1269667 九、發明說明： [發明所屬之技術領域] 本發明乃關於對混合不同種類的複數流體（氣體及液 體之雙流體等）並予以喷射或喷霧極為有用之喷嘴裝置（例 如雙流體喷嘴裝置），例如，對於半導體晶圓及液晶基板等 被處理體的處理（被洗淨體的洗淨處理）極為有用之喷嘴裝 置（例如雙流體喷嘴裝置）及喷嘴構件。 [先前技術] | 關於混合空氣及水之雙流體而進行霧狀喷射或喷霧之 方法，已為人所知的有，分別導入空氣及水於喷嘴，從喷 嘴的喷射口喷射混合霧氣之方法。 例如於日本實用新案登錄第2510286號公報（專利文 獻1)中揭示一種雙流體喷嘴，具備：氣體供應管；插入配 設於此氣體供應管内部之水供應管；於轴方向上間隔氣體 供應管及水供應管兩者，並相對向地貫穿設置之喷嘴裝設 孔；貫通相對向的噴嘴裝設孔並插入固設之1個喷嘴；及 *形成於此喷嘴且連通氣體供應管及水供應管的内部，並予 以開口之各流體的導入口。於此喷嘴中，通過氣體供應管 及水供應管的導入口，於喷嘴内導入氣體及水，於喷嘴内 的混合室混合，而從噴出孔喷霧。於曰本特開2002-96003 號公報（專利文獻2)中揭示一種喷霧喷嘴，其為具備：具有 連接於加壓空氣供應源之空氣通路及連接於液體供應源之 液體通路之喷嘴主體；配置於此喷嘴主體的下游端之氣體 蓋之喷霧喷嘴，其中，上述氣體蓋係由：與來自於液體通 5 316658 1269667 路的液體碰撞而往半徑方向 裔汚脾分* / 抵接面，為了用加壓空 虱抓將彺+徑方向傳送的液體進行細 接面的周圍之_ ^ >成於上述抵 •並與上述::至對向設置於上述抵接面的周圍， k擴張至及具有角度之排出孔連通，且 成之複數的軸線方向流路所構成二外 主體的液f通路才之版供應源路之液體供應於噴嘴 籲應於噴嘴主j 之加壓空氣供 路内的液Μ π此貝務賀鳴中，通過液體通 •張室中;:=:!體蓋的抵接面，於抵接面的周圍的擴 -化及霧化，而了、广乳通路而導入之加壓空氣而使之細微 中排二：往外側擴大的圓錐狀喷霧形態㈣^ 内形t氣::等噴霧噴嘴中，於噴嘴主體(喷嘴集流管） 合。因此十’、患路及水供應路，而有必要將空氣及水混 :達：量:僅=變得複雜，且喷嘴的零件數變多，難 藉由炫接Γ方二=成本提高。此外，由於喷嘴主體系 混入雜質而產生阻：亦=應官及空氣供應管’因此即使 喷嘴主體的洗淨w 拆解，難以進行維護（供應管及 ?卢公報日t開昭63-248464號公報（日本特公平5-55193 向較長之第中t不，包含：於被處理體的寬度方 於第丨集流管：;U設於此第1集流管的後側且平行 方向較長之第2集流管，及於上述集流管 316658 6 1269667 的長邊方向上隔著等間隔設置複數個，並具有與上述第 1、第2集流管連通之流路，且於前後方向上貫通第1集流 管地固定之噴嘴導入構件，其中於兩個集流管中之一導入 空氣，於另一個集流管導入液體而構成雙流體喷嘴集流 ^ 管。此喷嘴集流管具備：貫通第1集流管（空氣集流管）且 開口端面臨第2集流管（液體集流管）内部之中空筒狀噴嘴 導入構件；安裝於第1集流管侧的喷嘴導入材之喷嘴；及 形成於與第2集流管連通之喷嘴導入構件的中空部，並用 鲁於供應液體至喷嘴之液體路；及與第1集流管連通（空氣集 流管），且從喷嘴導入構件的中途部延伸至喷嘴之空氣路。 • 因此，將來自於液體路的液體及來自於空氣路之空氣供應 . 至喷嘴，而可從喷嘴的喷出孔將混合液體實施喷霧。此外， 由於第1集流管及第2集流管結合為一體，因此不僅可達 到全體的小型化及輕量化，且可在喷嘴導入構件的前端部 更換喷嘴。再者，設有可於上述第1集流管及第2集流管 的長邊方向上自由滑動地導引支撐第1集流管及第2集流 *管之滑動導件，藉此亦可容易更換成備用集流管。 然而，由於喷嘴導入構件係藉由熔接等而與第1集流 管及第2集流管固定為一體，且第1集流管及第2集流管 亦固定結合為一體，因此無法拆解，而難以進行喷嘴導入 構件的更換及維護（集流管及喷嘴導入構件的洗淨等）。此 外，除了難以進行喷嘴導入構件的更換之外，由於喷嘴導 入構件的開口端係開口於第2集流管内，因而難以控制從 喷嘴之喷霧流量。此外，若藉由熔接而結合喷嘴導入構件 7 316658 1269667 與第1集流管及第2隹、、ώ总A _ 嚷管及第…：Γ: 一體，或藉由炫接而結合第 曲，且亦於…::广為一體，則不僅集流管容易趣 . …± …的熔接部的内面生成氧化膜。-曰隼汽 吕產生遇曲，則被處理體及喷嘴之間動 ' 進行處理的情且於以峨的流體(例如超純水) 的 下，氣化膜會污染高純度的流於，而> 土 精密的處理被處理體（尤其是液晶基板Ί要会 求高精密度的洗淨處理之被處理體)。〜日曰圓寺要 請專==1)日本實用㈣絲第2购號公報（申 圍）(專利文獻2)日本特開讀彻3號公報（申請專利範 (專利文獻3)日本㈣日s 63_2484 範圍，第1圖） “報（甲明專利 [發明内容] (發明所欲解決之課題） 因此，本發明的目的在於提供一種不僅可達 二二可對集流管丨更遞嘴構件之喷嘴裝置（雙流體喷^ 置寺）。 本發明的其他目的在於提供一種不需進行複數华流管 的溶接或集流管與噴嘴構件的溶接，而可對被處理體進行 勻致的實霧處理之噴嘴裝置（雙流體噴嘴裝置等）。 本發明之又一目的在於提供一種可藉由噴嘴構件之更 316658 8 1269667 =2集流管（氣體集流管）2;及於該等集流管μ的長 二二大二等間隔地，形成於與第1及第2集流管1、; 不），及可貫通安裝於夂個公壯 未，、、、員 .構成。於第 應液體之液體供應管路la; “二=應手段來供 :氣體供應手段來供應氣體之氣體;共=^ ，液體供應管路U及氣體供應管路 二例 亦即，從與第丄及第2集流管卜2 =形恶， 而連接。此外，各個集流管直父的方向 剖面為四角形狀的各個集流管卜2的貫通口）係貫通 上述噴嘴構件3於—邊端部 面而形成。 端部為封閉，並於另一邊端部的外；=孔’且另-邊 詳細而^ 7卜周上形成螺紋部8。f 平、、、田而I，上述喷嘴構件3係由： 丨8更 2之嘴嘴前端頭4 ;及於—邊端部上形：；=有喷出 則端頭4之安裝部，另一邊 了女衣上述喷嘴 ，流管卜2之中空筒狀的喷貫通安裝於 中，於噴嘴主體5的—邊端部上 斤構成。於此例 裝有喷嘴前端頭4。噴嘴前端頭4;二配器)6而安 員4的盖(或適配器)6而安裝或保 “刖 #。此外，於喷嘴前端頭4的前端部，开/ 的端 二伸之溝4a’於此溝中，在噴嘴前=往半經方向 開D。 只的軸心部上形成 此外，於喷嘴主體5中，喷嘴前端頭4側形成有尺寸 316658 13 1269667 較複數集流管】、2的安裝口還大 進入於上述安裝口 且用來限制噴嘴主體5 體5係將封閉端部從第；隹：⑽如為頭部)7。上述喷嘴主 裝口貫通(或將嘴嘴前端頭集流管2的安 管1的安裝口貫通）安掌 壯心m朝向第i集流 體…邊端部_端部;之 往外突出。 4 8係從第2集流管2 上述嘴嘴主體5的周壁 # f Η的部位上，分別形成有'及第2集流管 内部連通的連通孔(液體連通孔)9;:= ===連通㈣通孔(空氣連通孔)二二 产路）10、^ 9'11㈣經由流路（液體流路及氣體 =9 L而到達嘴嘴前端頭4的嘴出孔。亦㈣ 示），而竹體流路1〇而到達混合空間（圖中未顯 線方向：：：1路1〇則由：朝下游方向往噴嘴主體5轴 I主内彳I之'Ά、及隨著從該流路往下游方向流動而愈 鹏泣貝1 、/ :的傾斜流路所構成，而氣體連通孔11則經由氣 卿:路12而到達混合空間’而該氣體流路則較上述液 了10更位於噴嘴主體5内側區域(軸心側)，且由往喷 嘴=體5,由線方向延伸之流路（内徑階段性的逐漸縮小 之複數的氣體流路）及隨著從該流路往下游方向流動而愈 在内側傾斜的傾斜流路所構成。於此混合空間中，來自於 液M連通孔9的液體及來自於氣體連通孔11的氣體匯流而 混合，於混合空間混合之混合流體，從上述喷嘴前端頭4 14 316658 1269667 的嘴出孔t噴出。於此例中，液體流路10及氣體流路i2 ί丁、於上游區域藉由環狀隔板來區隔。此外，於此例中，氣 ，體連通孔11係形成較液體連通孔9還大。 ‘ …於喷嘴主體5安裝於第1集流管1及第2集流管2的 女*衣口的狀態下，各個集流管i、2及喷嘴主體5的接合 (或疋間隙或密封部），使利用緊固手段16的緊固力 密料13至15來密封。亦即，於喷嘴主體5周圍，^ 1 集7 1及第2集流管2之間的平坦部配設有環狀密 衣二寻”7’用以防止環狀密封材“於平坦部往外側 位置而導致膨脹，於喷嘴 夕 隼流管1之工 周圍，限制部7及第1 之間的平坦部（形成相對於第1集流管i之 7的相對面的內周F A 市j 辰狀凹部或環狀缺口部）上，配-%狀岔封材（0環）13，於突出丨=配叹 另-邊端部的周圍m上，2之，嘴主體5 華。於形成在噴嘴主體5另—==有環狀密封材（〇 合有螺们6作為固定手段。藉；^螺紋部8上，螺 緊固力，可將π A势 返者螺帽10的螺合之 Τ將於實嘴主體5一體保 卜2,並緊密密封各個各個集 ：弟2 ^官 合部（間隙或密封部）。 2及°貧鳴主體5的接 於此種噴嘴裝置(雙流體噴嘴 構件3貫通於第！及第2集流、置）中’由於採用噴嘴 簡單，且可達到輕量化。此外 的構造，因此構造較 的熔接及集流管卜2與而進行複數集流管卜2 3的熔接，因此可防止複 316658 15 1269667 數木級官1、2翹曲及氧化膜的生成。因此，即使對液晶基 板及半導體晶圓等要求高精密的處理之被處理體進行洗淨 ' 处理亦可一邊抑制高純度的污染，一邊以均勻的喷霧流 量對被處理體進行喷霧處理。此外，由於可藉由密封材13 ，15及緊固手段16 ,以可解除的方式機械地結合第1及 ，2集流管卜2及喷嘴構件3，因此可將第！及第2集流 管更換或拆解喷嘴構件3，而容易進行維護。再者， 於貝觜主體5的混合空間中可有效混合氣體及液體，因此 Z從喷嘴前端頭4的喷出孔中噴出微粒化混合霧氣。此 猎由將噴嘴主體5更換成上述第1及第2集流管卜2 内抓通的液體連通孔9及氣體連通孔u的大小及噴嘴前端 f (旦包含噴出孔）的構衫同之噴嘴主體5，可容易控制嘴霧 =二，即使於複數集流f1、2中安裝口之位置精準 那麼向’亦可藉由上述密封材13至15的緊 確貫吸收複數时嘴構件3的位置: 1、2更換安裝噴嘴構件3。 们木机g 於本發明的喷嘴裝置中，集流管數目並 可使用可分別供應複數流體之 ^ 集流管）。一舻而丄. 久数木/爪官(亦即，至少2個 } 而έ，係於複數集流管中至少2侗隹ώ 供應不同種類的流體(例如氣體 二個集流管中 流管中供應不同種類的流體。例如二輪^ 情況下，可分別供應帛1;夜_如個集流管的 液)’第爾⑽如空氣)。複數集流管的:== 316658 16 1269667 別限定，亦可將氣體供應用集流管配設於喷嘴構件的喷出 孔侧。 此外，不同種類、的流體（例如氣體及液體），可從種種 ^ 方向供應至集流管，亦可將各種流體的供應管路同軸連接 ‘於各個集流管，而從各個集流管的長邊方向的端部供應。 例如，可於液體供應集流管及氣體供應集流管中，可各別 從相同的方向供應，亦可從相反方向供應。此外，氣體及 液體亦可從對各個集流管的軸方向為交叉之方向來供應。 Φ 例如，各種流體的供應管路，以對各個集流管為τ形的形 態來連接，並從與集流管的長邊方向為交叉之方向來供應 流體。各種流體的供應管路亦可對各個集流管連接1處或 多處地方。 集流管一般為長條之中空筒狀，集流管的剖面形狀並 無特別限制，可為中空多角狀（三角形、四角形、六角形、 八角形等多角形）、中空橢圓形、中空圓筒狀等。為了容易 形成喷嘴構件的安裝口，且可提升喷嘴構件的安裝性，因 參此集流管的剖面形狀較理想為，互為對向的面為大致平 行。於各個集流管中，流體的流量及壓力並無特別限制， 可因應被處理體的種類及喷霧流量等來選擇。 安裝口只要貫通集流管即可，較多的情況為，形成為 集流管的相互對向面（或側壁），尤其是形成於互為對向的 平行面（侧壁）。安裝口的形狀大多為對應於上述喷嘴構 件，但是於藉由密封手段來密封間隙的情況下，即使於安 裝口及喷嘴構件之間存在間隙的情況下，亦可確實的緊密 17 316658 1269667 岔封=此，即使安裝口的精準度或複數集流管的長邊方 向之女裝口的位置精準度沒那麼高 體從集流管茂漏。 百效羊的防止流 ，口 ：沿著集流管的長邊方向保持間隔地形成，亦 集流官的長邊方向之延伸線分散設置(例 一 ==分散設置)’亦可不沿著集流管的長邊方向之 =-刀U。此外，安裝σ例如可於集流管的長 向上形成交錯狀。 t万 出只要可安裝喷嘴構件，且從喷嘴構件的喷 =二:集流管的流體即可，此外，亦可配 5又為非千订狀恶，但是一般係配設為大致平行。 於本發明的噴嘴I置中，至少⑽ 部集流管）的端部及中段部，可以益法 々(=/、疋王 俨邱力仅4士， 乂…忐卸下的方式固定於支 二二:為了提高維護性’亦可安裝成可裝卸方 1螺：：i4構ΐ無特別限定’可採用種種構造及機構，例 口一-、構、嵌合機構、扣止機構或是鈎止 k止周圍方向上的噴出孔位置偏移，安裝 位並固定的機構’例如用來導引集流管端部 機了;2 防脫機構：)…止作用等來限制崎^ _喷:構件可於橫貫或交叉上述複數集流管的方向貫通 二又之=貫通安農於對複數集流管的長邊方向呈斜方向 /成之文衣口’亦可貫通裝設於朝直交方向形 口。此外’噴嘴構件雖然多為大致隔著等間隔地複 316658 】8 1269667 數集流管的長邊方向上之情況，但並不一定要隔著等間隔 地裝設，亦可因應被處理體及喷物流體的種類等，而保持 .間隔地褒設。此外，噴嘴構件的間隔可因應被處理體的種 ，類及噴霧流量等來選擇，例如約為1G至·職(例如α 至 300mm)。 、用來貫通裝設於複數集流管之噴嘴構件，係具備：連 通於各個集流管内的流路；及用來將來自各個流路之不同 種類的複數流體實施嘴霧之喷出孔。各個流路可為引導各 個流體之單-流路，亦可為複數的流路。具體而言，於； 嘴構件的側壁中，於對應於各個集流管的部位，可形成連 =喷出孔之單-或複數連通孔，連通孔的形狀並無特別 w ’可為圓形、橢圓形、細長形等。此外，複數的連通 的位置及排列並無特別限制’可任意或有規則的排列。 於^明中’可對複數集流管更換噴嘴構件之喷嘴 置，係藉由將安裝於複數集流管之喷嘴為二 =及/或氣體連通孔的大小不同之嘴嘴主體，可ΐ:: 此外可藉由更換噴嘴構件，而容易控制集 流量的分布。因此，各個連通孔的大 可口各個集流管而相同或不同。 供广隹rt’於混合液體（水等）及氣體（空氣等）的情況，液體 的開口面積（内徑等）及氣體供應用連通孔的 二面積(内Λ等)’可因應液體及氣體的…流量、： 務£力，贺務流量而選擇，兩者亦可 一 體供應用連通孔的開口面積（内栌 目乂於液 預1冏杬寻），氣體供應用連通孔 316658 19 1269667 的開口面積（内徑等）亦可較小。 於本發明中，並不一定需I A 乂 噴嘴主體)可分別貫通裝設於各:集：:，：且；:=:(或 嘴主體的一邊端部(前端部)上，具備用來喷射物出固： 合霧氣之喷出孔。亦即’可由噴嘴構件或噴嘴主體來構成 喷嘴。為了提升噴霧精準度，—般而言，喷嘴 貫通裝設錢流管之上述噴嘴主體及裝設於此噴嘴主俨的 :邊端部（前端部）之噴嘴前端頭而構成。喷嘴構件或^嘴 雨端頭的喷出孔的形狀並無特別限制，可為種種的形狀， 例如多角形、圓形、橢圓形、放射狀等。 上，喷嘴構件或喷嘴主體，可由另一邊端部呈開放狀 之中空同狀體而構成，但大多由另一邊端部為封閉之中空 筒狀體構成’並且亦可具備上述連通孔及用來混合來自ς 此連通孔的流體之混合空間。 +矛4圖係顯示本發明之其他噴嘴裝置（雙流體喷嘴或 _賀射喷嘴裝置）之部分剖開側視圖。於此例中，形成於喷嘴 $件的周圍壁之連通孔，係不經過流路而直接連通於混合 工門亦即’與上述相同地，於貫通形成於第丨及第2集 ^ 之文t 口（或貝通孔）’貫通安裝有由噴嘴前端 頭24及^、嘴主體25所構成的噴嘴構件23。噴嘴前端頭24 可藉由蓋（或適配器）26而安裝於喷嘴主體25的一邊端部。 於此例中，於喷嘴主體25的周圍壁中，對應於第1 及第2木机管2 1、22的部位上，與上述相同地，分別形成 有連通方、第1集流管（或液體集流管）21内的連通孔（液體連 20 316658 1269667 v 通孔）29，以及連通於第2集流管（或氣體集流管）22内的連 通孔（空氣連通孔）3 1。如第4圖所示，該等連通孔29、3 1 係接通至沿著轴心方向而形成於喷嘴主體25内的混合空 間30，此混合空間又連通到喷嘴前端頭24的喷出孔。於 - 此混合空間30中，來自於液體連通孔29的液體及來自於 氣體連通孔3 1的氣體匯流而混合，於混合空間30相混合 之混合流體，從上述噴嘴前端頭24的喷出孔喷出。 此外，於噴嘴主體25的周圍，於形成於噴嘴前端頭 φ 24侧的限制部（或頭部）27與第1集流管21之間、於第1 集流管21與第2集流管22之間，及於從第2集流管2突 . 出之喷嘴主體25的另一邊端部的周圍，分別配設密封材（0 環或環狀密封材）33至35。此外，於第1集流管21及第2 集流管22之間的密封材34的外周圍區，配設有用來限制 密封材34的移動之定位用環狀限制構件（金屬製環等）37。 藉由形成於喷嘴前端頭24侧的限制部（或頭部）27，來限制 喷嘴主體25端部往第1集流管21及第2集流管22的安裝 _ 口内侵入之狀態下，於形成於喷嘴主體25另一邊端部的螺 紋部28上，螺合有做為緊固手段之螺帽36。藉由此緊固 手段之緊固力，可固定複數集流管21、22，並與噴嘴構件 23形成為一體。 於如此的喷嘴裝置中，不僅可獲得與上述相同的效 果，並且，即使噴嘴構件23的構造較為簡單，亦可在喷嘴 構件23的混合空間30内有效地混合（混合及碰撞）液體及 氣體，有效率的將混合液滴細微化，並從喷嘴前端頭24 21 316658 1269667 合霧氣。此外’藉由在混合空間3。内的混合 二二化行一次細粒化，並於噴嘴前端頭，再進行 化’因此可藉由簡單的構造而有效― 。喷嘴前端頭並不限定於圖式之例子，可因應 而採用^當的構造（例如全錐型噴霧形式、矩形噴霧Η ^ 之 端頭。此外，噴嘴前端頭係以可裝卸的方^壯 構，並不限定於上述蓋及佯持哭 、出孔之女蚁機 等種種安裝構造。可採用例如螺合、嵌合 , 於貝紫構件的流路（包含混合空間）戋噴出孔 =端頭上，亦可配設用來更有效率的二= 之芯件。藉由配置芯件（e⑽），即使液體流* :口 = 效：低，亦可更有效率的使混合霧氣微細化:、二 可由能夠對流體賦予旋流之種種旋動手段，例：::：： 又形成於圓筒狀周面之旋動構件(旋；疋：： 板戎磬片签y榮、 , 正’爪構件（整流 成:-般而言:芯件=t(:料或咐^ λα , Α 次立、、、田化手&大多為具備與喷喈Μ杜 勺軸線（或混合霧氣的噴出 口、、 曲或折曲之非直線狀流路）者。）之*路（例如蛇行、彎 複數集流管與噴嘴構件之複數 少1個接合部可藉由炫接來接合，卜=間隙）中，至 用_妾合裝設。亦即，喷嘴構；係以非二 設於複數集流管。 Η 合接的形怨裝1269667 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a nozzle device (for example, a two-fluid nozzle device) which is useful for mixing and spraying different types of complex fluids (two-fluid gas and liquid, etc.) and spraying or spraying them. For example, a nozzle device (for example, a two-fluid nozzle device) and a nozzle member which are useful for processing a target object such as a semiconductor wafer or a liquid crystal substrate (cleaning treatment of a cleaned body). [Prior Art] | A method of spraying or spraying a mist of a mixture of air and water is known, and a method of injecting air and water into a nozzle and spraying a mist from a nozzle of a nozzle is known. . For example, Japanese Laid-Open Patent Publication No. 2510286 (Patent Document 1) discloses a two-fluid nozzle including: a gas supply pipe; a water supply pipe disposed inside the gas supply pipe; and a gas supply pipe spaced in the axial direction And a water supply pipe, and a nozzle mounting hole penetrating therethrough; a nozzle opening hole penetrating the opposite direction and inserting the fixed nozzle; and * forming the nozzle and connecting the gas supply pipe and the water supply The inside of the tube, and the inlet of each fluid that is opened. In this nozzle, gas and water are introduced into the nozzle through the introduction ports of the gas supply pipe and the water supply pipe, and are mixed in the mixing chamber in the nozzle to be sprayed from the discharge holes. A spray nozzle having a nozzle body having an air passage connected to a pressurized air supply source and a liquid passage connected to a liquid supply source is disclosed in Japanese Laid-Open Patent Publication No. 2002-96003 (Patent Document 2); a spray nozzle of a gas cap disposed at a downstream end of the nozzle body, wherein the gas cap is caused by colliding with a liquid from a liquid passage 5 316658 1269667 to a radial spleen * / abutting surface, In order to grasp the liquid conveyed in the direction of the 彺+ radial direction by the pressurized air _ ^ ^ > in the above-mentioned and the above:: to the opposite direction is disposed around the abutting surface, k expansion The angled discharge holes are connected, and the plurality of axial flow paths constitute the liquid flow path of the two outer bodies, and the liquid of the supply source is supplied to the nozzles to support the pressurized air supply of the nozzle main j. The liquid Μ inside π 贝 贝 贺 , , , , 贝 贝 贝 贝 贝 贝 贝 贝 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体 液体Introduce the pressurized air to make it fine in the middle: Conical spray shape with enlarged outer side (4) ^ Inner shape t gas:: In the spray nozzle, it is combined with the nozzle body (nozzle manifold). Therefore, it is necessary to mix the air and the water supply. It is necessary to mix the air and the water: the amount: only = becomes complicated, and the number of parts of the nozzle is increased, and it is difficult to increase the cost by the dazzle. In addition, since the main system of the nozzle is mixed with impurities, the resistance is generated: also = the official and the air supply pipe'. Therefore, even if the cleaning of the nozzle body is disassembled, it is difficult to perform maintenance (supply pipe and ?Lu Gazette t Kaizhao 63-248464) Bulletin (Japanese special fair 5-55193 to the longer middle t no, including: in the width of the object to be treated in the third manifold:; U is set on the back side of the first header and parallel direction The second second header is provided at a plurality of intervals in the longitudinal direction of the header 316658 6 1269667, and has a flow path communicating with the first and second headers, and before and after a nozzle introduction member that is fixed in the direction of the first header, wherein air is introduced into one of the two headers, and the liquid is introduced into the other header to form a two-fluid nozzle manifold. The tube includes a hollow cylindrical nozzle introduction member that penetrates the first header (air header) and faces the second header (liquid manifold) at the open end; and nozzle introduction that is attached to the first header side a nozzle of the material; and a nozzle formed in communication with the second header a hollow portion of the piece, which is connected to the liquid path for supplying the liquid to the nozzle; and communicates with the first header (air header), and extends from the middle portion of the nozzle introduction member to the air path of the nozzle. The liquid from the liquid path and the air from the air path are supplied to the nozzle, and the mixed liquid can be sprayed from the discharge hole of the nozzle. Further, since the first header and the second header are integrated Therefore, not only can the entire size and weight be reduced, but also the nozzle can be replaced at the tip end portion of the nozzle introduction member. Further, the first header and the second header can be freely positioned in the longitudinal direction. The sliding guide supporting the first header and the second collecting tube is slidably guided, whereby the replacement header can be easily replaced. However, the nozzle introduction member is welded to the first set by welding or the like. The flow tube and the second header are integrally fixed, and the first header and the second header are also fixedly integrated, so that the nozzle cannot be disassembled, and it is difficult to replace and maintain the nozzle introduction member (the header and the manifold) Cleaning of the nozzle introduction member, etc.) In addition, since it is difficult to replace the nozzle introduction member, since the opening end of the nozzle introduction member is opened in the second header, it is difficult to control the flow rate of the spray from the nozzle. Further, the nozzle introduction member is joined by welding. 7 316658 1269667 Combined with the first header and the second manifold, the ώ total A _ 嚷 tube and the first: Γ: ,, or by the splicing of the first song, and also in the ...:: wide one, then It is not only easy to collect the collecting tube. The inner surface of the welded portion of ...± ... generates an oxide film. - When the steam is generated, the workpiece is moved between the treated body and the nozzle, and the fluid is treated with In the case of ultrapure water, the vaporized film contaminates the high-purity flow, and the soil is treated with a high precision (especially, the liquid crystal substrate is required to be treated with a high-precision cleaning treatment). ～ 曰 曰 寺 要 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 =1 专利 专利 专利 专利 专利63_2484 Scope, Fig. 1) "Report (A patent) [Problem to be solved by the invention] Therefore, it is an object of the present invention to provide a not only a two-two pair of manifolds Nozzle device (two-fluid spray temple). Another object of the present invention is to provide a solid fog which can be uniformly processed to the object to be processed without the need to perform the fusion of the plurality of manifolds or the fusion of the header and the nozzle member. Process nozzle device (two-fluid nozzle device, etc.) Another object of the present invention is to provide a more 316658 8 1269667 = 2 header (gas manifold) 2 by means of a nozzle member; The length of the tube μ is formed at the second and second intervals, and is formed in the first and second headers, and is not connected to the first and second headers. Liquid liquid supply line la; "two = means to supply: gas supply means for The gas in the gas; co = ^, the liquid supply line and a gas supply line U two cases i.e., the first and second manifold Shang Bu 2 = bad shape, are connected. Further, the through-ports of the respective headers of the quadrangular cross-sections of the respective straight tubes of the respective headers are formed so as to penetrate the nozzle member 3 at the end portion. The end portion is closed and is outside the other end portion; = hole ' and the other side is formed in detail on the circumference of the thread portion 8. f, , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The nozzle of the female garment is attached to the nozzle of the female garment, and the hollow tubular spray of the flow tube 2 is installed in the middle, and is formed on the side end portion of the nozzle body 5. In this example, a nozzle tip end 4 is provided. The nozzle front end head 4; the second adapter) 6 and the cover (or adapter) 6 of the safety member 4 are mounted or secured "刖#. Further, at the front end portion of the nozzle front end head 4, the opening/end end of the groove 4a' is here In the groove, in front of the nozzle = D in the direction of the half-way. Only the axial portion is formed. Further, in the nozzle body 5, the nozzle tip end 4 side is formed with a size of 316658 13 1269667 than the plurality of headers, 2 The mouth also enters the above-mentioned mounting opening and is used to restrict the nozzle body 5 body 5 to close the closed end from the first; 隹: (10) as the head) 7. The nozzle main mouth is penetrated (or the nozzle tip end is collected) The mounting port of the tube 1 of the tube 2 passes through) the palm centering m is directed toward the ith current collector, the end portion _ end portion, and protrudes outward. 4 8 from the second header 2 The peripheral wall of the nozzle body 5 described above # f Η part is formed with a communication hole (liquid communication hole) 9 communicating with the inside of the second header;: ==== communication (four) through hole (air communication hole) two production road) 9'11 (4) through the flow path (liquid flow path and gas = 9 L to reach the nozzle outlet hole of the tip end of the mouth 4) (also shown in (4)), and the bamboo flow path reaches the mixing space The direction of the unlined line:::1 road 1〇 is: toward the downstream direction of the nozzle body 5 axis I main 彳I 'Ά, and as the flow from the flow path downstream, the 鹏 泣 贝 1 / : The inclined flow path is formed, and the gas communication hole 11 reaches the mixing space ' via the gas clearing path 12 , and the gas flow path is located closer to the inner side (the axial side) of the nozzle body 5 than the liquid 10 . Further, the flow path extending from the line direction (the gas flow path in which the inner diameter is gradually reduced) and the inclined flow path which is inclined on the inner side as it flows from the flow path in the downstream direction In this mixing space, the liquid from the liquid M communication hole 9 and the gas from the gas communication hole 11 are merged and mixed, and the mixed fluid mixed in the mixing space is from the nozzle tip end head 4 14 316658 1269667 The outlet hole t is ejected. In this example, the liquid flow path 10 and the gas flow path i2 are separated by an annular partition in the upstream region. Further, in this example, the gas and body communication holes 11 are formed. It is larger than the liquid communication hole 9. '...the nozzle body 5 is attached to the first header 1 and In the state of the female clothes opening of the second header 2, the joining (or the gap or the sealing portion) of each of the headers i and 2 and the nozzle body 5 causes the fastening force 13 by the fastening means 16 Sealed to 15°, that is, around the nozzle body 5, the flat portion between the set 1 1 and the second header 2 is provided with a ring-shaped close-up "7" to prevent the annular seal material. "The flat portion is expanded outward, and is expanded around the nozzle, and the flat portion between the restricting portion 7 and the first portion (the inner surface of the opposing portion of the first header 7) is formed. On the circumference of the FA-shaped recess or the annular notch of the FA, with the -% 岔 sealing material (0 ring) 13, in the protruding 丨 = sighing the other side of the edge - m, 2, the mouth body 5 China. Formed in the nozzle body 5, another === there is an annular sealing material (the snail 6 is used as a fixing means. By means of the threaded portion 8, the screw fastening force can be used to return the π A to the nut 10 The screw-in Τ will be integrated into the main body 5 of the solid body, and tightly seal each set: brother 2 ^ government joint (gap or seal). 2 and ° poor body 5 connected to the nozzle device ( The two-fluid nozzle member 3 penetrates through the second and second current collectors, and is simple in use, and can be made lighter. The other structure is such that the welding and the collecting tube are combined to form a complex set. The welding of the flow tube 2 3 prevents the generation of the 316658 15 1269667 wood-level official 1, 2 warpage and oxide film. Therefore, even a processed object requiring high precision processing such as a liquid crystal substrate or a semiconductor wafer is required. By performing the "cleaning" treatment, the object to be treated can be sprayed at a uniform spray flow rate while suppressing high-purity contamination, and can be removed by the sealing members 13, 15 and the fastening means 16. The mechanical combination of the first and second manifolds 2 and the nozzle member 3, This makes it possible to replace or disassemble the nozzle member 3 by the second and second headers, and it is easy to perform maintenance. Further, gas and liquid can be efficiently mixed in the mixing space of the shell body 5, so Z is from the nozzle tip 4 The microparticle-mixed mist is ejected from the ejecting holes, and the size of the liquid communication hole 9 and the gas communication hole u that are grasped in the first and second headers 2 and the nozzle tip end f are replaced by the nozzle body 5 The mask body (including the ejection hole) can be easily controlled with the nozzle body 5, and the nozzle mist can be easily controlled to be two. Even if the position of the mounting port in the plurality of current collectors f1 and 2 is accurate, the sealing member 13 to 15 can also be used. The position of the nozzle member 3 is accurately absorbed at the complex number: 1. 2, the nozzle member 3 is replaced. The wood machine g is used in the nozzle device of the present invention, and the number of the collecting tubes can be used to separately supply the plurality of fluids. tube). a long time wood / claw officer (that is, at least 2) and έ, in the complex header at least 2 侗隹ώ supply different kinds of fluid (such as gas in two manifolds in the flow tube Supply different kinds of fluids. For example, in the case of two rounds, 帛1 can be supplied separately; night _ as a liquid in a collecting tube) 'Dir (10) such as air). For the manifold: == 316658 16 1269667 The gas supply header may be disposed on the discharge port side of the nozzle member. In addition, different kinds of fluids (such as gases and liquids) can be supplied to the header from various directions, or the supply lines of various fluids can be coaxially connected to the respective headers, and from the respective headers. The end of the long side is supplied. For example, it may be supplied from the same direction in the liquid supply header and the gas supply header, or may be supplied from the opposite direction. Further, the gas and the liquid may be supplied from the direction in which the axial directions of the respective headers intersect. Φ For example, supply lines for various fluids are connected in a z-shaped configuration for each of the headers, and supply fluid from a direction intersecting the longitudinal direction of the header. The supply lines for the various fluids can also be connected to one or more places for each header. The collecting pipe is generally a hollow tubular shape, and the cross-sectional shape of the collecting pipe is not particularly limited, and may be a hollow polygonal shape (polygon shape such as a triangle, a quadrangle, a hexagon, an octagon, or the like), a hollow ellipse, or a hollow cylinder. Shape and so on. In order to easily form the mounting opening of the nozzle member and to improve the mountability of the nozzle member, it is preferable that the cross-sectional shape of the current collecting pipe is substantially parallel to each other. The flow rate and pressure of the fluid are not particularly limited in each of the headers, and may be selected depending on the type of the object to be treated and the flow rate of the spray. The mounting port may be formed by passing through the header, and in many cases, the opposing faces (or side walls) of the header are formed, in particular, parallel faces (side walls) opposed to each other. The shape of the mounting port is often the same as that of the nozzle member. However, when the gap is sealed by the sealing means, even if there is a gap between the mounting port and the nozzle member, the tightness can be surely tightly closed 17 316658 1269667 = This, even if the accuracy of the mounting port or the position accuracy of the women's mouth in the long side of the plurality of headers is not so high, the body leaks from the header. The flow prevention of Baiyi sheep, the mouth: is formed along the long side of the collecting pipe, and the extension line of the longitudinal direction of the collecting officer is dispersed (Example 1 ==Distributed setting) The direction of the long side of the flow tube = - knife U. Further, the mounting σ can be formed, for example, in a staggered manner in the longitudinal direction of the header. As long as the nozzle member can be mounted, and the spray from the nozzle member is two: the fluid of the header can be used, and the non-small-shaped fuse can be used, but the general configuration is substantially parallel. In the nozzle I of the present invention, at least the end portion and the middle portion of the (10) portion of the header tube can be fixed to the branch by means of a method of removing (=/, 疋王俨邱力 only 4 士, 乂...忐) 22: In order to improve the maintenance, it can also be installed as a loadable and unloading side 1 screw:: i4 structure is not limited to a variety of structures and mechanisms, such as a mouth, a structure, a fitting mechanism, a buckle mechanism or a hook The stop position of the discharge hole in the surrounding direction is stopped, and the mechanism for fixing the position and fixing is used, for example, to guide the end of the header; 2, the anti-off mechanism:), the stop action, etc. to limit the squirting _ spray: The member can be penetrated in the direction of the cross-flow or cross-over of the plurality of collectors and then cross-connected to the farmer's mouth in the direction of the long side of the plurality of headers. Shaped mouth. In addition, the 'nozzle members are mostly arranged at equal intervals, 316658 】 8 1269667 several collector tubes in the longitudinal direction, but they do not have to be installed at equal intervals, and can also be treated according to the object to be treated The type of the fluid to be sprayed, etc., is kept at intervals. Further, the interval of the nozzle members may be selected depending on the species, the type of the spray, and the flow rate of the sprayed body, for example, from about 1 G to about (e.g., from α to 300 mm). The nozzle member for passing through the plurality of headers includes a flow path that communicates with each of the manifolds, and a discharge hole for performing nozzle mist of a plurality of different types of fluids from the respective flow paths. Each flow path may be a single-flow path for guiding each fluid, or a plurality of flow paths. Specifically, in the side wall of the nozzle member, in the portion corresponding to each of the headers, a single- or a plurality of communication holes of the connection hole may be formed, and the shape of the communication hole is not particularly w' , oval, slender, etc. Further, the position and arrangement of the plural numbers of connections are not particularly limited, and may be arranged arbitrarily or in a regular manner. In the middle of the section, the nozzle of the nozzle member can be replaced by a nozzle body which is mounted on the plurality of headers and has a nozzle body of a different size and/or a gas communication hole. : In addition, it is easy to control the distribution of the flow rate by replacing the nozzle member. Therefore, the respective manifolds of the respective communication holes are the same or different. For the case of mixing liquid (water, etc.) and gas (air, etc.), the opening area (inner diameter, etc.) of the liquid and the two areas (inside, etc.) of the gas supply communication hole can be used to respond to liquids and gases. The flow rate of the flow hole is selected by the flow rate, the service flow, and the flow area of the communication hole (the inner opening is visible in the liquid). The gas supply connection hole 316658 19 1269667 The opening area (inner diameter, etc.) can also be small. In the present invention, the IA 乂 nozzle body is not necessarily required to be separately attached to each other: set::,::;:=: (or one end portion (front end portion) of the nozzle body is provided for spraying The solidification of the material: the spray hole of the mist, that is, the nozzle can be constituted by the nozzle member or the nozzle body. In order to improve the accuracy of the spray, the nozzle is generally connected to the nozzle body of the money flow tube and installed in the nozzle body. The main nozzle of the nozzle is formed by a nozzle tip end of the edge end portion (front end portion). The shape of the nozzle member or the nozzle hole of the nozzle is not particularly limited, and may be various shapes such as a polygon and a circle. Shape, ellipse, radial, etc. The nozzle member or the nozzle body may be constituted by a hollow homomorph that is open at the other end, but is mostly composed of a hollow cylindrical body whose other end is closed. It is also possible to provide the above-mentioned communication hole and a mixing space for mixing the fluid from the communication hole. + Spear 4 shows a partial cut-away side view of another nozzle device (two-fluid nozzle or _ jet nozzle device) of the present invention. In this case, formed in The communication hole of the peripheral wall of the nozzle member is directly connected to the mixing door without passing through the flow path, that is, in the same manner as described above, the through-holes formed in the second and second sets (or the through-holes) The nozzle member 23 composed of the nozzle tip end 24 and the nozzle body 25 is inserted through the nozzle tip end 24 by a cover (or adapter) 26 attached to one end of the nozzle body 25. In the vicinity of the first and second wooden tubes 2 1 and 22 in the peripheral wall of the nozzle body 25, the communication side and the first header (or liquid current collection) are formed in the same manner as described above. a communication hole (liquid connection 20 316658 1269667 v through hole) 29 in the pipe) 21, and a communication hole (air communication hole) 3 1 in the second header (or gas header) 22. As shown in the figure, the communication holes 29, 3 1 are connected to a mixing space 30 formed in the nozzle body 25 along the axial direction, and this mixing space is in turn connected to the ejection hole of the nozzle tip end 24. In the mixing space 30, the liquid from the liquid communication hole 29 and the gas from the gas communication hole 31 The mixed fluid which is mixed and mixed in the mixing space 30 is ejected from the discharge hole of the nozzle tip end 24. Further, around the nozzle body 25, a restriction portion formed on the nozzle tip end φ 24 side (or Between the head) 27 and the first header 21, between the first header 21 and the second header 22, and the other side of the nozzle body 25 that protrudes from the second header 2. Sealing members (0-ring or ring-shaped sealing members) 33 to 35 are disposed around the end portions. Further, in the outer peripheral portion of the sealing member 34 between the first header 21 and the second header 22, A positioning restricting member (metal ring or the like) 37 for restricting the movement of the sealing member 34 is disposed. The nozzle body 25 end is restricted by a restricting portion (or head portion) 27 formed on the nozzle tip end head 24 side. In the state in which the first header 23 and the second header 22 are invaded into the mouth, the screw portion 28 formed on the other end of the nozzle body 25 is screwed with a screw as a fastening means. Cap 36. The plurality of headers 21, 22 can be fixed by the fastening force of the fastening means and formed integrally with the nozzle member 23. In such a nozzle device, not only the same effects as described above can be obtained, but also the liquid and gas can be efficiently mixed (mixed and collided) in the mixing space 30 of the nozzle member 23 even if the structure of the nozzle member 23 is relatively simple. The mixed droplets are efficiently refined and fogged from the front end of the nozzle 24 21 316658 1269667. In addition' by the mixing space 3. The internal mixing is carried out in a fine granulation and at the tip of the nozzle, and then re-processed, so it can be effective by a simple construction. The tip end of the nozzle is not limited to the example of the figure, and can be used in accordance with the configuration (for example, the full-cone spray type, the end of the rectangular spray Η ^. In addition, the front end of the nozzle is detachable. It is not limited to the above-mentioned cover and various mounting structures such as a female ant machine that is crying or escaping. For example, it can be screwed or fitted, and the flow path (including the mixing space) of the shell-shaped member is 戋 ejector hole = end It can also be equipped with a core member for more efficient two. By configuring the core member (e(10)), even if the liquid flow*: port = effect: low, the mixed mist can be more refined: Second, various kinds of swirling means capable of imparting swirl to the fluid, for example::::: a rotating member formed on a cylindrical peripheral surface (rotating; 疋:: 戎磬 戎磬 片 y rong, positive 'claw Components (rectified to: - in general: core parts = t (: material or 咐 ^ λα, Α 立 立,,, Tianhua hand & most are equipped with the sneeze dash axis (or spray mist of mixed mist) , , or the non-linear flow path of the bend.) * The road (such as the snake, the curved complex header and the nozzle member) The number of joints can be joined by splicing, and the splicing can be used for splicing. That is, the nozzle structure is provided in the plurality of manifolds. Resentment
3】665S 22 1269667 於較理想的實施型態中，噴嘴構件係以非您 可更換地或裝卸地裝設於複數集流管。噴嘴構件可例 ‘密封狀態安裝於與複數集流管的長邊方向交叉:::如以 尤其，於噴嘴構件“數== 狀態可更換地或可裝卸地安心 ΓΓ 交又（尤其是直幻之方向形成之3 口。亦即，以密封材密封複數集 ：衣 合部中的至少！個接合部（較理想為全部貝接^^之，數接 大多為至少介裝於複數j于材 的密封作用，可藉由將接 ^材之钱部 部或頭部及喷嘴構件的限制部^接構件的端 _而達成’或如上述，將介褒於被橡膠 膠彈性體施以夹星而達成。 被山封構件之間的橡 種的密 合部)，可 劑等具備接著力之密封材、〇、：劑、(石夕二系填_ ^ 密封構件等。較理相的衣、襯塾等利用橡膠彈性之 部(接合部或間隙部;之密:材：:械性的裝― 各個集流管的外面中，雖膠彈性密封構件)。 與集流管之接合部可形成為彎曲^貝嘴構件（或嘴嘴主體） 地保持密封材且提高密封性：凹凸面，但為了穩定 坦面)。此外，於平坦部中二為：成為平坦部(或平 但是並不限定於面山#可為線接觸或面接觸， 一’、可構成為可收容密封材之凹部 316658 23 1269667 或溝（或缺口部）。 :夂官與噴嘴構件可藉由可拆解之種種一體化手 又疋可猎由緊固手段而結合為一體。緊 限於利用上述螺紋部1口手&亚不 賢ί51 # #隹、—* 1中目之‘接（或螺固），亦可採用可 及鉗之種種固定機構，例如鉚扣式緊固機構， 〜$ H!機構等。此外，緊固手段可 集流管之噴嘴構件中之至少一，真"β *置、貝通？又數 至 达编°卩，亦可設置於噴嘴構 ί通孔二：寺)：於另一邊端部上形成可鈎住安裝口或 —上的頭部或扣止部，亦可藉由上述緊固手段 來固定複數的集流管。 _ :發明的噴嘴裝置’即使於較低氣體壓力下流通氣 Γ;二可有效率的噴射混合氣體。氣體的塵力-般為_ a(例如〇.〇3至〇.8MPa)’較理想為〇 〇5至〇頂^， 更:里：為0.1至0.6MPa。此外，液體並不一定需要加壓， 一般係供應加黯體（或高㈣體），>1力為0·隨Pa以上 (例如0.05至2MPa，較理想為〇」至mpa)即可。再者， =明中二可提高氣體相對於液體之流量’而形成微細 、攻/ 。而氣體及液體的流量比（體積比例），可例如 體/液體（氣液體體積比）=5以上（例如為5至·’較理想^ 10至400，更理想為30至300)。 _於本發明的喷嘴裝置中，即使為單純的構造，亦可生 化的混合霧氣。霧氣粒子的粒徑係因氣體及液體的 流量等而有所變化，而平均粒徑（平均液滴徑）可為例如】〇 316658 24 1269667 較理想為30至150// m) 至500 // m(例如為2〇至3〇〇以n 左右。 來自於σ貫嘴構件的嘻中 日 •打丄 貝出孔之合流體（混合露氣），大 多為朝與集流管的長邊方6古一 V。務孔） 要，亦可朝集流管的圓周方、貝耵仁方名 外，、、日人、、☆卿r、日人° "或長邊方向斜向喷射。此 二：：：： :，)可從喷嘴構件往下方喷射或喷 =。Ή皮謂對象的位置而往斜向或上方喷射或喷 (產業上之可利用性） 本發明的喷嘴裝置（雙流 的用谇点以；本 、L月且貝焉衣置寺）可利用於種種 的用述例如被處理體的 穷機哭雨从AA 4 / ^干♦版日日囡或液晶基板等精 山铋為夺件的洗淨）、及被冷卻體的冷卻等。 [圖式簡單說明] 二:圖係顯示本發明噴嘴裝置(雙流體 為衣置）例之部分剖開側視圖。 、貝 f2圖係顯示第！圖所示之噴嘴裝置的概略。 弟3圖係顯示第1圖所示之噴嘴裝置的概畎部八二 側視圖。 慨各邓分剖開 弟4圖係顯示本發明之其他噴嘴裝 喷射噴嘴裳置）之部分剖_視@。 （“㈣嘴或 [主要元件符號說明] 316658 25 1 2 ^1、22集流管la液體供應管路 2 2a氣體供應管路 3、23噴嘴構件 4、24 噴嘴前端頭 4a 溝 1269667 5、25 噴嘴主體 7、27 限制部 9、11、29、31 連通孔 13 、 14 、 15 、 33 、 34 、 35 16、36 緊固手段（螺帽） 30 混合空間 6、26 蓋 8、28 螺紋部 10、12 流路 密封材（〇環） 17、37 環狀限制構件3] 665S 22 1269667 In a preferred embodiment, the nozzle members are mounted to the plurality of headers in a non-replaceable or removable manner. The nozzle member can be mounted in a sealed state in the direction of the long side of the plurality of headers:: in particular, in the case of the nozzle member "number == state replaceable or removably securely (and especially straightforward) The direction is formed by three ports. That is, the sealing set is sealed with a plurality of joints: at least one joint portion in the fitting portion (preferably all of the joints are connected, and the number is mostly at least in the plural j. The sealing action can be achieved by the end portion of the member or the head portion of the nozzle member and the nozzle member being connected to the member _ or, as described above, being applied to the rubber gel elastomer In addition, it is achieved by a sealing member of a rubber material between the mountain sealing members, a sealing material having an adhesive force, a sputum, an agent, and the like. Rubber-elastic parts such as linings (joints or gaps; dense: material: mechanically--the outer surface of each manifold, although rubber-elastic sealing members). The joint with the header can be Formed as a curved ^ beak member (or nozzle body) to maintain the sealing material and improve the sealing: uneven surface In addition, in the flat portion, the second portion is a flat portion (or flat but not limited to the surface mountain # may be a line contact or a surface contact, and may be configured as a recess for accommodating the sealing material. 316658 23 1269667 Or groove (or notch): The eunuch and the nozzle member can be combined by a detachable all-in-one hand and can be hunted by a fastening means. &African ί51 # #隹,—* 1 The middle of the 'connection (or screw), can also use a variety of fixed mechanisms of the clamp, such as rivet fastening mechanism, ~ $ H! mechanism. In addition, the fastening means can be at least one of the nozzle members of the collecting pipe, and the true "β*, Beton? can be counted up to the 卩°卩, or can be set in the nozzle structure 通通孔二:寺): The other end portion is formed with a head or a buckle portion that can be hooked to the mounting opening or the above, and the plurality of headers can be fixed by the above fastening means. _: The inventive nozzle device 'even at a lower gas Pressure downflow venting; second, efficient injection of mixed gas. The dust power of the gas is generally _ a (such as 〇 .〇3至〇.8MPa)' It is more desirable to be 〇〇5 to dome ^, more: Li: 0.1 to 0.6MPa. In addition, the liquid does not need to be pressurized, generally it is supplied with gargle (or high (4) (body), > 1 force is 0. With Pa or more (for example, 0.05 to 2 MPa, preferably 〇 to mpa). Furthermore, = Ming 2 can increase the flow rate of the gas with respect to the liquid, and form fine, Attack and /. Flow ratio of gas to liquid (volume ratio), for example, body / liquid (volume ratio of gas to liquid) = 5 or more (for example, 5 to · 'equivalent ^ 10 to 400, more desirably 30 to 300) In the nozzle device of the present invention, even if it is a simple structure, it is possible to biochemically mix the mist. The particle size of the mist particles varies depending on the flow rate of the gas and the liquid, and the average particle diameter (average droplet diameter) can be, for example, 〇316658 24 1269667 or more preferably 30 to 150//m) to 500 // m (for example, 2〇 to 3〇〇 is around n. The fluid from the σ 嘴 构件 • • 丄 丄 • • • • • • • • ( ( ( ( ( ( ( ( ( ( ( ( ( 合 合 合 合 合 合 合 合6 古一 V. 孔孔) If you want, you can also spray toward the circumference of the collecting tube, outside the name of Beibei Ren,, Japanese, ☆ qing, Japanese, and the long side. This two:::: :,) can be sprayed or sprayed from the nozzle member down. The squeegee is sprayed or sprayed obliquely or upwardly on the position of the object (industrial availability). The nozzle device of the present invention (the use of the double-flow point; this, L-month and Bellow-ji Temple) can be utilized for For example, it is described that, for example, the poor body of the object to be treated is crying from the AA 4 / ^ dry ♦ version of the Japanese 囡 or the liquid crystal substrate, such as the cleaning of the mountain, and the cooling of the object to be cooled. [Simple description of the drawings] II: The figure shows a partially cutaway side view showing an example of the nozzle device (two-fluid for clothes) of the present invention. , Bay f2 system shows the first! The outline of the nozzle device shown in the drawing. Fig. 3 shows a side view of the outline of the nozzle device shown in Fig. 1. The section of the figure 4 shows that the other nozzles of the present invention are mounted on the spray nozzles. ("(4) mouth or [main component symbol description] 316658 25 1 2 ^1, 22 header la liquid supply line 2 2a gas supply line 3, 23 nozzle member 4, 24 nozzle tip head 4a groove 1269667 5, 25 Nozzle body 7, 27 Restriction portions 9, 11, 29, 31 Communication holes 13, 14, 15, 33, 34, 35 16, 36 Fastening means (nuts) 30 Mixed space 6, 26 Cover 8, 28 Threaded portion 10 , 12 flow path sealing material (〇 ring) 17, 37 ring restriction member
26 31665826 316658