•1295488 九、發明說明： 【發明所屬之技術領域】 本案係關於一種測試裝置，尤指一種拉線、球剪 力與晶片剪力等測量之重複性與再現性測試裝置。 【先前技術】 除了覆晶封裝（FC，flip-chip)外，大部分的其他封 裝’例如小登置封裝（S〇p，small outline package)、 超薄璺置封裝（TSOP，thin small outline package)、四 邊引腳封裝（QFP，quad flat package)與可塑性球閘陣 列封裝（PBGA)等都需要應用到打線（wire-b〇nding)操 作。為確e忍封裝體之品質與可靠度（reliability)，拉線 (WP，wire-pull)與晶片剪力（DS，die shear)測試成為 必要之步驟。此外，對球附著型封裝而言，例如可塑 性球閘陣列封裝（PBGA)與覆晶封裝（FC),球剪力（BS， ball shear)測試對所有封裝業者而言亦是製程中所必 須使用之測試步驟。以下將對目前業界所應用之拉線 測試（WP，wire_pUll)與球剪力測試（BS，ball shear)等 做一代表性之簡略敘述。 請參閱第一圖’其係為習知之拉線測試（WP)示意 圖。拉線測試（WP)係為一量測接合（1?〇11(1)品質之指 才不’其主要疋用以測試於垂直方向之接合強度 (strength of the bond)或計算接合強度分布（b〇nd strength distributions)。拉線測試（wp)可應用至藉由• 1295488 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a test apparatus, and more particularly to a repeatability and reproducibility test apparatus for measuring the tension of a wire, a ball shear force, and a wafer shear force. [Prior Art] In addition to flip chip (FC, flip-chip), most other packages, such as small outline package (S〇p, small outline package), ultra-thin package (TSOP, thin small outline package) ), quad flat package (QFP, quad flat package) and plastic ball grid array package (PBGA) need to be applied to wire-b〇nding operation. In order to ensure the quality and reliability of the package, WP (wire-pull) and wafer shear (DS) testing are necessary steps. In addition, for ball-attach-type packages, such as plastic ball grid array package (PBGA) and flip chip package (FC), ball shear (BS) test is also necessary for all packagers to use in the process. Test procedure. The following is a brief description of the cable test (WP, wire_pUll) and ball shear test (BS, ball shear) used in the industry. Please refer to the first figure, which is a schematic diagram of the conventional cable test (WP). The pull-wire test (WP) is a measure of joint (1?〇11(1) quality refers to 'the main flaw' is used to test the strength of the bond in the vertical direction or calculate the joint strength distribution ( B〇nd strength distributions). The pull test (wp) can be applied to
If* 錫（soldering)熱壓缩（thermocompression)、超音If* tinseling (thermocompression), supersonic
V 1295488 ' 波（ultrasonic)或其他相關技術所接合之線對晶片接 合（wire-t〇_die bond)、線對基板接合（wire_t〇,bstrate) 或線對微電子裝置封裝體内之鉛銲接合，其亦可應於 微電子虞置封裝體外部之接合測試，例如終端對基板 (terminals_to-substrate)…等。如第一圖所示，拉線測 試（WP)係藉由一卡勾裝置11提供一適當且特定之垂 直應力於接合（bond)、鉛線（lead Wire)或終端 (terminals)等處，以量測接合強度，進而可以瞭解到 封裝成品之品質與可靠度。 明參閱弟一圖，其係為一習知之球剪力（bs)測試 示思圖。球男力（BS)測試亦為一量測接合（b〇nd)品質 之心彳示’其係用以量測球接合（ball b〇n(j)或契型接合 (wedge bond)與一晶片接合表面（die b〇nding surfa(J) 間之接合強度，亦即水平方向之接合強度。球剪力（BS) 測試所得之接合強度可表示金屬接合健全與否以及 鋁打線（aluminum wire bonds)至晶片或封裝接合表面 之接合品質。如第二圖所示，球剪力（BS)測試係先將 待測試樣品夾固於一樣品固定裝置上，再藉由一剪力 提供裝置21提供一適當之水平方向剪力於球接合 (ball bond)處使其脫離銲墊（b〇nd pad)，以量測出球接 合與銲墊間之接合強度，藉此可進一步瞭解到封裝成 品之品質與可靠度。 、 然而，上述測試對被測試之樣品而言都具有破壞 性，如此將使重複性與再現性（R&R，repeatability and reproducibility)研究更為困難。重複性與再現性（r&r) 係為一指標，代表一測試裝置於絕對相同之測試條件 Ί295488 下以相同之部分或樣品重複測試後之結果差異程 度。重複性研究之目的係為決定該量測裝置之内在變 異疋否於一可接受範圍或於一短時間内穩定。 重複性研究必須於一很短時間内以同一樣品測試多 次，然而上述之測試對被測試之樣品而言都具有破壞 性，因而使重複性研究變得更困難。於每次校正後， 重複性與再現性（R&R)研究是用來確定校正無誤之 必要報告。目前，所有之封裝業者都很簡略地對不同 線做拉線測試（WP)之重複性研究，如此將導致偏差， f為並非每一條線都是相同的，且沒有人可以證明這 的的變異是可以接受的。因此，這樣的模擬是錯誤 差k如線與線之差異很大時，可能會有更大的誤 【發明内容】 以克Ιϋϋ目的為提供—種簡單之測試卫具設計 見服別述錯誤模擬之缺失。 拉線本球案I 力再;二的九提供-種新穎之測試工具，使 可藉由本案之二/力測量之重複性與再現性研究 (wire bond)上逸彳-2 ▲具進行，且取代於真實打線 (例如測試之樣:):；;=，二此可節省許多成本 本案之另-目的、例如製作樣品之時間）。 剪力測量之重複性斑為五提供*：種拉線、球剪力與晶片 擇適當之規格與磁^現性測試工具設計，可藉由選 野大小，而使拉線等測試之重複性 1295488 與再現性研究得以應帛至更廣之校正範圍。 於案之又一目的為提供一種測試裝置，其係應用 =線、球剪力與晶片剪力測量之重複性與再現性測 1 *，其中該拉線、球剪力與晶片剪力測量係藉由一 :一提供裝置進行。該測試裝置包括：一底座，其具 支撐桿；一手臂，其係可軸轉地固定於該支撐桿 ;以及一磁力產生襞置，其係設置於該底座，用以 一^一+可調變之磁力，俾以提供一拉力拉引該手臂之 知藉以，忒應力提供裝置得提供一應力於該手臂 =一特定位置，使該手臂之該端脫離該磁力產生裝 置。 一根據本案之構想，其中該測試裝置更包括一彈性 兀件，其係設置於該底座相對於該磁力產生裝置之位 置上，。以於該手臂脫離該磁力產生裝置之拉力時，提 供一彈性恢復力以緩衝該手臂之衝擊。 口根據本案之構想，其中該測試裝置更包括一連接 器，用以連接該手臂與該支撐桿，俾使該手臂得以於 X與γ軸方向軸轉於該支撐桿。 、根據本案之構想，其中該磁力產生裝置係藉由其 電流之變化以提供該可調變之磁力。 •根據本案之構想，其中該測試裝置更包括複數個 刻度，其係形成於該手臂上，用以提供不同之校正 圍。 罕 根據本案之構想，其中該特定位置係為該複數個 刻度其中之一。 1295488 根據本案之構想，其中每一該刻度具有一中空 峰。 二呵匕 根據本案之構想，其中每一該刻度於其底 一凹陷刻度。 -匁 本案之又一目的為提供一種拉線、球剪力與晶片 剪力測量之重複性與再現性測試裝置，其中該拉線、 求艾力與曰曰片男力測量係藉由一應力提供裝置進 ^丁。該^試裝置包括：一底座，其具有一支撐桿；一手 臂^其係可軸轉地固定於該支撐桿上；至少一刻度， 其係形成於該手臂上，用以供該應力提供裝置施一應 力；以及一磁力產生裝置，其係設置於該底座，用二 一 J調變之磁力，俾以提供一拉力拉引該手臂之 • 鳊。藉以，於該應力裝置所施該應力時，使該手臂 之6亥脫離该磁力產生裝置。 本案之又一目的為提供一種重複性與再現性測試 裝置，其係應用於拉線、球剪力與晶片剪力測量中。 該重複性與再現性測試裝置包括：一應力提供裝置， 7以提供一拉線測試之應力；一底座，其具有一支撐 桿；一手臂，其係可軸轉地固定於該支撐桿上；以及至 少一刻度，其係形成於該手臂上，用以供該應力提供 裝置施一應力；以&_磁力產生裝置，其係設置於該 底座，用以產生一可調變之磁力，俾以提供一拉力拉 引該手臂之一端。藉以，於該應力裝置所施該應力 時’使該手臂之該端脫離該磁力產生裝置。 根據本案之構想，其中該應力提供裝置係為一卡勾裝 1295488 置或一剪力提供裝置 【實施方式】V 1295488 'Wire-to-die bond, wire-to-battery bonding, or lead-to-wire soldering in wire-to-microelectronic device packages bonded by ultrasonic or other related technology It can also be applied to the bonding test outside the microelectronics package, such as terminals_to-substrate. As shown in the first figure, the pull test (WP) provides a suitable and specific vertical stress to a bond, lead wire, or terminal by a hook device 11. Measuring the joint strength, in turn, can understand the quality and reliability of the packaged product. See the picture of the younger brother, which is a conventional ball shear (bs) test chart. The ball male force (BS) test is also a measure of the quality of the joint (b〇nd) quality. It is used to measure the ball joint (ball b〇n (j) or wedge bond (wedge bond) and one The bonding strength between the die bonding surfaces (die b〇nding surfa (J), that is, the bonding strength in the horizontal direction. The bonding strength obtained by the ball shear force (BS) test can indicate whether the metal bonding is sound or not and the aluminum wire bonds. The bonding quality to the wafer or package bonding surface. As shown in the second figure, the ball shear (BS) test first clamps the sample to be tested on a sample fixture and is provided by a shear providing device 21. A suitable horizontal direction shear force is applied to the ball bond from the bond pad to measure the bonding strength between the ball bond and the pad, thereby further understanding the packaged finished product. Quality and reliability. However, the above tests are destructive to the sample being tested, which will make R&R, repeatability and reproducibility research more difficult. Repeatability and reproducibility ( r&r) is an indicator that represents The extent to which the test device repeats the test with the same portion or sample under the same test conditions Ί 295 488. The purpose of the repeatability study is to determine whether the internal variation of the measuring device is within an acceptable range or short Stable in time. Repeatability studies must be tested multiple times on the same sample in a very short period of time, however the above tests are destructive to the sample being tested, making repetitive research more difficult. After calibration, the Repetitiveness and Reproducibility (R&R) study is used to determine the correctness of the correct report. Currently, all packaging companies are simply doing repetitive studies of different lines of wire testing (WP). Will result in bias, f is not every line is the same, and no one can prove that the variation is acceptable. Therefore, such a simulation is the error difference k, such as when the line and the line are very different, may There is a bigger mistake [invention content] for the purpose of providing a simple test fixture design to see the lack of miscalculation. Pull the ball case I force The second nine provides a novel test tool that can be performed by the second/force measurement repeatability and reproducibility of the wire bond on the 彳-2 ▲, and replaced by the actual wire (for example, testing) The sample:):;;=, two can save a lot of costs in this case - the purpose, such as the time to make the sample.) The repetitive plaque of the shear force measurement is provided for five: * pull wire, ball shear and wafer selection Appropriate specifications and magnetic test tool design can be used to select the field size, so that the test repeatability 1295488 and reproducibility studies can be applied to a wider range of calibration. A further object of the present invention is to provide a test apparatus which is a method for measuring the repeatability and reproducibility of a wire, ball shear force and wafer shear force measurement, wherein the wire, ball shear force and wafer shear force measurement system It is carried out by a one: one providing device. The test device comprises: a base having a support rod; an arm pivotally fixed to the support rod; and a magnetic force generating device disposed on the base for being adjustable The magnetic force is changed to provide a pulling force to pull the arm, and the stress providing means provides a stress to the arm = a specific position to disengage the end of the arm from the magnetic force generating means. According to the concept of the present invention, the test apparatus further includes an elastic member disposed at a position of the base relative to the magnetic force generating device. When the arm is disengaged from the tension of the magnetic force generating device, an elastic restoring force is provided to cushion the impact of the arm. According to the concept of the present invention, the test apparatus further includes a connector for connecting the arm and the support rod to enable the arm to pivot to the support rod in the X and γ axis directions. According to the concept of the present invention, the magnetic force generating device provides the adjustable magnetic force by a change in its current. • According to the concept of the present case, wherein the test device further includes a plurality of scales formed on the arm to provide different corrections. According to the concept of the present case, the specific position is one of the plurality of scales. 1295488 According to the concept of the present invention, each of the scales has a hollow peak. Second, according to the concept of the case, each of the scales has a concave scale at the bottom. - Another object of the present invention is to provide a repeatability and reproducibility test device for wire, ball shear and wafer shear force measurement, wherein the pull wire, the Ai Li and the mandrel force measurement are performed by a stress Provide a device to enter. The test device includes: a base having a support rod; an arm pivotally fixed to the support rod; at least one scale formed on the arm for the stress providing device And a magnetic force generating device, which is disposed on the base, and uses a magnetic force of the two-one J to provide a pulling force to pull the arm of the arm. Therefore, when the stress is applied by the stress device, the arm is released from the magnetic force generating device. A further object of the present invention is to provide a repeatability and reproducibility test apparatus for use in wire drawing, ball shear force and wafer shear force measurement. The repeatability and reproducibility testing device includes: a stress providing device 7 to provide a stress for a pull test; a base having a support rod; and an arm pivotally fixed to the support rod; And at least one scale formed on the arm for applying a stress to the stress providing device; and a magnetic generating device disposed on the base for generating a variable magnetic force, To provide a pull to pull one end of the arm. Thereby, the end of the arm is disengaged from the magnetic force generating means when the stress is applied by the stress device. According to the concept of the present invention, the stress providing device is a hook device 1295488 or a shear force providing device.
請气閱第三圖，其係為本案較 =力=片剪力測量之重複性與再現性測SL 意圖。如第三圖所示，本案之測試裝置係: 底座3卜-磁力產生裝置32、一手臂 度3 4所έθ # 咕 穿3與複數個刻 度34所組成。如弟三圖所示，該 底座31之一主擋护0 丁 係《又置於該 於XI 且可藉由一連接器％而 承受來自X盥γ方6夕士 Θ斗 逆接為36可以 產味一/\ 置。該磁力產生裝置32可 產决駐，用以提供一磁力於該手臂33。該磁力 磁力ΐΐρ32Λ磁場係可視實際需要而調整，因此該 可隨需要而變化。刻度34係設置 ί之；：該刻度34具有-中空駿峰亦或於該每一刻 具有一凹陷刻度（未圖示）。該底座Μ上另 二Ϊ:弹* 37 ’其係相對於該磁力產生裝置32。 :生；罟：、當Γ手臂因外部剪力或拉力而克服磁力 突然軸轉之衝擊。、一無力以降低手臂33 之磁"^案之實施例中，對拉線測試而言，使用較小 2Π可；然而對球剪力與晶片剪力測試而言，則 而要使用較大之磁場。 性鱼V閱第四，圖⑷’其係為纟案較佳實施例之重複 〃現性測试裝置應用於一拉線測試之結構示意 11 I295488 =。如第四圖（a)所示，於進行拉線測量之重複性與 *現性研究時，先將拉線測試所使用之卡勾穿置 ΐΐΠ33上之一特定刻度之中空駝峰亦或接觸該 徂疋刻度底面之凹陷刻度，而磁力產生裝置32可 二固定且適當之向下拉力以利拉線測試之進扞。A :2置41所施拉之力量使該手臂33脫離該： ^力時，即可得到-相對應之接合強度值。重 即可於相同之條件得到一組測試數值，進而6_ ^線測量之重複性與再現性研究，如此可避免對^ 生破壞所導致之重複性與再現性研究困難。’ °Π 化H之刻度34設計係為提供校正所f之範圍變 固定磁力產生裝置32所產生之磁；圍二 二人^線接合強度介於⑽與F/Lh 擇 =丄至:力置/上之刻度以校正拉線量測系統巧 甲ίΜ糸為磁力產生裝置 、 U與Lh係分別為位置置:】：=^方向磁力， 離”由重複性定義可之至離連接器36之距 須於很短之睹門Γ了 於進仃重複性研究時，必 異。、 a几成。因此可忽略磁場大小之變 降第Γ圖⑻’其係為本案較佳實施例之重禮 性與再現性測試裝置應用於一球剪:2複 fi:再：Ϊ:，所示，於進行球應力測量：S 性與再現性研究時，可藉由 巧複 提供裝置42提供—剪 f $摘使用之男力 而磁力產生裝置32可提供 3上之一特定刻度， 以利球剪力測試之進Pt：；固定且適當之向内拉力 之進仃。當剪力提供裝置42所施之 12 .1295488 剪力使該手臂33脫離該磁場向内拉力時 之接合強度值。重複多次後，即可於相：: 之重複性與再現性研究困避難免對樣°°產生破壞所導致 誤槿本案包括—簡單之設計以克服習知錯 ㈣擬之缺失，且重複性與再現性研究可藉， ’取代於真實打線(wireb〇nd)上進;亍破 =測忒’因此可節省許多成本(例如，測試之 例如製作樣品之時間)。本案之設計可藉由; 之規格與磁場大小，而使拉線㈣試之重複= 與再現性研究得以制至更廣之校正_。 =，本案更具有下述新穎與進步之種種優點： 1. 3力產生裝置係可藉由其電流之變化而調整磁 二因此藉由本案之測試裝置，可同時提供不同 口 k之應力於拉線、球剪力與晶片剪力測量。 因為通常拉線測試所需之應力小 片剪力測試。 尺y刀興日日 2.Please read the third picture, which is the comparison of the resilience and reproducibility of the SL force measurement. As shown in the third figure, the test device of the present invention is composed of a base 3 - a magnetic force generating device 32, an arm 3 4 έ θ # 咕 3 and a plurality of scales 34. As shown in the third figure of the brother, one of the bases 31 is mainly placed in the XI and can be subjected to the reverse of the X盥γ square by a connector. Taste one / \ set. The magnetic force generating device 32 can be used to provide a magnetic force to the arm 33. The magnetic force ΐΐρ32Λ magnetic field can be adjusted according to actual needs, so this can be changed as needed. The scale 34 is provided with ί;; the scale 34 has a hollow peak or a recessed scale (not shown) at each moment. The base is mounted on the other side: the bullet * 37 ' is relative to the magnetic force generating means 32. : 生;罟: When the arm is subjected to external shear or tension, it overcomes the sudden impact of the magnetic force. In the embodiment where the forcelessness of the arm 33 is reduced, the smaller one is used for the cable test; however, for the ball shear force and the wafer shear test, the larger one is used. The magnetic field. Sex fish V is the fourth, and Figure (4)' is a repetitive embodiment of the preferred embodiment. The structure of the test device is applied to a cable test. 11 I295488 =. As shown in the fourth figure (a), when performing the repeatability and *research of the cable measurement, the card used in the cable test is first hooked to the hollow hump of a specific scale on the ΐΐΠ33 or the contact is The concave scale of the bottom surface of the 徂疋 mark, and the magnetic force generating device 32 can be fixed and appropriately pulled downward to facilitate the test of the pull line test. A: 2 sets the force of the applied force to disengage the arm 33 from the force: when the force is applied, the corresponding joint strength value is obtained. By weight, a set of test values can be obtained under the same conditions, and the repeatability and reproducibility of the 6-^ line measurement can be studied, so that it is difficult to study the repetitiveness and reproducibility caused by the damage. The scale of the '° H H is designed to provide the magnetic field generated by the fixed magnetic force generating device 32. The joint strength of the surrounding two-two people is between (10) and F/Lh. The upper scale is used to correct the cable measurement system. The magnetic force generating device, U and Lh are respectively positioned: [::=^ direction magnetic force, from "reproducibility can be defined to the connector 36" The distance from the short-term threshold is different from that of the repetitive study. It is a few. Therefore, the magnitude of the magnetic field can be neglected. Figure 8 (8) is the key to the preferred embodiment of this case. The sex and reproducibility test device is applied to a ball shear: 2 complex fi: again: Ϊ:, shown in the measurement of the ball stress: S-sex and reproducibility study, can be provided by the device 42 The male force-generating device 32 can provide a specific scale on the 3rd for the ball shear test to enter the Pt: fixed and appropriate inward pull force. When the shear force providing device 42 applies 12.1295488 Shear force causes the arm 33 to break away from the value of the joint strength when the magnetic field is pulled inward. After repeated times, The reproducibility and reproducibility of the phase:: can be inevitably caused by the damage caused by the sample. The case includes a simple design to overcome the shortcomings of the misunderstanding (4), and the reproducibility and reproducibility study can be Borrow, 'replace the wireb〇nd up; smash = test 忒' so it can save a lot of cost (for example, the time of testing, for example, the sample is made). The design of this case can be used; specifications and magnetic field size And let the pull (4) test repeat = and the reproducibility study can be made to a wider correction _. =, the case has the following novel and advanced advantages: 1. 3 force generating device can be used by its current The magnetic two is adjusted by the change. Therefore, the test device of the present invention can simultaneously provide the stress of the different port k on the pull wire, the ball shear force and the wafer shear force measurement, because the stress chip shear test required for the pull wire test is usually used. Knife Hing Day 2.
置可得拉線、球剪力與晶片剪力測 里之取佳权擬。 3.本案之測試裝置可同時提供拉線、球剪力盥曰 剪力測量之重複性與再現性報告。 /、Ba 本案實具產業之價值，爰依法提出申讀。 本案發明得由熟習此技藝之人士任施匠思而 般修飾’然皆不脫如附申請專利範圍所欲保；者、？ 13 1295488 【圓式的簡單說明】 第圖·其係為習知之拉線測試示意圖。 ，一圖·其係為習知之球剪力測試示意圖。 第丁圖·其係為本案較佳實施例之拉線、球剪力與晶 ^剪力測1之重複性與再現性測試裝置結構示意圖。 第四圖（a) ·其係為本案較佳實 與再現 性測試裝置應用於-拉線賴之結構示意圖。 【主要元件符號說明】 卡勾裝置11 底座3 1 手臂33 支撐桿35 彈簧37 剪力提供裝置42 剪力提供裝置21 磁力產生裝置32 刻度34 連接器36 卡勾裝置41It is recommended to take the cable, the ball shear force and the wafer shear force. 3. The test device of this case can provide the reproducibility and reproducibility report of the pull wire, ball shear force and shear force measurement. /, Ba This case has the value of the industry, and it is submitted in accordance with the law. The invention of this case can be modified by the people who are familiar with the art, and it is not necessary to protect the scope of the patent application; 13 1295488 [Simple description of the round shape] The figure is a schematic diagram of the conventional cable drawing test. , Figure 1 is a schematic diagram of the ball shear test of the conventional. The first diagram is a schematic diagram of the structure of the repeatability and reproducibility test device for the pull wire, ball shear force and crystal shear force measurement 1 of the preferred embodiment of the present invention. The fourth figure (a) is a schematic diagram of the structure of the better and reproducible test device applied to the cable. [Description of main component symbols] Hook device 11 Base 3 1 Arm 33 Support bar 35 Spring 37 Shear supply device 42 Shear supply device 21 Magnetic force generating device 32 Scale 34 Connector 36 Hook device 41