TWI275774B - Edge defect inspection apparatus - Google Patents

Abstract

An edge defect inspection apparatus includes: an oval mirror which has a mirror surface provided on its inside and an opening to insert an object to be inspected at its apex portion; an irradiation portion which irradiates coherent light to an edge of the object located near a first focus position in the oval mirror; a light detection portion which is located at a second focus position in the oval mirror; and light shielding means which shields low-ordered diffracted light regularly reflected. The irradiation portion can be driven in the thickness direction of the object by movement means and can irradiate different irradiation areas at the edge of the object in the thickness direction.

Description

1275774 IX. Description of the Invention: [Technical Field] The present invention relates to an end portion inspection device for optical inspection of an object to be inspected. [Previous technique] It is proposed to use an ellipse for an end injury inspection device for inspecting an end portion of a narrow end portion of a peripheral edge portion of a tantalum wafer which is broken, defective, or scratched. Mirror inspection device. For example, it has been proposed that the mirror (four) of the elliptical mirror is provided with a light absorbing member, and the light absorbing member absorbs the low-order diffracted light of the forward reflected light, and the light detecting portion provided at the second focus position detects only the cause. A device that produces a high-order diffracted light with a diffuse reflection at the end (for example, see Patent Document). Further, it has been proposed to provide a second light detecting unit around the object to be inspected at the second focus position, in addition to the ith light detecting unit at the second focus position. One can correspond to longitudinal damage and lateral damage (Chen Xin • Document 2). π 〜 'the end injury inspection devices' are not able to detect the intersection and size of the μ side by the entire circumference of the end portion. Further, although the type of damage of a certain degree can be estimated by the intensity of the first portion of the photosensitive portion, it is limited. 。 识 详细 详细 利 利 利 ] ] 3 3 3 3 3 3 3 3 3 3 3 _ _ _ _ _ _ _ _ _ _ _ 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 317 The present invention is designed to detect the end scar of the object to be inspected in view of the above situation;: purely out of the moon ^ ^ , . Β ^^ 砰 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在 在End injury inspection device. (Means for solving the problem)

The present invention is an end injury inspection device, which has: on the inside: "the round mirror; the vicinity of the first focus position disposed in the elliptical mirror = the end of the inspection object is illuminated by the same dimming ((3) herent The light-emitting portion is disposed at the second focus position of the elliptical mirror to detect that the end portion of the object to be inspected is irradiated with the light, and that the elliptical mirror is reflected by the elliptical mirror to reach the second focus position. a light-detecting portion for diffracting light; and a light-shielding means for shielding low-order diffracted light that generates forward reflection in the upper, lower, and lighter features. The feature 4: the light-emitting portion is inspected by a moving means The thickness direction of the object is free to set the position of the light-emitting portion

>, and the above-mentioned same dimming light is applied to the end portion of the object to be inspected to have a different irradiation range in the thickness direction. According to the end injury inspection device of the present invention, since the same dimming light can be irradiated to the irradiation range of the thickness direction of the end portion of the inspection object by the moving means, the corresponding detection can be detected by the light detecting portion. The intensity of the range of diffracted light is detected, and the detailed position of the damage in the thickness direction and the size of the damage are detected. Further, the present invention provides an end injury inspection apparatus comprising: an elliptical mirror having a mirror surface on the inner side; and an end portion of the inspection object disposed adjacent to the first focus position 317320 6 -1275774 disposed in the elliptical mirror The light-emitting portion is disposed at the second focus position of the elliptical mirror, and is configured to detect the end portion of the object to be inspected by the illumination and the reflection at the elliptical mirror to reach the focus position of the brother 2 The light-emitting light detecting unit 丨 and the light-shielding means for shielding the low-order diffracted light that causes forward reflection in the diffracted light, wherein a plurality of the light-emitting portions are provided at different positions in the thickness direction of the object to be inspected, Each of the light-emitting portions is irradiated to the end portion of the object to be inspected in a different irradiation range in the thickness direction from the different directions. According to the end damage inspection device of the present invention, since the light emission portion can be irradiated to the end portion of the inspection object in the thickness direction by the plurality of light-emitting portions, the irradiation range can be detected by the light detecting portion. The intensity of the diffracted light of each of the light-emitting portions can thereby detect the position of the damage in the thickness direction and the size of the damage. Further, in the end injury inspection device according to the above aspect of the invention, the hair-spring portion may include: a light source that emits the same dimming light; and an optical effect of the same dimming light that is emitted from the light source, and the irradiation range is The light collecting means for reducing the thickness direction of the above-mentioned portion of the object to be inspected is irradiated. According to the end injury inspection device of the present invention, since the irradiation range of the same dimming light that is irradiated to the end portion of the inspection 2 can be reduced in the thickness direction, the light-emitting portion is irradiated in the thickness direction at a position that is not $. The difference in intensity of the diffracted light detected by the photodetecting portion due to the position of the damage in the thickness direction and the size of the damage is accurately detected. Further, in the end injury inspection device according to the above aspect of the invention, the light-emitting portion 317320 7 ! 275774 can illuminate the same dimming light of a different wavelength. According to the end injury inspection device of the present invention, the intensity of the refracted light is detected by the light detecting portion transmitting various kinds of coherent light of different wavelengths, and fine damage can be detected, and absorption can be performed in the same wavelength of the same wavelength. Damage that is large and undetectable, and that produces diffuse reflection only at the same wavelength of the same dimming. (Effects of the Invention) According to the present invention, since the irradiation range of the same dimming light emitted by the illuminating illuminator can be changed in the thickness direction of the object to be inspected, the detailed position of the damage in the thickness direction of the object to be inspected and the size of the damage can be specified. . In addition, by the same dimming of different wavelengths, it is possible to detect subtle damage, as well as damage that cannot be detected due to large absorption of the same dimming in the wavelength, or to generate diffuse reflection only under the same wavelength of the same dimming. Damage, thus enabling a fine end injury check. [Embodiment] (1st Embodiment) / 1 to 10 shows the first embodiment of the present invention. The second section shows a longitudinal sectional view of the end injury inspection device in a vertical plane, and the second figure shows a longitudinal sectional view of the end injury inspection device cut in a horizontal plane. Fig. 3 is a view showing the end portion of the inspection object illuminated by the light-emitting portion 3. Further, the 'f 4 diagram and the sixth diagram show an enlarged front view of the end portion of the object to be illuminated by the light-emitting portion. Figs. 5 and 7 are enlarged views. The f 8 figure shows a result of the result detected by the detecting unit when the irradiation range is changed in the thickness direction, and the figure 9 shows the wavelength of the same dimming light irradiated by the change of 317320 8 -1275774 by An example of the result of the detection by the light detecting unit, and FIG. 10 is an example of a result detected by the light detecting unit when the irradiation range is changed in the thickness direction by the same dimming of a plurality of wavelengths. figure. As shown in Fig. 1 and Fig. 2, the end injury inspection device includes: a mirror surface 2b on the inner side 2a, and an elliptical mirror 2 in which the inspection object 3 can be inserted into the notch 2d of the f point portion 2c; And the end portion 3a of the inspection object 3 disposed near the first focus position A of the elliptical mirror 2, the light-emitting portion 4 that emits the same light, and the light detecting portion that is disposed at the "th" and the position b of the elliptical mirror 2 5. The end injury inspection device further includes a holding portion 6 that can hold the inspection object 3 and hold it, and can be oriented in the thickness direction of the inspection object 3 around the i-th focus position A of the elliptical mirror 2 a moving means 7 for rotating the light; and a light blocking means 8 provided in the elliptical mirror 2. The object 3 to be inspected is, for example, a plate-shaped germanium wafer or a semiconductor wafer. As shown in Fig. 3, the light-emitting portion 4 is provided with: The light source of the same dimming light, the original 9; and the light collecting means for optically illuminating the same dimming light c, the light source 9 is, for example, laser light, and the wavelength can be freely adjusted. More specifically, He-Ne can be used privately. Laser and semiconductor lasers, and switch multiple wavelengths of various wavelengths 'so you can freely adjust the wavelength. Or also In addition, the concentrating means 10 is a thickness at the end 3 of the object to be inspected 3 when the same portion of the object to be inspected 3 is injected with the same dimming ray from the light source 9. The direction will illuminate the lens with a narrowing range of 11. Thus, the light

The Dr is moved by the moving means 7, and the same dimming light C can be irradiated to the different irradiation ranges in the thickness direction of the end portions 3a 317320 9 1275774 of the test object 3 in the thickness direction of the object 3 to be inspected. Further, as shown in FIGS. 1 and 2, the light emitted from the aperture 4 is reflected at the end portion 3a of the inspection object 3 to form a % incident light D which is generated in the expansion mirror 2. The diffracted light D is detected by the light detecting unit 5 by reflection and condensing on the second 隹Α $ Τ ... ..., ", and £ position B ', and the photodetecting portion 5 is, for example, a photodiode.

As shown in FIG. 1 and FIG. 2, the holding portion 6 positions the end portion of the inspection object 3 near the first focus position A of the elliptical mirror 2, and can be rotated by the rotation of the rotation shaft & At the focus position A, the object to be inspected 3 = the end portion 3a is moved in the circumferential direction. Further, the light shielding means 8 is attached to the elliptical mirror 2 at a line intersecting the elliptical mirror 2 on the surface including the f 1 focus position A and the second focus position B and parallel to the thickness direction of the inspection object 3 Masking tape. The diffracted light D reaching the shading means 8 reaches the photodetecting portion 5 without being reflected, but is absorbed by the shading means 8. j outside the light; f 欢j focus position i A side of the welcoming unit 5, the visor H k 疋 攸 A 攸 攸 攸 攸 攸 攸 攸 攸 攸 攸 虽 虽 虽 虽 虽 虽 虽 虽 虽 同 同 同 同 同 同 同 同 同 同 同 同The diffracted pupil is formed by reflection, but it is necessary to prevent the diffracted light d from directly reaching the photodetecting portion $ without being reflected by the elliptical mirror 2. ~ Next, the action of the end injury inspection device i will be described. As the first! As shown in the figure, it is explained that there is any damage to the position of the rounded area of the end portion 3a of the test object 3, which is in the direction of the | First, the hairpin 4 is placed at the center position 0 to illuminate the end portion 3a of the inspection object 3. The 篦4 and ## 弟4 drawings are shown in the enlarged position of the end portion 3a of the object 3 to be inspected at the center position, and the front view of the hole is shown in Fig. 5, and the enlarged cross-sectional view is shown in Fig. 5. As shown in Fig. 4 and Fig. 5, the U is in a position where the position is above the end 3a of the test object 3, and the illumination range of the 317320 10 1275774 is 11 when the central position is 〇. In the absence of damage 3b. Therefore, the same dimming C that is irradiated produces a forward reflection and becomes a low-order diffracted light d 1 . As shown in Fig. 2, the low-P self-diffracted light D1 is a path near the axis l of the elliptical mirror 2 when viewed from the plane, and faces the second focus position b, as in the first! In the figure, Fig. 5 shows the shape of the end portion 3a of the test object 3 when viewed from the side, and has a certain degree of diffusion in the thickness direction. Therefore, the low-order diffracted light D1 is absorbed by the light-shielding means 8 or the light-shielding plate 12, and most of the low-order refracted light D1 does not reach the light detecting portion 5. When the end portion 3a of the inspection object 3 is irradiated with the dimming light c at the position of the center of the towel, the dimming light c is irradiated onto the axis l of the elliptical mirror 2, and the light source 9 and the light source 9 may be irradiated. 2, the focus position 6 does not overlap each other, and the optical axis of the light source 9 is shifted from the axis l of the elliptical mirror 2 by a little (about four degrees) instead of the above. Thereby, the low-order diffracted light D1 which is irradiated with the same dimming light C at the end portion 3a of the test object 3 is also shifted from the axis L of the elliptical mirror 2, so that the light shielding plate 12 can be omitted.

Also, in this case. ; force, 11 Wen Yuyuan... "v~~ 刊 蚵 憜 憜 轴线 轴线 的 的 的 的 的 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆 圆In other words, if the same dimming light C is irradiated from the end portion of the object 3 to be supported horizontally in the horizontal direction with respect to the axis L of the elliptical mirror 2, it is necessary to detect a large amount of damage. After the information, the right diffuse reflected light will shift to the left and right, which may cause the damage of the effective capital. On the other hand, when tilting in the vertical direction, since the scattered reflection light of the up and down direction does not contain any information required for damage detection, the above problem does not occur. Further, even in the case of the inclination of the horizontal direction 317320 11 1275774, the shape of the elliptical mirror 2 can be left-right asymmetric or the like, and the diffused reflected light in the left-right direction can be collected in the photodetector.

Next, as shown in Fig. 1, while the light-emitting portion 4 is moved upward, the light is sequentially irradiated to reach the upper position p. Fig. 6 is an enlarged front view showing the end portion 3a of the inspection object 3 at the upper position f, and Fig. 7 is an enlarged cross-sectional view. As shown in Fig. 6 and Fig. 7, since the illuminating range Up overlaps with the damage 3b, the same dimming C is produced by the damage 3b, and becomes a high-order diffraction A D2. Therefore, as shown in Fig. 1, the second diagram, and the second diagram, the diffracted light D2 is not absorbed by the shading means 8, and the number of eves is reflected by the elliptical mirror 2, and is reflected by the second focus position b. The light detecting unit 5 detects the light. Fig. 8 is a view showing the relationship between the irradiation angle 0 and the intensity R of the light detected by the light detecting portion 5 at an irradiation angle 0 of the central position 为 of 0 degrees. As shown in Figure 8, it is located at the center. Or when the illumination angle 0 below the center position 0 is a negative value, the low-order diffracted light D1 that becomes the forward reflection does not reach the known part 5', so the intensity of the light (4) is held at the low level. quasi. Once the upper position is moved to the upper position and the illumination angle 0 is displayed as a positive value, the damage « 3b is included in the irradiation range ^, so that the diffused reflection occurs and the intensity R of the high-order diffracted light 2' is gradually increased. The upper position p reaches the maximum value. In the end portion 3a of the test object 3, when the irradiation range is changed in the thickness direction of the test object 3, the damage position or the damage state (size, shape, etc.) in the thickness direction can be obtained. ) information. After that, when the rotation axis 6a of the rotation holding portion 6 moves the end portion % in the circumferential direction, the presence or absence of damage in the circumferential direction and the thickness direction of the end portion of the object 3 to be inspected is 317320 12 1275774. , its location, size. Class: 者/弟三图不不" If switching is used as a concentrating means 1 〇 = ::: Sets the irradiation range of the entire thickness in the thickness direction & The inspection of the end injury in the circumferential direction can be performed more efficiently . That is, in the j-range 11a, it is determined in the circumferential direction... The circumference η is reduced until it is confirmed that there is a loss of the irradiation range, and the LU ^ ^ ^%% of the knives are examined in the thickness direction. Thus, the efficiency can be more detailed. Checking the range of illumination, the concentration of light, ρ 1Λ yq

, λ / ί . κ first hand slave 10, for example, according to the lenticular lens = and Freyn lens (6) a series of concentrating and diffusing lens series switching methods. In addition, the light-emitting portion 4 can also have such a function In addition, the 'light-emitting part 4 can be shot; ^, 士, ι Ί in the wavelength of the same length of the dimming C, can be borrowed: shrink: C. Therefore, because of the absorption is too large to identify the damage. Figure 2 shows : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : 9 is not 'hunting by changing the wavelength and 'can be detected by the wavelength λ2, the damage can not be detected in the long 。. The first diagram shows the pattern of changing the wavelength and changing the illumination angle 0 of the light-emitting portion 4 When the wavelengths are λ3, λ4, λ5, and Α6, the magnitude of each wavelength Α is 3 < λ4 < λ5 < λ6. If i = :=, near the illumination angle, the smaller wavelength can be Jin: High-order diffraction caused by damage ★ D2, detected at the illumination angle i i ' can be detected by a larger wavelength Because of the damage, the high-order 317320 13 1275774 knows the light D2. The object 3! Mountain / (end wound inspection device 1 can not only check the circumferential direction of the inspection can be assigned to h, but also the thickness direction, and the shell injury The characteristic is to change the wavelength λ of the illuminating coherent light 0 so that the position, size, range and type of the damage can be checked. (Different 2 implementation) 11 11 shows the second embodiment of the present invention. Is to cut the end of the injury and test the nightmare &

In the implementation of the above two pounds = 3. In this embodiment, the components that are referenced and omitted = are common, and the same components are assigned: '= state r injury inspection device 13'. The light-emitting portions 14, 15, 16, 17, and 丨8 # are slightly equal in the thickness direction of the test object 3: == source 9 and condensing means...the first focus I: A can be irradiated with the object 3 End 3a.

In this way, even if the light-emitting portion cannot be moved to the thickness direction of the adultery by the moving means, the end portions 2 of the inspection object 3 can be inspected in detail by arranging a plurality of directions, and the thickness is referred to in the same manner. The specific configuration of the present invention is not limited to the embodiment, and the design changes of the scope of the gist of the invention are also described in detail. 3, the present invention is shown in Fig. 2, the condensed area 11 of the light-emitting portion is formed on the thick portion 2 of the end portion 3a of the test object 3, but the sun is fixed here. Even in the case of the case where the material is small, the early father is large, and the intensity R of the light can be relatively changed by changing the irradiation range in the thickness direction by 317320 14 • 1275774, so that the damage can be recognized. In addition, by illuminating the same illumination range from different angles, the intensity of the reflected light can be made different due to the difference in the state of the illumination range. By using this gap, you can indirectly check, J damages and grievances (size and angle, etc.). Further, the light-shielding means $ is a long-opening/attachment of the concealer tape to the elliptical mirror 2, but is not limited thereto. For example, the low-order diffracted light D1 that shields at least the forward reflection may be disposed, for example, between the end portion 3a of the test object 3 and the light source 9, in a direction orthogonal to the surface of the object 3, A light shielding plate made of a plate having a specific width as a spatial filter is placed in contact with the inner surface of the elliptical mirror 2. Thereby, the low-order diffracted light D1 can be shielded by the visor, and the high U-light D2 can be emitted from outside the visor and condensed by the elliptical mirror 2 (industrial availability)

Since the irradiation range of the same dimming light irradiated by the light-emitting portion can be changed to the thickness direction of the object to be inspected, the detailed position of the damage in the thickness direction of the object to be inspected and the size of the damage can be specified. Further, the drawings show a longitudinal sectional view of a & section injury inspection apparatus of a first embodiment of the present invention in a vertical plane. Figure 2 shows the section of the invention cut in a horizontal plane

A longitudinal sectional view of the end injury inspection device. Fig. 3 shows an explanatory view of the end portion of the object to be inspected by the first embodiment of the present invention. 〃 317320 15 1275774 The light-emitting unit of the embodiment of the light-emitting unit according to the fourth embodiment shows the enlarged front view of the end of the first object to be inspected according to the fourth embodiment of the present invention. Fig. 6 is an enlarged front elevational view showing the end portion of the test object to be inspected by the i-th embodiment of the present invention, in an enlarged cross-sectional view of the end portion of the first object to be inspected. Jin

Fig. 7 is an enlarged cross-sectional view showing an end portion of the test object which is irradiated by the light-emitting portion of the first embodiment of the present invention.斤^ ▲ Fig. 8 shows the pattern of 'detected by the light detecting unit' when the irradiation range is changed to the thickness direction of the type of the present invention. 』®J, and the ninth example of the mouth The pattern length of the example in which the result of the wave of the same dimming (c〇h_Llght) of the present invention is changed is detected by the light detecting portion.

Fig. 10 is a view showing an example of a result detected by the photodetector when the irradiation range is changed to the thickness direction by the plurality of coherent lights in the i-th embodiment of the present invention. Fig. 11 is a longitudinal cross-sectional view showing the second embodiment of the present invention, in which the end injury inspection device is cut, in a vertical plane. [Description of main component symbols] 1, 13 End injury inspection device 2 2a Inside 2b 2c Vertex 2d 4, 14 , 15 , 16 , 17 , 18 Elliptical mirror notch light emitting part 317320 16 1275774 · 3 a End 5 Light detection Part 6a Rotating shaft 8 Shading means 10 Concentrating means 12 Light blocking plate B Second focus position D, Dl, D2 Refraction light center point 0, 0p Irradiation angle 3b Damage 6 Holding portion 7 Moving means 9 Light source 1 Bu 1 la, 11 〇 , 1 lp A 1st focus position C Same as dimming L axis P above position λ, λ ΐ to λ6 wavelength

17 317320

Claims (1)

1275774 日修(t)止脊婚941287086 Shen Qing Patent Range Revision (December 1, 1995) 1 · An end injury inspection device with an elliptical mirror with a mirror on the inside; the orientation is placed on the ellipse An end portion of the inspection object in the vicinity of the first focus position of the mirror is irradiated with the light-emitting portion of the dimming light, and is disposed at the second focus position of the elliptical mirror, and is capable of detecting the same light that is irradiated to the end of the inspection object And a light detecting unit that reflects the diffracted light reaching the second focus position and a light blocking unit that shields the low-order diffracted light that generates forward reflection in the light, and is characterized in that: In the light-emitting portion, the position of the light-emitting portion can be freely set in the thickness direction of the test object by the moving means, and the uniform light can be irradiated onto the end portion of the test object in the thickness direction. range. The 端2.-type end injury inspection device includes: a flared mirror having a mirror surface on the inner side; and a light-emitting portion that emits the same dimming light toward an end portion of the inspection object disposed near the first focus position of the elliptical mirror; At the second eight-focus position of the elliptical mirror, the end light that is irradiated by the illumination and the light that is reflected by the elliptical mirror and reaches the second focus position can be detected. a detecting unit; and a light shielding means for shielding the low-order diffracted light that causes forward reflection in the diffracted light, wherein: 317320 is modified at a different position in the thickness direction of the object to be inspected; The plurality of light-emitting portions are irradiated to the different irradiation ranges of the end portions of the inspection object in the thickness direction. 3. The end-inspection inspection device of the second item of the patent application, item 2, 2, and 2, the above-mentioned light-emitting unit is provided with the above-mentioned light source; The concentrating means for illuminating the thickness direction of the 鳊 冰 u 屋 屋 照射 对该 对该 对该 对该 对该 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Π 4·If the patent application scope is 1st ★ t , , the end injury inspection device of the 2 items of Beifei ,, the 发 〒 〒 可 可 可 · · · · · · · · · · · · · 申 申 申 申 申 U U U U U Light. The end portion of the third item of the patent scope of the patent can be used to illuminate the device without the πμw inspection device, wherein the above-mentioned ", and the wavelength of the same wavelength are the same. # 317320修正本本2