TWI296739B - Method for forming an organic insulator of high aperture tft lcd - Google Patents

Method for forming an organic insulator of high aperture tft lcd Download PDF

Info

Publication number
TWI296739B
TWI296739B TW93115693A TW93115693A TWI296739B TW I296739 B TWI296739 B TW I296739B TW 93115693 A TW93115693 A TW 93115693A TW 93115693 A TW93115693 A TW 93115693A TW I296739 B TWI296739 B TW I296739B
Authority
TW
Taiwan
Prior art keywords
group
acrylate
meth
methyl
ether
Prior art date
Application number
TW93115693A
Other languages
Chinese (zh)
Other versions
TW200540567A (en
Inventor
Young-Keun Kim
Suk-Young Choi
Hyuk-Jin Cha
Jae-Hwan Lee
Keun-Joo Lee
Mi-Sun Ryu
You-Lee Pae
Hyun-Jin Seo
Seung-Woo Woo
Je-Sun Woo
Kwon-Yil Yoo
Su-Hyun Lee
Yong-Man Jeong
Bum-Young Choi
Cheol Han
Woong Kim
Nak-Chil Jung
Seong-Jae Hong
Min-Ji Kim
Young-Soo Choi
Sang-Hyup Jung
Jae-Lok Choi
Original Assignee
Samyang Ems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samyang Ems Co Ltd filed Critical Samyang Ems Co Ltd
Priority to TW93115693A priority Critical patent/TWI296739B/en
Publication of TW200540567A publication Critical patent/TW200540567A/en
Application granted granted Critical
Publication of TWI296739B publication Critical patent/TWI296739B/en

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)

Description

1296739 九、發明說明: 【發明所屬之技術領域】 本發明係有關於-觀於高開口率液晶顯示 之有機絕緣體之成型方法,尤其關於—種用=D) 負光阻組餘之成型方法,t高開口率Lc * & I緣體之 時’其係透册性顯影溶液顯影,藉以容許 的金屬黏附性、UV透光度、_率、均勻度及圖=好 【先前技術】 般而言’ LCD(液晶顯示器)係用作電視或圖形顯示器之每 不裝置。特別地,其中於每-像素具有開關元件(例如财(薄膜带、 晶體))之主動基質LCD可具有快速的回應特性,且提供大量^ 素,故其大大地貢獻於實現與CRT (陰極射線管)—樣佳之高品 質、大尺寸及彩色顯示器螢幕。 為了使用LCD來獲得高品質顯示器,高開口率之改良為最重 要。於此中,開口率係定義為一像素電極區域之真正的透光度。 於TFT-LCD中,對於大尺寸及高品質有增加的需求,但增加 的電池效率無法應付此需求,故用於改良液晶透光度之方法正在 發展中。為了改良液晶的透光度,已使用許多方法以例如改良液 晶面板之開口率、改良偏振板之透光度及改良濾色器之透光度。 於其中,就用於改良液晶面板開口率之方法而言,ITO(氧化銦錫) 1296739 像素係依由《錢製狀電购料像錢_卜顺整個像素 區上方之方式_於TFT上,且接著放大像素雜之尺寸。當使 用此技術時,現存的TFT-LCD之閱0、玄許ό 7 田 炙開口率改良了約50至60%,甚 至達到80至85%。 此刻,為了更進一步瞭解,請參照附圖詳細地說明高開口率 之TFT。圖1為顯示具有高開口率之習用的飢CD之單元 ㈣面圖。請看圖1,閘極線2係位於側面方向,且儲存電極線4 =平行嶋2哺_ 2 _術上。資料線8係垂 直地跨在閘極線2及儲存電極線*上。 半導體層6 #、喝職嫩__ 8位 =上,錄極9a(自資_引出)及源極%(與資料線 成)係相對地位於半導體層6上,進而部分地重最。 此時,由™製成之像素電_係位綱極 1隔開之像素區中。此時,像素電極12與源極%接觸= 立於正個像素區上,進而與部分資料線8及間極線。 圖取著圖1之龍,線所取之斷面圖。如圖2所示,門極 a 於底部基板20上,且儲存電極如係形成於與間心相 ㈣疋距叙位置上。於底部基板2()之 、 極絕緣體5。半導俨居^在#接 表面上,形成一閘 上。於彻 ==ΓΓ觸極绝緣體5 則彼此相隔地形成。 起形成之沒極9a雜極% 1296739 此外,具有低介電當 20之上表面上。有機絕緣體^機絕緣體10則塗佈於底部基板 示)。像素電極12係形成於具有供暴露源極之接觸孔(未顯 素區位置處之接觸孔而與緣體10上,進而透過相對於像 線8重疊。在此,有機 接觸,且與部分間極2a及資料 及平坦化底部層之角色。、版1〇扮演自貧料線8絕緣像素電極12 於圖1中,當形成有機絕緣體 然而,正光_於金屬 植·肖作絕緣膜。 留率,因而使均勻性亞土的雜性’且於顯影後展現低膜保 文m惡化。特別地,由於必須 以改良透光度,故製程數目增加,因了差你白作用 時間,此造成產率及錢之減少。问了^的速率及接觸 【發明内容】 提供==:::, 怖缺陷的塗層,辦,射軸無均勾及塗 機絕緣體形成時,層之邊緣輪廓,當高開口率⑽之有 案及顯Μ好的^顯影溶液顯影,藉以容許形成圖 木I負不良好的金屬黏·、υν透 口 案穩定性。 胰保特、均勾度及圖 為了達成上述目的,本發明提供一種用 於高開口率液晶 顯 1296739 ::之有機絕緣體之成型方法,其將組成物包含X。重量份 著等下通式1結構之黏著劑樹脂、具町通式2結構之泰 二:曰及其混合物組成之群之黏著劑樹脂;2〜重量份具不飽 2减團之多宫能單體;及_〜2G重量份之糾發劑成型於 LCD的下基板。 【貫施方式】 本發明將詳細地說明如下。 、用於南開口率液晶顯示器之有機絕緣體之成型方 广二包3 ·步驟-.成型-光阻層於該薄膜電晶體液晶 j丁-之下基板,該下基板包括—閘極電極、一源極 包極以及一汲極電極,纟中該光阻層係塗佈一組成為 5〜40重量份選自由具以下通式丨結構之黏轴樹脂、具以下通式 2結構之黏著冑_旨及其混合物喊之群絲麵翻旨;2〜⑽重 量份具不飽和舰基團〇官能·;及瞧〜2()重量份之光引 發劑;步驟二:提供—曝光步驟,以利用-紫外光透過-光罩照 射該光阻層;步驟三:提供—顯影步驟,以去除曝光後之該光阻 層以形成-細孔W及步驟四:以加溫的方錢該具有接觸孔 之光阻層硬化,以形成一有機絕緣體。。 通式11296739 IX. Description of the Invention: [Technical Field] The present invention relates to a method for forming an organic insulator of a liquid crystal display having a high aperture ratio, and more particularly to a method for forming a negative photoresist group t high opening ratio Lc * & I when the edge of the body is 'developed through a book-developing solution, whereby the allowable metal adhesion, UV transmittance, _ rate, uniformity and graph = good [previous technology] 』 'LCD (liquid crystal display) is used as a device for every TV or graphic display. In particular, an active matrix LCD having a switching element (e.g., a film (film), a crystal) per pixel can have a fast response characteristic and provide a large number of elements, so it greatly contributes to realization with a CRT (cathode ray) Tube) - Good quality, large size and color display screen. In order to use a LCD to obtain a high quality display, the improvement of the high aperture ratio is of the utmost importance. Here, the aperture ratio is defined as the true transmittance of a pixel electrode region. In TFT-LCDs, there is an increasing demand for large size and high quality, but increased battery efficiency cannot cope with this demand, so a method for improving liquid crystal transmittance is being developed. In order to improve the transmittance of the liquid crystal, many methods have been used to, for example, improve the aperture ratio of the liquid crystal panel, improve the transmittance of the polarizing plate, and improve the transmittance of the color filter. Among them, in terms of the method for improving the aperture ratio of the liquid crystal panel, the ITO (Indium Tin Oxide) 1296739 pixel is based on the method of "money-making electricity purchase material like money" above the entire pixel area - on the TFT, And then enlarge the size of the pixel. When using this technology, the existing TFT-LCD reading 0, Xuan Xuό 7 Tian Hao opening ratio improved by about 50 to 60%, or even 80 to 85%. At this point, for further understanding, a TFT having a high aperture ratio will be described in detail with reference to the drawings. Fig. 1 is a plan view showing a unit (four) of a conventional hunger CD having a high aperture ratio. Referring to Figure 1, the gate line 2 is in the lateral direction, and the storage electrode line 4 = parallel 嶋 2 feeding _ 2 _ above. The data line 8 is vertically across the gate line 2 and the storage electrode line*. The semiconductor layer 6 #, the vacant __ 8 bits = upper, the recording pole 9a (self-funded_extracted) and the source % (and the data line) are relatively located on the semiconductor layer 6, and thus partially weighted the most. At this time, the pixel made by TM is in the pixel region separated by the gate electrode 1. At this time, the pixel electrode 12 is in contact with the source % = standing on the positive pixel region, and further with the partial data line 8 and the interpolar line. The figure takes the dragon in Figure 1, the section taken from the line. As shown in FIG. 2, the gate electrode a is on the bottom substrate 20, and the storage electrode is formed at a position away from the center of the center (four). On the bottom substrate 2 (), the pole insulator 5. The semi-conducting ^ ^ on the # junction surface forms a gate. Yu Ting ==ΓΓTole insulators 5 are formed apart from each other. The formation of the immersed 9a dipole 1296739 in addition, has a low dielectric when on the upper surface of 20. The organic insulator insulator 10 is applied to the bottom substrate. The pixel electrode 12 is formed in a contact hole having a source to be exposed (a contact hole at a position of the non-exposed region and the edge 10, and further penetrates with respect to the image line 8. Here, the organic contact, and the portion The pole 2a and the role of the data and the flattened bottom layer. The plate 1 plays the self-lean line 8 and the insulating pixel electrode 12 is shown in Fig. 1. When an organic insulator is formed, the positive light is applied to the metal substrate. Therefore, the homogeneity of the homogeneous sub-soil 'is deteriorated after the development of the low-film m. In particular, since the transmittance must be improved, the number of processes is increased, which is caused by the difference in the white action time. The rate and the reduction of money. Asked the rate and contact of ^ [invention] Provide ==:::, the coating of the defect, the dowel, the non-uniform hook and the insulator of the coating machine, the edge contour of the layer, when The high opening ratio (10) is well documented and the development of the developing solution is good, so as to allow the formation of the metal viscous, υ 透 透 透 稳定性 。 。 。 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰 胰Purpose, the present invention provides a liquid for high aperture ratio Crystalline 1296739: The method for forming an organic insulator, which comprises X. The weight of the adhesive resin of the structure of the following formula 1 and the composition of the mixture of the second formula: 曰 and its mixture Adhesive resin; 2 to 2 parts by weight of polyuterine monomer having insufficient 2 groups; and _~2G parts by weight of the correcting agent formed on the lower substrate of the LCD. [Comprehensive mode] The present invention will be described in detail The following is a method for forming an organic insulator for a south aperture ratio liquid crystal display. The second step is to form a photoresist layer on the thin film transistor liquid crystal substrate, and the lower substrate includes a gate electrode. a source-encapsulated electrode and a drain electrode, wherein the photoresist layer is coated with a group of 5 to 40 parts by weight selected from the group consisting of a viscous resin having the following structure and having the structure of the following formula 2胄 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Irradiating the photoresist layer with an ultraviolet light transmission-mask; Step 3: Providing - development step To remove the photoresist layer after the exposure to form a - W pores and Step four: the money to warm square contact hole having a hardened photoresist layer, an organic insulator to form a Formula 1 ..

XXX 1296739XXX 1296739

COOY1 COOH COOY2 於通式1中,X為氫原子或曱基,Y1為具有1至16個碳原 子之烷基或羥烷基,且Y2係選自由具有以下化學式(I)至(XX)結構 之化合物組成之群。COOY1 COOH COOY2 In Formula 1, X is a hydrogen atom or a fluorenyl group, Y1 is an alkyl group having 1 to 16 carbon atoms or a hydroxyalkyl group, and Y2 is selected from the structures having the following chemical formulae (I) to (XX) a group of compounds.

chJ-co-o·chJ-co-o·

CH2==C—CO一0-¾—CH2==C—CO—0-3⁄4—

ch2=c-co-o—r2-<Ch2=c-co-o-r2-<

CO-O-Rr·1CO-O-Rr·1

(I) (Π)an) (IV) (V) (VI) (W ⑽) (DO 1296739 onJ-oo-L·(I) (Π)an) (IV) (V) (VI) (W (10)) (DO 1296739 onJ-oo-L·

chU-一chU-一

chJ-co-L,chJ-co-L,

CH2J1-oo-o-R2-o-(co-na-o,K-ca-^CH2J1-oo-o-R2-o-(co-na-o, K-ca-^

R2一0一(CO—R3—0)k—CO—NR2-0(CO-R3-0)k-CO-N

Rs CH2=C-C0-0-R2-0~(CO-R2—〇)k-Rs CH2=C-C0-0-R2-0~(CO-R2—〇)k-

chJ-co-o-. -R2—0-(C0-R3-0)k-C0-N R4chJ-co-o-. -R2—0-(C0-R3-0)k-C0-N R4

(X) (XI) (ΧΠ)(xm) (XIV) (XV) (XVI) (XVH) (XVin) (XIX) (XX)(X) (XI) (ΧΠ)(xm) (XIV) (XV) (XVI) (XVH) (XVin) (XIX) (XX)

於化學式(I)至(XX)中,Ri為氫原子或曱基,R2為具有1至 10個碳原子之伸烷基,R3為具有1至10個碳原子之烴,R4為氫 10 1296739 原子或曱基,&為具有1至1〇個碳原子之烴,且k為整數〇至 10。 通式2In the chemical formulae (I) to (XX), Ri is a hydrogen atom or a fluorenyl group, R2 is an alkylene group having 1 to 10 carbon atoms, R3 is a hydrocarbon having 1 to 10 carbon atoms, and R4 is hydrogen 10 1296739 An atom or a fluorenyl group, & is a hydrocarbon having 1 to 1 carbon atoms, and k is an integer 〇 to 10. Formula 2

於通式2中,重複單元Α係選自由甲基丙烯酸酯(ΒΖΜΑ)、 苯乙烯(Sty)、α-甲基苯乙烯、丙烯酸異冰片酯及甲基丙烯酸異冰 片酯(ΙΒΜΑ)、丙烯酸二環戊酯、曱基丙烯酸二環戊酯(DcpMa)、 丙烯酸二環戊烯酯、甲基丙烯酸二環戊烯酯、丙烯酸二環戊基乙 氧基酯、曱基丙烯酸二環戊基乙氧基酯、丙烯酸二環戊烯基乙氧 基酯、甲基丙烯酸二環戊烯基乙氧基酯等組成之群,B係選自由 甲基丙烯酸縮水甘油酯(GMA)、甲基丙烯酸羥乙酯(HEMa)、二甲 基胺基甲基丙烯酸酯、丙烯s_ACAMi)等組成之群,且C為丙 烯酸心)^絲職(MAA),其巾具赋2轉之轉劑樹脂 含有不論A、B及C順序之無規共聚物。 具通式1結構之黏著劑樹脂係為由含有羧酸之單In Formula 2, the repeating unit oxime is selected from the group consisting of methacrylate, styrene, styrene, isobornyl acrylate, isobornyl methacrylate, and acrylic acid. Cyclopentyl ester, dicyclopentyl decyl acrylate (DcpMa), dicyclopentenyl acrylate, dicyclopentenyl methacrylate, dicyclopentyl ethoxy acrylate, dicyclopentyl ethoxy acrylate a group consisting of a base ester, dicyclopentenyl ethoxylate acrylate, dicyclopentenyl ethoxy methacrylate, and the like, and B is selected from the group consisting of glycidyl methacrylate (GMA) and hydroxyethyl methacrylate. a group consisting of ester (HEMa), dimethylamino methacrylate, propylene s_ACAMi), and C is an acrylic core) (MAA), and the towel has a transfer agent resin of 2 turns, regardless of A, Random copolymer of B and C order. The adhesive resin having the structure of the general formula 1 is composed of a single carboxylic acid

1296739 結構(不似含衫錄目之胃㈣叫料 以改良膜保留率及耐熱性(根據高破璃轉變溫度)树脂),藉 θ具通式1結構之黏著劑樹月旨較佳具2,_〜50,_之平均八子 「_〇_及1()〜4()()咖毫克/克之酸值= 5,000〜40,000之平均分子量 /、文彳土具 毫域之酸值。 ㈠.0之多分散度及20,_ 再者’具通式2結構之黏著劑樹脂顯示幾乎與具通式i 之黏著劑樹脂相同的效果。就通式2之黏著劑樹脂㈣,盆他種 類重複單心例如如以下通式3(D)中所示具有2至Μ個烧基美 團之丙烯酸旨或甲基邮親酯,可包括在本㈣之範圍内。 更4寸別地’紐早(可為甲基丙烯酸甲自旨、甲基丙雜丁醋、甲 基-丙烯酸細旨、丙烯酸甲_、丙燁酸丁醋、丙稀酸月桂酉旨、苯 乙烯等。 通式3 ·1296739 structure (not like the stomach of the shirt (4) called to improve the film retention and heat resistance (according to the high glass transition temperature) resin), by the structure of the structure of the adhesive structure of the structure of the tree , _~50, _ the average eight sons "_〇_ and 1 () ~ 4 () () coffee mg / gram of acid value = 5,000 ~ 40,000 average molecular weight /, the value of the acid field of the field of the field. (a). 0% dispersion and 20,_ Further, the adhesive resin having the structure of the formula 2 shows almost the same effect as the adhesive resin of the formula i. The adhesive resin of the formula 2 (four), the type of the pot is repeated A single core, for example, an acrylic or methyl postal ester having 2 to 2 groups of mercapto groups as shown in the following formula 3 (D) may be included in the range of (4). (may be methyl methacrylate, methyl methacrylate, methyl acrylate, methacrylate, butyl acetonate, lauric acid, styrene, etc.)

具通式2結構之黏著劑樹脂較佳具2,〇〇〇〜1〇〇,〇〇〇之平均分子 量、1.0〜5.0之多分散度及15〜4〇〇K〇H毫克/克之酸值。其更佳具 5,000〜40,000之平均分子量、! 6〜3 〇之多分散度及3〇〜15〇 K〇H 毫克/克之酸值。 12 1296739 特別地,當使用通式1之黏著劑樹 知與通式2之黏著劑樹脂 %•,圖案的硬度可改善,且白化現& 、 失’因為轉麵脂與 組成物中其他光阻成分間之相容性增加了。 含有不飽和職基目之多官能單體包含至少—選自由以下組 成之群之化合物··經由多元醇與略不飽和叛酸之醋化反應而製得 之化合物,其係選自由乙二醇^甲基)丙烯_、具有2至14個 氧化乙烯基團之聚乙二醇二(甲基)丙婦酸酉旨、三經甲基丙烧二(甲 基)丙烯_、三經甲基丙烧三(甲基)丙烯酸酯、季戊四醇三(甲基) 丙烯義、季戊四醇四(甲基)丙烯酸§旨、具有2至14個氧化丙ς 基團之丙二醇二(甲基)丙烯酸酯、二季細醇五(甲細稀酸酉旨、 二季戊四醇六(甲基㈣酸酯及二季戊四醇三(甲基)丙烯酸醋組成 之群;經由加成(曱基)丙烯酸於具有縮水甘油基基團之化合物而製 得之化合物’其係選自由三解基服三縮水甘油基辦稀酸加 合物及雙盼Α二縮水甘油基醚丙烯酸加合物組成之群;聚羧酸或 聚異氰酸i旨與具有織基團及不飽和脂縣團之化合物的加合物 之酯化合物,其係選自由(甲基)丙烯酸|3_羥乙酯與(曱基)丙烯酸p_ 每乙醋的甲苯二異氰酸酿加合物之酸二醋組成之群;以及(甲基) 丙烯酸烧醋,其係選自由(甲基)丙烯酸甲醋、(甲基)丙稀酸乙醋、(甲 基)丙烯酸丁醋、(甲基)丙稀酸2_乙基己醋等組成之群。其含量為2 至200重量份,且較佳為5至5〇重量份。 經由調整含有以上不飽和脂族基團之多官能單體與黏著劑樹 13 1296739 月曰間之比例’可形成具有高耐熱性、高透明度、良好均勻度及圖 案穩定性之用於細口率LCD之有機絕緣體之貞光阻組成物。 再者,通常使用苯乙酮或二苯甲酮類型之光引發劑。由於有 色的光引發劑降低了透日歧,故經由制在曝光波長下具有適合. 的敏感度且本身不具顏色之光引㈣,可獲致高透明度。—般而. 言,於丙烯酸系多官能單體之交聯反應中所用之光引發劑係考量 所用之uv波長而選擇。由於水銀燈(係最常用者)具波長為 310〜420宅微米’故最佳使用在此波長範圍内產生基團之光引發_ 劑。 就此一光引發劑而言,較佳係使用苯乙酮、二苯曱酮或三類 光引發劑,例如 Irgacure 369、Irgacure 651、Irgacure 907、TPO、 CGI124及EPD/BMS混合物,例如二苯曱酮、苯基聯苯基酮、^ 羥基小醯基環己烷、基二甲基縮酮、1-基小二甲基胺基 -1_(4-嗎基-醯基)丙烷、2_嗎基_2_(4_曱基巯基)醯基丙烷、 硫代山噸酮(thioxanthone)、1-氯斗丙氧基硫代山噸酮、異丙基硫 馨 代山嘴酮、一乙基硫代山嘲酮、乙基 、4-醯基-4-甲基二苯 基硫、苯偶姻丁基醚、2_經基_2_酷基丙:):完、2_經基_2_(4_異丙基) 醯基丙烷、4-丁基醯基三氯甲烷、4-苯氧基醯基二氯曱烷、醯 基曱酸曱酯、1,7-雙(9-啶基)庚烷、9-正丁基气6-雙(2-嗎基-異 丁 fe基)口坐、2-曱基-4,6-雙(三氯曱基)-s·三、2-苯基-4,6-雙(三 氯甲基)-s-三、2-基_4,6_雙(三氯曱基)-s_三等。為了改良透 14 1296739 明度且使曝光劑量減至最少,光引發劑之含量為0.005至2〇重量 份,且較佳為〇·5至1〇重量份。 含環氧或胺基團之矽酮化合物較佳可進一步添加於於本發明 之負光阻經成物中。石夕_匕合物改良了 ΙΤ0電極與組成物間之黏 附性以及硬化後之耐熱性。此矽酮化合物包含選自由(1縮水甘油 氧基丙基)三甲氧基魏、$縮水甘油氧基丙基)三乙氧基石夕烧、& 縮水甘油氧基丙基)甲基三甲氧基魏、㈣水甘油氧基丙基)甲基The adhesive resin having the structure of the general formula 2 preferably has 2, 〇〇〇~1〇〇, an average molecular weight of ruthenium, a dispersion of 1.0 to 5.0, and an acid value of 15 to 4 〇〇K 〇H mg/g. . It is better to have an average molecular weight of 5,000 to 40,000! 6~3 〇Various dispersion and 3〇~15〇 K〇H mg/g acid value. 12 1296739 In particular, when the adhesive resin of the formula 1 is used and the adhesive resin of the formula 2 is known, the hardness of the pattern can be improved, and the whitening is now & The compatibility between the blocking components is increased. The polyfunctional monomer containing an unsaturated functional group comprises at least a compound selected from the group consisting of: a compound obtained by a hydration reaction of a polyhydric alcohol with a slightly unsaturated acid, which is selected from the group consisting of ethylene glycol ^Methyl)propene_, polyethylene glycol di(methyl)propyl acetoate having 2 to 14 oxyethylene groups, trimethyl propylene bis(meth) propylene _, trimethyl methacrylate Propylene tris(meth)acrylate, pentaerythritol tris(meth) propylene, pentaerythritol tetra(meth)acrylate §, propylene glycol di(meth)acrylate having 2 to 14 propylene oxide groups, second season a group of fine alcohols (methyl succinate), dipentaerythritol hexa(methyl (tetra) acrylate and dipentaerythritol tris (meth) acrylate; via addition (fluorenyl) acrylate to glycidyl groups The compound obtained by the compound is selected from the group consisting of a tri-glycidyl triglycidyl acid adduct and a bis-glycidyl diglycidyl ether acrylic adduct; a polycarboxylic acid or a polyisocyanate; An ester compound of an adduct with a compound having a woven group and an unsaturated lipid group, Selecting a group of (meth)acrylic acid|3_hydroxyethyl ester and (mercapto)acrylic acid p_ perylene diacetate toluene diisocyanate adduct of acid vinegar; and (meth)acrylic vinegar, It is selected from the group consisting of methyl methacrylate, ethyl (meth) acrylate, butyl ketone (meth) acrylate, and 2-ethyl hexanoic acid (meth) acrylate. It is 2 to 200 parts by weight, and preferably 5 to 5 parts by weight. By adjusting the ratio of the polyfunctional monomer containing the above unsaturated aliphatic group to the adhesive tree 13 1296739, the ratio can be formed to have high heat resistance. A photoresist composition for an organic insulator of a fine-mouth LCD, which has high transparency, good uniformity, and pattern stability. Further, a photoinitiator of the acetophenone or benzophenone type is usually used. The initiator reduces the cross-difference, so that by having a suitable sensitivity at the exposure wavelength and having no color of light itself (4), high transparency can be obtained. - Generally speaking, at the intersection of the acrylic polyfunctional monomer The photoinitiator used in the coupling reaction is selected taking into account the UV wavelength used. In the case of a mercury lamp (the most commonly used one) having a wavelength of 310 to 420 house micrometers, it is preferable to use a photoinitiator which generates a group in this wavelength range. For this photoinitiator, it is preferred to use acetophenone. , benzophenone or three types of photoinitiators, such as Irgacure 369, Irgacure 651, Irgacure 907, TPO, CGI124 and EPD/BMS mixtures, such as benzophenone, phenyl biphenyl ketone, hydroxy hydroxy fluorenyl ring Hexane, dimethyl ketal, 1-yl-small dimethylamino-1_(4-m-yl-indenyl)propane, 2-mercapto-2-(4-fluorenyl) decylpropane, sulfur Thioxanthone, 1-chlorobupropoxy thioxanthone, isopropyl thioxanthone, monoethylthiomethane, ethyl, 4-mercapto-4-methyl Diphenylthiol, benzoin butyl ether, 2_trans-base_2_Coyl-propyl:): finished, 2_transyl 2_(4-isopropyl) decylpropane, 4-butylhydrazine Trichloromethane, 4-phenoxymercaptodichlorodecane, decyl decyl decanoate, 1,7-bis(9-pyridine)heptane, 9-n-butylene 6-bis(2-吗基-isobutyl base), 2-mercapto-4,6-bis(trichloroindenyl)-s·three, 2-phenyl-4,6-bis(trichloromethane) Base)-s-tris, 2-yl_4,6-bis(trichloroindenyl)-s_three. In order to improve the brightness of the lens and to minimize the exposure amount, the photoinitiator is contained in an amount of 0.005 to 2 parts by weight, and preferably 5% to 1 part by weight. The anthrone compound containing an epoxy group or an amine group is preferably further added to the negative photoresist of the present invention. The Shixi _ 匕 compound improves the adhesion between the ΙΤ0 electrode and the composition and the heat resistance after hardening. The anthrone compound comprises a compound selected from the group consisting of (1 glycidoxypropyl) trimethoxy Wei, glycidoxypropyl) triethoxylate, & glycidoxypropyl)methyltrimethoxy Wei, (IV) glycidoxypropyl) methyl

二乙氧基魏、(3·縮水甘油氧基丙基)二?基甲氧基魏、&縮水 甘油氧基丙基)二甲基乙氧基魏、3,4_環氧基丁基三甲氧基石夕 ,、3,4_環氧基丁基三乙氧基魏、2_(3,4_環氧基環己基)乙基三甲 乳基石夕垸、2_(3,4_環氧基環己基)乙基三乙氧基石夕烧、胺基丙基三 甲氧基魏等組成之群中之至少—者。相化合物之含量為 0.0001至3重量份,且較佳為咖至〇1重量份。 、另外,必辦,於本剌之負光隨成物巾可使用添加劑 例如光敏劑、熱聚合抑糊、消泡劑及勻平劑。 藉著依序添加溶劑、旋轉塗佈於基板上、使用遮罩照射υ 射線及赠賴縣液⑽彡,_本_之麵絕賴之負如 .旦成物H開π率LCD之有機絕賴。触添加溶劑以使得; ⑼㈣度。物獅度至胸 屋/ ^於㈣無針狀f#層厚度)。_包含選自由醋_ 醋、醋㈣、—縮二乙二醇二伽、-縮二乙二醇二甲基?Diethoxy Wei, (3 · glycidoxypropyl) II? Methoxy wei, & glycidoxypropyl) dimethyl ethoxy wei, 3,4 epoxide butyl trimethoxy oxalate, 3,4 epoxide butyl triethoxy Kewei, 2_(3,4-epoxycyclohexyl)ethyltrimethyllate-based sulfonium, 2_(3,4-epoxycyclohexyl)ethyltriethoxylate, aminopropyltrimethoxy At least one of the groups consisting of Kewei. The content of the phase compound is from 0.0001 to 3 parts by weight, and preferably from 1 to 5 parts by weight. In addition, it is necessary to use additives such as photosensitizers, thermal polymerization paste inhibitors, defoamers and leveling agents in the negative light-compliant towel of this book. By adding the solvent in sequence, spin coating on the substrate, using the mask to illuminate the X-ray and the gift of the Lai County liquid (10) 彡, the surface of the _ _ _ 绝 绝 . . . . . 成 成 LCD LCD LCD LCD LCD Lai. Add solvent to make; (9) (four) degrees. The lion is to the chest house / ^ (4) without needle-like f# layer thickness). _included from vinegar _ vinegar, vinegar (four), diethylene glycol diethylene, diethylene glycol dimethyl?

15 1296739 基醚、丙酸曱基曱氧基酯、丙酸乙基乙氧基酯(EEp)、乳酸乙酯、 丙二醇曱基醚醋酸醋(PGMEA)、丙二醇曱基醚、丙二醇丙基醚、 曱基溶纖劑醋酸酯、乙基溶纖劑醋酸酯、一縮二乙二醇甲基醋酸 酯、一縮二乙二醇乙基醋酸酯、丙酮、曱基異丁基酮、環己酮、 · 一曱基曱醢胺(DMF)、N,N_二曱基乙酸胺(dmac)、N-曱基-2-略 · 烧酮(NMP)、γ-丁内酯、二乙醚、乙二醇二曱基_、二乙二醇二甲 _(diglyme)、四氫喃(THF)、甲醇、乙醇、異丙醇、曱基溶纖劑、 乙基溶纖劑、一縮二乙二醇曱基_、一縮二乙二醇乙基醚、一縮 鲁 一丙一醇甲基醚、甲笨、一甲苯、己烧、庚烧、辛烧等組成之群 中之至少一者。 本發明將詳細地說明如下。然而,應瞭解詳細說明及同時代 表本發明較佳具體例之特殊實施例係僅供說明之用,因為熟習此技 藝者,自本詳細說明,當可明白在本發明精神及範圍内之許多變化 及潤飾。 AMM1 根據表1之成分及含量,將黏著劑樹脂及作為多官能單體之 一季戊四醇六/五丙烯酸酯添加於具υν濾器及攪拌氣之反應器 中。接著,添加Irgacure 369作為光引發劑、(3_縮水甘油氧基丙基) 二乙乳基(乙氧基)石夕烧及〇·1〜3重量%之添加劑,例如熟知的光敏 劑、熱聚合抑制劑、消泡劑及勻平劑(以樹脂脂全部固形物含量為 16 1296739 Y、,藉以衣備用於有機絕緣體之負光阻組成物。接著,在室溫 、攪拌負光阻組成物。接著,添加溶劑於組成物巾,以使得,占产 為15釐泊(cps)。 —又 於具體例1中,黏著劑樹脂係以化學式(丨。至(1_νι)表示,其 中X及Y1二者為甲基基團,且γ2分別為化學式①至(vi)(其中氏 及反2—者為甲基基團)。 AM例2〜2 5 除根據表1及2改變組成物之種類及含量外,依照與具體例 1中相同之方式,製造負光阻組成物。 上匕較例1〜4 除使用通式4之黏著劑樹脂替代通式1之黏著劑樹脂,且根 據表3改變組成物之種類及含量外,依照與具體例丨中相同之方 式,製造負光阻組成物。 <通式4>15 1296739 Alkyl ether, decyl decyl propionate, ethyl ethoxy propionate (EEp), ethyl lactate, propylene glycol decyl ether acetate (PGMEA), propylene glycol decyl ether, propylene glycol propyl ether, Cerium-based cellosolve acetate, ethyl cellosolve acetate, diethylene glycol methyl acetate, diethylene glycol ethyl acetate, acetone, mercaptoisobutyl ketone, cyclohexanone , · Amidoxime (DMF), N,N-dimercaptoacetic acid amine (dmac), N-mercapto-2-l-burnone (NMP), γ-butyrolactone, diethyl ether, B Diethylene dimercapto-, diethylene glycol dimethyl (dilyme), tetrahydrofuran (THF), methanol, ethanol, isopropanol, thiol cellosolve, ethyl cellosolve, diacetyl At least one of the group consisting of alcohol hydrazino group, diethylene glycol ethyl ether, mono propylene monopropyl methyl ether, methyl benzoate, monomethyl benzene, hexanol, gamma, and octyl. The invention will be described in detail as follows. However, the particular embodiments of the present invention are intended to be illustrative, and are intended to be illustrative only. And retouching. AMM1 According to the composition and content of Table 1, an adhesive resin and a pentaerythritol hexa/pentaacrylate as a polyfunctional monomer were added to a reactor equipped with a υν filter and a stirring gas. Next, Irgacure 369 is added as a photoinitiator, (3_glycidoxypropyl) diethyl lactyl (ethoxy), and 1 to 3 wt% of an additive, such as a well-known photosensitizer, heat. Polymerization inhibitor, antifoaming agent and leveling agent (the total solid content of the resin resin is 16 1296739 Y, whereby the negative photoresist composition for the organic insulator is used for clothing. Then, the negative photoresist composition is stirred at room temperature. Next, a solvent is added to the composition towel so that the yield is 15 centipoise (cps). - In the specific example 1, the adhesive resin is represented by a chemical formula (丨. to (1_νι), where X and Y1 Both are methyl groups, and γ2 are each of Chemical Formulas 1 to (vi) (wherein and 2 are methyl groups). AM Examples 2 to 2 5 In addition to changing the types of the compositions according to Tables 1 and 2 In addition, the negative photoresist composition was produced in the same manner as in the specific example 1. The upper layer was compared with the examples 1 to 4 except that the adhesive resin of the formula 4 was used instead of the adhesive resin of the formula 1, and according to Table 3 In addition to changing the type and content of the composition, the negative photoresist composition is produced in the same manner as in the specific example. . ≪ Formula 4 >

17 1296739 其中P為〇·3,q為〇·2,且r為0.5。 表117 1296739 where P is 〇·3, q is 〇·2, and r is 0.5. Table 1

於表中通式1之黏著劑樹脂具平均分子量為似⑻、多The adhesive resin of the formula 1 in the table has an average molecular weight of (8), more

分散度為2.5及酸值為綱;且通式2之黏著劑樹脂具平均分子量 為20,000、多分散度為2.5及酸值為11()。 18 1296739 表2The dispersity was 2.5 and the acid value was the same; and the adhesive resin of the formula 2 had an average molecular weight of 20,000, a polydispersity of 2.5, and an acid value of 11 (). 18 1296739 Table 2

具 體 例 黏著獅旨_) 多官能單 體(w(%) 石夕_匕^#^/〇) 光引發劑 (wt%) 添加劑 (wt%) 溶齊 18 通式1-Π(5) 通式2(15) (Sty/LMA/MMA) 二季戊四 醇六/五丙 斓纖20) och3 H3CO-Si-OCH3 (ch2)?nh(ch2)3nh2 IRGACU RE369 (2) 矽酮基底 的表面活 性劑 一縮二乙 二醇二甲 基乙:¾¾ 19 赋 1-IV(5) 通式2(15) (IXPBO/HEMAMMA ) \w, 'Vw* *^/〇' *4& (0.03) (0.03) (至 100) 20 献 1-V(5) 通式2(15) (Sty/OMA/MMA) 21 it^l-VI(5) 通式2(15) (DCPMA/GMA/MMA) 22 赋 1·Π(5) 赋 2(20) (BMA/ACAMi/MMA) 23 赋1删 通式2(15) (Sty/HEMA/MMA) 24 通式1-V(5) 通式2(15) (BZMA/GMA/MMA) 25 ϋ^1ΛΊ(5) 通式2(15) (DCPMA/GMA/MMA) —~-—— 、多 子量 於表2中,通式1之黏者劑樹脂具平均分子量為I〗〇⑻ 分散度為2.5及酸值為110 ;且通式2之黏著劑樹脂具平均分 為10,000、多分散度為2·5及酸值為1〇〇。 表3 光引發劑 (wt%)Specific examples of adhesive lion _) multi-functional monomer (w (%) Shi Xi _ 匕 ^ # ^ / 〇) photoinitiator (wt%) additive (wt%) dissolved Qi 1 -1 (5) pass Formula 2 (15) (Sty/LMA/MMA) Dipentaerythritol hexa/f-propene fluorene 20) och3 H3CO-Si-OCH3 (ch2)?nh(ch2)3nh2 IRGACU RE369 (2) Acetone-based surfactant 1 Diethylene glycol dimethyl b: 3⁄43⁄4 19 Assign 1-IV(5) Formula 2(15) (IXPBO/HEMAMMA ) \w, 'Vw* *^/〇' *4& (0.03) (0.03) (to 100) 20 offer 1-V(5) Formula 2 (15) (Sty/OMA/MMA) 21 it^l-VI(5) Formula 2 (15) (DCPMA/GMA/MMA) 22 Assign 1 ·Π(5) Assign 2(20) (BMA/ACAMi/MMA) 23 Assign 1 to 2(15) (Sty/HEMA/MMA) 24 Formula 1-V(5) Formula 2(15) ( BZMA/GMA/MMA) 25 ϋ^1ΛΊ(5) Formula 2(15) (DCPMA/GMA/MMA) —~-—— Multi-component in Table 2, the adhesive resin of Formula 1 has an average The molecular weight is I 〇 (8), the degree of dispersion is 2.5, and the acid value is 110; and the adhesive resin of the formula 2 has an average of 10,000, a polydispersity of 2.5, and an acid value of 1 Å. Table 3 Photoinitiator (wt%)

比 黏著劑樹脂 多官能單 較 (wt%) 體(wt%) 石夕 19 1296739 例 ----- """------ ------- 1 赋 4(20) 二季戊四 醇六/五丙 _鏡 (20) och3 H3C〇-Si-OCH3 (CH2)2NH(CH2)3NH2 (0.03) IRGACU RE369 (2) 矽酮基底 的表面活 性劑 (0.03) 一縮二乙二 醇二曱基乙 (至 100)) 2 赋4(24) 3 ii^4(20) 4 赋 4(24) ------- ——--- 於表3中,通式4之黏著劑樹脂具平均分子量為2Q,⑽〇、多 分散度為2.5及酸值為11G ;且通式2之黏著劑樹脂具平均分子量 為105000、多分散度為2.5及酸值為10〇。 根據此等具體例及比較例之負光阻組成物之評估係於基板 (例如石夕晶_玻璃基板)上進行。如下測試組成物之熱性質、透光 度(T% ’於400宅微采)、均勻度、腹你^士、玄 一 "J胰保知率及圖案顯成。結果顯 示於表4及5中。 熱性質More than a single adhesive (wt%) of the adhesive resin (wt%) Shi Xi 19 1296739 Example ----- """------ ------- 1 Fu 4 ( 20) Dipentaerythritol hexa/f-propyl _ mirror (20) och3 H3C〇-Si-OCH3 (CH2)2NH(CH2)3NH2 (0.03) IRGACU RE369 (2) Anthrone-based surfactant (0.03) 1-2 Glycol dimercaptoethyl (to 100)) 2 4(24) 3 ii^4(20) 4 Fu 4(24) ------- ——--- In Table 3, Formula 4 The adhesive resin has an average molecular weight of 2Q, (10) 〇, a polydispersity of 2.5, and an acid value of 11 G; and the adhesive resin of Formula 2 has an average molecular weight of 105,000, a polydispersity of 2.5, and an acid value of 10 Å. The evaluation of the negative photoresist composition according to these specific examples and comparative examples was carried out on a substrate (e.g., a Shih-jing glass substrate). The thermal properties and transmittance of the composition (T% 'in 400 house micro-mining), uniformity, and abdomen of yours, Xuanyi "J pancreas preservation rate and pattern display were tested as follows. The results are shown in Tables 4 and 5. Thermal property

以旋轉式塗佈機(以每分鐘800轉,8秒鐘)將負光阻組成余 佈於基板上,於赋下觀烤!分鐘,於365毫微米下曝光 秒,並且於職下後烘烤30分鐘,俾形成光阻層。接著,崩 形成之光阻層叙射辦,並且在靴下熟成〗分鐘。以^ Hatch Cutt咐硝線_綱破在勤辦熟成之試片,以便 出基板,用黏合膠布結合’且接著移除。偽若们〇〇個單元中 8〇個未自基板移除,則代表「佳」,否則為「不佳」。 20 •1296739 (2) UV透光度 以旋轉式塗佈機(以每分鐘800轉,8秒鐘)將負光阻組成物塗 佈於基板上,於l〇〇t:下預烘烤1分鐘,使用2.38% TMAH溶液 减影60秒’以DI水沖洗,以加壓空氣吹動,並且於22〇。〇下後烘 烤30分鐘。因此,形成約3.5〜4·0微米之光阻層。測量在400毫 微米下之UV透光度。 (3) 膜保留率 將負光阻組成物旋轉塗佈於基板上。分別地測量經由預烘烤 及後烘烤所形成之層間的厚度比(%)。 (4) 圖案形成 顯微鏡自圖案之斷面方向觀察 於55。,且厚度未減少,則代表 (居度減少)表示。 沿著孔圖案之軸取出形成負光阻圖案之石夕晶圓,並且以電子The negative photoresist is made up on the substrate by a rotary coater (800 rpm, 8 seconds), and it is baked! In minutes, it was exposed at 365 nm for two seconds, and after baking for 30 minutes, it formed a photoresist layer. Then, the photo-resist layer formed by the collapse is described, and it is cooked for a minute under the boot. The H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H H If 8 of the units are not removed from the substrate, it means "good", otherwise it is "poor". 20 • 1296739 (2) UV transmittance The negative photoresist composition is applied to the substrate by a rotary coater (800 rpm, 8 seconds) and pre-baked at l〇〇t: Minutes, subtraction with 2.38% TMAH solution for 60 seconds 'washed with DI water, blown with pressurized air, and at 22 Torr. Bake for 30 minutes after simmering. Therefore, a photoresist layer of about 3.5 to 4.0 μm is formed. The UV transmittance at 400 nm was measured. (3) Film retention ratio The negative photoresist composition was spin-coated on a substrate. The thickness ratio (%) between the layers formed by prebaking and postbaking was separately measured. (4) Pattern formation The microscope is observed at 55 in the cross-section of the pattern. And if the thickness is not reduced, it means (reduced decrease). Taking out the stone wafer forming the negative photoresist pattern along the axis of the hole pattern, and taking the electron

句觀祭。倘若圖案内壁與基板間之角度大 則代表「佳」。倘若厚度減少,則以rTR (5)耐化學性 以無旋轉式塗佈機將負光阻組成物塗佈於基板上, ,預烘烤且The sentence is a sacrifice. If the angle between the inner wall of the pattern and the substrate is large, it means "good". If the thickness is reduced, the negative photoresist composition is applied to the substrate by rTR (5) chemical resistance without a spin coater, pre-baked and

接著後烘烤 離劑及钱刻 1296739 度之任何變化。倘若無透光度及厚度變化,則代表「佳」,否則為 「不佳」。 表4 具體 例 黏附性 UV透光度 (400nm) (%) 膜保留率 (%) 圖案化 耐化學 性 1 佳 98 90 佳 佳 2 佳 98 90 佳 佳 3 佳 96 90 佳 佳 4 佳 96 90 佳 佳 5 佳 97 90 佳 佳 6 佳 97 90 佳 佳 7 佳 96 88 佳 佳 8 佳 96 89 佳 佳 9 佳 97 89 佳 佳 10 佳 97 90 佳 佳 11 佳 97 88 佳 佳 12 佳 97 87 佳 佳 13 佳 97 87 佳 佳 14 佳 97 88 佳 佳 15 佳 97 89 佳 佳 16 佳 97 89 佳 佳 17 佳 98 89 佳 佳 18 佳 96 89 佳 佳 19 佳 98 90 佳 佳 20 佳 97 90 佳 佳 21 佳 97 90 佳 佳 22 佳 96 90 佳 佳 23 佳 96 89 佳 佳 24 佳 96 89 佳 佳Then post-baking the agent and the money engraved any change of 1296739 degrees. If there is no change in light transmittance and thickness, it means "good", otherwise it is "poor". Table 4 Specific examples Adhesive UV transmittance (400nm) (%) Membrane retention (%) Patterned chemical resistance 1 Good 98 90 Jia Jia 2 Jia 98 90 Jia Jia 3 Jia 96 90 Jia Jia 4 Jia 96 90 Best Jia 5 Jia 97 90 Jia Jia 6 Jia 97 90 Jia Jia 7 Jia 96 88 Jia Jia 8 Jia 96 89 Jia Jia 9 Jia 97 89 Jia Jia 10 Jia 97 90 Jia Jia 11 Jia 97 88 Jia Jia 12 Jia 97 87 Jia Jia 13 Good 97 87 Jia Jia 14 Jia 97 88 Jia Jia 15 Jia 97 89 Jia Jia 16 Jia 97 89 Jia Jia 17 Jia 98 89 Jia Jia 18 Jia 96 89 Jia Jia 19 Jia 98 90 Jia Jia 20 Jia 97 90 Jia Jia 21 Jia 97 90 Jia Jia 22 Jia 96 90 Jia Jia 23 Jia 96 89 Jia Jia 24 Jia 96 89 Jia Jia

22 129673922 1296739

ϋϋ

如上述,本㈣之負光隨成物顯示㈣金屬及無機材料: 良好的黏附性、UV透光度、膜保留率、均句度及圖案穩定性,^ 及良好的耐熱性(與習知的光阻組成物不同)。 產業應用性 、,如上述,當形成有機絕緣體時,本發明之負光阻組成物顯示 出對金屬及無機材料之良好的黏附性、υν透光度、膜保留率、均 勻度及圖案穩定性,以及良好的耐熱性。再者,由於透光度高於 光阻故可控制为光之免度,藉以提高電池效率且使受到色度 是異之影響減至最少。再者,經由在本發明範_改變黏著劑樹 脂之結構及組成比例,本發明之負光阻組成物可形成具特殊物理 1 生質之有機絕緣體。 本發明已詳細地說明如上。然而,應瞭解詳細說明及同時代 表本發明車父佳具體例之特殊實施例係僅供說明之用,因為熟習此技 23 1296739 藝者,自本詳細說明,當可明白在本發明精神及範圍内之許多變化 及潤飾。 【圖式簡單說明】 圖1為顯示具有高開口率之習用的TFT-LCD之單元的平面圖。 圖2為沿著圖1之ΙΙ-ΙΓ線所取之斷面圖。 【主要元件符號說明】 2 ··閘極線 2a :閘極 4 :儲存電極線 4a :儲存電極 6:半導體層 8 :資料線 9a :汲極 9b :源極 10 :有機絕緣體 12 :像素電極 20 :底部基板 24As described above, the negative light accompanying product of (4) shows (4) metal and inorganic materials: good adhesion, UV transmittance, film retention, uniformity and pattern stability, and good heat resistance (and conventional knowledge) The composition of the photoresist is different). Industrial Applicability, as described above, when forming an organic insulator, the negative photoresist composition of the present invention exhibits good adhesion to metal and inorganic materials, υν transmittance, film retention, uniformity, and pattern stability. And good heat resistance. Furthermore, since the transmittance is higher than that of the photoresist, it can be controlled to be light-free, thereby improving the efficiency of the battery and minimizing the influence of chromaticity. Further, the negative photoresist composition of the present invention can form an organic insulator having a special physical property by changing the structure and composition ratio of the adhesive resin in the present invention. The invention has been described in detail above. However, it should be understood that the detailed description and the specific embodiments of the present invention are intended to be illustrative only, as those skilled in the art, as described in the Detailed Description, from the Detailed Description, Many changes and refinements within. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a unit of a conventional TFT-LCD having a high aperture ratio. Figure 2 is a cross-sectional view taken along line ΙΙ-ΙΓ of Figure 1. [Description of main component symbols] 2 · Gate line 2a: Gate 4: Storage electrode line 4a: Storage electrode 6: Semiconductor layer 8: Data line 9a: Gate 9b: Source 10: Organic insulator 12: Pixel electrode 20 : bottom substrate 24

Claims (1)

1296739 十、申請專利範圍: 種用於南開口峯该見顧7F益之右撼、·ί·73 .1296739 X. The scope of application for patents: The species used for the Nankou Peak, the right to see the 7F benefits, · ί·73. 蚀以及一汲極電極,其中該光阻層係涂 、X师一組成為 5〜4〇重量份選自由具以下通式1結構之黏著劑樹脂、具以下通 式2結構之黏著劑樹脂及其混合物組成之群之黏著_樹月匕· 2〜200重量份具不飽和脂族基團之多官能單體;及〇 〇〇5〜2〇重 i份之光引發劑之負光阻所形成; <通式1> X y yAnd a photoresist electrode, wherein the photoresist layer is coated, and the X group is 5 to 4 parts by weight, and is selected from the group consisting of an adhesive resin having the structure of the following formula 1, an adhesive resin having the structure of the following formula 2, and Adhesive group consisting of a mixture of 2 to 200 parts by weight of a polyfunctional monomer having an unsaturated aliphatic group; and a negative photoresist of 5 to 2 parts by weight of a photoinitiator Formed; <Formula 1> X yy 其中X為氫原子或曱基,γι為具有1至16個碳原子之烷基或 經烧基’且Y2係選自由具有以下化學式(I)至(XX)結構之化合 物組成之群;Wherein X is a hydrogen atom or a fluorenyl group, γι is an alkyl group having 1 to 16 carbon atoms or a burned group and Y 2 is selected from the group consisting of compounds having the following chemical formulas (I) to (XX); (I) 25 1296739 ch2J-co-o(I) 25 1296739 ch2J-co-o ch2=c-co-o-r2-Ch2=c-co-o-r2- ch2JWb,ch2JWb, QH2=C—C〇—0R2,QH2=C—C〇—0R2, chJ-co-L,chJ-co-L, R4 CH2=C—CO—N_R2—O-Rr V、0H ChHR4 CH2=C—CO—N_R2—O-Rr V, 0H ChH CH2J1-C0-0-R2-0-(C0-R2-0)K-CC>-S:CH2J1-C0-0-R2-0-(C0-R2-0)K-CC>-S: r5 R2 一o一 (C〇-R3—0}k-CCK~N (Π)(瓜) (IV) (V) (VI)(W) 01) (K) (X) (XI) (ΧΠ) (ΧΙΠ) ?1 ^ CH2==C一CO—0—R2一0一(CO—R2—0)k—CO一N r5R5 R2 一o一(C〇-R3—0}k-CCK~N (Π)(瓜) (IV) (V) (VI)(W) 01) (K) (X) (XI) (ΧΠ) (ΧΙΠ) ?1 ^ CH2==C_CO—0—R2—0—(CO—R2—0)k—CO—N r5 -R2—0-(C0-R3-0)k-C0-N R4 26 (XIV) (XV) 1296Ί39-R2—0-(C0-R3-0)k-C0-N R4 26 (XIV) (XV) 1296Ί39 -o-oh2 Hi-o-oh2 Hi (XVI) CH^^C-CO—CKRj Hi(XVI) CH^^C-CO-CKRj Hi CH2-0—GOCH2-0—GO OH (XVH) GHg5^—CO~〇〜OH (XVH) GHg5^—CO~〇~ ^ch2— 、ch2—cTc (xvm)^ch2— , ch2—cTc (xvm) OH (XIX) chJ-c〇-OH (XIX) chJ-c〇- —CH2, 。一 ch/—CH2, . a ch/ OH (XX) 其中Ri為氳原子或甲基,r2為具有 、 至1〇個奴原子之伸烧基, 私為/、有1至1〇個碳原子气二 s 1A 工^為虱原子或甲基,私為 ,、有1G個碳原子之烴,且k為整數〇至1(); <通式2>OH (XX) wherein Ri is a ruthenium atom or a methyl group, and r2 is an extended alkyl group having from 1 to 1 slave atom, and is privately owned, having 1 to 1 carbon atom, 2 s 1A, or a ruthenium atom or Methyl, private, a hydrocarbon having 1 G carbon atoms, and k is an integer 〇 to 1 (); <Formula 2> 重$夂單兀A係自由甲基丙烯酸_、苯乙稀、…曱基苯乙 稀丙烯酉义異冰片酉旨及曱基丙烯酸異冰片醋、丙稀酸二環戍 酉曰曱基丙烯酉夂一%戊酉旨、丙稀酸二環戊稀醋、甲基丙稀酸二 27 1296739 環戊烯酯、丙卸酸二環戊基乙氧基酯、甲基丙烯酸二環戊基乙 氧基酯、丙烯酸二環戊烯基乙氧基酯及甲基丙烯酸二環戊浠基 乙氧基酯組成之群,B係選自由甲基丙烯酸縮水甘油酯、甲基 丙烯酸羥乙酯、二甲基胺基甲基丙烯酸酯及丙烯醯胺組成之 群’且C為丙烯酸或曱基丙烯酸,其中具通式2結構之黏著劑 樹脂含有不論A、B及C順序之無規共聚物; 步驟二··提供一曝光步驟,以利用一紫外光透過一光罩照 射該光阻層; 步驟二·提供-顯影步驟,以去除曝光後之該光阻層以形 成一接觸孔;以及 步驟四:α加溫的方式使該具有接觸孔之光阻層硬化,以 形成一有機絕緣體。夂 夂 兀 兀 系 系 系 自由 自由 、 、 、 、 、 、 、 、 、 、 、 自由 自由 自由 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱 曱夂1% 酉, propyl dicyclopentan acetate, methyl acrylate 2 27 1296739 cyclopentenyl ester, dicyclopentyl ethoxylate propionate, dicyclopentyl ethoxy methacrylate a group consisting of a base ester, dicyclopentenyl ethoxylate acrylate and dicyclopentanyl ethoxy methacrylate, and B is selected from the group consisting of glycidyl methacrylate, hydroxyethyl methacrylate, and dimethyl a group consisting of arylamino methacrylate and acrylamide and C is acrylic acid or methacrylic acid, wherein the adhesive resin having the structure of Formula 2 contains random copolymers in the order of A, B and C; Step 2 Providing an exposure step for illuminating the photoresist layer with a UV light through a mask; Step 2: providing a development step to remove the exposed photoresist layer to form a contact hole; and Step 4: α Heating means to harden the photoresist layer with contact holes to form an organic Edge of the body. 10〜400 ΚΟΗ毫克/克之酸值。 t用於高開口率液晶顯示 ’其中具通式1結構之黏著劑 L量、1·0〜5.0之多分散度及Acid value of 10~400 ΚΟΗmg/g. t for high aperture ratio liquid crystal display 'the amount of the adhesive L having the structure of the general formula 1, the dispersion of 1·0~5.0 and 15〜400 ΚΟΗ毫克/克之酸值。 於高開口率液晶顯示 ’其中具通式2結構之黏著劑 F量、1.0〜5·0之多分散度及 4·如申請專利範圍第1項所述 之用於高開口率液晶顯示 1296739 器之有機絕緣體之成型方法,其中含有不飽和脂族基團之 夕吕旎單體包含至少一選自由以下組成之群之化合物: 經由多元醇與α,β_不飽和羧酸之酯化反應而製得之化合 物’其係選自由乙二醇二(甲基)丙烯酸酯、具有2至14個氧化 · 乙烯基團之聚乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(曱基) · 丙烯酉文g曰、二起甲基丙烧三(甲基)丙稀酸酯、季戊四醇三(甲基) 丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、具有2至14個氧化丙 烯基團之丙一醇一(甲基)丙稀酸酯、二季戊四醇五(甲基)丙烯酸鲁 酯、二季戊四醇六(甲基)丙烯酸酯及二季戊四醇三(曱基)丙烯酸 酯組成之群; 經由加成(曱基)丙烯酸於具有縮水甘油基基團之化合物而 製得之化合物,其係選自由三羥甲基丙烷三縮水甘油基醚丙烯 酸加合物及雙酚A二縮水甘油基醚丙烯酸加合物組成之群; 聚羧酸或聚異氰酸酯與具有羥基基團及不飽和脂族基團之 化合物的加合物之酯化合物,其係選自由(甲基)丙烯酸p羥乙酯 % 與(甲基)丙烯酸β-羥乙酯的曱苯二異氰酸酯加合物之酸二酯 組成之群;及 (甲基)丙烯酸烷酯,其係選自由(甲基)丙烯酸甲酯、(甲基) 丙缔酉欠乙酯、(甲基)丙卸酸丁S旨、(曱基)丙稀酸2-乙基己g旨等組 成之群。 5·如申請專利範圍第1項所述之用於高開口率液晶顯示 29 1296739 為之有機絶緣體之成型方法,其中該負光阻更進—步包 ^ 3重塁知之含環氧或胺基團之石夕酮化合物。 6.如申請專利範圍第5項所述之㈣高開Π率液晶顯示 器之有機絕緣體之成型方法,其中含魏或胺基團之石夕酮 化合物包含選自由(3'缩水甘油氧基丙基)三甲氧基石夕烧、(3_縮 尺甘油氧土丙基)一乙氧基石夕烧、(3、縮水甘油氧基丙基)甲基二 甲乳基魏、(3-縮水甘油氧基丙基)甲基二乙氧基石夕炫、㈣ 水甘油氧基丙基)二?基以基魏、㈣水甘油氧基丙基)二鲁 甲基乙氧基梦垸、3,4_環氧基丁基三甲氧基石夕烧、3,4_環氧基丁 基三乙氧基魏、2_(3,4_環氧基環己基)乙基三甲氧基魏、 2-(3,4-環氧基環己基)乙基三乙氧基魏及胺基丙基三甲氧基 石夕烧組成之群中之至少一者。 7·如申請專利範圍第㈣所述之用於高開口率液晶顯示 器之有機絕緣體之成型方法,其中該負光阻更進一步包 含一溶劑,以使得黏度為2〜30釐泊(cps)。 · 8·如申明專利範圍第7項所述之用於高開口率液晶顯 示為之有機絕緣體之成型方法,其中該溶劑包含選自由醋 酸乙酯、醋酸丁酯、一縮二乙二醇二甲基醚、一縮二乙二醇二 曱基乙基醚、丙酸曱基甲氧基酯、丙酸乙基乙氧基酯(EEP)、乳 酸乙酯、丙二醇曱基醚醋酸酯(PGMEA)、丙二醇甲基醚、丙二 醇丙基鱗、曱基溶纖劑醋酸酯、乙基溶纖劑醋酸酯、一縮二乙 30 1296739 二醇曱基醋酸酯、一縮二乙二醇乙基醋酸酯、丙酮、曱基異丁 基酮、環己酮、二甲基甲醯胺(DMF)、N,N-二曱基乙醯胺 (DMAc)、N-甲基-2_ 咯烷酮(NMP)、γ-丁内酯、二乙醚、乙二 醇二甲基醚、二乙二醇二甲醚(diglyme)、四氳喃(THF)、曱醇、 乙醇、異丙醇、曱基溶纖劑、乙基溶纖劑、一縮二乙二醇甲基 醚、一縮二乙二醇乙基醚、一縮二丙二醇曱基醚、甲苯、二曱 苯、己烷、庚烷及辛烷組成之群中之至少一者。 ,1296739 七、指定代表圖: (一) 本案指定代表圖為:第( )圖。 (二) 本代表圖之元件符號簡單說明: 本發明無指定代表圖,故無元件符號 八、本案若有化學式時,請揭示最能顯示發明特徵的化學式:15~400 ΚΟΗmg/g acid value. In the high aperture ratio liquid crystal display, the amount of the adhesive F having the structure of the general formula 2, the dispersion degree of 1.0 to 5.0·0, and the high-opening ratio liquid crystal display 1296739 as described in the first application of the patent scope A method for molding an organic insulator, wherein the oxime monomer containing an unsaturated aliphatic group comprises at least one compound selected from the group consisting of: esterification reaction of a polyol with an α,β-unsaturated carboxylic acid The compound obtained is selected from the group consisting of ethylene glycol di(meth)acrylate, polyethylene glycol di(meth)acrylate having 2 to 14 oxidized vinyl groups, and trimethylolpropane bis (曱 )) · propylene 曰 曰 曰 二, two methyl propyl tris (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, with 2 to 14 oxidation a group of propylene groups such as propanol mono(methyl) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa(meth) acrylate, and dipentaerythritol tris(decyl) acrylate ; via addition (fluorenyl) acrylic acid with glycidol a compound prepared from a compound of a group selected from the group consisting of trimethylolpropane triglycidyl ether acrylic acid adduct and bisphenol A diglycidyl ether acrylic acid adduct; polycarboxylic acid or An ester compound of an adduct of a polyisocyanate with a compound having a hydroxyl group and an unsaturated aliphatic group, which is selected from the group consisting of p-hydroxyethyl (meth)acrylate and β-hydroxyethyl (meth)acrylate. a group of acid diesters of an indane diisocyanate adduct; and an alkyl (meth)acrylate selected from the group consisting of methyl (meth)acrylate, ethyl (meth)acrylate, ethyl (meth) A group consisting of propyl succinate, (2-mercapto) acrylic acid 2-ethylhexyl. 5. The method for forming an organic insulator according to the high-opening rate liquid crystal display 29 1296739 as described in claim 1, wherein the negative photoresist further comprises an epoxy or an amine. a group of oxacin compounds. 6. The method for molding an organic insulator of a (4) high open ratio liquid crystal display according to claim 5, wherein the derivative containing a Wei or an amine group comprises a compound selected from the group consisting of (3' glycidoxypropyl group) Trimethoxy zebra, (3_scale glycerol oxypropyl) monoethoxy zebra, (3, glycidoxypropyl) methyl dimethyl milyl, (3-glycidoxy propyl Methyl diethoxy stone Xi Xuan, (iv) glycidoxypropyl) two? Base group Wei, (iv) glycidoxypropyl) dimethylene ethoxylated nightmare, 3,4_epoxy butyl trimethoxy sulphur, 3,4_epoxy butyl triethoxy Kewei, 2_(3,4-epoxycyclohexyl)ethyltrimethoxywei, 2-(3,4-epoxycyclohexyl)ethyltriethoxywei and aminopropyltrimethoxysilane At least one of the group consisting of annihilation. 7. The method of forming an organic insulator for a high aperture ratio liquid crystal display according to the fourth aspect of the invention, wherein the negative photoresist further comprises a solvent such that the viscosity is 2 to 30 centipoise (cps). 8. The method for molding an organic insulator having a high aperture ratio liquid crystal display according to claim 7, wherein the solvent comprises a solvent selected from the group consisting of ethyl acetate, butyl acetate, and diethylene glycol diethylene glycol. Ether, diethylene glycol didecyl ethyl ether, decyl methoxy propionate, ethyl ethoxy propionate (EEP), ethyl lactate, propylene glycol decyl ether acetate (PGMEA) , propylene glycol methyl ether, propylene glycol propyl scale, thiol cellosolve acetate, ethyl cellosolve acetate, diethylene glycol 30 1296739 diol thioglycolate, diethylene glycol ethyl acetate , acetone, mercaptoisobutyl ketone, cyclohexanone, dimethylformamide (DMF), N,N-dimercaptoacetamide (DMAc), N-methyl-2-pyrrolidone (NMP) , γ-butyrolactone, diethyl ether, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether (diglyme), tetrafuran (THF), decyl alcohol, ethanol, isopropanol, thiol-based cellosolve , ethyl cellosolve, diethylene glycol methyl ether, diethylene glycol ethyl ether, dipropylene glycol decyl ether, toluene, diphenyl, hexane, heptane and octane In the group At least one. , 1296739 VII. Designated representative map: (1) The representative representative of the case is: ( ). (2) Brief description of the symbol of the representative figure: The invention has no designated representative figure, so there is no component symbol. 8. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: 〇-CH2'CH 〇-CH2/〇-CH2'CH 〇-CH2/ (XX)(XX)
TW93115693A 2004-06-01 2004-06-01 Method for forming an organic insulator of high aperture tft lcd TWI296739B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93115693A TWI296739B (en) 2004-06-01 2004-06-01 Method for forming an organic insulator of high aperture tft lcd

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93115693A TWI296739B (en) 2004-06-01 2004-06-01 Method for forming an organic insulator of high aperture tft lcd

Publications (2)

Publication Number Publication Date
TW200540567A TW200540567A (en) 2005-12-16
TWI296739B true TWI296739B (en) 2008-05-11

Family

ID=45068857

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93115693A TWI296739B (en) 2004-06-01 2004-06-01 Method for forming an organic insulator of high aperture tft lcd

Country Status (1)

Country Link
TW (1) TWI296739B (en)

Also Published As

Publication number Publication date
TW200540567A (en) 2005-12-16

Similar Documents

Publication Publication Date Title
CN101196688B (en) Photosensitive resin composition and spacer for liquid crystal panel
TWI771907B (en) Photosensitive siloxane composition and method for forming cured film
JP2011039165A (en) Alkali-soluble photocurable composition, cured coating film using the composition and transparent member
JP2007225802A (en) Photosensitive resin composition
KR101279098B1 (en) Photoresist composition for liquid crystal display organic film, spinless coating method thereof, fabrication method of organic film pattern and liquid crystal display fabricated by the same
CN107111232A (en) Black matrix" photo-corrosion-resisting agent composition for liquid crystal display panel
CN101571672A (en) Negative light-sensitive resin combination
JP2011081302A (en) Photosensitive resin composition and its application
JP2017181976A (en) Photosensitive resin composition for light-shielding film, substrate for display including light-shielding film formed by curing the photosensitive resin composition, and method for manufacturing substrate for display
CN104718498A (en) Process for producing permanent film for optical material, cured film produced thereby, and organic EL display device and liquid-crystal display device each obtained using said cured film
JP5691657B2 (en) Photosensitive resin composition and use thereof
KR100684365B1 (en) Method for forming organic insulator of high aperture TFT-LCD using negative resist composition
CN101025567A (en) Radiation-sensitive resin composition, method for forming spacer and spacer
TWI296739B (en) Method for forming an organic insulator of high aperture tft lcd
CN105223775A (en) The manufacture method of curable adhensive compositions, cured film, cured film and touch-screen and display device
KR100579832B1 (en) Photo Resist Composition For Spinless Coating
JP5884551B2 (en) Photosensitive resin composition and use thereof
JP5637024B2 (en) Photosensitive resin composition and use thereof
CN105278246A (en) Hardened composition, hardened film manufacturing method, harden film, touch screen and display device
KR101041310B1 (en) Photosensitive resin composition
JP5659896B2 (en) Photosensitive resin composition and use thereof
KR20040032468A (en) Resist Composition For Organic Insulator of High Aperture LCD
KR100367471B1 (en) Resist Composition For Over-Coat
CN115236939A (en) Positive photoresist composition for organic insulating film of high-aperture-ratio liquid crystal display element
KR20220091736A (en) Fluorinated acrylate-based copolymer and photosensitive resin composition comprising same