1300726 九、發明說明： 【發明所屬之技術領域】 技術領域 本發明係有關於安裝於高壓氣體容器之容器閥之洗淨 5方法、画素液化氣體之填充方法、高壓氣體容器之歸還方 法、洗淨具、洗淨劑。 【先前技術】 背景技術 在半‘體製造過程等中，係使用無水氯化氫(HC1)，且 1°該無水氯化氫係填充於一般鐵製高壓氣體容器中。如第4圖 所示，例如，習知高壓氣體容器之開口部安裝有不鏽鋼製 容器閥10。前述容器閥10設有容器閥主體丨丨、螺接設置於 形成在前述容器閥主體丨丨上部側之圓柱部12内之塞子13、 及透過心軸丨9安裝於前述塞子13上端部之手柄部14。如第5 15圖所示，前述塞子13下端部設有由三氟二氯乙烷樹脂構成 之密封盤18。前述容器閥主體11側面側形成有用以取出高 壓氣體容器G内之氣體的氣體取出口 15，該氣體取出口 15 配置有出口蓋16。 另外，容器閥主體11下部侧形成有其中一端側開口於 20高壓氣體容器G内之氣體流路17,透過前述手柄部14使塞子 13上下動作，可開關前述氣體流路17另一端側之開口部。 即’在使用高壓氣體容器G内之氣體時，藉由使前述塞子13 上升’開啟氣體流路17另一端側之開口部’可透過氣體流 路17由氣體取出口 15取出前述氣體。又，在停止使用高壓 5 1300726 氣體容器G内之氣體時，可使前述塞子13下降，關閉氣體流 路17另一端側之開口部。此時，藉由形成於前述塞子13下 端部之密封盤18，可密封前述氣體流路17之開口部。 在此種高壓氣體容器G内填充液化氯化氫後，以熱風槍 5 充分加熱氣體取出口 15，在充分去除氣體後，由氣體取出 口 15吹入乾燥空氣，進行數分鐘如1〇〜15分鐘内之空氣沖 洗，來洗淨容器閥10内。在進行該空氣沖洗後，再以熱風 槍加熱氣體取出口 15，除去氣體取出口 15内之濕氣，然後 用出口蓋16封閉氣體取出口15。另外，當高壓氣體容器内 10 之液化氯化氫之填充量多時，則進行數小時如6小時以上之 空氣沖洗。又，亦可進行組合容器閥10内之真空吸引與容 器閥10内之加壓的循環沖洗。進行此種空氣沖洗或真空吸 引、加壓之順序的理由’係考慮到以往在填充液化氯化氫 時，液化氣化氫會沿著圓柱部12内壁侵入，進入存在於寒 15子13上部側（與密封面相對之側）的空間，且在關閉容器闕1〇 後，該液化氯化氫會緩缓地氣化，而充滿在出口蓋16之内 侧空間。當從氣體取出口 15取下出口蓋16時，氣化氫氣體 會由氣體取出口 15放出。如此填充有液化氯化氫之高壓氣 體容器G便可出貨給使用者。 20 但是，當在使用出貨後之高壓氣體容器G時，若從氣體 取出口 I5取下出口蓋I6，就會由氣體取出口 ls檢測出些微 氯化氫氣體，造成使用者無法判斷是否有氯化氫氣體自高 壓氣體容器G洩漏出去，而需再次逐一檢查高壓氣體容器 .13007261300726 IX. Description of the Invention: TECHNICAL FIELD The present invention relates to a method for cleaning a container valve mounted in a high-pressure gas container, a method for filling a pixel liquefied gas, a method for returning a high-pressure gas container, and a cleaning method. With detergent. [Prior Art] In the semi-body manufacturing process and the like, anhydrous hydrogen chloride (HC1) is used, and the anhydrous hydrogen chloride is filled in a general iron high-pressure gas container at 1°. As shown in Fig. 4, for example, a stainless steel container valve 10 is attached to the opening of a conventional high-pressure gas container. The container valve 10 is provided with a container valve main body 丨丨, a plug 13 screwed into the cylindrical portion 12 formed on the upper portion of the container valve main body, and a handle that is attached to the upper end of the plug 13 through the mandrel 丨9. Part 14. As shown in Fig. 5, the lower end portion of the plug 13 is provided with a sealing disk 18 made of trifluorodichloroethane resin. A gas take-out port 15 for taking out a gas in the high-pressure gas container G is formed on the side surface side of the container valve main body 11, and the gas take-out port 15 is provided with an outlet cover 16. Further, a gas flow path 17 in which one end side is opened in the high-pressure gas container G is formed on the lower side of the container valve main body 11, and the plug 13 is vertically moved by the handle portion 14, and the opening of the other end side of the gas flow path 17 can be opened and closed. unit. In other words, when the gas in the high-pressure gas container G is used, the gas can be taken out from the gas outlet port 15 through the gas flow path 17 by raising the plug 13 to open the opening portion on the other end side of the gas flow path 17. When the gas in the high pressure 5 1300726 gas container G is stopped, the plug 13 can be lowered to close the opening on the other end side of the gas flow path 17. At this time, the opening of the gas flow path 17 can be sealed by the sealing disk 18 formed at the lower end portion of the plug 13. After the liquefied hydrogen chloride is filled in the high-pressure gas container G, the gas outlet port 15 is sufficiently heated by the heat gun 5, and after the gas is sufficiently removed, the dry air is blown from the gas outlet port 15 for several minutes, for example, 1 to 15 minutes. The air is flushed to clean the container valve 10. After the air flushing is performed, the gas is taken out by the hot air gun to take the outlet 15, the moisture in the gas take-out port 15 is removed, and then the gas take-out port 15 is closed by the outlet cover 16. Further, when the filling amount of the liquefied hydrogen chloride in the high-pressure gas container 10 is large, air flushing is performed for several hours, for example, 6 hours or more. Further, it is also possible to perform a vacuum suction in the combination container valve 10 and a cyclic flushing of the pressure in the container valve 10. The reason for the order of such air rinsing, vacuum suction, and pressurization is considered to be that when liquefied hydrogen chloride is filled, liquefied gasification hydrogen enters along the inner wall of the cylindrical portion 12 and enters the upper side of the cold 15 13 (and The space on the opposite side of the sealing surface, and after the container is closed, the liquefied hydrogen chloride is slowly vaporized and filled in the inner space of the outlet cover 16. When the outlet cover 16 is removed from the gas take-out port 15, the vaporized hydrogen gas is discharged from the gas take-out port 15. The high-pressure gas container G thus filled with liquefied hydrogen chloride can be shipped to the user. 20 However, when the high-pressure gas container G after shipment is used, if the outlet cover I6 is removed from the gas take-out port I5, some hydrogen chloride gas is detected by the gas take-out port ls, so that the user cannot judge whether or not there is hydrogen chloride gas. Leak out of the high pressure gas container G, and need to check the high pressure gas container one by one.1300726
10 —由此，本Μ人由進行空氣沖洗處理或彳㈣沖洗處理 ，容益_之氣體取出口15供應氨氣體，然後調查前述容 器閥10内之污染部分，發現以下情形。即，如第罐所示， 液化氯化氫部分並麵塞子13上部⑪側周面，而 是在開啟容器閥10時’包含由圓柱部12之螺接部分突出之 塞子13之敎彳1肖部糾下部_面絲面（密封盤18之 周圍部分）。該液域化奸係藉由外氣溫度變化而氣化， 在使用者側將出口蓋16由氣體取出口15取下時，氯化氯氣 體會由氣體取出π 15放出。若將此種要因與前述對策考慮 在-起’便可得到以下見解，即，液化氯化氫雖未侵入塞 子13上部侧’但即使是以空氣沖洗或真空吸引、加壓之循 環沖洗也無法完全地除去附著於塞子13之前述部位的液化 氯化氫。 另外，氣化氫氣體具強吸濕性，一有水分存在便會吸 15收該水为成為鹽酸，而眾所皆知，該鹽酸係使不鏽鋼腐钱 的原因。因此，在高壓氣體容器G内之氣化氫氣體消耗後將 出口盖16安裝在氣體取出口 15時，由於容器閥1〇内暴露在 大氣下’故附著在高壓氣體容器G内之氯化氫會吸收大氣中 的水分成為鹽酸。因此，之後當從關閉出口蓋16到回收至 20製造廠側為止經過長時間時，容器閥10内之塞子13等零件 會被該鹽酸腐蝕，而有縮短零件或容器閥10之使用壽命的 問題。 另外’充填於高壓氣體容器G内之鹵素液化氣體除氯化 氫之外’在填充如氣(Cl2)氣體、三氣化硼（BC13)、溴化氫 7 1300726 (HBr)、溴(Br2)、二氯矽烷(SiH2Cl2)、三氯化矽烷(siHCl3)、 四氣化矽(SiCl4)、氟(F2)氣體、氟化氫(HF)氣體等鹵素液化 氣體時，氣體亦會如前述在從取出口 15取下出口蓋16時漏 出，而有造成使用者無法判斷是否有:¾漏情形的問題。又， 5 即使該等氣體只有微量，但若考慮到對人體的安全性，則 最好不要放出至大氣中。 專利文獻1 特開平7-260096號公報（第〇〇24段、第1圖及第2圖） 【發明内容】 10 發明揭示 本發明係有鑑於此種情況而作成者，且其目的在於提 供在安裝於高壓氣體容器之容器閥中，可容易且確實地洗 淨附著於該容器閥内之_素液化氣體之容器閥之洗淨方 法、函素液化氣體之填充方法、高壓氣體容器之歸還方法、 15 洗淨具、洗淨劑。 本發明之容器閥之洗淨方法，係可洗淨容器閱之方 法，且該容器閥係安裝於可填充對有機溶劑具溶解性之函 素液化氣體之高壓氣體容器内者，而該方法之特徵在於· 在高壓氣體容器内填充i素液化氣體或在高壓氣體容ρ内 20消耗鹵素液化氣體後，在前述容器閥呈關閉狀態下，由其 氣體取出口供應有機溶劑至該容器閥内，以洗淨附著於前 述容器閥内之鹵素液化氣體。又，前述有機溶劑係藉由喷 射劑喷射而可供應至前述容器閥内。 另外，本發明之鹵素液化氣體之填充方法包含有以下 8 1300726 步驟：將對有機溶劑具溶解性之鹵素液化氣體由填充用配 官透過容器閥之氣體取出口填充於高壓氣體容器中；接著 關閉前述容器閥，由氣體取出口取出前述填充用配管；之 後’由前述氣體取出口供應有機溶劑至前述容器閥内，以 5洗淨附著於前述容器閥内之鹵素液化氣體；及然後藉由蓋 子關閉前述氣體取出Π。 而且’在前述_素液化氣體之填充方法中，在進行洗 淨ifi素液化氣體的步驟前，亦可進行加熱容器閥内之氣體 流路的步驟。 1〇 此外’本發明之高壓氣體容器之歸還方法包含有：在 填充於南壓氣體容器内且對有機溶劑具溶解性之鹵素液化 氣體消耗後，將容器閥關閉且由該容器閥之氣體取出口取 出配管；之後，由前述氣體取出口供應有機溶劑至容器閥 内，來洗淨附著於前述容器閥内之^素液化氣體；然後藉 15由蓋子關閉前述氣體取出口；接著將前述高壓氣體容器歸 還至製造廠。 另外本發明之洗淨具包含有密閉容器，係用以填充洗 淨劑，且該洗淨劑係由喷射劑和有機溶劑構成並可洗淨安 裝於鹵素液化氣體之高壓氣體容器内之容器閥者；喷射 20 口，係用以喷射前職閉容器内之洗淨劑者；及開關部， 係用以開關前述喷射口者。 此外，本發明之洗淨劑，係可洗淨安裝於填充有鹵素 液化氣體之高壓氣體容器内之容器閱者，且前述洗淨劑係 可溶解函素液化氣體之有機溶劑。該有機溶劑有醇類、酮 9 1300726 類、醚類、有機酸類，例如乙醇、丙酮、異丙醇(IPA)、醋 酸甲基醚、蘋果酸或其混合物。 根據本發明，在高壓氣體容器内填充鹵素液化氣體或 在高壓氣體容器内消耗鹵素液化氣體後，在容器閥呈關閉 5狀態下’因供應混合有如二甲基醚(DME)與如乙醇之有機 溶劑之洗淨劑至該容器閥内，故可容易且確實地洗掉附著 於容器閥内之如液化氯化氫之鹵素液化氣體。 另外，根據本發明之洗淨具，因可供應霧化（變成細微 粒子）之洗淨劑至容器閥内，故可簡單地實施前述洗淨方 10 法。 圖示簡單說明 第1圖係顯示連接於前述容器閥之洗淨具之截面圖。 第2圖係顯示前述容器閥與洗淨具之連接狀態的說明 圖。 第3圖係顯不為確認本發明之效果所進行之實驗结果 的說明圖。 第4圖係顯示習知容器閥之一例的截面圖。 第5圖係顯示塞子之透視圖。 第6圖係顯示前述容器閥一部分之放大截面圖。 20【實施方式】 實施發明之最佳形態 以下說明本發明之實施形態。 因有關於安裝於該實施形態之高壓氣體容器G之容器 閥的構造與在習知技術中利用第4圖所說明之容器閥完全 1300726 相同’故省略說明且利用第4圖所示之容器閥1〇說明以下之 容器閥。 接著’利用第1圖說明可洗淨安裝於高壓氣體容器G之 合為閥10内的洗淨劑。在第1圖中，5為洗淨具，且該洗淨 5具5係由岔閉容器之罐體部50與設於該罐體部50上部之開 關部51構成。前述罐體部5〇内收容有喷射劑，例如可產生 加壓氣體之液化氣體之二甲基醚(DME);及有機溶劑61， 例如乙醇。另外，除二曱基醚之外，亦可用液化丙二醇或 其混合物來作為噴射劑6，且非氧化性壓縮氣體亦可為壓縮 ίο H除乙醇之外’亦可用丙_、異丙醇(IpA)或其混合物 來作為有機溶劑61。又，前述開關部51安裝有喷嘴53。如 第2圖所示，前述噴嘴53前端部形成有喷射口 M，且該喷射 口 54可插人至氣體取出口 15巾。在該例巾，藉由按壓前述 開關部51之按钮52，可從噴射口 54喷出以喷射劑6及有機溶 15 劑61構成之洗淨劑。 接著，說明洗淨容器閥1〇内之方法。首先，透過填充 夹將液化氯化氫供應用（填充用）配管連接於安裝於空高壓 乱體容HG之容H _之氣體取出口 15，然後使塞子13上升 開啟氣體流路17之開口部，再透過配管由液化氯化氫供應 20源供應液化氫，將其填充至高壓氣體容器⑽。然後，使塞 子13下降，並在藉由密封盤18密閉氣體流路17之開口部後 取下配官。之後，以熱風搶對容器闕1〇之氣體取出口 is加 熱如1分鐘，使附著於填充夾及氣體取出口 15之水分乾燥， 再由氣體取出π 15取下填充夾，將洗淨具5之喷嘴％插入氣 1110 - Thus, the present person was subjected to an air rinsing treatment or a 四 (4) rinsing treatment, and the gas effluent outlet 15 was supplied with ammonia gas, and then the contaminated portion in the container valve 10 was investigated, and the following was found. That is, as shown in the first tank, the liquefied hydrogen chloride portion faces the peripheral surface of the upper portion 11 of the plug 13, but when the container valve 10 is opened, the plug 13 including the screw portion of the cylindrical portion 12 is erected. Lower _ face surface (the surrounding portion of the sealing disk 18). The liquid area is vaporized by the change in the temperature of the outside air, and when the outlet cover 16 is removed from the gas take-out port 15 by the user side, the chlorine chloride gas is taken out by the gas π 15 . If such a factor and the aforementioned countermeasures are taken into consideration, the following insight can be obtained that the liquefied hydrogen chloride does not intrude into the upper side of the plug 13 but can not be completely flushed even by air flushing or vacuum suction or pressurized circulation. The liquefied hydrogen chloride attached to the aforementioned portion of the plug 13 is removed. In addition, the hydrogenated gas has a strong hygroscopic property, and when it has moisture, it absorbs the water to become hydrochloric acid, and it is well known that the hydrochloric acid causes the stainless steel to rot. Therefore, when the outlet cap 16 is attached to the gas take-out port 15 after the consumption of the vaporized hydrogen gas in the high-pressure gas container G, since the inside of the container valve 1 is exposed to the atmosphere, hydrogen chloride adhering to the high-pressure gas container G absorbs. The water in the atmosphere becomes hydrochloric acid. Therefore, after a long period of time from the closing of the outlet cover 16 to the recovery to the side of the manufacturing plant, the parts such as the plug 13 in the container valve 10 are corroded by the hydrochloric acid, and there is a problem of shortening the service life of the part or the container valve 10. . In addition, 'the halogen liquefied gas filled in the high-pressure gas container G except for hydrogen chloride' is filled with gas such as gas (Cl2), boron trioxide (BC13), hydrogen bromide 7 1300726 (HBr), bromine (Br2), When a halogen liquefied gas such as chlorodecane (SiH 2 Cl 2 ), decane hydride (siHCl 3 ), tetragas hydride (SiCl 4 ), fluorine (F 2 ) gas or hydrogen fluoride (HF) gas is used, the gas is also taken from the take-out port 15 as described above. When the outlet cover 16 is lowered, it leaks out, and there is a problem that the user cannot judge whether there is a leakage condition of 3⁄4. Also, 5 Even if the gas is only traced, it is best not to release it to the atmosphere if safety is considered for the human body. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 7-260096 (Patent No. 24, No. 1 and No. 2). SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and its object is to provide A method for cleaning a container valve of a liquefied gas attached to a valve of the container, a method for filling a liquid liquefied gas, and a method for returning a high-pressure gas container, which are installed in a container valve of a high-pressure gas container , 15 washing utensils, detergent. The method for cleaning a container valve of the present invention is a method for washing a container, and the container valve is installed in a high-pressure gas container capable of filling a liquid liquefied gas having solubility in an organic solvent, and the method is The utility model is characterized in that after the high-pressure gas container is filled with the liquid liquefied gas or the halogen liquefied gas is consumed in the high-pressure gas container ρ, the organic solvent is supplied from the gas outlet to the container valve when the container valve is closed. The halogen liquefied gas adhering to the container valve is washed. Further, the organic solvent is supplied to the container valve by injection of a spray. In addition, the method for filling a halogen liquefied gas of the present invention comprises the following step 8 1300726: filling a halogen liquefied gas having solubility in an organic solvent into a high pressure gas container from a gas outlet port of a filling dispenser through a container valve; In the container valve, the filling pipe is taken out from the gas outlet; then the organic solvent is supplied from the gas outlet to the container valve, and the halogen liquefied gas adhering to the container valve is washed 5; and then by the cover Turn off the aforementioned gas to remove the crucible. Further, in the method of filling the liquefied gas, the step of heating the gas flow path in the vessel valve may be performed before the step of washing the ifi liquefied gas. In addition, the method for returning the high-pressure gas container of the present invention comprises: after the halogen liquefied gas filled in the south-pressure gas container and having solubility in the organic solvent is consumed, the container valve is closed and taken by the gas of the container valve The outlet is taken out of the pipe; afterwards, the organic solvent is supplied from the gas outlet to the container valve to wash the liquefied gas attached to the valve of the container; then the gas outlet is closed by the cover by 15; then the high-pressure gas is The container is returned to the manufacturing facility. Further, the cleaning device of the present invention comprises a closed container for filling a detergent, and the detergent is a container valve which is composed of a propellant and an organic solvent and can be washed and installed in a high-pressure gas container of a halogen liquefied gas. The injection port is used to spray the detergent in the front-closed container; and the switch portion is used to switch the aforementioned injection port. Further, the detergent of the present invention is a container which can be washed and installed in a high-pressure gas container filled with a halogen liquefied gas, and the detergent is an organic solvent which can dissolve the liquid liquefied gas. The organic solvent is an alcohol, a ketone 9 1300726, an ether, an organic acid such as ethanol, acetone, isopropanol (IPA), methyl acetate, malic acid or a mixture thereof. According to the present invention, after the high-pressure gas container is filled with the halogen liquefied gas or the halogen liquefied gas is consumed in the high-pressure gas container, the organic valve is mixed with dimethyl ether (DME) and ethanol, for example, when the container valve is closed. Since the solvent detergent is in the container valve, the halogen liquefied gas such as liquefied hydrogen chloride adhering to the container valve can be easily and surely washed away. Further, according to the cleaning device of the present invention, since the detergent which is atomized (to become fine particles) can be supplied into the container valve, the above-described cleaning method can be easily carried out. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a washing device connected to the container valve. Fig. 2 is an explanatory view showing a state in which the container valve and the washing device are connected. Fig. 3 is an explanatory diagram showing the results of experiments conducted to confirm the effects of the present invention. Figure 4 is a cross-sectional view showing an example of a conventional container valve. Figure 5 shows a perspective view of the plug. Figure 6 is an enlarged cross-sectional view showing a portion of the aforementioned container valve. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described. Since the structure of the container valve attached to the high-pressure gas container G of this embodiment is the same as that of the container valve 1300726 described in the fourth embodiment in the prior art, the description is omitted and the container valve shown in FIG. 4 is used. 1〇Describe the following container valves. Next, the detergent attached to the high pressure gas container G in the valve 10 can be cleaned by the first drawing. In Fig. 1, reference numeral 5 denotes a washing device, and the five cleaning devices 5 are constituted by a can body portion 50 of a closed container and a switch portion 51 provided at an upper portion of the can body portion 50. The can body portion 5 contains a propellant such as dimethyl ether (DME) which can generate a liquefied gas of a pressurized gas, and an organic solvent 61 such as ethanol. In addition, in addition to the dimethyl ether, liquefied propylene glycol or a mixture thereof may be used as the propellant 6, and the non-oxidizing compressed gas may be compressed ίο H in addition to ethanol, and may also use propylene and isopropyl alcohol (IpA). Or a mixture thereof as the organic solvent 61. Further, a nozzle 53 is attached to the switch unit 51. As shown in Fig. 2, the front end portion of the nozzle 53 is formed with an injection port M, and the injection port 54 can be inserted into the gas take-out port 15 towel. In this case, by pressing the button 52 of the switch unit 51, the detergent composed of the propellant 6 and the organic solvent 61 can be ejected from the ejection port 54. Next, a method of washing the inside of the container valve 1A will be described. First, the liquefied hydrogen chloride supply (filling) pipe is connected to the gas take-out port 15 installed in the space H _ of the empty high-pressure body HG through the filling nip, and then the plug 13 is raised to open the opening of the gas flow path 17, and then Liquefied hydrogen is supplied from a supply source of liquefied hydrogen chloride through a pipe, and is filled into a high pressure gas container (10). Then, the plug 13 is lowered, and after the opening of the gas flow path 17 is sealed by the sealing disk 18, the dispenser is removed. After that, the gas outlet port of the container is heated by hot air for 1 minute, and the moisture adhering to the filling clip and the gas outlet 15 is dried, and then the gas is taken out π 15 to remove the filling clip, and the cleaning device 5 is removed. Nozzle % inserted into the gas 11
20 容器G内後，將該高壓氣體容器G運送至使用者處 .1300726 體取出口 15。 然後’藉由例如以手指按壓前述開關部51之按鈕52， 可由從噴嘴53之喷射口 54噴出以喷射劑(加壓氣體)6及有機 /谷劑61構成之洗淨劑，來洗淨容器閥1〇内。 5 若詳述該洗淨情形，即，由喷嘴前端之噴射口 54喷出 之洗淨劑係呈霧化狀態，且該霧化（變成細微粒子)之洗淨劑 會接觸塞子13，並且會接觸到塞子13側周面及底面中與氣 體取出口 15相鄰之部位，然後沿塞子13表面繞進氣體取出 口 15背面侧，藉此，洗淨劑即可接觸到塞子13露出於氣體 1〇取出口 15及與其連通之空間的部位。所以，在打開容器閥 1〇時，便可藉由有機溶劑來溶解沖洗掉附著於包含由圓柱 部12之螺接部分突出之塞子13之螺紋牙丨周部分的下部側 周面及底面（密封盤18之周圍部分)的液化氣化氫，再與有機 溶劑一起由氣體取出口 15排出。 之後，在容閥ίο内之洗淨結束後，由氣體取出口15 插入pH試紙，確認PH試紙的顏色沒有變化，然後以拭布除 去氣體取出口 15之污垢或水分等，再以熱風搶使其乾燥7 之後，在將出口蓋16安裝在氣體取出口 15前，將出口罢16 洗淨並以減搶使其㈣後，❹口―衫在氣體:出 口 15上。如此，製造廠方在將液化氣化氫填朗高壓氣體 根據前述實施形態，因有機溶劑係藉由洗淨具6之噴嘴 53喷出至容器閥10内之氣體取出口 15内，故可容易且確實 地除去附著於容器閥10之開關機構之塞子13等上的液化氣 12After the inside of the container G, the high-pressure gas container G is transported to the user. The 1300726 body takes the outlet 15. Then, by pressing the button 52 of the switch unit 51 with a finger, for example, the detergent can be ejected from the ejection port 54 of the nozzle 53 by a propellant (pressurized gas) 6 and an organic/trolage 61 to wash the container. Valve 1〇. 5, as detailed in the cleaning situation, that is, the detergent sprayed from the injection port 54 at the tip end of the nozzle is in an atomized state, and the atomized (turned into fine particles) detergent contacts the plug 13, and It contacts the peripheral surface of the plug 13 and the portion of the bottom surface adjacent to the gas take-out port 15, and then wraps around the surface of the plug 13 into the back side of the gas take-out port 15, whereby the detergent can contact the plug 13 to be exposed to the gas 1 Take the exit 15 and the location of the space connected to it. Therefore, when the container valve 1 is opened, the lower peripheral surface and the bottom surface of the circumferential portion of the thread attached to the plug 13 including the plug 13 projecting from the screw portion of the cylindrical portion 12 can be dissolved and dissolved by the organic solvent (sealing) The liquefied gasification hydrogen of the portion around the disk 18 is discharged together with the organic solvent from the gas take-out port 15. After that, after the cleaning in the volume valve ίο is completed, the pH test paper is inserted from the gas outlet port 15 to confirm that the color of the pH test paper has not changed, and then the dirt or moisture of the gas outlet port 15 is removed by the cloth, and then the hot air is used to snatch it. After drying 7 , before the outlet cover 16 is attached to the gas take-out port 15, the outlet 16 is washed and the sling is removed (4), and the sputum is placed on the gas outlet 15. In this way, the manufacturer is liquefying the vaporized hydrogen gas to fill the high-pressure gas. According to the above embodiment, since the organic solvent is ejected into the gas outlet port 15 in the container valve 10 by the nozzle 53 of the cleaning device 6, it is easy. And the liquefied gas 12 adhering to the plug 13 or the like of the switching mechanism of the container valve 10 is surely removed.
20 接著敘述為確 (實施例） 1300726 化氫。而且，因不需以往長時間的空氣沖洗，故作業效率 佳，且可除去空氣沖洗所清除不了的液化氯化氫，因此在 使用者取下出口蓋16時不會有氯化氫氣體漏出，所以可消 除要再將高壓氣體容器G送回製造廠方委託其檢查等麻煩。 另外’本發明之洗淨方法係，例如，在使用者使用高 壓氣體容器G内之氯化氫氣體後，可如同前述，在使用者方 進行安裝於高壓氣體容器G之容器閥1〇内之洗淨。此時，可 藉由容器閥10之塞子13關閉氣體流路17，接著，在從容器 閥10取下消耗氣體用之配管時，雖然大氣會由氣體取出口 10丨5侵入容器閥10内，大氣中之水分便藉此與氯化氫產生反 應變成鹽酸，但如前述，藉由有機溶劑進行洗淨可溶解並 沖洗掉附著於容器閥10内之液化氣化氫或鹽酸。所以，之 後即使經過從關閉出口蓋i6到回收至製造廠側為止之長時 間，也可抑制塞子13等零件腐钱，而具有延長零件或容器 15閥之使用壽命的效果。 / ^雖在前述例中係在高壓氣體容如内填充液化氯 化氣’但本㈣亦可使用可轉於有機溶射（溶解性高） 之β素液化氣體。又，該函素液化氣體可舉等為例。 容’在㈣實施形態中’雖係說《式) 來洗淨容号_ p gm type)容器閥亦可如同前述 ，藉此得到同樣的效果。 實施例 認本發明之效果所進行之實驗。 13 .1300726 Α·實施例1 在第1圖所示之洗淨具5中，使用二甲基醚(dmE)作為 噴射劑6，且使用乙醇作為有機溶劑61，以其重量比為 DME:乙醇=4: !之混合液作為洗淨劑，如前述對高壓氣體 5容器〇内之填充氯化氫後之容器閥1〇内進行洗淨。然後，在 谷器閥10内之洗淨結束後，以熱風槍乾燥氣體取出口 15。 以此作為實施例1。 B·實施例2 除以丙酮作為有機溶劑之外，其他則如同實施例丨，進 10行容器閥10内之洗淨及乾燥氣體取出口 15。以此作為實施 例2 〇 C·實施例3 除以異丙醇(IPA)作為有機溶劑之外，其他則如同實施 例1，進行容器閥1〇内之洗淨及乾燥氣體取出口 Μ。以此作 15 為實施例3。20 Next, it is described as (Example) 1300726 Hydrogen. Moreover, since the air flushing is not required for a long time, the work efficiency is good, and the liquefied hydrogen chloride which can not be removed by the air flushing can be removed, so that when the user removes the outlet cover 16, no hydrogen chloride gas leaks, so the elimination can be eliminated. Then, the high-pressure gas container G is sent back to the manufacturer to entrust it to check and other troubles. Further, the cleaning method of the present invention is, for example, after the user uses the hydrogen chloride gas in the high-pressure gas container G, and can be cleaned in the container valve 1 of the high-pressure gas container G as described above. . At this time, the gas flow path 17 can be closed by the plug 13 of the container valve 10, and then, when the pipe for the gas consumption is removed from the container valve 10, the atmosphere enters the container valve 10 from the gas outlet port 10丨5. The moisture in the atmosphere is thereby reacted with hydrogen chloride to become hydrochloric acid, but as described above, washing with an organic solvent dissolves and rinses off the liquefied gasification hydrogen or hydrochloric acid adhering to the container valve 10. Therefore, even after a long period of time from the closing of the outlet cover i6 to the recovery to the side of the manufacturing plant, the corrosion of the parts such as the plug 13 can be suppressed, and the service life of the parts or the container 15 can be prolonged. / ^ Although in the foregoing example, the liquefied chlorinated gas is filled in the high-pressure gas chamber, the liquefied gas which can be transferred to the organic solvent (high solubility) can also be used. Further, the liquefied gas of the element can be exemplified. In the embodiment (4), the container valve can be washed as described above, and the same effect can be obtained by the same. EXAMPLES Experiments conducted to recognize the effects of the present invention. 13.1300726 实施·Example 1 In the cleaning device 5 shown in Fig. 1, dimethyl ether (dmE) was used as the propellant 6, and ethanol was used as the organic solvent 61 in a weight ratio of DME:ethanol. The mixture of =4: ! is used as a detergent, and the inside of the container valve 1 filled with hydrogen chloride in the high pressure gas 5 container is washed as described above. Then, after the washing in the grain valve 10 is completed, the gas is taken out by the hot air gun to take out the outlet 15. This was taken as Example 1. B. Example 2 In addition to acetone as an organic solvent, as in the example, the washing and drying gas take-out port 15 in the container valve 10 was carried out in 10 rows. As a second embodiment, 〇 C. Example 3 Except that isopropyl alcohol (IPA) was used as the organic solvent, as in Example 1, the inside of the vessel valve 1 was washed and the dry gas was taken out. Taking this 15 as Example 3.
D·實施例4 不使用如第1圖所示之洗淨具5，而是使用已儲存有機 溶劑之洗器瓶由容器_之氣體取出口 15供應如乙醇，再 以乙醇清洗氣體料π15及與其連社㈣。然後在容器 閥湖之洗淨結核，峨布除去氣體取丨叫的污垢或 水分等，再以熱風搶乾燥。將此作為實施例*。 Ε·比較例1 以此作為比較例1 14 .1300726 F.比較例2 在高壓氣體容HG内填充液化氣化氫後，不洗淨容器閥 1〇内，然後以熱風搶乾燥氣體取iH 口 15，再域體取出口 15口人入乾&空氣’進行15分鐘之空氣沖洗。以此作為比較 5 例2 〇 (試驗方法） 在洗淨容器閥10内及乾燥氣體取出口 15後，或在進行 空氣沖洗及乾燥氣體取出口 15後，將出口蓋16安裝在氣體 取出口 15上，將高壓氣體容器G放置一晝夜，再於翌日取下 10出口蓋16，在氣體取出口 15安裝檢測氯化氫氣體用之檢測 器，測定由氣體取出口 15放出之氣化氫濃度。 (結果及考察） 第3圖顯示實施例1〜4及比較例1〜2之氯化氫濃度的結 果。如第3圖所示，雖然實施例丨〜3完全未檢測出氯化氫氣 15體，但比較例1卻檢測出3〇ppm左右之氯化氫氣體，而比較 例2則檢測出超過5〇〇ppm之大量氯化氫氣體。由此可知，藉 由使用混合有噴射劑(DME)6與有機溶劑（乙醇、丙酮、異丙 醇)61之洗淨劑，可確實地洗掉如前述附著於塞子13之液化 氯化氫。另外，在實施例4中也完全檢測不出氣化氫氣體， 2〇 由此可知，即使不使用喷射劑而直接供應有機溶劑也可藉 此除去附著於容器閥10内之液化氣化氫。又，雖然這次未 進行實驗，但在本發明之背景中，在以熱風搶乾燥容器閥 1〇内後，即使進行6小時之空氣沖洗，在取下出口蓋丨6時， 氣化氫氣體之檢測濃度還是常超過30ppm，與此情形相對 15 I3Q0726 照，本發明之方法不僅簡便且更為有效。 【圖式簡單說明】 ^ 第1圖係顯示連接於前述容器閥之洗淨具之截面圖。 第2圖係顯示前述容器閥與洗淨具之連接狀態的說明 5 圖。 第3圖係顯示為確認本發明之效果所進行之實驗結果 的說明圖。 _ 第4圖係顯示習知容器閥之一例的截面圖。 第5圖係顯示塞子之透視圖。 10 第6圖係顯示前述容器閥一部分之放大截面圖。 【主要元件符號說明】 5...洗淨具 19…心轴 6…喷射劑 50"·罐體部 10...容器閥 51...開關部 11...容器閥主體 52···才钱丑 12···圓柱部 53…喷嘴 13…塞子 54···喷射口 14...手柄部 61…有機溶劑 15…氣體取出口 F...液化氯化氫 16...出口蓋 G...高壓氣體容器 17…氣體流路 18...密封盤 16D. Example 4 Instead of using the cleaning device 5 as shown in Fig. 1, a washing bottle having a stored organic solvent is used, and a gas outlet port 15 of the container is supplied with, for example, ethanol, and then the gas material is washed with ethanol π15 and Connect with the community (four). Then, the tuberculosis is washed in the container valve lake, and the cloth is removed to remove the squeaking dirt or moisture, and then the hot air is used to dry. This is taken as an example*. Ε·Comparative Example 1 As a comparative example 1 14 .1300726 F. Comparative Example 2 After filling the liquefied gasification hydrogen in the high-pressure gas volume HG, the container valve 1 is not washed, and then the hot air is used to grab the dry gas to take the iH port. 15, then the domain body takes 15 outlets into the dry & air' for 15 minutes of air flushing. Taking this as a comparison of 5 cases 2 〇 (test method) After washing the container valve 10 and the dry gas take-out port 15, or after performing the air rinsing and the dry gas take-out port 15, the outlet cover 16 is attached to the gas take-out port 15 Then, the high-pressure gas container G was placed for a day and night, and then 10 outlet caps 16 were removed on the next day, and a detector for detecting hydrogen chloride gas was attached to the gas outlet port 15, and the concentration of vaporized hydrogen discharged from the gas outlet port 15 was measured. (Results and Investigation) Fig. 3 shows the results of hydrogen chloride concentrations of Examples 1 to 4 and Comparative Examples 1 and 2. As shown in Fig. 3, although the hydrogen chloride 15 was not detected at all in Example 丨3, Comparative Example 1 detected about 3 〇ppm of hydrogen chloride gas, and Comparative Example 2 detected more than 5 〇〇ppm. A large amount of hydrogen chloride gas. From this, it is understood that the liquefied hydrogen chloride attached to the plug 13 as described above can be surely washed by using a detergent containing a propellant (DME) 6 and an organic solvent (ethanol, acetone, isopropyl alcohol) 61. Further, in the fourth embodiment, the vaporized hydrogen gas was not detected at all, and it was found that the liquefied hydrogenated gas adhering to the container valve 10 can be removed by directly supplying the organic solvent without using the propellant. Further, although the experiment was not carried out this time, in the background of the present invention, after the air valve was blown in the inside of the container valve 1 by hot air, even if the air rinsing was performed for 6 hours, when the outlet cover 6 was removed, the hydrogenated gas was vaporized. The detection concentration is often more than 30 ppm, and in contrast to this case, the method of the present invention is not only simple but also more effective. BRIEF DESCRIPTION OF THE DRAWINGS ^ Fig. 1 is a cross-sectional view showing a washing device connected to the container valve. Fig. 2 is a view showing the state of connection between the container valve and the washing device. Fig. 3 is an explanatory view showing the results of experiments conducted to confirm the effects of the present invention. _ Fig. 4 is a cross-sectional view showing an example of a conventional container valve. Figure 5 shows a perspective view of the plug. 10 Fig. 6 is an enlarged cross-sectional view showing a portion of the aforementioned container valve. [Description of main component symbols] 5...washing device 19...mandrel 6...spraying agent 50"·tank portion 10...container valve 51...switching portion 11...container valve body 52···才钱丑12···Cylinder part 53...nozzle 13...plug 54···injection port 14...handle part 61...organic solvent 15...gas take-out port F...liquefied hydrogen chloride 16...outlet cover G. .. high pressure gas container 17... gas flow path 18... sealing disk 16