TWI272180B - Micro variable-focus lens system - Google Patents

Abstract

The present invention relates to a micro variable-focus lens system. It includes the following steps: (1) preparing step; (2) micro-photo forming step; (3) mold-transferring step; (4) plate forming step; (5) joining step; and (6) final product step. By using the U-V light and micro-photo technique, a flowing way mold block, a lens mold block and an extra mold block are formed on this plate. After using the flexible PDMS as a material, a lens mold can be obtained. Its flowing way is thinner than the lens portion. Then, a plate is formed and added with a solidifying agent. After hardening it, a variable-focus lens system is obtained. By adjusting the pressure of the fluid inside, the lens portion can be expanded to change its focus. So, this invention has the following functions: it has a flexible variable-focus system; it just has one joining procedure with low manufacturing cost; its lens portion can be changed; and its focus is adjustable.

Description

1272180 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field The present invention relates to a system of a micro-variable lens and a method of manufacturing the same, which have an elastic zoom lens structure, a single joint and low cost, and a large lens shape Changes, as well as a variety of zoom functions. [First Technology] The variable focus lens plays a versatile role in medical microscopes, telecommunications, or optical data storage. At present, the variable focus lens has roughly a pressure change drive and two types of electrowetting. The pressure-variable varifocal lens generally has the following methods: _ μ [ 1 ] uses lithography technology to produce an adjustable liquid U lens array combined with a microfluidic system, and adjusts the pressure in the microfluidic system to complete the elastomer lens. Focus control of the array. Polydimethyl methoxy oxane (referred to as ruthenium gelatin, English 〇 丫 丫 ( ( ( ( ( ( ( ( ( 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃 玻璃[2] The 3D convex lens film, the germanium substrate etching cavity and the micro flow channel together form a microlens. 7 ] · Using lithography and inductively coupled plasma etching (ICP) to make a multi-layer structure, After the bonding, the cavity is formed, and the silicone film is covered on the upper surface and the lower surface of the cavity, and then the variable focus lens is completed by using the pressure. The general structure of the conventional structure produces the following defects: 〆[1]·Fracture fragile zoom lens structure. Conventional structure The structure of polydimethyloxoxime/glass (5) is joined by oxygen plasma, and the oxygen plasma of glass is easily broken by brittle structure, and its application range is limited, which is lacking. [2]·The process is unstable, The size is easy to be errored. If a 3D convex lens film, 1272180 5, invention description (2) Shi Xi substrate etching cavity and micro flow path together constitute a microlens, then a thin film lens, a stone substrate and a lower flow channel and Shixi substrate cavity is not easy to align the problem, There are errors in the size of the lens, and the substrate is fragile and the etching time of the substrate is long. This is a problem of unstable process. [3] Multi-layer bonding 'cost south. No matter which kind of structure is used, it will be complicated and joint. There are many layers and it is easy to cause liquid leakage problems, and the method of joining the broken glue and the glass with oxygen plasma has the problem of high equipment cost. [4]·The lens shape changes little. The conventional lens structure is mostly made by the remaining technology. Therefore, the process is complicated, the time is long, and the lens shape change is limited. Therefore, it is necessary to develop a system of a micro-variable lens which is simple and stable in process and low in production equipment cost, and a method for manufacturing the same. SUMMARY OF THE INVENTION The main object of the present invention is to provide A system of micro zoom lenses and a method of fabricating the same, which is a resilient zoom lens structure. A secondary object of the present invention is to provide a system for a micro zoom lens and a method of manufacturing the same, which is a single bond and low in cost. Still another object of the present invention is to provide a system of a micro-variable lens and a method of manufacturing the same, which produce a variety of lens shapes. | A further object of the present invention The invention provides a system of a miniature varifocal lens and a method for manufacturing the same, and the zoom function is good. The invention provides a method for manufacturing a miniature varifocal lens, which comprises the following steps: 1. a preliminary step: preparing a first reticle in advance; The reticle is provided with at least one elongated die hole and a first circular die hole, and the elongated die hole is connected

1272180

The first circular micro-hole; the first micro-shirt forming step: a photoresist is spin-coated on a first substrate, and the cover is shielded from the photoresist, and the length of the first mask is transmitted through The die hole is filled with a w I-shaped die hole for exposing and developing the photoresist, and the first substrate is used to mold the first mold column and the lens mold column; and the first substrate and the flow pattern are rotated on the first mold substrate Applying a second layer of light...-second mask: a 匦a,, resistance, via the second circular die hole of the second mask

Column ^ "resistance to exposure and development, forming a deeper mold on the lens mold column. 3. The mold-shaping step: spin coating on the first substrate, the flow channel mold column, the lens two main molds and the deep mold column a molding liquid, the molding liquid solidifies and forms an L mirror mold body, the lens mold body forms a first-order track portion corresponding to the flow path mold column, and a lens portion is formed corresponding to the lens plate column and the deepened mold column; the flow path The portion is shallower than the lens portion; 4. The bottom plate forming step: filling the mold liquid in a mold, the mold liquid is solidified to form a bottom plate; ^5. Joining step ^: spin-coating a curing agent on the bottom plate The lens mold body is pressed against the bottom plate and baked, and the lens mold body and the bottom are joined

/, · 风 suppression V township · Joining the lens mold body and the bottom plate, completing a variable focus lens 'Controlling the flow rate of the liquid in the lens portion, and changing the focal length of the lens portion due to hydraulic expansion. a first substrate; a lens mold, a system of micro-zoom lenses, comprising: a first photoresist on the first substrate formed by photoresist micro-shaping

1272180

a column, a f, a column, and an elastic lens mold formed by the first substrate, the flow channel mold, and the lens mold, wherein the lens mold is formed by a H-shaped portion and a lens portion. The flow path portion is shallower than the lens portion; and the interval is = servant = ΐ plate, the bottom plate is spin-coated with a curing agent, and the lens mold body is pressed against the bottom plate by the shovel 1 to form a zoom lens, and the lens portion is controlled. The liquid flow rate, the money mirror part changes the focal length due to hydraulic expansion. The above objects and advantages of the present invention will be readily understood from the following detailed description of the embodiments illustrated herein. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The method includes the following steps: 1. Preparing step 11: Preparing a first light cover 21 (as shown in the second figure), the first mask 21 is provided with at least one elongated die hole 211 and a first circle. a pupil 212, the elongated die hole 211 is connected to the first circular die hole 212. 2. Dimming molding step 12: Referring to the fourth figure, a photoresist 51 is spin-coated on a first substrate 41. After the photoresist 51 is soft baked, the photomask 51 is shielded on the photoresist 51, and the photoresist is passed through the elongated die hole 211 of the first mask 21 and the first circular die hole 212. 51 is exposed (as shown in FIG. 5) and developed, that is, the first substrate 41 is micro-image molded on the first substrate 41 and a lens mold column 52 Β (as shown in FIG. 6); a second layer of photoresist 5 1 ' is spin-coated on the first substrate 41, the flow channel mold post 52, and the lens mold post 52 to control the second layer. 5 Shu preferred form of barrier exposure state 'to a second photomask 31 (as shown in FIG third) of the second light shielding layers

1272180 5, the invention description (5) the resistance 51 (as shown in the eighth figure), and then through the second circular die 31 of the second mask 31 to expose and develop the photoresist 51 of the second layer, Forming a deepened mold column 5 3 on the lens mold column 5 2 B (as shown in FIG. 9 ); 2. Performing a mold step 1 3 : as shown in FIG. 10 , on the first substrate & The flow channel mold column 5 2 A, the lens mold column 5 2 B and the deepened mold column 5 3 are spin-coated with a mold 61, and after curing, a lens mold body 62 is formed by molding (as shown in FIG. 11 The lens mold body 6 2 forms a first-order track portion 6 2 1 ' corresponding to the flow path mold column 5 2 A, and a lens portion 6 2 2 is formed corresponding to the lens mold column 52B and the deepened mold column 53. When the mold column 53 is overmolded into the lens mold body 6 2, the flow path portion 621 and the lens portion 622 are spaced apart from each other on the first substrate 41 to prevent the lens portion 62 2 from being deformed during the manufacturing process. 4. The bottom plate forming step 14 · · Please refer to the twelfth figure, the mold liquid 61 is filled in a mold ,, and the mold liquid 61 is solidified and retreated away from the mold 91, that is, a bottom plate 6 3 is formed (the structure of the bottom plate 63) Please refer to the thirteenth figure.); 5. Joining step 15: Please refer to the thirteenth figure, spin-coat a curing agent 9 2 ' on the bottom plate 63 to the flow path portion 6 2 1 of the lens mold body 6 After the lens portion 62 is faced to the bottom plate 63, it is pressed and baked, and the lens mold body 62 and the bottom plate 63 are joined (as shown in FIG. 14); > Engaging the lens mold body 62 and the bottom plate 63 to complete a zoom lens. Referring to FIG. 1A of the present invention, in a preferred embodiment of the present invention, the zoom lens has a gauge much smaller than a round coin. This portion of the flow enters a liquid into the lens portion 62 2 and controls the hydraulic pressure to expand the lens portion 62 2 to change the focal length. This is the manufacturing part of the micro-variable lens of the present invention.

1272180 V. Inventive Description (6) In more detail, the present invention provides a spin coater 93 (shown in the fourth figure) in the lithography forming step 12, and adjusts the two-stage rotational speed to 15 rpm, respectively. lOsec rotates the first substrate 41 at 4 rpm and 10 sec, and the photoresist '(in the present embodiment, JSR (THB-120N) photoresist 51 is preferred) is evenly spun on The first substrate 41 has a relatively ideal thickness of about 40, and different rotations are set, and the thickness of the photoresist 51 can be controlled, thereby controlling the area and height of the transparent body 62, and the unit of variation of the size is about # m to _ between units. The photoresist 51 is placed in an oven at about 95 degrees Celsius for about 9 minutes, and the photoresist is controlled to be ideally exposed. A reticle alignment machine 9 $ (as shown in the fifth figure) is provided. 4, the first mask 2 1 is irradiated with an ultraviolet light 941 having a dose of about 2 〇〇〇mj, and the standby and external light 941 passes through the elongated die hole 211 of the first reticle 21 and the first circular die hole 212. The photoresist 51 is exposed, and after about 15 to 2 minutes of development, the flow channel mold pillar 52A and the lens mold pillar 52B are formed by microlithography (as shown in the sixth drawing). The second layer of photoresist 51 is controlled to be in a preferred exposure state by baking the second layer of photoresist 5 1 in an oven at about 90 degrees Celsius for about 5 minutes. In a preferred embodiment of the present invention, the first substrate 41 is selected from the group consisting of optical f-grade polymethyl methacrylate (referred to as acrylic, P英文lymethy mathacrylate, PMMA for short), electronic wafer (wafer). Polycarbonate (PC). In the mold-transforming step 13 , the molding liquid 6 1 is selected from the group consisting of optical properties of polydidecyl decane (referred to as silicone, referred to in English

Poly-dimethy siloxane, referred to as PDMS), and approximately 65 degrees Celsius

Page 12 1272180

Forming a lens mold with better elasticity, baking for about 4 hours, curing after 62 〇, in the bottom plate forming step 14, also using polydimethyl siloxane (referred to as Shi Xijiao) in English as p〇ly-dimethyl- Sil〇xane, abbreviated as pj)MS) is filled into the mold 91 as a liquid 61, and after being cured at about 65 degrees Celsius for 4 hours, it becomes a bottom plate 63 of a desired thickness of about 2 to 3 mm (such as the twelfth Figure shows). In the process of the bonding step 丨5, the spin coater g3 (as shown in the eleventh figure) is adjusted to rotate the parameter to 3 rpm, and the bottom plate 63 is rotated 3 sec to cure the agent 92 ( In a preferred embodiment of the present invention, the curing agent 92 is selected from the group consisting of ultraviolet curing glue, fast glue, resin bonding agent and other adhesives, and is preferably applied to the bottom plate 63 at a thickness of about 3 The lens mold body 62 is pressed against the bottom plate 63 facing the curing agent 92, and baked in an oven at about 90 degrees Celsius for about 2 minutes, and the lens mold body 62 and the bottom plate 63 of the same silicone material. Closely integrated (as shown in Figure 14). , crying as in the finished step 16 , using micro-push, micro-piezoelectric actuation f /, medium-type transmission wheel power to control the liquid flow to adjust the zoom lens, the invention can be a large number of overmolding, and then Appropriate cutting to reduce production costs. ^一# $off the system part of the invention (refer to the second and fourth figures), comprising a reticle 21, a first substrate 41, a second reticle 31 and a bottom plate 63 shown in Figure 10; The first reticle 21 has at least one elongated die hole and a first circular die hole 21 2; the second reticle 3 丨 corresponds to the first circle

Page 13 1272180

The die hole 2 1 2 is provided with a second circular die hole 311, wherein:

Referring to the fourth figure, a photoresist 51 is spin-coated on the first substrate 41, and an ultraviolet light 941 (shown in FIG. 5) passes through the elongated die hole 211 of the first mask 21 and the first circular die. The hole 212 is irradiated to the first layer of photoresist 51 on the first substrate 41. The photoresist 51 is exposed to form a first-stage mold pillar 52A and a lens mold pillar 52β (as shown in FIG. 6); Simultaneously spin-coating the second layer of photoresist on the first substrate 4, the channel phase: the pillars 52A and the 5th lens column 52B, and shielding the second mask 31 (shown in FIG. 8) The second layer photoresist 51 is irradiated with the second layer photoresist η through the second circular die hole 311, and the deep mold column 53 is formed on the lens mold pillar 52. The ninth figure is shown in FIG. 10, and a molding liquid 61 is spin-coated on the first substrate 41, the flow channel mold column 52, the lens mold column 52, and the deepening mold column 53. A lens mold body 62 (shown in FIG. 2) is cured, and the lens mold body 6 2 has at least a first-order track portion 621 and a lens portion 262, and the flow path portion 6 2 1 is larger than the lens portion 6 2 2 shallow; and the deepened mold column 5 3 can Lens portion 621 and clear portions 622 spaced apart regions on the first substrate 41, to prevent deformation of the loop mirror part μ 2 during the manufacturing process. As shown in Fig. 12, the mold liquid β1 is filled in a mold 9 1 to form the bottom plate 63, and a curing agent 92 is spin-coated on the bottom plate 63 (e.g., Fig. 13) And in the preferred embodiment of the present invention, the curing agent 92 is selected from the group consisting of ultraviolet curing glue, fast glue, resin bonding agent and other adhesives, and the lens mold body 6 2 is used for the flow path. The portion 6 2 1 and the lens portion 6 2 2 are pressed against the curing agent 9 2 and baked, and the bottom plate β 3 is joined to the lens mold body 62 (as shown in FIG. 14);

Page 14 1272180 V. INSTRUCTION DESCRIPTION (9) "----- In the preferred embodiment, the wheel power of the micro-pump and micro-pressure actuator is selected, and the flow path portion 621 is adopted. Adjusting the flow rate of the liquid in the lens portion 622 (refer to the sixteenth and seventeenth views), and controlling the lens portion 6 2 by hydraulic pressure to change 隹 / μ μ η. Double focal length (Attachment 1 The lens portion 622 of the C and D figures is expanded as follows: χ L ^ , , eight grains as shown in the fifteenth, sixteenth and seventeenth, sequentially generating the positive focal length and slightly magnifying And the larger focal lengths of the \ are widely applicable to camera lenses, DV cameras, medical microscopes, and digital image storage media in mobile phones, etc. / /, the micro zoom lens of the present invention The system part. 々 More details, ,, Tian said 'The first substrate 41 is rotated by a spin coater 9 3 (as shown in the fourth figure), so that the photoresist 51 (select JSR (THB-120N) light The resistor 51 is preferably uniformly applied to the first substrate 41. The photoresist 51 is soft baked in an oven (regardless of the first and second layers, only The control time is slightly changed), and the ultraviolet light 941 f sub-layer photoresist 51 is emitted by a mask aligning machine 94 to perform two exposures respectively, and after the development, the flow returning mold column 52A is molded by the lens mold. The column 52B and the deepening mold column 53. The bottom plate 63· is also rotated by the spin coater 93, which is a preferred device for uniformly spin coating the curing agent 92. Φ The first substrate 41 is selected from optical grade poly Methyl acrylate (referred to as pressure, gram, English is Polymethy math acrylate, referred to as PMMA), electronic wafer (wafer), polycarbonate (p〇iyCarb〇nate, PC for short). The optical properties of polydimethyl methoxy oxane (referred to as Shi Xijiao 'English p〇ly-dimethyl-siloxane, referred to as PDMS),

Page 15 1272180 V. INSTRUCTION DESCRIPTION (10) The lens mold body 62 having a better elasticity is formed by overmolding, and the bottom plate 63 of about 2 to 3 mm can also be formed with the mold 9 1 . The advantages and effects of the present invention are as follows: [1] A flexible zoom lens structure. The lens mold body and the bottom plate of the present invention are all elastic silicone structures, which reduce the cracking phenomenon caused by the brittle material to avoid contamination or damage to adjacent device components due to liquid leakage. [2]·The process is stable and the size is accurate. The invention adopts the photoresist forming flow channel mold column, the lens mold column and the deepening mold column to remove the dimensional error of the thermal expansion and contraction, and the lens molding body is formed by the Shiyue plastic molding, and the zoom lens is matched with the silicone rubber substrate, and the whole agricultural process is completed. Quite stable. ...正[3]·Single joint and low cost. The invention has a single tight joint design, only a single joint, in addition to avoiding liquid leakage, the silicone curing agent is used as an adhesive agent, which does not require oxygen plasma roughening treatment, reduces equipment cost, and has a large production cost. Also low. Clothing, > [4]·The lens shape changes a lot. The invention can control the substrate rotation speed, change the coating thickness of the photoresist, and cooperate with the change of the die hole on the reticle to accurately control the area and height of the zoom lens. The size range of the zoom lens ranges from about //m to mm. Between units. ,, [5]·The zoom function is good. The invention cooperates with the micro-pull/micro-electric actuation crying to precisely control the hydraulic pressure in the lens portion and adjust the optimal zoom function. w ΐ ΐ = i Detailed description, so that those skilled in the art can understand that the invention has been in compliance with the provisions of the patent law, and the invention of the invention [Annex 1] The physical example of the zoom lens

The present invention is the present invention, the present invention, the present invention, the present invention, the present invention, the present invention, the present invention, the present invention, the present invention, the present invention, the present invention, the symbol of the present invention Brief description of the schematic diagram [Simplified diagram of the first diagram, the second diagram, the third diagram, the fourth diagram, the fifth, the sixth, the seventh, the eighth, the eighth, the ninth, the first Figure 11 Twelfth Figure Thirteenth Figure Fourteenth Figure Fifteenth Figure Sixteenth Figure 17th Figure _ [Main Element 11 Preparatory Step 1 3 Turning Molding Step 1 5 Joining Step Method Flow Structure Level The process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the process of the unintentional structure of the structure of the dynamic structure of the structure of the first 21 2 1 2 Production of the part of the production of the first circular die hole Production of the production of the production of the production of the production of the Ming and Ming Dynasties of the Ministry of the Ming Dynasty Unintentional Figure 1 Intention 2 Intention 3 Intention 4 Intention 5 Intention 6 Intention 7 Not intended Eight Not intended 9 Not intended to be illustrated by a schematic diagram 2 Schematic diagram 3 1 2 Micro-shadow forming step 1 4 Base plate forming step 1 6 Finished product steps 2 11 long die hole 31 second mask

Page 17 1272180 Schematic description 3 11 second circular die hole 51 photoresist 52B lens mold column 6 1 molding liquid 6 2 1 flow path portion 63 bottom plate 9 2 curing agent 94 mask alignment machine Φ 41 first substrate 52A flow channel mold column 5 3 deep mold column 6 2 lens mold body 6 2 2 lens portion 91 mold 9 3 spin coater 941 ultraviolet light

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Claims (1)

1272180 1 . A method for manufacturing a micro zoom lens, comprising the following steps: 1. preliminary step: preparing a first mask in advance; the first mask is provided with at least an elongated die hole and a first circular die hole The elongate pupil communicates with the first circular die hole; and the second micro-shaping forming step: spin-coating a photoresist on a first substrate, shielding the first photomask from the photoresist, and transmitting the The long die hole of the first mask and the first circular die hole expose and develop the photoresist, and the first substrate is micro-image molded to the first mode die and the lens die; the first substrate 2 a second layer of photoresist is spin-coated on the channel mold pillar and the lens mold pillar, and the second layer of photoresist is shielded by a second mask, and the second layer is through the second circular die hole of the second mask Exposing and developing the photoresist, forming a deepened mold column on the lens mold column; / 3. Turning the mold step: spin coating on the first substrate, the flow channel mold column, the lens mold column and the deepened mold column a molding liquid, the molding liquid is solidified and turned into a plastic lens mold, and the lens mold body forms a first-class road portion corresponding to the flow channel mold column, and The lens mold column and the deepened mold column form a lens portion; the flow path portion is shallower than the lens portion; 4. The bottom plate forming step: filling the mold liquid in a mold, the mold liquid solidifying and forming a bottom plate; a bonding step: spin-coating a curing agent on the bottom plate, pressing and baking the lens mold body against the bottom plate, joining the lens mold body and the bottom plate, and finishing the lens mold body and The bottom plate is awed, and the zoom lens is completed to control the flow rate of the liquid in the lens portion, so that the lens portion is Page 19 1272180 a bottom plate having a desired thickness of about 2 to 3 mm; in the joining step, the bottom plate is rotated by the spin coater to adjust the rotation parameter to 300 rpm, 30 sec, and the curing agent is spin-coated on the bottom plate. With a preferred thickness of about 3 #m, the lens mold body is pressed and pressed against the bottom plate, and baked in an oven at about 90 degrees Celsius for about 2 minutes, that is, tightly bonded; 'In the finished product step, the micro-selection is used. One of a pump, a micro-piezo actuator, transmits a power control hydraulic pressure to adjust a focal length of the zoom lens, and a method of manufacturing the micro-variable lens according to claim 2, wherein: controlling the spin coating The rotation speed of the machine and the shape of the die hole of the photomask can change the area and height of the zoom lens; the first substrate is selected from the group consisting of optical grade polydecyl acrylate, electronic wafer, polycene vinegar; The curing agent is one selected from the group consisting of ultraviolet curing glue, quick glue, resin bonding agent and other adhesives. a system of a micro zoom lens comprising: a first substrate; forming, by the photoresist on the first substrate, at least a top mold pillar, a lens mold pillar and a deep mold pillar, the first substrate, The flow channel mold column, the lens mold column and the deep mold column are overmolded to form an elastic lens mold body. The lens mold body has a first-class track portion and a lens portion, and the flow path portion is shallower than the lens portion; An elastic bottom plate is spin-coated with a curing agent. The lens mold body is pressed against the bottom plate by the curing agent. Page 21 1272180 VI. Scope of Application for Patent ‘Formation of a Zoom Lens The lens portion is hydraulically expanded 5 · As claimed in the patent scope, where: The flow of liquid in the chamber causes the lens to be controlled to change the focal length. The system of the micro zoom lens according to the fourth aspect, wherein the first substrate is coated on the first substrate, and the photoresist is exposed to the exposure of the oven. The oven emits ultraviolet light to expose the photoresist to the exposure. The bottom plate is rotated by the red transfer coater so that the curing agent is on the bottom plate; ι is rotated by the spin coater to uniformly rotate the photoresist to control the rotation speed of the rotary coater and the shape of the die hole of the photomask The system of the miniature varifocal lens of claim 4, wherein: the first substrate is selected from the group consisting of optical grade polymethyl methacrylate, electron f One of a wafer and a polycarbonate; the molding liquid is selected from the group consisting of optical properties of polydimethyl siloxane; the curing agent is one selected from the group consisting of ultraviolet curing glue, fast glue, resin bonding agent, and other adhesives. The liquid system adopts one of the micro-pump and #piezo activator as the transmission power, and is input into the lens portion through the flow channel portion. 7 · The micro-focus lens according to the fourth application of the patent application System, again Comprising: an elongated UV light through a die hole of the first light and the first single circular die 1272180, the patent application scope of six holes ^ known to the photoresist on the first substrate, the photoresist exposure to form the flow channel mold column and the lens mold column, the first substrate, the flow channel mold column and the lens mold Simultaneously spin-coating the second layer of photoresist on the column and soft-baking, shielding a second mask onto the photoresist, and irradiating the photoresist with the second circular die hole of the second mask. The photoresist is exposed to form a deepened mold column on the lens mold column; a mold liquid is spin-coated on the first substrate, the flow channel mold column, the lens mold column and the deepened mold column, and the mold liquid is solidified and formed. The lens mold body; the deepening mold column "reinforces the separation of the flow path portion and the lens portion on the first substrate" when the lens mold body is overmolded to prevent the lens portion from being deformed in the process; filling the mold into the mold A molding solution which solidifies to form the bottom plate. Page 23