•1293939 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種光罩盒搬運車，尤指一種車架 支撐板上具有傳動裝置之光罩盒搬運車。 【先前技術】 目前市面上之習用光罩盒搬運車，其存取光罩 __堆高機之存取物品方式相同’即必須將光罩盒搬運車 之板托架完全伸入光罩盒存放架内，再上下升降橫托牟之 H)尚度’使光罩盒脫離搬運車之橫托架而置放於存放架上、 或將光罩盒從存放架上取出而置放於光罩盒搬運車之棒托 架上。光罩盒在上述之存取過程中，光罩盒搬運車之橫托 架須完全伸入存放架内，且須上下升降，而一般光罩盒存 放架内之光罩盒皆緊鄰置放’俾節省空間，因此若光罩各 15搬運車與存放架之定位有些許偏差，則光罩盒搬運車之^ » ㈣在伸人存放架之操作過程中，橫托㈣會碰撞存放架 内之光罩盒，而光罩之價格高昂，且又很脆弱，因此橫托 架若些微碰撞光罩盒，便會損毀存放其内之光罩，造成龐 大之財力損失。 2〇 再者，縱使光罩盒搬運車與光罩盒存放架之定位沒有 偏差’完全正確定位，但當光罩盒搬運車之橫托架在存放 杀内上下水平升降之操作過程中，橫托架仍可能上昇、或 下降之水平高度過大，因而碰撞存放架内之光罩盒，也會 損毀存放其内之光罩，造成龎大之財力損失。 5 1293939 、U人4：因於此，本於積極發明之精神，亟思一種可 以解決上述問題之光罩盒搬運車，幾經研究實驗終至完成 此項嘉惠世人之本發明。 5 【發明内容】 本么明為種光罩盒搬運車，主要具有一車架體、一 /月塊、-固定板、-支撐板、—傳動裝置、及—驅動裝置。 -中車*體具有複數直m而滑塊則滑設於車架體 之直立滑軌上，並可作上下滑移，滑塊並具有一向前延伸 1〇之橫托架。又固定板係固設於橫托架上，而支撑板之後端 則樞。又於固疋板之前端，且支撐板並跨架於橫托架上。另 驅動裝置則提供-旋轉動力至傳動裝置，而傳動裝置具有 :平行之傳動軸、及一傳動帶，並組設於支撐板上，傳動 π則、％、、’呈一傳動軸之間以傳遞一旋轉動力，且二傳動軸之 15 二端分別組設有一傳動輪。 藉此，本發明利用組設於橫托架上之支撐板上之傳動 裝置來W後輸送光罩盒，因此在存取光罩盒之操作過程 中:支撐板不須完全伸入光罩盒存放架内，1樓板也不須 上幵、或下降，可改善習用光罩盒搬運車之橫托架常會碰 20 撞存放架内光罩盒之缺失。 上述之驅動裝置具有一驅動馬達、及一驅動皮帶，且 。傳動軸其中之一同轴設置有一驅動輪，驅動皮帶係繞經 驅動馬達及驅動輪之間，#以傳遞旋轉動力。#此，驅動 1置可提供一旋轉動力至支撐板上之傳動裝置。 •1293939 再者，本發明更可設有_前監視器、—後監視器、及 顯不咨，耵監視器係固設於支撐板之前端，可監控光罩 1存放*與光單盒搬運車之相關位置，而後監視器係固設 於滑塊上，可監控光罩盒之存取動態。另顯示器則固設於 5車架體後端，俾顯示前監視器、及後監視器之取景，可實 際顯示光罩盒之存取操作過程，藉以隨時修正存取過程，、 俾避免务生光罩盒搬運車碰撞損毁光罩盒之情形。 _ 此外，本發明更可設有一上移防撞器、一下移防撞器、 及一警示燈，上移防撞器係固設於支撐板前端之上方，而 ⑺下移防撞器係固設於支撐板前端之下方，另警示燈則固設 於該車架體後端。當上移防撞器、或下移防撞器碰撞任何 $體4，警7F燈會顯示表示危險之紅色燈號，表示支撐板 前端已碰撞異物，當然車架體上也可設蜂鳴器，也可達到 同樣之警示功效。 15 另外，本發明更可設有二前擋板、二後擋板、及複數 個滾輪，二前擋板係分別固設於支撐板之二側，二後擋板 •=分別固設於固定板之二側，而該等滾輪則分別樞設於二 前擋板、及二後擋板之内側，俾可供光罩盒在該等滚輪上 滑移。 20 再者，本發明更可設有至少一前支架、及至少一感應 =，前支架係固設於車架體底部，而感應器則對應固設於 前支架之前端上，該等感應器須碰觸光罩盒存放架之定位 座，光罩盒搬運車與光罩盒存放架方為確實定位，車架體 7 1293939 j之，示燈並會顯示表示綠色之安全燈號，俾表示光罩各 搬運車與光罩盒存放架已確實定位。 ^ ❿ 15 此外二本發明更可設有至少一限制機構，其係固設於 "芽反之刖&兩側上’當光罩盒置放於支撐板時，可限制 光罩盒不會往前滑動。另光罩盒存放架上則對應設有至少 一f制機構，當光軍盒搬運車與光罩盒存放架定位後，光 罩皿存放木上之壓制機構洽可壓制支撐板上之限制機構， 使光罩盒不受限制機構限制，可於支撐板上滑移。 另外’本發明更可設有一高度偵肖器、及一前後價測 器，高度偵測器、及前後摘測器皆固設於支撑板之前端側 緣上。另光罩盒存放架上則對應設有一感應器，其係採光 線遮蔽原理’也可採用其他等效之定位感應技術，當光罩 益搬運車與光罩盒存放架之上下水平高度、及光罩盒搬運 車之前行位移確實定位，車架體上之警示燈會顯示表示安 全之綠色燈號，表示光罩盒搬運車與光罩盒存放架兩者已 確實定位。 • 再者，本發明更可設有一前光感知器、及一後光感知 器’前光感知器係固設於支撐板之略前端上，而後光感知 器係固設於固定板之略後端上，其係採光線遮蔽原理，當 20 光線被遮蔽，表示光罩盒置放其上，可偵測光罩盒於支揮 板上之滑移輸送過程中之確實位置。 【實施方式】 1293939 ::h閱圖i、圖2、及圖3所示之本發明一較佳實施 =之立體®、橫托架放大圖、及與光罩盒存放架之立體圖。 本發明光罩盒搬運車具有一車架體1〇、-滑塊20、一固定 板30、-支撐板4〇、一傳動裝置53、及一驅動裝置51。其 5中車*體10具有二直立滑執11…顯示器12、-警示燈 U、二前支架15、二感應器16、二車輪18、及二手把19二 如圖3所不’顯不器12係固設於車架體1〇後端，可顯示前監 視器4卜及後監視器14(其組設位置容待下述）之取景，可顯 不光罩盒70之實際存取操作動態，藉以隨時修正操作存取 1〇過程，俾避免發生光罩盒搬運車碰撞損毁光罩盒70之情 形。而警示燈13係固設於車架體1〇後端，當上移防撞器“、 或下移防撞益43(其組設位置容待下述）碰撞任何物體時，警 不燈13會顯示表示紅色之危險燈號，表示支撐板40已碰撞 異物。又二車輪18係固設於車架體10之底部上，而二手把 15 19則固設於車架體10後端，藉由車輪18、及手把19可輕易 移動光罩盒搬運車。另上述之前支架15係固設於車架體1〇 底部上，感應器16則對應固設於前支架15之前端上，當感 應器16碰觸光罩盒存放架6〇(其詳細結構容待下述）之定位 座61表示光罩盒搬運車與光罩盒存放架60為前後確實定 20位，此時車架體10上之警示燈13並會顯示表示安全之綠色 燈號，藉以表示光罩盒搬運車與光罩盒存放架6〇已確實前 後定位。 此外，如圖1所示，上述之滑塊2〇係滑設於車架體1〇之 直立滑執11上，並可作上下滑移，滑塊2〇則具有一向前延 1293939 伸之橫托架21、及一後監視器14，後監視器14係固設於滑 塊20前端，可監控光罩盒70之存取動態，並顯示於車架體 10之顯示器12上。 另外，如圖2所示，上述之固定板30係固設於滑塊20之 5 橫托架21上，固定板30並具有一前端301、二後擋板34、八 滾輪35、及一後光感知器38，後擋板34係分別固設於固定 板30之二側，而八滾輪35則分別對應樞設於後擋板34之内 側，俾可提供光罩盒70於其上滑移。另後光感知器38係固 設於固定板30略後端上，其係採光線遮蔽原理，當光線被 10 光罩盒70遮蔽，表示光罩盒70置放其上。藉此，可偵測光 罩盒70於存取過程中之確實位置。 再者，如圖2所示，上述之支撐板40係跨架於橫托架21 上，並具有一前端401、一後端402、一上移防撞器42、一 下移防撞器43、一前監視器41、二限制機構441，442、一高 15 度偵測器46、一前後偵測器47、一前光感知器48、二前擋 板49、及八滾輪45。其中，支撐板40之後端402係樞設於固 定板30之前端301上，前監視器41則固設於支撐板40之前端 401上，藉此，可監控光罩盒存放架60與光罩盒搬運車之相 關位置，並顯示於車架體10之顯示器12上，因此可隨時修 20 正操作存取過程，俾避免發生光罩盒搬運車碰撞損毁光罩 盒70之情形。又上移防撞器42、及下移防撞器43係分別固 設於支撐板40前端401之上方、及下方，當支撐板40向上、 或向下移動時，若上移防撞器42、或下移防撞器43碰撞任 何物體時，則會傳送一訊號至車架體10之警示燈13，警示 10 ⑤ 1293939 燈13則顯示表示紅色之危險燈號，表示支撐板40前端401已 碰撞異物。 此外，如圖2所示，上述支撐板40之限制機構441，442 係固設於支撐板40之前端401兩侧上，當光罩盒70置放於支 5 撐板40時，可限制光罩盒70不會往前滑動。又上述之高度 偵測器46、及前後偵測器47皆係固設於支撐板40之前端401 側緣上，其係與光罩盒存放架60(其詳細結構容待下述）搭配 使用，光罩盒存放架60上對應於高度偵測器46、及前後偵 • 測器47處設有一感應器64，其係採光線遮蔽原理，當光罩 10 盒搬運車與光罩盒存放架60之上下水平高度、及光罩盒搬 運車之前行位移確實定位，則車架體10上之警示燈13會顯 示表示綠色之安全燈號，表示光罩盒搬運車與光罩盒存放 架60已確實定位。另前光感知器48係固設於支撐板40之略 前端401上，其採光線遮蔽原理，當光線被光罩盒70遮蔽， 15 表示光罩盒70已置放其上。又，上述支撐板40之前擋板49 係分別固設於支撐板40之二側，而該等滾輪45則分別樞設 φ 於前擋板49之内側，可供光罩盒70在該等滾輪45上滑移。 另外，如圖2所示，上述之傳動裝置53係固設於支撐板 40上，傳動裝置53具有二平行之傳動軸541，542、以及一傳 20 動帶55，其係繞經二傳動軸541，542之間以傳遞一旋轉動力 R，二傳動軸541，542之二端分別組設有一傳動輪 531，532,533,534。又，上述之驅動裝置51係提供旋轉動力R 給傳動裝置53，驅動裝置5 1則具有一驅動馬達5 11、及一驅 動皮帶512,且二傳動軸541，542之其中之一同軸設置有一驅 ⑥ 1293939 動輪513，驅動皮帶512則繞經驅動馬達511、及驅動輪513 之間，藉以傳遞旋轉動力R。藉此，本發明利用組設於橫托 架21之支撐板40上之傳動裝置53來前後輸送光罩盒70，因 此在存取光罩盒70之操作過程中，支撐板40不須完全伸入 5 光罩盒存放架60内，支撐板40也不須上昇、或下降，可改 善習用光罩盒搬運車之橫托架21常會碰撞光罩盒存放架60 内光罩盒70之缺失。 請再同時參閱圖3、及圖4所示之本實施例與光罩盒存 放架之立體圖、及光罩盒存放架部分放大圖。本發明光罩 10 盒搬運車係搭配一光罩盒存放架60使用，本實施例之光罩 盒存放架60係具有4個區塊，每區塊有13層，亦即本實施例 之光罩盒存放架60共可存放52片光罩盒70,並設置有八個 過濾通風裝置72，藉以淨化空氣之顆粒。光罩盒存放架60 具有一定位座61、複數壓制機構62、複數軌道63、及複數 15 感應器64。其中，定位座61係固設於光罩盒存放架60之前 方，當車架體10底部之前支架15前端上之感應器16碰觸定 位座61時，表示光罩盒搬運車與光罩盒存放架60為確實定 位，此時車架體10上之警示燈13會顯示表示安全之綠色燈 號。 20 又如圖4所示，壓制機構62係固設於光罩盒存放架60之 前端二側，當光罩盒搬運車與光罩盒存放架60之上下水平 高度、及前行位移皆定位後，壓制機構62洽可壓制上述支 撐板40上之限制機構441，442，使光罩盒70不受限制機構 441，442之限制，可於支撐板40上滑移。另上述之執道63、 12 1293939 感應器64皆係固設於光罩盒存放架6〇二側，執道ο可供光 f盒70滑移置放其上，而感應器⑽搭配光罩盒搬運車之 尚度谓測器46、及前後偵測器47作為光罩盒搬運車之上下 水平高度、及前行位移之定位。藉此，本發明設有多重定 5位機制’可確保存取光罩盒7〇之操作過程中，不會碰撞光 罩盒存放架60内之光罩盒7〇。 請再同時參關5、圖6、及圖7所示之本實施例與光罩 f存放架之光罩盒存取前對位1位完成、及存取完成示 意圖。如圖5所示，光罩盒搬運車之車架體1〇底部上之前支 10架15之感應器16未與光罩盒存放架6〇之定位座61碰觸，表 示光罩盒搬運車並未與光罩盒存放架6〇定位，光罩盒川在 支撐板4G上係固定不動。如圖6所示，當前支架说感應器 16與定位座61碰觸時，才完成定位，此時方能藉由支撐板 40上之傳動裝置53來前後輸送光罩盒7〇。如圖7所示，光罩 15盒70已置放於光罩盒存放架6〇内，完成存取動作，本發明 在存取過程中，支撐板40.不須完全伸入光罩盒存放架6〇 内，支撐板40也不須上昇、或下降，可確實改善習用光罩 盒搬運車常會碰撞光罩盒存放架6〇内光罩盒7〇之缺失。 上述實施例僅係為了方便說明而舉例而已，本發明所 20主張之權利範圍自應以申請專利範圍所述為準，而非僅限 於上述實施例。 【圖式簡單說明】 圖1係本發明一較佳實施例之立體圖。 * 1293939 圖2係本發明一較佳實施例之橫托架放大圖。 圖3係本發日卜較佳實_與光罩盒麵架之立體圖。 圖4係本發明—較佳實施例之光罩盒存放架部分放大圖。 圖5係本發明-較佳實施例與光罩盒存放架之存取前對位 5 不意圖。 圖6係本發明一較佳實施例與光罩盒存放架之定位完成示 意圖。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reticle car, and more particularly to a hood car with a transmission on a frame support plate. [Prior Art] At present, the conventional photomask box truck on the market has the same access to the reticle __the stacker has the same access method, that is, the tray of the reticle carrier must be fully extended into the reticle box. In the storage rack, raise and lower the cross-hooks. H) Shangdu' Place the mask box on the storage rack from the horizontal bracket of the truck, or remove the mask box from the storage rack and place it in the light. On the stick bracket of the cover box truck. In the above-mentioned access process, the transverse bracket of the photomask box carrier must fully extend into the storage rack and must be lifted up and down, and the photomask boxes in the general photomask box storage rack are placed next to each other.俾Save space, so if there is a slight deviation between the positioning of each of the 15 lorries and the storage rack, then the hood box truck will be in the process of extending the storage rack, the cross (4) will collide with the storage rack. The reticle is expensive and fragile. Therefore, if the horizontal bracket slightly collides with the reticle, it will damage the reticle stored therein, causing huge financial losses. 2 〇 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The bracket may still rise, or the level of the drop is too large, so that colliding with the mask box in the storage rack may also damage the photomask stored therein, resulting in a large financial loss. 5 1293939, U-person 4: Because of this, in the spirit of active invention, I thought of a photomask box truck that can solve the above problems, and after several research experiments, I completed the invention of this company. 5 [Summary of the Invention] The present invention is a type of photomask box truck, which mainly has a frame body, a/month block, a fixed plate, a support plate, a transmission device, and a driving device. - The middle car* body has a plurality of straight meters, and the slider is slidably disposed on the upright slide rail of the frame body, and can be tilted up and down, and the slider has a horizontal bracket extending forwardly. Further, the fixed plate is fixed to the horizontal bracket, and the rear end of the support plate is pivoted. Also at the front end of the solid plate, and the support plate is spanned on the horizontal bracket. The other driving device provides - rotating power to the transmission device, and the transmission device has: a parallel transmission shaft, and a transmission belt, and is set on the support plate, and the transmission π, %, and 'between a transmission shaft to transmit A rotary power, and two transmission ends of the two transmission shafts are respectively provided with a transmission wheel. Accordingly, the present invention utilizes a transmission device disposed on a support plate on the horizontal bracket to transport the photomask case, so that during the operation of accessing the photomask case, the support plate does not have to completely extend into the photomask case. In the storage rack, the 1st floor board does not need to be lifted or lowered, and the horizontal bracket of the conventional mask box truck can be improved, and the missing mask box of the collision storage rack is often encountered. The above driving device has a driving motor and a driving belt, and. One of the drive shafts is coaxially provided with a drive wheel that drives the belt between the drive motor and the drive wheel to transmit rotational power. #此,Drive 1 provides a rotary power to the transmission on the support plate. • 1293939 In addition, the present invention can be provided with a front monitor, a rear monitor, and a display, and the monitor is fixed on the front end of the support plate, and can monitor the storage of the mask 1 and the light single box. The position of the car, and then the monitor is fixed on the slider to monitor the access dynamics of the reticle. The other display is fixed at the rear end of the 5 frame body, and the front view of the front monitor and the rear monitor is displayed, which can actually display the access operation process of the photomask case, thereby correcting the access process at any time, and avoiding the living. The case where the photomask box truck collides with the damaged mask box. In addition, the present invention can further be provided with an upshift bumper, a bumper bumper, and a warning light, the upshift bumper is fixed above the front end of the support plate, and (7) the down bumper is fixed. It is disposed below the front end of the support plate, and the warning light is fixed at the rear end of the frame body. When the upshift bumper or the downshift bumper collides with any body 4, the police 7F light will display a red light indicating danger, indicating that the front end of the support plate has collided with foreign objects, and of course, the buzzer can also be set on the frame body. The same warning effect can also be achieved. In addition, the present invention can further be provided with two front baffles, two rear baffles, and a plurality of rollers. The two front baffles are respectively fixed on two sides of the support plate, and the two rear baffles are fixed to the fixed ones respectively. The two sides of the plate are respectively pivoted on the inner side of the two front baffles and the two rear baffles, so that the photomask box can slide on the rollers. In addition, the present invention can further be provided with at least one front bracket and at least one sensing=, the front bracket is fixed on the bottom of the frame body, and the inductor is fixed on the front end of the front bracket, and the sensors are The positioning seat of the photomask box storage rack must be touched. The photomask box truck and the mask box storage rack are positioned correctly. The frame body 7 1293939 j, the indicator light will display the green safety light number, 俾The masks and the reticle storage racks are indeed positioned. ^ ❿ 15 In addition, the second invention can be provided with at least one restriction mechanism, which is fixed on the sides of the "buds on the opposite side&&&" Slide forward. In addition, at least one f-type mechanism is arranged on the photomask box storage rack. When the light box transporter and the photomask box storage rack are positioned, the pressing mechanism of the light-box storage wood can be pressed to restrain the limiting mechanism on the support board. , so that the reticle box is not restricted by the restriction mechanism and can slide on the support plate. In addition, the present invention can further be provided with a height detector and a front and rear price detector, and the height detector and the front and rear detectors are fixed on the front edge of the support plate. In addition, there is a sensor on the photomask box storage rack, which adopts the principle of light shielding. It can also adopt other equivalent positioning sensing technology, when the mask is used to transport the truck and the mask box storage rack. The displacement of the mask box truck is indeed positioned, and the warning light on the frame body displays a green light indicating safety, indicating that both the mask box truck and the mask box storage rack are properly positioned. In addition, the present invention can further be provided with a front light sensor and a rear light sensor. The front light sensor is fixed on the front end of the support plate, and the rear light sensor is fixed on the fixed plate. On the end, it adopts the principle of light shielding. When 20 rays are blocked, it means that the reticle box is placed on it, and the true position of the reticle box on the slewing plate of the slewing plate can be detected. [Embodiment] 1293939::H is a perspective view of a preferred embodiment of the present invention shown in FIG. 2, FIG. 2, and FIG. 3, a perspective view of the transverse bracket, and a storage frame with the mask case. The photomask case truck of the present invention has a frame body 1〇, a slider 20, a fixing plate 30, a support plate 4〇, a transmission unit 53, and a driving device 51. The 5 car body 10 has two upright slides 11... display 12, - warning light U, two front bracket 15, two sensors 16, two wheels 18, and second hand 19 two are not shown in Figure 3. The 12 series is fixed on the rear end of the frame body 1 , and can display the view of the front monitor 4 and the rear monitor 14 (the set position of which is to be described below), which can show the actual access operation dynamics of the photomask case 70 In order to correct the operation access 1 随时 process at any time, it is avoided that the reticle carrier truck collides and damages the reticle 70. The warning light 13 is fixed on the rear end of the frame body 1 and is not lighted when the upshift bumper ", or the downward movement anti-collision 43 (the set position is to be described below) collides with any object. A dangerous light indicating red is displayed, indicating that the support plate 40 has collided with the foreign object. The second wheel 18 is fixed on the bottom of the frame body 10, and the second-hand 15 19 is fixed to the rear end of the frame body 10, The photomask box truck can be easily moved by the wheel 18 and the handlebar 19. The front bracket 15 is fixed on the bottom of the frame body 1 and the sensor 16 is fixed on the front end of the front bracket 15 when The positioning seat 61 of the sensor 16 touching the reticle storage rack 6 〇 (the detailed structure of which is described below) indicates that the reticle handling vehicle and the reticle storage rack 60 are exactly 20 positions in front and rear, and the frame body at this time The warning light 13 on the 10 will display a green light indicating safety, thereby indicating that the photomask case transporter and the photomask case storage rack 6 are indeed positioned forward and backward. In addition, as shown in Fig. 1, the above slider 2〇 The slide is arranged on the upright slide 11 of the frame body 1 and can be tilted up and down, and the slider 2〇 has a forward extension of 1293939. The horizontal bracket 21 and the rear monitor 14 are fixed to the front end of the slider 20 to monitor the access dynamics of the mask case 70 and displayed on the display 12 of the frame body 10. As shown in FIG. 2, the fixing plate 30 is fixed on the five horizontal brackets 21 of the slider 20. The fixing plate 30 has a front end 301, two rear baffles 34, eight rollers 35, and a rear light perception. The damper 34 is respectively fixed on the two sides of the fixing plate 30, and the eight rollers 35 are respectively pivotally disposed on the inner side of the tailgate 34, and the cymbal box 70 can be provided to slide on the hood. The rear light sensor 38 is fixed on the slightly rear end of the fixing plate 30, and the light shielding principle is adopted. When the light is blocked by the 10 photomask 70, the photomask case 70 is placed thereon. The position of the reticle 70 in the access process is further. As shown in FIG. 2, the support plate 40 is spanned on the horizontal bracket 21 and has a front end 401, a rear end 402, and an upper portion. The shifting bumper 42, the shifting bumper 43, the front monitor 41, the second limiting mechanism 441, 442, a high 15 degree detector 46, a front and rear detector 47, and a front light sensing The front end 402 of the support plate 40 is pivotally disposed on the front end 301 of the fixed plate 30, and the front monitor 41 is fixed on the front end 401 of the support plate 40. Thereby, the position of the reticle storage rack 60 and the reticle handling vehicle can be monitored and displayed on the display 12 of the frame body 10, so that the access operation process can be repaired at any time, and the reticle housing can be avoided. When the truck collides with the damaged mask box 70, the upshift bumper 42 and the downshift bumper 43 are respectively fixed above and below the front end 401 of the support plate 40, when the support plate 40 is upward or downward. When moving down, if the up bumper 42 or the down bumper 43 collides with any object, a signal is sent to the warning light 13 of the frame body 10, and the warning 10 5 1293939 13 is displayed as red. The dangerous light number indicates that the front end 401 of the support plate 40 has collided with foreign matter. In addition, as shown in FIG. 2, the limiting mechanisms 441, 442 of the support plate 40 are fixed on both sides of the front end 401 of the support plate 40, and when the photomask case 70 is placed on the support 5, the light can be restricted. The cover case 70 does not slide forward. The height detector 46 and the front and rear detectors 47 are fixed on the side edge of the front end 401 of the support plate 40, and are used together with the photomask box storage rack 60 (the detailed structure of which is described below). The photomask box storage rack 60 is provided with a sensor 64 corresponding to the height detector 46 and the front and rear detector 47, which adopts the principle of light shielding, when the photomask 10 box truck and the mask box storage rack The upper and lower horizontal heights of 60 and the displacement of the mask box truck are indeed positioned, and the warning light 13 on the frame body 10 displays a safety light indicating green, indicating the mask box truck and the mask box storage rack 60. Has been positioned. The front light sensor 48 is fixed on the slightly front end 401 of the support plate 40, and the light is shielded. When the light is shielded by the photomask case 70, 15 indicates that the photomask case 70 has been placed thereon. Moreover, the front baffle 49 of the support plate 40 is respectively fixed on two sides of the support plate 40, and the rollers 45 are respectively pivoted φ on the inner side of the front baffle 49 for the photomask case 70 on the rollers. 45 on the slip. In addition, as shown in FIG. 2, the above-mentioned transmission device 53 is fixed on the support plate 40. The transmission device 53 has two parallel transmission shafts 541, 542 and a transmission belt 55 which is wound around the two transmission shafts. A rotational power R is transmitted between 541, 542, and two transmission shafts 531, 532, 533, 534 are respectively disposed at two ends of the two transmission shafts 541, 542. Moreover, the driving device 51 provides a rotational power R to the transmission device 53, the driving device 51 has a driving motor 51, and a driving belt 512, and one of the two transmission shafts 541, 542 is coaxially disposed with a drive. 6 1293939 The moving wheel 513 drives the belt 512 between the driving motor 511 and the driving wheel 513 to transmit the rotational power R. Accordingly, the present invention utilizes the transmission 53 disposed on the support plate 40 of the transverse bracket 21 to transport the photomask case 70 back and forth, so that the support plate 40 does not have to be fully extended during the operation of accessing the photomask case 70. In the 5 photomask box storage rack 60, the support panel 40 does not have to be raised or lowered, and the horizontal bracket 21 of the conventional photomask box carrier can often be prevented from colliding with the missing mask box 70 in the mask box storage rack 60. Please refer to the perspective view of the embodiment and the photomask storage rack shown in FIG. 3 and FIG. 4 at the same time, and an enlarged view of the photomask box storage rack. The photomask box storage rack 60 of the present invention is used in combination with a photomask box storage rack 60. The photomask box storage rack 60 of the present embodiment has four blocks, and each block has 13 layers, that is, the light of the embodiment. The hood storage rack 60 can store a total of 52 reticle boxes 70 and is provided with eight filter venting devices 72 for purifying air particles. The reticle storage rack 60 has a locating seat 61, a plurality of pressing mechanisms 62, a plurality of rails 63, and a plurality of inductors 64. Wherein, the positioning seat 61 is fixed in front of the photomask box storage rack 60. When the sensor 16 on the front end of the bracket 15 touches the positioning seat 61 before the bottom of the frame body 10, the photomask box transport vehicle and the photomask box are indicated. The storage rack 60 is positioned correctly, and the warning light 13 on the frame body 10 displays a green light indicating safety. 20, as shown in FIG. 4, the pressing mechanism 62 is fixed on the two sides of the front end of the photomask box storage rack 60, and is positioned at the upper level and the front row displacement of the mask box transport vehicle and the mask box storage rack 60. Thereafter, the pressing mechanism 62 can press the restriction mechanisms 441, 442 on the support plate 40 to prevent the mask case 70 from slipping on the support plate 40 without being restricted by the restriction mechanisms 441, 442. In addition, the above-mentioned obstruction 63, 12 1293939 sensor 64 are fixed on the two sides of the reticle storage rack 6 , the trajectory ο can be placed on the light f box 70, and the sensor (10) is matched with the reticle The cassette pre-measuring device 46 and the front-rear detector 47 are used as the positioning of the upper and lower levels of the mask box transport vehicle and the forward displacement. Accordingly, the present invention is provided with a plurality of fixed 5-bit mechanisms to ensure that the mask case 7 in the reticle storage rack 60 does not collide during the operation of accessing the reticle housing 7. Please refer to the completion of the registration of the photomask box of the present embodiment and the mask f storage frame at the same time as shown in Fig. 5, Fig. 6, and Fig. 7, and the completion of the access and the completion of the access. As shown in FIG. 5, the sensor 16 of the front frame 10 of the frame body of the photomask case carrier 1 is not in contact with the positioning seat 61 of the photomask case storage rack 6〇, indicating the photomask box carrier. The photomask box is not fixed on the support plate 4G. As shown in Fig. 6, when the current bracket says that the sensor 16 is in contact with the positioning seat 61, the positioning is completed, and the photomask case 7 can be transported back and forth by the transmission 53 on the support plate 40. As shown in FIG. 7, the reticle 15 case 70 has been placed in the reticle storage frame 6 , to complete the access operation. During the access process of the present invention, the support plate 40 does not need to completely extend into the reticle storage. In the frame 6〇, the support plate 40 does not have to be raised or lowered, and it is possible to surely improve the conventional photomask case carrier which often collides with the missing cover box of the reticle storage frame. The above-described embodiments are merely examples for convenience of description, and the scope of the claims of the present invention is determined by the scope of the claims, and is not limited to the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a preferred embodiment of the present invention. * 1293939 Figure 2 is an enlarged view of a transverse bracket in accordance with a preferred embodiment of the present invention. Figure 3 is a perspective view of the present invention and the mask frame. Figure 4 is an enlarged view of a portion of a photomask cartridge storage rack of the present invention. Figure 5 is a schematic illustration of the present invention - preferred embodiment and pre-access alignment of the reticle holder. Figure 6 is a schematic illustration of the positioning of a photomask cartridge storage rack in accordance with a preferred embodiment of the present invention.
圖7係本發明一較佳實施例與光罩盒存放架之光罩盒存取 完成示意圖。 I 【主要元件符號說明】 10車架體 11直立滑執 12顯示器 13警示燈 14後監視器 15前支架 16感應器 18車輪 19手把 20滑塊 21橫托架 30固定板 301前端 34後擋板 35滾輪 3 8後光感知器 40支撐板 401前端 402後端 41前監視器 42上移防撞器 43下移防撞器 441,442限制機構 45滾輪 46高度偵測器 47前後偵測器 48前光感知器 49前擋板 51驅動裝置 5 11驅動馬達 512驅動皮帶 513驅動輪 53傳動裝置 531，532,533,534 傳動輪 541,542傳動軸 55傳動帶 ’1293939 60光罩盒存放架 61定位座 62壓制機構 63執道 64感應器 70光罩盒 72過濾通風裝置 R旋轉動力Fig. 7 is a schematic view showing the access of the photomask case of the photomask case storage frame in accordance with a preferred embodiment of the present invention. I [Description of main component symbols] 10 frame body 11 upright slide 12 display 13 warning light 14 rear monitor 15 front bracket 16 sensor 18 wheel 19 handle 20 slider 21 horizontal bracket 30 fixed plate 301 front end 34 rear block Plate 35 roller 3 8 rear light sensor 40 support plate 401 front end 402 rear end 41 front monitor 42 upshift bumper 43 down bumper 441, 442 limit mechanism 45 wheel 46 height detector 47 front and rear detector 48 Light sensor 49 front baffle 51 driving device 5 11 drive motor 512 drive belt 513 drive wheel 53 transmission 531, 532, 533, 534 drive wheel 541, 542 drive shaft 55 drive belt '1293939 60 photomask box storage rack 61 positioning seat 62 pressing mechanism 63 64 sensor 70 reticle box 72 filter ventilation device R rotary power
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