1304013 (1) 玫、發明說明 【發明所屬之技術領域】 #發明是關於加壓裝置，藉由加熱及加壓的方式，將 薄膜狀材料積疊在基板上，來使基板上的薄膜狀材料平坦 化。 【先前技術】 第4圖是顯示了，藉由加壓及加熱的方式將薄膜狀材 料積疊在基板上，或使基板上的薄膜狀材料平坦化的以往 的加壓裝置的一個例子的側面圖。這種加壓裝置，例如是 使用在’將絕緣材料或感光材料等的薄膜狀材料緊貼在具 有凹凸的印刷電路板的表面。 圖示的加壓裝置，是具備有：下部的基座構件1、以 ’及從基座構件1朝上方延伸的複數支的支柱2。在支柱2 的上端是安裝有用來形成加壓裝置的上部的支承構件3。 在支承構件3的下面部，是安裝有上側加壓塊4。上側加 壓塊4，是由：加熱板5與隔熱材料6所構成。加壓裝置 ，在與固定的上側加壓塊4相對向的位置具備有可動的下 側加壓塊7。下側加壓塊7，也是與上側加壓塊4 一樣， 是由：加熱板5與隔熱材料6所構成。下側加壓塊7，是 被安裝在下側支承構件8。下側支承構件8，是經由導引 構件9可滑動地被安裝在支柱2。 在下側支承構件8與基座構件1之間，設置有驅動裝 置10。在圖示例中，驅動裝置1〇是作成複數支的油壓缸 -4- (2) 1304013 裝置。藉由使驅動裝置1 0作動，則可以使支承於下側支 承構件8的下側加壓塊7相對於上側加壓塊4進行昇降。 說明以往的加壓裝置的動作。首先，如第4圖所示， 當下側加壓塊7位於下方位置的狀態時，藉由搬運裝置（ 沒有圖示）來將在表面保持有薄膜狀材料12的基板11搬 入到上側加壓塊4與下側加壓塊7之間。然後，藉由驅動 裝置1 0來使下側加壓塊7上升，上側加壓塊4與下側加 壓塊7會和基板1 1表面的薄膜狀材料1 2成爲接觸或接近 的狀態，藉由上下的加壓塊4、7的加熱板5讓基板1 1及 薄膜狀材料1 2會被加熱到預定的溫度。藉此，讓薄膜狀 材料1 2會變得適度的柔軟。 在達成上述預定的溫度之後，藉由驅動裝置1〇會讓 下側加壓塊7再上升，基板1 1與薄膜狀材料1 2會在上下 的加壓塊4、7之間以預定的壓力被加壓。 在進行預定時間的加壓之後，驅動裝置1 〇會使下側 加壓塊7下降，會從上側加壓塊4分離而成爲第4圖所示 的位置。緊貼積疊著薄膜狀材料1 2的基板1 1，會藉由搬 運裝置而從加壓裝置被搬出。 【發明內容】 (發明欲解決的課題） 上述傳統構造的加壓裝置，在維修方面會有問題。也 就是說在傳統的加壓裝置的構造中，用來昇降下側加壓塊 的驅動裝置的上下行程無法作得很大，則無法在上側加壓 -5- (3) 1304013 塊與下側加壓塊之間得到充分大小的空間。因此，上下加 壓塊的加壓面的淸掃及零件的交換等的維修作業性會很差 ，也很難以目視方式來確認加壓面的損傷等的狀態。在加 壓面具有損傷的情況，結果會影響加壓後的製品的品質。 因此本發明要解決的課題，就是要提供能容易進行維 修的加壓裝置。 (用來解決課題的手段） 爲了解決上述課題，本發明是用來將薄膜狀材料積疊 在基板上或使基板上的薄膜狀材料平坦化的加壓裝置，是 具備有： 作成下側加壓塊，具有用來加熱基板及薄膜狀材料的 加熱器的下側加壓塊、 、 作成設置在上述下側加壓塊的上方的上側加壓塊，具 有用來加熱基板與薄膜狀材料的加熱器的上側加壓塊、 藉由使上述下側加壓塊相對於上述上側加壓塊進行移 動，使雙方的加壓塊接近來將上述薄膜狀材料與上述基板 進行加壓的第一驅動裝置、 藉由在上述上側加壓塊繞著樞軸轉動，用來加寬上述 下側加壓塊與上述上側加壓塊之間的空間的第二驅動裝置 〇 上述加壓裝置，又具備有：用來支承上述下側加壓塊 的下側支承構件、用來支承上述上側加壓塊的上側支承構 件、用來形成加壓裝置的下部的基座構件、用來形成加壓 -6- (4) 1304013 裝置的上部的框架構件、以及延伸於上述框架構件與上述 基座構件之間的支柱， 上述第一驅動裝置，是設置在上述下側支承構件與上 述基座構件之間， 上述上側支承構件，是藉由樞軸構件可轉動地被安裝 在上述框架構件，且可解除地被卡止在上述框架構件， 上述第二驅動裝置，是被設置在上述上側支承構件與 上述基座構件之間，當解除與上述框架構件的卡止狀態時 ，會讓上述上側加壓塊在上述樞軸構件的周圍產生上述轉 動。 上述上側支承構件與上述框架構件之間的上述可解除 的卡止動作’是藉由可出入於設置在上述支承構件與上述 框架構件雙方的互相對準的孔內的銷栓所進行的。 將上述下側加壓塊及上述上側加壓塊設置在真空室內 ，將上述薄膜狀材料及上述基板的加壓在上述真空室的減 壓環境中進行。 將上述下側加壓塊及上述上側加壓塊設置在真空室內 ，上述上側支承構件是作爲形成上述真空室的一部分的構 造’將上述薄膜狀材料及上述基板的加壓在上述真空室的 減壓環境中進行。 上述樞軸構件及上述銷栓分別具有擴大徑部及縮小徑 部’上述上側支承構件與上述框架構件互相處於卡止狀態 ，當將上述薄膜狀材料與上述基板加壓時，是將，用來在 上述支柱的上端產生力矩，而從上述上側支承構件經由上 -7- 1304013 (5) 述樞軸構件及上述銷栓所施加到上述框架構件的力量的作 用點的上述擴大徑部與上述縮小徑部之間的交界面，定位 在上述支柱的中心軸附近。 【實施方式】 第1圖是本發明的一實施例的加壓裝置的側面圖。（a) 是顯示通常作業時，（b)是顯示維修時的狀態。第2圖， 是同加壓裝置的上面圖，（a)是將上側加壓塊卡止固定的 狀態，（b)是顯示將上側加壓塊解除卡止且成爲可繞著樞 軸轉動的狀態。 加壓裝置，是具備有：下部的基座構件1 3、與從基 座構件1 3朝上方延伸的複數支的支柱1 4。在支柱1 4的 上端，是安裝有用來形成加壓裝置的上部的框架構件1 5 。從第2圖可以看出，在該實施例的框架構件1 5，是具 有分別安裝於兩支支柱1 4的上端的一對桿構件1 5 a及 1 5b。可是，框架構件1 5，也可以用一體的框體來構成， 也可以作成至少以一個位置連結的構造。 在框架構件1 5，是樞裝著將上側加壓塊1 6安裝在下 面部的上側支承構件1 7。詳細說明的話，在上側支承構 件17的其中一側部，也就是在第丨圖及第2圖的右側的 側部，是設置有貫穿孔1 8。在鄰接於上側支承構件1 7的 該其中一側部的框架構件1 5的一對桿構件1 5a及丨5b的 其中一側部，也分別形成有與貫穿孔1 8對準的孔部1 9。 在貫穿孔1 8及一對的孔部1 9，是插入有軸部2 0。貫穿孔 -8- 1304013 (6) 1 8、孔部1 9、及軸部20的直徑，是讓該軸部20有作爲 供上述支承構件1 7所用的樞軸構件的機能，且設定成可 承受加壓時的荷重。 在上述支承構件1 7的與上述其中一側部相對向的側 口B ’也就是在弟1圖及第2圖左側的側部，是設置有一對 的孔部2 1 a、2 1 b。而在與該上側支承構件1 7的左側的側 部鄰接的框架構件1 5的一對桿構件1 5 a、1 5 b，是分別設 置有與孔部21a、21b對準的孔部22a、22b。在這些孔部 21a與孔部22a、以及孔部21b及孔部22b，是分別可插 入卡止用的銷栓2 3 a、2 3 b。在不使上側支承構件1 7繞著 軸部20的周圍轉動的情況，如第2圖（a)所示，銷栓23a 、2 3 b是分別被定位成：伸長涵蓋上側支承構件17的孔 部21a、21b與框架構件15的一對桿構件15a、15b的孔 部22a、22b雙方，而卡止住上側支承構件} 7與框架構件 1 5。在該狀態下，可以讓裝置具有與傳統加壓裝置相同的 剛性。另一方面，在允許上側支承構件1 7繞著軸部2 0的 周圍轉動時，如第2圖（b)所示，銷栓23a、23b會分別朝 內側被拉入，會成爲從一對的桿構件15a、15b的孔部 2 2 a、2 2 b脫離的位置。藉此，上側支承構件i 7會由與框 架構件1 5的卡止狀態解除，而可繞著軸部20周圍轉動。 而將銷栓23a、23b向外側抽出，藉由從上側支承構件17 的孔部2 1 a、2 1 b脫離，讓上側支承構件1 7可繞著樞軸轉 動。 來使上側支承構件1 7繞著樞軸轉動的手段，是設置 -9- (7) 1304013 在基座構件1 3與上側支承構件1 7之間的驅動裝置2 .4。 驅動裝置24 ’具備有：缸體裝置24、與柄部27。該缸體 裝置具有：缸體25及桿部26。缸體25的下端是被樞裝 在基座構件13。柄部27的其中一端27a，是被樞裝在桿 部26的上端。柄部27的另一端27b，是被固定安裝在上 側支承構件1 7的上面部。 如第2圖（b)所示，銷栓23a、23b，當在位於解除了 上側支承構件1 7與框架構件1 5的卡止狀態的位置時，使 缸體裝置作動來使桿部26短縮的話，上側支承構件1 7， 如第1圖（b)所示，會朝上方繞著軸部2〇的周圍轉動。 被支承於上側支承構件1 7的上側加壓塊1 6，具有加 熱板2 8及隔熱材料2 9。在與該上側加壓塊1 6相對向的 位置，是設置有下側加壓塊3 〇。下側加壓塊3 〇，也具有 加熱板28與隔熱材料29，並且在加熱板28與隔熱材料 29之間具備有凝膠狀材料3 1。 下側加壓塊3 0，是被安裝在下側支承構件3 2，以此 來加以支承。下側支承構件3 2，是經由導引構件3 3可滑 動地被安裝在支柱14。 在下側支承構件3 2與基座構件1 3之間，是設置有至 少由一支油壓缸裝置3 4所構成的驅動裝置3 5。驅動裝置 3 5 ’藉由使其作動，則可將被支承於下側支承構件3 2的 下側加壓塊3 0對於上側加壓塊1 6 —邊移動一邊進行升降 〇 使驅動裝置3 5作動，藉由使下側加壓塊3 〇接近於設 -10- (8) 1304013 置在其上方的上側加壓塊1 6，將其搬入到下側加壓塊3 0 與上側加壓塊1 6之間，將在表面保持有薄膜狀材料1 2的 基板1 1進丫了加熱與加壓’將薄膜狀材料1 2緊貼積疊在基 板1 1上，這些一連串的動作，是與以往的加壓裝置一樣 ’所以省略詳細的說明。針對不同的地方來加以說明，本 發明的實施例的加壓裝置，其下側加壓塊3 0具備有凝膠 狀材料，所以即使驅動裝置3 5是由單一的油壓缸裝置3 4 所構成，或是藉由複數的油壓缸裝置3 4所構成，都可以 藉由凝膠狀材料3 1來將加壓力均勻地分散。於是，能夠 以均勻的壓力分布來加壓基板11與薄膜狀材料12。在本 實施例中雖然只有下側加壓塊3 0具備有凝膠狀材料，而 也可以在上下加壓塊16、30雙方都具備有凝膠狀材料31 ，也可以只有在上側加壓塊1 6具備有凝膠狀材料3 1，也 可以取代凝膠狀材料3 1，使用液膠狀材料，或使用封入 液體的構件，而可得到同樣的壓力分散效果。 當要進行加壓裝置的維修時，如上述藉由將銷栓23a 、23b從上側支承構件1 7的孔部2 1 a、2 1 b或框架構件J 5 的孔部22a、22b抽出，解除上側支承構件17與框架構件 1 5之間的卡止。之後，使驅動裝置24作動，在支承於上 側支承構件1 7的上側加壓塊1 6會繞著軸部20周圍產生 轉動，加寬下側加壓塊3 0與上側加壓塊1 6之間的空間。 藉此，則能容易進行上下的加壓塊的加壓面的淸掃動作、 或用目視來進行加壓面的損傷的狀態確認。 第3圖，是顯示銷栓的變形例2 3 c與其周邊構件的剖 -11 - 1304013 Ο) 片放大圖。銷栓2 3 c，是具有：具有直徑D的兩個擴大徑 部23 d、23e、以及形成在之間具有直徑d的縮小徑部23 f 。在圖示狀態中，銷栓2 3 c，是被插入到在上側支承構件 1 7與框架構件1 5所設置的孔部2 1 a、2 2 a內，而成爲將 上側支承構件1 7及框架構件1 5互相卡止的位置。此時進 行薄膜狀材料及基板的加壓的話，爲了要在支柱1 4的上 端產生力矩而從上側支承構件1 7經由銷栓2 3 c施加到框 架構件1 5的力量，會作用在位於擴大徑部2 3 d與縮小徑 部23f之間的交界面的作用點S。假設銷栓沒有形成縮徑 部2 3 f，而作成具有均勻的直徑d的話，則經由銷栓被施 加在框架構件1 5的力量，則就會作用在位於插入銷栓的 框架構件1 5的孔部22a的端面的作用點s 1。比較這兩種 情況的話，作用點S相較於作用點S1是被定位在更靠近 支柱14的中心軸。於是，使用具有縮小徑部2 3 f的銷栓 23c，支柱14的上端產生力矩μ的腕部的長度會變短， 而可以使力矩Μ的値變小。 第3圖所示的銷栓2 3 c的形狀，也適用於孔部1 9內 的樞軸構件2 0。也就是說，樞軸構件2 0也可作成具有縮 小徑部與另外的擴大徑部，可以將該縮小徑部與擴大徑部 的交界面定位在支柱1 4的中心軸附近。在這種情況，當 上側支承構件1 7與框架構件丨5在互相卡止的狀態且將薄 膜狀材料及基板加壓時，爲了要在支柱i 4的上端產生力 矩而從上側支承構件1 7經由樞軸構件2 0被施加在框架構 件1 5的力量的作用點，是接近支柱1 4的中心軸附近，在 -12- 1304013 (10) 位於孔部1 9內的擴大徑部與縮小徑部 設在樞軸4善件20沒有縮小徑部的話， 於孔部ί 9的端面。與上述銷栓23c的 在樞軸構件2 0形成縮小徑部，則支柱 Μ的腕部的長度會變短，而可以使力矩 藉由在銷栓及樞軸構件進行了減輕 所產生的力矩的處理，則支柱1 4不需 矩，所以可以縮小其直徑，進而能讓裝 本發明的加壓裝置，可以應用在真 種情況，下側加壓塊與上側加壓塊，是 基板與積疊在基板上的薄膜狀材料的加 減壓環境內進行。 在構成真空室的部分，也可以將上 空室的其中一部分。 (發明效果） 藉由本發明的加壓裝置，在進行維 壓塊與下側加壓塊之間形成非常寬廣的 進行上下加壓塊的加壓面的淸掃、或零 視來確認加壓面的損傷等的狀態。 【圖式簡單說明】 第1圖是本發明的一實施例的加壓 是平常作業時，（b)是顯示維修時的狀態 之間的交界面。假 則作用點就會存在 情況同樣的，藉由 I 4的上端產生力矩 Μ的値變小。 在支柱14的上端 要能承受很大的力 置全體輕量化。 空加壓裝置。在這 設置在真空室內， 壓，會在真空室的 側支承構件作成真 修時可以在上側加 開口部，而能容易 件的交換、或用目 裝置的側面圖。（a) -13- 1304013 (11) 第2圖是第1圖的一實施例的加壓裝置的上面圖，是 採取局部剖面。（a)是上側加壓塊相對於框架構件被卡止 固定的狀態，（b)是解除了上側加壓塊與框架構件的卡止 且可繞著樞軸轉動的狀態。 第3圖是顯示銷栓的變形例與其周邊構件的剖片放大 圖，是採取局部剖面。 第4圖是顯示傳統的加壓裝置的構造的側面圖。 【主要元件對照表】 1 3 :基座構件 1 4 :支柱 1 5 :框架構件 1 5 a、1 5 b :桿構件 1 6 :上側加壓塊 1 7 :上側支承構件 1 8 :貫穿孔 1 9 :孔部 20 :軸部（樞軸構件） 2 1a、21b ：孑L 部 2 2a、22b ：孑L 部 2 3a、23b、23c* 銷检 2 3 d、2 3 e :擴大徑部 2 3 f :縮小徑部 24 :驅動裝置（第二驅動裝置） -14- 1304013 (12) 2 5 :缸體 26 :桿部 2 7 :柄部 2 7 a :柄部的其中一端 27b :柄部的另一端 2 8 :加熱板 29 :隔熱材料1304013 (1) Mei, invention description [Technical field to which the invention pertains] # Invention relates to a pressurizing device in which a film-like material is stacked on a substrate by heating and pressurization to form a film-like material on the substrate flattened. [Prior Art] Fig. 4 is a side view showing an example of a conventional pressurizing device in which a film-like material is stacked on a substrate by pressurization and heating, or a film-form material on a substrate is flattened. Figure. Such a pressurizing device is, for example, a film-form material such as an insulating material or a photosensitive material, which is adhered to a surface of a printed circuit board having irregularities. The pressurizing device shown in the figure includes a base member 1 having a lower portion and a plurality of pillars 2 extending upward from the base member 1. At the upper end of the strut 2 is a support member 3 to which an upper portion for forming a pressurizing device is attached. An upper pressurizing block 4 is attached to the lower surface of the support member 3. The upper side pressing block 4 is composed of a heating plate 5 and a heat insulating material 6. The pressurizing device is provided with a movable lower pressurizing block 7 at a position opposed to the fixed upper pressurizing block 4. The lower pressurizing block 7 is also composed of the heating plate 5 and the heat insulating material 6 in the same manner as the upper pressurizing block 4. The lower pressurizing block 7 is attached to the lower side support member 8. The lower side support member 8 is slidably attached to the stay 2 via the guide member 9. A driving device 10 is provided between the lower supporting member 8 and the base member 1. In the illustrated example, the drive unit 1〇 is a hydraulic cylinder -4- (2) 1304013 device that is made up of a plurality of branches. By actuating the drive unit 10, the lower pressurizing block 7 supported by the lower support member 8 can be raised and lowered with respect to the upper pressurizing block 4. The operation of the conventional pressurizing device will be described. First, as shown in Fig. 4, when the lower pressurizing block 7 is in the lower position, the substrate 11 holding the film-like material 12 on the surface is carried into the upper pressurizing block by a transport device (not shown). 4 is between the lower side pressing block 7. Then, the lower pressurizing block 7 is raised by the driving device 10, and the upper pressurizing block 4 and the lower pressurizing block 7 come into contact with or close to the film-like material 12 on the surface of the substrate 1 1 . The substrate 11 and the film-like material 12 are heated to a predetermined temperature by the heating plates 5 of the upper and lower pressing blocks 4, 7. Thereby, the film-like material 12 becomes moderately soft. After the predetermined temperature is reached, the lower pressing block 7 is raised again by the driving device 1 , and the substrate 11 and the film-like material 12 are placed at a predetermined pressure between the upper and lower pressing blocks 4, 7. Pressurized. After the pressurization for a predetermined period of time, the driving device 1 下降 lowers the lower pressurizing block 7 and separates from the upper pressurizing block 4 to become the position shown in Fig. 4 . The substrate 1 1 in which the film-like material 12 is stacked is brought out from the pressurizing device by the transport device. SUMMARY OF THE INVENTION (Problem to be Solved by the Invention) The above-described conventionally constructed pressurizing device has problems in maintenance. That is to say, in the configuration of the conventional pressurizing device, the up-and-down stroke of the driving device for raising and lowering the lower pressurizing block cannot be made large, and the upper side can not be pressurized - 5 - (3) 1304013 and the lower side A sufficient size space is obtained between the pressure blocks. Therefore, maintenance workability such as sweeping of the pressing surface of the upper and lower pressing blocks and exchange of parts is poor, and it is difficult to visually confirm the state of damage of the pressing surface or the like. In the case of damage on the pressurizing surface, the quality of the product after pressurization is affected as a result. Therefore, the problem to be solved by the present invention is to provide a pressurizing device which can be easily repaired. (Means for Solving the Problems) In order to solve the above problems, the present invention is a pressurizing device for stacking a film-like material on a substrate or flattening a film-like material on a substrate, and is provided with: a pressing block having a lower pressing block for heating a substrate and a film-like material, and an upper pressing block disposed above the lower pressing block, for heating the substrate and the film-like material a first pressurizing block of the heater, a first drive for pressurizing the film-form material and the substrate by moving the lower pressurizing block relative to the upper pressurizing block to bring the pressurizing blocks closer together a second driving device for widening the space between the lower pressing block and the upper pressing block by pivoting the upper pressing block, and the pressing device is further provided a lower support member for supporting the lower pressurizing block, an upper support member for supporting the upper pressurizing block, and a base member for forming a lower portion of the pressurizing means for forming a pressurization-6- (4 1304013 A frame member at an upper portion of the device and a support extending between the frame member and the base member, wherein the first drive device is disposed between the lower support member and the base member, and the upper support a member rotatably attached to the frame member by a pivot member and releasably locked to the frame member, wherein the second driving device is disposed on the upper support member and the base member When the locked state with the frame member is released, the upper pressing block is caused to rotate around the pivot member. The releasable locking operation ‘ between the upper support member and the frame member is performed by a pin that can be inserted into a mutually aligned hole provided between the support member and the frame member. The lower pressurizing block and the upper pressurizing block are placed in a vacuum chamber, and pressurization of the film-form material and the substrate is performed in a reduced pressure environment of the vacuum chamber. The lower pressurizing block and the upper pressurizing block are disposed in a vacuum chamber, and the upper support member is a structure for forming a part of the vacuum chamber, and the pressurization of the film-form material and the substrate is performed in the vacuum chamber. In a pressurized environment. Each of the pivot member and the pin has an enlarged diameter portion and a reduced diameter portion. The upper support member and the frame member are in a locked state, and when the film-like material and the substrate are pressurized, a torque is generated at an upper end of the pillar, and the enlarged diameter portion of the action point of the force applied to the frame member by the pivot member and the pin is transmitted from the upper support member to the above-mentioned reduction by the upper-7-1304013 (5) The interface between the diameter portions is positioned near the central axis of the pillar. [Embodiment] FIG. 1 is a side view of a pressurizing apparatus according to an embodiment of the present invention. (a) shows the normal operation, and (b) shows the status at the time of maintenance. Fig. 2 is a top view of the same pressing device, (a) showing a state in which the upper pressing block is locked and fixed, and (b) showing that the upper pressing block is unlocked and pivotable. status. The pressurizing device is provided with a lower base member 13 and a plurality of pillars 14 extending upward from the base member 13 . At the upper end of the strut 14 is a frame member 15 to which an upper portion for forming a pressurizing device is attached. As can be seen from Fig. 2, the frame member 15 of this embodiment has a pair of lever members 15a and 15b which are respectively attached to the upper ends of the two pillars 14. However, the frame member 15 may be configured by an integral frame, or may be configured to be connected at least at one position. In the frame member 15, the upper side support member 17 which mounts the upper side press block 16 to the lower surface portion is pivotally mounted. In detail, the one side portion of the upper side support member 17, that is, the side portions on the right side of the second and second figures, is provided with a through hole 18. One side of the pair of lever members 15a and 5b of the frame member 15 adjacent to the one side portion of the upper side support member 17 is also formed with a hole portion 1 aligned with the through hole 18, respectively. 9. The shaft portion 20 is inserted into the through hole 18 and the pair of holes 19. The diameter of the through hole -8 - 1304013 (6) 18, the hole portion 19, and the shaft portion 20 is such that the shaft portion 20 has a function as a pivot member for the support member 17 and is set to be The load when subjected to pressurization. A pair of hole portions 2 1 a and 2 1 b are provided in a side portion B ′ of the support member 17 facing the one side portion thereof, that is, a side portion on the left side of the drawing 1 and the second drawing. On the other hand, the pair of lever members 15a, 15b of the frame member 15 adjacent to the side of the left side of the upper side support member 17 are provided with hole portions 22a aligned with the hole portions 21a, 21b, respectively. 22b. In the hole portion 21a, the hole portion 22a, and the hole portion 21b and the hole portion 22b, the locking pins 2 3 a and 2 3 b can be inserted, respectively. In the case where the upper side support member 17 is not rotated about the circumference of the shaft portion 20, as shown in Fig. 2(a), the pins 23a, 2 3b are respectively positioned to elongate the hole covering the upper side support member 17. The portions 21a and 21b and the hole portions 22a and 22b of the pair of lever members 15a and 15b of the frame member 15 lock the upper support member 7 and the frame member 15. In this state, the device can be made to have the same rigidity as the conventional pressurizing device. On the other hand, when the upper support member 17 is allowed to rotate around the circumference of the shaft portion 20, as shown in Fig. 2(b), the pins 23a and 23b are pulled inwardly, respectively, and become a pair. The positions at which the hole portions 2 2 a and 2 2 b of the rod members 15a and 15b are separated. Thereby, the upper supporting member i 7 is released from the locked state of the frame member 15 and is rotatable around the circumference of the shaft portion 20. On the other hand, the pins 23a and 23b are pulled out to the outside, and the upper supporting members 17 are rotatably pivoted by the detachment from the hole portions 2 1 a and 2 1 b of the upper supporting member 17. The means for pivoting the upper side support member 17 is to provide a driving device 2.4 between the base member 13 and the upper side support member 17 from -9-(7) 1304013. The drive unit 24' is provided with a cylinder device 24 and a shank portion 27. This cylinder device has a cylinder 25 and a rod portion 26. The lower end of the cylinder 25 is pivotally mounted to the base member 13. One end 27a of the handle 27 is pivotally mounted to the upper end of the stem 26. The other end 27b of the shank portion 27 is fixedly attached to the upper surface portion of the upper side support member 17. As shown in Fig. 2(b), when the pin bolts 23a and 23b are positioned to release the locked state of the upper side support member 17 and the frame member 15, the cylinder device is actuated to shorten the rod portion 26. As shown in Fig. 1(b), the upper support member 17 is rotated upward about the circumference of the shaft portion 2''. The upper pressing block 16 supported by the upper supporting member 17 has a heating plate 28 and a heat insulating material 29. At a position opposed to the upper pressing block 16 is a lower pressing block 3 设置. The lower pressing block 3 也 also has a heating plate 28 and a heat insulating material 29, and a gel-like material 31 is provided between the heating plate 28 and the heat insulating material 29. The lower pressurizing block 30 is supported by being attached to the lower side support member 32. The lower side support member 32 is slidably attached to the stay 14 via the guide member 33. Between the lower support member 32 and the base member 13 is a drive unit 35 which is provided with at least one hydraulic cylinder device 34. By actuating the driving device 35', the lower pressing block 30 supported by the lower supporting member 3 2 can be lifted and lowered while moving the upper pressing block 16 to drive the device 35. Actuation, by lowering the lower pressing block 3 〇 close to the upper pressing block 16 disposed above the 10- (8) 1304013, and moving it into the lower pressing block 30 and the upper pressing block Between 16 and 6 , the substrate 1 1 having the film-like material 1 2 held thereon is heated and pressurized. The film-like material 1 2 is closely attached to the substrate 1 1 , and these series of actions are The conventional pressurizing device is the same 'so detailed description is omitted. In the pressurizing device of the embodiment of the present invention, the lower pressurizing block 30 is provided with a gel-like material, so that even if the driving device 35 is constituted by a single hydraulic cylinder device 34 Alternatively, or by a plurality of hydraulic cylinder devices 34, the pressure can be uniformly dispersed by the gel-like material 31. Thus, the substrate 11 and the film-like material 12 can be pressed with a uniform pressure distribution. In the present embodiment, only the lower pressurizing block 30 is provided with a gel-like material, and both of the upper and lower pressurizing blocks 16 and 30 may be provided with the gel-like material 31, or only the upper pressurizing block may be provided. 1 6 is provided with a gel-like material 3 1, and it is also possible to use a liquid gel-like material instead of the gel-like material 3 or a member in which a liquid is sealed, and the same pressure dispersion effect can be obtained. When the maintenance of the pressurizing device is to be performed, the pin portions 23a and 23b are pulled out from the hole portions 2 1 a, 2 1 b of the upper side support member 17 or the hole portions 22a and 22b of the frame member J 5 as described above. The locking between the upper side support member 17 and the frame member 15 is achieved. Thereafter, the driving device 24 is actuated, and the upper pressing block 16 supported by the upper supporting member 17 is rotated around the shaft portion 20 to widen the lower pressing block 30 and the upper pressing block 16 Space between. Thereby, it is possible to easily perform the squeegeing operation of the pressurizing surface of the upper and lower pressurizing blocks or the state of visually detecting the damage of the pressurizing surface. Fig. 3 is an enlarged view showing a modification of the pin 2's modification 2 3 c and its peripheral members -11 - 1304013 Ο). The pin 2 3 c has two enlarged diameter portions 23 d and 23 e having a diameter D and a reduced diameter portion 23 f having a diameter d formed therebetween. In the illustrated state, the pin 2 3 c is inserted into the hole portions 2 1 a, 2 2 a provided in the upper side support member 17 and the frame member 15 to become the upper side support member 17 and The position at which the frame members 15 are locked to each other. When the film material and the substrate are pressurized at this time, in order to generate a moment at the upper end of the column 14 and the force applied from the upper side support member 17 to the frame member 15 via the pin 2 3 c, the action is expanded. The point S of the interface between the diameter portion 2 3 d and the reduced diameter portion 23f. Assuming that the pin does not form the reduced diameter portion 2 3 f and is formed to have a uniform diameter d, the force applied to the frame member 15 via the pin acts on the frame member 15 at the insertion pin. The point of action of the end face of the hole portion 22a is s1. Comparing the two cases, the point of action S is positioned closer to the central axis of the strut 14 than the point of action S1. Then, by using the pin 23c having the reduced diameter portion 2 3 f, the length of the wrist portion which generates the moment μ at the upper end of the stay 14 is shortened, and the enthalpy of the moment 可以 can be made small. The shape of the pin 2 3 c shown in Fig. 3 is also applicable to the pivot member 20 in the hole portion 19. In other words, the pivot member 20 may have a reduced diameter portion and another enlarged diameter portion, and the interface between the reduced diameter portion and the enlarged diameter portion may be positioned near the central axis of the pillar 14. In this case, when the upper side support member 17 and the frame member 丨5 are in a state of being locked with each other and the film-like material and the substrate are pressurized, the support member 17 is supported from the upper side in order to generate a moment at the upper end of the struts i4. The point of application of the force applied to the frame member 15 via the pivot member 20 is near the central axis of the strut 14 and the enlarged diameter portion and the reduced diameter in the hole portion 19 of -12-1304013 (10). The portion is provided on the end surface of the hole portion ί 9 when the pivot member 4 is not reduced in diameter. When the reduced diameter portion is formed in the pivot member 20 of the pin 23c, the length of the arm portion of the stay 会 is shortened, and the moment generated by the reduction of the moment by the pin and the pivot member can be made. After the treatment, the pillar 14 does not need a moment, so the diameter can be reduced, and the pressurizing device of the present invention can be applied to the true seed condition, the lower pressing block and the upper pressing block are the substrate and the stack. It is carried out in a pressure-reducing environment of the film-like material on the substrate. It is also possible to place a part of the upper chamber in the portion constituting the vacuum chamber. (Effect of the Invention) According to the pressurizing device of the present invention, a pressurizing surface or a zero view of the pressurizing surface on which the upper and lower pressurizing blocks are formed is formed between the crimping block and the lower pressing block, and the pressing surface is confirmed. The state of the damage, etc. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an interface between a state in which maintenance is performed during normal operation and (b) in a state in which maintenance is performed. If there is a problem, the action point will be the same, and the 力矩 of the torque generated by the upper end of I 4 will become smaller. At the upper end of the strut 14, it is possible to withstand a large amount of force and reduce the overall weight. Empty pressurizing device. In this case, the vacuum chamber is pressurized, and when the side support members of the vacuum chamber are made to be genuinely repaired, the opening portion can be added to the upper side, and the parts can be easily exchanged or used as a side view of the apparatus. (a) -13 - 1304013 (11) Fig. 2 is a top view of the pressurizing apparatus of the embodiment of Fig. 1, which is a partial cross section. (a) is a state in which the upper pressing block is locked and fixed with respect to the frame member, and (b) is a state in which the upper pressing block and the frame member are unlocked and pivotable. Fig. 3 is a cross-sectional enlarged view showing a modification of the pin and a peripheral member thereof, which is a partial cross section. Fig. 4 is a side view showing the configuration of a conventional pressurizing device. [Main component comparison table] 1 3 : Base member 1 4 : Pillar 1 5 : Frame member 1 5 a, 1 5 b : Rod member 1 6 : Upper side press block 1 7 : Upper side support member 1 8 : Through hole 1 9 : hole portion 20 : shaft portion (pivot member) 2 1a, 21b : 孑 L portion 2 2a, 22b : 孑 L portion 2 3a, 23b, 23c* pin inspection 2 3 d, 2 3 e : enlarged diameter portion 2 3 f : reduced diameter portion 24 : drive unit (second drive unit) -14- 1304013 (12) 2 5 : cylinder block 26 : rod portion 2 7 : shank portion 2 7 a : one end 27b of the shank portion: shank portion The other end 2 8 : heating plate 29 : insulation material
3 〇 :下側加壓塊 3 1 :凝膠狀材料 3 2 :下側支承構件 33 :導引構件 3 4 :油壓缸裝置 35 :驅動裝置（第一驅動裝置） S :作用點 S 1 :假想作用點3 〇: lower pressurizing block 3 1 : gel-like material 3 2 : lower side support member 33 : guide member 3 4 : hydraulic cylinder device 35 : drive device (first drive device) S : action point S 1 : hypothetical point of action
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