1303059 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種硬碟裝置等所使用的磁性記錄媒體、及其 製造方法以及包括i’j述磁性^錄媒體之磁性記錄裝置: 【先前技術】 近年來’磁碟裝置、軟碟（floppy ’註冊商標)裝置、磁帶裝置 等磁性記錄裝置的適用範圍顯著增大，重要性增加，且吾人一^ 企圖使該等裝置所使用之磁性記錄媒體之記錄密度顯著增加。尤 其是’自從導入MR磁頭(磁阻磁頭)及PRML (局部響應最大相 似，Partial Response Maximum Likelihood)技術以來:面記錄密度 心速地上升’近年來又導入GMR磁頭(巨磁阻磁頭）、丁mr磁頭(穿 隧磁阻磁頭，tunneling magnetoresisitive)等，每年面記錄密声以 100%的速度持續增加中。 、 對於此等磁性記錄媒體，今後將要求其達成更高記錄密度， ，要求其磁記錄層能達到高保磁力化與高信號對雜訊比（SN 2 高分解，力。又，近年來吾人持續努力使線記錄密度與執道密户 同時提高以提高面記錄密度，最新的磁性記錄裝置中執道宓二广 達到 llOkTPI。 ^ 但是，軌道密度提高時，鄰接軌道間的磁性記錄資訊會發生 擾的現象’在邊界區域的磁化過渡區會成為雜訊源， =口 f SN比此凊形直接與位元錯誤率（乜迓丑江沉瓜把）的劣化 關，故會妨礙記錄密度的提高。 匕相 了使軌道之間的距離拉近，磁性記錄裝置不但被要 之軌道伺服技術，且必需能廣泛地實施記ί[Technical Field] The present invention relates to a magnetic recording medium used in a hard disk device or the like, a method of manufacturing the same, and a magnetic recording apparatus including the magnetic recording medium: Technology] In recent years, the scope of application of magnetic recording devices such as disk devices, floppy (registered trademark) devices, and magnetic tape devices has increased significantly, and the importance has increased, and we have attempted to make magnetic recordings used by such devices. The recording density of the media has increased significantly. In particular, 'Since the introduction of MR heads (magnetoresistive heads) and PRML (Partial Response Maximum Likelihood) technology: the surface recording density has risen heart rate. In recent years, GMR heads (giant magnetoresistive heads) have been introduced. The mr head (tunneling magnetoresis head), etc., record the dense sound at a rate of 100% per year. For these magnetic recording media, it is required to achieve higher recording density in the future, and the magnetic recording layer is required to achieve high magnetic polarization and high signal-to-noise ratio (SN 2 high decomposition, force. Moreover, in recent years, we continue Efforts have been made to increase the line recording density at the same time as the secret account to increase the surface recording density. In the latest magnetic recording devices, the trajectory reaches llOkTPI. ^ However, when the track density is increased, the magnetic recording information between adjacent tracks may be disturbed. The phenomenon 'the magnetization transition zone in the boundary region becomes a source of noise, and the = port f SN is directly degraded from the bit error rate (乜迓 江 沉 沉 ) ) , , , , , , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The phase is made to bring the distance between the tracks closer, and the magnetic recording device is not only required to be the orbital servo technology, but also must be widely implemented.
SN 至最报難r方法雖可儘可能地將軌道間的影響減 h。 一疋很難侍到足夠的再生輸出，故難以確保有足夠的 13〇3059 凹 法有:形成由幾層薄膜所構成之磁性記錚 ，在用於膜; 錄媒體之薄臈的方法。後’再形成磁性記 該 故 工所形成之凹凸开彡此μ、私中被/可木。但疋，由於預浮雕加 上成長，故益二:二;體;膜時薄膜會在凹凸面的各個方向 [f利文獻1]日本特開2001-274143號公報。 辱利文獻2]曰本特開2002-15418號公報。 【發明内容】 登里欲解決之 在枯ί 11Ϊ决之問題為使隨著執道密度增加而面對習知技術 ίίίέΓΓ性記職置不但能確保與習知為同等以上之= ’、再ili 可大幅增域道密度，可以增加面記錄密度。 靜ΐΐ!的特別在於提供—财㈣不連續執道型磁性記錄 仍i能維持軌續刪磁性記錄媒體中’於成膜後 歴決問題之 ^發，係在不連續軌道型磁性記錄媒體的製造方法中，形成 膜守藉由將仗革巴錢鑛出的粒子垂直入射於基板，以在薄膜上 =成物理上^離之不連續軌道，以完全排除鄰接軌道之磁性影 曰，使軌道密度容易增加，進而提高磁性記錄媒體之面記錄密度。 也就是說，本發明係關於： 1303059 至少記錄舰之製造枝，於非雜基板之 板、非磁性基板兩面的^成別平行配置非磁性基 材施加高頻電壓，使磁=反侧的磁性板，對靶 性，並於舰㈣=板的表面上父#地轉間隔產生不同極 非磁性紐，妹_細漿，以於 密度置之非磁性基板附近的電裝 特彳政為對别述非磁性基板施力°高頻電壓偏壓。 壓。柄种，對前述乾材施加高頻電壓後，可以再施加直流電 基板戶加之高縣壓之頻率數較佳為對 本發明中，可將前述雖板旋轉。 凸，ίί在至少之-表 以直接形成凹 項中卢㈣ 本發明之磁性記憶裝置儀將申諸裒所製k 媒體與使該磁性記錚&圍弟8項之磁性記錄 再生顧h H 錄方向驅動之驅動部、由記錄部與 構、ί ίίίΐΓ f前述磁頭與磁性記錄媒體作相對運動之機 信號生來自_之輪出信號的記錄再生 發明 依照本發明，可以提供一種磁性記錄媒體， 點夕之預浮雕法的不連續轨道磁性記錄俨 性良好。 軌道間的^虎干涉影響，且高記錄密度特 1303059 开膜覆蓋率及指向性。因此，可以於幾乎保存預先 ί膜層或預浮雕層表面之微細凹部(溝)形狀的狀態下堆積 右的隔、不同極性交替配左 束等成如在金屬板上描繪電子 的即可，構成材料不特別限定。於壓印通伴'欠 rnm^t ^ ^mMmburs〇m：^^^ 0案兑刖v(preamble )圖案等伺服信號之圖案。 η别ϊΐ程1)ί埋人製程中’非磁性物質可以藉由例如乾式製 二損ϊ磁性材3為Si。2等’但是只要為非磁性材料且不 j害磁性靖媒體之性能者即可，並不限定為該等材料。迦 tH、需將？非磁性材料均—地充填於極細且深_部⑻ 用’則無法充分地阻斷執道間的磁交互作 接觸而性⑽，__氧等氣體 充填及濺鍍綠，可⑽非磁性物質以高 、前述5)之平坦化製程係將埋入製程後膜表面產生之 記n需的絲平坦程度。其方法可使用化學“ 礼光（Chemical mechamcal polish，CMP)或離子束蝕刻（j BeanThe SN to the most difficult method can reduce the influence between tracks as much as possible. It is difficult to ensure sufficient regenerative output at a glance, so it is difficult to ensure that there are enough 13〇3059 concave methods: a method of forming a magnetic recording made up of several layers of film, and a thin film for recording a medium; After the 'reformed magnetic record', the bump formed by the workmanship opened the μ, privately/is wooden. However, since the pre-embossing is added to the growth, the benefit is two: two; the body; the film is in the various directions of the uneven surface [Following Document 1] Japanese Laid-Open Patent Publication No. 2001-274143. Insulting literature 2] 曰本特开2002-15418号. [Summary of the Invention] The problem that Dengli wants to solve is to make the problem of obscurity with the increasing density of obedience. ίίίέΓΓ 记 置 不 不 不 不 不 不 不 不 不 不 不 不 不 = = = = = The domain density can be greatly increased, and the surface recording density can be increased. Quiet! Especially in the provision of - (4) discontinuous obscuring type of magnetic recording, i can maintain the magnetic recording medium in the track, after the film is formed, the problem is based on the discontinuous orbital magnetic recording medium. In the manufacturing method, the film is formed by vertically depositing the particles of the smudged grain on the substrate to form a discontinuous orbital on the film to completely eliminate the magnetic influence of the adjacent track, so that the track The density is easily increased, thereby increasing the recording density of the magnetic recording medium. That is to say, the present invention relates to: 1303059 At least the manufacturing branch of the ship, the high-frequency voltage is applied to the non-magnetic substrate and the non-magnetic substrate on both sides of the non-magnetic substrate, so that the magnetic plate of the magnetic side is reversed. For the target, and on the surface of the ship (four) = plate, the parent #地转隔之间 produces different non-magnetic non-magnetic, sister _ fine pulp, for the density of the non-magnetic substrate near the electric installation The non-magnetic substrate is biased by a high frequency voltage bias. Pressure. In the present invention, the above-mentioned plate can be rotated. Convex, ίί at least - the table directly forms the concave item. (IV) The magnetic memory device of the present invention will apply to the k-media produced by the 与 使 使 磁性 磁性 磁性 磁性 磁性 磁性 磁性 磁性 磁性 磁性 磁性 磁性A drive unit for recording direction drive, a recording and reproducing signal for a relative movement of the magnetic head and the magnetic recording medium by the recording unit and the magnetic recording medium, and a magnetic recording medium can be provided according to the present invention. The discontinuous orbital magnetic recording of the pre-embossing method is good. The impact of the interference between the tracks and the high recording density of the 1303059 open film coverage and directivity. Therefore, it is possible to stack the right partition, the left beam, and the like with different polarities in a state in which the shape of the fine recess (groove) of the surface of the pre-deposited layer or the pre-relief layer is almost stored, and the electrons may be drawn on the metal plate. The material is not particularly limited. The pattern of servo signals such as the pre-rnm^t ^ ^mMmburs〇m:^^^ 0 case against the v (preamble) pattern. η ϊΐ 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2, etc., but as long as it is a non-magnetic material and does not impair the performance of the magnetic media, it is not limited to these materials. Can tH, need to be? Non-magnetic materials are all filled in the very fine and deep _ part (8) with 'they can not fully block the magnetic interaction between the orbits for contact (10), __ oxygen and other gas filling and sputtering green, (10) non-magnetic substances The flattening process of the above 5) is to flatten the degree of silk which is required to be formed on the surface of the film after the process is buried. The method can use chemical "Chemical mechamcal polish (CMP) or ion beam etching (j Bean)
Etching，IBE)。、又，只要不損害磁性記錄媒體性能且^使二^ =表面加玉為足解滑，舰胁何方法都不會妨礙本發明^ 如果考量磁性記錄再生的情形，磁頭的浮起量愈小 咼密度磁性記錄愈有利，且由於該等基板之特徵之一為具有良= 11 1303059 表面平滑性，故磁性記錄媒體中基板表面的粗糙度（Ra)為lnm以 下’較佳為〇·5 nm以下，又以0.1 nm以下更佳。 ^ 前述6)之製程係形成保護膜。一般而言，可以以P-CVD等成 膜法形成類鑽碳（DiamondLike Carbon)之薄膜，但手法並不限定 於此。 本發明所使用之保護膜4與一般使用為磁性記錄媒體保護膜 者相同。保護膜4除上述材料以外，可以適當使用C、氫化C、氮 化C不疋形c、SiC等碳材質層，或Si〇2、Zr2〇3、TiN等通常 使用的保護層材料。保護層也可為2層以上之層體所構成。 ▲ 土本發明所使用保護層4之膜厚為1〜1〇 nm，較佳為丨〜5 ， 較佳，在可確保耐久性的範圍内設定為儘可能薄。 ，，濩層4上較佳為形成潤滑層。潤滑層所使用之潤滑劑例 ★口有鼠系潤滑劑、烴系潤滑劑及該等之混合物。通常潤滑 為1〜4 nm。 曰于又 ^發明之雜記錄舰之製造料也可以適 道式的磁性記錄舰之製造方法，以下舉_之—舰^運、貝軌 =基板上以通常的方法形成雜獻製造雜記錄媒體。 餘的記錄表面麵抗_。視需魏行魏以除去多 ^將於表面形成依所望之執道間距設置之凹凸圖案 上;成:=:面下密接稱 部分 =成之軌道的凹凸會殘留磁性記錄媒趙之以下:=:; ⑽^上面⑽鍍等方法堆積叫等非磁性㈣，料非— 物貝充填於軌道與軌道之間形成之極細長溝内。、將轉磁性 6)之後，藉由拋光或乾式_等方法使表面殘留的凹凸平滑 12 1303059 化 7)最後，再度形成保護膜。 填到磁性記i 良:精度製造磁性記錄媒體，能阻“道確2以 好電磁轉換特性 又互作用’且女* 本發明之雜綠可藉域时述5)之 ΐί!”ίί ί所形成凹部的最下面部V，可1確 .互作用，具有良 本發日狀雜記錄職可以與賴雜 信號處理機』==== 相騎狀_、_猶人錄麟 號=的記錄再生信號處理機構組合，以製造高^貝之輪出仏 5己裝置。 W土丨土个逆續加工，可 it ϊϊ道邊緣部磁化過渡區域影響而將再生麵寬較記錄磁頭 2乍的，性記錄媒體大致以再生磁頭與記錄磁頭兩者子相同、 藉由對媒體之記錄軌道進行物理性不連續加工，可以將習知 頭 it比藉此’所提供之磁性記錄媒體可具有生 再者，，由使上述磁頭之再生部以GMR磁頭或TMR磁頭構 即使在高記錄密度下亦能得到充分強的信號，可以實現具有 咼記錄密度的磁性記憶裝置。 善羽又，如果使該種磁頭之上浮量定為0.005//m〜0.020//m之較 =知者為低的高度上浮，則可提高輸出，得到高裝置S/N比，可 製作成大容量且高可信賴度之磁性記憶裝置。又，尤其是與以解 碼法處理信號之信號處理電路搭配，可以使記錄密度更加提高， ，如，即使以軌道密度100 kTPI以上，線記錄密度1000 kbpl以上， 每平方英吋100 GB以上的記錄密度記錄及再生，也可得到足夠的 S/N。 [實施例] 將安裝有HD用玻璃基板之真空腔室預先真空排氣為Ι.Οχ l〇"5Pa以下。此處所使用之玻璃基板係成分為Li2Si205(%)、 13 d： 1303059 rm μ ^尤疋說，Ar氣體分壓為6 Pa，施加於靶之1117為丨·5 kw， 株命上為1〇0 W。縣板不施加偏麗。成膜之合金組成、膜厚條 。述比較例1〜3為同等。製作之磁性記錄媒體作為實施例j、 2、3 〇 、 比較例1〜3、貫施例1〜3，再次安裝於高真空腔室，以 為=〇 i法堆積Si〇2膜之非磁性層。si〇2之非磁性層平均膜厚調整 畜/ft離子束侧#試絲面帽化。將各樣本放入預先排 ίΐ, J Pa之真空腔室内，導入Ar氣體使分壓為5Pa。對樣本 轭加300^的RF輸出，蝕刻樣本表面。 以该等3種樣本作為實施例1〜3。 日台評價實施例1〜3、比較例1〜3之電磁轉換特性。此 2別貝用之磁頭係對應於各執道間隔（Track pitch)使用不同的磁 士條件如下表1所示。依據各組合，測定記錄75〇kFci之 8^•的 SNR 值（Signal to Noise Ratio)值。 〇 儿 [表1]Etching, IBE). Moreover, as long as the performance of the magnetic recording medium is not impaired and the surface is added to the surface to remove the slip, the method of the ship threat does not hinder the invention. ^ If the magnetic recording and reproduction is considered, the floating amount of the magnetic head is smaller. The more favorable the magnetic recording of the germanium density, and since one of the characteristics of the substrates is good surface acoustic properties, the surface roughness (Ra) of the substrate in the magnetic recording medium is 1 nm or less, preferably 〇·5 nm. Hereinafter, it is more preferably 0.1 nm or less. ^ The process of the above 6) forms a protective film. In general, a film of diamond-like carbon (DiamondLike Carbon) can be formed by a film formation method such as P-CVD, but the method is not limited thereto. The protective film 4 used in the present invention is the same as that generally used as a magnetic recording medium protective film. In addition to the above materials, the protective film 4 may suitably be a carbon material layer such as C, hydrogenated C, nitrogen nitride C or SiC, or a commonly used protective layer material such as Si 2 , Zr 2 〇 3 or TiN. The protective layer may also be composed of two or more layers. ▲ The thickness of the protective layer 4 used in the present invention is 1 to 1 〇 nm, preferably 丨 5 , and is preferably as thin as possible within a range in which durability can be ensured. Preferably, the ruthenium layer 4 is formed with a lubricating layer. Examples of lubricants used in the lubricating layer ★ There are mouse lubricants, hydrocarbon lubricants and mixtures of these. Usually lubricated to 1~4 nm.制造 又 ^ 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 杂 发明 发明 发明 发明 发明 杂 发明 发明 杂 杂 杂 杂 杂 杂 杂 杂 杂 杂 发明 发明 发明 发明. The remaining recording surface resistance _. According to the need, Wei Xingwei will remove more than ^ on the surface to form the concave and convex pattern set according to the distance of the obedience; into: =: under the surface of the densely connected part = the orbit of the track will remain below the magnetic recording medium Zhao: = : (10) ^ The above (10) plating method is called non-magnetic (four), material is not - the object is filled in the extremely elongated groove formed between the track and the track. After the magnetic transformation 6), the surface irregularities are smoothed by polishing or dry method, etc. 7) Finally, a protective film is formed again. Fill in the magnetic record i good: precision manufacturing magnetic recording media, can resist "there are 2 good electromagnetic conversion characteristics and interaction" and female * the invention of the hybrid green can be borrowed from the domain 5) ΐ ί!" ίί ί The lowermost part V of the concave portion is formed, and the interaction can be confirmed. The record with the good hair-like miscellaneous record can be recorded with the signal processor _======================================================= The regenerative signal processing mechanism is combined to manufacture a high-boiler wheel. The W-soil is processed continuously, and the regenerative surface is wider than the recording head by the influence of the magnetization transition region at the edge of the tunnel. The recording medium is substantially the same as the reproducing head and the recording head, and the media is The recording track is physically discontinuously processed, and the conventional head can be made larger than the magnetic recording medium provided by the magnetic head, and the reproducing portion of the magnetic head is made of a GMR head or a TMR head even at a high level. A sufficiently strong signal can be obtained at the recording density, and a magnetic memory device having a 咼 recording density can be realized. Good feathers, if the float above the head is set to 0.005//m~0.020//m, the lower the height is, the higher the output can be, the higher the S/N ratio of the device can be obtained. A large-capacity, high-reliability magnetic memory device. In addition, especially in combination with a signal processing circuit that processes signals by a decoding method, the recording density can be further improved, for example, even if the track density is 100 kTPI or more, the line recording density is 1000 kbpl or more, and the recording per square inch is 100 GB or more. Density recording and regeneration can also get enough S/N. [Examples] A vacuum chamber in which a glass substrate for HD was mounted was evacuated in advance to a pressure of 5 Pa or less. The glass substrate component used here is Li2Si205 (%), 13 d: 1303059 rm μ ^, the partial pressure of Ar gas is 6 Pa, and the 1117 applied to the target is 丨·5 kw, and the strain is 1 〇. 0 W. The county board does not impose a bias. Forming alloy composition, film thickness. Comparative Examples 1 to 3 are equivalent. The prepared magnetic recording medium was again mounted in a high vacuum chamber as Examples j, 2, 3, Comparative Examples 1 to 3, and Examples 1 to 3, so that the non-magnetic layer of the Si〇2 film was deposited by the =〇i method. . The average film thickness of the non-magnetic layer of si〇2 is adjusted. The animal/ft ion beam side #试丝面帽化. Each sample was placed in a vacuum chamber of a pre-discharged, J Pa, and Ar gas was introduced to make a partial pressure of 5 Pa. An RF output of 300^ is applied to the sample yoke to etch the sample surface. These three kinds of samples were used as Examples 1 to 3. The electromagnetic conversion characteristics of Examples 1 to 3 and Comparative Examples 1 to 3 were evaluated on the same day. The heads used for this 2 are used in different track conditions corresponding to the respective track pitches as shown in Table 1 below. According to each combination, the value of the SNR value (Signal to Noise Ratio) of the record of 75 〇 kFci was measured. 〇 儿 [Table 1]
從表1所示之結果可以發現，與連續媒體比較 SNR、擠壓（Squash )等RW特性(記錄再生特性)顯著有 1 目較’ 原因可以推測為，相對於以通常濺鍍方法會造成形成於美/。其 15 1303059 凹凸形狀因媒體成膜而受損，無法充分的維持軌道間磁性分離， 使用本申請案之濺鍍方法時，大致都可以保持凹凸形狀， 的分離良好。 【圖式簡單說明】 &箱，本發明之製造方法的製織程，® 1⑻為於基板上形 mf丨之狀態的剖面圖，圖_為於預浮雕層上形成凹凸部 ϊz ’圖1⑹為於凹凸部上形成磁性層之狀態的剖面 1 ift凹凸部上形成非磁性層之狀態的剖面圖； 層上之非磁性層的狀_面圖g2°^目’圖2(b)為除去磁性 圖； 圖2(c)為形成保護膜之狀態剖面 賴衣置上对之雜板幅藏置例的圖。 【主要元件符號說明】 1〜基板 2〜預浮雕層 3〜凹凸部 3a〜凹部 3b〜凸部 4〜保護膜 5〜記錄層 8〜非磁性層 9〜非磁性充填部 10〜成膜裝置 11〜非磁性基板 12〜靶材 16 1303059 13〜濺鍍氣體 15〜導入管 16〜排氣管 21〜磁性板 22〜南頻電源 23〜偏壓電源 A〜成膜裝置 Μ〜磁石From the results shown in Table 1, it can be found that the RW characteristics (recording and reproducing characteristics) such as SNR and Squash are significantly higher than those of the continuous medium. The reason can be presumed to be caused by the usual sputtering method. Yumei/. The 15 1303059 uneven shape is damaged by the film formation of the medium, and the magnetic separation between the tracks cannot be sufficiently maintained. When the sputtering method of the present application is used, the uneven shape can be maintained substantially, and the separation is good. BRIEF DESCRIPTION OF THE DRAWINGS The <box, the manufacturing process of the manufacturing method of the present invention, ® 1 (8) is a cross-sectional view of a state in which mf is formed on a substrate, and FIG. 1 is a concave-convex portion ϊz ' on the pre-relief layer. FIG. 1 (6) is A cross-sectional view showing a state in which a non-magnetic layer is formed on a cross section of a concave portion in a state where a magnetic layer is formed on a concave-convex portion; a shape of a non-magnetic layer on a layer is shown in FIG. 2(b) to remove magnetic properties Fig. 2(c) is a view showing a state in which a protective film is formed in a state in which a protective film is placed. [Description of main component symbols] 1 to substrate 2 to pre-relief layer 3 to concave-convex portion 3a to concave portion 3b to convex portion 4 to protective film 5 to recording layer 8 to non-magnetic layer 9 to non-magnetic filling portion 10 to film forming device 11 ~Non-magnetic substrate 12 to target 16 1303059 13 to sputtering gas 15 to introduction tube 16 to exhaust tube 21 to magnetic plate 22 to south frequency power supply 23 to bias power supply A to film forming apparatus Μ ~ magnet