of the present invention. ° Main component symbol description] 15 1305753 100 : 104 : 108 : 112 : 116 : 120 : 124 : 128 Main structure 102 : Imprinting stage flat mold core 106 : Curved pattern structure 110 : Heating source optical lens group 114 : Roller Mould Imprinting Roller 118 : Imprinting Material Layer Reflecting Lens 122 : Surface Surface 126 : Beam Focusing Lens