1290218 九、發明說明： C考务明戶斤屬軒々貝】 發明領域 本發明涉及利用超音波測量氣體、水等流體的流量的 5 超音波流量計及其製造方法。 I：先前技術2 發明背景 在特開昭60-115810號公報中公開了如第17圖所示的 現有的超音波流量計。彎成直角的彎曲部2、3設置在流路i 10的上游和下游，一對的超音波振子（以下稱爲振子)4、5分別 固定在彎曲部2、3的壁面的外側。圖中的箭頭表示流體的 流動方向。利用這樣的結構，從上游側的振子4，與流體的 流動方向平行地發出超音波。下游側的振子5接收該超音 波，測量從振子4到振子5的超音波的傳播時間。另外，相 15反地，由振子5與流動相反地發出超音波，由振子4接收該 超音波，測量從振子5至振子4的超音波傳播時間。然後， 由該二個傳播時間計异在流路1中流動的流體的平均流 速。根據預先得出的流路1的截面積等，測量流體的流量。 然而’在這種超音波流量計中，由於彎曲部2、3等， 20在液體中不規則地産生旋渦，在流路1内不規則地産生停滯 點等，使流量測量産生誤差。而且，當流過大流量時，流 體的流動使超音波振動的傳播線路彎曲，接收靈敏度降 低。另外’當流過大流量時，由於測量流路的截面積小， 所以壓力損失大，所需要的流量流不出來。作爲其對策， 1290218 當增大流量流路的截面積時，超音波振子間的距離加大， 必須用大的輸出來發出信號，因此消耗電流增大。 I：發明内容3 發明概要 5 本發明的超音波流量計，具有流體流動的管狀的本流 路和將本流路内部分割成多個小流路的分割構件。在小流 路的一部分上設置測量流路。在測量流路側面上，與流體 流動方向傾斜地設置發送、接收超音波的一對的超音波振 子。利用該結構，通過測量在流路内流動的流體的一部分 10 的流量，可以計算求出在本流路中流動的流體的全流量。 另外，本流路和測量流路，與流體的供給管路平行地配置 連接，因此不會擾亂流體的流動。因此，可以更高精度地 進行流量測量。 圖式簡單說明 15 第1圖是本發明的實施形態1的超音波流量計的正面剖 面圖。 第2圖是第1圖所示的超音波流量計的側面剖面圖。 第3圖是本發明的實施形態2的超音波流量計的側面剖 面圖。 20 第4圖是本發明的實施形態3的超音波流量計的側面剖 面圖。 第5圖是本發明的實施形態4的超音波流量計的正面剖 面圖。 第6圖是本發明的實施形態5的超音波流量計的側面剖 1290218 面圖。 第7圖是本發明的實施形態6的超音波流量計的正面剖 面圖。 第8圖是本發明的實施形態7的超音波流量計的側面剖 5 面圖。 第9圖是第8圖所示的超音波流量計的正面剖面圖。 第10圖是第8圖所示的超音波流量計的平面剖面圖。 第11圖是第8圖所示的超音波流量計的中繼端子的平 面圖。 10 第12圖是第11圖所示的中繼端子的剖面圖。 第13圖是本發明的實施形態7的另一種超音波流量計 的主要部分的側面剖面圖。 第14A圖是本發明的實施形態8的超音波流量計的剖面 圖。 15 第14B圖是第14A圖的主要部分的放大剖面圖。 第15圖是本發明的實施形態9的超音波流量計的中繼 端子的剖面圖。 第16圖是在本發明的實施形態9的超音波流量計的中 繼端子中所使用的引銷(pin)的立體圖。 20 第17圖是現有的超音波流量計的剖面圖。 I：實施方式3 較佳實施例之詳細說明 以下，參照附圖說明本發明的實施形態。在各實施形 態中，對於與前面的實施形態相同的結構，標註相同的符 1290218 號，省略其詳細說明。另外，本發明不是僅限於這些實施 形態。 (實施形態1) 第1圖、第2圖是本發明的實施形態1的超音波流量計的 5剖面正視圖和侧面剖面圖。流體流動的本流路10全長爲 300mm，它具有用於測量流量的中央部直徑爲115111111，長 度爲135mm的鼓起部8、和上游、下游的節流部7、9。在本 流路10中，設置板厚爲〇.5mm的分割構件13，將該本流路 1〇分割成格子狀，形成小流路11，在小流路11的一部分上 10設置測量流路12。測量流路12的截面爲縱向15mm、橫向 22mm的矩形，在與縱向相對的面上，與流路傾斜地安裝一 對超音波振子（以下稱爲振子）14A、14B。分割構件13用不 銹鋼或鋁製成，而構成測量流路12的分割構件13由鋁製 成。分割構件13既可以是將多塊平板組合起來構成的，也 15 可以是體地構成的。另外，構成測量流路12的部分與構成 其他小流路11的部分可以分別地形成。在測量流路12内， 相對向設置的振子14A、14B的直徑爲10mm。超音波振子 驅動用的線路15，將設置在本流路10的外部的流量檢測部 21與振子14A、14B電連接，並將其固定，使得流體的流動 不會引起線路振動。本實施形態1中所用的起音波振子的驅 動頻率爲100〜600kHz。 在以上的結構中，在測定流量的情況下，從上游側的 振子14A，沿著流體的流動方向發出超音波。利用下游側的 振子14B接收該超音波，流量檢測部21測量超音波從振子 1290218 14A至振子14B的傳播時間。另外，相反地，從振子mb與 流動相反地發出超音波，利用振子14A接收該超音波，測量 超音波從振子14B至振子14A的傳播時間。然後，由該二個 傳播時間計算在測量流路12中流動的流體的平均流速，由 5預先求出的測量流路12和本流路10的各自的截面積、連結 振子14A、14B的軸線和流體流動方向的傾斜度等，流量檢 測部21計算出流體的流量。 這樣’通過將分割構件13與流動平行地設置，測量流 路12不會大型化。另外，超音波振子14A、14B的靈敏度也 10不降低，消耗電流也不會增大。在流體中，也不會産生不 規則的漩渦和停滯點等，可以穩定和高精度地進行流量測 ΐ。利用這種結構’可以在從〇 lm3/h左右的小流量至 300m /h的大流量這樣寬的流量範圍内，得到再現性好的可 測量流量的超音波流量計。 15 另外，如果設定小流路11的截面積和測量流路12的截 面積大小大致相同，則各個小流路11的流量和測量流路12 的流量大致相同。在這種情況下，通過乘以全流路和測量 流路12的面積比2，容易測量全流量。另外，優選爲，測量 流路12的截面爲矩形狀，超音波振子設置在短邊的面上， 20長邊配置爲水平方向。即，優選使分割構件13形成爲格子 狀。在這樣的結構中，測量流路12内的自然對流少，當在 本流路10中沒有流體流動時，振子14A、14B不會錯誤地檢 測流量。因此，可得到可靠性高的超音波流量計。 另外，本流路1〇優選具有内裝分割構件13和測量流路 1290218 12的中央部比入口、出口大的鼓起部8。如果本流路1〇的内 徑完全與連接管路的内徑相同，則分割構件13和測量流路 12的截面積中的有效開口面積減小，壓力損失增大。<者 測量流路12内的流速增加，超過能測量的範圍。因此，通 5 過增大内裝測量流路12的中央部的内徑，確保所需要的截^ 面積，抑制壓力損失的增加至可以測量的流速以下。 其次，簡單地說明這種超音波流量計的製造方法。首 先，利用鋁壓鑄成形，形成流體流動的管狀的本流路1〇。 其次’與本流路10的流動方向平行地安裝多個分割構件 10 13，在鼓起部8内形成包含測量流路12的多個小流路u。這 時，形成測量流路12，在與縱向相對向的分割構件u上， 與流路傾斜地預先安裝振子14A、14B，使它們在形成測量 流路12時相對向地配置。然後，在下游側安裝預先由樹脂 成形製成的節流部9。然後，在本流路1〇的外部安裝流量檢 15 測部21，與振子14A、14B電連接。 這時，也可以利用|呂的播壓成形，將本流路和分q 構件13的一部分作成一體。另外，在用鋁成形製成本流路 10的情況下，卽流部7、9也可以是同一形狀，相對於本流 路10，以分體部件的方式成形。由於在擠壓成形中只用沖 20模就能成形爲任意形狀，所以可以大量、廉價地加工。因 此，可以廉價地得到可靠性高的超音波流量計。 (實施形態2) 第3圖是本發明實施形態2的超音波流量計的側面剖面 圖。本實施形悲與貫施形態1的不同點是，形成測量流路12 1290218 以外的分割構件14，呈放射狀形成。另外，分割構件14的 厚度是1〜2mm左右，它從本流路10一體地向半徑方向的中 〇方向k伸。除此之外的結構與弟1圖所示的超音波流量計 的結構相同。 5 在這種結構中，測量流路12不會大型化。另外，超音 波振子14A、14B的靈敏度也不會降低，消耗電流也不會增 大。在體中也不會産生不規則的旋渴和停滞點等，可以 穩定而高精度地進行流量測量。 體動的管狀的本流路1 〇和分割構件1 4，優選歲實 10施形態1同樣，由紹的擠壓成形作成一體。朝向半徑方向的 中心部形成的多個分割格子14的前端，保持著形成測量流 路12的分割格子13，並且配置在給定的位置。由於在擠壓 成形中只用沖模就能形成爲任意形狀’所以可以大量、廉 價地加工。 15 (實施形態3) 第4圖是本發明的實施形態3的超音波流量計的側面剖 面圖。本實施形態與實施形態1的不同點是，測量流路12處 於偏離本流路10的中心的上方，設置在具有本流路10的平 均流速的位置。除此之外的結構與第1圖所示的超音波流量 20 計的結構相同。 通常，當與本流路10連接的供給管路長度較長時，本 流路10的入口的流速分佈是中心部相對於外周部較快。 即，從中心部至外周部之間’存在有顯示本流路10的平均 流速的位置。因此，在本實施形態中，通過使測量流路12 1290218 位於該偏心位置，可測量本流路10的平均流速。因此，利 用本結構可以高精度地測定流量。 另外，測量流路12的截面積約爲本流路1〇的截面積的 1/15〜1/30以下。如果在測量流路12中測量本流路1〇的平均 5流速，測量流路12和本流路10的面積比已確定，則可以測 量在本流路10中流動的流體的全流量。由此，在流動中不 會産生不規則的漩渦和停滯點，得到平滑的流動，得到可 以穩定地測量、在廣範圍的流量域中高精度的超音波流量 計。 ^ 另外’將具有超音波振子14A、14B的測量流路12設置 在本流路10中，可用金屬等導電性材料構成分割構件13。 利用這種結構，可將超音波振子14A、14B電遮罩，避免電 磁波雜訊。由此，電氣雜訊的影響大大降低，可使超音坡 流量計很穩定。 15 通常，超音波振子的發送側用高電壓、高頻率的脈衝 驅動。因此’在接收側的超音波振子上容易輸入作爲電殘 波的電氣雜訊、測量電路複雜等，難以高精度地測量微+ 流量。但如本貫施形態這樣’利用對發送信號、接收信銳 的超音波振子進行電氣遮罩的結構，可減少雜訊，得到高 20 精度的超音波流量計。該效果在其他實施形態中也可同樣 發揮。 (實施形態4) 第5圖是本發明的實施形態4的超音波流量計的正面刮 面圖。本實施形態與實施形態1的不同點是，在測量流路12 12 !29〇218 的入口處設置調整進入測量流路12的流體内外的比率的傾 斜構件12A。除此之外的結構與第1圖所示的超音波流量計 的結構相同。利用這種結構，即使在低流量情形下，流體 也容易流入測量流路12中。 5 因此，由於流體從小流量至大流量以一定的比例流入 測量流路12 ’所以乘以一定的面積比，可以高精度地測量 本流路10的全流量。 (實施形態5) 第6圖是本發明的實施形態5的超音波流量計的側面剖 10 面圖。本實施形態與實施形態1的不同點是，在由分割構件 13構成的多個小流路11内，封閉一部分，構成封閉部16。 而且，連接超音波振子和配置在本流路10的外部的流量檢 測部21的線路15，通過閉塞部16。除此之外的結構與第1圖 所示的超音波流量計的結構相同。 15 例如，將由分割構件13構成的小流路11的一部分以4〜 5mm寬封閉其一端，構成閉塞部16,將線路15插入間隙中。 通過使線路15在封閉部16中通過，可防止由流體造成的線 路15振動、連接部等斷線的情形，可以得到可靠性高的超 音波流量計。 20 另外，優選爲，使測量流路12的流動方向的長度與由 分割構件13構成的多個小流路11的長度大致相同。例如， 在測量流路12的長度爲130mm的情況下，小流路的長度爲 110mm〜150mm。由此，測量流路12和小流路丨丨的壓力損 失保持平衡，流速大致相同，可得到可靠性高的超音波流 13 1290218 量計。該效果在其他實施形態中也可同樣發揮。 (實施形態6) 第7圖是本發明的實施形態6的超音波流量計的正面剖 面圖。本實施形態與實施形態1的不同點是，在本流路1〇中 5 央部的鼓起部17的下部設置有排出口 18。除此之外的結構 與第1圖所示的超音波流量結構相同。 在供給氣體中’除塵埃外，還含有焦油、水分，它們 附著的管路内的突起和障礙物上，經過長期使用，這些附 著物對測量性能有影響。如果在鼓起部17的下部設置排出 10 口 18，則不需要分拆超音波流量計，可以定期地將這些附 著物排出。因此可得到在長時間内可以進行可靠性高的測 量的超音波流量計。 (實施形態7) 15 20BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a 5 ultrasonic flowmeter for measuring a flow rate of a fluid such as a gas or water by ultrasonic waves, and a method of manufacturing the same. I. Prior Art 2 Background of the Invention A conventional ultrasonic flowmeter as shown in Fig. 17 is disclosed in Japanese Laid-Open Patent Publication No. Hei 60-115810. The curved portions 2, 3 bent at right angles are provided upstream and downstream of the flow path i10, and a pair of ultrasonic transducers (hereinafter referred to as vibrators) 4, 5 are fixed to the outside of the wall surfaces of the curved portions 2, 3, respectively. The arrows in the figure indicate the flow direction of the fluid. With such a configuration, ultrasonic waves are emitted from the vibrator 4 on the upstream side in parallel with the flow direction of the fluid. The vibrator 5 on the downstream side receives the ultrasonic wave and measures the propagation time of the ultrasonic wave from the vibrator 4 to the vibrator 5. Further, the phase 15 is reversed, and the vibrator 5 emits an ultrasonic wave opposite to the flow, and the ultrasonic wave is received by the vibrator 4, and the ultrasonic wave propagation time from the vibrator 5 to the vibrator 4 is measured. Then, the average flow rate of the fluid flowing in the flow path 1 is different from the two propagation time periods. The flow rate of the fluid is measured based on the cross-sectional area of the flow path 1 or the like which is obtained in advance. However, in such an ultrasonic flowmeter, due to the curved portions 2, 3, and the like, 20 vortex is irregularly generated in the liquid, and a stagnation point or the like is irregularly generated in the flow path 1, causing an error in the flow rate measurement. Further, when a large flow rate flows, the flow of the fluid bends the propagation path of the ultrasonic vibration, and the receiving sensitivity is lowered. In addition, when a large flow rate is passed, since the cross-sectional area of the measurement flow path is small, the pressure loss is large, and the required flow rate does not flow out. As a countermeasure, 1290218 When the cross-sectional area of the flow path is increased, the distance between the ultrasonic vibrators is increased, and a large output must be used to signal, so that the current consumption increases. I. SUMMARY OF THE INVENTION 3 SUMMARY OF THE INVENTION The ultrasonic flowmeter of the present invention has a tubular main flow path through which a fluid flows, and a divided member that divides the inside of the main flow path into a plurality of small flow paths. A measurement flow path is set on a part of the small flow path. On the side of the measurement flow path, a pair of ultrasonic transducers that transmit and receive ultrasonic waves are disposed obliquely to the fluid flow direction. With this configuration, by measuring the flow rate of a portion 10 of the fluid flowing in the flow path, the total flow rate of the fluid flowing through the flow path can be calculated. Further, since the present flow path and the measurement flow path are arranged in parallel with the supply line of the fluid, the flow of the fluid is not disturbed. Therefore, flow measurement can be performed with higher precision. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front cross-sectional view showing an ultrasonic flowmeter according to a first embodiment of the present invention. Fig. 2 is a side sectional view showing the ultrasonic flowmeter shown in Fig. 1. Fig. 3 is a side cross-sectional view showing the ultrasonic flowmeter according to the second embodiment of the present invention. Fig. 4 is a side cross-sectional view showing the ultrasonic flowmeter according to the third embodiment of the present invention. Figure 5 is a front cross-sectional view showing an ultrasonic flowmeter according to a fourth embodiment of the present invention. Fig. 6 is a side elevational cross-sectional view of the ultrasonic flowmeter according to the fifth embodiment of the present invention. Figure 7 is a front cross-sectional view showing an ultrasonic flowmeter according to a sixth embodiment of the present invention. Fig. 8 is a side cross-sectional view showing the ultrasonic flowmeter according to the seventh embodiment of the present invention. Fig. 9 is a front sectional view showing the ultrasonic flowmeter shown in Fig. 8. Fig. 10 is a plan sectional view showing the ultrasonic flowmeter shown in Fig. 8. Fig. 11 is a plan view showing a relay terminal of the ultrasonic flowmeter shown in Fig. 8. 10 Fig. 12 is a cross-sectional view showing the relay terminal shown in Fig. 11. Figure 13 is a side cross-sectional view showing the main part of another ultrasonic flowmeter according to Embodiment 7 of the present invention. Fig. 14A is a cross-sectional view showing an ultrasonic flowmeter according to an eighth embodiment of the present invention. 15 Fig. 14B is an enlarged cross-sectional view showing the main part of Fig. 14A. Figure 15 is a cross-sectional view showing a relay terminal of the ultrasonic flowmeter according to Embodiment 9 of the present invention. Figure 16 is a perspective view of a pin used in a relay terminal of the ultrasonic flowmeter according to Embodiment 9 of the present invention. 20 Figure 17 is a cross-sectional view of a conventional ultrasonic flowmeter. I. Embodiment 3 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the respective embodiments, the same components as those in the previous embodiment are denoted by the same reference numeral 1290218, and the detailed description thereof will be omitted. Further, the present invention is not limited to these embodiments. (Embodiment 1) FIG. 1 and FIG. 2 are a cross-sectional front view and a side cross-sectional view of an ultrasonic flowmeter according to Embodiment 1 of the present invention. The present flow path 10 of the fluid flow has a total length of 300 mm, and has a bulging portion 8 having a central portion having a diameter of 115111111, a length of 135 mm, and upstream and downstream throttle portions 7, 9 for measuring the flow rate. In the present flow path 10, a dividing member 13 having a thickness of 〇5 mm is provided, and the flow path 1〇 is divided into a lattice shape to form a small flow path 11, and a measurement flow path 12 is provided in a part of the small flow path 11. The measurement flow path 12 has a rectangular cross section of 15 mm in the longitudinal direction and 22 mm in the lateral direction, and a pair of ultrasonic vibrators (hereinafter referred to as vibrators) 14A and 14B are obliquely attached to the flow path on the surface facing the longitudinal direction. The dividing member 13 is made of stainless steel or aluminum, and the dividing member 13 constituting the measuring flow path 12 is made of aluminum. The dividing member 13 may be formed by combining a plurality of flat plates, and may be constructed integrally. Further, the portion constituting the measurement flow path 12 and the portion constituting the other small flow path 11 may be formed separately. In the measurement flow path 12, the diameter of the vibrators 14A, 14B provided in the opposite direction is 10 mm. The line 15 for driving the ultrasonic transducer electrically connects the flow rate detecting portion 21 provided outside the main flow path 10 to the vibrators 14A and 14B, and fixes it so that the flow of the fluid does not cause line vibration. The driving frequency of the acoustic transducer used in the first embodiment is 100 to 600 kHz. In the above configuration, when the flow rate is measured, ultrasonic waves are emitted from the vibrator 14A on the upstream side in the flow direction of the fluid. The ultrasonic wave is received by the vibrator 14B on the downstream side, and the flow rate detecting portion 21 measures the propagation time of the ultrasonic wave from the vibrator 1290218 14A to the vibrator 14B. On the contrary, an ultrasonic wave is emitted from the vibrator mb in opposition to the flow, and the ultrasonic wave is received by the vibrator 14A, and the propagation time of the ultrasonic wave from the vibrator 14B to the vibrator 14A is measured. Then, the average flow velocity of the fluid flowing through the measurement flow path 12 is calculated from the two propagation times, and the respective cross-sectional areas of the measurement flow path 12 and the local flow path 10 obtained in advance by 5, the axis of the connected vibrators 14A, 14B, and The flow rate detecting unit 21 calculates the flow rate of the fluid, such as the inclination of the fluid flow direction. Thus, by providing the divided member 13 in parallel with the flow, the measurement flow path 12 is not enlarged. Further, the sensitivity of the ultrasonic vibrators 14A and 14B is also not lowered, and the current consumption is not increased. In the fluid, irregular vortices and stagnation points are not generated, and flow measurement can be performed stably and with high precision. With this configuration, an ultrasonic flowmeter having a reproducible measurable flow rate can be obtained in a wide flow range from a small flow rate of about lmlm3/h to a large flow rate of 300 m/h. Further, if the cross-sectional area of the small flow path 11 and the cross-sectional area of the measurement flow path 12 are set to be substantially the same, the flow rate of each small flow path 11 and the flow rate of the measurement flow path 12 are substantially the same. In this case, the full flow rate is easily measured by multiplying the area ratio 2 of the full flow path and the measurement flow path 12. Further, it is preferable that the measurement flow path 12 has a rectangular cross section, the ultrasonic transducer is provided on the short side surface, and the long side of the 20 is arranged in the horizontal direction. That is, it is preferable that the division member 13 is formed in a lattice shape. In such a configuration, the natural convection in the measurement flow path 12 is small, and when there is no fluid flow in the present flow path 10, the vibrators 14A, 14B do not erroneously detect the flow rate. Therefore, a highly reliable ultrasonic flowmeter can be obtained. Further, it is preferable that the present flow path 1 has a swollen portion 8 in which the center portion of the inner divided member 13 and the measurement flow path 1290218 12 is larger than the inlet and the outlet. If the inner diameter of the flow path 1〇 is completely the same as the inner diameter of the connecting pipe, the effective opening area in the sectional area of the dividing member 13 and the measuring flow path 12 is reduced, and the pressure loss is increased. < The flow rate in the measurement flow path 12 increases, exceeding the range that can be measured. Therefore, by increasing the inner diameter of the central portion of the built-in measuring flow path 12, the required sectional area is ensured, and the increase in pressure loss is suppressed to be below the measurable flow rate. Next, a method of manufacturing such an ultrasonic flowmeter will be briefly described. First, an aluminum die-casting is used to form a tubular flow path 1 that flows fluid. Next, a plurality of divided members 10 are attached in parallel with the flow direction of the flow path 10, and a plurality of small flow paths u including the measurement flow path 12 are formed in the swollen portion 8. At this time, the measurement flow path 12 is formed, and the vibrators 14A and 14B are preliminarily attached to the divided member u facing the longitudinal direction so as to be inclined with respect to the flow path so as to be opposed to each other when the measurement flow path 12 is formed. Then, a throttle portion 9 which is previously formed of a resin is attached to the downstream side. Then, the flow rate detecting portion 21 is attached to the outside of the flow path 1A, and is electrically connected to the vibrators 14A and 14B. At this time, a part of the flow path and the sub-q member 13 may be integrated by the weaving molding of |L. Further, in the case where the main flow path 10 is formed by aluminum molding, the choke portions 7 and 9 may have the same shape, and may be formed as a separate member with respect to the flow path 10. Since it can be formed into an arbitrary shape by only punching the die in extrusion molding, it can be processed in a large amount and at low cost. Therefore, a highly reliable ultrasonic flowmeter can be obtained at low cost. (Embodiment 2) FIG. 3 is a side cross-sectional view showing an ultrasonic flowmeter according to Embodiment 2 of the present invention. The present embodiment differs from the first embodiment in that the division member 14 other than the measurement flow path 12 1290218 is formed to be radially formed. Further, the dividing member 14 has a thickness of about 1 to 2 mm, and it integrally extends from the main flow path 10 toward the mid-direction k in the radial direction. The structure other than this is the same as that of the ultrasonic flowmeter shown in Fig. 1. 5 In this configuration, the measurement flow path 12 is not enlarged. Further, the sensitivity of the ultrasonic transducers 14A and 14B is not lowered, and the current consumption is not increased. Irregular thirst and stagnation points are not generated in the body, and flow measurement can be performed stably and with high precision. The body-shaped tubular main flow path 1 〇 and the divided member 14 are preferably formed by extrusion molding in the same manner as in the case of the first embodiment. The front end of the plurality of divided lattices 14 formed toward the center portion in the radial direction holds the divided lattice 13 forming the measurement flow path 12, and is disposed at a given position. Since it can be formed into an arbitrary shape by using only a die in extrusion molding, it can be processed in a large amount and at low cost. (Embodiment 3) FIG. 4 is a side cross-sectional view showing an ultrasonic flowmeter according to Embodiment 3 of the present invention. The present embodiment differs from the first embodiment in that the measurement flow path 12 is located above the center of the main flow path 10 and is provided at a position having an average flow velocity of the main flow path 10. The other structure is the same as that of the ultrasonic flow rate 20 shown in Fig. 1. Generally, when the length of the supply line connected to the present flow path 10 is long, the flow velocity distribution of the inlet of the present flow path 10 is faster than the central portion with respect to the outer peripheral portion. That is, there is a position where the average flow velocity of the flow path 10 is displayed from the center portion to the outer peripheral portion. Therefore, in the present embodiment, the average flow velocity of the present flow path 10 can be measured by positioning the measurement flow path 12 1290218 at the eccentric position. Therefore, with this configuration, the flow rate can be measured with high precision. Further, the cross-sectional area of the measurement flow path 12 is about 1/15 to 1/30 or less of the sectional area of the flow path 1A. If the average flow rate of the flow path 1〇 is measured in the measurement flow path 12, and the area ratio of the measurement flow path 12 to the present flow path 10 is determined, the total flow rate of the fluid flowing in the present flow path 10 can be measured. As a result, irregular vortices and stagnation points are not generated in the flow, and smooth flow is obtained, and an ultrasonic flowmeter which can be stably measured and has high precision in a wide range of flow domains is obtained. Further, the measurement flow path 12 having the ultrasonic transducers 14A and 14B is disposed in the current flow path 10, and the division member 13 may be formed of a conductive material such as metal. With this configuration, the ultrasonic vibrators 14A, 14B can be electrically shielded to avoid electromagnetic noise. As a result, the effects of electrical noise are greatly reduced, making the ultrasonic slope flowmeter very stable. 15 Normally, the transmitting side of the ultrasonic vibrator is driven by a high-voltage, high-frequency pulse. Therefore, it is difficult to input electrical noise as an electric residual wave and a complicated measurement circuit on the ultrasonic transducer on the receiving side, and it is difficult to measure the micro+ flow rate with high precision. However, as in the case of the present embodiment, the structure in which the ultrasonic transducer for transmitting the signal and receiving the sharp signal is electrically shielded can reduce noise and obtain a high-accuracy ultrasonic flowmeter with 20 precision. This effect can be similarly exhibited in other embodiments. (Fourth Embodiment) Fig. 5 is a front plan view showing an ultrasonic flowmeter according to a fourth embodiment of the present invention. The present embodiment differs from the first embodiment in that an inclined member 12A for adjusting the ratio of the inside and the outside of the fluid entering the measurement flow path 12 is provided at the entrance of the measurement flow path 12 12 ! 29 218 . The other structure is the same as that of the ultrasonic flowmeter shown in Fig. 1. With this configuration, the fluid easily flows into the measurement flow path 12 even in a low flow rate situation. Therefore, since the fluid flows into the measurement flow path 12' at a constant rate from a small flow rate to a large flow rate, the total flow rate of the flow path 10 can be measured with high accuracy by multiplying the area ratio by a certain area ratio. (Fifth Embodiment) Fig. 6 is a side cross-sectional view showing the ultrasonic flowmeter according to a fifth embodiment of the present invention. The present embodiment differs from the first embodiment in that a part of the small flow path 11 formed by the dividing member 13 is closed to constitute the closing portion 16. Further, the line 15 connecting the ultrasonic transducer and the flow rate detecting portion 21 disposed outside the main flow path 10 passes through the closing portion 16. The other structure is the same as that of the ultrasonic flowmeter shown in Fig. 1. For example, a part of the small flow path 11 composed of the dividing member 13 is closed at one end thereof in a width of 4 to 5 mm to constitute the closing portion 16, and the line 15 is inserted into the gap. By passing the line 15 through the closing portion 16, it is possible to prevent the line 15 from being vibrated by the fluid and the connection portion from being broken, and a highly reliable ultrasonic flowmeter can be obtained. Further, it is preferable that the length of the measurement flow path 12 in the flow direction is substantially the same as the length of the plurality of small flow paths 11 constituted by the division member 13. For example, in the case where the length of the measurement flow path 12 is 130 mm, the length of the small flow path is 110 mm to 150 mm. Thereby, the pressure loss of the measurement flow path 12 and the small flow path is balanced, and the flow rate is substantially the same, and a highly reliable ultrasonic flow 13 1290218 can be obtained. This effect can also be exhibited in other embodiments. (Embodiment 6) FIG. 7 is a front cross-sectional view showing an ultrasonic flowmeter according to Embodiment 6 of the present invention. The present embodiment differs from the first embodiment in that a discharge port 18 is provided in a lower portion of the swollen portion 17 of the central portion of the flow path 1A. The other structure is the same as the ultrasonic flow rate structure shown in Fig. 1. In the supply gas, in addition to dust, it also contains tar, moisture, and protrusions and obstacles in the pipes to which they adhere. After long-term use, these attachments have an influence on the measurement performance. If the discharge port 18 is provided at the lower portion of the bulging portion 17, it is not necessary to separate the ultrasonic flowmeter, and these attachments can be periodically discharged. Therefore, an ultrasonic flowmeter which can perform highly reliable measurement over a long period of time can be obtained. (Embodiment 7) 15 20
第8圖是本發明的實施形態7的超音波流量計的側面剖 面圖，第9圖是正面剖面圖，第1()圖是平面剖面圖，第u圖、 第12圖麵巾繼端子的平關、剖面圖。本實施形態與實 施形態1的不同點是，流量檢測部21和超音波振子i4A、⑽ 的連接方纟除此之外的結構，基本上與實施形態工相同。 • π # % ·列置m 中央部直徑爲125mm、長度爲135mm的鼓超部17 ;和 游、下游的節流部7、9。上游的節流部7由鋁壓鑄件或 與本流路1G構成爲—體，下流的節流_用聚曱 樹脂製成。另外’節流部7與節流部9同樣 本流路10的中間，用板户致 用板厚4 0.5mm的分割構件13， 14 l29〇2l8 才°子狀，測量流路12設置在這些小流路11的一部分上。測 · 星流路12的截面是縱向i5mm、橫向22mm的矩形，在與縱 · 向相對向的面上，與流路傾斜地設置一對的超音波振子（以 下稱爲振子）14A、14B。構成測量流路12的分割構件13是 ’ 5無’除此之外的格子狀的分割構件13用不銹鋼製成。 - 圖中的ϋ頭表示流體的流動方向。振子14A、14B的直 桉是10mm。超音波振子驅動用的信號線25、26穿過用分割 構件13夾持的管27内，使得流體的流動不會引起振動。 流量檢測部21設置在本流路1〇的外側。流量檢測部21 # 10包括具有測量超音波在振子14A、14B之間的傳播時間的計 時部21A和流量檢測電路部21B的印刷電路基板39。中繼端 子38A的引銷28插入印刷電路基板39的連接器29中，引銷28 直接與印刷基板39連接。在本流路1〇的内側，引銷28的另 一端與超音波振子14A、14B的信號線25、26電連接。另外 15設置在中繼端子38A上的引銷28爲4根，由於將一對的超音 波振子14A、14B的4根引線集中在一個地方連接，所以作 業性好。再者，由於中繼端子38A在一個地方結束，所以密 ® 封部位爲1個，裝配程序數減少，價格降低。在成本方面有 利的同時，針對於洩漏的可靠性也提高。 · 20 另外，中知端子密閉覆蓋在大致水平地設置的本流 _ 路10的上部上設置的貫通孔37。供給管路中的塵埃、勝質、 水滴等有時附著在本流路1〇的内面和測量流路12上，有時 堆積在下部。即使在這種情況下，由於端子部位於上部， 所以塵埃、膠質、水滴等難以附著在端子部上，因此可以 15 1290218Figure 8 is a side cross-sectional view showing an ultrasonic flowmeter according to a seventh embodiment of the present invention, and Fig. 9 is a front sectional view, and Fig. 1() is a plan sectional view, and Fig. 12 and FIG. Pingguan, sectional view. The present embodiment differs from the first embodiment in that the configuration of the flow rate detecting unit 21 and the ultrasonic transducers i4A and (10) is basically the same as that of the embodiment. • π # % • The drum sub-section 17 with a diameter of 125 mm at the center and a length of 135 mm; and throttles 7 and 9 for the downstream and downstream are arranged. The upstream throttle portion 7 is made of an aluminum die-casting material or a body of the present flow path 1G, and the downstream throttle_ is made of polyfluorene resin. Further, the 'throttle portion 7 and the throttle portion 9 are in the middle of the flow path 10, and the dividing member 13 having a thickness of 4 0.5 mm is used by the board, and 14 l29 〇 2l8 is used, and the measuring flow path 12 is set in these small portions. Part of the flow path 11. The cross section of the star flow path 12 is a rectangle having a longitudinal direction of i5 mm and a lateral direction of 22 mm, and a pair of ultrasonic vibrators (hereinafter referred to as vibrators) 14A and 14B are provided obliquely to the flow path on the surface facing the longitudinal direction. The divided member 13 constituting the measurement flow path 12 is '5'. The lattice-shaped divided member 13 other than this is made of stainless steel. - The hoe in the figure indicates the direction of flow of the fluid. The diameter of the vibrators 14A, 14B is 10 mm. The signal lines 25, 26 for driving the ultrasonic transducer pass through the tube 27 sandwiched by the dividing member 13, so that the flow of the fluid does not cause vibration. The flow rate detecting unit 21 is provided outside the current channel 1〇. The flow rate detecting unit 21 #10 includes a printed circuit board 39 having a time measuring unit 21A and a flow rate detecting circuit unit 21B that measure the propagation time of the ultrasonic waves between the vibrators 14A and 14B. The lead pin 28 of the relay terminal 38A is inserted into the connector 29 of the printed circuit board 39, and the lead pin 28 is directly connected to the printed board 39. On the inner side of the flow path 1 ,, the other end of the lead pin 28 is electrically connected to the signal lines 25 and 26 of the ultrasonic transducers 14A and 14B. Further, the number of the lead pins 28 provided in the relay terminal 38A is four, and the four leads of the pair of ultrasonic transducers 14A and 14B are connected in one place, so that the workability is good. Furthermore, since the relay terminal 38A is completed at one place, the number of the seals is one, the number of assembly procedures is reduced, and the price is lowered. While it is advantageous in terms of cost, the reliability against leakage is also improved. Further, the conventional terminal is hermetically covered with a through hole 37 provided in the upper portion of the main flow path 10 which is provided substantially horizontally. Dust, spurs, water droplets, and the like in the supply line may adhere to the inner surface of the flow path 1 and the measurement flow path 12, and may accumulate in the lower portion. Even in this case, since the terminal portion is located at the upper portion, dust, gelatin, water droplets, and the like are hard to adhere to the terminal portion, so that it can be 15 1290218
波流量計。 札T。但是，在 在除去該密封材 ，由於流體從構 在利用第6圖說明的實施形態5中，線路15穿過封 16 ’但爲了確保本流路1〇的密閉性，需要將密封材料 5佈在設置於本流路10和封閉部16上的貫通孔中。但是 需要更換超音波振子14A、14B的情況下，名 料、拔出線路更換後，必須再塗佈。或者， 成線路15的芯線和護套之間洩漏，有可能不能保持氣资 與此相對’在该結構中’超音波振子14A、14B容易更換 10另外’即使施加0· IMPa的内壓也沒有洩漏，可以在p 〇.lm3/h左右的小流量至300m3/h的大流量的寬的流量範圍 内，得到再現性好可以穩定進行流量測量的超音波流量計。 另外，在中繼端子38A上，利用保持規定距離的特殊玻 璃來密封多個引銷28，該引銷28則貫通設置於由不銹鋼等 15的金屬基底構成的凸緣30上的貫通孔中。即，引銷28利用 具有氣密性、耐壓性的玻璃密封材料31進行密封。由於中 繼端子38A由玻璃來密封，氣密性好，在lxl〇_1()pa· m3/sa 以下的氣密性下，耐熱性、耐震性都優異，可以在嚴酷的 環境下使用。另外，在本流路1〇的貫通孔外周上，在凸緣 20 30的外周稍微向内的内側上設置槽，通過作爲襯#的〇形圈 36，與本流路1〇氣密地固定。 另外，通過使用玻璃作爲密封材料，可以破保引銷之 間尺寸、引銷的突出部分等引銷的尺寸精度。在中繼端子 38A的月面表面突出的引銷烈的外側端，從背面側插入設置 16 1290218 在印刷電路基板39上的孔中，與設置在印刷電路基板39表 · 面側上的連接器29電連接。引銷28和連接器29用引線連接 也可以。另外，引銷28的另一端和超音波振子14八、14B用 弓丨線連接。利用這樣的結構，既可以確保氣密性，又可以 i 5進行電連接。配置多個引銷28，使得各引銷之間的距離和 - 各個引銷與凸緣30的距離相同。凸緣30的厚度爲1.5〜3mm 左右’各引銷的外徑爲lmm左右。 利用這樣的結構，與實施形態1同樣，測量流路12的尺 寸不會增大，超音波振子14A、14B的靈敏度不降低，消量 春 1〇電流不會增大。另外，玻璃的物理性質穩定，可以長期地 進行穩定和高精度的流量測量。即，利用玻璃密封材料31 的松封氣密地密封，可以得到可在長期具有高可靠性、産 生戌漏的不良情況少的超音波流量計。 另外’中繼端子38A設置在本流路1〇的外側，設置具有Wave flow meter. Zha T. However, in the removal of the sealing material, since the fluid passes through the seal 16' in the fifth embodiment described with reference to Fig. 6, in order to secure the airtightness of the flow path 1 ,, it is necessary to affix the sealing material 5 to It is disposed in the through hole of the flow path 10 and the closing portion 16. However, when the ultrasonic transducers 14A and 14B need to be replaced, the name and the extraction line must be replaced after the replacement. Alternatively, the leakage between the core wire and the sheath of the line 15 may not be able to maintain the gas relative to this. 'In this structure, the ultrasonic transducers 14A, 14B are easily replaced by 10', even if the internal pressure of 0·IMa is applied. Leakage can be obtained in a wide flow range from a small flow rate of p 〇.lm3/h to a large flow rate of 300m3/h, and an ultrasonic flowmeter with good reproducibility and stable flow measurement can be obtained. Further, a plurality of lead pins 28 are sealed on the relay terminal 38A by a special glass holding a predetermined distance, and the lead pins 28 are inserted through the through holes provided in the flange 30 made of a metal base such as stainless steel. That is, the lead pin 28 is sealed by the glass sealing material 31 having airtightness and pressure resistance. Since the relay terminal 38A is sealed by glass, it has good airtightness, and is excellent in heat resistance and shock resistance under airtightness of lxl 〇_1 () pa· m3/sa or less, and can be used in a severe environment. Further, on the outer circumference of the through hole of the flow path 1 ,, a groove is provided on the inner side of the outer circumference of the flange 20 30 slightly inward, and the dam ring 36 serving as the lining # is airtightly fixed to the inner flow path 1 。. Further, by using glass as a sealing material, it is possible to break the dimensional accuracy of the lead pin such as the size between the pin and the protruding portion of the pin. The outer side of the lug surface of the relay terminal 38A protrudes from the rear side, and the hole of the printed circuit board 39 is placed in the hole on the printed circuit board 39 from the back side, and the connector provided on the front side of the printed circuit board 39 29 electrical connection. The lead pin 28 and the connector 29 are also connected by wires. Further, the other end of the lead pin 28 and the ultrasonic vibrators 14 and 14B are connected by a bow line. With such a structure, it is possible to ensure airtightness and to electrically connect. A plurality of pins 28 are disposed such that the distance between the pins and the distance between the pins are the same as the distance of the flanges 30. The thickness of the flange 30 is about 1.5 to 3 mm. The outer diameter of each of the lead pins is about 1 mm. With such a configuration, as in the first embodiment, the size of the measurement flow path 12 does not increase, and the sensitivity of the ultrasonic vibrators 14A and 14B does not decrease, and the current does not increase. In addition, the physical properties of the glass are stable, and stable and highly accurate flow measurement can be performed for a long period of time. In other words, the ultrasonic sealing of the glass sealing material 31 is hermetically sealed, and an ultrasonic flowmeter which is less likely to have high reliability and cause leakage during a long period of time can be obtained. Further, the relay terminal 38A is disposed outside the current flow path 1A, and is provided with
15軋饴性、可以覆蓋至少是計時部21A、流量檢測電路部21B 和中繼端子38A的殼體35。殼體35通過本流路1〇和襯墊34 達到氣密。因此，萬一從中繼端子38A或中繼端子38A的安 鲁 裝始、封面發生洩漏，利用殼體35，可以防止向外部漏出。 通過這樣的冗長設計可得到安全性更提高的超音波流量 · 20 計。 另外，在本實施形態中，引銷28伸出，直接與印刷電 路基板39電連接，但如第π圖所示的中繼端子38B那樣，如 果使用與引銷28連接的引線40、41與印刷電路基板39連 接’則不需要使用引銷28和印刷電路基板39的位置關係固 17 1290218 定’配置的自由度提高。 (實施形態8) 5 10 15 第14A圖表示本發明的實施形態8的超音波流量計的中 繼端子38C。第14B圖是其主要部分的放大剖面圖。中繼端 子實一體地設置在具有計時部21A和流量檢測電路部21B 的路基板39的_部分上，引銷28壓人印刷電路基板 39的貝通孔51和肖面表面的突緣52中。在該結構中，與印 刷電路基板39連接的焊錫％使引銷28具㈣爲密封件的功 在、Ό構中不需要連接中繼端子38C和印刷電路基板 39的引線。當引線長時，作爲電磁波的電氣雜訊容易進入 接收侧的超音波振子巾，需要用於防止雜訊和提高信^桑 (S/N)比的對策’测量電路複雜，難以高精度地測量微小的 w里與目對’如本實卿態這樣，通過採取縮短引線 長度的、σ構發出信號和接收信號的超音波振子受到的電氣 H咸J因此，可得到雜訊低、精度高的超音波流量計。 (實施形態9) 第15圖表+ 士 & μ山 双不本發明的實施形態9的超音波流量計的中 、、麄端子38D的剖面。多個引銷28，通過利用氯丁二烯橡膠、 二婦橡膠）等的橡膠32進行燒接黏接，密封在 凸、彖0上利用這種結構，可以兼顧氣密性和電連接。這 種、σ構可用便宜的模具製造，即使在生産數量少的情況 下也令易以便宜的成本進行生産。 夕卜 ， Ί 弓丨銷28的安裝部的孔53中，通過實施去毛刺 σ 可以増厚作爲密封件的橡膠32的充填厚度，可以 18 1290218 更提高密閉性。 而且，若將密封件寬的面54配置在施加氣體壓力的本 流路10側，則利用氣體壓力，可更提高密閉性。 又如第16圖所示，優選在多個引銷28的表面上實施微 5 細的滾花加工33。由此，引銷28的表面和橡膠32的親和性、 緊貼性進一步提高，引銷28針對於軸向和圓周方向的外力 的強度提高。因此，可得到氣密性可靠、沒有洩漏、可靠 性高的超音波流量計。即使對實施形態7的引銷28採用滾花 加工33，也可使引銷28和玻璃密封材料31的親和性、緊貼 10 性提高，所以這是優選的。 如上所述，本發明的超音波流量計，可以測量設置在 小流路的一部分上的測量流路的流速，算出大口徑的本流 路的全流量。因此，測量流路不會大型化，超音波振子的 靈敏度不降低，消耗電流也不增大。另外，還可提供在流 15 體中不産生不規則的漩渦和停滯點等、可以穩定地進行流 量測量的高精度的超音波流量計。該超音波流量計，在利 用超音波測量氣體、水等流體的流量中是有用的。15 is rolled and covers the casing 35 of at least the timing portion 21A, the flow rate detecting circuit portion 21B, and the relay terminal 38A. The housing 35 is airtight by the present flow path 1 and the gasket 34. Therefore, in the case where the cover is leaked from the relay of the relay terminal 38A or the relay terminal 38A, the cover 35 can be prevented from leaking to the outside. With such a lengthy design, a more secure ultrasonic flow rate can be obtained. Further, in the present embodiment, the lead pin 28 is extended and electrically connected directly to the printed circuit board 39. However, if the relay terminal 38B shown in Fig. π is used, the lead wires 40 and 41 connected to the lead pin 28 are used. When the printed circuit board 39 is connected, it is not necessary to use the positional relationship between the lead pin 28 and the printed circuit board 39, and the degree of freedom of the arrangement is improved. (Embodiment 8) 5 10 15 Fig. 14A shows a relay terminal 38C of the ultrasonic flowmeter according to Embodiment 8 of the present invention. Fig. 14B is an enlarged cross-sectional view showing the main part thereof. The relay terminal is integrally provided on the portion of the road substrate 39 having the timing portion 21A and the flow rate detecting circuit portion 21B, and the lead pin 28 is pressed into the beacon hole 51 of the printed circuit board 39 and the flange 52 of the face surface. . In this configuration, the solder % connected to the printed circuit board 39 causes the lead pin 28 to have the function of the seal, and it is not necessary to connect the relay terminal 38C and the lead of the printed circuit board 39 in the structure. When the lead wire is long, the electrical noise as an electromagnetic wave easily enters the ultrasonic vibrator towel on the receiving side, and countermeasures for preventing noise and improving the S/N ratio are required. The measuring circuit is complicated, and it is difficult to measure with high precision. In the case of a small w and a pair of eyes, as in the case of the real state, the electric H salt received by the ultrasonic oscillator that emits a signal and receives a signal by shortening the length of the lead wire can obtain low noise and high precision. Ultrasonic flowmeter. (Embodiment 9) Fig. 15 is a diagram showing a cross section of the middle and the 麄 terminal 38D of the ultrasonic flowmeter according to the ninth embodiment of the present invention. The plurality of lead pins 28 are bonded by heat-bonding to the rubber 32 such as chloroprene rubber or virgin rubber, and the sealing is applied to the projections and the ridges. This configuration allows for both airtightness and electrical connection. Such a sigma structure can be manufactured with a cheap mold, and it is easy to produce at a low cost even in a small amount of production. Further, in the hole 53 of the mounting portion of the cymbal pin 28, the deburring σ can be performed to increase the thickness of the rubber 32 as a sealing member, and the sealing property can be further improved by 18 1290218. Further, when the surface 54 having the wide sealing member is disposed on the side of the main flow path 10 to which the gas pressure is applied, the gas pressure can be used to further improve the sealing property. Further, as shown in Fig. 16, it is preferable to perform fine knurling 33 on the surface of the plurality of lead pins 28. Thereby, the affinity and adhesion of the surface of the lead pin 28 and the rubber 32 are further improved, and the strength of the lead pin 28 with respect to the external force in the axial direction and the circumferential direction is improved. Therefore, an ultrasonic flowmeter with reliable airtightness, no leakage, and high reliability can be obtained. Even if the knurling process 33 is applied to the pin 28 of the seventh embodiment, the affinity and the adhesion of the pin 28 and the glass sealing material 31 can be improved, which is preferable. As described above, the ultrasonic flowmeter of the present invention can measure the flow velocity of the measurement flow path provided on a part of the small flow path, and calculate the total flow rate of the large-diameter main flow path. Therefore, the measurement flow path is not increased in size, the sensitivity of the ultrasonic vibrator is not lowered, and the current consumption is not increased. In addition, it is possible to provide a high-precision ultrasonic flowmeter that can stably perform flow measurement without generating irregular vortices and stagnation points in the flow body. The ultrasonic flowmeter is useful for measuring the flow rate of a fluid such as a gas or water by using ultrasonic waves.
L圖式簡單說明I 第1圖是本發明的實施形態1的超音波流量計的正面剖 20 面圖。 第2圖是第1圖所示的超音波流量計的側面剖面圖。 第3圖是本發明的實施形態2的超音波流量計的側面剖 面圖。 第4圖是本發明的實施形態3的超音波流量計的側面剖 19 1290218 面圖。 第5圖是本發明的實施形態4的超音波流量計的正面剖 面圖。 第6圖是本發明的實施形態5的超音波流量計的側面剖 5 面圖。 第7圖是本發明的實施形態6的超音波流量計的正面剖 面圖。 第8圖是本發明的實施形態7的超音波流量計的側面剖 面圖。 10 第9圖是第8圖所示的超音波流量計的正面剖面圖。 第10圖是第8圖所示的超音波流量計的平面剖面圖。 第11圖是第8圖所示的超音波流量計的中繼端子的平 面圖。 第12圖是第11圖所示的中繼端子的剖面圖。 15 第13圖是本發明的實施形態7的另一種超音波流量計 的主要部分的側面剖面圖。 第14A圖是本發明的實施形態8的超音波流量計的剖面 圖。 第14B圖是第14A圖的主要部分的放大剖面圖。 20 第15圖是本發明的實施形態9的超音波流量計的中繼 端子的剖面圖。 第16圖是在本發明的實施形態9的超音波流量計的中 繼端子中所使用的引銷(pin)的立體圖。 第17圖是現有的超音波流量計的剖面圖。 1290218 【主要元件符號說明】 2、3··.彎曲部 4、5…超音波振子 7.. .上游的節流部 8.. .鼓起部 9.. .下游的節流部 10.. .本流路 11.. .小流路 12…測量流路 13.. .分割構件 14A、14B...超音波振子 15.. .線路 16.. .封閉部 17.. .鼓起部 18…排出口 21.. .流量檢測部 21A...計時部 21B...流量檢測電路部 25、26...信號線 27···管 28…引銷 29.. .連接器 30…凸緣 30A...去毛刺加工 31.. .玻璃密封材料 32.. .橡膠 33…滾花加工 36.. .0.圈 38A、38B、38C、38D···中繼 端子 39··.印刷電路基板 40、41…引線 51.. .貫通孔 53···孔 55…焊錫BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front cross-sectional view showing the ultrasonic flowmeter according to the first embodiment of the present invention. Fig. 2 is a side sectional view showing the ultrasonic flowmeter shown in Fig. 1. Fig. 3 is a side cross-sectional view showing the ultrasonic flowmeter according to the second embodiment of the present invention. Fig. 4 is a side elevational view, in section 19 1290218, of the ultrasonic flowmeter according to the third embodiment of the present invention. Figure 5 is a front cross-sectional view showing an ultrasonic flowmeter according to a fourth embodiment of the present invention. Fig. 6 is a side cross-sectional view showing the ultrasonic flowmeter according to the fifth embodiment of the present invention. Figure 7 is a front cross-sectional view showing an ultrasonic flowmeter according to a sixth embodiment of the present invention. Figure 8 is a side cross-sectional view showing an ultrasonic flowmeter according to a seventh embodiment of the present invention. 10 Fig. 9 is a front sectional view showing the ultrasonic flowmeter shown in Fig. 8. Fig. 10 is a plan sectional view showing the ultrasonic flowmeter shown in Fig. 8. Fig. 11 is a plan view showing a relay terminal of the ultrasonic flowmeter shown in Fig. 8. Fig. 12 is a cross-sectional view showing the relay terminal shown in Fig. 11. Fig. 13 is a side cross-sectional view showing the main part of another ultrasonic flowmeter according to Embodiment 7 of the present invention. Fig. 14A is a cross-sectional view showing an ultrasonic flowmeter according to an eighth embodiment of the present invention. Fig. 14B is an enlarged cross-sectional view showing the main part of Fig. 14A. Fig. 15 is a cross-sectional view showing a relay terminal of the ultrasonic flowmeter according to Embodiment 9 of the present invention. Figure 16 is a perspective view of a pin used in a relay terminal of the ultrasonic flowmeter according to Embodiment 9 of the present invention. Figure 17 is a cross-sectional view of a conventional ultrasonic flowmeter. 1290218 [Description of main component symbols] 2, 3··. Bending section 4, 5... Ultrasonic vibrator 7. The upstream throttling section 8. The bulging section 9. The downstream throttling section 10.. The flow path 11: the small flow path 12...the measurement flow path 13. The division member 14A, 14B...the ultrasonic vibrator 15 .. the line 16 .. the closed portion 17 .. the bulging portion 18... Discharge port 21.. Flow rate detecting unit 21A... Time measuring unit 21B... Flow rate detecting circuit unit 25, 26... Signal line 27··· Tube 28...Like 29.. Connector 30...Flange 30A...Deburring processing 31.. Glass sealing material 32.. Rubber 33...Knurling processing 36.. .0.Circle 38A, 38B, 38C, 38D···Relay terminal 39··. Printed circuit Substrate 40, 41...lead 51.. through hole 53··· hole 55...solder
21twenty one