1281977 -九、發明說明： / 發明所屬之技術領域 ^ '本發明係有關於一種探針模組，特別係有關於一種掃 描式穿隧顯禮支鏡（Scanning Tunneling Microscopy，STM)白(j 探針模組。 先前技術 參照第1圖，其係顯示習知掃描式穿隧電流顯微鏡的 探針模組10，包括一本體1以及一探針2。其中，探針21281977 - IX, invention: / The technical field of the invention ^ 'The present invention relates to a probe module, in particular to a scanning tunneling microscopy (STM) white (j probe The prior art refers to FIG. 1 , which shows a probe module 10 of a conventional scanning tunneling current microscope, comprising a body 1 and a probe 2. The probe 2
W 係以緊配的方式插設於本體1中。並且，探針2與本體1 之間的連接位置可更塗有黏著材料3，以加強探針2與本 體1之間的連結。 然而，當探針2單純以緊配的方式插設於本體1中時， 探針2容易因本身的重力作用而從本體1脫落。此外，在 反覆使用後也容易因本體1之固定孔徑變大，而造成探針 鲁 2夾持不易或鬆脫等問題。而，當探針2與本體1之間塗 有黏著材料3時，則會有探針2不易更換的問題。 發明内容 本發明即為了欲解诀上述習知技術之問題，而提供之 一種探針模組包括一基座、一探針以及一迫緊結構。基座 包括一第一開口。探針設於該第一開口之中。迫緊結構設 於該基座上，該迫緊結構迫緊該探針。 0729-A21164TWF(N2)；P07940003TWA1 ；lemon 1281977 - 在本發明之探針模組中，由於探針透過迫緊結構而穩 * 固的夾設於第一凹陷部與第二凹陷部之間。因此可防止探 、 針鬆脫掉落的情況。同時，當欲取下探針時，僅需要簡單 . 的鬆開迫緊結構，便可解除第一凹陷部與第二凹陷部之間 的夾持力而取下探針，因此，探針的更換亦十分簡易。 實施方式 _ 參照第2a圖，其係顯示本發明之探針模組100的立體 圖，包括一基座110、一第一開口 160、一撓性元件130、 一探針140、一第二開口 120以及一施壓元件150。搭配參 照第2b圖，其係顯示探針模組100的俯視圖，其中，第一 開口 160以及第二開口 120開設於基座Π0之上，撓性元 件130設於第一開口 160與第二開口 120之間。探針140 設於第一開口 160之中。施壓元件150則設於第二開口 120 •之中。 第一開口 160包括一第一内侧壁121、一第一凹陷部 122、一第二内側壁131以及一第二凹陷部132。該撓性元 件130為一片狀彈性元件。該第一内侧壁121與該第二内 侧壁131相對，該第一凹陷部122與該第二凹陷部132相 對。該探針140係夾設於該第一凹陷部122與該第二凹陷 、 - 」 . 部132之間。施壓元件150 該基座ΠΌ的侧壁伸Tv該第 0729-A21164TWF(N2)；P07940003TWA1；lemon . 6 1281977 - 二開口 120之中，以接觸並推使該撓性元件130夾持該探 - 針140，其中，該施壓元件150可以為一螺栓。該撓性元 ^ 件130與該施壓元件150構成一迫緊結構。 . 該第一開口 160為一狹缝，呈長條狀。第一開口 160 的兩端分別形成有第一圓孔161以及第二圓孔162。藉由 設置第一圓孔161以及第二圓孔162，可以增加撓性元件 130的彈性變形能力，而可更簡易的取放探針140。 • 在本發明之探針模組中，由於探針亦透過施壓元件的 推力而穩固的夾設於第一凹陷部與第二凹陷部之間。因此 可防止探針鬆脫掉落的情況。同時，當欲取下探針時，僅 需要簡單的鬆開施壓元件5便可解除第一凹陷部與第二凹 陷部之間的夾持力而取下探針，因此，探針的更換亦十分 簡易。 參照第3a圖，其係顯示本發明之顯微鏡之掃描探頭 _ 300，包括一掃描探頭基座210、一接頭模組220以及該探 針模組100。該接頭模組220設於該掃描探頭基座210之 上。揍頭模組220包括一第一導電元件221、一第二導電 元件222、一第三導電元件223、一第一定位孔224以及一 第二定位銷（光纖)225。接頭模組220更包括一第一定位座 226。第一定位座226係用以定位第一導電元件221。 搭配參照第3b圖，其係顯示探針模組Γ0Ό的底部結 0729-A21164TWF(N2)；P07940003TWAi；lemon 7 1281977 - 構’探針模組100更包括一固定元件17〇、一第一絕緣元 、 件181、一第二絕緣元件182、一第一定位銷183以及一第 k 一疋位孔184。其中，第一絕緣元件1 g 1、第一絕緣元件 • 1U、第一定位鎖183以及第二定位孔1 g4均設於探針模組 1〇〇的底部表面。固定元件170從該基# 110表面延伸進 入該第二定位孔184之中。搭配參照第3a圖’第一絕緣元 件181與該第二導電元件222相對應，第二絕緣元件182 參與該第三導電元件223相對應，第二定位孔184與第二定 位銷225相對應，第一定位銷1 g3與第/定位孔224相對 應。第一定位銷183、第一定位孔224、第二定位孔184與 第二定位銷225構成一定位機構。定位機構的設計方式並 不局限於上述的方式，舉例而言，第一定位孔係可形成於 探針模組上，而第一定位銷則可設於接頭模組上。 參照第3c圖，當探針模組1〇〇安裝於該掃描探頭基座 ⑩210之上時，探針模組1〇〇與接頭模組22〇相連接。此時， 第一導電元件221接觸基座11〇，基座11〇的材質為導電 材料’因此第一導電元件221可與探針140電氣連接。所 以，當本發明做為掃描式穿隧顯微鏡之掃描探頭時，探針 140上的電訊號係可透過基座11〇而傳遞至第一導電元件 .ϋ中，第-導電元件⑵例如是電性連接至顯二鏡的 控制端。 0729-Α21164TWF(N2)；P07940003TWA1 ilemon 1281977 • 同時，當探針模組100安裝於該掃描探頭基座210之 - 上時，第二導電元件222接觸第一絕緣元件181，第三導 - 電元件223接觸第二絕緣元件182，第二定位銷225插入 . 第二定位孔184之中，第一定位銷183插入第一定位孔224 之中。當第二定位銷225定位於第二定位孔184時，使用 者可透過固定元件170迫緊第二定位銷225，藉此可固定 探針模組100與接頭模組220之間的連接。 籲綜上所述，本發明之探針模組係可提高夹針的穩定 性，並可避免探針非預期的鬆脫。此外，本發明之探針模 組僅需簡單的步驟即可更換探針。再者，由於本發明之掃 描探頭之電極設計方式，使得掃描探頭高度模組化5提高 使用者的使用便利性。 雖然本發明已以具體之較佳實施例揭露如上，然其並 非用以限定本發明，任何熟習此項技藝者，在不脫離本發 ⑩明之精神和範圍内，仍可作些許的更動與潤飾，因此本發 明之保護範圍當視後附之申請專利範圍所界定者為準。 0729-A21164TWF(N2)；P07940003TWA1 ；lemon 9 1281977 • 【圖式簡單說明】 .、 第1圖係顯示習知之瞄式穿隧顯微鏡探針模組; . 第2a圖係顯示本發明之探針模組的立體圖； . 第2b圖係顯示本發明之探針模組的俯視圖； 第3a圖係顯示本發明之顯微鏡掃描探頭； 第3b圖係顯示本發明之探針模組的底部結構； 第3c圖係顯示探針模組安裝於掃描探頭基座之上的 •情形。 【主要元件符號說明】 1〜本體 2〜探針 3〜黏著材料 10- /探針模組 100 〜探針模組 110 〜基座 120 〜第二 開口 121 〜第一 内侧壁 122 〜第一 凹陷部 130 〜撓性元件 131 〜箆一 >P -— 内侧壁 132 〜篦一 --- 凹陷部 0729-A21164TWF(N2)；P07940003TWA1 ；lemon 10 1281977The W is inserted into the body 1 in a tight fit. Further, the connection position between the probe 2 and the body 1 can be further coated with the adhesive material 3 to strengthen the connection between the probe 2 and the body 1. However, when the probe 2 is simply inserted into the body 1 in a tight fit manner, the probe 2 is easily detached from the body 1 due to its own gravity. Further, it is also easy to cause the problem that the fixed diameter of the main body 1 becomes large after repeated use, which causes the probe Lu 2 to be pinched or loosened. On the other hand, when the adhesive material 3 is applied between the probe 2 and the body 1, there is a problem that the probe 2 is not easily replaced. SUMMARY OF THE INVENTION The present invention is directed to solving the above problems of the prior art, and provides a probe module including a base, a probe, and a pressing structure. The base includes a first opening. A probe is disposed in the first opening. A pressing structure is provided on the base, and the pressing structure urges the probe. 0729-A21164TWF(N2); P07940003TWA1;lemon 1281977 - In the probe module of the present invention, since the probe is stably inserted through the pressing structure, it is sandwiched between the first recessed portion and the second recessed portion. Therefore, it is possible to prevent the probe from being loosened and dropped. At the same time, when the probe is to be removed, it is only necessary to loosen the pressing structure, and the clamping force between the first depressed portion and the second depressed portion can be released to remove the probe, and therefore, the probe The replacement is also very simple. The present invention is a perspective view of a probe module 100 of the present invention, including a base 110, a first opening 160, a flexible member 130, a probe 140, and a second opening 120. And a pressure applying element 150. Referring to FIG. 2b, a top view of the probe module 100 is shown, wherein the first opening 160 and the second opening 120 are formed on the base Π0, and the flexible element 130 is disposed on the first opening 160 and the second opening. Between 120. The probe 140 is disposed in the first opening 160. The pressing member 150 is disposed in the second opening 120. The first opening 160 includes a first inner sidewall 121, a first recess 122, a second inner sidewall 131, and a second recess 132. The flexible member 130 is a piece of elastic member. The first inner sidewall 121 is opposite to the second inner sidewall 131, and the first recess portion 122 is opposite to the second recess portion 132. The probe 140 is interposed between the first recessed portion 122 and the second recessed portion, the portion 132. Pressing member 150 extends the side wall of the base TTv to the 0729-A21164TWF(N2); P07940003TWA1;lemon. 6 1281977 - the second opening 120 to contact and push the flexible member 130 to clamp the probe- The needle 140, wherein the pressing member 150 can be a bolt. The flexible member 130 and the pressing member 150 constitute a pressing structure. The first opening 160 is a slit which is elongated. A first circular hole 161 and a second circular hole 162 are formed at both ends of the first opening 160, respectively. By providing the first circular hole 161 and the second circular hole 162, the elastic deformation ability of the flexible member 130 can be increased, and the probe 140 can be taken in and out more easily. • In the probe module of the present invention, the probe is firmly interposed between the first recessed portion and the second recessed portion by the thrust of the pressing member. This prevents the probe from loosening and falling. At the same time, when the probe is to be removed, the clamping force between the first recessed portion and the second recessed portion can be released by simply releasing the pressing member 5, and the probe is removed. Therefore, the replacement of the probe is performed. It is also very simple. Referring to Fig. 3a, there is shown a scanning probe _300 of the microscope of the present invention, comprising a scanning probe base 210, a joint module 220, and the probe module 100. The connector module 220 is disposed on the scanning probe base 210. The boring head module 220 includes a first conductive element 221, a second conductive element 222, a third conductive element 223, a first positioning hole 224, and a second positioning pin (fiber) 225. The joint module 220 further includes a first positioning seat 226. The first positioning seat 226 is for positioning the first conductive element 221 . Referring to FIG. 3b, it shows the bottom junction of the probe module Γ0Ό 0729-A21164TWF(N2); P07940003TWAi;lemon 7 1281977 - The probe module 100 further includes a fixing component 17〇, a first insulating element a member 181, a second insulating member 182, a first positioning pin 183, and a k-th positioning hole 184. The first insulating element 1 g 1 , the first insulating element • 1U, the first positioning lock 183 and the second positioning hole 1 g4 are all disposed on the bottom surface of the probe module 1 . A fixing member 170 extends from the surface of the base #110 into the second positioning hole 184. Referring to FIG. 3a, the first insulating member 181 corresponds to the second conductive member 222, the second insulating member 182 is associated with the third conductive member 223, and the second positioning hole 184 corresponds to the second positioning pin 225. The first positioning pin 1 g3 corresponds to the positioning/positioning hole 224. The first positioning pin 183, the first positioning hole 224, the second positioning hole 184 and the second positioning pin 225 constitute a positioning mechanism. The design of the positioning mechanism is not limited to the above manner. For example, the first positioning hole can be formed on the probe module, and the first positioning pin can be disposed on the connector module. Referring to Fig. 3c, when the probe module 1 is mounted on the scanning probe base 10210, the probe module 1 is connected to the connector module 22A. At this time, the first conductive member 221 contacts the susceptor 11 〇, and the material of the pedestal 11 为 is a conductive material. Therefore, the first conductive member 221 can be electrically connected to the probe 140. Therefore, when the present invention is used as a scanning probe of a scanning tunneling microscope, the electrical signal on the probe 140 can be transmitted to the first conductive element through the susceptor 11 ϋ. The first conductive element (2) is, for example, electricity. Connected to the control terminal of the second mirror. 0729-Α21164TWF(N2); P07940003TWA1 ilemon 1281977 • Meanwhile, when the probe module 100 is mounted on the scan probe base 210, the second conductive element 222 contacts the first insulating element 181, and the third conductive element The second positioning member 182 is inserted into the second positioning hole 184, and the first positioning pin 183 is inserted into the first positioning hole 224. When the second positioning pin 225 is positioned on the second positioning hole 184, the user can press the second positioning pin 225 through the fixing member 170, thereby fixing the connection between the probe module 100 and the joint module 220. Incidentally, the probe module of the present invention can improve the stability of the pin and prevent unintended loosening of the probe. Furthermore, the probe module of the present invention requires only a simple step to replace the probe. Furthermore, due to the electrode design of the scanning probe of the present invention, the height of the scanning probe is modularized 5 to improve user convenience. While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and may be modified and modified without departing from the spirit and scope of the present invention. Therefore, the scope of the invention is defined by the scope of the appended claims. 0729-A21164TWF(N2); P07940003TWA1;lemon 9 1281977 • [Simplified illustration]. Figure 1 shows a conventional probe tunneling microscope probe module. Figure 2a shows the probe module of the present invention. 2b is a top view showing the probe module of the present invention; Fig. 3a is a microscope scanning probe of the present invention; Fig. 3b is a bottom structure showing the probe module of the present invention; The diagram shows the situation in which the probe module is mounted on the base of the scanning probe. [Main component symbol description] 1 to body 2 to probe 3 to adhesive material 10 - / probe module 100 to probe module 110 to base 120 to second opening 121 to first inner side wall 122 to first recess Portion 130 ~ flexible element 131 ~ 箆 1 > P - - inner side wall 132 ~ 篦 one --- recessed part 0729-A21164TWF (N2); P07940003TWA1; lemon 10 1281977
140〜探針 150- -施壓元件 160- -第一 開口 161- ‘第一 圓孔 162- ‘％ 二 圓孔 170, -固定元件 181- ^第一 絕緣元件 182- ‘第二 絕緣元件 183、 “第一 定位銷 184、 -第二 定位孔 210- ^律描探頭基座 220、 v接頭模組 221- -第一 導電元件 222- '第二 導電元件 223- 结一 一弟二 導電元件 224- -第一 定位孔 225- -第二 定位銷 226、 v第一 定位座 300、 v顯微鏡之掃描探頭 0729-A21164TWF(N2)；P07940003TWA1 ；lemon 11140 to probe 150 - - pressing member 160 - - first opening 161 - 'first circular hole 162 - '% two circular hole 170, - fixing member 181 - ^ first insulating member 182 - 'second insulating member 183 , "first positioning pin 184, - second positioning hole 210 - ^ probe probe base 220, v connector module 221 - first conductive element 222 - 'second conductive element 223 - one by one two conductive elements 224- - first positioning hole 225 - - second positioning pin 226, v first positioning seat 300, v microscope scanning probe 0729-A21164TWF (N2); P07940003TWA1; lemon 11