TWI269071B - Three-way filter - Google Patents

Three-way filter Download PDF

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TWI269071B
TWI269071B TW94125237A TW94125237A TWI269071B TW I269071 B TWI269071 B TW I269071B TW 94125237 A TW94125237 A TW 94125237A TW 94125237 A TW94125237 A TW 94125237A TW I269071 B TWI269071 B TW I269071B
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film
wavelength
matching
substrate
patent application
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TW94125237A
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TW200704978A (en
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E-Shang Changchen
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Asia Optical Co Inc
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Abstract

A three-way filter is disclosed, which includes a substrate, a main film formed on the substrate and transmissible for those among a first wavelength range of 1282 nm to 1582 nm and reflective for those of larger wavelength than 1600 nm, a first matching film inserted in between the substrate and the main film and with an averaging transmission loss no more than 1 dB among a second wavelength range of 1300 nm to 1550 nm, a second matching films stacked on the main film and having an averaging transmission loss no more than 0.5 dB both among a third wavelength range of 1290 nm to 1330 nm and a fourth wavelength range of 1530 nm to 1570 nm. The main film appears as a lamination structure of (6LH)M stacking outwards from the substrate along the direction that is perpendicular to the substrate, in which M is a positive integer and >= 25, H and L respectively are film layer of high and low refraction ratio having a depth of lambda0/4, and wavelength of lambda0 is between 1410 nm to 1450 nm.

Description

1269071 九、發明說明: 【發明所屬之技術領域】 本發明是有關於一種濾光片(f i 1 ter ),特別是指一種 三通道(channel)濾光片。 【先前技術】 在網際網路日益普及和高傳輸容量快速成長下,光纖 (optical fiber)通訊架構等傳輸方式,已開始進入時間多 工與波長多工相結合的波長多工通訊系統(Waveie叩让 Division Multiplexing ; WDM)時代,因此,利用光纖通 訊架構所構成的已成為數位時代不可或缺的必備工具 〇 常見的WDM用之濾光片大多是提供兩波段之分頻功效 的雙通道濾光片,例如,使1310 nm之波長產生穿透 (transmission)並使 1550 nm 的波長產生反射 (reflection) ’亦或是使1550 nm之波長產生穿透並使 1310 nm的波長產生反射。由於雙通道濾光片僅能一次提供 兩種訊號的分頻功效,因此,無形中便增加WDM於模組·上 的幾何設計限制。 此外,為降低WDM於模組上的幾何設計限制,亦有一 久可達到二種號之分頻功效的滤光片,例如,使131 〇 及1550 nm之波長產生穿透,並使1625 rm的波長產生反 射。然而,此種提供1310 nm及1550 nm之波長具穿透性 並使1 625 nm的波長呈反射性的三通道濾光片.(亦即, 13P15P16R三通道濾光片),則是依熟知此技術領域者的設 5 1269071 計而有所不同。 由上=,如何增加遽光片的分頻功效以降低讀於 ^ 4何設計的限制條件,並料㈣合削5⑽ 之使用標準的三通道濾光片, 常見的研究課題。 ……光片相關領域 【發明内容】 ^此’本發明之目的,即在提供—種三通道濾、光片, 特別疋指-種增加濾'光片的分頻功效以降⑯麵於模组上 =幾何設計的限制條件,並符合13pi5mR之使用標準的 二通道遽光片。 於是,本發明三通道遽光片,包含:一基板、一形成 於該基板上的主H置於絲板與該主膜之間的第一 匹配膜,及一疊置於該主膜的第二匹配膜。 該主膜沿一垂直於該基板且自該基板朝外的堆疊方向 疋呈(6LH)的層狀結構,其中,Μ為一正整數,且 ,Η是一厚度為L/4的高折射率(refractive ιηά6χ)膜層, L疋一厚度為;^以4的低折射率膜層,l是一介於14丨〇 nm至 1450 nro之間的波長。該(6LH)M的層狀結構致使該主膜對一 介於1282随至1582 nm之第一波長範圍呈一穿透性,且 對大於1 600 nm之波長呈一反射性。 該第一匹配膜於一介於1 300 nm至1550 nm之第二波 長範圍的平均穿透哀減值(averaging transmiSsi〇n l〇ss ’間寫為TLavg)分別是不大於1 dB。 該第二匹配膜致使該主膜夾置於該第一及第二匹配膜 1269071 之間’且该第二匹配膜於一介於1290舰至1330 之第 二波長範圍及一介於1530 nm至1570 nm之第四波長範圍 的平均穿透衰減值分別是不大於〇.5 dB。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效,在 以下配合參考圖式之一個較佳實施例的詳細說明中,將可 清楚的呈現。1269071 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a filter (f i 1 ter ), and more particularly to a three-channel filter. [Prior Art] With the increasing popularity of the Internet and the rapid growth of high transmission capacity, optical fiber communication architectures and other transmission methods have begun to enter the wavelength multiplex communication system combining time multiplexing and wavelength multiplexing (Waveie叩) In the era of Division Multiplexing; WDM), the use of fiber-optic communication architecture has become an indispensable tool for the digital era. Most common filters for WDM are dual-channel filters that provide two-band crossover efficiency. The film, for example, causes a transmission at a wavelength of 1310 nm to cause a reflection at a wavelength of 1550 nm, or a breakthrough at a wavelength of 1550 nm and a reflection at a wavelength of 1310 nm. Since the dual-channel filter can only provide the crossover effect of the two signals at one time, the geometric design limitation of the WDM on the module is invisibly increased. In addition, in order to reduce the geometric design limitations of WDM on the module, there is also a filter that can achieve the crossover effect of two types, for example, to make the wavelengths of 131 〇 and 1550 nm penetrate and make 1625 rm The wavelength produces a reflection. However, this is a three-channel filter that provides a wavelength at 1310 nm and 1550 nm and is reflective at a wavelength of 1 625 nm (ie, 13P15P16R three-channel filter). The technical field of the 5 1269071 is different. From top =, how to increase the crossover efficiency of the calender to reduce the constraints of reading the design of the 4, and (4) to cut 5 (10) using the standard three-channel filter, a common research topic. ......Light-related field [Summary of the invention] ^This object of the present invention is to provide a three-channel filter, a light film, and in particular a finger-type increase filter 'light film's frequency dividing effect to reduce 16 faces in the module Upper = geometric design constraints, and meets the standard of 13pi5mR two-channel calender. Therefore, the three-channel calendering sheet of the present invention comprises: a substrate, a first matching film formed on the substrate by the main H placed between the silk plate and the main film, and a stack of the main film disposed on the main film Two matching membranes. The main film is a layered structure (6LH) along a stacking direction perpendicular to the substrate and facing outward from the substrate, wherein Μ is a positive integer, and Η is a high refractive index with a thickness of L/4. (refractive ιηά6χ) film layer, L 疋 a thickness of; ^ with a low refractive index film layer, l is a wavelength between 14 丨〇 nm and 1450 nro. The layered structure of (6LH)M causes the main film to be transparent to a first wavelength range of 1282 to 1582 nm and to a wavelength greater than 1 600 nm. The first matching film has an average penetration mitigation value (written as TLavg between averaging transmiSsi〇n l〇ss ') of a second wavelength range of 1 300 nm to 1550 nm, respectively, of not more than 1 dB. The second matching film causes the main film to be sandwiched between the first and second matching films 1268071 and the second matching film is in a second wavelength range from 1290 to 1330 and a distance between 1530 nm and 1570 nm. The average penetration attenuation value of the fourth wavelength range is not more than 〇.5 dB. The above and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

芩閱圖1,本發明三通道濾光片的一較佳實施例,包含 基板2、一形成於該基板2上的主膜3、一夾置於該基 板2與该主膜3之間的第一匹配膜4,及一疊置於該主膜3 的第二匹配膜5。 、 ^該主膜3沿一垂直於該基板2且自該基板2朝外的堆 且方向P是呈一(6LH)M的層狀結構,其巾為一正整數, 且M=25。该(61^)"的層狀結構致使該主膜3對一介於1282 nm至1582 nm之第一波長範圍呈一穿透性,且對大於丨6〇〇 ㈣之波長呈一反射性。在該較佳實施例中,%等於μ,亦 即,5亥主膜3之(6LH)M的層狀結構為(6LH)25。 、、f弟一匹配膜4於一介於nm至1 550 nm之第二 f長耗15的平均穿透衰減值分別是不大於1 dB。在該較名 Γ施例中,該第—匹配膜4於該第二波長範圍的平均穿i| :減值疋介於1仳至°·3 dB之間,且該第-匹配膜4 “堆疊方向Ρ是呈—8Η6職5Η的層狀結構。 該第二匹配膜5致使該主膜3夾置於該第一及第二匹 配《 4、5之間,且該第二匹配臈5於一介於129卜至 1269071 1330 nm之第三波長範圍及—介於i53G⑽至㈣⑽之第 四波長範圍的平均穿透衰減值分別是不大於0.5 dB。在該 較佳實施例中,該第二匹配膜5於該第三及第四波長範圍 ^均穿透衰減值分別是介於〇 5 dB i 〇 2仙之間。且 5亥第二匹配膜沿該堆疊方向P是呈一 2LHLH2L4H3LH2L2H4L 的層狀結構。 古在該等膜3、4、5的層狀結構中,Η是—厚度為;u/4的 :折射率膜層,L是-厚度為W4的低折射率膜層,人。是一 410 nm至1450 nm之間的波長。適用於本發明三通 道遽光片的入。是-介於141〇nm至145〇μ之間的波長;更 佳地’該λο的波長是介於141〇 nm至142〇 M之間,且高、 低折射率膜層的折射率是分別介於21至2 7之間及138 至1.44之間。在該較佳實施例中,該λβ的波長是鼎⑽ 該高、低折射率膜層分別是氧化组(tantalum oxide) 及氧化碎(silicon oxide)。 、由前所述’該較佳實施例之該等膜4、3、5的層狀結 構化,亥豐置方向P依序為:基板/8H6LH2L5H /(6LH)25 /2LHLH2L4H3LH2L2H4L /空氣。 參閱圖2,由該主膜3在(6LH)25的層狀結構下之平均穿 透哀減曲線顯示,該主膜3雖然對該第_波長範圍(亦即, 1282 nm〜1582 nm)呈現穿透性,且M等於25致使該主膜 對16 2 5 nm之波長呈現反射性,然而,該主膜3於該第一 波長範圍的平均穿透衰減曲線是呈不穩定的走勢。 另外,參閱圖3,由該第一匹配膜4在8H6LH2L5H的層 1269071 狀結構下之平均穿透衰減曲 弟一波長範圍(亦即, 值是小於ldB。 線顯示,該第一匹配膜4於該 nm〜1550 nm)的平均穿透衰減 一’ 經由圖2及圖3疊加後的平均穿透衰減曲線 顯不’該第一匹配m 4:於該第-波長範圍内對該主膜3提 供-平均穿透衰減的初丨步補償,以致使該主膜3及該第— 匹配膜4經豐加之後的平均穿透衰減曲Referring to FIG. 1, a preferred embodiment of the three-channel filter of the present invention comprises a substrate 2, a main film 3 formed on the substrate 2, and a sandwich between the substrate 2 and the main film 3. The first matching film 4, and a second matching film 5 placed on the main film 3 are stacked. The main film 3 is in a layered structure of a (6 LH)M along a stack perpendicular to the substrate 2 and facing outward from the substrate 2, the towel being a positive integer, and M=25. The layered structure of (61^)" causes the main film 3 to be transparent to a first wavelength range of 1282 nm to 1582 nm and to be reflective to a wavelength greater than 丨6〇〇 (4). In the preferred embodiment, % is equal to μ, that is, the layered structure of (6LH)M of the 5th main film 3 is (6LH)25. The average penetration attenuation value of the matching film 4 in a second f of 15 nm to 1 550 nm is not more than 1 dB. In the comparative example, the average wear ratio of the first matching film 4 in the second wavelength range: the subtraction 疋 is between 1 仳 and °·3 dB, and the first matching film 4 The stacking direction Ρ is a layered structure of - 8 Η 6 Η 5 。. The second matching film 5 causes the main film 3 to be sandwiched between the first and second matching "4, 5, and the second matching 臈 5 A third wavelength range between 129 b and 1269071 1330 nm and an average penetration attenuation value between the fourth wavelength range of i53G (10) to (4) (10) are no greater than 0.5 dB, respectively. In the preferred embodiment, the second match The average penetration attenuation value of the film 5 in the third and fourth wavelength ranges is between 〇5 dB i 〇2 sen, and the second matching film of the 5 hai is a layer of 2LHLH2L4H3LH2L2H4L along the stacking direction P. In the layered structure of the films 3, 4, and 5, the thickness is: u/4: a refractive index film layer, and L is a low refractive index film layer having a thickness of W4, which is a wavelength between 410 nm and 1450 nm. Suitable for the incorporation of the three-channel calender sheet of the present invention. - a wavelength between 141 〇 nm and 145 〇 μ; more preferably 'the λ ο wave The difference between the high and low refractive index film layers is between 21 and 27 and between 138 and 1.44. The wavelength of λβ is Ding (10). The high and low refractive index film layers are respectively a tantalum oxide and a silicon oxide. The films 4, 3, and 5 of the preferred embodiment are described above. The layered structure, the Hefeng direction P is sequential: substrate / 8H6LH2L5H / (6LH) 25 /2LHLH2L4H3LH2L2H4L / air. Referring to Figure 2, the average film 3 under the layered structure of (6LH) 25 The revealing curve shows that the main film 3 exhibits penetrability to the first wavelength range (ie, 1282 nm to 1582 nm), and M equals 25, so that the main film is reflective to the wavelength of 16 25 nm. However, the average penetration attenuation curve of the main film 3 in the first wavelength range is unstable. In addition, referring to FIG. 3, the average wear of the first matching film 4 under the layer 1268071 structure of 8H6LH2L5H Through-attenuation of a wavelength range (ie, the value is less than ldB. The line shows that the first matching film 4 is at the nm~1550 nm) The average penetration attenuation - 'the average penetration attenuation curve after superimposition via FIG. 2 and FIG. 3 is not 'this first match m 4 : the initial - average penetration attenuation is provided to the main film 3 in the first wavelength range Step compensation so that the average penetration attenuation of the main film 3 and the first matching film 4 after abundance is increased

133j nm及1 530 nm〜1570 nm)内的平均穿透衰減值尚無 去苻合1310 nm及1550 nm兩種訊號的傳輸標準。 經圖4說明後,配合參閱圖5,由該第二匹配膜5在 職饥4觀212紙的層狀結構下之平均穿透衰減曲線顯 示’該第二匹配膜5於該第三、四波長範圍的平均 減值皆小於0.5 dB。 因此,參閱圖6,經由圖4及圖5疊加後的平均穿透衰 減曲線顯示,該第二匹配m 5於該第三、四波長範圍内分 二對該主《 3及該第-匹配膜4提供—平均穿透衰減的精 密補償,以致使該主膜3、該第一匹配膜4及該第二匹配膜 5經疊加之後的平均穿透衰減曲線可符合131〇 nm及丨55〇 nm兩種訊號的傳輪標準。 此外,前面亦已提及,藉由Μ等於25致使該主膜3對 1625 nm之波長呈現反射性,因此,本發明三通道濾光片的 平均穿透衰減曲線是可以符合13P.15P16R等三種訊號的傳 輸標準。 9 1269071 综上所述’本發明三通道濾光片可同時提供l31〇 nm、 1 550 nm及1 625 nm等三種訊號的分頻功效(13pi5pi6R), 因此,不但適合用於WDM模組,亦降低肋m於模組上之幾 何設計的限制條件,並具有符合13pi5pi6R之使用標準等 特點,確實達到本發明之目的。 淮以上所述者,僅為·本發明之較佳實施例而已,當不 能以此限定本發明實施之範圍’即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾,皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一正視示意圖, 較佳貫施例; 說明本發明三通道濾光片的一 主膜之平均穿透衰減曲線; 平均穿透衰減曲線圖,說明該較佳實施例 / 3是—平均穿透衰減曲線圖,說明該較佳實施例的 弟-匹配膜之平均穿透衰減曲線; 圖4是圖2及圖3經疊加之後的平均穿透衰減曲線圖 ’說明該較佳實施例的 及 圖5是—平均穿透衰減曲線圖 第二匹配膜之平均穿透衰減曲線; 經疊加之後的平均穿透衰減曲線圖 圖6是圖4及圖5 10 1269071 〜 【主要元件符號說明】 _ 2*…·.……基板 5.·..…·…第二匹配膜 3.………·主膜 P...........堆疊方向 4…•……第一匹配膜The average penetration attenuation values in 133j nm and 1 530 nm to 1570 nm) have not been combined with the transmission standards of 1310 nm and 1550 nm. After the description of FIG. 4, referring to FIG. 5, the average penetration attenuation curve of the second matching film 5 under the layered structure of the hunger 4 view 212 paper shows that the second matching film 5 is at the third and fourth wavelengths. The average impairment of the range is less than 0.5 dB. Therefore, referring to FIG. 6, the average penetration attenuation curve after superimposition according to FIG. 4 and FIG. 5 shows that the second matching m 5 is divided into the third and fourth wavelength ranges to the main "3" and the first matching film. 4 providing - precision compensation of the average penetration attenuation, so that the average penetration attenuation curve of the main film 3, the first matching film 4 and the second matching film 5 after superposition can be consistent with 131 〇 nm and 丨 55 〇 nm The pass standard for both signals. In addition, as mentioned above, by Μ equal to 25, the main film 3 is reflective to a wavelength of 1625 nm, and therefore, the average penetration attenuation curve of the three-channel filter of the present invention can meet three kinds of 13P.15P16R and the like. Signal transmission standard. 9 1269071 In summary, the three-channel filter of the present invention can simultaneously provide the frequency division effect (13pi5pi6R) of three signals such as l31〇nm, 1 550 nm and 1 625 nm, so it is not only suitable for WDM modules, but also It reduces the limitation of the geometric design of the rib m on the module, and has the characteristics of meeting the use standard of 13pi5pi6R, and indeed achieves the object of the present invention. The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front elevational view, preferably a preferred embodiment; illustrating an average penetration attenuation curve of a main film of a three-channel filter of the present invention; an average penetration attenuation curve illustrating the preferred implementation Example / 3 is an average penetration attenuation curve illustrating the average penetration attenuation curve of the preferred embodiment of the preferred embodiment; FIG. 4 is an average penetration attenuation curve after the superposition of FIG. 2 and FIG. The preferred embodiment and FIG. 5 are the average penetration attenuation curve of the second matching film of the average penetration attenuation curve; the average penetration attenuation curve after the superposition is shown in FIG. 4 and FIG. 5 10 1269071~ Explanation of main component symbols] _ 2*...·.......substrate 5.·.....·...Second matching film 3........·Main film P...........Stacking direction 4... •......first matching film

1111

Claims (1)

l269〇7i 十、申請專利範圍: 1 · 一種三通道濾光片,包含·· 一基板; 一形成於該基板上的主膜,沿一垂直於該基板且 自該基板朝外的堆疊方向是呈一(6LH)M的層狀結構,其 中,Μ為一正整數,,$Μ^25,Η是一厚度為入。/4的高 、 折射率膜層,L是一厚度為λ()/4的低折射率膜層,λϋ是 | ;丨於141〇 Μ至145 0 nm之間的波長,該(6LHy的層 狀結構致使該主膜對一介於1282 至1 582 之第一 波長範圍呈一穿透性,且對大於1 600 run之波長呈一反 射性; 一爽置於該基板與該主膜之間的第一匹配膜,於 "於1 30 0 nro至1 550 nm之第二波長範圍的平均穿透 衰減值分別是不大於1 dB ;及L269〇7i X. Patent application scope: 1 · A three-channel filter comprising: a substrate; a main film formed on the substrate along a stacking direction perpendicular to the substrate and facing outward from the substrate A layered structure of one (6LH)M, wherein Μ is a positive integer, $Μ^25, Η is a thickness of in. /4 high, refractive index film layer, L is a low refractive index film layer with a thickness of λ()/4, λϋ is | ; 丨 between 141〇Μ and 145 0 nm, the layer of 6LHy The structure causes the main film to be transparent to a first wavelength range of 1282 to 1 582 and to be reflective to a wavelength greater than 1 600 run; a cooling between the substrate and the main film The first matching film has an average penetration attenuation value of not more than 1 dB in the second wavelength range of 1 30 0 nro to 1 550 nm; 、 42置於該主膜的第二匹配膜,致使該主膜夾置 ;σ亥第及第一匹配膜之間,該第二匹配膜於一介於 ^90 nm至1 330 nm之第三波長範圍及一介於153〇 nm 至1 570 nm之第四波長範圍的平均穿透衰減值分別是不 大於〇· 5 dB。 、依據申請專利範圍第1項所述之三通道滤光片 “的波長是介於1410_至142〇_之間。 據申請專利範圍第2項所述之三通道濾光片 ϋ亥入。的波長是1417 nm。 其中, 其中, 4·依據申請專利範圍第3 項所述之三通道濾光片 其中, 12 126907! ^第一匹配膜於該第二波長範圍的平均穿透衰減值是介 ;至〇· 3 dB之間,該第二匹配膜於該第三及第四 波長旄圍的平均穿透衰減值分別是介於〇·5 dB至〇,2 之間。And a second matching film disposed on the main film, such that the main film is sandwiched; between the first matching film and the first matching film, the second matching film is at a third wavelength between ^90 nm and 1 330 nm. The range and the average penetration attenuation value of a fourth wavelength range from 153 〇 nm to 1 570 nm are not more than 〇·5 dB, respectively. The wavelength of the three-channel filter according to item 1 of the patent application range is between 1410 and 142 〇. The three-channel filter according to item 2 of the patent application scope is immersed. The wavelength of the wavelength is 1417 nm. Among them, 4 · According to the three-channel filter described in the third paragraph of the patent application, 12 126907! ^ The average penetration attenuation value of the first matching film in the second wavelength range is Between 3·3 dB, the average penetration attenuation of the second matching film at the third and fourth wavelength ranges is between 〇·5 dB and 〇, 2, respectively. t據申凊專利範圍第4丨項所述之三通道濾光片 Μ等於25。 其中,t The three-channel filter Μ according to item 4 of the scope of the patent application is equal to 25. among them, 依據申請專利範圍第5項所述之二通道濾'光片,", =第—匹配膜沿該㈣方向是呈—8Η6舰5 構,該…配膜沿該堆疊方…狀: 2LHLH2L4H3LH2L2H4L 的層狀結構。 依據申請專利範圍第6項所述之三通道據光片…, 该向折射率膜層是氧㈣,該低折射率膜層是氧化石夕。According to the two-channel filter 'light sheet described in item 5 of the patent application scope, ", = the first matching film is in the direction of (4) is -8Η6 ship 5 structure, the ... film is along the stacking side... like: 2LHLH2L4H3LH2L2H4L Layered structure. According to the three-channel light-receiving sheet described in claim 6 of the patent application, the refractive index film layer is oxygen (tetra), and the low-refractive-index film layer is oxidized stone. 1313
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