1290666 1 · 九、發明說明： 【發明所屬之技術領域】 本發明係提供-種增加直驅絲位運動㈣平台穩定度及精 、方法肖別係心-種針對極南精度的直驅式數位運動控制平 料發展_較位方法。财法主要可以有效增㈣動平台之 干擾月b力提同平纠位穩定度，啊驗週邊設備的硬體規 格需求，直接提高定位解析度。 【先前技術】 一，按，-般傳統運動平台的閉迴路控制系統通常如第一圖所 T ’係由控制器10、馬達（或一般運動平台）20與位麵測器3〇 三個單元所組成；該控制II 1G會根據接收到的命令，以及經由位 置感測器30測量到馬達（或一般運動平台）2〇的實際位置，進行 鲁相互比較然後產生適當的補償信號用以修正馬達（或一般運動平 台）20運動，藉以達到快速、精確的定位與其他運動模式。 、 在上述迴路中，控制器1〇可以藉由傳統類比電路製作，而位 且感測器30也可以使用類比式的感測器；然而基於便利性以及雜 訊處理的考量，再加上數位電腦的普及以及性能的大幅提昇，近 來夕以數位電腦取代了傳統類比控制器。至於位置感測器也多以 光學尺、雷射干涉儀等數位式感測器取代。即令上述迴路未使用 5 1290666 9 i 數位式感測器，但為了配合數位電腦的後續處理動作，因此類比 感測器的訊號仍舊必須進行類比/數位轉換以方便電腦處理。故在 . 這種情形下，其結果與使用數位式感測器是相同的。 • 然而，經學、業界研究發現，數位式控制雖具有抵抗電路雜 - 訊、體積小、機體強固、使用方便、易於實現複雜的控制模式等 優點，但亦同時存在有如下所述之先天缺憾： 0 1、由於數位控制是以取樣方式處理訊號，受限於電腦本身 速率、週邊界面速率以及控制律的複雜度，取樣時會有速度上的 限制。因此，「取樣」無可避免的將造成時間的延遲，而此一延遲 所造成的影響隨著系統訊號頻率增加而增加。 2、 電腦輸出給馬達驅動器的補償訊號為二進位數值，需經 數位/類比轉換(Digital/Analog Converter，DAC)始能傳給驅動 器。由於DAC本身有量化誤差，且此—量化誤差決定馬達出力的 ♦解析度，再搭配取樣時間則決定了「每一取樣時間，系統所能提 •供的衝量解析度」。可見該硬體限制將直接影響平台的定位解析 * 度。 3、 在數位控制中，平台位置亦是以數位方式取得，這也造 成量化誤差’而且此-誤差將使系統在到達指定位置區間後(光學 尺或編碼器的-個數值事實上代表一個區)後，即無法再知道位置 的變化，必鮮到誤差累積超過—個單位的量化值時，控制器始 6 1290666 * 能再做出反應。同時，由於速度資訊多是藉由位置差分獲得，因 此在定位最碰段’量化效應將造雜大的誤差，而此一現象將 , 隨取樣頻率增加而惡化。 . 卩上這些缺失雖存在於數位式控制系統中，但對於精度要求 -不S蚊㈣躺言’實際辨並从，但在高精度如次微米、 奈米甚或皮米等級定位時就會產生決定性的重大影響。而對於要 鲁求長距離快速運動的直驅式系統而言，由於缺乏減速機構，此一 影響會更直接而明顯。 而在-般直驅式超精蚊㈣統中，域少雜力的影響， 多半會使用氣洋、油健或其他低摩絲承，其力學模型係如第 二圖所示。在如第二圖所示之運動模式下，當平台進人指定的位 置區間（如前所述，數位式感測器上的一個值代表一個區間）時， ㈣!器理論上不能產生任何作用力。但由於縣在進人此區間時 疋有殘存的動畺lit-動量理論上不可能是控制衝量解析度的 整倍數，因此不論何難制邏輯皆餘#由_將其完全抵消， 也因而無法在_錄關後雜轉差獅的麵要求，而會 保持-定的獅，若再考慮軸^及魏誠的辟，此—穩態擺 動將更_。糾在超高精蚊辦，由於最後所的位移量 白極小目此4號頻率已非傳統機械的低頻，而是呈現高頻反應， 7 1290666 根據數位控制理論，若取樣或介面的速率不夠快，將嚴重影響控 制增益的增加，進而影響穩態響應以及定位剛性。但不幸的是倘 若提南介面速率，則又意味著將降低DAC的解析度，這又直接影 - 響了定位解析度，並增加速度量測的困難度。 另外在做如第二圖所示的超高精度定位時，數位感測器（例 如市面上現有的光學尺與編碼II)的雜訊可算相當穩定。因此運 _動控制的雜成主要來自環境、驅動器、氣浮軸承以及廳的雜訊。 為了達到超高精度定位的需求，這些元件必須滿足高頻寬、超低 雜訊以及高解析度⑽)的要求，這些要求對硬體電路元件製作實 為一嚴苛的挑戰。 有4α於此’吾等發明人遂投入研發行列，針對上述現象加以 研究並研發提供-種可以解決上述問題，且同時增加平台穩定度 _及精度之控制方法，並在經過長期努力及不斷測試及修改而有本 發明問世。 【發明内容】 爰疋本U之目的係提供—種增加直驅式數位運動控制平 CT穩疋度及精度的方法H種騎極紐度的絲式數位運 動控制平台膽展賴助粒綠。财法主要可財效增強運 8 1290666 動平台之抗干擾能力、提高平台到位穩定度，同時減輕週邊設備 的硬體規格需求，直接提高定位解析度。 為達致以上目的’吾等發明人乃設計_種增加直驅式數位運 - 動控制平台穩定度及精度的方法；該辅助定位方法係包含以了步 » 驟· a.設定直驅式控制運動平台之定位目標區間，選定輔助定位機制 •啟動時的預設平衡點’以及啟動該機制時該平台所在位置的範圍； b·以數位控制方式產生直驅式動力將平台移向目標區間同時以 位置感測器持續感測平台之位置； c. 當平台位移至接近目標區間並進入預設距離時，位置感測器即 啟動輔助定賴織將力平衡點設定在目魏_，辅助定位機 構即自動產生連續類比回復力； d. 以包含有積分或類似積分的控制律將平台移入目標區間内即 • 可完成定位。 如上所述之一種增加直驅式數位運動控制平台穩定度及精度 的方法，其中，该辅助定位機構係可藉由控制方式在任一位置產 • 生穩定的力平衡點。 如上所述之一種增加直驅式數位運動控制平台穩定度及精度 的方法’其巾’當辅助定位機做動時的職平娜設定以後， P存在定區間，在此區間内平台脫離平衡點所感受到的回復力 9 1290666 將隨距離增加而增加。 種録獅_ 的方法，·其中，該數位控制方式 。敎度及精度 控制）。 為匕例〜積分-微分控制（pid 的方如广:之:種增加直驅式數位運動控制平台穩定度及精度 的力該公式似田凡成疋位時’數位控制力將等於辅助機構產生 構的口. U=Kx，^u為數位控制力，κ為辅助定位機 點籌的的:對嶋，，χ為力平衡軸標區間内之停止 如上所述之-種增加直驅式數位·控制平台敎度及精度 的方法；其中，該輔助機構係可糊動線圈式無刷線性馬達為之， 該動線圈式線性馬達的定子係由—排或二排的磁鐵組成，且該等 磁鐵之磁極係呈父互糊’而馬達的賴動子則可在該等磁鐵中 運動’藉此同-個馬達定子即可設計另—適當麟_並固定在 動子上使其起文直驅式數位控制驅動同步位移，在平台靠近 目標區時，即軌適當紐俾產生所需要的力平衡點及類比式回 復力來辅助平台定位。 如上所述之-種增加直驅式數位運動控制平台穩定度及精度 的方法’其巾’ 線圈式無刷躲馬達關祕齡係可以多 對線圈為之。 【實施方式】 1290666 關於本發明之⑤計原理及實施方法與步驟，鱗—種較佳實 施例配合圖式於下文進行詳細說明，供釣上深入了解並認同本 發明。1290666 1 · IX, invention description: [Technical field of invention] The present invention provides a kind of direct-drive wire movement (4) platform stability and precision, method, and system-type direct-drive digital position for extreme south precision Sports control flat material development _ comparative method. The financial law can mainly increase (4) the interference of the mobile platform. The strength of the same level of stability is determined. The hardware specifications of the peripheral equipment are checked to directly improve the positioning resolution. [Prior Art] First, the closed loop control system of the conventional motion platform is generally as shown in the first figure by the controller 10, the motor (or general motion platform) 20 and the position detector 3 〇 three units The control II 1G will compare the actual position of the motor (or the general motion platform) 2〇 according to the received command and the position sensor 30, and then compare and then generate an appropriate compensation signal for correcting the motor. (or general motion platform) 20 movements to achieve fast, accurate positioning and other sports modes. In the above loop, the controller 1〇 can be fabricated by a conventional analog circuit, and the sensor 30 can also use an analog sensor; however, based on convenience and noise processing considerations, plus digital The popularity of computers and the dramatic increase in performance have recently replaced traditional analog controllers with digital computers. As for position sensors, they are often replaced by digital sensors such as optical scales and laser interferometers. Even if the above circuit does not use the 5 1290666 9 i digital sensor, in order to cooperate with the subsequent processing of the digital computer, the signal of the analog sensor still needs to be analog/digital converted to facilitate computer processing. Therefore, in this case, the result is the same as using a digital sensor. • However, studies in the study and industry have found that digital control has the advantages of resisting circuit noise, small size, strong body, easy to use, and easy to implement complex control modes, but it also has the following inherent defects: 0 1. Since digital control processes signals by sampling, it is limited by the speed of the computer itself, the peripheral interface rate, and the complexity of the control law. There is a speed limit when sampling. Therefore, "sampling" inevitably causes a delay in time, and the effect of this delay increases as the frequency of the system signal increases. 2. The compensation signal output from the computer to the motor driver is a binary value, which can be transmitted to the drive through the digital/analog converter (DAC). Since the DAC itself has quantization error, and the quantization error determines the resolution of the motor output, the sampling time determines the "interference resolution that the system can provide for each sampling time." It can be seen that this hardware limitation will directly affect the positioning resolution of the platform. 3. In digital control, the position of the platform is also obtained in digital mode, which also causes quantization error 'and this error will make the system reach the specified position interval (the optical scale or encoder - the value actually represents a region) After that, it is no longer possible to know the change of position. When the error accumulates more than the quantized value of one unit, the controller can react again. At the same time, since the velocity information is mostly obtained by the position difference, the quantization effect will be complicated in the positioning of the most touched segment, and this phenomenon will deteriorate as the sampling frequency increases. Although these defects exist in the digital control system, but the accuracy requirements - not S mosquitoes (four) lying words 'actually distinguish, but in high precision such as sub-micron, nano or even pico level positioning will produce Decisive significant impact. For a direct drive system that wants to move long distances quickly, this effect is more direct and obvious due to the lack of a speed reduction mechanism. In the case of the direct-drive super-fine mosquito (four) system, most of the effects of the field will be qi, oil or other low-mesh bearing, and the mechanical model is shown in the second figure. In the motion mode as shown in the second figure, when the platform enters a specified position interval (as mentioned above, a value on the digital sensor represents an interval), the (4) device theoretically does not produce any effect. force. However, since the county has no residual movement when entering the zone, the lit-momentum theory cannot theoretically be an integral multiple of the control impulse resolution. Therefore, no matter how difficult it is to make the logic, it is completely canceled by _, and thus cannot be After the _ recording, the lion's face is required to be turned, and the lion will be kept. If you consider the axis ^ and Wei Cheng's development, this - steady-state swing will be more _. Corrected in the ultra-high-precision mosquitoes, because the final displacement is very small, the frequency of No. 4 is not the low frequency of the traditional machine, but the high-frequency response, 7 1290666 According to the digital control theory, if the sampling or interface rate is not fast enough , will seriously affect the increase of control gain, which in turn affects the steady state response and positioning rigidity. But unfortunately, if the interface speed is too high, it means that the resolution of the DAC will be reduced, which directly affects the positioning resolution and increases the difficulty of speed measurement. In addition, when performing ultra-high-precision positioning as shown in the second figure, the noise of the digital sensor (for example, the existing optical scale and code II on the market) can be quite stable. Therefore, the hybrid control of the motion control mainly comes from the environment, the drive, the air bearing and the noise of the hall. In order to achieve ultra-high-precision positioning, these components must meet the requirements of high-bandwidth, ultra-low noise, and high-resolution (10). These requirements pose a serious challenge to hardware components. There are 4α in this 'our inventors are investing in research and development, researching and developing the above phenomena to solve the above problems, and at the same time increasing the platform stability _ and precision control methods, and after long-term efforts and continuous testing And the invention has been made. SUMMARY OF THE INVENTION The purpose of the present invention is to provide a method for increasing the stability and accuracy of the direct-drive digital motion control flat CT. The H-type digital motion control platform for the riding poles is assisted by the green. The financial method can mainly enhance the anti-jamming capability of the mobile platform, improve the stability of the platform in place, and reduce the hardware specifications of peripheral devices, and directly improve the positioning resolution. In order to achieve the above objectives, 'our inventors are designing a method to increase the stability and accuracy of the direct-drive digital-operated control platform; the auxiliary positioning method includes step-by-step a. Setting direct drive control The positioning target interval of the motion platform, the selected auxiliary positioning mechanism • the preset balance point at startup and the range of the position of the platform when the mechanism is started; b· the direct-drive power generated by the digital control method to move the platform to the target interval The position sensor continuously senses the position of the platform; c. When the platform is displaced to the target range and enters the preset distance, the position sensor starts to assist the woven fabric to set the force balance point to the target _, auxiliary positioning The organization automatically generates a continuous analog recovery force; d. Moves the platform into the target interval with a control law containing integrals or similar integrals. A method for increasing the stability and accuracy of a direct drive digital motion control platform as described above, wherein the auxiliary positioning mechanism can generate a stable force balance point at any position by a control method. As described above, a method for increasing the stability and accuracy of a direct-drive digital motion control platform, 'the towel', when the auxiliary positioning machine is set to work, the P has a fixed interval in which the platform is out of equilibrium. The perceived restoring force 9 1290666 will increase with distance. The method of recording the lion _, which, the digital control method. Temperature and accuracy control). For the example ~ integral - differential control (the pid's Fang Ruguang: the kind of force to increase the stability and precision of the direct-drive digital motion control platform. The formula is like Tian Fancheng's position. The digital control force will be equal to the auxiliary mechanism. U=Kx, ^u is the digital control force, κ is the auxiliary positioning machine. For the 嶋,, χ is the stop within the force balance axis range. As mentioned above, increase the direct drive digital control platform. And an accuracy method; wherein the auxiliary mechanism is a pasteable coil type brushless linear motor, wherein the stator of the moving coil type linear motor is composed of a row of two or two rows of magnets, and the magnetic poles of the magnets The father's mutual paste' and the motor's Lai mover can move in the magnets' by the same motor stator can be designed another - appropriate Lin _ and fixed on the mover to make the direct drive digital control Drive the synchronous displacement, when the platform is close to the target area, the appropriate balance point and analog recovery force are generated to assist the platform positioning. As mentioned above, the stability of the direct-drive digital motion control platform is increased. Method of precision 'its The coil type brushless motor can be used for many pairs of coils. [Embodiment] 1290666 Regarding the principle and implementation method and steps of the present invention, the preferred embodiment of the scale is described in detail below. It is stated that the invention is well understood and recognized by the fish.
—首先說明本發明之設計原理及需求，請配合第三至五圖所 示’本發明主要包含—種數位_方式（由於該數位控制方式非 本U之主要4求’ ^可由多種方式為之，故圖面予以省略）、一 可運動之平台1及-辅助纽機構2，其中·· 該數位控制方式係可為PID或其他控制方式，係用以驅動平 台1位移，並搭配有數位式位置感測器1 1以量測平台i之位 置’且辅助疋位機構2則必須具備以下要件： "1.輔助定位機構可藉由㈣在任—位置產生穩定的力平 衡=且該控制方式基本上可以只是—烟迴路控制主要用以 負責啟動辅助纽機制與_辅較位機制的動作。且由於此一 輔助定位贿並不—定包含有_路修正，目此實際執行時平衡 並不疋真正在目標區間内，但將極為接近目標區。 —2.當輔助定位機制啟動時的預設平衡點設定以後，即存在一 f區間，在此區_平台麟平衡點所感麵_復力將隨距離 增加而增加 關於本發％之^_序及綠，魏町步驟進行： 1290666 a·。又疋直驅式控制運動平台1之定位目標區間，選定輔助定 位機制啟動時随設平触，以級麟機辦該平台丨所在位 置的範圍； b·以任何數位控制方式產生直驅式動力將平台1移向目標 •區間，如第三®所示，_以位置制H1 1持續制平台工之 、 位置； c·當平台1位移至接近目標區間（該目標區間即由數位式感 •測器顯不該目標值時所代表的區間，其寬度等於該感測器解析度) 並進入預A距離時’位置感測II 1 1即啟動辅助定位機制並將力 平衡點設定在目標區_，獅定位機構2即自誠生連續類比 回復力，如第四圖所示； d·以包含有積分或類似積分的控制律將平台i移入目標區間 内，如第五圖所示，即可完成定位。 藉以上方法及步驟，當步驟C.中的控制力為料，平台工將 .停留在此輔助定位機構2所產生的平衡點上，且由於該平ς點係 =穩定的平衡點’因此此時之系統力學特性將如第四圖所示，而 當平台1被控制力U或其他时如環境擾輸離平衡點時，輔助 定位機構2即會產生-回復力，且平台工脫離平衡點所感受到的 回復力將隨轉增加輯加，故該时力可以彈簧來表示；且當 步驟d.完成以後（如第五圖所示），數位控制力將等於辅助機構產 生的力，即： 12 1290666 u = Kx5 :中U為數位控制力，K為辅助定位機構的回復力触置的一次 .微分（亦可視為輔助定位機構的等效彈簧的彈性係數），χ為力平 衡點顺止點(在目魏的距離。若&為控制力解析度，如 •為位置感測器解析度（亦即目標區間的寬度），則只要Δυ<ΚΔχ即 、可將平°疋位在目標區間内，而得到零穩態誤差。因此隨著Κ值 的增加，對出力解析度的要求即可降低。另夕卜，當平台因擾動產 鲁生微小位移改變χ，，但其改變量尚未超過目標區間時，則U不會 改變，但平台受力改為U — K(x蜂-ΚΧ，。此-合力與位移方向相 為·剛复力’換3之，即係為平台加裝一彈簧，而其平衡點就 在目‘區間内。U之，本發明之設計原理可對系統擾動提供即時 修正’不料職差量累制超過目標區才反應，也不受取樣時 間的限制。當誤差超過感測器解析度時，此一回復力即相當於一 類比式的比例控制，會對擾動抑制提供相當大的助益 。如此可使 鲁進仃超减蚊辦對魏_賊及魏獅的抑制要求降低。 關於本毛明之輔助定位機構2部分，主要係利用動線圈式無 、、友卜焉達(Moving-Coil Type Brushless Linear Motor)作為辅 助定位機構之較佳可行實施例中的一種。請參閱第六圖所示，動 線圈式線佳馬達的疋子21是由一排或二排的磁鐵21 1所組 成/、磁極係呈父互參差排列，馬達的線圈動子即在其中運動。 13 1290666 圖:示向為平台運動方向-軸為磁鐵深度(進 成，這些_如動2^=構的轉軸是由數對細2 2組 台一起沿X财向私=°滑解料結在—起，使線醜平 田數位控制力控制平台及線圈一起靠近 ㈣間時，即㈣如適當雜產生―力平衡點及回復 杳辅助平口確實定位。第六圖所示為一對線圈的情形，但 實際實施時係可視實際需要可加人多對線圈，且每-線圈在χ—γ >平面上呈長方形繞線。 另關於上魏_式無刷線性馬達所需之電流大小，吾等發 月人乃依照第，、圖之機構所示，再透過以下假設及運算驗證，進 而可計算所需電流之大小。假設： Ρ:定子磁鐵排列一個週期的長度 Χι ·從座標原點到第一線圈（左邊的線圈）中點的距離 W:線圈繞線寬度 h :線圈長度(Υ方向） r :線圈中心到線圈内徑的距離(X方向） P :在X方向線圈繞線密度(條/單位長），此一密度可進步設 計為位置函數，但此處假設為定值 ij :第j線圈中的電流，j=l，2。以圖中所示逆時針(從上往下 看）方向為正 0) 1290666 B ··磁通密度 根據圖六的機構，定子磁通密度可以下式近似 BW = B0sin(|^) 其中B〇是磁通密度振幅。若第一線圈通以電流、則其所受力為 F1 HjfWBhpildx-iHwBhpi# ⑵ ：iiPc〇s^-Xi 其中 P = hpBQZ π 2π 2π / 、 cos—r — COS (Γ + w) Ρ Ρ 其範圍限制在 2hpB〇^52hpB〇 中。若取W==f，r = mP，m為大於等於〇的整數，則β = 21ιρΒ0Ι 由此可得到同一電流與繞線密度下最大出力值。 由於第二線圈距離第-線圈(η+>，η為任意整數，依同理可 計算得出其所受力巧為 〇;>〇， 2tc F2 =i2pcos-^(X1 4-nP + ip) F 4 -i2Psin^X1 (3) 所以此一對線圈所產生的合力為 F = Fl+F2 2九 :P(ilcos^Xl^i2sin|rXi) (4) 其中c〇se: 1?+12 sine: #。在此一出力情形下，當Xi滿足下 式時合力為零，此為出力平衡點 _Χ1+θ = (Μ + #π，Μ是任意整數 反過來說’我們也可藉由設定 2π， Ύ (5) ，h進而將平衡點定在任意一個符 15 1290666 合使用者需要的位置，如此即滿足前魏明帽助定位機構所需 具備的第-個要件。在這些平衡點我們可由微分得到合力對位= 的變化情形- First, the design principle and requirements of the present invention are described. Please refer to the third to fifth figures. 'The present invention mainly includes a digital _ mode (since the digital control method is not the main 4 quest of the U) ^ can be used in various ways Therefore, the drawing is omitted), a movable platform 1 and an auxiliary button mechanism 2, wherein the digital control mode can be PID or other control mode, which is used to drive the displacement of the platform 1 and is matched with a digital type. The position sensor 1 1 measures the position of the platform i' and the auxiliary clamping mechanism 2 must have the following requirements: "1. The auxiliary positioning mechanism can generate a stable force balance by (4) at any position - and the control mode Basically, it can be just that the smoke loop control is mainly responsible for the action of starting the auxiliary button mechanism and the _ auxiliary bit mechanism. And because this auxiliary positioning bribe does not contain a _ road correction, the actual execution balance is not really within the target interval, but will be very close to the target area. —2. When the preset balance point is set at the start of the auxiliary positioning mechanism, there is an f interval. In this area, the sensation of the _ platform lining balance point will increase with the increase of the distance. And green, Wei Town steps: 1290666 a. In addition, the direct target type control motion platform 1 is positioned in the target range, and the selected auxiliary positioning mechanism is set to be flat when it is started, and the position of the platform is set by the level Lin machine; b. direct drive power is generated by any digital control mode. Move platform 1 to the target • interval, as shown in the third ®, _ position system H1 1 continuous platform work, position; c · when platform 1 is displaced to close to the target interval (the target interval is digital) The interval represented by the detector when the target value is not displayed, the width of which is equal to the resolution of the sensor) and when entering the pre-A distance, the position sensing II 1 1 starts the auxiliary positioning mechanism and sets the force balance point in the target area. _, lion positioning mechanism 2 is the continuous analogy of the self-satisfaction, as shown in the fourth figure; d. Move the platform i into the target interval with a control law containing integrals or similar integrals, as shown in the fifth figure, ie Positioning can be done. By the above method and step, when the control force in step C. is the material, the platform worker will stay at the equilibrium point generated by the auxiliary positioning mechanism 2, and since the flat point system = stable equilibrium point, therefore this The mechanical properties of the system will be as shown in the fourth figure, and when the platform 1 is controlled by the control force U or other, such as the environment, the auxiliary positioning mechanism 2 will generate a restoring force, and the platform worker will be out of the equilibrium point. The perceived restoring force will increase with the increase, so the force can be expressed by the spring; and when step d. is completed (as shown in the fifth figure), the digital control force will be equal to the force generated by the auxiliary mechanism, namely: 12 1290666 u = Kx5 : Medium U is the digital control force, K is the one-time differential of the restoring force of the auxiliary positioning mechanism. It can also be regarded as the elastic coefficient of the equivalent spring of the auxiliary positioning mechanism. Point (in the distance of the eye. If & is the control resolution, such as • the position sensor resolution (that is, the width of the target interval), then as long as Δ υ & Κ Κ χ χ, can be flat on the target Within the interval, a zero steady-state error is obtained. As the devaluation increases, the requirement for the resolution of the output can be reduced. In addition, when the platform changes due to the small displacement of the production, but the amount of change has not exceeded the target interval, U will not change. However, the force of the platform is changed to U - K (x bee - ΚΧ, this - the force and the displacement direction are the same as the "completion of the force" for the 3, that is, the platform is equipped with a spring, and its balance point is in sight' Within the interval, U, the design principle of the present invention can provide immediate correction to the system disturbance. 'Unexpectedly, the amount of the job amount exceeds the target area to react, and is not limited by the sampling time. When the error exceeds the sensor resolution, this A restoring force is equivalent to a proportional analog control, which will provide considerable help to the disturbance suppression. This will reduce the suppression requirements of the Weijin 仃 仃 及 对 魏 魏 。 。 。 。 。 。 。 关于 关于 关于 关于 关于The auxiliary positioning mechanism 2 is mainly one of the preferred embodiments of the auxiliary positioning mechanism by using the Moving-Coil Type Brushless Linear Motor as shown in the sixth figure. Moving coil type motor The dice 21 is composed of one or two rows of magnets 21 1 and the magnetic poles are arranged in a mutual paradise, and the coil mover of the motor is moved therein. 13 1290666 Fig.: The direction of the platform is the direction of motion - the shaft is a magnet Depth (into the progress, these _ _ _ 2 ^ = structure of the shaft is composed of a number of pairs of fine 2 2 sets together along the X financial direction private = ° slip material in the knot, so that the line ugly Pingtian digital control control platform and When the coils are close together (4), that is, (4) if the appropriate noise is generated, the force balance point and the return 杳 auxiliary flat are indeed positioned. The sixth figure shows the case of a pair of coils, but in actual implementation, it may be added to the actual needs. The coil, and each coil is a rectangular winding on the χ-γ > plane. Also regarding the current required for the upper Wei_type brushless linear motor, we are in accordance with the mechanism of the figure and figure. Then, through the following assumptions and operation verification, the required current can be calculated. Assume: Ρ: the length of the stator magnet array for one cycle Χι • the distance from the origin of the coordinate to the midpoint of the first coil (the coil on the left) W: coil winding width h: coil length (Υ direction) r : coil center to coil Distance of inner diameter (X direction) P : Winding coil density (bar/unit length) in the X direction. This density can be improved as a position function, but here is assumed to be a constant value ij: the current in the jth coil, j=l, 2. Counterclockwise (viewed from top to bottom) is positive as shown in the figure. 0) 1290666 B · Magnetic flux density According to the mechanism of Figure 6, the stator flux density can be approximated by BW = B0sin(|^) where B〇 Is the magnetic flux density amplitude. If the first coil is energized, the force is F1 HjfWBhpildx-iHwBhpi# (2) : iiPc〇s^-Xi where P = hpBQZ π 2π 2π / , cos_r — COS (Γ + w) Ρ Ρ Limited to 2hpB〇^52hpB〇. If W==f, r = mP, and m is an integer greater than or equal to 〇, then β = 21ιρΒ0Ι The maximum output force at the same current and winding density can be obtained. Since the second coil is away from the first coil (η+>, η is an arbitrary integer, it can be calculated that its force is 〇; >〇, 2tc F2 = i2pcos-^(X1 4-nP + Ip) F 4 -i2Psin^X1 (3) So the resultant force of this pair of coils is F = Fl + F2 2 Nine: P (ilcos^Xl^i2sin|rXi) (4) where c〇se: 1?+ 12 sine: #. In this case of force, when Xi satisfies the following formula, the resultant force is zero. This is the output balance point _Χ1+θ = (Μ + #π, Μ is an arbitrary integer instead of saying 'we can also borrow By setting 2π, Ύ (5), h and then setting the balance point to any position required by the user 15 1290666, so that the first requirement of the former Weiming cap assist positioning mechanism is satisfied. Point we can get the change of the resultant force = by the differential
dF 2πdF 2π
Xl +θ=(Μ+-)π - 4?+哼sin(*Xl+e) (6)Xl +θ=(Μ+-)π - 4?+哼sin(*Xl+e) (6)
P = pVii2+i2~ if M is odd 為了確保此為歡的平衡點，M必須為_，我們稱這些穩定的平 衡點xs。由⑸可知’-旦h、丨2固定後，⑽以週期p的方式重 ，出現’當平台在卜_±|翻_會触往該平衡點但其 受力大p小由⑷可知是隨距離&以三角函數方式改變。但當平台在 ㈣•圍内時，其受力大小約正比於距離，如此即滿“二 明中輔助機制所需具備的第二個要件。此時系統受力情形即如第 四圖所示，而彈簧常數K即為 ⑺ K = P^f+if~ 反過來說當彈簧常數κ決定後，向量的大小即為 i?+i2P = pVii2+i2~ if M is odd To ensure that this is the balance point of the joy, M must be _, we call these stable equilibrium points xs. It can be seen from (5) that after '-denier h and 丨2 are fixed, (10) is heavy in the manner of period p, and 'when the platform is in the _±| flip _ will touch the equilibrium point but its force is large and p is small (4). The distance & is changed as a trigonometric function. However, when the platform is in (4) and the circumference, the force is about proportional to the distance, which is the second requirement for the auxiliary mechanism in the second Ming. At this time, the system stress is as shown in the fourth figure. And the spring constant K is (7) K = P^f+if~ Conversely, when the spring constant κ is determined, the size of the vector is i?+i2
PK ⑻ 根據第六騎^之輔助定位機構及上述公式，本發明之 精山疋位將s騎備王作及實際從崎段進行，胁下文說明 之。 口 1290666 階段1:準備工作 ^ ••選以標點設u目標點；敎辅贼位機制啟動 時的預設平衡點，以及啟動該機制時平台所在的範圍 令XSI^Xr/P的餘數(取正值），此即為預設的穩定平衡 點。xr的±|範圍内為啟動範圍。 B :計算h、i2—根據Xsr及所希望的彈簧常數K計算所需的 il ' i2 il、i2由（5)及(8)可得 ΡΚ 2βπβ〇〇δ(|~ΤΧ sr> (9) if +i2 sin0 (10) ΡΚ . .π 2π —Psin(~--xsr： 其中⑸式的Μ已令為〇。由於馬達本身磁場的不確定 性及其他參數如紐/類轉_的#化誤差，通以h、 ^後平衡點-般而言不會在所要的〜點，然而其誤差與 定子磁場週期長度P相比，實務上並不會大，並不會影 響控制律的分析、設計與執行。 階段2 :實際定位 2 a.初步植—使用任意穩定的控制法則（例如pm控制） 將平台移向\。； 2一b :啟動辅助定位機制一 當平台穩定停留在啟動範圍内時 17 1290666 (xr的土頁範圍内）即通入h((9)、G〇))啟動此一機 制’此時系統即進入第四圖所示狀態。 2 c·微凋疋位一使用具有積分或類似積分的控制將平台移至 \目標區間内；此時該辅助定位機構即對平台提供類比 回復力’增加其到位穩定度及剛性。 准以上所述者乃係針對單對線圈式動線圈式無刷線性馬達 所作之驗證，料再增域_性’可㈣使乡職目。此外， 上述做法也可適用於永磁式DC無刷旋轉馬達。 藉由以上說明可知本發明储由獅定位機構在接近定位目 I點處產生-穩定的力量平衡點，當數位控制器藉由積分式的控 制方式，將平台移至目標區間時，數位㈣力將和辅助定位機構 的回復力相平衡’這也_當於_助定位機_力量平衡點移 至目標區_。此時若有任何擾動，由於辅助定位機構是以連續 類比方式運作’因此會自動提供類比回復力回復位置的偏移，減 少受環境擾動的影響。從控制角度來說，即等於提供了一類比式 的等比回授(卿ortional feedback)。從力學角度來說，則等於 是安裝-㈣簧。此外，由於本發明之控制係顯比回授，其增 益可盡量放大而不至於因為取樣造成不穩定。另外，由於高增益 類比彈簀的存在’可協助改善數位控制器的増益範圍，進而改善 1290666 定位整定時間。更重是，此，彈簧的存在可降低平台位 移相對於㈣力及絲訊驗歧，_可提高定位解析度血到 位穩定度。在搭_分回授後可去除前述無法停留在缺區間的 問題，同時也可降低電路製造的困難度。且此—輔助機構可用電 磁、麵與其餘何可產生敎_平衡_方式達成。 經由上述說明可知本發明具有以下若干優點： -、該輔助定位機構為簡單的類比架構，電路製造簡易。同 時本發明可降低高精度定位系統，週邊電路所需之硬體 規格。 二、 可得到極佳的到位穩定度，在適當條件下，可突破無摩 擦或低摩擦數位運動控制系統的極限，達到〇誤差擺動 (指平台停留在指定的目標區間内）的定位要求。 三、 可有效增加到位剛性及抗干擾能力。 四、 反應快，適合快速連續定位，而且作用時不產生橫向擾 動。 五、 可自由調整回復力大小以及連續改變力平衡點，且適度 應用可增加數位控制設計的多樣性。 綜上所述，本發明所揭露之技術手段確可達致預期之目的與 功效且具長遠進步性，誠屬可供產業上利用之發明無誤，爰依法 1290666 提出申請，懇祈鈞上惠予詳審並賜准發明專利，至感德馨。 惟以上所述者，僅為本發明之較佳實施例，當不能以此限定 本發明實施之範圍，即大凡依本發明申請專利範圍及發明說明書 •内容所作之等效變化與修飾，皆應仍屬本發明專利涵蓋之範圍内。 m • 【圖式簡單說明】 第一圖係傳統運動平台之控制迴路。 鲁第二圖係習知直驅式定位系統力學模型。 第三圖係本發明利用數位控制力將平台移向目標區之示意圖。 第四圖係本發明之輔助定位裝置啟動後系統之力學關^意圖。 第五圖係本發明之數健制力將平台移人目標區並和輔助定位裝 置的回復力在目標_產生平衡狀態之示_。 、 第六圖係本發明之線性馬達輔助機構示意圖。 【主要元件符號說明】 • 【習知部分】 20---馬達（或一般運動平台） 11 ---位置感測器 2 1 —定子 2 2 —線圈動子 10-一控制器 30—位置感測器 ^ 【本發明部分】 1- --平台 2- --輔助定位機構 2 11 ---磁鐵 20PK (8) According to the auxiliary positioning mechanism of the sixth riding and the above formula, the Jingshan position of the present invention will be carried out by the singer and the actual section from the Saki section, which is described below. Port 1290666 Phase 1: Preparation ^ ^ • Select the punctuation point u target point; the preset balance point when the auxiliary thief bit mechanism is activated, and the remainder of the XSI^Xr/P range when the platform is started when the mechanism is started (take Positive value), this is the preset stable balance point. The range of ±| within xr is the starting range. B: Calculate h, i2—calculate the required il 'i2 il, i2 from (5) and (8) according to Xsr and the desired spring constant K. β 2βπβ〇〇δ(|~ΤΧ sr> (9) If +i2 sin0 (10) ΡΚ . .π 2π —Psin(~--xsr: where ( of equation (5) has been 〇. Due to the uncertainty of the magnetic field of the motor itself and other parameters such as 纽/类转_ The error, the equilibrium point after h and ^ - is generally not at the desired point, but the error is not as large as the stator magnetic field period length P, and does not affect the analysis of the control law. Design and implementation Phase 2: Actual positioning 2 a. Initial planting - use any stable control law (eg pm control) to move the platform to \.; 2 - b: Start the auxiliary positioning mechanism - when the platform is stable and stays within the starting range When 17 1290666 (within the soil page of xr), h ((9), G〇) is activated to start this mechanism. At this point, the system enters the state shown in the fourth figure. 2 c· Control with integral or similar integral moves the platform to the \target interval; at this point the auxiliary positioning mechanism provides analogy for the platform to increase its Stability and rigidity. The above is the verification of the single-coil type coil type brushless linear motor. It is expected to increase the domain _ sex's (4) to make the township. In addition, the above practice can also be applied to Permanent magnet DC brushless rotary motor. It can be seen from the above description that the lion positioning mechanism generates a stable balance point at a point close to the positioning point I. When the digital controller controls the platform by integral control When moving to the target interval, the digital (four) force will be balanced with the restoring force of the auxiliary positioning mechanism. This also moves to the target zone _ when the _ assisted positioning machine _ power balance point. At this time, if there is any disturbance, due to the auxiliary positioning mechanism It operates in a continuous analogy mode. Therefore, it automatically provides the offset of the analogous response force recovery position, reducing the impact of environmental disturbances. From the control point of view, it is equivalent to providing a kind of analogous feedback. From a mechanical point of view, it is equivalent to installing a - (four) spring. In addition, since the control system of the present invention is significantly more feedback, its gain can be amplified as much as possible without being unstable due to sampling. Because of the existence of high-gain analog impeachment, it can help improve the range of benefits of the digital controller, thereby improving the positioning time of the 1290666. More importantly, the presence of the spring can reduce the displacement of the platform relative to the (four) force and the silk detection. _ can improve the positioning resolution of blood in place stability. After the _ minute feedback, the above problem of not being able to stay in the missing interval can be removed, and the difficulty in circuit manufacturing can also be reduced. And this - the auxiliary mechanism can use electromagnetic, surface and the rest It can be seen from the above description that the present invention has several advantages as follows: - The auxiliary positioning mechanism is a simple analog architecture, and the circuit is easy to manufacture. At the same time, the present invention can reduce the hardware specifications required for the high-precision positioning system and the peripheral circuits. Second, excellent seating stability can be obtained. Under appropriate conditions, the limit of the frictionless or low-friction digital motion control system can be broken, and the positioning requirement of the 〇 error swing (referring to the platform staying within the specified target interval) can be achieved. Third, it can effectively increase the rigidity and anti-interference ability. Fourth, the reaction is fast, suitable for rapid and continuous positioning, and does not cause lateral disturbance when acting. 5. The magnitude of the restoring force can be adjusted freely and the force balance point can be continuously changed, and the moderate application can increase the diversity of the digital control design. In summary, the technical means disclosed in the present invention can achieve the intended purpose and effect and have long-term progress. It is true that the invention for industrial use is correct, and the application is filed according to law 1290666. Detailed examination and granting invention patents, to the sense of Dexin. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the equivalent changes and modifications made by the scope of the invention and the contents of the invention are all applicable. It is still within the scope of the invention patent. m • [Simple description of the diagram] The first diagram is the control loop of the traditional motion platform. The second diagram of Lu is a mechanical model of the conventional direct drive positioning system. The third figure is a schematic diagram of the present invention using digital control to move the platform to the target area. The fourth figure is the mechanical concept of the system after the auxiliary positioning device of the present invention is started. The fifth figure is the indication that the digital health force of the present invention shifts the platform to the target area and the restoring force of the auxiliary positioning device in the target_production balance state. The sixth figure is a schematic diagram of the linear motor auxiliary mechanism of the present invention. [Main component symbol description] • [Learn part] 20---Motor (or general motion platform) 11 --- Position sensor 2 1 - Stator 2 2 - Coil mover 10 - One controller 30 - Position sense Detector ^ [part of the invention] 1- -- platform 2 -- auxiliary positioning mechanism 2 11 --- magnet 20