1287819 (1) 政、發明說明 【發明所屬之技術領域】 此發明’是有關使電介體材料位於其間放電並準分子 發光的準分子燈泡，特別是，在放電空間內具有內部電極 的準分子燈泡。 【先前技術】 關連於此發明的技術，是具有例如，日本特開平2 -7353號’在那，在放電容器充塡供形成準分子的放電用 氣體’藉由電介體障壁放電（別名，臭氧發生放電或是無 聲放電。電機學會發行改訂新版「放電便覽」平成1年6 月再版7刷發行第2 6 3頁參照）形成準分子，取出從此準 分子放射的光的放射器，即準分子燈泡。且，在德國專利 公開公報DE4022279A1中，是揭示由MHz的單位所點燈 的準分子燈泡，進一步，在「Slient discharge for the generation of ultraviolet and vacuum ultraviolet excimer radiation 」 （Pure&Appl.Chem.，Vol.62，No.9,pp.l 667-1 6 74,1 990)中，是揭示由50Hz至數MHz所點燈的準分子 燈泡（別名，電介體障壁放電燈）。 這些準分子燈泡，是放電容器的形狀是整體圓筒狀， 放電容器的至少一部分是兼具進行使電介體材料位於其間 的放電（電介體障壁放電）的電介體，此電介體的至少〜部 分是對於從準分子放射的真空紫外光（波長2 00nm以下的 光）爲透光性，進一步，在放電容器的外面，一方的電極 (2) 1287819 是網狀電極。 這種準分子燈泡，是具有習知的低壓水銀放電燈或高 壓放電燈中所未有的各種的特徵，例如，可使單一波長的 紫外光強力放射等，使用該準分子燈泡的發光裝置，例如 有曰本專利第2854255號、日本特開2002-168999等。 揭示於上述日本專利第2 85 42 5 5號、日本特開2002 -168999號的準分子燈泡（電介體障壁放電燈），是在圓筒狀 內側管的外側使相同的圓筒狀外側管呈同軸配置的雙層門 筒型的構造，在內側管的內部是配置內側電極，在外側管 的外面是配置外側電極，形成於內側管及外側管之間的空 間爲放電空間。 第1 1圖是顯不雙層門筒型準分子燈泡的槪略結構。 (a)是顯示整體的橫剖面圖，（b)是顯示（a)的A-A剖面圖。 準分子燈泡1的整體形狀是由圓筒狀的合成石英玻璃 所構成。放電燈1的外側管5 1及內側管52是呈同軸配置 而構成雙層圓筒管的同時，兩端關閉並在外側管5 1及內 側管5 2之間形成放電空間。在放電空間中藉由電介體障 壁放電形成準分子的同時，是封入有從此準分子放射真空 紫外光的放電用氣體，例如氙氣體。舉數値例的話，放電 燈 1是全長 8 00mm、外徑 27mm，內側管 52的外徑是 1 6mm，外側管5 1及內側管5 2的板厚是1 m m，由4 0 0 W 所點燈。 在內側管5 2的內面是設置有作爲一方的電極的內側 電極2，在外側管5 1的外面是設置有作爲他方的電極的 -6- (3) 1287819 網狀外側電極3。內側電極2是配管狀，網狀電極3是無 接縫地構成。整體因具有伸縮性所以與外側管5 1的密合 性佳。 內側電極2，在外側電極3之間中，是連接圖示略的 交流電源，由此在放電空間形成準分子使紫外光發光。使 用氙氣體作爲放電用氣體時，會放射波長1 72nm的光。 但是，此雙層圓筒型構造的準分子燈泡，是具有以下 的問題。 第一，因爲內側管與外側管的2個石英玻璃管的雙層 圓筒型，所以放電容器整體變大。且，因爲內側管是由端 部熔接支撐所以易受重力的影響破損容易。 弟一，需要供將2個石英玻璃管由兩觸部接合的製造 過程’此製造過程是複雜且煩雜。 第三，內側管是比冷卻可能的外側管高溫，由熱膨脹 所產生負荷大，特別是，與外側管的接合部因應力集中而 破損容易，燈是愈長條化愈是影響深刻。 且，也存在非雙層圓筒型，內側電極是具有使放電空 間內延伸形成的構造的準分子燈泡。例如，日本特表平 8-508363號或日本特開2003-317670號。 弟1 2圖疋;藏不上述習知例的構造。此構造是放電容 器60是由1個圓筒體所構成，在該放電容器60內的放電 空間內，內側電極6 1是朝軸方向延伸，在前述放電容器 6 0的外面是設置有外側電極6 2。 依據上述構造’因爲不存在相當於雙層圓筒型的內側 (4) 1287819 管者，所以可以解決雙層圓筒型構造所具有的上述問題點 〇 但是，內側電極因爲露出於放電空間內，所以直接放 電產生於內側電極，而有內側電極會容易劣化，放電不安 定的問題。進一步’劣化的電極成分是放出於放電空間內 並在放電容器產生賤射，而有早期發生照度下降的問題。 且，因爲在內側電極直接放電，所以內側電極及放電用氣 體的溫度上昇容易，其結果，發光效率也容易下降。 且，電介體材料因爲只存在於一方的電極附近，由交 流點燈的話’會在正側及負側使放電的平衡崩潰。 進一步，是不留意朝電極的供電極性的話，電弧狀的 放電會生成而使準分子光無法效率佳地生成，一端是形成 電弧狀的放電的話，是有其部分會紅熱使電極燒斷等的別 的問題。 [專利文獻1]日本特開平2_ 7 3 5 3號 [專利文獻2]日本專利第2854255號 [專利文獻3]日本特開2002-168999等 [專利文獻4]日本特表平8-508363號 [專利文獻5]日本特開2003-317670號 【發明內容】 (本發明所欲解決的課題） 此發明是解決欲及課題，是去除雙層圓筒型準分子燈 、泡的複雜構造的同時，去除內側電極在放電空間內直接露 (5) 1287819 出構造的準分子燈泡的放電的問題等，提供一種具有將放 電空間內的內側電極，由端部開放的電介體覆蓋的新穎的 構造將準分子燈泡。 (用以解決課題的手段） 此發明的準分子燈泡，是由：讓紫外線透過的材料所 構成且在內部封入放電用氣體的放電容器、及讓此放電容 器的內部朝長度方向延伸的同時對於放電容器的端部氣密 地封止的內側電極、及由配置於放電容器的外面的外側電 極，所組成的準分子燈泡，其特徵爲：前述內側電極’其 至少在與外側電極之間進行放電的部位的外表面，至少一 端是由開放於放電空間內的電介體材料所構成的內側管所 覆蓋。 且，前述內側管的兩端部是開放於放電空間內。 進一步，前述內側管是由支撐構件被支撐於放電容器 〇 且，前述支撐構件是安裝於內側管，在前述放電容器 中，是形成有供規制該支撐構件的朝長度方向的移動用的 固定手段。 進一步，前述內側管是被支撐於內側電極。 或者是，前述內側管的一端部是開放於放電空間內， 他端部是與放電容器連結。 或者是，前述內側電極，是由放電容器的兩端所封止 ，至少其一部分分是形成在長度方向伸縮可能的彈性部。 -9 - (6) 1287819 (發明之效果） 本發明的準分子燈泡，因爲是於內側電極的外周設置 由感應體材料組成的內側管，所以與內側電極及外側電極 之間無2個電介體存在，所以於放電空間中放電可安定均 一地形成。且，無關於供電極性，電弧狀放電皆不會生成 ，所以準分子光的生成效率高，且無電極燒斷的問題。 且，因爲內側管的端部是開放於放電空間內’所以朝 長度方向的熱膨脹不會因被拘束而無法自由伸縮，而可消 解在放電容器及兩端部爲接合的構造所導致的應力集中或 熱變形所產生的損塲·破損的問題。 且，因爲內側管內的放電氣體可通過其開放端流通至 放電空間內，所以可抑制由內側管覆蓋的內側電極的溫度 上昇，防止其損耗的同時，放電容器內的溫度被平均化而 抑制放電用氣體的溫度上昇，可以防止光輸出的下降。 【實施方式】 第1圖是顯示本發明的準分子燈泡的第1實施例。 準分子燈泡1，整體是由管狀的放電容器1 〇所構成 ，放電用氣體是是形成：充塡發光部11、及在其兩端將 發光部π氣密的封止部1 2。放電容器1 〇的材質是由電 介體障壁放電作爲電介體功能的同時，由可讓真空紫外光 良好透過的材料的例如合成石英玻璃所構成。 在放電容器1 0的內部，棒狀的內側電極2是在放電 容器1 0的略中心延伸配置，在放電容器1 0的外面使外側 -10- (7) 1287819 電極3是密合地配置。內側電極2的兩端，是在封止部 1 2，分別與金屬箔1 3接合，進一步在金屬箔1 3接合外部 簧片Μ。 形成於發光部 Π的內部的在放電空間中，藉由位於 其間的電介體材料的放電（電介體障壁放電）形成準分子的 同時，封入從此準分子放射的真空紫外光的放電用氣體， 例如氙氣體。 內側電極2是鎢等的棒狀電極，在端部是形成線圈狀 的彈性部2 1。在內側電極2的周圍，使覆蓋其地設置由 電介體材料組成的內側管22，內側電極2是插入此內側 管22中。該內側管22，是由例如合成石英玻璃所構成， 內側電極2的至少與外部電極3之間由進行放電的部位的 外表面所覆蓋，其端部是超過外部電極3的端部地延伸。 前述內側電極2及內側管22是通過微小間隙緩緩密 合也可以，形成更大的間隙也可以。且，前述線圏狀彈性 部2 1是不需要設置於內側電極2的2處，至少設置於一 部分即可以。 在此實施例，上述內側管22，其兩端是開放於放電 空間內，不存在於內側電極2的兩端部。因此，內側電極 2是對於兩端部非由內側管2 2覆蓋而直接地露出於放電 用氣體。 而且，內側管22，是藉由環狀的支撐構件30，被固 定於放電容器1 〇的內部。此支撐構件3 0，是藉由嵌合於 內側管2 2並與其內側管2 2熔接或接合而固定。 -11 - (8) 1287819 外側電極3是金屬線形成網狀的電極’覆蓋放電容器 1 0的外表面地配置。因此’來自放電容器】0的放射光是 透過外側電極3的網目放射。然而’對於外側電極3 ’將 1條的金屬線無接縫地編成構造的話’與放電容器的密合 性是增加而有利。 藉由圖示略的供電裝置，供電至內側電極2及外側電 極3的話，使電介體材料放電容器1 〇及內側管22位於其 間並在兩電極間生成放電’在放電用氣體產生準分子發光 〇 然而，內側管2 2雖是藉由支撐構件3 0支撐於放電容 器1 0，但是內側電極2是具有充分的自己保持剛性的情 況時，非必定需要支撐構件3 0，支撐於該內側電極2也 可以。 此情況，因爲可防止內側管22是朝長度方向的移動 ，而使形成於內側電極2的線圈狀的彈性部2 1可作爲內 側管22的朝長度方向的移動規制構件功能。這種情況， 將彈性部2 1與內側管22的端部鄰接配置，且，至少比其 內徑大徑。 此實施例的準分子燈泡的構造，是在放電空間內的內 側電極也使電介體被覆蓋，在外側電極之間的放電安定， 可以持續均一的狀態，且防止不所期的電弧放電的發生使 準分子光的生成效率高，而無電極燒斷的問題。 進一步’是內側管因爲其端部是開放於放電空間內的 構造’所以朝長度方向的熱膨脹不受任何拘束可自由伸縮 -12- (9) 1287819 ，而可消解因由放電容器及兩端部接合的習知構造所產生 的損塲·破損的問題。且’內側管內的放電用氣體是通過 其開放端流通至放電空間內來抑制內側電極的溫度上昇’ 可以防止其損耗的同時，放電用氣體的溫度是被平均化並 抑制其溫度上昇，可以防止光輸出的下降。 加上，在內側電極中因爲具有彈性部’該內側電極即 使熱膨脹，因其熱膨脹分可由彈性部所吸收，所以不會影 響熱膨脹係數不同的石英玻璃所組成的放電容器的封止部 ，可防止放電容器的破損。 第2圖，是顯示本發明的準分子燈泡的第2實施例。 與如第1圖所示的準分子燈泡的相異點，是內側電極 2非棒狀電極而整體是線圈形狀的電極、及外側電極3非 網狀電極而是半圓筒體狀（樋狀）的金屬板的結構。 內側電極是形成線圈形狀的優點，是因爲由細徑的金 屬鋼絲所構成，所以與棒狀電極相比，重量可減輕。重量 減輕的話，有利於耐振動性、耐衝擊性。且電極本身是因 爲是彈性體，所以如棒狀電極的情況，不需另設彈性部， 有可以便宜製造的優點。 外側電極是形成半圓筒體狀金屬板的優點，相比於網 狀電極是組裝作業性佳。即’網狀電極的情況，是需要通 過放電容器，或者是捲附等的作業，但是半圓筒體狀電極 的情況’只要將事先配合放電容器的外徑成型的零件嵌入 ’就完成組裝作業。且，金屬板是對於紫外線具有反射性 的情況，也可提高一方向的光輸出。 -13- (10) 1287819 第3圖，是顯示第1圖所示的準分子燈泡的放電容器 端部的擴大構造。 內側電極2是由內側管2 2覆蓋的領域，相反地說， 限定內側電極2是露出於放電空間的領域用的說明圖。 圖中，與外側電極3的端部及內側管2 2的端部的距 離D，必需是至少比放電距離d的2倍大（圖是說明的方 便上，未成爲該數値關係）。 即，未滿足D > 2 d的關係的情況，對於內側電極2的 露出部分及外側電極3，放電是有強力發生的可能性，此 放電是如前述容易成爲不安定的放電。特別是，交流點燈 的情況時每極性變換，在電介體的位置，極性的關係會變 化而使放電容易不平衡。 然而，較佳是滿足 D>4d的關係，更較佳是滿足 D>6d的關係。 第4圖是顯示內側電極2的支撐構件30。（a)是顯示 筒管狀的支撐構件，（b)是顯示使用2枚的圓板的中空支 撐構件，（Ο是顯示板狀支撐構件。 內側管22，是藉由熔接或接合於該內側管22等安裝 的支撐構件3 0對於放電容器1 0支撐。藉由該支撐構件 3 0，使內側管2 2本身是當然，也使內側電極2可藉由重 力防止垂下，防止由該垂下所產生的內側管22的破損， 或放電的位置的不均一。特別是，放電容器10是成爲長 條的話，該問題更顯著，其一例，放電容器的長度（放電 空間的長度）是成爲5 00〜600mm以上的話，支撐構件的 -14- (11) 1287819 需要性會提高。 (a)所示的支撐構件是筒管形狀的支撐構件30，嵌合 於內側管22，與其內側管22是藉由熔接或接合等安裝。 而且，在其圓周上的凹部是成爲與形成於放電容器1 〇的 凹部1 0 〇卡合的構造，由此，內側管2 2是被規制成在內 側電極2上朝長度方向移動。 且，（b)所示的2枚的板狀支撐構件30的情況時，於 這些之間是卡合有凹部100。 進一步，（c)所示的板狀支撐構件30的情況時，是在 該支撐構件3 0的兩側形成2個凹部1 〇 〇，規制在內側管 22的長度方向的移動。 然而，這些的凹部1 00，因爲是規制內側管22對於 放電容器1 〇的長度方向的移動，所以可作爲使支撐構件 3 0對於放電容器1 0緩緩固定的固定手段的功能，因此， 非必定需要形成於放電容器1 〇的全外周，形成於圓周上 的1處，或者是數處也可以。 而且，這些的凹部1 0 0，是可以由例如凹痕加工製作 〇 且，在第4圖，雖是顯示放電容器1 〇的一端的構造 ，但是在放電容器的中央部分或他端設置複數支撐構件 3 0也可以。 此情況，凹部1 0 0是不需要對於全部的支撐構件3 0 設置，可藉由設置於至少1處的支撐構件就可規制內側管 22的長度方向的移動。 -15- (12) 1287819 第5圖，顯示本發明的第3實施例。在此實施例中， 在如第1圖所示的第1實施例，對於該棒狀的內側電極2 是將貫通內側管22對於放電容器1 〇藉由支撐構件3 〇支 撐的構造，是使內側管22藉由設在棒狀的內側電極2的 支撐體2 a支撐的構造。 第6圖，進一步顯示第4實施例，如第2圖所示的第 2實施例中，對於該線圈狀內側電極2，是抵接於內側管 2 2內地插入的構造，在線圈狀電極2設置支架2 b，使該 線圈狀電極2成爲被支撐於內側管2 2內的構造。 第7圖，是顯示第5實施例。在上述實施例1〜4， 內側電極2雖是顯示對於放電容器1 〇的兩端部封止的構 造，但是非限定於此，只封止一端部的構造也可以。 在第7圖，內側電極2是只對於放電容器1 0的一端 部，在圖中右端部1 Oa是由擠壓密封等封止朝外部突出， 放電容器1 〇的左端部1 Ob是關閉的構造。 依據此實施例，內側電極2是因爲只有一端部封止於 放電容器10，因熱膨脹的對於該放電容器10的影響可更 減少。 在上述實施例1〜5，雖顯示內側管22的兩端部是開 放於放電空間內，但是兩端部非必定開放，一端部是與放 電容器連結也可以，這種實施例6顯示於第8圖。 在第8圖，內側管22是使左端22a開放於放電空間 內，右端22b是藉由熔接與放電容器10等連結。 對於此實施例6，內側管22因左端22a開放自由， -16- (13) 1287819 所以對於該內側管22的熱膨脹，也不受其他的構件拘束 ，放電容器10的安裝處也不會因變形而產生應力集中。 然而，對於該實施例6，也如上述實施例1所述，顯 示了於內側管22安裝有支撐構件3 0並對於放電容器1 0 支撐內側管22的構造，但是在此實施例，因爲內側管22 由一端部22b與放電容器1 0連結，所以特別是在小型燈 的情況等中，可不需要支撐內側管22的支撐構件30。 然而，對於上述各實施例1〜6的支撐構件3 0，是如 第9圖所示，在光取出方向（在圖中是下方）形成缺口 31 也可以。該支撐構件3 0是藉由熔接與內側管2 2或是放電 容器10等固定。 如此，可消解：在支撐構件3 0部分未形成放電，來 自其他的發光部的光被遮而無法朝外部放射的問題。即， 在設置支撐構件3 0的構造中，因爲該支撐構件3 0存在所 以在此部分在內外電極2、3間是不存在放電空間，所以 有於該部分未形成放電，來自其他的發光部的傾斜方向的 光被該支撐構件3 0遮光而無法朝放電容器1 〇外部放射的 問題’藉由缺口 3 1於支撐構件3 0的下方也形成放電空間 ，就可以消解這些的問題。 本發明的準分子燈泡，是不限定於如第丨圖〜第9圖 所不的構造。例如，外部電極，是不限定於網狀電極或半 圓筒體狀，於放電容器外面由印刷等形成也可以。且，該 外側電極是物理上不需要由一構件構成，在放電容器的長 度方向複數分割地電連接也可以。此構造的優點是可以將 -17- (14) 1287819 長條品容易製造、及調整配光。 內側電極，是不限定於棒狀電極、線圈狀電極，在內 側管中具有電特性，可成爲準分子發光用的電極的話皆可 以。例如，在內側管的內面將金屬薄膜蒸著。此金屬薄膜 的優點，是可縮小內側管，或使金屬薄膜作爲反射鏡子利 用。 且，內側電極爲管狀也可以。此情況，藉由在剖面形 成具有一部分缺口的剖面C字狀，就可提高內側管的密合 性。 由內側電極將線圈所構成的情況，不是由1條的金屬 線形成線圏，而是連結複數線圈彼此的構造，或將棒狀部 分及線圈部分交互配置的構造，進一步，使線圈之間距在 長度方向變化的構造也可以適用。特別是，放電容器的內 徑或厚度參差不一的情況，消解因該參差不一所產生的準 分子發光的場所不均一，是有効的。 放電容器的封止部的構造，是不限定於擠壓密封，其 他的箔密封，即收縮密封構造也可以，採用所謂的相互搭 接密封也可以。相互搭接密封的優點是玻璃及電極的接合 性佳，可更確實防止在封止部的氣體漏出或龜裂的發生。 且，支撐內側管的支撐構件，雖是說明藉由熔接等安 裝於該內側管，但是不限定此’安裝於放電容器側的構造 的話，內側管是緩緩嵌合於此支撐構件地支撐也可以。即 使此情況，內側管的朝長度方向的熱膨脹不會受到支撐構 件拘束而可自由收縮膨脹。但是’因爲內側管不必要的在 -18- (15) 1287819 長度方向大移動是較不佳’所以另外依據_ ^ θ ® β ® 側I等設置規制朝內側管的長度方向的移動的固定手段的話 ，內側管的支撐構件，是安裝於放電容器或是內側管的任 何一方的構造皆可以。 在放電空間中配置吸氣器也可以。吸氣器’是例如鋇 、鉻等所構成，因爲可以吸著不純氣體所以效果佳。對於 吸氣器的配置，是將專用的吸氣器收容室’藉由例如’設 置於放電容器的端部的構造’或磁性地保持手段固定也可 以。 在如第1圖所示的構造，顯示數値例的話，放電容器 10的長度（包含封止部），是 4〇〇mm〜1500mm，例如， 1000mm，放電容器1〇的外徑是必l〇mm〜20mm，例如， 15 mm。內側管 22的長度是 2 0 0mm〜1 3 0 0 mm，例如， 8 0 0mm，內側管 2 2的外徑是0 4mm〜8 mm，例如，5 mm ，內徑是公 2 m m〜6 m m，例如，3 m m。內側電極（棒狀電 極）的長度是300mm〜1400mm，例如，900mm，外徑是 0 1.5mm〜5.9mm，例如，2.8mm。彈性部 21的長度是 10mm〜30mm，例如，20mm，外徑是0 2mm〜7mm，例 如，4 m m 〇 支撐構件30的寬是3mm〜7mm，例如，5mm。 是如第2圖所示的構造，與如第1圖所示的構造相異 部分，顯示數値例的話，線圈狀內側電極的外徑是 0 1.5mm 〜5.9mm，例如，2.8mm。 是如第3圖所示的構造，與如第1圖、第2圖所示的 -19- (16) 1287819 構造相異部分，數値例的話，放電距離d是2 m m〜7 m m， 例如5.0mm，是距離D比2 d大的數値範圍，是4 m m〜 1 4 m m，例如 l〇mm。 準分子燈泡，是在外側電極及內側電極之間各別設置 電介體使放電空間存在。準分子燈泡，雖也稱爲電介體障 壁放電燈，但是具有：單一波長的真空紫外光強力放射的 習知的低壓水銀燈或高壓放電燈中所未有的優秀特徵。 單一波長的光，是由封入放電容器內的氣體決定，氙 氣體（Xe)的情況是波長172nm的光，氬氣體（Ar)及氯氣體 (CL)的情況是波長175nm的光，氪（K〇及碘（I)的情況是波 長191nm的光，鐘^Ar)及氟（F)的情況是波長193nm的光 ，氪（Kr)及溴（Br)的情況是波長207nm的光，氪（K〇及氯 (CL)的情況是放射波長222 nm的光。進一步，也具有可 依據需要在瞬間（1秒以內）點滅點燈的特徵。 爲了準分子發光，從供電裝置供給至準分子燈泡的電 壓波形，是不限定於正弦波，脈衝波形也可。此情況，不 使脈衝連續供給，具有間隔（停歇期間）的脈衝波形因發光 效率佳而較佳，且，脈衝波形是由急劇的立起波形外加較 佳。這是因爲外加急劇的立起上昇波形的電壓的話，與如 正弦波電壓地緩和地外加電壓的情況相比，可接近對於放 電容器內的氣體直接外加電壓的狀態，且，設置停歇期間 是爲了不破壞已生成的準分子。然而，立起的數値例，可 由0.0 3 #秒〜1 β秒的範圍選擇，例如〇 · 5 μ秒，脈衝寬 是可由0 · 5 //秒〜5 //秒的範圍選擇，例如1 //秒，停歇期 -20- (17) 1287819 間是可由1 #秒〜1 〇 〇 #秒的範圍選擇，例如2 9 //秒。 第1 0圖是顯示使用本發明的準分子燈泡的照射裝置 的槪略結構。 準分子照射裝置40是由金屬塊體4 1使整體形成箱型 〇 在金屬塊體41中設有溝，準分子燈泡10(1 〇a、1 Ob、 1 0 c )是適合於溝地配置。在金屬塊體4 1中是配置：流動 冷卻水的冷卻水用貫通孔42(42a、42b)、及檢測準分子燈 泡1的放射光的檢測器43 (4 3 a、43b、43 c)。金屬塊體4 1 是因爲高傳熱特性及加工的容易性，進一步是真空紫外光 的高反射特性，而例如採用鋁。然而，雖圖示略，但是在 金屬塊體41中是配置對於放電容器的溫度檢測檢測器。 在照射裝置40中，是設置供流動不活性氣體用的導 入口 44a及排出口 44b。導入口 44a，是錯由閥與氣體鋼 筒等連接，排出口 44也同樣是藉由閥連接真空鋼筒。不 活性氣體，一般雖是採用氮氣體’但是採用氣體等也可 以。且，不活性氣體，在處理過程中，或者是處理前後， $以從導入口 44a導入並從排出口 44b排出地隨時持續流 動。 在照射裝置4 0的外部中是配置有供電裝置4 5。 在照射裝置4 0的外部中，承受從準分子燈泡1 〇放射 的紫外線的處理物W是載置於處理台4 6。此處理台4 6 ’ 曰例如，由不銹鋼組成藉由在內部二纟各線配設燈絲加熱器 而可加熱處理物W。且’在圖不略中的處理台46中，藉 -21 - (18) 1287819 由設置昇降機構，就可使處理物W接近準分子燈相 ’藉由設置搬運機構就可朝水平方向搬運。 在處理物W中，是被供給：氧氣體、矽烷系 氫氣體、氬氣體等的處理用氣體，使來自這些處理 及準分子燈泡1的放射光反應藉來進行處理。 然而，上述的照射裝置是在燈及處理物之間未 兩者分段的透過構件。因此’裝置整體可小型化的 不需要使用高價的紫外線透過窗構件的優點大。這 ，本發明的準分子燈泡是小型，所以準分子照射I 及處理物w的距離接近可能，因此，可以由從導7 流動至排出口 44b的不活性氣體流，防止金屬塊體 氧化。 但是，並非排除在燈及處理物之間設置將兩者 透過構件。藉由設置透過構件，具有可解決來自處 浮遊物是附著於燈或其附近的問題的優點 [圖式簡單說明】 [第1圖]顯示此發明的準分子燈泡的實施例1。 [第2圖]顯示此發明的準分子燈泡的實施例2。 [第3圖]顯示第1圖的要部擴大圖。 [第4圖]顯示第2圖的要部擴大圖。 [第5圖]顯示此發明的準分子燈泡的實施例3。 [第6圖]顯示此發明的準分子燈泡的實施例4。 [第7圖]顯示此發明的準分子燈泡的實施例5。 J 1，且 氣體、 用氣體 設置將 同時， 是因爲 ，置40 □ 44a 41的 分段的 理物的 -22- (19) 1287819 [第8圖]顯示此發明的準分子燈泡的實施例6。 [第9圖]顯示此發明的準分子燈泡的實施例7。 [第1 0圖]顯示使用此發明的準分子燈泡的照射裝置 〇 [第1 1圖]顯示習知的準分子燈泡。 [第1 2圖]顯示其他的習知例。 [主要元件符號說明] W處理物 1準分子燈泡 2線圈狀內側電極 2a支撐體 2b 支架 3網狀外側電極 1 0準分子燈泡（放電容器） l〇a右端部 l〇b左端部 1 1發光部 1 2封止部 13金屬箔 1 4外部簧片 2 1彈性部 22內側管 22a左端 -23- (20) (20)1287819 2 2 b 右u而 3 0板狀支撐構件 3 1 缺□ 4 0準分子照射裝置 41金屬塊體 42 冷卻水用貫通孔 4 3檢測器 44 排出口 44a 導入口 44b 排出口 45供電裝置 4 6處理台 5 1外側管 5 2內側管 60放掉電容器 6 1內側電極 6 2外側電極 1 0 0 凹部 -241287819 (1) Administration, invention description [Technical field to which the invention belongs] This invention is an excimer light bulb for causing a dielectric material to be discharged therebetween and excimer light emission, in particular, an excimer having an internal electrode in a discharge space light bulb. [Prior Art] The technique related to the invention is, for example, Japanese Patent Laid-Open No. 2-7353, where the discharge gas is charged in the discharge vessel to form an excimer discharge gas by dielectric barrier discharge (alias, Ozone-discharge or silent discharge. The Institute of Electrical Engineering released a new version of the "Discharged Handbook". The reissue of the 1st June, 7th, 7th, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd, 3rd Molecular light bulb. Further, in the German Patent Publication No. DE4022279A1, an excimer light bulb which is illuminated by a unit of MHz is disclosed, and further, in "Slient discharge for the generation of ultraviolet and vacuum ultraviolet excimer radiation" (Pure & Appl. Chem., Vol .62, No. 9, pp.l 667-1 6 74, 1 990), is an excimer light bulb (alias, dielectric barrier discharge lamp) that illuminates from 50 Hz to several MHz. These excimer bulbs have a shape in which the discharge vessel is entirely cylindrical, and at least a part of the discharge vessel is a dielectric body that performs discharge (dielectric barrier discharge) between the dielectric materials. At least part of the vacuum ultraviolet light (light having a wavelength of 200 nm or less) emitted from the excimer is translucent, and further, one electrode (2) 1287819 is a mesh electrode on the outer surface of the discharge vessel. Such an excimer light bulb is characterized by various conventional low-pressure mercury discharge lamps or high-pressure discharge lamps, for example, a single-wavelength ultraviolet light can be strongly radiated, and the like, using the light-emitting device of the excimer light bulb, For example, there are Patent No. 2854255, Japanese Patent Laid-Open No. 2002-168999, and the like. An excimer light bulb (dielectric barrier discharge lamp) disclosed in the above-mentioned Japanese Patent No. 2 85 42 5 5 and JP-A-2002-168999 is a cylindrical outer tube which is formed on the outer side of the cylindrical inner tube. In the double-deck type of the coaxial arrangement, the inner electrode is disposed inside the inner tube, the outer electrode is disposed on the outer side of the outer tube, and the space formed between the inner tube and the outer tube is a discharge space. Fig. 1 is a schematic diagram showing the outline of a double-layered door type excimer light bulb. (a) is a cross-sectional view showing the whole, and (b) is an A-A cross-sectional view showing (a). The overall shape of the excimer bulb 1 is composed of a cylindrical synthetic quartz glass. The outer tube 5 1 and the inner tube 52 of the discharge lamp 1 are coaxially arranged to form a double-layered cylindrical tube, and both ends are closed, and a discharge space is formed between the outer tube 5 1 and the inner tube 5 2 . At the same time as the excimer is formed by dielectric barrier discharge in the discharge space, a discharge gas, such as helium gas, which emits vacuum ultraviolet light from the excimer is enclosed. In the case of a few examples, the discharge lamp 1 has a total length of 800 mm and an outer diameter of 27 mm, and the outer diameter of the inner tube 52 is 16 mm. The thickness of the outer tube 5 1 and the inner tube 5 2 is 1 mm, which is 4 0 0 W. Light up. The inner surface of the inner tube 5 2 is provided with an inner electrode 2 as one of the electrodes, and the outer surface of the outer tube 5 1 is provided with a -6-(3) 1287819 mesh outer electrode 3 as an electrode of the other side. The inner electrode 2 is a tubular shape, and the mesh electrode 3 is formed without a seam. The overall adhesion to the outer tube 5 1 is excellent because of its flexibility. The inner electrode 2, between the outer electrodes 3, is connected to an alternating current power source, whereby an excimer is formed in the discharge space to emit ultraviolet light. When a helium gas is used as the discharge gas, light having a wavelength of 1 72 nm is emitted. However, this two-layer cylindrical type of excimer light bulb has the following problems. First, since the two quartz glass tubes of the inner tube and the outer tube are of a double cylinder type, the entire discharge vessel becomes large. Moreover, since the inner tube is supported by the end weld, it is easy to be damaged by the influence of gravity. First, a manufacturing process for joining two quartz glass tubes from two contacts is required. This manufacturing process is complicated and complicated. Thirdly, the inner tube is at a higher temperature than the outer tube which is likely to be cooled, and the load generated by the thermal expansion is large. In particular, the joint portion with the outer tube is easily broken due to stress concentration, and the longer the lamp is, the more the effect is. Further, there is also a non-double cylindrical type, and the inner electrode is an excimer light bulb having a structure in which a discharge space is formed to extend. For example, Japanese Patent Publication No. 8-508363 or Japanese Patent Laid-Open No. 2003-317670. Brother 1 2 Figure; hiding the structure of the above conventional examples. In this configuration, the discharge vessel 60 is constituted by a cylindrical body. In the discharge space in the discharge vessel 60, the inner electrode 61 extends in the axial direction, and the outer electrode is provided on the outer surface of the discharge vessel 60. 6 2. According to the above configuration, since the inner side (4) 1287819 which is equivalent to the double-layered cylindrical type does not exist, the above-mentioned problem of the double-layered cylindrical structure can be solved. However, since the inner electrode is exposed in the discharge space, Therefore, direct discharge occurs in the inner electrode, and there is a problem that the inner electrode is easily deteriorated and the discharge is unstable. Further, the deteriorated electrode component is placed in the discharge space and is generated by the discharge vessel, and there is a problem that the illuminance is lowered at an early stage. Further, since the inner electrode is directly discharged, the temperature of the inner electrode and the gas for discharge is easily increased, and as a result, the luminous efficiency is also liable to lower. Further, since the dielectric material is present only in the vicinity of one of the electrodes, the balance of the discharge is collapsed on the positive side and the negative side by the alternating current lighting. Further, when the polarity of the power supply to the electrodes is not noticed, an arc-like discharge is generated and excimer light cannot be efficiently generated, and when one end is an arc-shaped discharge, some of the red heat causes the electrode to be blown. Other questions. [Patent Document 1] Japanese Patent Publication No. 2854255 [Patent Document 2] Japanese Patent No. 2854255 [Patent Document 3] Japanese Patent Laid-Open No. 2002-168999, etc. [Patent Document 4] Japanese Patent Application No. 8-508363 [ [Problems to be Solved by the Invention] The present invention is to solve the problem and to eliminate the complicated structure of a double-layered cylindrical excimer lamp and a bubble. Removing the problem that the inner electrode directly exposes (5) the discharge of the excimer bulb of the 1287819-out structure in the discharge space, and the like, and provides a novel structure having the inner electrode in the discharge space covered by the open-ended dielectric body. Excimer bulb. (Means for Solving the Problem) The excimer light bulb of the present invention is composed of a material that allows ultraviolet rays to pass therethrough and that has a discharge vessel in which a discharge gas is sealed, and which allows the inside of the discharge vessel to extend in the longitudinal direction. An excimer light bulb composed of an inner electrode that is hermetically sealed at an end of the discharge vessel and an outer electrode that is disposed on the outer surface of the discharge vessel, wherein the inner electrode 'is at least between the outer electrode and the outer electrode At least one end of the outer surface of the portion to be discharged is covered by an inner tube formed of a dielectric material that is open in the discharge space. Further, both end portions of the inner tube are opened in the discharge space. Further, the inner tube is supported by the discharge tube and supported by the support member, and the support member is attached to the inner tube, and the discharge tube is formed with a fixing means for regulating the longitudinal direction of the support member. . Further, the inner tube is supported by the inner electrode. Alternatively, one end of the inner tube is open to the discharge space, and the other end is connected to the discharge vessel. Alternatively, the inner electrode is sealed by both ends of the discharge vessel, and at least a part thereof is an elastic portion which is formed to be stretchable in the longitudinal direction. -9 - (6) 1287819 (Effects of the Invention) The excimer light bulb of the present invention has an inner tube composed of an inductor material on the outer circumference of the inner electrode, so that there is no two dielectrics between the inner electrode and the outer electrode. The body exists, so the discharge in the discharge space can be uniformly formed uniformly. Moreover, irrespective of the polarity of the power supply, arc discharge is not generated, so the generation efficiency of excimer light is high, and there is no problem of electrode burnout. Further, since the end portion of the inner tube is opened in the discharge space, the thermal expansion in the longitudinal direction is not restricted by the restriction, and the stress concentration caused by the structure in which the discharge vessel and the both end portions are joined can be eliminated. Or the problem of damage and breakage caused by thermal deformation. Further, since the discharge gas in the inner tube can flow into the discharge space through the open end thereof, the temperature rise of the inner electrode covered by the inner tube can be suppressed, and the loss in the discharge tube can be prevented, and the temperature in the discharge vessel can be averaged and suppressed. The temperature of the discharge gas rises to prevent a decrease in light output. [Embodiment] Fig. 1 is a view showing a first embodiment of an excimer light bulb of the present invention. The excimer bulb 1 is composed of a tubular discharge vessel 1 整体 as a whole, and the discharge gas is formed by filling the light-emitting portion 11 and a sealing portion 12 which hermetically seals the light-emitting portion π at both ends thereof. The material of the discharge vessel 1 is composed of, for example, synthetic quartz glass of a material that allows good transmission of vacuum ultraviolet light while the dielectric barrier discharge is used as a dielectric function. Inside the discharge vessel 10, the rod-shaped inner electrode 2 is disposed to extend slightly in the center of the discharge vessel 10, and the outer side -10 (7) 1287819 electrode 3 is disposed in close contact with the outside of the discharge vessel 10. Both ends of the inner electrode 2 are joined to the metal foil 13 at the sealing portion 12, and the outer foil is further joined to the metal foil 13. In the discharge space formed inside the light-emitting portion ,, a discharge gas that is vacuum ultraviolet light emitted from the excimer is sealed while forming an excimer by discharge (dielectric barrier discharge) of the dielectric material interposed therebetween , for example, helium gas. The inner electrode 2 is a rod-shaped electrode such as tungsten, and is formed in a coil-like elastic portion 21 at the end. An inner tube 22 composed of a dielectric material is disposed around the inner electrode 2, and the inner electrode 2 is inserted into the inner tube 22. The inner tube 22 is made of, for example, synthetic quartz glass, and at least the outer electrode 3 is covered with the outer surface of the portion where the discharge is performed, and the end portion extends beyond the end of the outer electrode 3. The inner electrode 2 and the inner tube 22 may be gradually adhered by a small gap, and a larger gap may be formed. Further, the wire-like elastic portion 21 is not required to be provided at two places of the inner electrode 2, and may be provided at least in one portion. In this embodiment, the inner tube 22 has both ends open to the discharge space and does not exist at both end portions of the inner electrode 2. Therefore, the inner electrode 2 is directly exposed to the discharge gas without being covered by the inner tube 22 at both end portions. Further, the inner tube 22 is fixed to the inside of the discharge vessel 1 by the annular support member 30. The support member 30 is fixed by being fitted to the inner tube 2 2 and welded or joined to the inner tube 2 2 . -11 - (8) 1287819 The outer electrode 3 is an electrode in which a metal wire is formed in a mesh shape, and is disposed so as to cover the outer surface of the discharge vessel 110. Therefore, the emitted light from the discharge vessel 0 is radiated through the mesh of the outer electrode 3. However, it is advantageous that the outer electrode 3' has a structure in which one metal wire is seamlessly formed, and the adhesion to the discharge vessel is increased. When the power supply device is supplied to the inner electrode 2 and the outer electrode 3, the dielectric material discharge vessel 1 and the inner tube 22 are interposed therebetween, and a discharge is generated between the electrodes. Although the inner tube 2 is supported by the discharge vessel 10 by the support member 30, but the inner electrode 2 has sufficient self-retaining rigidity, the support member 30 is not necessarily required to be supported on the inner side. The electrode 2 is also possible. In this case, since the inner tube 22 can be prevented from moving in the longitudinal direction, the coil-shaped elastic portion 2 1 formed on the inner electrode 2 can function as a movement regulating member of the inner tube 22 in the longitudinal direction. In this case, the elastic portion 21 is disposed adjacent to the end of the inner tube 22, and at least has a larger diameter than the inner diameter. The configuration of the excimer light bulb of this embodiment is such that the inner electrode in the discharge space also covers the dielectric, the discharge between the outer electrodes is stabilized, the uniform state can be maintained, and the arc discharge is prevented. There is a problem that the generation efficiency of excimer light is high and the electrode is not blown. Further 'is the inner tube because its end is open to the structure in the discharge space', so the thermal expansion in the longitudinal direction is free to be stretched without any restraint -12- (9) 1287819, and the decomposing is caused by the discharge vessel and the ends The problem of damage and breakage caused by the conventional structure. Further, the gas for discharge in the inner tube flows into the discharge space through the open end to suppress the temperature rise of the inner electrode. The loss of the gas can be prevented, and the temperature of the discharge gas is averaged and the temperature rise is suppressed. Prevents a drop in light output. In addition, since the inner electrode has thermal portion in the inner electrode, even if the inner electrode is thermally expanded, the thermal expansion component can be absorbed by the elastic portion, so that the sealing portion of the discharge vessel composed of quartz glass having different thermal expansion coefficients is not affected, and can be prevented. The capacitor is broken. Fig. 2 is a view showing a second embodiment of the excimer light bulb of the present invention. The difference from the excimer bulb shown in Fig. 1 is that the inner electrode 2 is a non-rod electrode, and the entire electrode is a coil-shaped electrode, and the outer electrode 3 is a non-mesh electrode but a semi-cylindrical shape. The structure of the metal plate. The inner electrode has an advantage of forming a coil shape because it is composed of a metal wire having a small diameter, so that the weight can be reduced as compared with the rod electrode. When the weight is reduced, it is advantageous for vibration resistance and impact resistance. Further, since the electrode itself is an elastomer, as in the case of a rod electrode, there is no need to provide an elastic portion, and there is an advantage that it can be manufactured inexpensively. The outer electrode is an advantage of forming a semi-cylindrical metal plate, and is excellent in assembly workability compared to the mesh electrode. In other words, in the case of the mesh electrode, it is necessary to perform an operation such as a discharge vessel or a winding. However, in the case of a semi-cylindrical electrode, the assembly operation is performed by simply inserting a component that is previously molded with the outer diameter of the discharge vessel. Further, the metal plate is reflective to ultraviolet rays, and the light output in one direction can also be improved. -13- (10) 1287819 Fig. 3 is an enlarged view showing the end portion of the discharge vessel of the excimer bulb shown in Fig. 1. The inner electrode 2 is a region covered by the inner tube 22, and conversely, an explanation is given for the field in which the inner electrode 2 is exposed to the discharge space. In the figure, the distance D from the end portion of the outer electrode 3 and the end portion of the inner tube 2 2 must be at least twice as large as the discharge distance d (the figure is a convenient description, and the relationship is not obtained). In other words, when the relationship of D > 2 d is not satisfied, discharge may be strongly generated in the exposed portion of the inner electrode 2 and the outer electrode 3, and the discharge is a discharge which is likely to be unstable as described above. In particular, in the case of the AC lighting, the polarity is changed, and at the position of the dielectric, the relationship of the polarity changes, and the discharge is easily unbalanced. However, it is preferable to satisfy the relationship of D > 4d, and it is more preferable to satisfy the relationship of D > 6d. FIG. 4 is a support member 30 showing the inner electrode 2. (a) is a support member that displays a tubular shape, and (b) is a hollow support member that uses two circular plates. (Ο is a plate-shaped support member. The inner tube 22 is welded or joined to the inner tube. The support member 30 mounted on the 22 or the like is supported by the discharge vessel 10. By the support member 30, the inner tube 2 itself is of course, and the inner electrode 2 can be prevented from hanging down by gravity to prevent the occurrence of the hanging. The damage of the inner tube 22 or the position of the discharge is not uniform. In particular, when the discharge vessel 10 is a strip, the problem is more remarkable. For example, the length of the discharge vessel (the length of the discharge space) is 500 〜 When it is 600 mm or more, the necessity of the support member -14-(11) 1287819 is improved. (a) The support member shown is a bobbin-shaped support member 30, which is fitted to the inner tube 22, and the inner tube 22 thereof is used by The mounting is welded or joined, etc. Further, the recess on the circumference thereof is configured to be engaged with the recess 10 〇 formed in the discharge vessel 1 ,, whereby the inner tube 2 2 is formed on the inner electrode 2 toward Move in the length direction. In the case of the two plate-shaped support members 30 shown in (b), the recesses 100 are engaged with each other. Further, in the case of the plate-shaped support member 30 shown in (c), the support is Two recesses 1 are formed on both sides of the member 30, and the movement in the longitudinal direction of the inner tube 22 is regulated. However, these recesses 100 are for regulating the movement of the inner tube 22 in the longitudinal direction of the discharge vessel 1 ,, Therefore, it can function as a fixing means for slowly fixing the supporting member 30 to the discharge vessel 10, and therefore, it is not necessarily required to be formed on the entire outer circumference of the discharge vessel 1 ,, formed at one point on the circumference, or in several places. Further, these recesses 100 may be formed by, for example, dent processing, and in Fig. 4, the structure of one end of the discharge vessel 1 显示 is shown, but the central portion or the other end of the discharge vessel is provided. The plurality of support members 30 may be used. In this case, the recesses 100 are not required to be provided for all of the support members 30, and the movement of the inner tubes 22 in the longitudinal direction can be regulated by the support members provided at at least one. -15- (12) 1287819 Fig. 5 shows a third embodiment of the present invention. In this embodiment, in the first embodiment shown in Fig. 1, the inner tube 2 is penetrated by the inner tube 22 The structure in which the discharge vessel 1 is supported by the support member 3 is the structure in which the inner tube 22 is supported by the support 2a provided on the rod-shaped inner electrode 2. Fig. 6 further shows the fourth embodiment. In the second embodiment shown in Fig. 2, the coil-shaped inner electrode 2 is inserted into the inner tube 2 2, and the coil electrode 2 is provided with the holder 2 b, and the coil electrode 2 is provided. It becomes a structure supported in the inner tube 2 2 . Fig. 7 is a view showing a fifth embodiment. In the above-described first to fourth embodiments, the inner electrode 2 has a configuration in which both end portions of the discharge vessel 1 are sealed. However, the present invention is not limited thereto, and only one end portion may be sealed. In Fig. 7, the inner electrode 2 is only one end portion of the discharge vessel 10, and in the figure, the right end portion 1 Oa is sealed outward by a seal or the like, and the left end portion 1 Ob of the discharge vessel 1 is closed. structure. According to this embodiment, since the inner electrode 2 is sealed to the discharge vessel 10 only at one end, the influence on the discharge vessel 10 due to thermal expansion can be further reduced. In the first to fifth embodiments, the both ends of the inner tube 22 are open to the discharge space, but the both end portions are not necessarily opened, and the one end portion may be connected to the discharge vessel. 8 picture. In Fig. 8, the inner tube 22 has the left end 22a opened in the discharge space, and the right end 22b is connected to the discharge vessel 10 or the like by welding. With this embodiment 6, the inner tube 22 is open and free by the left end 22a, -16-(13) 1287819, so that the thermal expansion of the inner tube 22 is not restricted by other members, and the mounting portion of the discharge vessel 10 is not deformed. And stress concentration occurs. However, with this embodiment 6, as also described in the above-described first embodiment, the configuration in which the inner tube 22 is mounted with the support member 30 and the inner tube 22 is supported for the discharge vessel 10 is shown, but in this embodiment, since the inner side Since the tube 22 is connected to the discharge vessel 110 by the one end portion 22b, the support member 30 that supports the inner tube 22 can be eliminated particularly in the case of a small lamp. However, as shown in Fig. 9, the support member 30 of each of the above-described first to sixth embodiments may have a notch 31 formed in the light extraction direction (lower in the figure). The support member 30 is fixed to the inner tube 2 2 or the discharge container 10 or the like by welding. Thus, it is possible to solve the problem that no discharge is formed in the support member 30 portion, and light from other light-emitting portions is blocked from being radiated to the outside. That is, in the structure in which the support member 30 is provided, since the support member 30 exists, there is no discharge space between the inner and outer electrodes 2, 3 in this portion, so that no discharge is formed in the portion, and other light-emitting portions are formed. The problem that the light in the oblique direction is blocked by the support member 30 and cannot be radiated to the outside of the discharge vessel 1 can form a discharge space under the support member 30 by the notch 31, and these problems can be eliminated. The excimer light bulb of the present invention is not limited to the structure as shown in Figs. For example, the external electrode is not limited to the mesh electrode or the semi-cylindrical shape, and may be formed by printing or the like on the outside of the discharge vessel. Further, the outer electrode is not physically required to be constituted by a single member, and may be electrically connected in plural portions in the longitudinal direction of the discharge vessel. The advantage of this construction is that the -17- (14) 1287819 strip can be easily manufactured and adjusted for light distribution. The inner electrode is not limited to the rod electrode or the coil electrode, and has electrical characteristics in the inner tube, and can be used as an electrode for excimer light emission. For example, the metal film is vaporized on the inner surface of the inner tube. The metal film has the advantage of reducing the inner tube or making the metal film a reflective mirror. Further, the inner electrode may be tubular. In this case, by forming a C-shaped cross section having a part of the notch in the cross section, the adhesion of the inner tube can be improved. In the case where the coil is formed by the inner electrode, the wire is not formed by one metal wire, but the structure in which the plurality of coils are connected to each other, or the structure in which the rod portion and the coil portion are alternately arranged, and further, the distance between the coils is A configuration in which the length direction changes can also be applied. In particular, in the case where the inner diameter or the thickness of the discharge vessel is varied, it is effective to eliminate the unevenness of the place where the quasi-molecular luminescence generated by the unevenness is uneven. The structure of the sealing portion of the discharge vessel is not limited to the extrusion seal, and other foil seals, that is, shrink seal structures may be used, and so-called mutual overlap seals may be employed. The advantage of the mutual lap joint is that the bonding property between the glass and the electrode is good, and it is possible to more reliably prevent the occurrence of gas leakage or cracking in the sealing portion. Further, although the support member that supports the inner tube is attached to the inner tube by welding or the like, the inner tube is not slowly limited to the structure attached to the discharge vessel side, and the inner tube is also slowly fitted to the support member. can. Even in this case, the thermal expansion in the longitudinal direction of the inner tube is not restricted by the support member and is free to contract and expand. However, because the inner tube is not necessary to move large in the length direction of -18-(15) 1287819, it is not preferable. Therefore, depending on the _ ^ θ ® β ® side I, the fixing means for regulating the movement in the longitudinal direction of the inner tube is set. In addition, the support member of the inner tube may be attached to either the discharge vessel or the inner tube. It is also possible to arrange an aspirator in the discharge space. The aspirator ' is composed of, for example, ruthenium, chrome, or the like, and is excellent in that it can absorb impure gas. The configuration of the aspirator may be such that the dedicated aspirator housing chamber ' is fixed by, for example, a structure disposed at the end of the discharge vessel or magnetically held. In the structure shown in Fig. 1, when the number of examples is shown, the length of the discharge vessel 10 (including the sealing portion) is 4 mm to 1500 mm, for example, 1000 mm, and the outer diameter of the discharge vessel 1 is required. 〇mm~20mm, for example, 15 mm. The length of the inner tube 22 is 200 mm to 1 30 mm, for example, 800 mm, and the outer diameter of the inner tube 2 2 is 0 4 mm to 8 mm, for example, 5 mm, and the inner diameter is 2 mm to 6 mm. , for example, 3 mm. The inner electrode (rod electrode) has a length of 300 mm to 1400 mm, for example, 900 mm, and an outer diameter of 0 1.5 mm to 5.9 mm, for example, 2.8 mm. The length of the elastic portion 21 is 10 mm to 30 mm, for example, 20 mm, and the outer diameter is 0 2 mm to 7 mm. For example, the width of the 4 m m 支撑 support member 30 is 3 mm to 7 mm, for example, 5 mm. The structure shown in Fig. 2 is different from the structure shown in Fig. 1. When the number of examples is shown, the outer diameter of the coil-shaped inner electrode is 0 1.5 mm to 5.9 mm, for example, 2.8 mm. It is a structure as shown in Fig. 3, and is different from the structure of -19-(16) 1287819 shown in Fig. 1 and Fig. 2, and the discharge distance d is 2 mm to 7 mm, for example, for example. 5.0 mm, which is a range of distances from D to 2 d, is 4 mm to 14 mm, for example, l〇mm. In an excimer light bulb, a dielectric body is disposed between the outer electrode and the inner electrode to allow a discharge space to exist. Excimer light bulbs, although also referred to as dielectric barrier discharge lamps, have excellent features not found in conventional low pressure mercury lamps or high pressure discharge lamps that emit intense light from a single wavelength of vacuum ultraviolet light. The single-wavelength light is determined by the gas enclosed in the discharge vessel. The xenon gas (Xe) is light with a wavelength of 172 nm, and the argon gas (Ar) and chlorine gas (CL) are light with a wavelength of 175 nm. In the case of cerium and iodine (I), light having a wavelength of 191 nm, in the case of argon (F) and fluorine (F), light having a wavelength of 193 nm, and in the case of krypton (Kr) and bromine (Br), light having a wavelength of 207 nm, 氪 ( In the case of K〇 and chlorine (CL), light having a wavelength of 222 nm is emitted. Further, it is characterized in that it can be turned off at an instant (within 1 second) as needed. For excimer light emission, it is supplied from a power supply device to an excimer. The voltage waveform of the bulb is not limited to a sine wave, and the pulse waveform may be used. In this case, the pulse waveform having an interval (stop period) is preferably excellent in luminous efficiency because the pulse is continuously supplied, and the pulse waveform is sharply changed. The rising waveform is preferably added. This is because the voltage of the vertical rising waveform is applied, and the voltage is directly applied to the gas in the discharge capacitor as compared with the case where the voltage is applied gently as the sinusoidal voltage is applied. And, set The rest period is not to destroy the generated excimer. However, the number of examples can be selected from 0.0 3 # sec to 1 β seconds, for example, 〇· 5 μsec, and the pulse width can be 0 · 5 // Range selection of seconds ~ 5 / 2 seconds, for example 1 / 2 seconds, stop period -20 - (17) 1287819 can be selected from the range of 1 # seconds ~ 1 〇〇 #秒, for example 2 9 / sec. 0 is a schematic structure showing an irradiation device using the excimer light bulb of the present invention. The excimer irradiation device 40 is formed of a metal block 41 to form a box-shaped crucible, and a groove is provided in the metal block 41, and the excimer bulb is provided. 10 (1 〇 a, 1 Ob, 1 0 c ) is suitable for the trench arrangement. In the metal block 4 1 , a cooling water through hole 42 (42a, 42b) for flowing cooling water and an excimer are detected. The detector 43 (4 3 a, 43b, 43 c) of the emitted light of the bulb 1. The metal block 4 1 is further high-reflective characteristics of vacuum ultraviolet light because of high heat transfer characteristics and ease of processing, for example, Aluminum. However, although the illustration is omitted, in the metal block 41, a temperature detecting detector for the discharge vessel is disposed. In the case of 40, the inlet port 44a and the outlet port 44b for supplying the inert gas are provided. The inlet port 44a is connected to the gas cylinder or the like by a valve, and the discharge port 44 is also connected to the vacuum steel cylinder by a valve. The inert gas is generally a nitrogen gas, but a gas or the like may be used. Further, the inert gas may be introduced from the introduction port 44a and discharged from the discharge port 44b before or after the treatment, or before and after the treatment. The power supply device 45 is disposed outside the irradiation device 40. The processed material W that receives the ultraviolet light emitted from the excimer light bulb 1 is placed on the processing table 46 outside the irradiation device 40. The processing table 4 6 ' 曰 , for example, is composed of stainless steel, and the processed material W can be heated by disposing a filament heater on each of the inner wires. Further, in the processing table 46 which is not shown in the figure, by providing the elevating mechanism by the -21 - (18) 1287819, the workpiece W can be moved to the excimer lamp phase by the transport mechanism. In the treatment W, a treatment gas such as an oxygen gas, a decane-based hydrogen gas or an argon gas is supplied, and the radiation reaction from the treatment and the excimer bulb 1 is subjected to a treatment. However, the above-described irradiation device is a transmission member that is not segmented between the lamp and the treatment object. Therefore, the advantage that the entire apparatus can be miniaturized does not require the use of expensive ultraviolet rays to pass through the window member. Thus, the excimer light bulb of the present invention is small, so that the distance between the excimer irradiation I and the treatment material w is close to possible, and therefore, the oxidation of the metal block can be prevented by the flow of the inert gas flowing from the guide 7 to the discharge port 44b. However, it is not excluded to provide a transmission member between the lamp and the treatment object. By providing the transmissive member, there is an advantage that the problem that the float is attached to the lamp or its vicinity can be solved. [Schematic Description] [Fig. 1] Fig. 1 showing the excimer bulb of the present invention. [Fig. 2] A second embodiment of the excimer light bulb of the present invention is shown. [Fig. 3] An enlarged view of the main part of Fig. 1 is displayed. [Fig. 4] An enlarged view of the main part of Fig. 2 is displayed. [Fig. 5] shows Example 3 of the excimer light bulb of the present invention. [Fig. 6] shows Example 4 of the excimer light bulb of the present invention. [Fig. 7] Fig. 5 showing an excimer light bulb of the present invention. J 1, and the gas and gas setting will be at the same time, because the segmented material of 40 □ 44a 41 is -22-(19) 1287819 [Fig. 8] showing Example 6 of the excimer bulb of the present invention. . [Fig. 9] Fig. 7 showing an excimer light bulb of the present invention. [Fig. 10] shows an irradiation device using the excimer light bulb of the present invention. [Fig. 1 1] shows a conventional excimer light bulb. [Fig. 1 2] shows other conventional examples. [Main component symbol description] W handler 1 excimer bulb 2 coiled inner electrode 2a support 2b bracket 3 mesh outer electrode 1 0 excimer bulb (discharge capacitor) l〇a right end l〇b left end 1 1 light Part 1 2 Sealing portion 13 Metal foil 1 4 External reed 2 1 Elastic portion 22 Inner tube 22a Left end -23- (20) (20) 1287819 2 2 b Right u and 30 0-plate supporting member 3 1 Missing □ 4 0 excimer irradiation device 41 metal block 42 cooling water through hole 4 3 detector 44 discharge port 44a inlet port 44b discharge port 45 power supply device 4 6 processing table 5 1 outer tube 5 2 inner tube 60 discharges capacitor 6 1 inside Electrode 6 2 outer electrode 1 0 0 recess-24