1288704 九、發明說明： 【發明所屬之技術領域】 本發明相關於一種微流體喷射裝置及相關喷孔檢測方法，尤指 一種可檢測和即時監控喷孔製程之微流體喷射裝置及相關方法。 【先前技術】 微流體喷射裝置(microfluid injecting device)可用來喷出如墨 水、汽油、化學溶液或其它流體物質，已被廣泛地運用於喷墨印 表機(inkjetprinter)的喷墨印表頭等設備中。隨著微流體喷射裝置 的可靠度的不斷提昇、成本的大幅降低、以及可應用於高頻率與 南解析度之高品質微流體材質的相繼問市，微流體喷射裝置的用 途也日趨廣泛。舉例來說，除了常見於喷墨印表機之喷墨印表頭 外’微流體喷射裝置亦可應用於傳真機彳色^匕如㈤此^丨此”多功 能事務機(multi彻ction printer，MPF)、燃料喷射系統(fuel system)、藥物注射系統(dmgddivery奶㈣、喷印光刻技術㈣故 lithography)及微喷射推進系統(micr〇你pr〇puisi〇n吵贫㈣等各類 不同的領域。 舉例來說，當微越倾裝置朗於列印或輸出㈣文字或圖 片"像f(如噴墨印表機或傳真機)，其喷孔之尺寸和位置會影響墨 滴喷出速率、顯大小，及墨滴飛行方向等雜。噴墨印表機可 藉由不时孔抑不同大小之墨滴來形卩文件，如此不但可使其 斤歹！ P之文件的色階變化更多樣，同時亦可加快列印色階時之速 1288704 • 度。因此’噴孔的製程對微流體喷射裝置之表現影響甚鉅 ’如何 確保微流體噴射裝置之每一喷孔皆能符合要求，也是在製造微流 體喷射裝置時的重要課題。 請參考第1圖，第1圖為先前技術中一微流體噴射裝置1〇之 上視圖。微流體噴射裝置10包含複數個喷孔Nl-Nn。依據不同設 _ 計，喷孔Nl_Nn可能具相異之孔徑、孔深，或排列方式，通常藉 由蝕刻製程來形成喷孔。一般來說，微流體喷射裝置1〇之喷孔 Nl-Nn首先經由薄膜沉積、曝光顯影及蝕刻等步驟形成於一基材 (如矽晶圓)之上，接著於喷孔製程完成後進行電性檢測或結構檢測 等功能驗證，最後才會進行切割與封裝等後續製程。 在先前技術中，為了確保微流體喷射裝置1〇之每一喷孔皆能 符合製程要求，會在完成喷孔製程後以光學方式對喷孔數目、喷 馨孔位置、喷孔尺寸，或喷孔週邊輪廓進行結構制，在執行後續 製程前先排除喷孔製程不完善之不良品，以省生產成本支出。一 般常使用的喷孔結構檢測技術係利用光學顯微鏡來進行目視檢 測，然而^:限於光學顯微鏡之放大倍率及觀測深度(景深 術僅能針對辄數目、飢位置或慨週邊輪鱗表面參數進行 檢測，並無法對喷孔的垂直結構(例如孔深)等參數進行檢測。另 外，先前技術僅能在喷孔製程完成或是進行至一預定階段之後， 才能以光學方式進行結構檢測，並無法對喷孔製程進行即時監控。 1288704 【發明内容】 本發明提供—射_似_之微流㈣職置，其包含- 噴孔層’其上喊有_喷孔，用來如誠體；—壓電材料層， 。又於树孔層上，—表面聲波發射器，設於該壓電材料層之上， 用來發射-個寬頻之表面聲波訊號；以及—表面聲波接收器，設 於4壓電材料層之上，絲接收該寬頻表面聲波訊號也經該喷孔 後之訊號。 本發明另提供一種可即時控制噴孔製程之方法，其包含⑻開始 執行一喷孔製程；（b)發射一個寬頻之表面聲波訊號、（c)i測該寬 頻表面聲波訊號通過該喷孔製程所形成之喷孔後之訊號，以及(d) 依據於步驟(C)所量測到之訊號決定停止該喷孔製程之時間。 本發明另提供一種檢測喷孔製程之方法，其包含(a)開始執行一 喷孔製程、（b)於完成該喷孔製程後發射一個寬頻之表面聲波訊 號，以及(c)量測該寬頻表面聲波訊號通過該喷孔製程所形成之喷 孔後之訊號。 【實施方式】 請參考第2圖，第2圖為本發明第一實施例中一微流體噴射裝 置101之上視圖。微流體喷射裝置101包含一喷孔層11、一壓電 (piezoelectric)材料層21、一訊號產生器31、〆頻譜分析器41、— 表面聲波發射器51，以及一表面聲波接收器61。喷孔層11包含 1288704 兩喷孔N1和N2 ’依據不同設計，喷孔Ni和N2可能具相異之孔 徑、孔深，及排列方式，因此第2圖所示之喷孔結構僅為示意圖， 並不侷限本發明之範疇。壓電材料層21設於喷孔層u之上，而 表面聲波發射器51和表面聲波接收器&則設於壓電材料層21之 上。壓電材料層21可包含氮化銘(A1N)、氧化辞(ZnO)、銳酸鋰 (1^1)〇3)、组酸鐘(1^03)，或鍅鈦酸錯(1^〇12丨1^〇1^1^1^， PZT)···等壓電材質。訊號產生器31之作用在於提供一具有特定頻 寬的訊號，而頻譜分析器41之作用在於進行頻率響應(frequency response)量測。訊號產生器31產生之訊號透過表面聲波發射器5ι 來產生一個見頻之表面聲波(surface acoustic wave)訊號。表面聲波 接收器61接收表面聲波發射器51所發射之表面聲波訊號，並將 接收到之訊號傳至頻譜分析器41以進行頻率響應量測。 請參考第3圖，第3圖為本發明第一實施例中微流體喷射裝置 101延著切線G-G’之剖面示意圖。在第3圖中，噴孔N1和N2之 孔徑分別由XI和X2來表示，而喷孔Nl *N2之孔深分別由 和Y2來表不。假使在本發明第一實施例中，喷孔川之孔徑小於 喷孔N2之孔徑，但喷孔N1之孔深大於喷孔N2之孔深，亦即 XKX2且Y1>Y2 ’喷孔N1和N2之垂直結構如第3圖所示。當 表面聲波發射器51所發射之表面聲波訊號在行進過程中經過一噴 孔，此喷孔會阻礙表面聲波訊號的傳遞並影響其後續運動，而噴 孔對表面聲波訊號的影響則相關於喷孔之孔徑、孔深和位置等炎 1288704 清參考第4圖，第4圖為本發明第一實施例中頻譜分析器41 所Ϊ測到之頻率響應訊號圖。在第4圖中，橫軸代表訊號之頻率 分佈’單位為百萬赫兹(MHz);縱軸代表訊號之插入損失(inserti〇n loss)，單位為分貝(dB)。當喷孔層U未包含任何喷孔時，頻譜分 析器41所量測到之訊號由曲線八(第4圖之實線)來表示；當表面 聲波發射器51所發射之寬頻表面聲波訊號經過喷孔川後，頻譜 •分析器41所量測到之訊號由曲線B(第4圖之破折線)來表示；當 表面聲波發射器Μ所發射之寬頻表面聲波訊號經過喷孔N2後， 頻谱为析器41所量測到之訊號由曲線c(第4圖之點劃線)來表 示。如第4圖所示，喷孔州之孔徑χι和喷孔N2之孔徑幻會 影響表面聲波職之鮮分佈，可分勸&和^絲示；而喷 孔N1之孔深Y1和喷孔N2之孔深γ2會表面聲波訊號之插入損 失，可分別由ILY#ILY2來表示。因此，本發明可藉由頻譜分析 #器41所量測到之曲線師。和曲線A之差異，來分別判斷喷孔 N1和N2之孔徑、孔深和位置是否符合要求。 凊參考第5圖，第5圖為本發明第二實施例中一微流體噴射裝 置102之上視圖。微流體喷射裝置1〇2包含一喷孔層a、一壓電 材料層22、-訊號產生n 32、一鱗分_ 42、一表面聲波發射 器52，以及一表面聲波接收器62。噴孔層12包含複數個噴孔 Nl-Nn，依據不同設計，喷孔Ν1-Νη可能具相異之孔徑、孔深， 及排列方式，因此第5圖所示之喷孔結構僅為示意圖，並不偶限 1288704 本發明之範嘴。壓電材料層22設於噴孔層u之上，而表面聲波 發射器52和表面聲波接收器62則設於壓電材料層22之上。壓電 材料層21可包含氮化铭' 氧化鋅、鈮酸經、短酸鐘，或槪酸錯… 等壓電材質。訊號產生器32之作用在於提供—具有特定頻寬的訊 號，而頻譜分析器42之作用在於進行頻率響應量測。訊號產生器 32產生之訊號透過表面聲波發射g 52後產生一個寬頻之表面聲 波訊號(如第4圖所示）。表面聲波接收器62接收表面聲波發射器 52所發射之表面聲波訊號，並將接收到之訊號傳至頻譜分析器幻 以進行頻率響應量測。在本發明第二實施例中，表面聲波發射器 52和表面聲波接收器62各包含一斜交指叉式表面聲波換能器 (slanted surface acoustic wave interdigital transducer)，此斜交指叉式 表面聲波換能器可產生或接收一個寬頻之表面聲波訊號。構成表 面聲波發射器52和表面聲波接收器62之電極材料可包含鋁(A1)、 金(Au)或其它種類之金屬材質。 请參考第6圖，第6圖為本發明第三實施例中一微流體喷射裝 置103之上視圖。微流體喷射裝置1〇3包含一喷孔層η、一壓電 材料層23、一訊號產生器33、一頻譜分析器43、一表面聲波發射 器53，以及一表面聲波接收器63。喷孔層13包含複數個喷孔 Nl-Nn，依據不同設言十，喷孔Nl-Nn可能具相異之孔徑、孑匕深， 及排列方式，因此第6圖所示之喷孔結構僅為示意圖，並不侷限 本發明之範疇。壓電材料層23設於喷孔層π之上，而表面聲波 發射器53和表面聲波接收器63則設於壓電材料層23之上。訊號 1288704 產生态33之作用在於提供一具有特定頻寬的訊號，兩頻譖分析器 43之作用在於進行頻率響應量測。訊號產生器33產生之訊號透過 表面聲波發射器53後產生一個寬頻之表面聲波訊號。表面聲波接 收器63接收表面聲波發射器μ所發射之表面聲波訊號，並將接 收到之訊號傳至頻譜分析器43以進行頻率響應量測。在本發明第 三實施例中，表面聲波發射器53和表面聲波接收器63各包含一 並聯式表面聲波換能器(shunt surface acoustic wave interdigital transducer),此並聯式表面聲波換能器包含複數個具有不同中心頻 率的子平行式表面聲波換能器(sub parallel SAW interdigital transducer)，因此可產生或接收一個寬頻之表面聲波訊號。構成表 面聲波發射器53和表面聲波接收器63之電極材料可包含|呂、金 或其它金屬材質。 睛參考第7圖，第7圖為本發明第四實施例中一微流體喷射裝 φ置1⑽之上視圖。微流體喷射裝置104包含一喷孔層14、一壓電 材料層24、一訊號產生器34、一頻譜分析器44、一表面聲波發射 器54，以及一表面聲波接收器64。本發明第四實施例之微流體噴 射裝置104和第二實施例之微流體喷射裝置1〇2結構類似，其相 異之處在於微流體喷射裝置104之表面聲波接收器64係包含一並 聯式表面聲波換能器，可透過此並聯式表面聲波換能器接收一個 寬頻之表面聲波訊號。 請參考第8圖，第8圖為本發明第五實施例中一微流體喷射裝 1288704 置〗〇5之上視圖。微流體喷射裝置i〇5包含一喷孔層15、一壓電 材料層25、一訊號產生器35、一頻譜分析器45、一表面聲波發射 器55，以及一表面聲波接收器65。本發明第五實施例之微流體喷 射裝置105和第三實施例之微流體喷射裝置1〇3結構類似，其相 異之處在於微流體喷射裝置105之表面聲波接收器65係包含一斜 交指叉式表面聲波換能器，可透過此斜交指叉式表面聲波換能器 ^ 接收一個寬頻之表面聲波訊號。 在本發明第二至第五實施例中，表面聲波發射器和表面聲波接 收器係採用斜交指叉式表面聲波換能器或並聯式表面聲波換能 器。然而，本發明亦可使用其它種類之表面聲波換能器，在第5 圖至第8圖所示僅為本發明之實施例，並不侷限本明之範疇。 a月參考第9圖，第9圖為本發明第六實施例中一微流體喷射裝 •置106之上視圖。微流體喷射裝置106包含一喷孔層16、一壓電 材料層26、一訊號產生器36、一頻譜分析器牝、複數個表面聲波 發射器56、複數個表面聲波接收器66、開關組％和％，以及一 開關控制單it 96。喷孔層16 &含複數個噙孔組A1-An,每一噴孔 組各包含複數個噴孔Ν1·Νη。依據不同設計，喷孔抓跑可能具 相異之孔彳A、孔》罙及排列方式。—般而言，微流體喷錄置之喷 孔曰有規律性的排列關係，因此，在微流體喷射裝置川6中， 每一嘴孔組之每-喷孔和其它噴孔組之械射孔具相同之孔徑 及孔深，例如喷孔組A1-An之喷孔N1冑具有相同孔徑和孔深， 1288704 而喷孔組Al-An t喷孔ΝΙ_Νη之排列方式相同。卿組冗和秘 各包含複數個關，每—表面聲波發射^ 56透過_組76中相 對應之兩開_接至訊產生器36，而每一表面聲波接收器66 透過開關組86中相對應之兩開_接至頻譜分析器你。開關控制 單元96可控綱關組76和86中每一開關的開啟或關％。因此， 本發明之第六實施例可針對所有喷孔朗之喷孔進行檢測，透過 複數個表面聲波發射H 56分別對相對應之攸組進行頻率掃描， 而透過複數錄Φ聲波接㈣66㈣接收姆絲面聲波發射器 56所發射之㈣表面聲_峨，並將接_之訊號傳至賴分析 器46以進行頻率響應量測。同時，本發明之第六實施例亦可針對 喷孔組或部分喷孔組内之喷孔進行檢測，利用開關控制單元96 開啟開關組76和86中對應於欲檢測喷孔組之開關，以將對應於 欲檢測喷孔組之表面聲波發射器56及表面聲波接收器66分別電 性連接於訊號產生器36和頻譜分析器46，再進行前述之檢測步 因此，本發明第六實施例之微流體喷射裝置1〇6可藉由頻譜分 析器46所量測到之訊號判斷喷孔結構是否符合要求，並可彈性地 針對單一、部份或所有喷孔組進行檢測。微流體喷射裝置1⑽之 每一表面聲波發射器56和表面聲波接收器66可採用如第5圖至 第8圖所示之斜交指叉式表面聲波換能器或並聯式表面聲波換能 器’或是其它種類之表面聲波換能器。 1288704 本發明可在喷孔製程全部完成後或是進行至一預定階段後，對 喷孔結構進行檢測，同時亦可在形成喷孔的過程中對喷孔製程進 行即時監控。請參考第10圖，第1〇圖之流程圖說明了本發明中 一種控制喷孔製程之方法’其包含下列步驟： 步驟110: 執行喷孔製程； 步驟120:發射複數個具不同中心頻率之寬頻表面聲波訊 號； 步驟130:量測該寬頻表面聲波訊號通過喷孔製程所形成 之喷孔後之頻率響應訊號； 步驟140··判斷頻率響應訊號是否已符合一預定值；若頻率 響應訊说已付合預定值，執行步驟15〇 ;若頻率 響應訊號未符合預定值，執行步驟11〇 ;以及 步驟150:中斷喷孔製程。 當步驟140判斷量測到之頻率響應訊號符合預定值時，代表 喷孔製程_成之喷孔其位置、尺寸，或週邊輪料結構符合要 求，此時會執行步驟150以中斷喷孔製程。當步驟140判斷量測 到之頻率響賴絲符合預定辦，絲魏製職形成之喷孔 ’、位置尺寸，或週邊輪扁等結構尚未符合要求，此時會執行步 驟no以繼續執行喷孔製程。 本發明依縣面聲波罐通過喷錢之鮮響應喊，來檢測 1288704 喷孔製程，脈不會受祕科林方叙放大倍似朗深度 的限制’因此能同時針對噴孔數目、喷孔位置或喷孔週邊輪廊等 表面結構以及⑽㈣餘縣崎檢測。本侧並可彈性地針 對單一、雜或所有魏聰檢測。此外，本㈣可在喷孔製程 全部完成献蹄至-預續段後，對魏結觀行檢測，同時 亦可在形成喷孔的過程中對喷孔製程進行即時監控。 以上所述僅為本發明之較佳實施例，凡依本發明申請專利範 圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。 【圖式簡單說明】 第1圖為先前技術中一微流體喷射裝置之上視圖。 第2圖為本發明第一實施例中一微流體喷射裝置之上視圖。 第3圖為本發明第一實施例之微流體喷射裝置延著切線G_G，之剖 φ 面示意圖。 第4圖為本發明第一實施例之頻譜分析器所量測到之頻率響應訊 號圖。 第5圖為本發明第二實施例中一微流體喷射裝置之上視圖。 第6圖為本發明第三實施例中一微流體喷射裝置之上視圖。 第7圖為本發明第四實施例中一微流體喷射裝置之上視圖。 * 第8圖為本發明第五實施例中一微流體喷射裝置之上視圖。 第9圖為本發明第六實施例中一微流體喷射裝置之上視圖。 第10圖為本發明中一種控制喷孔製程方法之流程圖。 1288704 【主要元件符號說明】 Nl-Nn 喷孔 Al-An 11-16 喷孔層 21-26 31-36 訊號產生器 41-46 51-56 表面聲波發射器 61-66 76、86 開關組 96 X卜X2 孔徑 Y卜Y2 G-G， 切線 A-C 10、101-106 微流體喷射裝置 110-150 步驟 喷孔組 壓電材料層 頻譜分析器 表面聲波接收器 開關控制單元 孔深 曲線1288704 IX. Description of the Invention: [Technical Field] The present invention relates to a microfluid ejection device and a related orifice detecting method, and more particularly to a microfluid ejection device and related method capable of detecting and monitoring an orifice process. [Prior Art] A microfluid injecting device can be used to eject ink, gasoline, chemical solutions or other fluid substances, and has been widely used in inkjet printers such as inkjet printers. In the device. With the increasing reliability of microfluidic ejection devices, the significant cost reduction, and the high quality of microfluidic materials that can be applied to high frequencies and south resolutions, the use of microfluidic ejection devices is becoming more widespread. For example, in addition to the inkjet printer heads commonly found in inkjet printers, the microfluid ejection device can also be applied to fax machines. For example, (5) this multifunction printer (multi-function printer) , MPF), fuel injection system (fuel system), drug injection system (dmgddivery milk (four), printing lithography (four) lithography) and micro-jet propulsion system (micr〇 pr〇puisi〇n apoxia (four) and other different types For example, when the micro-dip device is used to print or output (4) text or picture "like f (such as inkjet printer or fax machine), the size and position of the nozzle will affect the ink droplet spray. The speed, the size of the ink, and the direction of flight of the ink droplets. The inkjet printer can shape the file by using ink droplets of different sizes from time to time, so that it can not only make it look like it! More, it can also speed up the printing speed of 1288704 • degrees. Therefore, the process of the orifice has a great influence on the performance of the microfluid ejection device. How to ensure that each orifice of the microfluid ejection device can meet the requirements. Required, also in the manufacture of microfluid ejection devices 1 is a top view of a microfluid ejection device 1 of the prior art. The microfluid ejection device 10 includes a plurality of injection holes N1-Nn. The apertures, the depths of the holes, or the arrangement may be different, and the orifices are usually formed by an etching process. Generally, the nozzles N1-Nn of the microfluid ejection device 1 are firstly deposited by thin film, exposed, developed, etched, etc. The steps are formed on a substrate (such as a germanium wafer), and then subjected to functional verification such as electrical detection or structure inspection after the completion of the nozzle process, and finally the subsequent processes such as cutting and packaging are performed. In the prior art, Ensure that each orifice of the microfluidic injection device 1 can meet the process requirements, and optically align the number of orifices, the location of the orifices, the size of the orifices, or the contours of the orifices after completion of the orifice process. Exclude defective products with imperfect nozzle process before performing the subsequent process to save production cost. The commonly used nozzle structure detection technology uses optical microscope for visual inspection. And ^: limited to the magnification and depth of observation of the optical microscope (depth of field can only detect the number of sputum, hunger position or surface parameters of the surrounding scales, and can not detect the vertical structure of the orifice (such as the depth of the hole) and other parameters In addition, the prior art can only perform structural inspection optically after the nozzle process is completed or after a predetermined period of time, and the nozzle process cannot be monitored immediately. 1288704 [Summary] The present invention provides Like the _ microflow (four) position, which contains - the orifice layer 'there is a _ orifice, used for honesty; - piezoelectric material layer, and on the tree hole layer, - surface acoustic wave emitter, Provided on the piezoelectric material layer for emitting a wide-band surface acoustic wave signal; and a surface acoustic wave receiver disposed on the layer of 4 piezoelectric material, the wire receiving the broadband surface acoustic wave signal also passing through the orifice After the signal. The invention further provides a method for controlling the nozzle process in real time, comprising: (8) starting a nozzle process; (b) transmitting a wide-band surface acoustic wave signal, and (c) measuring the broadband surface acoustic wave signal through the nozzle hole process; The signal after the formed orifice, and (d) the time measured by the step (C) determines the time to stop the orifice. The invention further provides a method for detecting an orifice process, comprising: (a) starting a nozzle process, (b) emitting a broadband surface acoustic wave signal after completing the nozzle process, and (c) measuring the broadband The signal after the surface acoustic wave signal passes through the nozzle hole formed by the nozzle hole process. [Embodiment] Please refer to Fig. 2, which is a top view of a microfluid ejection device 101 in the first embodiment of the present invention. The microfluid ejection device 101 comprises a perforation layer 11, a piezoelectric material layer 21, a signal generator 31, a chirp spectrum analyzer 41, a surface acoustic wave emitter 51, and a surface acoustic wave receiver 61. The orifice layer 11 comprises 1288704 two orifices N1 and N2'. According to different designs, the orifices Ni and N2 may have different pore diameters, pore depths, and arrangement manners, so the orifice structure shown in Fig. 2 is only a schematic diagram. It is not intended to limit the scope of the invention. The piezoelectric material layer 21 is disposed above the orifice layer u, and the surface acoustic wave emitter 51 and the surface acoustic wave receiver & are disposed on the piezoelectric material layer 21. The piezoelectric material layer 21 may comprise nitriding (A1N), oxidized (ZnO), lithium lithate (1^1) 〇 3), group acid clock (1^03), or strontium titanate (1^〇) 12丨1^〇1^1^1^, PZT)··· and other piezoelectric materials. The function of the signal generator 31 is to provide a signal having a specific bandwidth, and the spectrum analyzer 41 functions to perform frequency response measurement. The signal generated by the signal generator 31 is transmitted through the surface acoustic wave transmitter 5 to generate a surface acoustic wave signal. The surface acoustic wave receiver 61 receives the surface acoustic wave signal emitted from the surface acoustic wave transmitter 51, and transmits the received signal to the spectrum analyzer 41 for frequency response measurement. Referring to Figure 3, there is shown a cross-sectional view of the microfluid ejection device 101 in the first embodiment of the present invention extending along a tangent line G-G'. In Fig. 3, the apertures of the nozzle holes N1 and N2 are represented by XI and X2, respectively, and the hole depths of the nozzle holes N1*N2 are respectively represented by and Y2. In the first embodiment of the present invention, the aperture of the nozzle hole is smaller than the aperture of the nozzle hole N2, but the hole depth of the nozzle hole N1 is larger than the hole depth of the nozzle hole N2, that is, XKX2 and Y1>Y2' nozzle holes N1 and N2. The vertical structure is shown in Figure 3. When the surface acoustic wave signal emitted by the surface acoustic wave transmitter 51 passes through an orifice during the traveling, the orifice will hinder the transmission of the surface acoustic wave signal and affect its subsequent movement, and the influence of the orifice on the surface acoustic wave signal is related to the spraying. Hole diameter, hole depth and position of the hole 1288704. Referring to Fig. 4, Fig. 4 is a frequency response signal diagram detected by the spectrum analyzer 41 in the first embodiment of the present invention. In Fig. 4, the horizontal axis represents the frequency distribution of the signal in units of millions of hertz (MHz); the vertical axis represents the insertion loss of the signal, in decibels (dB). When the orifice layer U does not contain any orifices, the signal measured by the spectrum analyzer 41 is represented by a curve eight (solid line in FIG. 4); when the surface acoustic wave transmitter 51 emits a broadband surface acoustic wave signal After the nozzle hole, the signal measured by the spectrum analyzer 41 is represented by curve B (the broken line of FIG. 4); when the surface acoustic wave signal emitted by the surface acoustic wave emitter 经过 passes through the nozzle hole N2, the frequency is The signal measured by the spectrum analyzer 41 is represented by a curve c (dotted line in Fig. 4). As shown in Fig. 4, the aperture diameter of the orifice χι and the nozzle hole N2 of the orifice state will affect the fresh distribution of the surface acoustic wave, and can be divided into the & and the wire; and the hole depth Y1 of the nozzle N1 and the orifice The hole depth γ2 of N2 will cause the insertion loss of the surface acoustic wave signal, which can be represented by ILY#ILY2, respectively. Therefore, the present invention can be measured by the spectrum analyzer #41. The difference between the curve A and the curve A is used to determine whether the apertures, hole depths and positions of the nozzle holes N1 and N2 meet the requirements. Referring to Fig. 5, Fig. 5 is a top plan view of a microfluid ejection device 102 in a second embodiment of the present invention. The microfluid ejection device 1 2 includes a perforation layer a, a piezoelectric material layer 22, a signal generation n 32, a scale _42, a surface acoustic wave emitter 52, and a surface acoustic wave receiver 62. The orifice layer 12 comprises a plurality of orifices N1-Nn. According to different designs, the orifices Ν1-Νη may have different pore sizes, pore depths, and arrangement manners. Therefore, the orifice structure shown in FIG. 5 is only a schematic view. The invention is not limited to 1288704. The piezoelectric material layer 22 is disposed over the orifice layer u, and the surface acoustic wave emitter 52 and the surface acoustic wave receiver 62 are disposed over the piezoelectric material layer 22. The piezoelectric material layer 21 may comprise a piezoelectric material such as a zinc oxide, a strontium hydride, a short acid clock, or a bismuth acid. The signal generator 32 functions to provide a signal having a particular bandwidth, and the spectrum analyzer 42 functions to perform a frequency response measurement. The signal generated by the signal generator 32 is transmitted through the surface acoustic wave to generate a wide surface acoustic wave signal (as shown in Fig. 4). The surface acoustic wave receiver 62 receives the surface acoustic wave signal emitted by the surface acoustic wave transmitter 52 and transmits the received signal to the spectrum analyzer for frequency response measurement. In the second embodiment of the present invention, the surface acoustic wave transmitter 52 and the surface acoustic wave receiver 62 each include a slanted surface acoustic wave interdigital transducer, the oblique interdigitated surface acoustic wave The transducer can generate or receive a wide-band surface acoustic wave signal. The electrode material constituting the surface acoustic wave emitter 52 and the surface acoustic wave receiver 62 may comprise aluminum (A1), gold (Au) or other kinds of metal materials. Please refer to Fig. 6, which is a top view of a microfluid ejection device 103 in the third embodiment of the present invention. The microfluid ejection device 1〇3 includes a perforation layer η, a piezoelectric material layer 23, a signal generator 33, a spectrum analyzer 43, a surface acoustic wave transmitter 53, and a surface acoustic wave receiver 63. The orifice layer 13 comprises a plurality of orifices N1-Nn. According to different designations, the orifices Nl-Nn may have different pore diameters, depths, and arrangements, so the orifice structure shown in Fig. 6 is only The illustrations are not intended to limit the scope of the invention. The piezoelectric material layer 23 is disposed above the orifice layer π, and the surface acoustic wave emitter 53 and the surface acoustic wave receiver 63 are disposed above the piezoelectric material layer 23. The signal 1288704 generates the signal 33 to provide a signal having a specific bandwidth, and the dual frequency analyzer 43 functions to perform frequency response measurement. The signal generated by the signal generator 33 is transmitted through the surface acoustic wave transmitter 53 to generate a wide-band surface acoustic wave signal. The surface acoustic wave receiver 63 receives the surface acoustic wave signal emitted by the surface acoustic wave transmitter μ, and transmits the received signal to the spectrum analyzer 43 for frequency response measurement. In the third embodiment of the present invention, the surface acoustic wave transmitter 53 and the surface acoustic wave receiver 63 each include a shunt surface acoustic wave interdigital transducer, and the parallel surface acoustic wave transducer includes a plurality of A sub-parallel SAW interdigital transducer with different center frequencies, so that a wide-band surface acoustic wave signal can be generated or received. The electrode material constituting the surface acoustic wave emitter 53 and the surface acoustic wave receiver 63 may be made of luminal, gold or other metal materials. Referring to Fig. 7, Fig. 7 is a top view of a microfluid ejection device φ set 1 (10) in the fourth embodiment of the present invention. The microfluid ejection device 104 includes a perforation layer 14, a piezoelectric material layer 24, a signal generator 34, a spectrum analyzer 44, a surface acoustic wave transmitter 54, and a surface acoustic wave receiver 64. The microfluid ejection device 104 of the fourth embodiment of the present invention is similar in structure to the microfluid ejection device 1〇2 of the second embodiment, except that the surface acoustic wave receiver 64 of the microfluid ejection device 104 includes a parallel type. The surface acoustic wave transducer can receive a wide-band surface acoustic wave signal through the parallel surface acoustic wave transducer. Please refer to FIG. 8. FIG. 8 is a top view of a microfluidic spray device 1288704 according to a fifth embodiment of the present invention. The microfluid ejection device i〇5 includes an orifice layer 15, a piezoelectric material layer 25, a signal generator 35, a spectrum analyzer 45, a surface acoustic wave emitter 55, and a surface acoustic wave receiver 65. The microfluid ejection device 105 of the fifth embodiment of the present invention is similar in structure to the microfluid ejection device 1〇3 of the third embodiment, which is different in that the surface acoustic wave receiver 65 of the microfluid ejection device 105 includes a skew The interdigitated surface acoustic wave transducer can receive a wide-band surface acoustic wave signal through the oblique interdigitated surface acoustic wave transducer. In the second to fifth embodiments of the present invention, the surface acoustic wave transmitter and the surface acoustic wave receiver employ a skew interdigitated surface acoustic wave transducer or a parallel surface acoustic wave transducer. However, other types of surface acoustic wave transducers can be used in the present invention, and only the embodiments of the present invention are shown in FIGS. 5 to 8 and are not intended to limit the scope of the present invention. Referring to Figure 9 for a month, Figure 9 is a top view of a microfluidic spray device 106 in accordance with a sixth embodiment of the present invention. The microfluid ejection device 106 comprises an orifice layer 16, a piezoelectric material layer 26, a signal generator 36, a spectrum analyzer, a plurality of surface acoustic wave emitters 56, a plurality of surface acoustic wave receivers 66, and a switch group %. And %, as well as a switch control single it 96. The orifice layer 16 & includes a plurality of orifice groups A1-An, each of which comprises a plurality of orifices Ν1·Νη. Depending on the design, the nozzles may have different apertures, holes, holes and arrangements. In general, the micro-fluid ejection orifices have a regular arrangement relationship. Therefore, in the microfluid ejection device Chuan 6, the injection of each nozzle hole and other orifice groups of each nozzle hole group The holes have the same hole diameter and hole depth. For example, the nozzle holes N1胄 of the nozzle group A1-An have the same hole diameter and hole depth, 1288704, and the orifice group Al-Ant nozzle holes ΝΙ_Νη are arranged in the same manner. The group redundancy and secrets each include a plurality of levels, each surface acoustic wave emission ^ 56 is transmitted through the corresponding two open cells of the group 76 to the signal generator 36, and each surface acoustic wave receiver 66 is transmitted through the phase of the switch group 86. Corresponding to the two open _ to the spectrum analyzer you. The switch control unit 96 can control the on or off % of each of the switches 76 and 86. Therefore, the sixth embodiment of the present invention can detect all the nozzle holes of the nozzle hole, and perform frequency scanning on the corresponding group by the plurality of surface acoustic wave emissions H 56 respectively, and receive the sound waves through the plurality of recordings (four) 66 (four). The (4) surface acoustic _ 发射 emitted by the surface acoustic wave transmitter 56 is transmitted to the lag analyzer 46 for frequency response measurement. Meanwhile, the sixth embodiment of the present invention can also detect the nozzle holes in the nozzle group or the partial nozzle group, and use the switch control unit 96 to open the switches corresponding to the group of nozzles to be detected in the switch groups 76 and 86. The surface acoustic wave transmitter 56 and the surface acoustic wave receiver 66 corresponding to the group of nozzles to be detected are electrically connected to the signal generator 36 and the spectrum analyzer 46, respectively, and the foregoing detecting step is performed. Therefore, the sixth embodiment of the present invention The microfluid ejection device 1〇6 can determine whether the orifice structure meets the requirements by the signal measured by the spectrum analyzer 46, and can elastically detect the single, partial or all orifice groups. Each of the surface acoustic wave transmitter 56 and the surface acoustic wave receiver 66 of the microfluid ejection device 1 (10) may employ a skew interdigitated surface acoustic wave transducer or a parallel surface acoustic wave transducer as shown in FIGS. 5 to 8. 'Or other types of surface acoustic wave transducers. 1288704 The invention can detect the structure of the nozzle hole after the completion of the nozzle hole process or after a predetermined stage, and can also monitor the nozzle hole process in the process of forming the nozzle hole. Referring to FIG. 10, a flowchart of FIG. 1 illustrates a method for controlling the nozzle process of the present invention, which includes the following steps: Step 110: Perform a nozzle process; Step 120: Launch a plurality of different center frequencies a wide-band surface acoustic wave signal; Step 130: measuring a frequency response signal of the broadband surface acoustic wave signal through the orifice formed by the orifice process; step 140··determining whether the frequency response signal has met a predetermined value; if the frequency response is said If the predetermined value has been paid, step 15 is performed; if the frequency response signal does not meet the predetermined value, step 11 is performed; and step 150: the nozzle process is interrupted. When the step 140 determines that the measured frequency response signal meets the predetermined value, it indicates that the position, size, or surrounding wheel structure of the nozzle hole is in accordance with the requirements, and step 150 is performed to interrupt the nozzle process. When the step 140 determines that the measured frequency is in accordance with the predetermined schedule, the structure of the nozzle hole formed by the silk Wei, the position size, or the surrounding wheel flat structure has not met the requirements, and the step no is performed to continue the execution of the nozzle hole. Process. According to the invention, the sound wave tank of the county surface is detected by the fresh spouting of the money to detect the 1288704 nozzle hole process, and the pulse is not limited by the depth of the depth of the secret forest. Therefore, the number of nozzle holes and the position of the nozzle hole can be simultaneously targeted. Or the surface structure of the nozzle around the nozzle and (10) (four) Yuxianqi detection. This side can be flexibly tested for single, mixed or all Wei Cong. In addition, this (4) can detect the Weizhiguan line after the completion of the hoofing process to the pre-continuation section, and can also monitor the nozzle hole process in the process of forming the nozzle hole. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should fall within the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a top view of a microfluid ejection device of the prior art. Figure 2 is a top plan view of a microfluid ejection device in a first embodiment of the present invention. Fig. 3 is a schematic cross-sectional view showing the microfluid ejection device of the first embodiment of the present invention extending along a tangent line G_G. Fig. 4 is a diagram showing the frequency response signal measured by the spectrum analyzer of the first embodiment of the present invention. Figure 5 is a top plan view of a microfluid ejection device in a second embodiment of the present invention. Figure 6 is a top plan view of a microfluid ejection device in a third embodiment of the present invention. Figure 7 is a top plan view of a microfluid ejection device in a fourth embodiment of the present invention. * Figure 8 is a top plan view of a microfluid ejection device in a fifth embodiment of the present invention. Figure 9 is a top plan view of a microfluid ejection device in a sixth embodiment of the present invention. Figure 10 is a flow chart of a method for controlling the nozzle hole in the present invention. 1288704 [Description of main component symbols] Nl-Nn orifice Al-An 11-16 orifice layer 21-26 31-36 signal generator 41-46 51-56 surface acoustic wave transmitter 61-66 76, 86 switch group 96 X Bu X2 aperture Y Bu Y2 GG, tangent AC 10, 101-106 microfluid ejection device 110-150 step orifice group piezoelectric material layer spectrum analyzer surface acoustic wave receiver switch control unit hole depth curve