TWI287092B - Relay member and inspection probe jig - Google Patents

Abstract

This invention provides a relay member and an inspection probe jig capable of controlling decrease of transmission characteristic of electrical signal such as inspection signal or the like, and manufacture there of in easy. In the present invention, the inspection probe jig comprises a probe unit (1) having probe which contacts with the terminal provided on as inspection object, a plurality of conductive solid wires (2) where one end is electrically connected with the probe provided on the probe unit (1), a plurality of coaxial cables (3) where one end is connected with another end of the conductive solid wire (2), a relay member (4) for holding the neighborhood portion of one end the coaxial cables (3) which connects with the conductive solid wire (2) in predetermined position, and an inspection base board (5) for fastening the other end of the coaxial cable (3). The relay member (4) comprises a holding part (7) for holding the other end of the plural coaxial cables (3) in the same sequence with the arrangement sequence of one end respectively connected to a plural connection terminals (20) formed on the inspection base board (5).

Description

1287092 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to automatic tape joining (Tape Aut〇mated)

Bonding; TAB) - Used to check the electrical characteristics of the inspection object - the relay member and the inspection probe fixture. - [Prior Art] In recent years, an integrated circuit such as a tape-and-reel automatic bonding has a structure in which an electric signal having a high frequency, for example, the above-described array, is operated in order to realize the inter-speed transfer processing. Therefore, in the inspection system in which the wire is inspected for electrical and electrical characteristics of the circuit, it is necessary to adopt a system for checking signals at a high frequency of the frequency of the operation signal. In the case of a conductive single strand of an enameled wire or the like, a wiring structure for inspecting the high-rate inspection signal output to an integrated circuit or the like is formed, and a long wiring is formed. The waveform of the inspection signal is easily passivated, and thus it is easy to cause a problem that the high-frequency test performance is hindered. Therefore, in response to the countermeasure against the problem, it has been proposed to use a coaxial electric winding to realize a shouting structure for conveying an inspection signal. In the inspection system (see, for example, Patent Document 1) [Patent Document 1] Japanese Patent No. 2971706 (Explanation of the Invention) However, the recent integrated circuit not only has an increase in speed but also saves space. And it has a tendency to be miniaturized, with a plurality of terminals connected to the integrated circuit and the "electrical (four)"

S 317683 Amendment 5 The interval between 1 1287092 also becomes narrow. For example, in recent years, the U-segment of the integrated circuit has been reduced to less than i coffee. On the other hand, the outer diameter of the coaxial cable needs to have a size of at least about 10,000. Therefore, it is difficult to manufacture the coaxial cable. An inspection probe fixture for an inspection system for transmitting an inspection signal is used. The present invention has been made in view of the above circumstances, and an object of the invention is to provide a relay member and an inspection probe jig which can suppress deterioration of transmission characteristics of an electric signal such as an inspection signal. Lu (Means for Solving the Problem) In order to achieve the object of solving the above problems, the relay member of the second aspect of the invention includes a holding portion that is electrically connected to one end and electrically connected to the inspection object. The other end of the plurality of conductive single strands of the plurality of probes contacting the plurality of probes is electrically connected to the other end of the plurality of coaxial cables connected to the inspection substrate for outputting the predetermined inspection signal; The other end of the coaxial cable is held. The holding portion is configured to hold the other end of the plurality of coaxial cables so as to be in the same order as the arrangement order of the one end connected to the inspection substrate. . According to the invention of the third aspect of the invention, the holding portion is configured to hold the other end of the coaxial cable so as to be in the same order as the arrangement order of the one end connected to the inspection substrate. It is possible to reduce the monthly b-ability of a plurality of coaxial cables disposed in a state of being mutually intersected, and thus it is possible to realize a relay member capable of easily performing coaxial electric winding. 317683 stipulates that the relay member of claim 6 1287092, claiming the second item of the patent scope, in the above invention: the above-mentioned holding 4' system is such that a plurality of the above-mentioned coaxial electric (four) length differences are formed, and =] The above coaxial cable is maintained. Further, in the relay member of the third aspect of the invention, in the above invention, the electric single strand system is present, and is covered by an insulating member, and the electric I* is connected to the inspection object. The conductive single-strand wire for grounding of the terminal to which the ground potential is applied is also covered by the insulating member, and is electrically connected to the connection conductive terminal of the signal terminal for inputting and outputting electrical signals provided in the inspection object The single-strand wire; the grounded electric single-strand wire and the above-mentioned conductive single-strand wire for connection are twisted and extended. Further, in the above-mentioned invention, the conductive single-strand wire has a first conductive single-strand wire and a second conductive single-strand wire, the first conductive single-strand wire and the first The second conductive single-strand wire system is electrically connected to the second terminal and the second terminal forming a part of the single differential circuit in the inspection object; the first conductive single-strand wire and the second conductive early-type wire system Extend each other red. Further, the relay member of the fifth aspect of the patent application system includes a plurality of holding portions that are electrically connected to one end of a plurality of probes that are in contact with a connection terminal provided in the inspection object. When the other end of the conductive single-strand wire is electrically connected to the other end of the core wire provided in the plurality of coaxial cables connected to the inspection substrate for outputting the predetermined inspection signal, the other ends of the plurality of coaxial cables are respectively The utility model is characterized in that: the plurality of the holding portions each have a conductive through pipe, and the heng conductive conductive pipe has a hollow portion for feeding a single strand or the coaxial fiber / 317683 correcting the original 7 1287092 'And electrically connected to the same number of above ====== should be able to achieve the electrostatic shielding effect in the f domain of the complex =, and the relay member to hold the _ electricity. In the relay member of the sixth aspect of the invention, the plurality of the conductive members provided in each of the plurality of holding portions are electrically connected to each other. In addition, the material inspection (4) 7-shaped inspection needle fixture is used in the electrical characteristics inspection of the object - the object is: the grounding potential is applied to the grounding terminal, and the The signal terminal used for the input and output of the electrical signal is characterized in that: the probe unit has a plurality of probes respectively contacting the ground terminal and the terminal, and the conductive single-strand wire for grounding is The insulating material _ is covered and passes through the predetermined probe at the time of inspection, and the terminal is electrically connected to the ground terminal, and the conductive single-strand wire for connection is covered by the insulating member and has the grounding a structure in which the conductive single strands are twisted and extended to each other, and the probe n passing through the inspection is electrically connected to the signal terminal; and the inspection substrate is connected to the grounding conductive single strand and the conductive single strand for connection The other end of the wire is connected, and an electrical signal for inspection is output to the above-mentioned conductive single-strand wire for connection. According to the invention of claim 7 of the patent application, since the conductive single-strand wire for grounding and the conductive single-strand wire for connection are twisted and extended, the 327683 is modified to be the same as the Qilian magnetic flux. The electromotive force is reversed at every distance of the stranded structure. Therefore, the electromagnetic combination of other circuits and other conductive single strands can be offset, and the crosstalk between the plurality of strands can be prevented, so Regarding the transmission characteristics of electrical signals such as inspection signals, it is possible to develop fish. The case of using coaxial cable is the same as in the case of wood. Inspection probe fixture. See also the left side of the grain-made clothing. In addition, the puncturing needle material of the eighth item of the patent scope is used in the inspection of the electrical characteristics of the object to be inspected, and the object of the inspection is appealing, so that (4) forms a single - the differential secret - part of the material - and characterized by: a probe unit having a plurality of probes - first conductive strands each contacting the W-terminal and the second terminal, The insulating member is covered and electrically connected to the first terminal through a predetermined probe at the inspection; the second conductive single strand is covered by the insulating member and has the first a structure in which the conductive single-stranded wires are stretched and extended to each other, and the predetermined probe is passed through the inspection to make a φ terminal electrically connected to the other connection terminal forming the terminal pair; and the inspection substrate is A conductive single strand and the other end of the second conductive single strand are electrically connected, and an electrical signal for inspection is output to at least one side of the first conductive single strand and the second conductive single strand. According to the invention of claim 8 of the invention, since the first conductive single-strand and the second conductive single-strand corresponding to the single-differential circuit are twisted and extended, the fifth patent application is applied. In the same case, it is possible to prevent crosstalk between a plurality of strands, and the like, and to perform the same performance as in the case of using a coaxial cable, and to realize an easy-to-manufacture inspection 317683, the modified 91287092 probe fixture. Further, the inspection probe jig according to the ninth aspect of the patent application is used for performing electrical property inspection on a predetermined inspection object, and is characterized in that it has a 捸 needle unit and is in contact with a plurality of terminals of the inspection object. • a plurality of probes; a plurality of conductive single-strand wires, one end of which is electrically connected to the above-mentioned '彳木针, and the inspection substrate has a function of outputting an inspection signal used at least in the above-mentioned electrical property inspection; a coaxial cable, one end of which is electrically connected to the inspection substrate, and the other end of which is electrically connected to the conductive cast, and the m-relay member of the strand has a holding portion, and the holding portion is connected to one end of the inspection substrate The order of the arrangement is the same = column order, and the other ends of the plurality of coaxial cables are pre-prepared. t: The inspection probe fixture of the first aspect of the patent application is in the case of 1 standby for electrical property inspection. The utility model is characterized in that the shoulder 祯m system has a plurality of probes in contact with the plurality of terminals of the inspection object; a plurality of conductive single strands, sex,: use ΐ 至少 至少 至少 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力 力The portion of the conductive single-r green beta and the Lu-child conductive via have a conductive passage through at least one of the cores of the coaxial cable: And electrically connected to the shielding cover of the above coaxial cable

317683 Amendment 10 1287092 [Effects of the Invention] The relay member and the inspection probe jig of the present invention can achieve the following effects, that is, the manufacturing difficulty caused by the use of the coaxial cable can be avoided, '^ and The transmission characteristic of the electric signal can achieve the same performance as that of the case where the coaxial electric power is used. [Embodiment] Hereinafter, a preferred embodiment (hereinafter referred to as "implementation") for carrying out the relay structure and inspection probe jig of the present invention will be described in detail with reference to the drawings. The schema is a pattern, and it should be noted that the relationship between the thickness and the width of each part, and the ratio of the thickness of each part are not the same as the actual case. Between the various patterns, Of course, there are also dimensional relationships: the parts with different proportions. In the following embodiments, an inspection system including a relay member and an inspection probe jig will be described as an example for easy understanding. (Embodiment 1) An inspection system according to Embodiment 1 will be described first. Fig. j is a schematic view showing the overall configuration of the inspection system of the first embodiment. As shown in the figure, the inspection system of the present embodiment 1 has a probe unit 1 having a probe that is in contact with a terminal of a tape-type automatic engagement device, and is electrically connected at one end. a plurality of conductive single-strand wires 2 of probes provided in the probe unit, one end of which is connected to a plurality of coaxial cables 3 at the other end of the conductive single-strand wire 2; and a coaxial cable 3 connected to the conductive single-strand wire 2 a portion near one end, a relay member 4 held at a predetermined position; an inspection substrate 5 that fixes the other end of the coaxial cable 3; and a modification of the 1287709 for the vehicle through the inspection substrate 5; A signal processing device 6 for supplying a signal or the like. Among the constituent elements, the probe jig is formed by the probe single phantom, the conductive single strand 2, the coaxial coil 3, the relay member 4, and the inspection substrate 5. . ^Electrical single strand 2 - the end is electrically connected to the probe unit 1 is injured. j is grasped, ten is electrically connected to the coaxial cable 3, is used to probe the probe unit 1 The single-strand, the present electric single-strand wire 2 electrically connected to the coaxial electric gauge 3 is specifically provided with a structure in which the outer circumference of the single-strand line formed by the V-electrode member is covered with an insulating member. For example, an X/V twist line or the like is formed to form the conductive single strand 2. Since the conductive single-strand wire 2 has a relatively simple structure compared with the same-axis electrical winding, the probes arranged in the narrow one can be electrically connected to one end of the conductive single-strand wire 2. In addition, the interval between the plurality of conductive single-strand wires 2 is double-known in the near side of the relay member 4, and the conductive single-strand wires 2 can be electrically connected to the coaxial cable 3 by making the interval wide. . • Coaxial power and sense 3 are used to output and input high-frequency inspection signals. That is, when the probe unit 丨 and the inspection substrate 5 are electrically connected only by the conductive single-strand, the deterioration of the high-frequency electrical signal into the specialized system is remarkable. Therefore, in the inspection system of the first embodiment, the glazed cable 3 is also used for most of the wiring for connecting the probe unit and the inspection substrate 5. The relay member 4 is a member for holding at least a connecting portion of the coaxial cable 3 at a predetermined position when the coaxial f, the sense 3, and the conductive single strand 2 are connected. Specifically, the relay configuration 4 is fixed to the table 317683 of the probe unit 1 in the modification 12 1287092. The holding portion 7 for holding the coaxial cable 3 is formed corresponding to the coaxial two. The structure of the holding portion 7 may be any structure as long as it has a function of holding the coaxial portion at a predetermined position. For example, in the example of Fig. 1, the holding portion 7 is provided by the coaxial electric iron 3 :: The through hole of the diameter is formed, and the coaxial electric--, see the hunting function is provided in the through-hole. In the present invention: in the first embodiment, the relay member 4 having only the holding function of the coaxial cable 3 is described. However, for example, it may be configured to have a conductive single-strand wire 2 in addition to the holding portion 7. Coaxial (four) 3 electrically connected conductive end / sub-structure. Regarding the aspect in which the coaxial electric power is maintained by 胄7, although it is described in detail later, it is preferable to minimize the length difference between the plurality of coaxial electric wires and the "long 3" line. The method is to maintain the coaxial electric circuit 3. The inspection substrate 5 is formed by a printed circuit board having a predetermined circuit configuration, and has a signal processing device 6 and a coaxial electric winding 3 electrically connected. And the function of outputting the inspection money generated by the signal processing device 6 to the coaxial cable 3. The inspection substrate 5 can also be provided with the function of the signal processing device 6. The signal processing device 6 is used for automatic tape-and-loop bonding, etc. A device for generating and outputting an inspection signal used for verification of an inspection object, and analyzing the response signal output from the inspection target for the inspection signal, etc. The electrical connection between the signal processing device 6 and the inspection substrate 5 is performed. The inspection signal outputted by the signal processing device 6 is sequentially input to the inspection object via the inspection substrate 5, the coaxial cable 3, and the conductive single-strand wire 2. However, 317683 modifies this 13 1287092 • The (four) sexual connection relationship between the number processing device 6 and the inspection substrate 5 is relatively complicated, and is not a characteristic part of the present invention. Therefore, in the second figure, the connection relationship between the two is only in the form of an arrow. The probe unit! and its peripheral structure will be described in detail. Fig. 2 is a schematic cross-sectional view showing the structure of the probe unit 1 and its peripheral portion, as shown in Fig. 2, The probe unit 具备 is provided with a wiring board 12 in which a wiring structure for electrically connecting the probe 1 is held in the holding substrate 1 for holding the probe, and is used for the wiring board 12 and the inspection substrate. 5 _ 崔 保 保 疋 疋 j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j j The probe 10 is electrically connected to the probe η. The probe 10 is a probe for contacting the connection terminal formed on the surface of the inspection object 15. Specifically, the probe 10 has a needle-like shape R. And has a structure that is stretchable in the longitudinal direction, and There is a function of bringing the tip end portion into contact with the terminal formed on the inspection object 15 by a predetermined φ. The holding substrate 11 is a substrate for holding the probe 1 to be held. Since the probe 10 is used for the inspection object 15 Since the formed terminals are in contact with each other, the holding substrate 11 has a function of the through-holes of the arrangement of the terminals formed on the inspection object 15 and has a function of holding the probes 1 () in the respective through-holes. A conductive member (not shown) for electrically connecting the probe 10 held by the substrate u and the single-stranded wire 12 is provided. Specifically, the conductive member is under the wiring substrate 12 (and

317683 Amendment 14 1287092 (4) The surface of the substrate u is contacted, the damage corresponds to the position of the probe, and the terminal is also disposed on the upper surface of the wiring substrate 12 via a through hole or the like (with The surface in which the substrate u is in contact is opposed to each other, and the material is electrically connected to the probe 1G by the connection of the material to the conductive single-strand wire 2. Further, it is also possible to realize a structure in which the conductive single-strand wire 2 is directly in contact with the probe without passing through the wiring substrate 12'. The connection diagram of the conductive single strand 2 and the coaxial electric cable 3 will be described in detail in Fig. 2 of the photograph. As shown in Fig. 2, one end of the conductive single-strand wire is electrically connected to the probe 1 via the wiring board 12, and the other end is connected to the core wire 25 of the coaxial cable. In the connection portion, the conductive portion in the conductive single-strand wire 2 is exposed to the surface in order to ensure conduction, and therefore, after the connection with the core wire 25, the surface is covered by the covering material formed of an insulating material. Construction. The connection between the conductive single-strand wire 2 and the core wire ^ is preferably carried out, for example, by using solder. • Next, the connection pattern of the coaxial cable 3 will be described. At the end of the coaxial cable 3 (that is, the end of the coaxial cable 25 opposite to the side contacting the conductive single-strand 2), the connection terminal 2 formed on the inspection substrate 5 is connected to the signal and the signal is connected. The electrical connection 3 of the processing device 6 is connected to the connecting material 2G, and the inspection money or the like can be transmitted. The outer (five) axis electric system sees the structure in which the grounding potential of the shielding layer on the one end side is applied thereto. That is, on the end side of the coaxial electron microscope 3, the shielding layer (omitted from the drawing) is connected to the grounding wire 22 via the solder 21, and the grounding wire 22 is connected to the ground terminal formed on the substrate 5. μ connection, whereby the 317683 correction 15 1287092 forms the ground potential maintained by the f ground terminal 23 to the shielding coating. On the other hand, the other end of the coaxial cable 3, the core 25 is a single province: 2, connected, And a shielding layer formed around the core wire 25 (in the figure, the grounding terminal 17 formed on the inspection substrate 5 is rotatably connected to the grounding terminal. The inspection layer is provided with a grounding wire and a grounding terminal. π ρ, hunting to supply a predetermined ground potential. In addition, coaxial winding 3 The electrical connection between the shielding layer of the other end and the grounding wire 18 is performed by the welding machine 9. Thus, the shielding coating of the coaxial cable 3 has a structure in which the ground potential is supplied at both ends, Since the concavo-cladding coating can maintain the stable ground potential of the whole, the noise from the outside is prevented from being transmitted to the core wire 25. The description will be made by adding the holding portion 7 which is injured by the relay member 4. The fixed number of coaxial cables 3 and the plurality of conductive single-strand wires 2 are arranged in a sad manner. Figure 3 is a schematic diagram showing the coaxial cable 3 and the conductive single-strand 2, and the following is a schematic diagram. The coaxial winding 3 formed by the complex Lu number, the conductive single strand 2, and the holding portion 7 formed on the relay member 4 are separately distinguished and described. Therefore, additional symbols such as a and b are added as appropriate, and in FIG. 3 In addition, when the inspection object 15 in which a plurality of terminals 24 are formed on the surface is subjected to electrical property inspection, the following inspection system is usually formed, that is, not for a plurality of terminals 24 Riding the same electrical signal The input and output are performed, and an inspection system corresponding to the input of each of the plurality of terminals 24, the output of the inspection signal or the input of the response signal, can be performed. Therefore, in the structure of the present embodiment i, as shown in FIG. Formed, used to modify the number of terminals 2...f formed by the two 317683 corrections on the 16 1287092, the connection end of the output input of the figure a and the number 2 〇 a ^ 20 f. 3 I and 7T ❹ add The meaning of the symbol is not only the mutual distinction, but for example, the connection terminal outputs the inspection signal to the & the connection terminal is deleted from the terminal 24b. The component with the same symbol is added to each other.意义^ 'About the conductive single strand 2 and the coaxial coil 3, the conductive soap strand 2a is electrically connected to the terminal 24a, and the coaxial electrical winding 3& is electrically connected to the connecting terminal 20a. . As shown in the configuration of the first embodiment, when inspecting the inspection object 15 having the plurality of terminals 24a to 24f, the inspection substrate 5 must be formed with a plurality of connection terminals 2 corresponding to the respective terminals and added to 2〇f, The conductive single-strand wire 2 and the coaxial cable 3 are arranged such that the terminals 24 and the terminal 20 are electrically connected to each other. Here, in general, the arrangement order of the terminals 2乜 to 24f on the inspection object 15 is generally determined independently of each other, and the arrangement order of the connection terminals 2a to 2〇f on the substrate 5 is inspected. Therefore, when the positions of the coaxial cables 3a to 3f are held in the relay member 4 in the first embodiment, the order in which the holding portions 7a to 7f for holding are set is required. . On the other hand, in the first embodiment, the plurality of coaxial cables, the holding portion 7 is arranged in such a manner that one end of each of the connection terminals 20a to 20f formed by the inspection substrate 5 is connected, and the relay member is used. The arrangement order of the other ends of the 4 holds is the same, and the coaxial cable 3 is held. Specifically, in the first embodiment, the order of arrangement of the portions 7a to 7f of the <S) 1287092 is corrected for the holding 17 317683, and the arrangement order of the terminals 24a to 24f formed on the inspection object i 5 is not matched. On the other hand, in accordance with the arrangement order of the connection terminals 20a to 20f formed by the inspection substrate, the configuration of the arrangement order of the retention portion to 7f is determined. Next, in the first embodiment, the holding portion 7 provided in the relay member 4 has the advantage of constituting the other end of the coaxial cable 3 in the above-described aspect. Specifically, by the configuration in which the other end of the coaxial cable 3 is held in the above-described aspect, the inspection system of the first embodiment is provided with a deterioration in the transmission characteristics of the electrical signal such as the inspection signal. And the advantages can be easily manufactured. Hereinafter, this advantage will be described in detail. As described above, from the viewpoint of suppressing the decrease in the transmission characteristics of the high-frequency electric signal, it is not preferable to form the wiring for connecting the probes 10 between the inspection substrate 5 only by the conductive single-strand wires 2. At least the coaxial cable 3' must be used in the - part. When the (four)-axis cable 3 is used, the process of coaxially rotating the wiring is complicated because the manufacturing process is complicated, so it is not easy to manufacture. Check the system. That is, the coaxial electric winding 3 has a certain degree of thick diameter and strength, so that in the case of wiring, the on-axis coaxial electric winding 3 acts on the other side of the coaxial electric iron 3 to exert a pulling force and the like. The wiring state of the coaxial coaxial electric gauge 3 may cause a defect. Therefore, when wiring the coaxial cable 3, it is necessary to carefully perform wiring processing in such a manner that it does not adversely affect other coaxial cables 3. Wait. In contrast to this embodiment 丨+, the relay member 4 has a function of holding the 317683-corrected 18 1287092: the function of the holding is to connect to the side of the inspection substrate 5 (4) glaze, 43 &; (In addition to the order of the other, with the maintenance unit 7: the order of the children is the same way to form a check system. The degree is low, and the opening of the two axes is possible. The other coaxial electric winding 3 significantly reduces the possibility of side-to-side force. Therefore, regarding the processing in the manufacturing inspection system, it is not necessary to care about other coaxial electric windings, and it is easy to carry out. Inspecting the manufacture of the system. The ceremony is to make the arrangement order the same material, and the relay piece ^ is used to hold the plurality of coaxial electron microscopes 3, thereby making it easy to wire. In the inspection system of the present embodiment, a plurality of coaxial electric cables and cables 3 are used in almost all cases due to the action of the holding portion 7 provided in the relay member. They are not configured to cross each other. Therefore, it is not only easy to distinguish Each of the coaxial powers and the two ends of the 'view 3' are easily identified, and it is easy to confirm whether or not the respective coaxial cables 3 are correctly produced. Therefore, the confirmation procedure of the wiring state can be greatly reduced, and the inspection system can be easily manufactured. In the present embodiment i, the holding portion 7 is provided to hold the other end of the coaxial cable 3 so that the length difference of the plurality of coaxial electric wires 3 is minimized. Generally, it is difficult to completely remove the existence of the coaxial cable 3. Because of the influence of the surrounding noise, the coaxial cable 3 has a property of causing a slight decrease in the phase of the electrical signal corresponding to the length of the wiring. Therefore, the difference in wiring length between the plurality of coaxial cables 3 is large. In the case, there will be a transmission that cannot be ignored between the coaxial cables 3

317683 amends the difference in the nature of this 19 1287092 and may have a positive impact on the inspection of the inspection system. On the other hand, in the present embodiment, the inspection == is such that the difference in wiring length between the coaxial electric windings 3 is minimized, and the holding portion 7 holds the other end of the coaxial cable 3, and therefore, The phase/difference between the plurality of coaxial powers and the f-gas signals transmitted by the respective strips of €3 is almost non-existent, and has the advantage of being highly reliable. (Embodiment 2) Next, an inspection system according to Embodiment 2 will be described. The inspection system according to the second embodiment includes a structure in which the probe unit and the inspection substrate are electrically connected only by a conductive single-strand wire, and a plurality of conductive single-strand wires are used in a state of being twisted with each other. The structure is a conductive single strand of a predetermined combination and is extended. Fig. 4 is a schematic view showing the overall configuration of the inspection system of the second embodiment. In the second embodiment, the same reference numerals and names as those of the embodiment are not identical to those of the embodiment, and have the same configuration and function as the embodiment. This is also the same in the third embodiment described below. ^ & As shown in Fig. 4, the inspection system of the second embodiment differs from the embodiment L1 except that the relay member is omitted, and the coaxial cable 3' is not used, and only the conductive single-strand wire 26 is used. A structure in which the probe unit 1 and the inspection substrate 5 are electrically connected to each other. On the other hand, the plurality of conductive single-strand wires 26 used for the plurality of terminals formed on the inspection target 5 are provided with a shape of a single strand which is a predetermined combination as shown in Fig. 4 The structure that is extended below. In the second embodiment, the inspection probe device is modified by the probe unit 1, the conductive single-strand wire 26, and the inspection substrate 5, 20 317683. Fig. 5 is a schematic view showing a wiring pattern for explaining the conductive single-strand wire 26 in detail. Figure 5 is the embodiment and implementation! In the same manner as in the third drawing, the state in which the probe unit i or the like constituting the inspection system is viewed from the upper side is shown, and in order to simplify the description, the inspection pair configuration shown in the inspection is also schematically displayed. The general inspection object 27, especially in the part using the high-frequency electrical signal, uses RSDS (Reduced Swing Differential ^Signaling) and LVDS (L(10)

Signal transmission method such as Differential Signaling · Low Voltage Differential Signal Transmission. Therefore, in the terminal corresponding to the transmission method, the inspection object 27 includes a first terminal 28 and a second terminal 29 which are formed to have a function of a part of a single differential circuit in general use; The ground terminal 30 of the potential; and the configuration of the signal terminal 31 for general electrical signal input and output. In the second embodiment, the feature of the object 27 to be inspected is used, thereby realizing an inspection system in which the coaxial cable is omitted and the transmission characteristics of the transmitted inspection signal are suppressed from deteriorating. 1. Specifically, the inspection system according to the second embodiment is provided with a first terminal ^^8, a second terminal 29, and a ground terminal 3, which are electrically connected to the inspection object 27, respectively, during inspection. And the conductive terminal of the signal terminal 3: the strands 26a, 26b, 26c, 26d (each corresponding to the first electric strand of the patent application, the second conductive single strand, the conductive single strand for grounding, and the conductive single strand for connection Line), as a conductive single strand 26 . In these conductive

317683 Amendment 21 1287092. Among the single-stranded wires 26a to 26d, the conductive single-strand wires 26a, 2 electrically connected to the first terminal 28 and the second terminal 29 are selected as the mutual-coupling-pair The conductive single-strand wires 26c and 26d electrically connected to the ground terminal 3〇 and the signal terminal .31 are selected as one pair of each other. By adopting a state in which the paired conductive single-strand wires 26 are twisted and stretched in a mutually twisted state, the cross-linking magnetic fluxes of the adjacent pitches of the twisted wire structures can be offset each other and reduced. Interference between the pair of conductive single strands 26. * One of the 'electric single strands 26a, 26b' electrically connected to the first terminal 28 and the second terminal 29 is described in the first place. As described above, when the inspection target 27 is used as the electronic component, the first terminal μ and the second terminal 29 constitute a part of the differential circuit. Therefore, even at the time of inspection, the first terminal 28 and the second terminal 29 are input and output as an inspection signal based on an electrical signal corresponding to the transmission mode of the differential circuit. In the twisted wire configuration formed by the conductive single-strand wires 26a, 26b, since the electromotive force ' of the origin φ at the cross-linking magnetic flux is reversed between the adjacent distances, other circuits and other conductive single-strand wires can be used. The electromagnetic combination is applied to prevent crosstalk interference between the conductive single strands 26a, 26b2 formed as strands. In addition, when the twisted wire configuration is employed. The characteristic impedance will become more stable. In the case where the characteristic impedance value is adjusted, it is preferable that X adjusts the film thickness of the insulating film of each of the conductive single-strand wires 26a and 26b constituting the strand. Further, from the viewpoint of the adjustment of the characteristic impedance, it is preferable to adjust the number of pitches (the number of twists). By adjusting the characteristic impedance, for example, between the inspection object and the stranded structure, the actual impedance matching can be corrected. Next, one pair of the conductive single-strand wires 26c, 26d electrically connected to the ground terminal 3A and the signal terminal 31 will be described. Since the ground terminal 3 is a terminal formed by supplying the ground potential to the electronic circuit provided in the inspection object 27, even when the inspection object 27 is inspected, the inspection substrate 5 side is also The ground potential is supplied to the ground terminal 30 via the conductive single-strand wire 26c. Therefore, the potential of the conductive single-strand wire 26c for connecting the object is also maintained at the ground potential, and the conductive single-strand wire 26c is made to the conductive single by the twisting of the conductive single-strand wire 26d connected to the signal terminal 31. The strand 26d has the same electrostatic shielding function as the masking layer. Next, the advantages of the inspection system of the second embodiment will be described. As described above, in the inspection system of the second embodiment, since the predetermined pair of conductive single-strand wires 26 are stretched in a state of being twisted with each other, only the conductive single-strand wire 26 will be used. The probe 1A is electrically connected to the inspection substrate 5, but the deterioration of the transmission characteristics of the electrical signals of the respective conductive single-strand wires 26 can be suppressed as in the case of using a coaxial cable. Further, as described in the first embodiment, in the inspection system using the coaxial electric winding, the wiring procedure is cumbersome. On the other hand, in the inspection system according to the second embodiment, since the structure in which the coaxial cable is omitted can be realized, the procedure of wiring can be further reduced. Therefore, the inspection system of the second embodiment has an advantage of being able to suppress the deterioration of the transmission characteristics of electrical signals such as inspection signals and to realize an inspection system which is easy to manufacture. Since the inspection system of the second embodiment can be omitted, the coaxial cable can be omitted. Therefore, it is not necessary to electrically connect the conductive single-strand wire to the coaxial cable 317683 revision 23 1287092. Therefore, in the second embodiment, it is possible to reduce the number of connections between different types of conductive members in the middle of the signal transmission path, and to reduce the noise mixing due to the connection between the different types of conductive members, thereby achieving excellent performance. Inspection system for electrical signal transmission characteristics. Further, in the general inspection object 27, the first _ terminal 28 and the second terminal 29 forming the differential circuit are generally formed at positions adjacent to each other. Therefore, the conductive single-strand wires 26a and 26b, which are electrically connected to the first terminal 28 and the second terminal 29, are disposed in the inspection system in a position adjacent to each other, and can be (four) ^ Conductive single strands which are extended in a twisted state are realized, and therefore, from this point of view, an inspection system which is easy to manufacture can also be realized. Further, due to the difference in the configuration of the inspection object 27, it is possible to make the number of signal terminals 31 exceed the number of the ground terminals 3A. In this case, a plurality of conductive single-strand wires 26c are electrically connected to the single ground terminal 3〇, and the plurality of conductive single-strand wires 26c are electrically connected to the remaining signal terminals 31. The conductive single-strand wire 26d is twisted or the like, and can be correspondingly provided. Further, as a modification of the second embodiment, conductive single-strand wires each connected to the second die 28 and the second terminal 29 may be used. 26b 'The twisting of the conductive single-strand wire connected to the grounding terminal 3G, which is extended in this form, is also preferable. Furthermore, in order to make the potential of the conductive single-strand wire 26c# electrically connected to the ground terminal 3〇 more stable, it is preferable to use the end portion connected to the side of the ground terminal 30 to be electrically connected to the vicinity. The structure of the ground terminal. In addition, the conductive single strand 26 of the actual state 2 and the embodiment i

317683 Amendment 24 1287092, 2 Conductive single m replacement line is also valid. That is, I is a conductive emerald that connects the panel with the relay member 4; ΐ = ί; the predetermined pair of conductive single strands are twisted and stretched. It is also effective, and in this configuration, it has the advantage of being able to suppress noise between the probe unit and the "relay member 4. In addition, from the viewpoint of the present advantage, The arrangement order of the coaxial electric two 3 using the conductive single-strand wire 26 can be adopted as shown in the first embodiment. The J, I, and the sequence W can be used, for example, if the strands are not crossed and coaxial. The electric environment 丨3 is configured such that the relay member 4 holds the other end of the coaxial cable 3 so as to intersect each other. (Embodiment 3) Next, an inspection system according to Embodiment 3 will be described. First, it is the same as the shell-shaped ceremony, the first one is equipped with a conductive single-strand wire and a coaxial cable to electrically connect the probe to the inspection substrate, and f has one end of the coaxial cable at a predetermined position. In the inspection system of the present invention, the inspection system of the present invention has a structure in which a plurality of predetermined predetermined conductive tubes are provided corresponding to the holding portion in the relay member. The overall configuration of the inspection system of the third embodiment As shown in Fig. 6, in the inspection system of the third embodiment, the relay member 33 is provided with a structure having a plurality of conductive members 34 corresponding to the holding portion 7. In the example, the conductive single-strand wire % has a structure in which a predetermined pair is extended in a state of being twisted with each other, but the structure is not essential, and may be the same as in the first embodiment. This embodiment has a modification of the form 25 317683. The inspection probe of the state of 1287092 is composed of a probe unit i, a conductive single-strand π, a relay member 33, a coaxial cable 3, and an inspection substrate 5. Fig. 7 is a view for explaining the relay member 33. The schematic diagram of the configuration of the conductive vias 34 is provided. (4) The sexual vias 34 are provided in a state in which the holding portions 7 formed by the plate-like portions 33a constituting a part of the second member 33 are penetrated. In addition, the coaxial cable 3 is provided with a core wire 25, an insulating portion 35, a shielding layer %, and an insulating coating 37 which are disposed outward from the central axis. Configuration in which the core wire 25 The insulating portion 35 has a structure in which it is inserted into a hollow portion of the conductive via 34. Further, the shielding layer 36 constituting the coaxial cable 3 is electrically connected to the conductive via 34 by the solder 38. Further, the core 25 is The front end portion is provided with a structure in which solder is electrically connected to the end portion of the conductive single-strand wire 26, and the connecting portion is insulated from the periphery by the covering material 16. 9 Next, the inspection system of the third embodiment will be described. First, the inspection system of the third embodiment has a structure in which a predetermined pair of conductive single-strand wires 26 are extended by mutually entangled bears, and the extension portion is formed to Advantages of the vicinity of the end portion. Fig. 8 is a schematic view for explaining the advantage. As described above, in order to prevent the connection by connecting the coaxial cable 3 and the conductive single-strand wire by solder or the like. The portion is short-circuited with other members, and it is preferable to coat the connecting portion by the covering material 16. The covering material 16 is the same as the conductive through tube 34, and has a tubular structure having a hollow portion. Therefore, in the manufacturing process of the inspection system of the third embodiment, it is necessary to modify the core of the 1284909 coaxial cable 3 which constitutes 26 317683. Prior to joining the conductive single strands 26, the cladding material 16 is passed through the core 25 or the conductive single strands 26 in advance. In the third embodiment, as shown in Fig. 8, before the core wire 25 and the conductive single-strand wire 26 are connected, the covering material 16 can be retracted in advance to the conductive via 34. On the other hand, in the conventionally constructed inspection system, the slope covering material 16 must be withdrawn toward the conductive single-strand wire 26 side, in particular, the predetermined conductive single-strand wires 26 are extended to each other in a state of being twisted with each other. In the case of the structure, in order to retract the covering material 16, it is necessary to form a structure in which the twisted state can be eliminated in the vicinity of the end portion. On the other hand, in the third embodiment, since the conductive via tube 34 is provided, it is not necessary to provide the retreat space of the covering material 16 at the time of manufacture of the conductive single-strand wire 26, and thus it is possible to maintain the twisted state. The configuration is near the connection portion with the core wire 25. As described in the second embodiment, it is formed by twisting a pair of predetermined conductive single-strand wires 26, thereby improving the transmission characteristics of the electric sound signals, thereby ensuring longer twisting. The extension of the winding portion is long, and the inspection of the third embodiment is provided to suppress the deterioration of the transmission characteristics of the transmitted gas signal. Further, the conductive vias 34 are provided corresponding to the holding portion 7, and even in the vicinity of the plate-like portion 33a, there is an advantage that the external impurities can be shielded so that the material 25 is not affected. That is, in the case of holding by; 7: two, the shielding layer of the general coaxial cable 3 is formed to be detached, and in the vicinity of the plate-like portion 33a, the core wire = the line 26 is identical and is susceptible to interference from the outside. In the third embodiment of the present invention, the conductive tube 34 of the present embodiment is modified by the conductive member 317683, even in the vicinity of the plate portion 33a. The utility model has the advantages of the transmission characteristic of the electric ## which can improve the inspection signal and the like. In the present invention, the electrical connection between the reinforcing conductive tubes 34 corresponding to the holding portion 7 is electrically connected, whereby a more effective electric shielding effect can be achieved. For example, an electrically conductive member that is disposed in contact with the tamping and the electrical flux f 34 may be additionally disposed, thereby further realizing the potential of the conduction voltage I, 34, thereby being more effective. The core wire is shielded from static electricity. In addition, an electrically conductive member that is additionally disposed can be electrically connected to a ground terminal for supplying a ground potential, thereby further improving the electrostatic shielding effect. Industrial Applicability: As described above, the relay member and the inspection probe jig of the present invention are useful for performing electrical property inspection on an inspection object such as a tape-type automatic bonding, in particular, a high frequency It is applicable when the inspection signal is transmitted to an inspection object with a miniaturized Lu circuit. , [Simple description of the map]

Figure. The figure shows the mode of the entire system of the inspection system of the first embodiment, and shows a schematic diagram of the probe system and the structure of the basin. ^ Fig. 3 is a schematic view showing a holding state of a coaxial cable for explaining a relay member provided in an inspection system. Fig. 4 is a view showing the overall configuration of the inspection system of the second embodiment.

317683 Amendment 28 1287092 Equation. Fig. 5 is a schematic view showing a wiring pattern for explaining the conductive single-strand line of the inspection system. Fig. 6 is a view showing the overall configuration of the inspection system of the third embodiment. Fig. 7 is a schematic sectional view showing the configuration of the relay member constituting the inspection system. Figure 8 is a schematic diagram showing the advantages of the inspection system. [Main component symbol description] 2. 2a to 2f, 26 conductive single-strand wire 4, 33 relay member 6 Signal processing device 1 Probe unit, 3a to 3f coaxial cable inspection substrate, 7a to 7f holding portion 5 11 13 .15 , 17, 19, 24 \ 26a 26b 26c 26d 28 Holding substrate spacers 27 Inspection object 2 3, 3 0 Ground terminal 21, 38, 39 Solder 24a to 24f Terminal 10 Probe 12 Wiring board 14 Reinforcement plate 16 Laminated material 18 22 grounding wire 20, 20a to 20f 25 core wire connecting terminal conductive single strand wire (first conductive single strand wire) conductive single strand wire (second conductive single strand wire) ^ electric single plate wire (grounding conductive single strand wire) Conductive single-strand wire (conducting single-strand wire for connection) First terminal 29 Second terminal 317683 Correction 29 1287092 31 Signal terminal 33a 34 Conductive pipe 35 36 Covering layer 37 Plate-shaped insulation insulating film 30 317683 Correction this

Claims (1)

1287092 X. Patent application scope: 1. - A type of relay member, which is provided with a holding portion, and a plurality of probes in contact with the terminal are inspected for the reed and the Γ and 鳊 are connected to the output for the predetermined inspection 1 &quot & The other end of a plurality of coaxial cables of a substrate is electrically connected, and the plurality of coaxial lines are held by the holding portion; the one end is held by the holder, and the characteristics are as follows: The holding portion holds the other ends of the plurality of coaxial cables so as to be in the same arrangement order as the order of the connection to the inspection substrate. Eight 2. If you apply for a patent scope! The relay member of the item, wherein the plurality of materials of the plurality of the above-mentioned coaxial cables are minimized, and the plurality of materials of the above (four) Wei are held. The relay member of the first or second aspect, wherein the property (4) is covered by the insulating member, and the grounding potential of the inspection object is applied to the grounding conductor of the ground terminal. a single-stranded wire, and a conductive single-strand wire for connection of the signal terminal which is connected to the above-mentioned inspection object by the insulating member:: and a conductive single-strand wire for two-phase and the above-mentioned conductive single-strand wire for connection 4. The uncle extends around. 4. If you apply for the phase (4) (4) i item 2, the single-strand line has the first conductive single-strand and the first: lead, the first conductive single and the second conductive single-wire 31 317683 each of which is electrically connected to the differential circuit formed in the above-mentioned inspection object, the first terminal and the second terminal of the S = 1287092 J ";;;;;;;;;;;;;;;;;;;;;;;;; The second conductive single-strand wire is twisted and extended to each other. The middle member and the fe member are provided with a plurality of holding portions, and the plurality of holding wires are connected to each other, and one end is electrically connected to the inspection object. Terminal 1 connected to the complex The other end of the plurality of conductive single-strand wires of the probes is connected to the other end of the core wire provided by the plurality of coaxial windings of the inspection substrate for outputting the predetermined inspection signal, and each of them is electrically connected The other end of the coaxial cable is maintained, wherein: the plurality of holding portions each have a conductive through tube, and the conductive line has a core wire for the conductive single strand or the coaxial cable The at least one of the plurality of the above-mentioned holding portions is provided with a plurality of the plurality of the above-mentioned holding portions. The conductive passages are electrically connected to each other. ♦7· - The inspection probe fixture is used for electrical property inspection of the inspection object, and the inspection target has a ground potential applied thereto during use. The ground terminal and the signal terminal used for the input and output of the predetermined electrical signal are characterized in that: the probe unit has its own connection a plurality of probes contacting the grounding terminal and the signal terminal; the conductive single-stranded wire for grounding is covered by an insulating member, and a predetermined probe is passed during inspection to electrically connect one end to the grounding terminal 317683 Amendment 32 1287092 Conductive single-strand wire for connection, which is covered by an insulating member, and has the structure of the grounding conductive single-strand wire twisted and extended to each other. The probe has one end electrically connected to the signal terminal; and I ^ , the substrate is connected to the grounding conductive single strand and the other end of the connection: the electric single strand, and the electrical signal for inspection Output to the above-mentioned conductive single strand for connection. The type of the inspection probe fixture is a user who performs an electrical characteristic inspection on the inspection object, and the inspection object has a single differential circuit that is formed at the time of use, and the second terminal and the second terminal are provided. The eucalyptus needle has a plurality of probes each contacting the first terminal and the second terminal; the first | electric single strand is covered by the insulating member and is passed through the inspection Predetermining the above probe, electrically connecting one end to the above The first conductive single-strand wire is covered by the insulating member, and the first conductive single-strand wire is twisted and extended to each other, and the first probe is twisted and extended, and the probe is electrically connected to form the above-mentioned a connection terminal to the other side; and the substrate is electrically connected to the first V electric single strand and the other end, and the electrical consonant for conducting inspection is a conductive single strand and the second At least one of the conductive single strands. 9. An inspection probe fixture that is electrically electrical to a predetermined inspection object 317683 Amendment 33 1287092 User of the characteristic inspection, characterized in that: the terminal probe unit has a plurality of probes in contact with the inspection object; a needle; a plurality of conductive single-strand wires, one end of which is electrically connected The upper inspection substrate has a function of outputting an inspection signal used at least in the electrical property inspection; a plurality of coaxial cables are electrically connected to the inspection substrate at one end, and the other end is electrically connected to the above The other of the conductive single-strand wires; the holding relay member includes a holding portion that sets the plurality of the coaxial cables so as to be in the same order as the arrangement order of the one end connected to the inspection substrate The other end is provided with a 10'-type inspection probe fixture, and the user's feature is that the 丨# needle unit has contact with the plurality of terminals of the inspection object when the electrical property inspection is performed on the inspection object. a plurality of probes; a plurality of conductive single-strand wires electrically connected to the probes at one end; a function of outputting an inspection signal used in the above-mentioned electrical property inspection; a plurality of coaxial cables, one end of which is electrically connected to the inspection substrate, and the other end of which is electrically connected to the other end of the conductive single-strand; and 317683 correction The 34 1287092 relay member and the base P system each have a wide conductive tube, and the second holding portion, the plurality of holding, ten, and ig 3 ^ electrical conduits have a single strand for your electric power or The above-mentioned car is electrically connected to the shielding layer of the coaxial cable through the hollow portion of the electric cable. 35 317683 Amendment 1287092 VII. Designated representative map: (1) The representative representative of the case is: (1). (2) Brief description of the symbol of the representative figure: 1 probe unit 2 conductive single strand 3 coaxial winding 4 relay member 5 inspection substrate 6 signal processing device 7 holding portion 20 connection terminal VIII, if there is a chemical formula in this case, Please reveal the chemical formula that best shows the characteristics of the invention: 4 317683 Amendment