TWI294514B - - Google Patents

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Publication number
TWI294514B
TWI294514B TW95127208A TW95127208A TWI294514B TW I294514 B TWI294514 B TW I294514B TW 95127208 A TW95127208 A TW 95127208A TW 95127208 A TW95127208 A TW 95127208A TW I294514 B TWI294514 B TW I294514B
Authority
TW
Taiwan
Prior art keywords
sound
acoustic
frequency band
band
analysis
Prior art date
Application number
TW95127208A
Other languages
English (en)
Chinese (zh)
Other versions
TW200718927A (en
Inventor
Toshiyuki Matsumoto
Naoki Ikeuchi
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200718927A publication Critical patent/TW200718927A/zh
Application granted granted Critical
Publication of TWI294514B publication Critical patent/TWI294514B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G01H3/08—Analysing frequencies present in complex vibrations, e.g. comparing harmonics present

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
TW095127208A 2005-08-18 2006-07-26 Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method TW200718927A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005237884A JP2007051952A (ja) 2005-08-18 2005-08-18 音響センサ装置，音響解析診断装置および音響センサの製造方法

Publications (2)

Publication Number Publication Date
TW200718927A TW200718927A (en) 2007-05-16
TWI294514B true TWI294514B (ja) 2008-03-11

Family

ID=37757433

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095127208A TW200718927A (en) 2005-08-18 2006-07-26 Acoustic sensor device, acoustic analysis diagnosis device, and acoustic analysis diagnosis device manufacturing method

Country Status (3)

Country Link
JP (1) JP2007051952A (ja)
TW (1) TW200718927A (ja)
WO (1) WO2007020767A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10594874B2 (en) 2016-01-15 2020-03-17 Ricoh Company, Ltd. Malfunction determining apparatus, malfunction determining system, malfunction determining method, and recording medium
JP6798265B2 (ja) * 2016-01-15 2020-12-09 株式会社リコー 異常判定装置、異常判定システム及び異常判定方法
JP2018179626A (ja) * 2017-04-07 2018-11-15 新日本無線株式会社 超音波受信器
JP7467317B2 (ja) 2020-11-12 2024-04-15 株式会社東芝 音響検査装置及び音響検査方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10157257A (ja) * 1996-11-22 1998-06-16 Xerox Corp 故障検出用振動センサ及び該センサ付きプリンタシステム
JP3248452B2 (ja) * 1997-05-26 2002-01-21 住友金属工業株式会社 音響センサ
JP3374775B2 (ja) * 1999-01-12 2003-02-10 住友金属工業株式会社 振動波センサ
JP2003075284A (ja) * 2001-08-31 2003-03-12 Daikin Ind Ltd 漏れ検査方法
JP2004020484A (ja) * 2002-06-19 2004-01-22 Yamatake Corp 異常監視装置および異常監視プログラム
JP3867057B2 (ja) * 2003-02-20 2007-01-10 三井造船株式会社 音響センサアレイ、音響診断装置及び音響診断方法

Also Published As

Publication number Publication date
JP2007051952A (ja) 2007-03-01
WO2007020767A1 (ja) 2007-02-22
TW200718927A (en) 2007-05-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees