TWI278797B - Optical light valve - Google Patents
Optical light valve Download PDFInfo
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- TWI278797B TWI278797B TW91116375A TW91116375A TWI278797B TW I278797 B TWI278797 B TW I278797B TW 91116375 A TW91116375 A TW 91116375A TW 91116375 A TW91116375 A TW 91116375A TW I278797 B TWI278797 B TW I278797B
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1278797 五、發明說明(1) 【發明之應用領域】 本發明係關於_ 振光4于進方向的光學 【發明背景】 種光學式光閥,特別係指一種改變偏 式光閥。 訊 )子來 關1278797 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Field of Application of the Invention The present invention relates to the optical direction of the illuminating light 4 in the forward direction. [Inventive Background] An optical optical valve, in particular, a modified partial light valve. News)
DwW ί ί技Ϊ發展至今,-用高密度分波多工技術 f 賴♦二曰頻覓已成為主要的技術發展趨勢。但承載 ί Ϊ ^亡其倍數成長速度對管理訊號的網路節點(Ν〇ά6 汉,1 I,卻造成了沈重的負擔。傳統上要仰賴高速電 兀件作父換或路由等處理似乎無法達到要求。因此,未 趨勢疋希望能在節點上讓光訊號儘可能在光域 Optical Domain)作交換、路徑保護,及上、下路 Add & Drop) ’以増加處理速度,並保持光的通透性 Transparent)。於是,用於光域上做交換核心的光開 (或稱光閥),未來勢必扮演更重要的角色。 光開關(〇 P t i c a 1 S w i t c h)或光閥,係指使光訊號能 由一輸入埠(Port)切換至目的輸出谭之裝置。可應用於 光通訊網路節點的光交換連結(〇XC,Optical Cross Connect)、光塞取多工(〇ADM,Optical Add & Drop Multiplexer) 專糸統的全光交換核心(Switch Core) 技術,以完成錯誤回復(R e s t o r a t i ο η)、交換等功能。 為了要讓WD轉送裝置以一對一接續的方式擴展至不同地 點’需要有一個中繼站,來連接兩條以上WDM線路。「光 開關元件」可以在中繼站上,在不進行光電變換動作的情 況下(亦即不需將通過光纖的光信號轉換為電器信號)即DwW ί ί technology has been developed to the present day - using high-density multiplexer technology f ♦ 曰 曰 曰 has become a major technology development trend. However, the network nodes that carry ί 其 成长 成长 成长 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理 管理Meet the requirements. Therefore, there is no trend, we hope that the optical signal can be exchanged, path protected, and up and down on the optical domain as much as possible on the node to increase the processing speed and keep the light. Transparency). Therefore, the light-opening (or light valve) used for the exchange core in the optical domain is bound to play a more important role in the future. An optical switch (〇 P t i c a 1 S w i t c h) or a light valve is a device that enables an optical signal to be switched from an input port to a destination output. It can be applied to optical communication links (〇XC, Optical Cross Connect) of optical communication network nodes, and all-optical switching core (Switch Core) technology of optical add-on (ADM, Optical Add & Drop Multiplexer). To complete the error response (R estorati ο η), exchange and other functions. In order to allow the WD transfer device to expand to different locations in a one-to-one connection, a relay station is required to connect more than two WDM lines. The "optical switching element" can be placed on the relay station without performing a photoelectric conversion operation (that is, without converting the optical signal passing through the optical fiber into an electrical signal)
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1278797 五、發明說明(2) 可改變行進方向。沒有光開關元件的輔助,中繼站就必須 配置更多的機器以將光信號轉換為電信號,進行光電變^奐 動作。 、 目前技術已揭露多種關於光開關的設備,例如—種機 械式光開關,利用步進馬達(Step Motor)等機械動力移 動光纖、鏡面、稜鏡或其他元件以改變光行進路徑,其^ 點疋插入才貝失(Insert Loss)小、串音(Cross Talk)1278797 V. Description of invention (2) The direction of travel can be changed. Without the aid of optical switching elements, the relay station must be equipped with more machines to convert the optical signals into electrical signals for photoelectric conversion. At present, various technologies have been disclosed for optical switches, such as a mechanical optical switch, which uses a mechanical power such as a step motor to move an optical fiber, a mirror, a cymbal or other components to change the path of light. InInsert Loss is small, cross talk (Cross Talk)
低,但其存在有體積龐大、不易與其他光通訊元件整合, 及切換速度過慢等問題,已逐漸無法符合光通訊網路節點 處理效率高速化、高集積化的需求。 另一種光開關為微機電式(MEMS,Micro ElectroIt is low, but it has the problems of large size, difficulty in integration with other optical communication components, and slow switching speed. It has gradually failed to meet the requirements of high-speed and high-accumulation of optical communication network nodes. Another type of optical switch is microelectromechanical (MEMS, Micro Electro)
Mechanical System)光開關,亦即所謂的r Mirror型」 光,關元件’係指從光纖傳輸而來的入射光經由使用矽基 板等所製作的微小Mirr〇r反射出去,從而改變光的行進路 線、。大部份是以微小可轉動鏡面陣列架構為主,主要可區 ^為2 D或3 。2 D陣列型,其鏡子僅作簡易的上下運動。 田鏡子往下日t ’光可通過,而當站立則會反射光束到目的 出 相對地’⑽陣列型鏡子則可作任意方向的轉動。 通#鏡子陣列是配對以鏡面對鏡面相對而立,光線經由第 一組鏡子陣列的某一鏡面,再反射至另一組鏡子陣列預設Mechanical System) Optical switch, also known as r Mirror type "light, off element" means that incident light transmitted from an optical fiber is reflected by a tiny Mirr〇r made using a germanium substrate or the like, thereby changing the traveling path of the light. ,. Most of them are mainly micro-rotatable mirror array architecture, and the main area is 2 D or 3. 2 D array type, the mirror is only for simple up and down movement. The field mirror can pass through the next day, and when it stands, it will reflect the light beam to the destination. The (10) array mirror can be rotated in any direction. The mirror array is paired with the mirror facing the mirror, and the light passes through one mirror of the first array of mirrors and is reflected to another mirror array preset.
的鏡面,才反射到目的出口。所以,鏡子停滯位置必需被 控制的非常精準,诵當^ 兄了丨二# v々 月千逋书角度公差範圍要求到百萬分之一 又 、农大的父換容量為3 2 X 3 2,經由不同次陣列的 、、且a可達5 1 2 X 5 1 2。3 D理論上則可達上千琿。由於反射The mirror is reflected to the destination exit. Therefore, the position of the mirror stagnation must be controlled very accurately, 诵当^ 兄了丨二# v々月千逋书 angular tolerance range to one millionth, and the father’s father’s replacement capacity is 3 2 X 3 2, Through different sub-arrays, and a can reach 5 1 2 X 5 1 2 . 3 D theoretically can reach thousands of turns. Due to reflection
1278797 五、發明說明(3) 鏡有一定的運動距離,因此切換速度僅可達幾十毫秒 (m i 1 1 i s e c ο n d s)等級。由於設計上是以鏡子作機械動作 為主,長期的運動造成結構變形、材料受損,運動過程及 搬運等外加震動,均會降低其可靠度,也是亟待克服的技 術課題。 另一種所謂「Bubb 1 e型」光開關元件是在光信號行進 的路徑上,設置溝槽,使其產生空氣,而讓光的折射率產 生變化,從而使得光信號全部反射到安排的路徑上。由於 此方法只是在瞬間使其產生氣泡,無須任何的機構組件, 因此此方法強調其擁有較好的耐久性。而由於其空氣發生 的時間相當高速,可達2 ms程度,因此也可提高開關的速 度。但其應答速度與光速相較,毫秒等級的應答速度尚具 有極大的改進空間。 由以上的分析,光開關元件不論在應答速度(提升至 n s程度)或可靠度皆有亟待克服或改進的技術課題。 【發明之目的及概述】 綜上所述,本發明的主要目的在提供一種高應答速度 (約10ns)的光學式光閥,藉由施加一外加電壓於一電光 材料’改變通過電光材料偏振光的偏振方向’使其於'一透 明材質處產生反射或穿透,達到控制光的行徑方向的目 的,藉以提高應答速度。本發明以加電壓的方式來改變極 化方向,以電訊號的方式來改變光的行進方向,與機械式 或微機電型的光開關相較,具有更快的應答速度(約1 0ns1278797 V. INSTRUCTIONS (3) The mirror has a certain moving distance, so the switching speed can only reach tens of milliseconds (m i 1 1 i s e c ο n d s). Because the design is based on the mechanical action of the mirror, long-term motion causes structural deformation, material damage, motion and handling, and other vibrations, which will reduce its reliability, and it is also a technical problem to be overcome. Another so-called "Bubb 1 e-type" optical switching element is a path in which an optical signal travels, and a groove is provided to generate air, and the refractive index of the light is changed, so that the optical signal is totally reflected to the arranged path. . Since this method only produces bubbles in an instant, no mechanical components are required, so this method emphasizes that it has better durability. Since the air is generated at a relatively high speed for up to 2 ms, the speed of the switch can also be increased. However, the response speed is comparable to the speed of light, and the response speed of the millisecond level still has a great room for improvement. From the above analysis, optical switching elements have technical problems to be overcome or improved regardless of the response speed (up to n s degree) or reliability. OBJECT AND SUMMARY OF THE INVENTION In summary, the main object of the present invention is to provide an optical light valve of high response speed (about 10 ns), which is characterized by applying an applied voltage to an electro-optic material to change the polarization of light passing through the electro-optic material. The direction of polarization 'is caused to reflect or penetrate at a transparent material to achieve the purpose of controlling the direction of light, thereby increasing the response speed. The invention changes the direction of polarization by applying voltage, and changes the traveling direction of light by means of electrical signals, and has a faster response speed (about 10 ns) compared with a mechanical or MEMS type optical switch.
(4)1278797 五、發明說明 本發 閥,習知 調整的時 的角度, 明的另 技術所 候,可 在光學 揭露的 月皂無法 上來說 ,將電 電光材 使其於一透明 於一最 學誤差 誤差, 明所揭 目的在於提供 露的光開關架構 一外加電壓於一 振方向, 質亦固定 佳,將光 而產生的 本發 佳角度 的程度 因此具 露以光 當一極化光穿透一電光 以改變光的極化方向。 分光鏡入射時,會有反 振方向平行入射面(p_ Brewster’s Angle) 材質,但當光偏振方向 大部分的光將反射出去 的偏振方向,於透明材 光的行徑方向,藉此方 (optical switch) 〇 為達上述目的,本 包括有一電光材料以及 分光鏡;其中電光材料 微機電型光 回復至原來 ,即是非常 光材料固定 料,改變通 材質處產生 ’使得偏極 減至最低, 有較高的可 學的方法來 材料時,可 不同極化方 射和透射透 •偏振光), 時,則大部 垂直於入射 。是故藉由 質處產生反 式可以用來 種高可靠度的 開關,其反射 的角度,即使 大的誤差。本 在同一位置, 過電光 反射或 光之反 避免因 靠度。 製作光 施加電 向的偏 明材質 入射角 分的光 面時( 改變電 射或穿 當作光 材料極 穿透, 射率與 為調整 開關, 壓於電 極光經 的情況 為一布 將會穿 S-偏振 壓來改 透,因 的開關 光學式光 鏡在來回 相差些微 發明所揭 藉由施加 化光的偏 而透明材 穿透率最 反射光鏡 其概念是 光材料上 由偏振光 ,如光偏 魯斯特角 透此透明 光),則 變極化光 而可控制 發明所揭露光學式光閥其 一光學多層薄膜構成 外侧包覆有一可二3之千 ^ ^ 可導電之電 主要構成 板偏振光 極薄獏,(4) 1278797 V. Inventive description The valve of the present invention, the angle of the conventional adjustment, the other technology of the Ming, can be used in the optical disclosure of the monthly soap, the electric light material is made transparent The error of the error is clearly revealed by the exposed optical switch structure. The applied voltage is in the direction of the vibration, and the quality is also fixed. The degree of the good angle of the light generated by the light is thus exposed to light as a polarized light. An electric light is transmitted to change the polarization direction of the light. When the beam splitter is incident, there will be a parallel incident surface (p_ Brewster's Angle) material, but when the light polarization direction is mostly reflected, the polarization direction will be reflected in the direction of the transparent material light, thereby (optical switch) In order to achieve the above purposes, the present invention includes an electro-optic material and a spectroscope; wherein the electro-optical material of the electro-optic material returns to the original, that is, the optical material is fixed, and the change of the material is generated to minimize the polarization. Highly achievable methods for materials that can be polarized with different polarizations and transmitted through polarized light, when they are mostly perpendicular to the incident. Therefore, the inverse of the mass can be used to produce a high-reliability switch with an angle of reflection of even large errors. In the same position, the over-light reflection or the light is reversed to avoid the dependency. When making the light surface of the incident angle of the polarized material to which the light is applied (changing the electric radiation or wearing as the light material, the transmittance is adjusted to the switch, and the pressure is applied to the electrode. S-polarization pressure is used to change through, because the switch optical optical mirror is different in the back and forth. The micro-invention is revealed by the application of the light. The transparency of the transparent material is the most reflective light. The concept is that the light material is polarized, such as The optically polarized light passes through the transparent light), and the polarized light is changed to control the optical light valve disclosed in the invention. An optical multilayer film is formed on the outer side of the optical cladding. The plate is extremely thin,
第7頁 參 ^278797 五、發明說明(5) 一Γ:電Λ於Λ電擊薄膜時,ρ極化光將穿透該 力42=上自該電光材料反射,當施加-外 電光ίΐίΓ ’該ρ極化光會變成s極化光並自該 料2 化光會轉變〇極化光穿透該電光材 光材枓夕;夕二潯5構成之平板偏振光分光鏡,置於該電 先:枓之另:側,當該ρ極化光以布魯斯特角 传J、ntWAngle)人射於該光學多層薄膜時,會以最 ί 2 %學多層薄膜’當該s極化光以布魯斯特 f s Angle)入射於該光學多層薄膜時,會以 取么反射率反射至欲改變之行徑方向。 ^本發明的特徵與實作’兹配合圖示作最佳實施例 存細自兄明如下。 【發明之詳細說明】 本务明所揭.路的光開關,係外加電壓於一電光材料 (E led Optical Substance),使得穿透電光材料的 光波改變,、極化方向,即從p—極化光轉變成s—極化光或從 S-極化?,,成P—極化光,再透過—光學多層薄膜組成之 偏振光^光鏡、,使得s—極化光可以完全的反射或讓卜極化 光兀王牙,士達到改變光傳輸方向的目的。當電光材料沒 有外加電壓時,其極化方向不會改變,光束通過電光材料 時還是原來的極化光。 ^ 如「、第1圖」所示,為本發明的架構示意圖,包括有 電光材Ί 11電光材料11的材質可為非對稱性的電光晶 體,其材貝可能為KDP類型鐵電(ferroelectrics)材料,Page 7 Ref. 278797 V. INSTRUCTIONS (5) One Γ: When the electric shock is applied to the electric shock film, the ρ polarized light will penetrate the force 42=reflected from the electro-optic material, when the external light is applied The ρ-polarized light will become s-polarized light and will be converted from the material 2, and the 〇polarized light will penetrate the electro-optic material, and the slab polarized beam splitter composed of the 浔2浔5 will be placed in the electric : 枓 另 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : When fs Angle) is incident on the optical multilayer film, it is reflected by the reflectance to the direction of the track to be changed. The features and implementations of the present invention are shown in the drawings as a preferred embodiment. [Detailed Description of the Invention] The optical switch of the road is an externally applied voltage to an electro-optic material (E led Optical Substance), so that the light wave that penetrates the electro-optic material changes, and the polarization direction, that is, from the p-pole Is the converted light converted into s-polarized light or from S-polarized? , into P-polarized light, and then through the optical multi-layer film composed of polarized light ^ Mirror, so that s - polarized light can be completely reflected or let the polarization of the light 兀 兀 王 王 王the goal of. When the electro-optic material has no applied voltage, its polarization direction does not change, and the original polarized light is transmitted when the beam passes through the electro-optic material. ^ As shown in "Figure 1," is a schematic diagram of the architecture of the present invention, including electro-optic material Ί 11 electro-optic material 11 may be an asymmetrical electro-optic crystal, the material may be KDP type ferroelectrics material,
第8頁 1278797 五、發明說明(6) 如磷酸二氣卸(Potassium Dideuterium Phosphate, KD*P,分子式為 KD2P0 4)、填酸二氫舒(Potassium Dihydrogen Phosphate,分子式為 KDP(KH2P0 4))、鱗酸 二氫銨(Ammonium Dihydrogen Phosphate, ADP,分子 式為ΝΗΙΡΟΟ 、砷酸二氫鉀(KDA,分子式為KH2As04) 以及磷酸鈦氧鉀(KTP,分子式為KTi0P04)等。 或如鈦#5 礦鐵電材料(perovskite Ferroelectrics ),如鈦酸鋇(BaTiOO 、KTN (Potassium TantalitePage 8 1278797 V. Description of invention (6) For example, Potassium Dideuterium Phosphate (KD*P, molecular formula is KD2P0 4), Potassium Dihydrogen Phosphate (Molecular Formula KDP (KH2P0 4)), Ammonium Dihydrogen Phosphate (ADP), the molecular formula is ΝΗΙΡΟΟ, potassium dihydrogen hydride (KDA, molecular formula is KH2As04) and potassium titanyl phosphate (KTP, molecular formula is KTi0P04), etc. or such as titanium #5 mine iron Perovskite Ferroelectrics, such as barium titanate (BaTiOO, KTN (Potassium Tantalite)
Niobate)、以及鈦酸鉀(Potassium Tatanate)等;或如 透明電光陶瓷,例如PLZTXPbH^UymiUD。 或如鎢青銅類(Tungsten-bronze-type)結構:如鈮酸鋇 (SBN,分子式為Sr 5—xBaxNb1G〇30)、鈮酸鋇鈉(BNN,八、早。 式為Ba“xNa2七Nb10O30)、鈮酸鋇(BN)、 刀 (KLN,分子式為 K6 Li Μκ η λ , Τ ^Niobate), potassium oxychloride (Potassium Tatanate), etc.; or as a transparent electro-optic ceramic, such as PLZTXPbH^UymiUD. Or such as Tungsten-bronze-type structure: such as bismuth citrate (SBN, molecular formula is Sr 5 - xBaxNb1G 〇 30), sodium citrate citrate (BNN, eight, early. Formula is Ba "xNa2 seven Nb10O30) , bismuth citrate (BN), knife (KLN, molecular formula is K6 Li Μκ η λ , Τ ^
LlNb〇3)、鈮酸鉀(分子式為〇b〇3)、鈕酸鋰刀子式為 Tantalate,分子式為 UTa〇3> 等晶體。、Llthium 另了種可作為電光材# u的材質為 (birefringence)例如液 丨耵孓材枓 液晶轉向,以轉向後的折射率變^3化’改變光…&加一電壓使 上述之非對稱的電光材有^方向。 薄膜12,電極薄膜12的材料必須f卜二=3二透明的電極 波可以通過,不同波長的光、二 末傳輪光訊號的弁 紅外光(其波長為1 30 0nm)為例須的電極薄膜,以 摻雜三或五族雜質的石夕薄膜或摻雜石夕雜質;!2之材質可為 、、一、五族半導 五、發明說明(7) 體薄膜,如神化鎵、鱗化鋼 電極薄膜12。 寺 以使仔紅外光可以穿透此 其他可以用來作為電極 (I TO )、氧化銦鋅(1^ 膜1 2的材料有氧化銦錫 (FTO,SnO摻雜氟原子)等乳化錫(T0, Sn〇2)及氧化錫氟 束當作透明電極。 、可分別應用於其他波長的光 係數r,光材料u的電光 況下,高電光係數的電光材二:;m:屡相同的情 方式,可使通過之偏極光化;電J p p極化k成s極化光或s極化變成m化光。°文亦 在電光材料11的另一側設置有一透 材質上鍍有光學多層膜22,成為一偏;=以2巧明 射7,450’且該透明材質21固定為βΚ7(折射兄率田人 η-1.517),則光學多層膜22可由nL=138(氟化錯, iiUHMg〇)重複鑛膜堆疊而成,上述之45 0入射角i 念斯特角,係與透明材質之材料以及光學多層膜之: 吳^關,其特性是當Ρ極化光(平行平板偏振光&鏡 入射面時),P極化光光會穿透上述之光學多層薄膜J1 =偏振光分光鏡20,而當偏極光為对亟化光時(垂直於^ ,振光分光鏡20入射面)則會反射。偏振光分光鏡2〇之^且 成材料係對S極化光之吸收率最小,反射率最大’。 、、’ 偏振光以不同的角度入射於光學多層膜2〇時,偏振光 1278797 五、發明說明(8) 會產生不同程度的反射或穿透,因此調整該角度可使反射 (S極化光)與穿透(p極化光)的效率最佳,亦即達到完全穿 透或完全反射的效果。也就是說,當偏振光以布魯斯特角 入射於偏振光分光鏡時2 0時,P極化光將完全穿透,s極化 光將完全反射。布魯斯特角與光學多層薄膜組成之偏振光 分光鏡20的材料折射率有關,如以折射率η=1· 517(ΒΚ7)透 明材質,ηΗ=2· 35(ZnS)及nL=l · 35(冰晶石)為例,得其入射 布魯斯特角0 =50· 50。因此當選定最佳的電光材料^與最 佳組成偏振光分光鏡2 0的光學多層膜2 2的材料時,闲^雪 光材料1 1與偏振光分光鏡20以及其布魯斯特角固 ^ 藉由外加電壓於電光材料丨丨以控制光的行徑方 高應答速度以及可靠度的目的。 達到挺 以KDP材料的電光材料為例,τ 63=1〇 6χΐ〇丨 η〇=1· 51,λ G=54 6· 1 nm,得半波長電壓 u 半波長電壓可使光改變π相位差,因而使 7·6χ1〇ν’ 變為S極化。 從偈振先之ρ極化 偏振光分光鏡20除了以複數層光學 一薄片狀之透明材質形成外, _;,重设鍍膜於 第3圖所示。其操作原理與上述之多層膜'可為稜鏡型,如 光鏡相同。 、籌成之偏振光分 因此,將此光開關單元組成一陣 40 0 0x40 0 0陣列),在陣列中將盥 ^ ^為hi陣列到 光開關施加-電壓,即可決定:訊要徑有關的 續請參考「第2圖」,為本發明光^關傳之 1=^。LlNb〇3), potassium citrate (molecular formula: 〇b〇3), lithium knives are Tantalate, and the formula is UTa〇3> Llthium Another kind of material that can be used as electro-optic material #u is (birefringence) such as liquid coffin 枓 liquid crystal steering, and the refractive index after turning changes to change the light... & add a voltage to make the above Symmetrical electro-optic materials have a ^ direction. The film 12 and the material of the electrode film 12 must pass through the electrode wave of the second and third transparent electrodes, and the electrodes of different wavelengths and the infrared light of the second-passing optical signal (the wavelength of which is 1300 nm) are used as an example electrode. Thin film, doped with three or five kinds of impurities, or doped with Xiyang impurities; The material of 2 can be, and the first and fifth family semi-conducting. 5. Description of invention (7) Body film, such as demagnetized gallium, squamous steel electrode film 12. The temple allows the infrared light to penetrate the other emulsified tin (T0) such as indium tin oxide (FTO, SnO-doped fluorine atom) which can be used as an electrode (I TO ) or indium zinc oxide (1^ film 12). , Sn〇2) and tin oxide fluorine beam as transparent electrodes. They can be applied to the optical coefficient r of other wavelengths respectively. Under the electro-optic condition of optical material u, the electro-optical material with high electro-optic coefficient is: m: the same situation In a way, the polarized light can be passed through; the electric J pp is polarized into s-polarized light or the s-polarized light is converted into m-light. The text is also provided on the other side of the electro-optic material 11 with a transparent material coated with optical multilayer. The film 22 becomes a bias; = 2, 450' is used as the 2, and the transparent material 21 is fixed as βΚ7 (refractive brother η-1.517), and the optical multilayer film 22 can be nL=138 (fluorinated, iiUHMg〇) Repeated ore film stacking, the above 45 0 incident angle i Nernst angle, with transparent material and optical multilayer film: Wu ^ Guan, its characteristic is when Ρ polarized light (parallel plate polarization When the light & mirror entrance surface, P-polarized light will penetrate the above-mentioned optical multilayer film J1 = polarized beam splitter 20, and when polarized light When the light is dimming (perpendicular to ^, the incident surface of the vibrating beam splitter 20), it is reflected. The polarizing beam splitter 2 has the smallest absorption rate and the highest reflectivity for the S-polarized light. , 'When polarized light is incident on the optical multilayer film 2 at different angles, the polarized light 1278797 V. The invention description (8) will produce different degrees of reflection or penetration, so adjusting the angle can make the reflection (S-polarized light) The efficiency with penetration (p-polarized light) is optimal, that is, the effect of full penetration or complete reflection is achieved. That is, when polarized light is incident on the polarizing beam splitter at Brewster's angle of 20, P pole The illuminating light will be completely penetrated, and the s-polarized light will be completely reflected. The Brewster angle is related to the refractive index of the material of the polarizing beam splitter 20 composed of the optical multilayer film, such as a transparent material having a refractive index η=1· 517 (ΒΚ7). For example, ηΗ=2·35(ZnS) and nL=l·35 (cryolite) have an incident Brewster angle of 0 = 50·50. Therefore, when the best electro-optic material is selected and the optimal composition of the polarizing beam splitter is selected When the material of the optical multilayer film 2 2 is 20, the leisure light material 1 1 and the polarizing beam splitter 20 and its Brewster angle ^ by applying a voltage to the electro-optic material 丨丨 to control the light path height response speed and reliability of the light. To achieve an electro-optic material with KDP material as an example, τ 63 = 1 〇 6 χΐ〇丨η〇=1· 51, λ G=54 6· 1 nm, the half-wavelength voltage u half-wavelength voltage can change the light by π phase difference, thus making 7·6χ1〇ν′ into S-polarization. First, the ρ-polarized polarizing beam splitter 20 is formed by a transparent material of a plurality of layers of optical sheets, and the plating film is shown in Fig. 3. The principle of operation is the same as that of the above-mentioned multilayer film ', which is the same as the light microscope. Therefore, the polarized light component is formed, so that the optical switch unit is formed into a matrix of 40 0 0x40 0 0), and the voltage is applied to the optical switch in the array, and the voltage is applied to the optical switch to determine the signal path. Please refer to "2nd picture" for the continuation, which is 1=^ of the invention.
第11頁 1278797 I五、發明說明(9) 例,為一 3 X 4陣列的光閥,其中1 〇 &至i 〇 1為上述之光開關 元件’ 3 0 a至3 0 c為光訊號接收器(通常為光纖),3 〇 3為接 收反射自1 〇 a、1 0 b、1 0 c、1 0 d的光線,3 〇 b為接收反射自 1 0 e、1 〇 f、1 0 g、1 0 h的光線,3 0 c為接收反射自1 〇 i、 1 0 j、1 0 k、1 0 1的光線’ 4 0 a至4 0 d為傳輸光束中的偏極 光。如圖所示,以偏極光40a而言,若光開關10a、1〇e、 及1 0 i沒有施加一外加電壓,則P極化光則會繼續以原來的 方向前進,若施加一外加電壓於光開關1 〇a、1 〇e、及1 〇 i 其中之一,例如圖示中施加於光開關1 〇 e,則偏極光4 〇 a將 會轉變成S極化光,而由光訊號接收器3 〇 b接收,以改變光 的傳輸路徑。同樣的,若欲使偏極光4 〇以文變傳輸方向至 光訊號接收器3 0 a所在的傳輸方向,則對光開關丨0 c施加一 外加電壓,使得偏極光4 0 0之p極化光轉變成8極化光。 若偏極光4 0 b與4 0 d改變傳輸方向至光訊號接收器3 0 c 所在的位置,則對光開關1 〇 j及1 〇丨施加一外加電壓,即可 改變其傳輸的方向。 【發明之功效】 本發明之所揭露的光學式光閥,藉由改變電壓來改變 極化光的偏振方向,使得p極化光或s極化光產生反射或穿 透的現象’以控制光的行徑方向,具有下列功效: 1 ·以外加電壓的方式改變光的行進方向,可大幅提升 應答速度至10ns。 2 ·僅以外加電壓以改變光的行徑路徑,不需改變光鏡 的的角度,可以大幅減少誤差,提高可靠度。Page 11 1278797 I5, invention description (9) For example, a 3 X 4 array light valve, wherein 1 〇 & to i 〇 1 is the above optical switching element ' 3 0 a to 3 0 c is an optical signal Receiver (usually fiber), 3 〇3 for receiving light reflected from 1 〇a, 1 0 b, 1 0 c, 10 0 d, 3 〇 b for receiving reflection from 10 0, 1 〇 f, 1 0 g, 10 h light, 3 0 c is the light reflected from 1 〇i, 1 0 j, 1 0 k, 1 0 1 ' 4 0 a to 4 0 d is the polarized light in the transmitted beam. As shown in the figure, in the case of the polarized light 40a, if the applied voltage is not applied to the optical switches 10a, 1〇e, and 10i, the P-polarized light continues to advance in the original direction, if an applied voltage is applied One of the optical switches 1 〇a, 1 〇e, and 1 〇i, for example, is applied to the optical switch 1 〇e, and the polarized light 4 〇a will be converted into S-polarized light and received by the optical signal. Receiver 3 接收b receives to change the transmission path of the light. Similarly, if the polarization light is to be transmitted to the transmission direction of the optical signal receiver 30 a, the applied voltage is applied to the optical switch 丨0 c to make the polarization of the polarized light 4 0 0 . The light is converted into 8 polarized light. If the polarized light 4 0 b and 40 d change the transmission direction to the position where the optical signal receiver 3 0 c is located, an applied voltage is applied to the optical switches 1 〇 j and 1 , to change the direction of transmission. [Effects of the Invention] The optical light valve disclosed in the present invention changes the polarization direction of polarized light by changing the voltage, so that p-polarized light or s-polarized light is reflected or penetrated to control light. The direction of the path has the following effects: 1 · The way of applying the voltage changes the direction of travel of the light, which can greatly increase the response speed to 10 ns. 2 · Only add voltage to change the path of light. It is not necessary to change the angle of the light mirror, which can greatly reduce the error and improve the reliability.
第12頁 1278797 五、發明說明(ίο) 雖然本發明以前述之較佳實施例揭露如上,然其並非 用以限定本發明,任何熟習相像技藝者,在不脫離本發明 之精神和範圍内,當可作些許之更動與潤飾,因此本發明 之專利保護範圍須視本說明書所附之申請專利範圍所界定 者為準。The present invention is not limited to the scope of the invention, and The scope of patent protection of the present invention is defined by the scope of the appended claims.
第13頁 1278797 圖式簡單說明 第1圖係為本發明之光學式光閥之架構示意圖; 第2圖係為本發明之光學式光閥之較佳實施例;以及 第3圖係為本發明之光學式光閥之平板偏振光分光鏡之另 一較佳實施例。 【圖示符號說明】 10a 光開關 10b 光開關 10c 光開關 10d 光開關Page 13 1278797 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of an optical light valve of the present invention; Fig. 2 is a preferred embodiment of the optical light valve of the present invention; and Fig. 3 is a view of the present invention Another preferred embodiment of a plate polarized beam splitter for an optical light valve. [Description of symbols] 10a optical switch 10b optical switch 10c optical switch 10d optical switch
1 0 e 光開關 1 0 f 光開關 10g 光開關 10h 光開關 I 0 i 光開關 10 j 光開關 10k 光開關 101 光開關 II 電光材料 12 電極薄膜 20 偏振光分光鏡1 0 e optical switch 1 0 f optical switch 10g optical switch 10h optical switch I 0 i optical switch 10 j optical switch 10k optical switch 101 optical switch II electro-optic material 12 electrode film 20 polarized beam splitter
21 透明材質 22 光學多層膜 30a 光訊號接收器 30b 光訊號接收器21 Transparent material 22 Optical multilayer film 30a Optical signal receiver 30b Optical signal receiver
第14頁 1278797Page 14 1278797
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