1284629 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種微流體系統 驅動裝置。 【先前技術】1284629 IX. Description of the Invention: [Technical Field] The present invention relates to a microfluidic system driving device. [Prior Art]
特別是關於一種微流體 微流體控制系統目前已成功並廣泛的應用在化 醫學及生物醫學之顧及4生產流程之控制上，而目前科 幫浦通常具有輸出壓力及流量能力不足的問題存在。並且: 流體系統若要達到流向控制目的時，通常必須增加許多主^^ 閥件，使得製程的複雜性大幅提高，而所增加^流^ = 亦會造成系統可靠度的降低。 ~什In particular, a microfluidic microfluidic control system has been successfully and widely used in the control of chemical and biomedical considerations in the production process. Currently, the science pump usually has problems of insufficient output pressure and flow capacity. And: If the fluid system is to achieve flow control purposes, it is usually necessary to add a lot of main valve parts, so that the complexity of the process is greatly improved, and the increase of ^^ will also cause the system reliability to decrease. ~ even
傳統之微流體系統若要達到流向控制之目的通常需 配兩個主動閥及一個致動器，整體之構造之複雜性相當的高合 ie成衣程困難及成本知:南，且過多的可動件結構亦會造成 穩定性的降低。主動閥(valve)的功用為使流體只流向一^方 向，習知的微幫浦是以懸臂樑作為被動止回閥門結構，其每 運作時會因閥門開合動作頻繁，而在閥門開口處會有磨 (wear)、穿透及疲勞（fatigue)等問題存在，造成流量控制 的不準確，若閥門阻塞或黏住打不開，則使微幫浦失去原^ 功能。 為克服此問題發展出無閥式微幫浦，利用壓電致動器驅 動微膜振動片來漲縮微幫浦腔之容積，及利用設置於胪髀Φ 口之擴散口/喷嘴（difibser/nozzle)結構，來達成驅動流體之 目的。無閥式微幫浦的工作原理是利用出入口之開口錐度不同 所形成的壓力損失差，造成流體流入與流出量的不同，而達到 傳輸流體的功能。當致動薄膜上升時，腔室内的體積逐漸增 1284629 =入口處流體流入腔室内的體積流率大於出口處流體流入腔 至1的體積流率，此為吸水模式(SUpplym〇de);當致動薄膜下 =時，腔室内的體積逐漸遞減，出口處流體流出腔室外的體積 流率大於入口處流體流出腔室外的體積流率，此為排水模式 (pump mode)。然而，此種無閥式微幫浦所能提供之流量及克 服的壓差相當有限，造成實用上所受到之限制相當多。 【發明内容】 本發明的主要目的在於提供一種微流體驅動裝置，利用 結構設計’使微流體驅動裝置在不同參數設定下可產生不同的 速度場及壓力場來驅動流體，進而主動控制流體之流動方向、 增加流體壓力及加大流量。 本發明揭露的微流體驅動裝置，係用以驅動一工作流 體，包括：第-致動腔室、第—壓電致動H、第二致動腔室、 微流道及第二壓電致動器。第一致動腔室具有第一容置空間及 連通於第-容置空間之第―開口，卫作流體充填於第_容置空 間，第-容置空間係可變形以驅動工作流體進出第—開口 一壓電致動器鄰設於第一致動腔室，以施力使第一容置空間 形。第二致動腔室具有第二容置空間及連通於第二容置空間之 第二開口，工作流體充填於第二容置空間，第二容置空間係可 變形以驅動作流體進出第二開口。第二壓電致動器鄰設於第 二致動腔室，以施力使第二容置空間變形。微流道係連接第一 容置空間與第二容置空間，工作流體可通過微流道流通 一 容置空間與第二容置空間。 為使對本明的目的、特徵及其功能有進一步的了 茲詳細說明如下： 【實施方式】 1284629 本發明實施例提供之微流體驅動裝置，先形成化學機械 顆粒，再進一步合成化學機械研磨漿料。請參考第1圖， ，、為本發明實施例的示意圖，用以驅動工作流體，包括··第一 致，ί室100、第一壓電致動器no、第二致動腔室200、第 二壓私致動器210及微流道300。第一致動腔室1〇〇具有第一 谷置空間101及連通於第一容置空間101之第一開口 102，工 作流體充填於第一容置空間101，第一容置空間101係可變形 以=動工作流體進出第一開口 102。第一壓電致動器110鄰設 於弟一致動腔室100，以施力使第一容置空間1〇1變形。第二 致動月工至200具有第二容置空間201及連通於第二容置空間 20|^之第二開口 202，工作流體充填於第二容置空間2〇1，第 空間2〇1係可變形以驅動工作流體進出第二開口 2〇2。 ^一壓電致動器210鄰設於第二致動腔室2〇〇，以施力使第二 容置空間201變形。微流道300係為錐狀結構並連接第一容置 空間2〇1與第二容置空間2〇1，工作流體可通過微流道3⑻流 通於苐一容置空間101與第二容置空間201。 上述之第一開口 102、微流道3〇〇及第二開口 202係均為 錐狀開口結構。並且，透過本發明實施例之結構設計，使通過 第一開口 102與第二開口 202之體積流率與通過微流道3〇〇之 體積流率不同。 本考X明原理係利用苐一壓電致動器與第二壓電致動器之 相位设計’可使微流體驅動裝置在不同參數設定下可產生不同 的速度場及壓力場來驅動J1作流體。請參考第2圖，係模擬本 發明實施例之相位差與運作流量的對應圖，第一壓電致動器 110與第二壓電致動器210在不同相位下運作流量會產生相;^ 大的差異性’甚至在相位差超過18〇度時會有相反流動方向的 流量產生，且在相位差9G度時可以使流量的輸出大量提升。 由此可知，在同一頻率與振幅下，本發明實施例流量可為僅 單一致動腔室之微流體驅動裝置的8倍。 7 1284629 作产參考第3A圖’係模擬本發明實施例之工 二'_·ι，不思圖，第一壓電致動器11〇與第二壓電致 _日1 位差9G度時，當第二壓電致動器21G由最高點往第一 推擠:使第二容置節G1之1作=二么 li)外110 &最低點往上移動使第一致動腔室 的工作^體進人第-容置空間⑼，而使流量增加。 Η 口 f 3B圖’其為本發明實施例以第一開口及第二 i正快、為^轴的内部速度分佈圖’可發現此時工作流 Ϊ往弟：容置空間1G卜使得第二壓電致動器210 第-200所排出的工作流體無法流入 流出。置’並使得工作流體大量的往第二開口搬侧 工柞、圖’係模擬相位差之本發明實施例之 一壓電致動器110與第二㈣致動器 210往*有相反的現象發生’第二壓電致動器 4下η寸驅動苐二容置空間2〇1之流體流入第一容置空 電致動器11G推擠出的流體流至第二容置空 大量往第一開口102流出，由上述之現象可發 現改·交不同相位可以增加輸出流量，並可改變流體流動方向。 電致斤不述⑽本列係以第一屡電致動器與第二壓 度場及勤場的影響來達成可控制流動方向、S 1可免除絲式_之稍成本及高度複雜 克服現有之無闕式微幫浦有限的勤及流量Traditional microfluidic systems usually need to be equipped with two active valves and one actuator for the purpose of flow direction control. The complexity of the overall structure is quite high. The difficulty of the garment process and the cost are known: South, and too many movable parts The structure also causes a decrease in stability. The function of the active valve is to make the fluid flow only to the direction of the ^. The conventional micro-pump is a passive check valve structure with a cantilever beam, which is operated frequently because of the valve opening and closing action, and at the valve opening. There are problems such as wear, penetration and fatigue, which cause inaccurate flow control. If the valve is blocked or stuck, the micro-pull will lose its original function. In order to overcome this problem, a valveless micro-pump is developed, which uses a piezoelectric actuator to drive a micro-membrane vibrating piece to increase the volume of the micro-pull cavity, and utilizes a diffusion port/nozzle (difibser/nozzle) disposed at the 胪髀Φ port. Structure to achieve the purpose of driving the fluid. The working principle of the valveless micro-pull is to use the difference in pressure loss caused by the difference in the taper of the inlet and outlet, which causes the difference of the inflow and outflow of the fluid to achieve the function of transporting the fluid. When the actuating film rises, the volume in the chamber gradually increases by 1284629 = the volume flow rate of the fluid flowing into the chamber at the inlet is greater than the volume flow rate of the fluid flowing into the chamber at the outlet to 1, which is the water absorption mode (Supplym〇de); When the moving film is lower, the volume in the chamber gradually decreases, and the volume flow rate outside the fluid outlet chamber at the outlet is larger than the volume flow rate outside the fluid outflow chamber at the inlet, which is a pump mode. However, the pressure difference between the flow rate and the compression provided by such a valveless micro-pump is quite limited, resulting in considerable practical limitations. SUMMARY OF THE INVENTION The main object of the present invention is to provide a microfluidic driving device that utilizes a structural design to enable a microfluidic driving device to generate different velocity fields and pressure fields to drive fluids under different parameter settings, thereby actively controlling fluid flow. Direction, increase fluid pressure and increase flow. The microfluidic driving device disclosed in the present invention is for driving a working fluid, comprising: a first actuation chamber, a first piezoelectric actuation H, a second actuation chamber, a micro flow channel and a second piezoelectric Actuator. The first accommodating chamber has a first accommodating space and a first opening communicating with the first accommodating space, and the welcoming fluid is filled in the first accommodating space, and the first accommodating space is deformable to drive the working fluid in and out. An open-piezoelectric actuator is disposed adjacent to the first actuating chamber to apply a force to shape the first receiving space. The second actuating chamber has a second receiving space and a second opening communicating with the second receiving space, the working fluid is filled in the second receiving space, and the second receiving space is deformable to drive the fluid into and out of the second Opening. The second piezoelectric actuator is adjacent to the second actuating chamber to apply force to deform the second receiving space. The micro flow channel is connected to the first accommodating space and the second accommodating space, and the working fluid can circulate through the micro flow channel with an accommodating space and a second accommodating space. In order to make the purpose, features and functions of the present invention further detailed as follows: [Embodiment] 1284629 The microfluidic driving device provided by the embodiment of the present invention first forms chemical mechanical particles, and further synthesizes chemical mechanical polishing slurry. . Please refer to FIG. 1 , which is a schematic diagram of an embodiment of the present invention for driving a working fluid, including: a first chamber, a first piezoelectric actuator no, a second actuation chamber 200, The second pressure private actuator 210 and the micro flow channel 300. The first accommodating chamber 1 〇〇 has a first plenum 101 and a first opening 102 connected to the first accommodating space 101. The working fluid is filled in the first accommodating space 101, and the first accommodating space 101 is The deformation is to move the working fluid into and out of the first opening 102. The first piezoelectric actuator 110 is adjacent to the brother's actuator chamber 100 to apply force to deform the first housing space 1〇1. The second actuation month 200 has a second accommodating space 201 and a second opening 202 communicating with the second accommodating space 20|, the working fluid is filled in the second accommodating space 2〇1, the space 2〇1 It is deformable to drive the working fluid into and out of the second opening 2〇2. A piezoelectric actuator 210 is disposed adjacent to the second actuating chamber 2'' to bias the second receiving space 201. The micro flow channel 300 has a tapered structure and is connected to the first accommodating space 2〇1 and the second accommodating space 2〇1, and the working fluid can flow through the micro flow channel 3 (8) to the first accommodating space 101 and the second accommodating space. Space 201. The first opening 102, the micro flow channel 3〇〇 and the second opening 202 are all tapered openings. Moreover, the volumetric flow rate through the first opening 102 and the second opening 202 is different from the volume flow rate through the microchannel 3 through the structural design of the embodiment of the present invention. The principle of this method is to use the phase design of the first piezoelectric actuator and the second piezoelectric actuator to enable the microfluidic driving device to generate different velocity fields and pressure fields under different parameter settings to drive J1. As a fluid. Referring to FIG. 2, a comparison diagram of the phase difference and the operating flow rate of the embodiment of the present invention is simulated. The first piezoelectric actuator 110 and the second piezoelectric actuator 210 operate at different phases to generate a phase; ^ The large difference' even occurs when the phase difference exceeds 18 degrees, and the flow in the opposite flow direction is generated, and the output of the flow can be greatly increased when the phase difference is 9G degrees. It can be seen that at the same frequency and amplitude, the flow rate of the embodiment of the present invention can be eight times that of the microfluidic drive device of only a single actuator chamber. 7 1284629 Production reference 3A' is a simulation of the second embodiment of the present invention, which is not considered, the first piezoelectric actuator 11 〇 and the second piezoelectric _ _ 1 position difference 9G degrees When the second piezoelectric actuator 21G is pushed from the highest point to the first: the second receiving section G1 is made to be the second one. The outer 110 & the lowest point is moved upward to make the first actuating chamber The work of the ^ body into the first - accommodation space (9), and increase the flow. Η口 f 3B图' is an internal velocity distribution diagram of the first opening and the second i is fast, and the axis is 'the axis' of the embodiment of the present invention. It can be found that the workflow is at this time: the accommodation space 1G is made to be the second The working fluid discharged from the piezoelectric actuator 210-200 cannot flow in and out. The piezoelectric actuator 110 and the second (four) actuator 210 of the embodiment of the present invention have a reverse phenomenon in which the working fluid is moved to the second opening in a large amount. The occurrence of the second piezoelectric actuator 4 under the n-inch drive 苐 two accommodating space 2 〇 1 of the fluid flows into the first accommodating air-electric actuator 11G pushes the extruded fluid flow to the second accommodating air to the first An opening 102 flows out. From the above phenomenon, it can be found that changing the different phases can increase the output flow rate and change the fluid flow direction. (10) This column is based on the influence of the first electric actuator and the second pressure field and the diligent field to achieve the controllable flow direction, S 1 can be exempted from the wire type _ the slight cost and high complexity to overcome the existing Innocent micro-pull limited service and flow
雖然本發明讀佳實施觸露如讀述H 一干之更動/、潤飾，因此本發明之專利保護範 1284629 圍須視本說明書所附之申請專利範圍所界定者為準。 1284629 【圖式簡單說明】 第1圖為本發明實施例的示意圖； 第2圖係模擬本發明實施例之相位差與運作流量的對應圖； 第3A圖係模擬本發明實施例之工作流體驅動示意圖； 第3B圖為本發明實施例以第一開口及第二開口之中心線為X 軸的内部速度分佈圖；及 第4圖係模擬另一相位差之本發明實施例之工作流體驅動示 意圖。 【主要元件符號說明】 100 致動腔室 101 第一容置空間 102 開口 110 第一壓電致動器 200 第二致動腔室 202 第二開口 201 第二容置空間 210 第二壓電致動器 300 微流道Although the present invention is described as a preferred embodiment, the disclosure of the present invention is based on the scope of the patent application attached to the present specification. 1284629 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of an embodiment of the present invention; FIG. 2 is a diagram illustrating a phase difference and an operational flow rate of an embodiment of the present invention; FIG. 3A is a simulation of a working fluid drive according to an embodiment of the present invention. 3B is an internal velocity distribution diagram in which the center line of the first opening and the second opening is the X-axis according to the embodiment of the present invention; and FIG. 4 is a schematic diagram of the working fluid driving in the embodiment of the present invention simulating another phase difference. . [Main component symbol description] 100 actuating chamber 101 first accommodating space 102 opening 110 first piezoelectric actuator 200 second actuating chamber 202 second opening 201 second accommodating space 210 second piezoelectric Actuator 300 microchannel