TWI279920B - Thin film transistor array substrate and liquid crystal display panel - Google Patents

Thin film transistor array substrate and liquid crystal display panel Download PDF

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Publication number
TWI279920B
TWI279920B TW94137110A TW94137110A TWI279920B TW I279920 B TWI279920 B TW I279920B TW 94137110 A TW94137110 A TW 94137110A TW 94137110 A TW94137110 A TW 94137110A TW I279920 B TWI279920 B TW I279920B
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Taiwan
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disposed
thin film
film transistor
transistor array
array substrate
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TW94137110A
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Chinese (zh)
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TW200717811A (en
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Wen-Hsiung Liu
Hui-Chung Shen
Meng-Feng Hung
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Chunghwa Picture Tubes Ltd
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Priority to TW94137110A priority Critical patent/TWI279920B/en
Priority to JP2005376128A priority patent/JP2007123793A/en
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Publication of TW200717811A publication Critical patent/TW200717811A/en

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  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

A thin film transistor array substrate, including a substrate, a plurality of scan lines and data lines, a plurality of pixel units, a plurality of scan bonding pads and data bonding pads, and a plurality of first and second switching devices. The substrate has a display region and a peripheral circuit region. The scan lines and data lines are disposed on the substrate, and the display region is divided into a plurality of pixel areas by thereof. Each pixel unit is disposed in one of the pixel areas, and is driven by the scan lines and data lines. The scan bonding pads and the data bonding pads are disposed in the peripheral circuit region. The scan bonding pads are electrically connected with the scan lines. The data bonding pads are electrically connected with the data lines. The first and the second switching devices are disposed in the peripheral circuit region, wherein at least one of the first switching devices is disposed between two adjacent scan bonding pads, and is electrically connected with thereof. And at least one of the second switching devices is disposed between two adjacent data bonding pads, and is electrically connected with thereof.

Description

mm doc/y 九、發明說明: 【發明所屬之技術領域】 本發明是有關於一種元件陣列基板(device array substrate)以及顯示面板(display panel),且特別是有關 於一種具有靜電防護功能(anti-static capability )之薄膜電 晶體陣列基板(Thin Film Transistor array substrate,TFT array substrate )以及液晶顯示面板(Liquid Crystal Display pane卜 LCD panel)。 【先前技術】 近年來,由於光電技術與半導體製造技術之成熟,帶 動了平面顯示器(Flat Panel Display)之蓬勃發展,其中薄 膜電晶體液晶顯示器(Thin Film Transistor Liquid Crystal Display ’ TFT-LCD)基於其低電壓操作、操作速度快、重 量輕以及體積小等優點,而逐漸成為顯示器產品之主流。 薄膜電晶體液晶顯示器主要包括一液晶顯示面板及 一背光模組(backlightmodule),其中液晶顯示面板是由 一形色濾光基板(Color Filter,C/F)、一薄膜電晶體陣列 基板(Thm Film Transistor array substrate,TFT array substrate)以及配置於此兩基板間的一液晶層所構成,而 月光杈組是用以提供此液晶顯示面板所需之面光源,以使 液日日顯不裔達到顯示的效果。 主圖1繪不為習知一種薄膜電晶體陣列基板的示意圖。 請參照圖1,此薄膜電晶體陣列基板100包括基板110、多 條掃瞄線120與資料線13〇、畫素單元15〇、掃瞄焊墊16〇、 6 uim doc/y 資料*干墊170、内部靜電防護環i92 (inner guard ring)以 及外部靜電防護環丨94。 基板11〇具有一顯示區112 (display region)以及一 周邊線路區 114 (peripheral circuit region)。掃聪線 120 與貢料線130配置於基板11〇上,其中掃瞄線12〇與資料 線130於將顯示區112劃分成多個晝素區域14〇。晝素單 兀150分別配置於晝素區域14〇其中之一内,且其藉由掃 瞄線120及資料線13〇而驅動,此晝素單元15〇是由一薄 月果電晶體152與一晝素電極154所組成。 4繼續參照圖i,掃瞄焊墊16〇配置於周邊線路區114 内,且掃瞄焊墊160電性連接至掃瞄線120。資料焊墊17〇 配置於周邊線路區114内,且資料焊墊17〇電性連接至資 料線130。内部靜電防護環192配置於周邊線路區ιΐ4内、, =立於掃目轉塾16G與顯示區112之間以及位於資料焊塾 與顯示區112之間,且内部靜電防護環192電性 ^带目苗線⑽與資料線13G。此内部靜電防護環19 動開關X件(如薄膜電晶體或是二極體)* I線12G與資料線13G所構成之靜電防護電路。、另外,夕I 二砰電防私194(〇utguardring)配置於周邊線路區⑴ 料r ㈣焊墊16G與基板11G外緣之間以及位於資 G與基板11G外緣之間,且外部靜電防護環194 刀別琶性連接至掃目m m與該些㈣線 =部靜電防_是由主動開關元件心 或疋二極體)與其周圍的掃晦線12〇與資料線13〇所構成 7 i279920w,〇c/y 之靜電防護電路。 合因晶體陣列基板1%在製作的過程中,通常 象。如此—來,當電荷累積至-定數 100上之為靜電放電而導致薄膜電晶體陣列基板 體152 遭叫 防觀192以及外部靜電防護環194而使 “旦_整個基板,_避 顯示區m中之晝素單元15G或線路嶋之4偏 # 194更:^=内部靜電防護環192或是外部靜電防護 % 194疋透過主動開關元件(未緣 :=3::;r當掃目_。與資料請=電 使等雷八& #屯超過1何時,便可開啟絲_元件而 使砰電刀放至内部靜電防賴19 194上,—_物賴魏。 丨心防遂% 防利用上述之内部靜電防護環192與外部靜電 m的設計’仍有可能會發生靜f破壞的現象 其是在掃目辦墊16G與資料焊墊17G的位置,因為二 ^大而特別容g累積大量靜電。所以,#靜電=貝 薄膜電晶體陣列基板⑽上之線路或薄膜電晶體 會有靜電破壞的現象產生。 仍& 【發明内容】 有鑑於此,本發明的目的就是在提供—種薄 陣列基板,其雜宣祕板上所累積的大量靜電,進^ •I27ma.-/y 少基板上所產生之靜電破壞現象。 、、本發明的再一目的是提供一種液晶顯示面才反,其 上述之薄膜電晶體陣列基板,而使得此液晶顯示及 良好的靜電防護能力。 板八有 基於上述目的或其他目的,本發明提出一種 曰 體陣:阳反,包括基板、多條掃猫線與多條資料線、、二 畫素單7G、多個掃瞄焊墊、多個資料焊墊、 丨2以及多個第二開關元件。基板具有-顯示區 ^線路區。掃瞒線與資料線配置於基板上,其中 將顯示區劃分成多個畫素區域。畫素單元分別配 魏域其中H且其藉由掃猫線及f ^掃晦焊墊配置於周邊線路區内,且掃崎塾電》 2目苗線。資料焊墊配置於周邊線路區内,且資 ^ =接至資料線。第-開關元件配置於周邊線路區内,】 焊墊之間配置有至少-個第-開關元件:、 第件會與位於其兩側的掃瞒焊墊電性連接。 件會與位於其兩側之資料其中“二開關元 間是=:第一! 並聯方式岭置 件,且兩個第—關元件是以 虿雨個弟一開關辑,且兩個第二開關元件是以 9 127· 丨 twf.doc/y 並聯方式而設置 縣發明之一實施例中,上述之每-第-開關元件包 _括淨置閘極、閘絕緣層、半導體層以及源極級極。浮置閘 二 極配置於基板上。閘絕緣層覆蓋浮置閘極。半導體層配置 於浮置閘極上方之閘、纟巴緣層上。源極/汲極配置於半導體層 上,其中源極/汲極會與位於其兩侧之掃瞄焊墊電性連接。 另外,上述之源極/汲極是非對稱地設置或是對稱地設置。 “在本發明之一實施例中,上述之每-第二開關元件包 響括洋置閘極、閘絕緣層、半導體層以及源極/汲極。浮置閘 極配置於基板上。閘絕緣層覆蓋浮置閘極。半導體層配置 於浮置閘極上方之閘絕緣層上。源極/汲極配置於半導體層 上,其中源極/汲極會與位於其兩侧之資料焊墊電性連接。 另外,上述之源極/汲極是非對稱地設置或是對稱地設置。 + “在本發明之一實施例中,上述之每一晝素單元包括薄 朕電晶體以及晝素電極。薄膜電晶體配置於其中一晝素區 域内。晝素電極配置於其中一晝素區域内,並與薄膜 • 體電性連接。 、日 在本發明之一實施例中,上述之薄膜電晶體陣列基 板更包括多個内部靜電防護環(inner guard ring ),其 配置於周邊線路區内,且位於掃瞄焊墊與顯示區之間以及 位於貧料焊墊與顯示區之間,且内部靜電防護環電性連接 - 至掃瞄線與資料線。 ^ 在本發明之一實施例中,上述之薄膜電晶體陣列基 板’更包括多個外部靜電防護環(〇ut guard ring),其配 ίο 1279920 17320twf.doc/y 置於周邊線路區内, 位於資料焊藝與基板外緣=晦^與基板外緣之間以及 性連接至掃晦線與資料線。曰1 ’且外部靜電防護環分别電 基於上述目的咬里★ 示面板,包括彩色的2發明再提出-種液晶顯 晶層。此_電日日二二 _電晶體陣列基板以及液 體陣列基板,“層配3 =是如上所述之薄膜電晶 陣列基板之間。9· D色濾光基板與薄膜電晶體 八別木用第—開關元件與第二開關元件,且將盆 : 墊與相鄰的兩輸 電將可以在第i 谭塾或是資料焊塾時,靜 轉合效應,而使件上發生電荷 Γ而二在相鄰的掃目苗線或相鄰的雜 晶體陣列基板上產生之靜電破壞現2 “每明之上述和其他目的、賴和優點能 易懂,下文特舉較佳實施例,並配合所附圖式,作詳= 明如下。 夂 【實施方式】 圖2綠不為本發明較佳實施例之一種薄膜電晶體陣列 基板的示意圖。請參照圖2,此薄膜電晶體陣列基板2〇〇 包括基板210、多條掃瞄線22〇與資料線23〇、多個晝素單 元250、多個掃瞄焊墊260與資料焊墊270、多個第一開關 元件280a以及多個第二開關元件28〇b。 1279920 17320twf.doc/yMm doc/y IX. Description of the Invention: [Technical Field] The present invention relates to a device array substrate and a display panel, and more particularly to an electrostatic protection function (anti -Thin Film Transistor Array Substrate (TFT Array Substrate) and Liquid Crystal Display Panel (LCD Panel). [Prior Art] In recent years, due to the maturity of optoelectronic technology and semiconductor manufacturing technology, the flat panel display has been flourishing, and the Thin Film Transistor Liquid Crystal Display 'TFT-LCD based on it Low voltage operation, fast operation speed, light weight and small size have gradually become the mainstream of display products. The thin film transistor liquid crystal display mainly comprises a liquid crystal display panel and a backlight module, wherein the liquid crystal display panel comprises a color filter substrate (C/F) and a thin film transistor array substrate (Thm Film). The TFT array substrate and the liquid crystal layer disposed between the two substrates, and the moonlight group is used to provide a surface light source required for the liquid crystal display panel, so that the liquid crystal display can be displayed. Effect. The main figure 1 is not a schematic view of a conventional thin film transistor array substrate. Referring to FIG. 1, the thin film transistor array substrate 100 includes a substrate 110, a plurality of scan lines 120 and data lines 13A, a pixel unit 15A, a scan pad 16A, a 6 uim doc/y data, and a dry pad. 170. An internal static protection ring i92 (inner guard ring) and an external static protection ring 丨94. The substrate 11A has a display region 112 and a peripheral circuit region 114. The Sweep line 120 and the tribute line 130 are disposed on the substrate 11A, wherein the scan line 12A and the data line 130 divide the display area 112 into a plurality of halogen regions 14A. The halogen elements 150 are respectively disposed in one of the halogen regions 14 , and are driven by the scan line 120 and the data line 13 , which is composed of a thin moon crystal 152 and A unitary electrode 154 is formed. 4 Continuing to refer to FIG. 1 , the scan pad 16 is disposed in the peripheral line region 114 , and the scan pad 160 is electrically connected to the scan line 120 . The data pad 17 is disposed in the peripheral line region 114, and the data pad 17 is electrically connected to the data line 130. The internal static protection ring 192 is disposed in the peripheral circuit area ι 4, and is located between the scanning switch 16G and the display area 112, and between the data soldering and display area 112, and the internal static protection ring 192 is electrically connected. Miao line (10) and data line 13G. The internal static protection ring 19 is a switch circuit for X (such as a thin film transistor or a diode) * an electrostatic protection circuit composed of an I line 12G and a data line 13G. In addition, the II 砰 砰 guard 194 is disposed in the peripheral line area (1) material r (four) between the pad 16G and the outer edge of the substrate 11G and between the outer edge of the G and the substrate 11G, and external electrostatic protection Ring 194 knives are connected to the sweeping mm and the (four) wires = partial electrostatic protection _ is formed by the active switching component core or 疋 diode) and the surrounding broom wire 12 〇 and the data line 13 7 7 i279920w , 〇c/y electrostatic protection circuit. The composite crystal array substrate is typically 1% in the process of fabrication. In this way, when the electric charge is accumulated to a constant number of 100, the electrostatic discharge causes the thin film transistor array substrate body 152 to be called the anti-view 192 and the external static protection ring 194, so that the entire substrate, the display area m In the case of the elemental unit 15G or the line 嶋4 partial # 194: ^ = internal static protection ring 192 or external static protection % 194 疋 through the active switching element (not edge: = 3::; r when sweeping _. With the information please = electrician, etc. Lei Ba &#屯 more than 1 when, you can open the wire _ components and put the 砰 electric knife on the internal static anti-reliance 19 194, - _ material Lai Wei. By using the above-mentioned internal electrostatic protection ring 192 and the design of the external static electricity m, there is still a possibility that static f damage may occur, which is the position of the scanning pad 16G and the data pad 17G, because the two are large and accumulate A large amount of static electricity. Therefore, the static electricity is destroyed by the circuit or the thin film transistor on the thin film transistor array substrate (10). Still & [Invention] In view of the above, the object of the present invention is to provide Thin array substrate, a large amount of static electricity accumulated on the microscopic board , I27ma.-/y, the electrostatic breakdown phenomenon generated on the substrate. Further, it is still another object of the present invention to provide a liquid crystal display surface, the above-mentioned thin film transistor array substrate, and the liquid crystal display And good electrostatic protection ability. The board has a purpose based on the above purpose or other purposes, the present invention proposes a scorpion array: positive, including the substrate, a plurality of sweeping cat lines and a plurality of data lines, two pixels single 7G, more a scanning pad, a plurality of data pads, a plurality of second switching elements, and a plurality of second switching elements. The substrate has a display area and a line area. The broom line and the data line are disposed on the substrate, wherein the display area is divided into a plurality of pictures. The pixel region is respectively arranged in the Wei domain, where H is disposed in the peripheral circuit area by the sweeping cat line and the f ^ broom pad, and the shovel is in the 2 mesh line. The data pad is disposed in the periphery. In the line area, and ^^ is connected to the data line. The first-switching element is arranged in the peripheral circuit area,] at least one first-switching element is arranged between the pads: the first piece will be scanned with the two sides瞒 solder pads are electrically connected. The pieces will be on both sides Among them, "the two switching elements are =: first! Parallel mode ridges, and the two first-off components are a switch series of 虿雨弟弟, and the two second switching elements are 9 127· 丨twf .doc/y In one embodiment of the invention, the per-first-switching element package includes a net gate, a gate insulating layer, a semiconductor layer, and a source-level electrode. The floating gate diode configuration On the substrate, the gate insulating layer covers the floating gate, and the semiconductor layer is disposed on the gate and the pad edge layer above the floating gate. The source/drain is disposed on the semiconductor layer, wherein the source/drain is combined with The scan pads on both sides are electrically connected. In addition, the source/drain electrodes described above are asymmetrically disposed or symmetrically disposed. In one embodiment of the present invention, each of the second and second switching elements includes a gate, a gate insulating layer, a semiconductor layer, and a source/drain. The floating gate is disposed on the substrate. The layer covers the floating gate. The semiconductor layer is disposed on the gate insulating layer above the floating gate. The source/drain is disposed on the semiconductor layer, wherein the source/drain is electrically connected to the data pads on both sides thereof In addition, the above-mentioned source/drain electrodes are asymmetrically disposed or symmetrically disposed. + "In one embodiment of the present invention, each of the above-described pixel units includes a thin germanium transistor and a halogen electrode. The thin film transistor is disposed in one of the halogen regions. The halogen electrode is disposed in one of the halogen regions and electrically connected to the film body. In an embodiment of the present invention, the thin film transistor array substrate further includes a plurality of internal inner guard rings disposed in the peripheral circuit region and located in the scan pad and the display region. Between the poor solder pad and the display area, and the internal static protection ring is electrically connected - to the scan line and the data line. In an embodiment of the invention, the thin film transistor array substrate ′ further includes a plurality of external 静电 guard rings, which are disposed in the peripheral circuit area, located at ίο 1279920 17320 twf.doc/y. The data soldering and the outer edge of the substrate = 晦 ^ and the outer edge of the substrate are connected to the broom line and the data line.曰1' and the external electrostatic protection ring are electrically based on the above-mentioned purpose, and the liquid crystal display layer is further proposed. This _ electric day and day _ transistor array substrate and liquid array substrate, "Layer 3 = between the thin film electro-crystalline array substrate as described above. 9 · D color filter substrate and thin film transistor eight wood The first switching element and the second switching element, and the pot: the pad and the adjacent two power transmissions can be statically turned into an effect when the i-th or the data is soldered, and the charge is generated on the piece. Electrostatic Disruption Occurred on Adjacent Wipe Lines or Adjacent Hetero Crystal Array Substrates 2 "Every of the above and other objects, advantages and advantages are readily understood. The preferred embodiments are described below and in conjunction with the drawings. The formula is as follows.实施 Embodiments Fig. 2 is a schematic view showing a thin film transistor array substrate which is not a preferred embodiment of the present invention. Referring to FIG. 2, the thin film transistor array substrate 2 includes a substrate 210, a plurality of scan lines 22 and data lines 23, a plurality of pixel units 250, a plurality of scan pads 260, and data pads 270. a plurality of first switching elements 280a and a plurality of second switching elements 28〇b. 1279920 17320twf.doc/y

基板210具有-顯示區212以及一周邊線路區214。 掃猫線220與資料線23〇酉己置於基板21〇上,其中婦猫線 220與貧料線230將顯示區212劃分成多個晝素區域24〇。 每-畫素單元250配置於晝素區域24〇其中之一内,且並 藉由掃瞒線220及資料線23〇而驅動。掃聪焊塾遍配置 於周邊欠線路區214内,且掃目純整電性連接至掃瞒線 220。貝料焊塾270 g己置於周邊線路區214 0,且資料焊塾 270電性連接至育料線23()。第—開關元件2施配置於周 邊線路區内’其中於相鄰二掃猫焊墊細之間配置有 至少-個第-關元件彻a(圖2中繪示兩個),且各第 開關元件28Ga會與位於其兩側的掃目替焊墊綱電性 接。第二開關元件280b配置於周邊線路區214内,盆中於 相鄰二資料焊墊27G之間配置有至少—個第二開關元件 280b (圖2情示兩個),其中各第二開關元件鳩會與 位於其兩侧之資料焊墊270電性連接。 请參照圖2,在本發明之一實施例中,每一晝素單元 250包括薄膜電晶體252以及晝素電極。薄膜電晶體 252配置於其中-畫素區域24〇内。晝素電極b配置於 其中-晝素區域240内,並與薄膜電晶體252電性連接。、 另外,如圖2所緣示’薄膜電晶體陣列基板200例如 更包括多仙部靜電防護環2 9 2,其配置於周邊線路區2! 4 内,且位於掃瞄焊墊260與顯示區214之間以及位於資 焊墊270與顯示區214之間,且内部靜電防護環292電性 連接至掃瞒線220與資料線23〇。並且,薄膜電晶體陣列The substrate 210 has a display area 212 and a peripheral line area 214. The brush line 220 and the data line 23 are placed on the substrate 21, wherein the cat line 220 and the lean line 230 divide the display area 212 into a plurality of halogen regions 24A. Each of the pixel units 250 is disposed in one of the halogen regions 24, and is driven by the broom line 220 and the data line 23A. The wiper solder fillet is disposed in the peripheral under-line region 214, and the sweeping wire is electrically connected to the broom wire 220. The bead solder 270 g has been placed in the peripheral line area 214 0, and the data solder 270 is electrically connected to the cultivating line 23 (). The first switching element 2 is disposed in the peripheral circuit region, wherein at least one of the first and second closing elements is disposed between the adjacent two scanning brush pads (a two are shown in FIG. 2), and each of the switches The component 28Ga is electrically connected to the trace pads on both sides thereof. The second switching element 280b is disposed in the peripheral circuit region 214, and at least one second switching element 280b (two in FIG. 2) is disposed between the adjacent two data pads 27G, wherein each of the second switching elements The device is electrically connected to the data pads 270 located on both sides thereof. Referring to Figure 2, in one embodiment of the invention, each of the pixel units 250 includes a thin film transistor 252 and a halogen electrode. The thin film transistor 252 is disposed in the -pixel region 24A. The halogen electrode b is disposed in the halogen region 240 and electrically connected to the thin film transistor 252. In addition, as shown in FIG. 2, the thin film transistor array substrate 200 further includes a multi-send electrostatic protection ring 292, which is disposed in the peripheral circuit region 2! 4, and is located in the scanning pad 260 and the display region. Between 214 and between the pad 270 and the display area 214, and the internal static protection ring 292 is electrically connected to the broom wire 220 and the data line 23A. And, thin film transistor array

1279920 17320twf.doc/y 基板200例如更包括多個外部靜電防護環294,其配 周邊線路區214内’且位於掃晦焊墊與基板⑽繁 之間以及位於資料焊墊27。肖基板21Q外緣之間,卜= 靜電防護環294分別電性連接至掃猫線220與資料線23= 更坪細地說’内部靜電防護環292或是外 環綱是透過主動開關元件(未緣示)争接掃目苗線22= 貧料線230的電路結構,當掃目苗線220與資料線230或薄 版電晶體252上的靜電大量累積日夺,便會開啟主動開關元 件而使電分散至内部靜電防護環M2及/或外部靜電防 護環294上,以達到靜電防護的功能。但是,在掃目苗焊塾 2中60或是資料焊墊謂的區域,仍有可能會產生大量的靜 电累積。因此,本發明在相鄰之二掃瞎焊墊26〇以及相鄰 ,二貧料焊墊270之間,分別配置了第一開關元件縣 與弟~開關元件280b。 口在本發明之一實施例中,於相鄰二掃瞄烊墊之間 疋配^有兩個第一開關元件28〇a,且兩個第一開關元件 〇a疋以並聯方式而設置。另外,相鄰二資料焊墊270之 間例如是配置有兩個第二開關元件28〇b,且兩個第二開關 元件28〇b疋以並聯方式而設置,如此,靜電即可以透過雙 向傳輸(two_way conducting)的方式而傳導。 立圖3繪示為圖2中之掃瞄焊墊在A區域的放大俯視示 1圖’圖3A繪示為圖3中沿A_A,線之剖面示意圖,圖3B 繪示為圖3中沿B-B,線之剖面示意圖。 請共同參照圖3與圖3A,在本發明之一實施例中, 13 I27m.y 每-第-關元件28Ga包括浮置閘極2δ2 284、半導體層驗以及源魏極挪 配置於基板別上。閉絕緣層284覆蓋浮置閑極咖。半 導體層286a配置於浮置閘極勘上方之閘絕緣層測 上。源極/没極288a配置於半導體層驗上,盆 没極288a會與位於其兩側之掃目苗焊塾··連接。'、 習知的形成晝素陣列的製程,是在基板训上形成導 線(例如是掃目苗線、資料線)、薄膜電晶體以及晝辛電極 等元件,此製程可岐五道鮮製程、四道鮮製程或是 任何已知的晝素陣列製程。請同時參照圖3、目3A盥圖 3B,以五道光罩製程為例,如圖3中繪示的掃猫線⑽、 掃目苗焊墊260以及第—開關元件28如的浮置閘極282&是 利用第一迢光罩製程而製成(Metal 1),其是直接設置於 基板210^1。然後,在基板21〇±會再全面形成閘絕緣層 28^以覆々盍掃猫、線220、掃目苗焊塾26〇以及浮置閘極282&。 接著’以第二道光罩製程於浮置閘極2 82a上製作半導體層 286a。再來,以第三道光罩製程製作源極/汲極288& 屬層(MetaU)。之後,在基板綱上再全面覆蓋保護層 300,再以第四道光罩製程定義出開口 3〇如與開口 3〇〇b, 也就是在掃瞄線220上方之保護層3〇〇的位置形成開口 300a,此開口 3〇〇a暴露出源極/汲極288a的金屬層(如圖 3A所不),以及在掃瞄焊墊26〇上方之閘絕緣層284與保 護層300中製作開口 3〇〇b’使掃瞄焊墊26〇暴露出來(如 圖3B所示)。接著,再以第五道光罩製程於掃瞄焊墊26〇 14 1279920 17320twf.doc/y 和掃姑線220上製作導電層31G (例如是銦錫氧化物層, -IT〇)。值得注意的是’如®I 3、圖3A與圖3B中所緣示 之導電層310就可以透過開口 3〇〇a與開口 3_,而使得 ' 源極/汲極288a與掃瞄烊墊260彼此電性連接。 也就是說,當圖3繪示之其中一個掃瞄焊墊26()累積 有大量靜電時,此靜電將可以由掃瞄焊墊26〇傳導至第」 開關元件280a中的源極/汲極288a。然後,源極/沒極篇 與浮置閘極282a之間將會產生電荷麵合效應(coupling), 而使第-開關元件2 8 G a開啟。其結果是,累積在其中一個 掃瞒焊墊260上之靜電’其可以透過第—關元件篇 ,半導體層286a而傳導到其相鄰之婦晦線22()上。因此, 靜電就不會局部累積在-個掃目苗焊塾26〇上,而可以避免 在掃瞄焊墊260之鄰近區域產生靜電破壞的現象。 另外,值得注意的是,第一開關元件280a中的源極/ 汲極肠可以是非對麟設置或是對稱地設置。請參昭圖 3 ’在-實施射’第-開關元件·a中的雜/汲極购 #例如是以非對稱的方式而設置,此時,在有限的空間下, 可使源極/汲極288a擁有較好的靜電聚集的能力,並可以 提昇源極/汲極偷和浮置閘極282a之間的電荷麵合效 應。更詳細地說,第-開關it件28Ga中—方的源極(或没 極)的長度是U,而另-方的汲極(或源極)的長度是 ‘ L2 ’且L2的長度大於L1的長度。由於L2較長,所以具 .有L2長度的汲極將具有較大的空間可聚集靜電,因而使 此汲極和其底下·置閘極282a之間更容㈣生電荷輕 15 -I27^fidoc/y 合效應。其結果是,當靜電累積時,第一開關元件280a 將更容易開啟,並使靜電從具有L2長度的汲極之一側傳 " 導到具有L1長度的源極之一側。 : 另外,請繼續參照圖3,當在二相鄰掃瞄焊墊26〇之 間配置兩個第一開關元件28〇a、28〇a,時,另一個第一開關 το件280a’最好也是採用非對稱設置。特別是,此時設置 在此第一開關元件280a,之浮置閘極282a上方的源極/汲極 288a,其長度會與上述之情況相反。也就是說,如圖3所 參繪示之另-個第-開關元件28〇a,,其一方的源極(或没 極)的長度是L3,而另一方的汲極(或源極)的長度是 L4 ’且L3的長度大於L4的長度。其結果是,靜電將可以 從具有L3長度的源極(或汲極)之一側傳導到具有L4長 度的汲極(或源極)之一侧。綜上所述,當在掃瞄焊墊 之間設置兩個並聯之第一開關元件28〇a、28〇a,,且其源極 /汲極288a為非對稱設置時,除了第一開關元件28〇a、28如, 的開啟可較快速外,靜電的傳導方向也可以是藉由雙向流 _ 通(two_way conducting )的方式而進行。 圖4繪示為圖2中之掃瞄焊墊在3區域的放大俯視示 思圖,圖4A繪示為圖4中沿C-C,線之剖面示意圖,圖4B 繪示為圖4中沿D-D,線之剖面示意圖。 —請共同參照圖4與圖4A,在本發明之一實施例中, ^ 每一第二開關元件280b包括浮置閘極282b、閘絕緣層 284、半導體層286b以及源極/汲極288b。浮置閘極282b 配置於基板210上。閘絕緣層284覆蓋浮置閘極282b。半 16 I2Hy 導體層286b配置於浮置閘極282b上方之閑絕緣層撕 上。源極/汲極288b配置於半導體層286b上,其中源極/ 汲極288b會與位於其兩侧之資料焊墊27〇電性連接。 、同樣地,在製作上述的元件時,所使用的製程可以是 五道光罩製程、四迢光罩製程或是任何已知的晝素陣列掣 程。^五道光罩製程為例,並請同時參照圖4、圖4A與圖 4B,第二開關元件28〇b的浮置閘極28沘是利用第一道光 罩製程所製作的(Metal 1),其是直接製作於基板21〇上。 然後,在基板210上會再全面形成閉絕緣層挪以覆罢此 洋置閘極282b。接著,以第二道光罩製程於浮置間極2皿娜 上製作半導體層28处。再來,以第三道光罩製程製作資料 線230、資料焊墊270以及源極/汲極鳩的金屬層(Metal 2) ’’別是,其為同-層金屬層。之後,在基板2i〇上再 =面覆蓋賴層·,再以第四道光罩製程定義出開口 〇c,也就疋在貧料焊墊27〇上方之閘絕緣層2料與保護 二300中製作開口 3〇〇c,而使資料谭塾,暴露出來。接 以第五道光罩製程於貧料焊塾270和資料線230上 製作導電層31G (例如是编氧化物層,ίτ〇)。值得注音 如圖4、圖4Α與圖4β中所緣示之源極/沒極2‘ 谭墊,是同一金屬層,所以其源極/汲極鳩與 貝料焊墊270是彼此電性連接的。 =尤是說’如圖4緣示之其中一個資料焊墊謂累積 時,此靜電將可以從㈣焊墊⑽傳導至第二 汗兀280b中的源極/汲極2·〇然後,源極/汲極 1279920 17320twf.doc/y 與浮置閘極282b之間就可以產生電荷耦合效應 (coupling),而使第二開關元件28〇b開啟。其結果是, 累積在其中一個資料焊墊27〇上之靜電,就可以透過第二 開關元件280b之半導體層286b而傳導到其相鄰之資料線 23〇上,所以,靜電就不會累積在資料焊墊270上,而可 以避免在資料焊墊270的鄰近區域產生靜電破壞的現象。 另外’同樣地’第二開關元件280b中的源極/汲極288b 可以是非對稱地設置或是對稱地設置。此設置的目的、方 式以及效果已於上述介紹第一開關元件時說明了,在 此,不再予以詳述。總之,#在資料焊墊27c)之間設置兩 =第二開關元件28Gb,且其源極/沒極獅為非對稱設置 柃除了第一開關元件280b的開啟可較快速外,靜電的傳 導方向也可以是採用雙向流通的方式而進行。 、 綜上所述,第-開關元件與第二開關元件的設置,可 m之五道光罩製㈣形成’所以並不需要增加額外 =呈步驟。另外,第—開關树與第二開關元件分別設 置在相鄰的兩個掃目碑墊與相鄰的兩個f料焊墊之間 以^靜電累積在掃料墊或是資料焊塾上時 Ϊ弟件及’或第二開關元件上發生之電荷耦合效 =而,弟-開關元件及/或第二開關元件開啟。藉此, 1減少#電過度地累積在局部之掃瞒焊墊以及資料 墊上,亚進而減少靜電破壞現象。此 晶體陣列基板應用於液晶顯示 ' μ 有較佳靜龍護效果·晶難=4’將可以得到具 18 I27^m〇c/y 圖5繪示為本發明較佳實施例之一種液晶顯示面板的 示意圖。此液晶顯示面板400包括彩色濾光基板410、薄 膜電晶體陣列基板420以及液晶層430。此薄膜電晶體陣 列基板420例如是如圖2所繪示之薄膜電晶體陣列基板 200’且液晶層430配置於彩色濾光基板41〇與薄膜電晶體 陣列基板420之間。 彩色濾光基板410上配置有共用電極(c〇mm〇n1279920 17320twf.doc/y The substrate 200, for example, further includes a plurality of external static protection rings 294 disposed within the peripheral line region 214 and located between the broom pads and the substrate (10) and on the data pads 27. Between the outer edges of the slanted substrate 21Q, the sb=electrostatic protection ring 294 is electrically connected to the squirrel line 220 and the data line 23= pings finely, 'the internal static protection ring 292 or the outer ring is through the active switching element ( Unexpectedly, the circuit structure of the smashing line 22=the lean line 230 is activated. When the static electricity on the scanning line 220 and the data line 230 or the thin plate transistor 252 is accumulated, the active switching element is turned on. The electricity is dispersed to the internal static protection ring M2 and/or the external static protection ring 294 to achieve the function of electrostatic protection. However, it is still possible to generate a large amount of static electricity accumulation in the area of 60 or the data pad. Therefore, in the present invention, the first switching element county and the switching element 280b are disposed between the adjacent two broom pads 26A and the adjacent two poor pad 270. In one embodiment of the invention, two first switching elements 28〇a are disposed between adjacent two scanning pads, and two first switching elements 〇a疋 are disposed in parallel. In addition, between the two adjacent data pads 270, for example, two second switching elements 28〇b are disposed, and the two second switching elements 28〇b疋 are disposed in parallel, so that the static electricity can be transmitted through the two-way transmission. (two_way conducting) way to conduct. Figure 3 is a schematic plan view of the scanning pad of Figure 2 in the A area. Figure 3A is a cross-sectional view along line A_A in Figure 3, and Figure 3B is a cross-sectional view along line BB in Figure 3. , the schematic diagram of the line. Referring to FIG. 3 and FIG. 3A together, in one embodiment of the present invention, the 13 I27m.y per-first-off element 28Ga includes a floating gate 2δ2 284, a semiconductor layer inspection, and a source-polarization configuration on the substrate. . The closed insulating layer 284 covers the floating idler. The semiconductor layer 286a is disposed on the gate insulating layer of the floating gate. The source/dot pole 288a is placed on the semiconductor layer, and the potless pole 288a is connected to the sweeping solder joints on both sides. ', the conventional process of forming a halogen array is to form wires on the substrate training (for example, sweeping wire, data line), thin film transistor and bismuth electrode, etc. This process can be used in five fresh processes, Four fresh processes or any known halogen array process. Please refer to FIG. 3, FIG. 3A and FIG. 3B simultaneously, taking a five-mask process as an example, as shown in FIG. 3, the sweeping wire (10), the sweeping pad 260, and the floating gate of the first switching element 28, for example. 282 & is made by the first mask process (Metal 1), which is directly disposed on the substrate 210^1. Then, on the substrate 21, the gate insulating layer 28^ is further formed to cover the cat, the wire 220, the sweeping wire 26 〇 and the floating gate 282 & Next, a semiconductor layer 286a is formed on the floating gate 2 82a by a second mask process. Then, the source/drain 288 & amp layer (MetaU) is fabricated in a third mask process. Thereafter, the protective layer 300 is completely covered on the substrate, and the opening 3 is defined by the fourth mask process, for example, with the opening 3〇〇b, that is, the position of the protective layer 3〇〇 above the scanning line 220. Opening 300a, the opening 3〇〇a exposes the metal layer of the source/drain 288a (as shown in FIG. 3A), and the opening 3 is formed in the gate insulating layer 284 and the protective layer 300 above the scanning pad 26? 〇〇b' exposes the scanning pad 26〇 (as shown in Fig. 3B). Next, a conductive layer 31G (for example, an indium tin oxide layer, -IT〇) is formed on the scan pad 26〇 14 1279920 17320 twf.doc/y and the sweep line 220 by a fifth mask process. It should be noted that the conductive layer 310 as shown in FIG. 3, FIG. 3A and FIG. 3B can pass through the opening 3〇〇a and the opening 3_, so that the source/drain 288a and the scanning pad 260 Electrically connected to each other. That is, when one of the scan pads 26 () is accumulated with a large amount of static electricity, the static electricity can be conducted from the scan pad 26 to the source/drain in the "" switching element 280a. 288a. Then, a charge-coupling effect is generated between the source/no-pole and the floating gate 282a, and the first-switching element 2 8 G a is turned on. As a result, the static electricity accumulated on one of the broom pads 260 can be conducted through the first-off component, the semiconductor layer 286a, to the adjacent daughter-in-law line 22(). Therefore, static electricity does not locally accumulate on the surface of the squeegee 26, and electrostatic breakdown in the vicinity of the scanning pad 260 can be avoided. In addition, it is worth noting that the source/deuterium in the first switching element 280a may be non-aligned or symmetrically disposed. Please refer to Fig. 3 'In the implementation of the 'transmission' of the first switching element · a miscellaneous / 汲 购 # 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如 例如The pole 288a has a good ability to collect static electricity and can improve the charge surface effect between the source/drain and the floating gate 282a. In more detail, the length of the source (or the pole) of the first-switching member 28Ga is U, and the length of the other-side drain (or source) is 'L2' and the length of L2 is greater than The length of L1. Since L2 is long, the drain with L2 length will have a larger space to collect static electricity, thus making the drain between the drain and its lower gate 282a more. (4) The charge is light 15 -I27^fidoc /y combined effect. As a result, when static electricity is accumulated, the first switching element 280a will be more easily turned on, and the static electricity will be transferred from one side of the drain having the length L2 to one side of the source having the length of L1. In addition, please continue to refer to FIG. 3. When two first switching elements 28a, 28a are disposed between two adjacent scanning pads 26A, the other first switch τ 280a' is preferably Asymmetric settings are also used. In particular, the source/drain 288a disposed above the floating gate 282a of the first switching element 280a at this time has a length opposite to that described above. That is to say, as shown in FIG. 3, another first-switching element 28〇a, one of its source (or no-pole) has a length L3 and the other has a drain (or source). The length is L4' and the length of L3 is greater than the length of L4. As a result, static electricity can be conducted from one side of the source (or drain) having a length of L3 to one side of the drain (or source) having a length of L4. In summary, when two parallel switching elements 28〇a, 28〇a are disposed between the scanning pads, and the source/drain 288a is asymmetrically disposed, except for the first switching element. The opening of 28〇a, 28, for example can be faster, and the direction of conduction of static electricity can also be performed by means of two-way conducting. 4 is an enlarged plan view of the scanning pad of FIG. 2 in a region of 3, FIG. 4A is a cross-sectional view taken along line CC of FIG. 4, and FIG. 4B is a cross-sectional view taken along line DD of FIG. A schematic view of the line. - Referring collectively to Figures 4 and 4A, in one embodiment of the invention, ^ each of the second switching elements 280b includes a floating gate 282b, a gate insulating layer 284, a semiconductor layer 286b, and a source/drain 288b. The floating gate 282b is disposed on the substrate 210. The gate insulating layer 284 covers the floating gate 282b. The half 16 I2Hy conductor layer 286b is disposed on the tearing of the insulating layer above the floating gate 282b. The source/drain 288b is disposed on the semiconductor layer 286b, wherein the source/drain 288b is electrically connected to the data pads 27 on both sides thereof. Similarly, in the fabrication of the above components, the process used can be a five-mask process, a four-mask process, or any known halogen array process. ^ Five mask process as an example, and please refer to FIG. 4, FIG. 4A and FIG. 4B at the same time, the floating gate 28 of the second switching element 28〇b is made by the first mask process (Metal 1) It is directly fabricated on the substrate 21〇. Then, a closed insulating layer is further formed on the substrate 210 to cover the outer gate 282b. Next, a semiconductor layer 28 is formed on the floating interpole 2 by a second mask process. Further, the third mask process is used to fabricate the data line 230, the data pad 270, and the source/drain metal layer (Metal 2), which is a homo-layer metal layer. Then, on the substrate 2i, the surface is covered with the layer, and then the opening 〇c is defined by the fourth mask process, that is, the gate insulating layer 2 and the protection 2 300 are disposed above the poor solder pad 27〇. Make an opening 3〇〇c and expose the information to Tan. A fifth photomask process is then applied to the poor solder fillet 270 and the data line 230 to form a conductive layer 31G (e.g., an oxide layer, ίτ〇). It is worth noting that the source/dot 2' tan pad shown in Figure 4, Figure 4 and Figure 4β is the same metal layer, so the source/drain and the pad 270 are electrically connected to each other. of. = In particular, 'When one of the data pads shown in Figure 4 is accumulated, this static electricity can be transferred from the (four) pad (10) to the source/drain 2 in the second sweat 280b. Then, the source /Coupling 1279920 17320twf.doc / y and the floating gate 282b can generate charge coupling effect, and the second switching element 28 〇 b is turned on. As a result, the static electricity accumulated on one of the data pads 27 can be conducted to the adjacent data line 23 through the semiconductor layer 286b of the second switching element 280b, so that static electricity does not accumulate in The data pad 270 is placed to avoid electrostatic damage in the vicinity of the data pad 270. Further, the source/drain 288b in the second switching element 280b may be disposed asymmetrically or symmetrically. The purpose, method, and effect of this setting have been described in the above description of the first switching element and will not be described in detail herein. In short, #=the second switching element 28Gb is disposed between the data pads 27c), and the source/poleless lion is asymmetrically arranged, except that the opening of the first switching element 280b can be faster, the conduction direction of the static electricity It can also be carried out by means of two-way circulation. In summary, the arrangement of the first switching element and the second switching element can be formed by the five masks (4) so that no additional step is required. In addition, the first switch tree and the second switch element are respectively disposed between two adjacent smatter pads and two adjacent f pads to accumulate static electricity on the pad or the data pad. The charge coupling effect occurring on the member and the 'or second switching element=, and the switching element and/or the second switching element are turned on. In this way, the reduction of electricity is excessively accumulated on the local broom pads and the data pads, thereby reducing electrostatic breakdown. The crystal array substrate is applied to a liquid crystal display 'μ has a better static protection effect · crystal difficulty = 4' will be obtained with 18 I27^m〇c/y. FIG. 5 illustrates a liquid crystal display according to a preferred embodiment of the present invention. Schematic diagram of the panel. This liquid crystal display panel 400 includes a color filter substrate 410, a thin film transistor array substrate 420, and a liquid crystal layer 430. The thin film transistor array substrate 420 is, for example, a thin film transistor array substrate 200' as shown in FIG. 2, and the liquid crystal layer 430 is disposed between the color filter substrate 41A and the thin film transistor array substrate 420. A common electrode is disposed on the color filter substrate 410 (c〇mm〇n

electrode)(未繪示)以及彩色濾光陣列層(c〇1〇r filter array)(未繪示),共用電極與薄膜電晶體陣列基板42〇 之晝素電極(未繪示)之間會形成一電場,而使得位在彩 色濾光基板410與薄膜電晶體陣列基板42〇之間的液晶分 子轉動,進而改變人射光的強度。另外,彩色遽光陣列層 使液晶顯示面板得以全彩化。並且,由於可以採用如 圖2所繪示之薄膜電晶體陣列基板2〇〇,因此,本發明之 液晶顯示面板400將具有良好的靜電防護能力。'Electrode) (not shown) and a color filter array layer (not shown), between the common electrode and the thin film transistor substrate 42 (not shown) An electric field is formed to rotate the liquid crystal molecules between the color filter substrate 410 and the thin film transistor array substrate 42, thereby changing the intensity of the human light. In addition, the color light-emitting array layer enables the liquid crystal display panel to be fully colored. Moreover, since the thin film transistor array substrate 2 as shown in Fig. 2 can be used, the liquid crystal display panel 400 of the present invention will have good electrostatic protection capability. '

綜上所述,本發明之薄膜電 示面板具有下列優點: 晶體陣列基板以及液晶顯In summary, the thin film display panel of the present invention has the following advantages: a crystal array substrate and a liquid crystal display

兩個資用分別設置在相鄰的兩個掃瞒焊塾與相鄰的 之間的第-開關元件與第二開關元件,所以 Γ 1累積在掃目苗焊墊或是資料焊塾時,第-PH 及/或第二開關元件將會開啟。藉此,靜 :二 ,苗線或相鄰的資料線之間傳導,而消除大 部區域累積而導致的靜電破壞現象。“ s“局 ⑺在有限的空間下’第—開關元件和第二開關元 19The two components are respectively disposed between the adjacent two broom pads and the adjacent first switch element and the second switch element, so that Γ 1 accumulates in the sweeping pad or the data pad, The first -PH and / or second switching element will be turned on. In this way, static: Second, the line between the seedlings or adjacent data lines, and eliminate the static damage caused by the accumulation of most areas. "s" bureau (7) in a limited space, the first - switching element and the second switching element 19

*1279920 17320twf.doc/y 件的源極/汲極是採用非對稱設置,所以當 — 焊墊或是資料焊墊上時U關元件與 == 用較快的速度開啟,而使靜電的傳導到鄰近的掃猫線或資 料線上。 ' (3)利用兩個並聯的第-開關元件或兩個並聯的第 二開關S件’將可以使靜電的傳導方向是以雙向流通的方 式而進行。 (4) 第一開關元件與第二開關元件可藉由習知的五 道光罩製程而製作,因此,並不需要增加額外的製程步驟。 (5) 將具有靜電防護能力的薄膜電晶體陣列基板應 用於液晶顯示面板時,由靜電累積所引起的靜電破壞現象 將可獲得改善,而使液晶顯示面板具有良好的運作性能。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1繪示為習知一種薄膜電晶體陣列基板的示意圖。 圖2繪示為本發明較佳實施例之一種薄膜電晶體陣列 基板的示意圖。 圖3繪示為圖2中之掃瞄焊墊在A區域的放大俯視示 意圖。 圖3A繪示為圖3中沿A-A,線之剖面示意圖。 圖3B繪示為圖3中沿B-B,線之剖面示意圖。 20 127觀doc/y 圖4繪示為圖2中之掃瞄焊墊在B區域的放大俯視示 意圖。 : 圖4A繪示為圖4中沿C-C’線之剖面示意圖。 : 圖4B繪示為圖4中沿D-D’線之剖面示意圖。 圖5繪示為本發明較佳實施例之一種液晶顯示面板的 示意圖。 【主要元件符號說明】 100、200 :薄膜電晶體陣列基板 • 110、210 :基板 112、212 :顯示區 114、214 :周邊線路區 120、220 :掃瞄線 130、230 :資料線 140、240 :晝素區域 150、250 :晝素單元 152、252 :薄膜電晶體 φ 154、254 ··晝素電極 160、260 ··掃瞄焊墊 170、270 :資料焊墊 192、292 :内部靜電防護環 194、294 :外部靜電防護環 280a、280a’ :第一開關元件 < 280b :第二開關元件 ^ 282a、282b ··浮置閘極 21 1279920 17320twf.doc/y 284 :閘絕緣層 286a、286b :半導體層 288a、288b :源極/汲極 300a、300b、300c :開口 310 :導電層 400 ·液晶顯不面板 410 :彩色濾光基板 420 :薄膜電晶體陣列基板 430 :液晶層 A、B :區域 A-A’、B-B,、C-C,、D-D,··剖面線 U、L2、L3、L4 ··接觸長度*1279920 17320twf.doc/y The source/drain is set asymmetrically, so when the pad or the data pad is on, the U-off component and == are turned on at a faster speed, so that the static conduction is Adjacent sweeping cat line or data line. (3) The use of two parallel-connected first switching elements or two parallel-connected second switching elements S will allow the conduction direction of the static electricity to flow in both directions. (4) The first switching element and the second switching element can be fabricated by a conventional five-mask process, and therefore, no additional process steps are required. (5) When a thin film transistor array substrate having electrostatic protection capability is applied to a liquid crystal display panel, electrostatic breakdown caused by static electricity accumulation can be improved, and the liquid crystal display panel has good operational performance. While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a conventional thin film transistor array substrate. 2 is a schematic view of a thin film transistor array substrate in accordance with a preferred embodiment of the present invention. 3 is an enlarged plan view showing the scanning pad of FIG. 2 in the area A. 3A is a schematic cross-sectional view taken along line A-A of FIG. 3. 3B is a cross-sectional view taken along line B-B of FIG. 3. 20 127 doc/y Figure 4 shows an enlarged plan view of the scanning pad of Figure 2 in the B region. 4A is a cross-sectional view taken along line C-C' of FIG. 4. 4B is a cross-sectional view taken along line D-D' of FIG. 4. FIG. 5 is a schematic diagram of a liquid crystal display panel according to a preferred embodiment of the present invention. [Description of main component symbols] 100, 200: thin film transistor array substrate • 110, 210: substrate 112, 212: display area 114, 214: peripheral line area 120, 220: scan line 130, 230: data line 140, 240 : halogen region 150, 250: halogen unit 152, 252: thin film transistor φ 154, 254 · 昼 electrode 160, 260 · scan pad 170, 270: data pad 192, 292: internal static protection Rings 194, 294: external static protection rings 280a, 280a': first switching element < 280b: second switching element ^ 282a, 282b · floating gate 21 1279920 17320twf.doc / y 284: gate insulating layer 286a, 286b: semiconductor layers 288a, 288b: source/drain electrodes 300a, 300b, 300c: opening 310: conductive layer 400. liquid crystal display panel 410: color filter substrate 420: thin film transistor array substrate 430: liquid crystal layer A, B : Area A-A', BB, CC, DD, · · Section line U, L2, L3, L4 · · Contact length

22twenty two

Claims (1)

127觀_ 十、申請專利範圍: h一種薄膜電晶體陣列基板,包括·· 具有一顯示區以及一周邊線路區; 夕數條知瞄線與多數條資料線,配 中該些掃晦線與該些資料線於將 :,上’其 素區域; ,‘、'員不£劃分成多數個晝 多數個畫素單元,分別配置於該些127 views _ 10, the scope of application for patents: h a thin film transistor array substrate, including · has a display area and a peripheral line area; eve number of lines and a number of data lines, with the broom line and These data lines are divided into: 'the prime area; ', ', 'members are not divided into a number of most of the pixel units, respectively, configured in these 内藉由該些掃瞄線及該些資料線:驅::-之- 夕數個掃瞄焊墊,配置於該周邊, 瞒焊墊電性連接至該些掃猫線^邊線邮内,且該些掃 多數個資料焊塾,配置於該周邊線路區内 料焊墊電性連接至該些資料線; 二貝 „一開關元件,配置於該周邊線路區内 於相郴一叆些掃瞄焊墊之間配置有至少—個二 各匕開關元件會與位於其兩側的該些掃料=The scanning lines and the data lines are provided by: the driving::--the plurality of scanning pads are arranged at the periphery, and the soldering pads are electrically connected to the scanning lines of the sweeping cat lines. And scanning the plurality of data soldering holes, the material soldering pads disposed in the peripheral circuit area are electrically connected to the data lines; and the second switching element is disposed in the peripheral circuit area Between the aiming pads, at least one of the two switching elements will be arranged with the scanning materials on both sides of the welding pad = 多數個第二開關元件,配置於該周邊線路區内, :相:2ί資料焊墊之間配置有至少-個第二開關元 牛,、中各弟一開關元件會與位於其兩側之該些資料 電性連接。 、 2·如申請專利範圍第丨項所述之薄膜電晶體陣列基 板,其中於相鄰二該些掃瞄焊墊之間是配置有兩個第一開 關元件。 3·如申請專利範圍第2項所述之薄膜電晶體陣列基 23 !279^ 板,其中該兩個第一開關元件是以並聯方式而設置。 4. 如申請專利範圍第1項所述之薄膜電晶體陣列基 ; 板,其中於相鄰二該些資料焊墊之間是配置有兩個第二開 關元件。 5. 如申請專利範圍第4項所述之薄膜電晶體陣列基 板,其中該兩個第二開關元件是以並聯方式而設置。 6. 如申請專利範圍第1項所述之薄膜電晶體陣列基 板,其中每一第一開關元件包括: B —浮置閘極,配置於該基板上; 一閘絕緣層,覆蓋該浮置閘極; 一半導體層,配置於該浮置閘極上方之該閘絕緣層 上;以及 一源極/汲極,配置於該半導體層上,其中該源極/汲 極會與位於其兩侧之該些掃猫焊墊電性連接。 7. 如申請專利範圍第6項所述之薄膜電晶體陣列基 板,其中該源極/汲極是非對稱地設置。 , 8.如申請專利範圍第6項所述之薄膜電晶體陣列基 板,其中該源極/汲極是對稱地設置。 9.如申請專利範圍第1項所述之薄膜電晶體陣列基 板,其中每一第二開關元件包括: 一浮置閘極’配置於該基板上, 一閘絕緣層,覆蓋該浮置閘極; 一半導體層,配置於該浮置閘極上方之該閘絕緣層 上;以及 24 1279920 17320twf.doc/y 一源極/::及極,配置於該半導體層上,其中該源極/汲 :極會與位於其兩侧之該些資料焊墊電性連接。 ; 1〇·如申請專利範圍第9項所述之薄膜電晶體陣列基 板,其中該源極/汲極是非對稱地設置。 U·如申請專利範圍第9項所述之薄膜電晶體陣列基 板,其中该源極/汲極是對稱地設置。 12·如申請專利範圍第1項所述之薄膜電晶體陣列基 • 板,其中每一晝素單元包括·· 一薄膜電晶體,配置於其中一晝素區域内;以及 a素電極,配置於其中一畫素區域内,並與該薄膜 電晶體電性連接。 、 13·如申請專利範圍第1項所述之薄膜電晶體陣列基 反’更包括多數個内部靜電防護環(inner guard , -置於4周邊線路區内,且位於該些掃瞄焊墊與該顯示區 ^間ft位於該些資料焊墊與該顯示區之間,該些内部靜 _ 甩防濩龟電性連接至該些掃瞄線與該些資料線。 Μ·如申請專利範圍第1項所述之薄膜電晶體陣列美 | 更包括多數個外部靜電防護環(outguardring),二 周邊線路區内,且位於該些掃崎墊與該基板外緣 靜資料焊墊與該基板外緣之間1些外部 邊衣为別电性連接至該些掃瞄線與該些資料線。 •種液晶顯不面板,包括: 一彩色濾光基板; 溥膜電晶體陣列基板,其是如申請專利範圍第工項 25 所述;以及 一液晶層,配置 列基板之間。 於該彩色濾、光基板與該_電晶體陣A plurality of second switching elements are disposed in the peripheral circuit region, and: phase: 2 λ data pads are disposed with at least one second switching element, and each of the switching elements is disposed on both sides thereof These materials are electrically connected. 2. The thin film transistor array substrate of claim 2, wherein two first switching elements are disposed between adjacent ones of the scanning pads. 3. The thin film transistor array substrate according to claim 2, wherein the two first switching elements are disposed in parallel. 4. The thin film transistor array substrate according to claim 1, wherein two second switching elements are disposed between adjacent data pads. 5. The thin film transistor array substrate of claim 4, wherein the two second switching elements are disposed in parallel. 6. The thin film transistor array substrate of claim 1, wherein each of the first switching elements comprises: B - a floating gate disposed on the substrate; a gate insulating layer covering the floating gate a semiconductor layer disposed on the gate insulating layer above the floating gate; and a source/drain disposed on the semiconductor layer, wherein the source/drain is disposed on both sides thereof The sweeping cat pads are electrically connected. 7. The thin film transistor array substrate of claim 6, wherein the source/drain is asymmetrically disposed. 8. The thin film transistor array substrate of claim 6, wherein the source/drain electrodes are symmetrically disposed. 9. The thin film transistor array substrate of claim 1, wherein each of the second switching elements comprises: a floating gate disposed on the substrate, a gate insulating layer covering the floating gate a semiconductor layer disposed on the gate insulating layer above the floating gate; and 24 1279920 17320 twf.doc/y a source/:: and a pole disposed on the semiconductor layer, wherein the source/汲: The pole will be electrically connected to the data pads on both sides of the pole. The thin film transistor array substrate of claim 9, wherein the source/drain is asymmetrically disposed. U. The thin film transistor array substrate of claim 9, wherein the source/drain is symmetrically disposed. 12. The thin film transistor array substrate according to claim 1, wherein each of the pixel units comprises a thin film transistor disposed in one of the halogen regions; and the a-electrode is disposed on In one of the pixel regions, and electrically connected to the thin film transistor. 13. The thin film transistor array base according to claim 1 further includes a plurality of internal electrostatic protection rings (inner guards, placed in the peripheral circuit area of the 4, and located in the scanning pads and The display area ft is located between the data pads and the display area, and the internal static 甩 甩 濩 is electrically connected to the scan lines and the data lines. The thin film transistor array of the above 1 includes a plurality of external electrostatic protection rings (outguardring) in the two peripheral circuit regions, and is located on the outer surface of the scanning pad and the outer edge of the substrate and the outer edge of the substrate. A pair of outer side garments are electrically connected to the scan lines and the data lines. • A liquid crystal display panel, including: a color filter substrate; a diaphragm film array substrate, which is applied as Patented at item 25; and a liquid crystal layer disposed between the column substrates. The color filter, the optical substrate, and the _ transistor array
TW94137110A 2005-10-24 2005-10-24 Thin film transistor array substrate and liquid crystal display panel TWI279920B (en)

Priority Applications (2)

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TW94137110A TWI279920B (en) 2005-10-24 2005-10-24 Thin film transistor array substrate and liquid crystal display panel
JP2005376128A JP2007123793A (en) 2005-10-24 2005-12-27 Thin film transistor array substrate and liquid crystal display

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WO2010029859A1 (en) * 2008-09-12 2010-03-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR102149626B1 (en) * 2008-11-07 2020-08-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Method of manufacturing a semiconductor device
CN110660824A (en) * 2018-06-29 2020-01-07 启耀光电股份有限公司 Electronic device and method for manufacturing the same
CN116417471A (en) * 2020-03-30 2023-07-11 厦门天马微电子有限公司 Array substrate, display panel and display device
CN116868049A (en) * 2022-01-07 2023-10-10 京东方科技集团股份有限公司 Display substrate, display device and crack detection method of display substrate

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