TWI284559B - Self-rotating micromixer and the method of making the same - Google Patents

Abstract

This invention proposes a novel 3-dimensional (3-D) vortex micromixer for micro-total analysis systems (muTAS) applications which utilizes self-rotation effects to mix fluids in a circular chamber at low Reynolds numbers (Re). The microfluidic mixer is fabricated in a three-layer glass structure for delivering fluid sample in parallel. The fluids are driven into the circular mixing chamber by means of hydrodynamic pumps from two fluid inlet ports. The two inlet channels divide into 8 individual channels tangent to a 3-D circular chamber for mixing purpose. Numerical simulation of the microfluidic dynamics is employed to predict the self-rotation phenomenon and to estimate the mixing performance under various Reynolds number conditions. Experimental flow visualization by mixing dye samples is performed in order to verify the numerical simulation results. A good agreement is found to exist between the two sets of results. The numerical results indicate that the mixing performance can be as high as 90% within a mixing chamber of 1 mm diameter when the Reynolds number is Re=4. Additionally, the results confirm that self-rotation in the circular mixer enhances the mixing performance significantly; even at low Reynolds numbers. The novel micromixing method presented in this study provides a simple solution to mixing problems in the Lab-chip system.

Description

1284559 IX. Description of the Invention: [Technical Field] The present invention relates to a micromixer and a method of manufacturing the same, and more particularly to a micromixer having a mixing chamber for generating a spin phenomenon of a mixed fluid and a method of manufacturing the same . [Prior Art] At present, a bio-a biochip (Lab-on_a-chip) can be fabricated by using the process technology of Micro-Total Analysis Systems, which is quite mature, such as [Ashton R, Microfluidic separation of DNA5 Current Opinion Biotechnology, 14, pp. 479-504, (2003)], [Service RF, DNA analysis: Microchip arrays put DNA on the spot, Science, 282, pp. 396-9, (1998)] and

[Culbertson C? Electroosmotically in-duced hydraulic pumping on microchips: differential ion transport, Analytical Chemistry, 723 pp. 2285-91, (2000)]. For complete analysis, components of various functions are integrated on a microchip called Lab-on-a-chip, such as [Lu L. H., Journal of Microelectro-mechanical System , 11, ρρ· 801-808, (2002)] and [Lemoff Α·V·, Lee A. P., Sensors and Actuators B, 63, ρρ·178_185, (2000)] The application of the 0 micro-mixer It is generally used for biochemical analysis of samples. This is because the micro-mixer achieves the purpose of mixing chemical or biological samples in a small area with high analytical efficiency and low cost. However, in the current technology, it is still a difficult technique to achieve fluid mixing in the microstructure. The reason is that the Reynolds number phase of the fluid in the microstructure is low. When the Reynolds number of the fluid is low, the fluid flows in a laminar flow state in the microchannel. This laminar flow condition creates a fairly distinct boundary between the two different fluids, making the fluid less prone to mixing in the microchannel. Therefore, many scholars have begun to design microfluidic micromixers.

At present, micro-mixers can be classified into two categories according to their structural types: active and passive. The hybrid principle of most active mixers is the use of external forces to cause the fluid to mix in an unstable disturbance in the microstructure. These external forces can be mechanical (such as [Lu LH, Journal of Microelectro- mechanical System, 11, pp. 801-808, (2002)]), fluid magnetic field (such as [Lemoff A_ V·, Lee A. P., Sensors and Actuators B, 63, pp. 178-185, (2000)], electrically excited magnetic field (Lin CH, Rapid microfluidic T-form mixer utilizing switching electroosmotic flow, Analytical Chemistry, 76, In press, (2004)], pressure perturbation (such as [Niu X, Efficient spatial-temporal chaotic mixing in microchannels, Journal of Micromechanics and Microengineering 13, pp. 454_62, (2003)]), microarray Jet type (as disclosed in [Yang R, A rapid micro-mixer/reactor based on arrays of spatially impinging micro-jets, Journal of Micromechanics and Microengineering, 14, ρρ·1345·51, (2004)·)) and acoustic disturbance (eg [Yang Z, Active micromixer for microfluidic systems using lead- zirconate-titanate (PZT)-generated ultrasonic vibration, Electrophoresis, 21, pp. 116-9, ( 2000)]) to establish secondary fine perturbations of fluids in microchannels. However, most of the active micro-mixers are complex microstructure designs, and require additional power or power to improve the mixing effect, the wafer design and process are more difficult, and the operating cost is higher.

Recently, passive micromixers have been gradually developed and studied. Passive micromixers developed by Bessoth et al. [Bessoth FG, Microstructure for efficient continuous flow mixing, Anal Commun 36, ρρ·213, 5, (1999)] reduce the scale required for mixing and fluid remixing range. Liu et al [Liu RH, Passive mixing in a three-dimensional serpentine micro-channel Journal of Microelectro- mechanical System, 9, ρρ·190·7, (2000)] and [Park SJ, Rapid three-dimensional passive rotation micromixer using The breakup process, Journal of Micromechanics and Microengineering, 14, pp. 6-14, (2004)] produced a passive micro-mixer with a three-dimensional three-dimensional structure and proved that at a low Reynolds number of about 70, The fluid is brought to the effect of mixing. Johnson et al. [Johnson T J, Rapid microfluidic mixing Analytical Chemistry, 74 ρρ·45_51, (2002)] used a principle of electroosmosis to create a mixing phenomenon at the intersection of T-shaped wafers. These findings all show that effective fluid rotation or irregular flow increases the effect of fluid mixing, as revealed by [Stroock AD, Chaotic mixer for microchannels, Science, 295, pp. 647-51, (2002)]. .

Burke et al. [Burke BJ, Stopped-flow enzyme assays on a chip using a microfabricated mixer, Analytical Chemistry, 75 pp. 1786-91, (2003)] using a micromixer for static fluid enzyme analysis, the experimental results also prove the use Micro-mixer for auxiliary analysis, with benefit 98155.doc 1284559

The results analyzed with large instruments are consistent. Chung et al. [Chung Υ C? Design of passive mixers utilizing microfluidic self-circulation in the mixing chamber, Lab on a Chip, 4, ρρ·70-7, (2004)] developed a passive micro-mixer, the characteristics of this mixer In order to utilize the fluid due to the pressure relationship, a spin phenomenon is generated for mixing. As a result, it was found that the mixer was used for a low Reynolds number of 20 to 400, and the mixing effect was good. Kim et al. [Im DS, A barrier embedded Kinics micromixer, Journal of Micromechanics and Microengineering, 14, pp. 1294-301, (2004)] set out to develop a special three-dimensional structure in the low Reynolds number range, designed in this structure Many obstacles are made to obtain a mixture of fluids at a low Reynolds number of about 28. Therefore, in the Micro-Total Analysis Systems, the micro-mixer is suitable for devices used in assisted biochemical analysis due to the small sample size and low production cost, such as polymerization and hydrazine chain reaction analysis (PCR). ) or hybridization analysis of DNA.

Greiner et al. [Greiner Κ·, Α Rapid Vortex Micromixer for Studying High-Speed chemical Reactions, presented at uTAS 2001] is based on the development of passive micro-mixers, which also use the effect of fluid spins to achieve mixing. . The overall wafer process is dominated by reactive ion etching (DRIE) process equipment, which is a valuable instrument and therefore expensive. The number of designs at the inlet end is 16 in a total of 16 sets, but the flow rate for this micro-mixer to produce spin must be greater than 1 〇 m/s, and the Reynolds number of the mixture is as high as 200. Regardless of process cost or observation of Reynolds number and flow rate values, it is a mixer that is not economically efficient. Therefore, it is necessary to provide an innovative and progressive micro-mixer and its 98155.doc 1284559 manufacturing method to solve the above problems. SUMMARY OF THE INVENTION The main object of the present invention is to provide a spin micromixer which, when having a Reynolds number greater than 2.32, causes a fluid to cause a spin phenomenon in a mixing zone therein to achieve a fluid mixing effect. In the case of low Reynolds number, the mixing efficiency is up to 90%, and the fluid velocity is only 5.72 cm/s, which can solve the problem of fluid mixing at small scales. When applied to biological or chemical PCR or DNA analysis, it reduces the amount of sample used and the cost of analyzing the sample. Another object of the present invention is to provide a spin micromixer whose process is based on a general glass lithography development process, thereby eliminating the cost of manufacturing expensive instruments, thereby making the manufacturing cost low and the process process stable. To achieve the above object, the present invention provides a spin micromixer comprising a plurality of inlet conduits, a mixing zone and an outlet conduit. The inlet ducts are used to inject the fluid to be mixed. The mixing zone is a hollow zone, each of which is connected to the mixing zone, such that the fluids to be mixed are mixed in the mixing zone. The outlet conduit is connected to the mixing zone for the purpose of deriving the mixed fluid. [Embodiment] Referring to Figure 1, a perspective view of a spin micromixer of the present invention is shown. The spin micromixer 复 includes a plurality of inlet ducts 10, a mixing zone 12, an outlet duct 14, a first inlet end 16, a second inlet end 18, an outlet end 20, and a pressure source (not shown) Show). The first inlet end 16 is connected to a first injection tube 22 for injecting a 98155.doc -9-1284559 one, /; L body. The second inlet end 18 is connected to a second injection tube 24 for injecting a second fluid. In this embodiment, there are two inlet ends 16 for injecting the first and second fluids to be mixed. However, it is understood that the number of the inlet ends is not limited to two, and may be three or four. Or more than five, depending on the fluid to be mixed. Referring also to Figure 2, a partial top plan view of a first embodiment of an inlet conduit in a spin micromixer of the present invention is shown. The inlet conduits are connected to the first inlet end 16 and the second inlet end 18, respectively, for injecting the first fluid and the second fluid to be mixed into the mixing zone 2 for mixing. In the present embodiment, there are eight inlet ducts 1 , which are numbers 101, 102, 103, 1〇4, 1〇5, 106, 107 and 108, respectively, however, it can be understood that the inlet ducts 1 The number of 〇 is not limited to eight, and it may be one, four, six, ten, twelve, fourteen, sixteen or more. In this embodiment, the inlet ducts 10 are divided into a first portion and a second portion. The first portion includes inlet ducts 1〇8, 1〇2, 1〇4, and 106' Connected to the first inlet end 16 by pipes 1〇9 and 11〇, respectively; the second portion includes inlet ducts 101, 103, 105 and 107 which are connected to the second inlet by pipes 111 and 112, respectively End μ. That is, after the first muscle system enters the first inlet end 16 via the first injection pipe 22, the fluid entering the pipes 109 and 110' entering the pipe 1〇9 enters the mixing through the inlet pipes 1〇8 and 102. Zone 12, the fluid entering the conduit 11 then enters the mixing zone 12 via the inlet conduits 106 and 104; the second flow regime enters the second inlet end 18 via the second injection conduit 24 and then enters the conduit U1 & 112, entering Tube 98155.doc -10- 1284559 Channel 111 fluid enters mixing zone 12 via inlet conduits 101 and 103, and fluid entering conduit 112 enters mixing zone 12 via inlet conduits 107 and 105. The direction in which the inlet ducts 10 enter the mixing zone 12 is the tangential direction of the mixing zone 12 to increase the mixing effect. Moreover, in the present embodiment, the inlet conduits 108, 102, 104 and 106 of the first portion are at the same level as the inlet conduits 101, 103, 105 and 107 of the second portion. However, it is worth noting that the first part of the inlet ducts 1〇8, 1〇2, ι〇4 and ι〇6 and the second part of the inlet ducts 101, 103, 1〇5 and 1〇7 Can be located at different levels. Referring also to Figure 3, there is shown a perspective view of the mixing zone in the spin micromixer of the present invention. The mixing zone 12 is a longitudinal hollow zone. In the present embodiment, the mixing zone 12 is a hollow cylindrical shape, however it will be understood that the mixing zone 12 can be any type of hollow zone. The inlet ducts 10 are connected to the mixing zone 12, respectively, for introducing the first fluid to be mixed and the second fluid to be mixed in the mixing zone 12. The outlet conduit 14 is coupled to the mixing zone 12 for directing the mixed fluid to the outlet end 20. In the present embodiment, the openings of the inlet ducts in the mixing zone 12 are lower than the openings of the outlet ducts 14 in the mixing zone 12. However, it is worth noting that the inlet ducts 1 may be open to the mixing zone or may be higher than the opening of the outlet duct 14 in the mixing zone 12. The pressure source (eg, a pump) is connected to the first injection tube 22 and the second injection tube 24 for simultaneously pressurizing the first fluid and the second fluid to make the first fluid and the second The fluid can enter the mixing zone 12 and create a spin phenomenon to achieve a mixing effect. Therefore, in the present invention, preferably, such 98155.doc -11 - 1284559

The length of the inlet conduit 10 and the conduits 109, 110, 111 and 112 are specifically designed such that all fluid flows to the mixing zone 12 at the same distance and can flow into the mixing zone 12 at the same time, and all The pressure inside the pipe will be the same, and the fluid can stably produce spin phenomenon. In other applications, the distance that fluid can flow to the mixing zone 12 can vary, and the length can be, but is not limited to, a fold difference. Further, the cross-sectional area of the outlet duct 14 is preferably equal to the sum of the cross-sectional areas of the inlet ducts 10 to prevent flow resistance when the fluid flows. A schematic view of the manufacturing process of the spin micromixer of the present invention is shown with reference to Figs. 4a to 4f'. First, referring to FIG. 4a, a first substrate 40 is provided, which is a low-cost soda glass. Since the glass joint is a fusion joint, the mechanical properties or the joint strength are relatively high, so that it can withstand the high pressure pump. The pressure can therefore replace the plastic or enamel-based substrate commonly used in general wafers. Next, the first substrate 40 was washed with a piranha solution (H2S04 (%): H202 (%) = 3:1). After cleaning, it was coated on the first substrate 40 with a positive photoresist (AZ 4620, Clariant Corp., USA). Next, a pattern 42 on the mask is transferred to the positive photoresist by photolithography. The pattern 42 corresponds to the pipes 109 and 110, the inlet ducts 1〇8, 1〇2, 1〇4 and 106 of the first part, and the inlet ducts 1〇1, 1〇3 of the second part, The first half of the first and second inlets, the first inlet end 16 and a portion of the mixing zone 12. Next, referring to FIG. 4b, after the pattern 42 is transferred to the positive photoresist, an etch buffer (B0E) is used to etch the microchannel. During the etching, the vibration of an ultrasonic cleaner is used to accelerate the etching of the microchannels on the first substrate 40. After 40 minutes of etching time, the depth of the microtube 98155.doc -12- 1284559 can reach about 36 μηη. Therefore, the pipes 10 9 and 110 are formed on the first substrate 4, the inlet pipes 1〇8, 102, 104 and 106 of the first portion, and the inlet pipe 1 of the second portion are formed. 3. The first half of 1〇5 and 1〇7, the first inlet end 16 and a portion of the mixing zone 12. Next, referring to Figure 4c, a second substrate 44 is also provided, which is also a soda glass. The second substrate 44 is processed in the same manner as the first substrate 4, and after applying a positive photoresist, the pattern 46 on the mask is transferred to the e-positive photoresist by photolithography. The figure 46 corresponds to the main pipes 1 1 1 and 1 1 2, the second part of the inlet pipes 1〇1, 103, 105 and 107, the second inlet end 18 and the mixing zone 12 section. Next, referring to FIG. 4d, the etching of the micro-pipes is performed, and the pipes ln and 112 and the inlet pipes 101, 103, 1〇5 and 1〇7 of the second portion are formed on the second substrate 44. The second half, the second inlet end 18 and a major portion of the mixing zone 12. Since the microchannel of the second substrate 44 includes the core a region 12, it also functions as a connection between the bottom portion (the first substrate 44) and the top portion (the third substrate material Fig. 4e). Therefore, the mixing zone 12 and the connecting pipe zone must be drilled to form holes A, B, c, D and E. Next, referring to FIG. 4e, a third substrate 48 is provided, which is also a soda glass, and is drilled thereon at a position relative to the population end 16, the second population end 18, and the outlet end 20. Holes F, G and H. Finally, referring to Fig. 4f, the first substrate 4, the second substrate 44, and the third substrate 48 are bonded to each other. The method is as follows. The three layers of the substrates 4G, 44 and 48 must be cleaned before joining, and the cleaning solution and conditions are cleaned with the above-mentioned glass (4). After the cleaning is completed, the third substrate 48 is bonded to the upper surface of the second substrate 44 at a temperature of 580 ° C for 20 minutes. The first substrate 40 is then bonded to the lower surface of the second substrate 44. Finally, two Teflon tubes having an inner diameter of 0.5 mm and an outer diameter of 1.5 mm are used as the first injection tube 22 and the second injection tube 24 to be respectively connected to the first inlet end 16 and the second inlet end. 18. The joining method utilizes epoxy resin as a connecting agent, as shown in Fig. 4g, to form a spin micromixer 1 as shown in Fig. 1. In the present embodiment, the spin micromixer 1 is 37 mm long and 26 mm wide. The mixing zone 12 is cylindrical in shape and has a diameter of 750 μηη and a height of 1 mm. The outlet duct 14 has a width of 370 μηη and a depth of 36 μχη. In this embodiment, an injection pump (KDS-200, KD scientific, USA) is used as a fluid pressure source. Referring to Figure 5, a mixing efficiency diagram of the spin micromixer of the present invention is shown. The experimental conditions of this example are as follows. The first-flow system is a rose red fluorescent dye (Rhodamine®) having a concentration of 1 (Τ6 。. The second flow system is DI-water). The microscope (E-400, Nikon, Japan) was equipped with a mercury lamp as the excitation of the rose red fluorescent dye (Rhodamine Β). The experimental results were carried out using a CCD camera (DXC-190, Sony, Japan) took a dynamic image capture of the experiment with an image capture card (DVD PKB, V-gear, Taiwan), and then used the digital dynamics technique to evaluate the spin micro-mixing according to the experimental dynamic file. The mixing effect of the device 1. The X axis in Fig. 4 is the Reynolds number of the fluid in the inlet flow channel 10, and the Y axis is the mixing efficiency in the mixing zone 12. As can be seen from the figure, when the Reynolds number is greater than 2.32 Reynolds number The fluid will start to produce the phenomenon of spins from the original laminar flow state, so that the fluid will achieve the mixing effect due to the spin disturbance in the mixing zone 12. In addition, the numerical simulation fluid flow line The concentration profile shows that the fluid can be in the In the joint zone 12, since the inertial force of itself is greater than the viscous force of the fluid, the self-striking phenomenon is generated, thereby achieving the effect of mixing, and the higher the height in the mixing zone 12, the higher the mixing degree of the fluid. The actual photograph observes that the fluid does produce a phenomenon of spin in the mixing zone 12, and the more the height of the mixing zone 12 increases, the more the center of the spin deviates from the center of the structural design of the mixing zone 12, and the bias is An opening of the outlet conduit 14 in the mixing zone 12. Referring to Figure 6, a partial top plan view of a second embodiment of an inlet conduit in a spin micromixer of the present invention is shown. In the present embodiment, the number of such inlet conduits 30 is There are twelve, which are all tangent to the mixing zone 12. Referring to Figure 7', there is shown a partial top plan view of a third embodiment of the inlet conduit of the spin micromixer of the present invention. The first implementation shown in Figure 2 above In the example, the inlet pipe 10 itself has the same cross-sectional area from the beginning to the end. However, in the embodiment, the inlet pipe 32 includes an inlet pipe body κι, a first fork 322 and a second fork 323. The inlet duct body 321 is connected to the mixing zone 12 via the first branching 322 and the second branching 323. This structure is designed to enhance the design according to the c〇nada effect structure design When the fluid does not enter the mixing zone 12, it first forms a small vortex mixing, and then enters the mixing zone 12 for secondary mixing, which improves the mixing efficiency. Referring to Figure 8, the spin micromixer of the present invention is shown. A fourth schematic view of the embodiment of the inlet pipe. The multiple is preferably five times or more. Referring to Figure 9, there is shown a top plan view of another version of the outlet conduit of the spin micromixer of the present invention. The outlet duct 5 of the present type includes an outlet duct body 51 and a triangular region 52, which includes a vertex region 521 and a side region 522 corresponding to the vertex region 521, and the vertex region 521 is connected thereto. The mixing zone 12 is connected to one end of the outlet duct body 51, and the other end of the outlet duct body 51 is connected to the outlet end 20. The above-described embodiments are merely illustrative of the principles of the present invention and the advantages thereof, and are not intended to limit the present invention. The scope of the invention should be as set forth in the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS _ 1 shows a schematic perspective view of a spin micromixer of the present invention; FIG. 2 shows a partial top view of a first embodiment of an inlet pipe in a spin micromixer of the present invention; ® 3 shows the spin of the present invention 3D to 4g show a schematic diagram of the manufacturing process of the spin micromixer of the present invention; ® 51 member shows the mixing efficiency diagram of the spin micromixer of the present invention; A partial top view of a second embodiment 4 of an inlet conduit in a micro-mixer; 98l55.d〇c -16-1284559 Figure 7 shows a partial top view of an example of a spin micromixer of the present invention; A top view of an example of a spin-on micromixer; and Figure 9 shows a schematic top view of the spin micromixer of the present invention. The third implementation of the pipeline The fourth implementation of the pipeline

[Main component symbol description] 1 Spin micromixer 10 Inlet pipe 12 Mixing zone 14 Outlet pipe 16 First inlet end 18 Second inlet end 20 Outlet end 22 First injection pipe 24 Second injection pipe 30 Inlet pipe 32 Inlet pipe 34 inlet duct 36 inlet duct 40 first substrate 42 pattern 44 second substrate 46 pattern 48 third substrate 98155.doc -17- 1284559

50 outlet pipe 51 outlet pipe body 52 triangular zone 101 inlet pipe 102 inlet pipe 103 inlet pipe 104 inlet pipe 105 inlet pipe 106 inlet pipe 107 inlet pipe 108 inlet pipe 109 pipe 110 pipe 111 pipe 112 pipe 321 inlet pipe body 322 first point Fork 323 second fork 521 vertex area 522 side area A, B, C, D, E, F, G, H -18 98155.doc

Claims (1)

!284559 X. Patent application scope: l A spin micro-mixer, comprising: a plurality of inlet pipes for injecting a fluid to be mixed; a mixing zone, which is a hollow zone, respectively connected to the inlet pipe The mixing zone, wherein the fluids to be mixed are mixed in the mixing zone; and the outlet S channel is connected to the mixing zone for deriving the mixed fluid, wherein the outlet pipe is located at the inlet pipe Different levels. 2: The spin micromixer of claim 1, wherein the inlet ducts are divided into a first portion and a second portion, the first portion is injected with a first fluid, the second portion Inject a second fluid. 3. The spin micromixer of claim 1, wherein the first portion and the second portion are at the same level. 4. The spin micro-mixer of the request, wherein the first portion and the second portion are at different levels. 5. A spin micro-mixer as claimed, wherein the mixing zone is a cylinder 6. 8. The spin micro-mixing system of claim 5 is the tangential direction of the mixing zone. The opening of the spin micro-mixing mixing zone of claim 1 is lower than the outlet, such as the opening of the spin micro-mixing zone of claim 1, which is higher than the outlet, wherein the inlet pipe is a directional device, wherein the inlets The pipe is at the opening of the official zone in the mixing zone. And wherein the inlet conduits are in the opening of the conduit in the mixing zone. 98155.doc 1284559 9. 10 11. 12. 13. 14. 15. 16. 17. 18. 19. Shikou Guzhu Benming, the spin micro-mixer of item 1, in which the number of such inlet pipes is Eight. The spin micromixer of Item 1 of the month, wherein the number of such inlet pipes is twelve. The spin micromixer of claim 1 wherein the fluid to be mixed has a Reynolds number of at least 2.0 in the inlet conduit. For example, the spin micromixer of item 1 wherein the lengths of the inlet pipes are the same. A spin micromixer of month 1 wherein the length of the inlet ducts is a multiple of the shortest length. The spin micromixer of claim 1 wherein each inlet pipe itself has the same cross section at all locations. The spin micromixer of claim 1, wherein the inlet pipe comprises an inlet body, a first branch and a second branch, the inlet pipe system via the first fork and the second branch The fork is connected to the mixing zone. A spin micromixer of claim 1, wherein the cross-sectional area of the outlet conduit is equal to the sum of the cross-sectional areas of the inlet conduits. The spin micromixer of claim 1, wherein the outlet pipe comprises an outlet pipe body and a triangular region, the triangular region comprising a vertex region and a side region corresponding to the vertex region, the vertex region A 4 mixing zone is connected that connects the outlet conduit body. The spin micromixer of claim 1 further comprising a pressure source for pressurizing the fluid to be mixed. A method for manufacturing a spin micromixer, comprising: 98155.doc -2 - 1284559 (a) providing a first substrate; (b) washing the first substrate; (c) coating a photoresist On the first substrate; (d) developing and etching the first substrate to have a plurality of first micro-pipes thereon; (e) providing a second substrate; (f) cleaning the second substrate; (g) applying a photoresist to the second substrate;)*,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Drilling holes corresponding to the predetermined positions of the first micro-pipes; (1) providing a third substrate; 00 to 4 third substrate corresponding to the second micro-placement drilling; d-bit (1) connection " the third substrate on the upper surface of the second substrate; And (4) joining the first substrate to the lower surface of the second substrate. 20. The glass of claim 19 is as requested. In the eighth eighth, the material of the first substrate is sodium glass 21 · as requested. The material of the second substrate is sodium glass 22, such as the method of claim 19, i glass. 〒The material of the second substrate is sodium broken 98155.doc