TWI304470B - - Google Patents

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TWI304470B
TWI304470B TW95147137A TW95147137A TWI304470B TW I304470 B TWI304470 B TW I304470B TW 95147137 A TW95147137 A TW 95147137A TW 95147137 A TW95147137 A TW 95147137A TW I304470 B TWI304470 B TW I304470B
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Taiwan
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sliding
sliding seat
seat
plane
tested
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TW95147137A
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Chinese (zh)
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TW200825372A (en
Inventor
Jian-Zhong Zhang
Min-Hong Wu
Nai-Ren Huang
zhi-shan Lin
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Priority to TW095147137A priority Critical patent/TW200825372A/en
Publication of TW200825372A publication Critical patent/TW200825372A/en
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Publication of TWI304470B publication Critical patent/TWI304470B/zh

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  • A Measuring Device Byusing Mechanical Method (AREA)

Description

1304470 九、發明說明: 【發明所屬之技術領域】 種平垣度 本發明是有關於一種量測裝置,特別是指一 量測裝置。 【先前技術】 …叫〜丁攻度野,大多 子式水平儀、光學自動準直儀、雷 用電1304470 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a measuring device, and more particularly to a measuring device. [Prior technology] ... called ~ Ding attack wild, most of the level, optical automatic collimator, lightning

、目丨^ 千且俄雷射干涉儀等儀器進行眚 測^而’上述量測儀器的價格高昂,且量測前需 H作業相當麻須’而量測時所需的時間也長,: 的數據還必須經由運算與緣圖以進行判讀,所以 2 操作步驟複雜、費時且效率差,以致於盎法… 的 千面進灯篁測,只能對少數工件進行抽測。因此 中 要:速且大量測量工件表面平坦度的工作場合而言,現二 的篁測方法與儀器無法滿足實際市場的需求。 【發明内容】, witnessed ^ thousand and Russian laser interferometer and other instruments for speculation ^ and 'the above measuring instrument is expensive, and the H operation is quite a whisker before the measurement' and the time required for measurement is also long: The data must also be interpreted by the operation and the edge map, so the 2 steps are complicated, time-consuming and inefficient, so that the thousands of planes of the Ang... can only be used for sampling. Therefore, in the workplace where the surface flatness of the workpiece is measured quickly and in large quantities, the current methods and instruments for measuring the current situation cannot meet the needs of the actual market. [Summary of the Invention]

因此’本發明之目的, 更低,並且可以快速量測一 裝置。 即在提供一種構造簡單而價格 待測平面平坦度的平坦度量测 於是,本發明平坦度量測裝置是用來量測該待測平面 的平坦度’該量測裝置包含—座體、一滑動座、一滑接單 兀,及一位移感測單元。 …β座體疋與該待測平面呈三點接觸,該滑動座可於該 j平面上滑動,並與該待測平面呈點接觸,當該滑動座 ^著該相平面的高低而起伏,該滑動座與該座體是沿一 5 1304470 轴線相對滑動。該滑接單元是連接該座體與該滑動座,使 該滑動座與該座體可沿該軸線相對滑動,該滑接單元具有 一連接該座體與該滑動座其中一者的第一滑接部,及1連 接該座體與該滑動座另外一去的楚_货& & 抑 ^耆的第一滑接部。該位移感測 單元是用來感測該滑動座與該座體相對移動量,且連接於 該座體與該滑動座其中一者,计且女 .、 T f 並具有一朝向該座體與該滑 動座另外一者的位移感測部。 【實施方式】Therefore, the object of the present invention is lower, and a device can be quickly measured. That is, in providing a flat metric with a simple structure and a price flatness to be measured, the flat measuring device of the present invention is used to measure the flatness of the plane to be tested. The measuring device includes a body, a A sliding seat, a sliding single unit, and a displacement sensing unit. The β-shaped body 呈 is in three-point contact with the plane to be tested, and the sliding seat is slidable on the j-plane and is in point contact with the plane to be tested, and when the sliding seat is undulated by the height of the phase plane, The sliding seat and the seat body are relatively slid along an axis of 5 1304470. The sliding unit is connected to the sliding body and the sliding seat, so that the sliding seat and the seat body can slide relative to each other along the axis, and the sliding unit has a first sliding connection between the seat body and the sliding seat. a joint portion, and a first sliding portion that connects the seat body and the sliding seat to another one of the shovel &&&& The displacement sensing unit is configured to sense a relative movement amount of the sliding seat and the seat body, and is connected to one of the seat body and the sliding seat, and has a body facing the seat body and The displacement sensing portion of the other of the sliding seats. [Embodiment]

有關本發明之前述及其他技術内容、特點與功效,在 以下配合參考圖式之—個較佳實施例的詳細說明中,將可 清楚的呈現。 之間’且同時接觸該底板u與該待測平面s的支撐微調件 12、一固定於該底板η上方的墊高板13、一固定於該塾高 板13上方的上板14,及一與該上板14連接的固定板Η。 參閱圖1、2、3,本發明平坦度量測裝置1之較佳實施 例是用來量測-待測平面s的平坦度,該量測裝置丨包含 -座體H)、-滑動座20、一滑接單元3〇、一位移感測單元 4〇、-靈敏度調整單元5〇、—提把6(),及__推桿7〇。該座 體1〇具有-底板11、三設置於該底板u、該待測平面s 該底板11具有一面向該待測平面s的底面U1,及三 個自該底面⑴凹陷’且非直線排列並間隔設置的螺孔^ :該等支揮微調件12分別具有—與該螺孔112螺接的螺紋 段121 ’及一與該待測平面s呈可滑動地點接觸的接觸段 122。由於三個點可決定一個平面,藉由該等支撐微調件η 6 1304470 的螺進、螺退,可調整該待測平面s與該底板u底面 的距離,直到該底板11的底面U1與該待測平面s平行。 該滑動座20可於該待測平面s上滑動,且與該待^則平 面s呈點接觸,並藉由該滑接單元30與該座體1〇滑接。 該滑動座20具有一面向該待測平面s的滑座底面21、一與 該滑座底面21相背設置的滑座頂面22、一自該滑座底面 21凹陷的螺孔23、一螺接於該螺孔23的抵接件24,及一 連接於該滑座頂面22的測鈷25。該抵接件24具有一與該 螺孔23螺接的螺紋段24卜及一與該待測平面s呈可滑動X 地點接觸的接觸段242。藉由該抵接件24於該螺孔23内螺 進、螺退,可調整該滑座底面21與該待測平面s之間的距 離。 參閱圖2、3、4,該滑接單元3〇是連接該座體1〇與該 滑動座20,使該滑動座20與該座體10可沿一軸線L相對 滑動。該滑接單兀30具有一連接該底板u的第一滑接部 31,及一位於該滑動座20且與該第一滑接部31沿該軸線乙 滑接的第二滑接部32。當該滑動座2〇、該座體1〇同時於 忒待測平面S上滑動時,該滑動座2〇的抵接件24與該待 則平面S抵接,且隨著該待測平面s的高低起伏,相對該 座體10沿該轴線L上下滑動(見圖4)。本實施例中,該第 滑接部31實質上是一呈鳩尾狀的鳩尾槽,該第二滑接部 32實質上是一呈鳩尾狀且與該鳩尾槽配合的鳩尾塊,然而 ,於實際運用時,該鳩尾塊、鳩尾槽的位置可以互換,甚 至該滑接單元30也可採用改良式的鳩尾槽、τ型槽,或是 1304470 線性滑軌等構造(圖未、, 不)來達成該座體10與該滑動座 2〇相對滑動的功效。 ^月動厓 以移感測單70 40具有一與該座體1〇固定板15固定 連接的連接部41、—與該測钻25抵接的位移感測部42, 及”、、貝不該滑動座20與該座體10相對移動量的位移顯示 卩本實施例中,該位移感測單元40是-連接於該座體 1〇上的彳日針式千分表頭,該位移感測部42是該千分表頭抵 接該測钻25的探測頭或探針,該位移顯示部43是該千分 表頭,-旋轉指針,實際運用時,採用數位式的千分表頭 或是百分表頭等都具有相同功效;此外,若該位移感測 單元40固定於该滑動座2〇上,且該測钻μ連接於該座體 10上(圖未不),該位移感測單元4〇單元仍可達成感測該 滑動座20與該座體1〇相對移動量的功效。 該靈敏度調整單元50包括一螺穿過該固定板15螺穿 孔151的調整件51、一與該上板14連接且位於該固定板 15與該滑動座20之間的壓板52,及一抵接於該壓板52、 該滑動座20之間的彈性組件53。該壓板52具有一朝向該 固定板15且供該調整件51抵接的頂面521,及一朝向該滑 動座20的底面522。該彈性組件53實質上是一壓縮彈簧, 並具有一與該壓板52底面522抵接的第一端部531,及一 與該滑座頂面22抵接的第二端部532。 如圖5所示,當該調整件51螺進時,該調整件51抵 住並壓迫該壓板52頂面521,迫使該壓板52遠離該座體 10上板14的一端朝向該滑動座20方向彎曲變形,進而使 1304470The foregoing and other technical aspects, features and advantages of the present invention will be apparent from the detailed description of the preferred embodiments illustrated herein. a support fine adjustment member 12 that simultaneously contacts the bottom plate u and the plane s to be tested, a height plate 13 fixed above the bottom plate η, an upper plate 14 fixed above the high plate 13, and a A fixed plate 连接 connected to the upper plate 14. Referring to Figures 1, 2, and 3, a preferred embodiment of the flat measuring device 1 of the present invention is for measuring the flatness of the plane s to be measured, the measuring device 丨 comprising a body H), a sliding seat 20. A sliding unit 3〇, a displacement sensing unit 4〇, a sensitivity adjusting unit 5〇, a lifting handle 6(), and a __pushing rod 7〇. The base 1 has a bottom plate 11 and a third surface disposed on the bottom plate u, the plane to be tested s. The bottom plate 11 has a bottom surface U1 facing the plane to be tested s, and three recesses from the bottom surface (1) and are arranged in a non-linear arrangement. And the spaced-apart screw holes ^: the support fine-tuning members 12 respectively have a threaded section 121' screwed to the screw hole 112 and a contact section 122 which is slidably contacted with the plane to be tested s. Since the three points can determine a plane, the distance between the plane to be tested s and the bottom surface of the bottom plate u can be adjusted by the screwing and screwing back of the supporting fine adjustment member η 6 1304470 until the bottom surface U1 of the bottom plate 11 and the bottom surface The planes to be tested are parallel. The sliding seat 20 is slidable on the plane to be tested s, and is in point contact with the plane s of the device to be tested, and is slidably coupled to the seat body 1 by the sliding unit 30. The sliding seat 20 has a sliding bottom surface 21 facing the plane to be tested s, a sliding top surface 22 disposed opposite the sliding bottom surface 21, a screw hole 23 recessed from the sliding bottom surface 21, and a screw An abutting member 24 connected to the screw hole 23 and a cobalt measuring 25 connected to the top surface 22 of the sliding seat. The abutting member 24 has a threaded portion 24 screwed to the screw hole 23 and a contact portion 242 which is in slidable X contact with the plane to be tested s. The abutment member 24 is screwed into the screw hole 23 and retracted, and the distance between the bottom surface 21 of the slider and the plane s to be measured can be adjusted. Referring to Figures 2, 3 and 4, the sliding unit 3 is connected to the base 1 and the sliding base 20 so that the sliding base 20 and the base 10 can slide relative to each other along an axis L. The sliding unit 30 has a first sliding portion 31 connected to the bottom plate u, and a second sliding portion 32 located on the sliding seat 20 and slidingly coupled to the first sliding portion 31 along the axis. When the sliding seat 2 〇 and the seat body 1 滑动 slide on the 忒 to be measured plane S, the abutting member 24 of the sliding seat 2 抵 abuts the waiting plane S, and along with the plane to be tested s The height of the undulations slides up and down along the axis L relative to the seat body 10 (see Fig. 4). In this embodiment, the first sliding portion 31 is substantially a dovetail-shaped dovetail groove, and the second sliding portion 32 is substantially a dovetail shape and a dovetail block that cooperates with the dovetail groove. In operation, the positions of the dovetail and the dovetail can be interchanged, and even the sliding unit 30 can be formed by using a modified dovetail groove, a τ-shaped groove, or a 1304470 linear slide (Fig., no, no). The effect of the seat body 10 sliding relative to the sliding seat 2〇. The moon moving cliff 7040 has a connecting portion 41 fixedly connected to the fixing plate 15 of the seat body, a displacement sensing portion 42 abutting the drill 25, and "," The displacement of the sliding seat 20 and the relative movement of the base 10 is shown in the embodiment. The displacement sensing unit 40 is a day-and-pin dial indicator connected to the base 1 , and the displacement is sensed. The measuring unit 42 is a detecting head or a probe that the dial indicator abuts the drill 25, the displacement display unit 43 is the dial indicator, a rotating pointer, and in actual use, a digital dial gauge is used. Or the dial gauge head has the same function; in addition, if the displacement sensing unit 40 is fixed on the sliding seat 2〇, and the measuring drill μ is connected to the seat body 10 (not shown), the displacement The sensing unit 4 can still achieve the effect of sensing the relative movement amount of the sliding seat 20 and the seat body 1. The sensitivity adjusting unit 50 includes an adjusting member 51 that screws through the screw hole 151 of the fixing plate 15, and a a pressing plate 52 connected to the upper plate 14 and located between the fixing plate 15 and the sliding seat 20, and abutting against the pressing plate 52, the sliding A resilient member 53 between the two. The pressing plate 52 has a top surface 521 facing the fixing plate 15 and abutting the adjusting member 51, and a bottom surface 522 facing the sliding base 20. The elastic component 53 is substantially a The compression spring has a first end portion 531 abutting against the bottom surface 522 of the pressure plate 52, and a second end portion 532 abutting against the sliding table top surface 22. As shown in FIG. 5, when the adjusting member 51 is provided When the screwing is engaged, the adjusting member 51 abuts against and presses the top surface 521 of the pressing plate 52, forcing the end of the pressing plate 52 away from the upper plate 14 of the base body 10 to be bent and deformed toward the sliding seat 20, thereby making 1304470

該壓板52底面522抵壓該彈性組件53的第一端部53i,使 該彈性組件53被壓縮儲能且頂推該滑動座2();如圖4所示 ,相反地’當該調整件51螺退時,_ 52遠離該座體 10的-端而復位,該彈性組件53釋能而放鬆該滑動座 二本實施例中,若省略_ 52,該調整件51螺穿過該固 定板15後抵接該彈性組件53的第—端部531 (圖未示), 即該彈性組件53是位於該調整件51與該滑動座2〇之間, 則該靈敏度調整單元5〇也具有相同功效。 使用者對該待測平面s進行平坦度量測時,首先,分 別轉動該等支推微調件12相對該底板11螺進、螺退,使該 座體ίο置於該待測平面s時,該座體⑺的底面⑴平行 °亥待,則平面S。本實施例中,藉由轉動該等支撺微調件12 實11底面111與該待測平面s平行,然而,於 2運料’切職出料支撐微縣12,㈣底板u =⑴直接貼觸該待測平自s(圖未示),意即省略該 續調件12 ;此外,也可螺退出該抵接件24,使該滑 面Μ直接貼觸該待測平自以圖未示)而省略該抵接 平面4接著’手提該提把6〇,將本發明置於待測 動或拉動該推零,然後,推 、兮、n — 々次付而十面S表面不平坦 離二:二該座體1〇將相對上下滑動,該距 。…千面s表面的高低落差’該位移感測部42 130447ο 可感測出該測鈷25移動該距離D,該位移顯示部43的指針 即可顯示該滑動座20與該座體1 〇的相對移動量,即測得 該待測平面S表面的南低落差值,並藉由^一警示單元(圖 未示),對於超過允收標準的待測平面S發出警告聲。The bottom surface 522 of the pressing plate 52 presses against the first end portion 53i of the elastic component 53, so that the elastic component 53 is compressed and stored and pushes the sliding seat 2 (as shown in FIG. 4, and vice versa When the screw is retracted, the _ 52 is reset away from the end of the seat body 10, and the elastic member 53 releases the sliding seat. In the embodiment, if the _52 is omitted, the adjusting member 51 is screwed through the fixing plate. After the 15th end abuts the first end portion 531 (not shown) of the elastic member 53, that is, the elastic member 53 is located between the adjusting member 51 and the sliding seat 2〇, the sensitivity adjusting unit 5〇 also has the same efficacy. When the user performs the flat measurement on the plane to be tested, firstly, the rotation of the support fine adjustment member 12 is screwed into the bottom plate 11 and the screw is retracted, so that the seat body ίο is placed on the plane to be tested s. The bottom surface (1) of the base body (7) is parallel to the angle of the window (S). In this embodiment, by rotating the bottom surface 111 of the support fine adjustment member 12, the bottom surface 111 is parallel to the plane s to be measured. However, in the case of 2 transportation materials, the cutting material supports the micro county 12, and the (4) bottom plate u = (1) is directly attached. Touching the to-be-tested level from s (not shown), that is, omitting the continuation member 12; in addition, the abutting member 24 can also be detached from the abutting member 24 so that the sliding surface Μ directly contacts the to-be-tested Omit the abutment plane 4 and then 'hand carry the handle 6〇, put the invention to be tested or pull the push zero, then push, 兮, n — 々 pay and the surface of the ten-sided S is not flat From two: two, the seat 1〇 will slide up and down, the distance. The displacement detecting portion 42 130447ο can sense that the cobalt measuring 25 moves the distance D, and the pointer of the displacement display portion 43 can display the sliding seat 20 and the seat body 1 The relative movement amount, that is, the south-low drop value of the surface of the plane S to be measured is measured, and a warning sound is issued for the plane S to be tested exceeding the acceptance standard by means of a warning unit (not shown).

參閱圖5,當使用者轉動該靈敏度調整單元5〇的調整 件51,使該彈性組件53壓迫或放鬆該滑動座2〇,該滑動 座20因為被壓迫或放鬆,使該滑動座2〇、該座體1 〇的相 對滑動阻力改變,該位移感測單元4〇感測到該滑動座2〇 相對该座體10的位移變化速度及數值將略有不同。實際運 用時,若省略該靈敏度調整單元50 ,本發明仍可達成快速 量測該待測平面S平坦度的功效。 經由以上的說明,可再將本發明的優點歸納如下: 參閱圖2、4,由於該滑動座2〇可相對該座體1〇沿該 軸線L滑動,當本發明於該待測平面s上滑動時,若該待 測平面s不平坦而有一高低落差,該滑動座2〇、該座體μ 將沿該轴線L相對滑動而有該距離,再由該位移感測單元 4〇感測該滑動座2〇、該座體1()的距離,即可測得該待測 平面S的平坦度是否在可接受的範圍内,因此本發明不但 是體積小、構造簡單且低成本,更可以迅速地對該待測; 面S進行平坦度的量測與評估,且適用於任何材質工件, :如石材裁切與研磨、機械铣切與研磨加工後等的平坦产 量測。 一又 二二=二=: 10 1304470 之間有該距離D,導致該滑動座20該座體U)沿該軸線L 相對滑動,再由該位移感測單元4G感測該距離D,因此整 體構造簡單而成本低,所以可對大量待測卫件進行快速量 測,故確實能達到發明之目的。 、 惟以上所述者,僅為本發明之較佳實施例而已,當不 能以此限定本發明實施之範圍,即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾,皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是本發明平坦度量測裝置一較佳實施例的立體示 意圖; 圖2是該較佳實施例的一側視示意圖; 圖3是一底視示意圖,說明該較佳實施例的一第一滑 接部是一鳩尾槽,一第二滑接部是一鳩尾塊; 圖4是一側視示意圖,說明該較佳實施例的一待測平 面具有一高低落差,導致一座體與一滑動座相對滑動而有 一距離;及 圖5是一側視示意圖,說明該較佳實施例的一調整件 迫使一壓板變形而壓迫一彈性組件,進而使該彈性組件壓 制該滑動座。 11 1304470Referring to FIG. 5, when the user rotates the adjusting member 51 of the sensitivity adjusting unit 5, the elastic member 53 is pressed or loosened by the sliding seat 2, and the sliding seat 20 is pressed or loosened to make the sliding seat 2 The relative sliding resistance of the seat body 1 改变 is changed, and the displacement sensing unit 4 〇 senses that the displacement speed and value of the sliding seat 2 〇 relative to the seat body 10 will be slightly different. In actual use, if the sensitivity adjusting unit 50 is omitted, the present invention can still achieve the effect of quickly measuring the flatness of the plane S to be tested. Through the above description, the advantages of the present invention can be further summarized as follows: Referring to Figures 2 and 4, since the sliding seat 2 is slidable along the axis L with respect to the seat body 1 , when the present invention is applied to the plane s to be tested When sliding, if the plane to be tested is not flat and there is a difference between the height and the low, the sliding seat 2〇, the seat μ will slide relative to the axis L to have the distance, and then the displacement sensing unit 4〇 senses The sliding seat 2〇, the distance of the seat body 1(), can be measured whether the flatness of the plane S to be tested is within an acceptable range, so the invention is not only small in size, simple in structure, and low in cost, and more The surface S can be measured and evaluated quickly, and it can be applied to any material workpiece, such as flat cutting of stone cutting and grinding, mechanical milling and grinding. One and two two = two =: 10 1304470 has the distance D, causing the sliding seat 20 to slide relative to the seat U) along the axis L, and the displacement sensing unit 4G senses the distance D, so the whole The structure is simple and the cost is low, so that a large number of parts to be tested can be quickly measured, so that the purpose of the invention can be achieved. The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the present invention and the description of the invention. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a preferred embodiment of a flat measuring device according to the present invention; FIG. 2 is a side elevational view of the preferred embodiment; FIG. 3 is a bottom view showing the comparison A first sliding portion of a preferred embodiment is a dovetail slot, and a second sliding portion is a dovetail block. FIG. 4 is a side view showing the plane to be tested of the preferred embodiment having a height difference. Causing a body to slide relative to a sliding seat for a distance; and FIG. 5 is a side view showing that an adjusting member of the preferred embodiment forces a pressing plate to deform and presses an elastic component, thereby causing the elastic component to press the sliding seat. 11 1304470

【主要元件符號說明】 L…… …·軸線 24卜· …·螺紋段 S …·.^ •…待測平面 242… •…接觸段 D…… •…距離 25…… •…測钻 1…… •…平坦度量測裝置 30…… •…滑接單元 10·"·· …·座體 31…… …·第一滑接部 11…… —底板 32····· •…第二滑接部 111… •…底面 40··.·· •…位移感測單元 112… •…螺孔 41 ••… —連接部 12…*· …·支撐微調件 42••… …·位移感測部 121… •…螺紋段 43••… •…位移顯示部 122… •…接觸段 50"… •…靈敏度調整單元 13"… •…墊高板 51 ···.· •…調整件 14…· •…上板 52••… …·壓板 15…·· •…固定板 521… •…頂面 151… •…螺穿孔 522… —底面 20••… •…滑動座 53••… •…彈性組件 21 ····· •…滑座底面 531… •…第一端部 22*·… •…滑座頂面 532… •…第二端部 23… •…螺孔 60••… •…提把 24·…· •…抵接件 70···· •…推桿 12[Description of main component symbols] L...... ...·Axis 24 Bu···Thread segment S ...·.^ •... Plane to be measured 242... •...Contact segment D... •...distance 25... •...Drilling 1... ... •...flat measuring device 30... •...sliding unit 10·"·················································· Two sliding portions 111... •... bottom surface 40······... Displacement sensing unit 112... •... screw hole 41 ••... —connection portion 12...*···Support fine adjustment member 42••... Displacement Sense section 121... • Thread section 43••... •... Displacement display section 122... •...Contact section 50"... •...Sensitivity adjustment unit 13"...•...Pat height plate 51 ·····•...Adjustment piece 14...· •...Upper plate 52••...·Pressure plate 15...··•...Fixed plate 521... •...Top surface 151... •...Spiral perforation 522...——Bottom surface 20••... •...Sliding seat 53••... •...elastic component 21 ·····•...slider bottom surface 531... •...first end 22*·... •...slider top surface 532... •... 23 ... • ... the end of the screw holes 60 •• ... • ... to mention the 24 · ... · • ... abutments 70 ···· • ... pushrod 12

Claims (1)

1304470 十、申請專利範圍: ,是用來量測一待測平面的平坦度 1 · 一種平坦度量測裝置 ,該量測裝置包含: 1體,與該待測平面呈三點接觸; 動座可於該待測平面上滑動,並與該待測平 面呈點接觸’當該滑動座隨著該待測平面的高低而起伏 ,該滑動座與該座!t是沿一軸線相對滑動;1304470 X. Patent application scope: It is used to measure the flatness of a plane to be measured. 1 · A flat measuring device, the measuring device comprises: 1 body, which is in three-point contact with the plane to be tested; Swipe on the plane to be tested and make a point contact with the plane to be tested. 'When the sliding seat undulates with the height of the plane to be tested, the sliding seat and the seat! t is relatively sliding along an axis; 一滑接單元,是連接該座體與該滑動座,使該滑動 座與該座體可沿該軸線相對滑動,該滑接單it具有一連 接該座體與該滑動座其中—者的第—滑接部,及一連接 該座體與該滑動座另外一者的第二滑接部;及 一位移感測單元,是用來感測該滑動座與該座體相 對移動量,且連接於該座體與該滑動座其中_者,並具 有一朝向該座體與該滑動座另外一者的位移感測部。 2·依據申請專利範圍帛i項所述之平坦度量測裝置,其中 ,該座體具有一面向該待測平面的底板,及三設置於該 底板與該待測平面之間,並同時接觸該底板與該待測平 面的支撐微凋件,該底板具有三個不呈直線排列且間隔 a置的螺孔供該等支撐微調件螺接,每一支撐微調件具 有與該螺孔螺接的螺紋段,及一與該待測平面呈點接 觸的接觸段,每一支撐微調件藉由於該底板的該螺孔内 螺進、螺退,調整該待測平面與該底板的距離。 3 ·依據申請專利範圍第1項所述之平坦度量測裝置,其中 ’該滑動座具有一面向該待測平面的滑座底面,及一設 13 1304470 置於該滑座底面與該待測平面之間,並同時接觸該滑座 底面與該待測平面的抵接件,該滑動座具有一螺孔供該 抵接件螺接,該抵接件具有一與該螺孔螺接的螺紋段, 及一與該待測平面呈點接觸的接觸段,每一抵接件藉由 於該滑動座的該螺孔内螺進、螺退,調整該待測平面與 該滑座底面的距離。 4 ·依據申請專利範圍第1項所述之平坦度量測裝置,更包 含一靈敏度調整單元,該靈敏度調整單元包括一與該座 體螺接而且可螺進、螺退的調整件,及一抵接於該調整 件、該滑動座之間的彈性組件,當該調整件相對該座體 螺進時,該彈性組件被該調整件壓縮儲能而頂推該滑動 座,當該调整件相對該座體螺退時,該彈性組件釋能而 放鬆該滑動座。 5 ·依據申請專利範圍第4項所述之平坦度量測裝置,其中 ,該座體更具有一固定板,該靈敏度調整單元更包括一 與該座體連接且位於該固定板與該滑動座之間的壓板, 3亥Μ板具有一朝向該固定板的頂面,及一與該頂面相背 設置且朝向該滑動座的底面,該調整件螺穿過該固定板 的一螺穿孔後’抵接於該壓板的頂面,該彈性組件是位 於該壓板與該滑動座之間,當該調整件螺進時,該調整 件抵壓該壓板頂面,使該壓板遠離該座體的一端朝向該 滑動座方向彎曲變形’進而使該壓板底面抵壓該彈性組 件,使該彈性組件被壓縮而儲能,當該調整件螺退時, 該壓板遠離該座體的一端復位。 14 1304470 6. 依據申請專利範圍第4項所述之平坦度量測裝置,其中 :該彈性組件為一壓縮彈簧’並具有_抵接該調整;牛的 第一端部’及一抵接該滑動座的第二端部。 7. 依據申請專利範圍第丨項所述之平坦度量測装置,其中 ,該第一滑接部是連接該座體,該第二滑接部是連接該 滑動座。 8.依據申請專利範圍第7項所述之平坦度量測裝置,其中 ,該第一滑接部是一呈鳩尾狀的鳩尾槽,該第二滑接部 疋一呈鴻尾狀且與該鳩尾槽配合的鳩尾塊。 9·依據申請專利範圍第丨項所述之平坦度量測裝置,其中 ’該位移感测單元是一個千分表,並具有一與該座體固 疋連接的連接部、與該滑動座抵接的該位移感測部,及 一顯不該滑動座與該座體相對移動量的位移顯示部。a sliding unit that connects the seat body and the sliding seat so that the sliding seat and the seat body can slide relative to each other along the axis, and the sliding joint unit has a connection between the seat body and the sliding seat. a sliding portion, and a second sliding portion connecting the other of the seat and the sliding seat; and a displacement sensing unit for sensing the relative movement of the sliding seat and the seat, and connecting The seat body and the sliding seat have a displacement sensing portion facing the other of the seat body and the sliding seat. 2. The flat measuring device according to the scope of the patent application, wherein the base has a bottom plate facing the plane to be tested, and three are disposed between the bottom plate and the plane to be tested, and are in contact at the same time. The bottom plate and the supporting plane of the to-be-measured surface have three screw holes which are not arranged in a straight line and are spaced apart from each other for screwing the supporting fine adjustment members, and each supporting fine adjustment member has a screw connection with the screw hole a thread segment, and a contact segment in point contact with the plane to be tested, each support fine adjustment member adjusts the distance between the plane to be tested and the bottom plate by screwing in and out of the screw hole of the bottom plate. 3. The flat measuring device according to claim 1, wherein the sliding seat has a bottom surface of the sliding surface facing the plane to be tested, and a 13 1304470 is placed on the bottom surface of the sliding seat to be tested. Between the planes, and simultaneously contacting the bottom surface of the sliding seat and the abutting member of the plane to be tested, the sliding seat has a screw hole for screwing the abutting member, and the abutting member has a thread threadedly connected to the screw hole a segment, and a contact segment in point contact with the plane to be tested, wherein each abutting member adjusts a distance between the plane to be tested and a bottom surface of the slider by screwing in and out of the screw hole of the sliding seat. The flat measuring device according to claim 1 further includes a sensitivity adjusting unit, wherein the sensitivity adjusting unit comprises an adjusting member screwed into the body and screwed in and screwed back, and a Abutting the adjusting member and the elastic component between the sliding seat, when the adjusting member is screwed into the seat body, the elastic component is compressed and stored by the adjusting member to push the sliding seat, when the adjusting member is opposite When the seat body is retracted, the elastic component releases energy to relax the sliding seat. The flat measuring device according to claim 4, wherein the seat body further has a fixing plate, and the sensitivity adjusting unit further comprises a connecting body and the fixing plate and the sliding seat. The upper plate has a top surface facing the fixing plate, and a bottom surface disposed opposite to the top surface and facing the sliding seat, the adjusting member screwing through a screw perforation of the fixing plate Abutting against the top surface of the pressure plate, the elastic component is located between the pressure plate and the sliding seat. When the adjusting component is screwed in, the adjusting component presses against the top surface of the pressure plate, so that the pressure plate is away from the end of the base body. The bending deformation is performed toward the sliding seat, and the bottom surface of the pressing plate is pressed against the elastic component, so that the elastic component is compressed to store energy. When the adjusting component is screwed back, the pressing plate is reset away from one end of the sliding body. The flat measuring device of claim 4, wherein: the elastic component is a compression spring 'and has a _ abutting the adjustment; the first end of the cow' and abutting the The second end of the sliding seat. 7. The flat measuring device according to the invention of claim 2, wherein the first sliding portion is connected to the seat body, and the second sliding portion is connected to the sliding seat. 8. The flat measuring device according to claim 7, wherein the first sliding portion is a dovetail-shaped dovetail groove, and the second sliding portion is in a tail shape and The dovetail block that fits the tail groove. The flat measuring device according to the invention of claim 2, wherein the displacement sensing unit is a dial gauge and has a connecting portion connected to the seat body and the sliding seat The displacement sensing portion is connected to the displacement display portion that displays the amount of movement of the sliding seat relative to the housing. 1515
TW095147137A 2006-12-15 2006-12-15 Flatness measuring apparatus TW200825372A (en)

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